CN1611304A

CN1611304A - Slit nozzle

Info

Publication number: CN1611304A
Application number: CNA2004100951959A
Authority: CN
Inventors: 大渊一人; 升芳明
Original assignee: Tokyo Ohka Kogyo Co Ltd
Current assignee: Ameco Technology Co ltd; Process Equipment Business Division Preparation Co ltd
Priority date: 2003-10-27
Filing date: 2004-10-27
Publication date: 2005-05-04
Anticipated expiration: 2024-10-27
Also published as: JP2005152885A; KR101146029B1; TW200529929A; CN100500302C; KR20050040110A

Abstract

The invetion provided a slit nozzle which makes it less liable to easily drop the flow rate of a coating liquid at both ends. The slit nozzle 1 is composed of right and left halves 2 and 3. The mating face of the half 2 is made flat and a manifold 4 extending in the longitudinal direction is formed in the center of the other half 3. The section 5 superior to the manifold 4 is used as the mating face with the half 2. The section 6 inferior to the manifold 4 is recessed by grinding the inferior section 6 more than the superior section 5, so that a gap is formed between the half 3 and the mating face of the half 2. The gap is made to have the same size as the width W of an outlet 7 of the slit nozzle. Furthermore, both the ends of the slit nozzle 1 are sealed liquid-tight with side plates 8 and 9. The side plates 8 and 9 are made of a water-repellent material like a resin, or the reverse faces of the side plates 8 and 9 with which the halves 2 and 3 are mated are coated with the water-repellent material.

Description

Gap nozzle

Technical field

The present invention relates on object being treated surfaces such as glass substrate, semiconductor wafer with the Rack coating as photoresist liquid with become the gap nozzle of the coating fluid of colour filter.

Background technology

Fig. 4 is the view of pith of the existing gap nozzle of expression, in existing gap nozzle, make pad 13 between about the interface of halfbody 11,12 on and use bolted joints.In this case, the width dimensions W of slit-shaped ejiction opening 14 depends on the thickness of pad 13.But it is limited accurately processing pad 13, so be difficult to the correct width dimensions of setting ejiction opening 14.

Therefore, can consider gap nozzle, but pad is in order to prevent leakage from the side without pad, so, need the side plate that be used to prevent leakage be installed in the two side ends of nozzle.This structure is disclosed on the patent documentation 1～6.

In the gap nozzle shown in the patent documentation 1～3, side plate directly is installed in the nozzle body side.And in the gap nozzle shown in the patent documentation 4,5, between side plate and nozzle body side, be provided with diaphragm seal or liner.

And, such nozzle is disclosed in patent documentation 6, promptly on the concetrated pipe open side of nozzle body, embed small-sized bolt, in its outside side plate is installed, and then the partition (pad) that the A/F of nozzle is made with fluororesin is adjusted.

The open P-3105161 of [patent documentation 1] Japan Patent

[patent documentation 2] Japanese Patent Application Publication JP-2000-33312

[patent documentation 3] Japanese Patent Application Publication JP-2000-70817

[patent documentation 4] Japanese Patent Application Publication JP-2002-86045

The open JP-2981873 of [patent documentation 1] Japan Patent

[patent documentation 1] Japanese Patent Application Publication JP-2002-361150

In prior art 1～5 described gap nozzle, reduced the flow velocity of coating fluid because of the part that is connected with the diaphragm seal (liner) of being located at side plate or side plate inboard, therefore, length direction from the coating liquid measure of slit-shaped ejiction opening ejection along nozzle becomes inhomogeneous, and it is not enough that the spouting liquid at both ends becomes easily.

And, in prior art 6, because pad is by the hydrophobic fluorine resin manufacture, thereby reduce at the coating fluid flow velocity at the part place that contacts with this pad and to be inhibited, but the concetrated pipe end of its upstream side is stopped up with different parts with slit end, therefore when the nozzle length direction changes, must regulate parts separately, this is very bothersome.

And, occurred with side plate thickness different and to the ejection of the coating fluid of the substrate ejection also different phenomenon that distributes.

Summary of the invention

The gap nozzle of the present invention that solves above-mentioned problem is engaged by left and right sides halfbody and forms and have such structure, promptly form the recess of decision slit-shaped ejiction opening width dimensions on the interface of at least one halfbody in the halfbody of the left and right sides, and on the two ends of gap nozzle, side plate is installed, the lateral opening that this side plate sealing is formed by above-mentioned recess, and this side plate is hydrophobic material or the above-mentioned at least lateral opening part that covers close lid side plate with hydrophobic material.

The thickness of the side plate near the side plate ejection side of inaccessible slit-shaped ejiction opening is machined into such degree, and promptly ejection distributes does not have difference.

According to the present invention, it is hydrophobic that the both ends of slit-shaped ejection stream are made into, and the coating fluid flow velocity that can suppress the stream both ends thus reduces, thereby can obtain even be coated with and thickness is filmed uniformly.

Description of drawings

Fig. 1 represents to use the apparatus for coating side view of relevant the 1st explanation gap nozzle;

Fig. 2 represents the stereogram of this gap nozzle;

Fig. 3 represents the exploded perspective view of this gap nozzle;

Fig. 4 represents existing gap nozzle pith enlarged drawing;

Fig. 5 represents the side view of relevant the 2nd invention gap nozzle;

The side plate pith enlarged drawing of gap nozzle shown in Fig. 6 presentation graphs 5;

Fig. 7 represents to spray distribution map with the gap nozzle ejection distribution of side plate of the present invention with the gap nozzle that has side plate now.

The specific embodiment

According to accompanying drawing embodiments of the invention are described below.Fig. 1 is the side view that adopts according to the apparatus for coating of gap nozzle of the present invention, Fig. 2 is the stereogram of this gap nozzle, Fig. 3 is the exploded perspective view of this gap nozzle, gap nozzle 1 is supported by the framework 20 of energy horizontal movement and elevating movement, be provided with liquid-feeding pump 21 on an end of framework 20, coating fluid is sent to this liquid-feeding pump and is fed to gap nozzle 1 from liquid-feeding pump 21 by supply pipe 23 through supply pipe 22 from the coating liquid bath.In addition, slit sensor 24 is installed on the side of gap nozzle 1.

Gap nozzle 1 is made of left and right sides halfbody 2,3, the interface of a halfbody 2 is set at the plane, simultaneously, on the centre position of another halfbody 3, be formed with the concetrated pipe 4 that extends along its length, part 5 above concetrated pipe 4 forms the composition surface that engages with halfbody 2, part 6 below concetrated pipe 4 is ground more and retreats than upper section 5, and and the interface of halfbody 2 between form the gap, this gap becomes the width dimensions W of the ejiction opening 7 of gap nozzle.

In addition, under the state that engages left and right sides halfbody 2,3, on the left and right side, the side end of concetrated pipe 4 and ejiction opening 7 has opening, so, with the described opening of side plate 8,9 liquid-tight ground sealing.

In the present invention, constitute side plate 8,9 by hydrophobic materials such as resins, perhaps with medial surface that the same halfbody 2,3 of side plate 8,9 engages on apply hydrophobic layer.Side plate the 8, the 9th, processing like this, promptly near the thickness the ejiction opening 7 of gap nozzle is that 0.1～1.0mm (is preferably below the 0.5mm more preferably 0.1～0.3mm).

Like this, owing to use the opening of hydrophobicity parts obstruction towards ejiction opening 7 sides of gap nozzle, thus can significantly not reduce the coating fluid flow velocity at both ends, so can evenly be coated with.Specifically, viscosity is that the photoresist of 5cp forms thick the filming of 1.5 μ m according to coating weight 1000 μ l/sec under 23 ℃ of temperature.At this moment the reducing of both sides thickness is improved to the degree of 0.1 μ m at least adopting under the situation of gap nozzle of the present invention, and is 0.3 μ m when adopting existing gap nozzle.

By the thickness of drafting board 8,9 is processed into 0.1～1.0mm (be preferably below the 0.5mm, more preferably 0.1～0.3mm), the ejection in the substrate end distributes and improves.Though being processed to 0.1～1.0mm, whole side plate thickness (is preferably below the 0.5mm, more preferably 0.1～0.3mm) can not proof strength, but only process and make it to become 0.1～1.0mm near the ejiction opening and (be preferably below the 0.5mm, more preferably 0.1～0.3mm), thus one, in as side plate also proof strength, ejection distributes and has also improved as illustrated in fig. 7.

Gap nozzle of the present invention can be used to width in accordance with regulations to surperficial painting photoresist, sog solution or the colour filter of glass substrate and the semiconductor wafer device with coating fluid.

Claims

One kind in accordance with regulations width on the surface of object being treated, be coated with the gap nozzle of coating fluid, it is characterized in that, this gap nozzle is engaged by left and right sides halfbody and forms, form the recess of the width dimensions of decision slit-shaped ejiction opening on the interface of at least one halfbody in the halfbody of the described left and right sides, and on the two ends of lid gap nozzle, side plate is installed, the lateral opening that described side plate sealing is formed by above-mentioned recess, and this side plate is hydrophobic material, and perhaps this side plate covers with hydrophobic material near the part of above-mentioned lateral opening at least.
One kind in accordance with regulations width on the surface of object being treated, be coated with the gap nozzle of coating fluid, it is characterized in that, this gap nozzle is engaged by left and right sides halfbody and forms, form the recess of the width dimensions of decision slit-shaped ejiction opening on the interface of at least one lid halfbody in the halfbody of the described left and right sides, and on the two ends of this gap nozzle, side plate is installed, the lateral opening that described side plate sealing is formed by above-mentioned recess, and this side plate nearby has the width of 0.1～1.0mm in the top ends of this slit-shaped ejiction opening.