CN103736606A - Integrated outgoing flow channel structure process nozzle - Google Patents
Integrated outgoing flow channel structure process nozzle Download PDFInfo
- Publication number
- CN103736606A CN103736606A CN201310719283.0A CN201310719283A CN103736606A CN 103736606 A CN103736606 A CN 103736606A CN 201310719283 A CN201310719283 A CN 201310719283A CN 103736606 A CN103736606 A CN 103736606A
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- plate body
- nozzle
- manufacturing process
- integrated form
- slit
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
- B05B1/044—Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
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- General Physics & Mathematics (AREA)
- Nozzles (AREA)
Abstract
An integrated outgoing flow channel structure process nozzle comprises a nozzle main body and a first plate body, wherein the nozzle main body is provided with an accommodating groove, and the first plate body is provided with an outgoing flow channel. The first plate body and the nozzle main body are oppositely arranged to seal the accommodating groove to form a cavity, the nozzle main body is provided with a liquid supply channel communicated with the cavity, the first plate body is laterally arranged, the outgoing flow channel comprises a vertical outflow slit and a plurality of horizontal blind holes for spraying liquid, the outer ends of the blind holes are connected with the cavity, the inner ends of the blind holes are connected with the outflow slit, and the lower end of the outflow slit penetrates through the lower end face of the first plate body. The process nozzle not only can relieve impact pressure of the sprayed liquid on the sprayed surface and achieve uniform spraying, but also can effectively solve the problem of spraying unevenness and instability caused by outflow slit deformation.
Description
Technical field
The present invention relates to spray the nozzle of use, integrated form outgoing runner structural manufacturing process nozzle particularly, is mainly used in IC (integrated circuit) spraying coating process (but being not limited to developing process) that develops in photoetching process in manufacturing.
Background technology
Developing method is generally divided into three major types: immersion development, automatic rotation develop, revolve and cover immersion development.Immersion develops and exists developer solution consumption more greatly, almost there is no developing process, and each development conditions can not be consistent, and repeatedly the development of multi-disc wafer can affect the quality of developer solution, can sneak into the defects such as impurity, develops now to apply and has not used the method.Automatic rotation develops, revolve that to cover that immersion develops be to use now more developing method, because it uses developing nozzle equipment in spraying, can control well the consumption of developer solution, and the parameter such as spraying rate and spraying height can regulate and control simultaneously, and manufacturability is stronger.
Along with the continuous progress of photoetching technique and constantly dwindling of chip features size, in developing process, to the spraying property of nozzle, also require more and more higher, requirement for injector arrangement during spraying not only will meet the low impact to sprayed surface, also will meet inhomogeneity requirement simultaneously.Existing developing nozzle existence spraying is inhomogeneous, spray coating liquor is excessive to sprayed surface impact, destroys the technical problems such as quality of sprayed surface.Therefore, also just more and more urgent for the requirement of design new structure nozzle.
Summary of the invention
The object of this invention is to provide a kind of integrated form outgoing runner structural manufacturing process nozzle, with solve nozzle in existing chip developing process exist the inhomogeneous and spray coating liquor of spraying to impact excessive technical problem to sprayed surface and use in the inhomogeneous and instability problem of the spraying that causes due to the distortion of nozzle outgoing runner.
For reaching above-mentioned purpose, a kind of integrated form outgoing runner structural manufacturing process nozzle provided by the invention comprises the first plate body that is provided with the nozzle body of storage tank and is provided with outgoing runner, the first plate body and nozzle body are oppositely arranged described storage tank sealing are formed to a cavity, nozzle body is provided with the liquid feeding channel that is communicated with described cavity, wherein, the edge-on setting of described the first plate body, described outgoing runner comprises that one vertically goes out to flow slit and the horizontal blind hole of a plurality of hydrojet, blind hole outer end connects described cavity, blind hole the inner connects stream slit, the lower surface of the first plate body is run through in the lower end that goes out to flow slit.
At above-mentioned integrated form outgoing runner structural manufacturing process nozzle, preferably, from the top down, two plate faces of the first plate body are sloping inwardly gradually near lower end, the longitudinal section of the first plate body lower end is del, and the lower end that goes out to flow slit is arranged on the place, summit of below of this del.
At above-mentioned integrated form outgoing runner structural manufacturing process nozzle, preferably, the interior angle at the place, described summit of described del is not more than 90 degree.
At above-mentioned integrated form outgoing runner structural manufacturing process nozzle, preferably, described in go out to flow slit lower end lower than the bottom surface of nozzle body, go out to flow slit lower end and be less than 3 millimeters to the distance of nozzle body bottom surface, described blind hole is near the bottom of described cavity.
At above-mentioned integrated form outgoing runner structural manufacturing process nozzle, preferably, one side described cavity bottom arranges transition circle cambered surface away from the first plate body.
At above-mentioned integrated form outgoing runner structural manufacturing process nozzle, preferably, described in go out to flow slit width between 0.3 to 1.5 millimeter.
At above-mentioned integrated form outgoing runner structural manufacturing process nozzle, preferably, the aspect ratio of the described a plurality of blind holes (degree of depth: diameter) be not more than 12, described a plurality of blind holes are arranged in a row or more along the long side direction of the first plate body.
At above-mentioned integrated form outgoing runner structural manufacturing process nozzle, preferably, described nozzle body and the first plate body are all strip; Nozzle body for the end face of being combined with the first plate body on top Yuan Chu He Lianggeshu edge arrange first recessed and make to form flange face at the oral area of described storage tank; The first plate body for the first plate face of being combined with nozzle body on top edge and two vertical edge edge the first ridge is set, described the first plate face coordinates with described flange face sealing and described the first ridge coordinates with described first recessed.
Because comprising, outgoing runner vertically goes out to flow slit and horizontal blind hole, when spraying, spray coating liquor is not directly injected to sprayed surface but is first ejected into out stream slit inner surface then through going out to flow narrow slit flow to sprayed surface, therefore can slow down the surge of spray coating liquor to sprayed surface.On the other hand, spray coating liquor is ejected into out stream slit inner surface and in the process that slit inner surface flows to sprayed surface, easily forms uniform water curtain and realize even spraying along going out to flow.
Owing to forming the slit that vertically goes out to flow of outgoing runner, be all molded over the first plate body with horizontal blind hole, be that outgoing runner is integral type outgoing flow passage structure or integrated form outgoing flow passage structure, therefore during use, go out to flow slit and can not be out of shape, can effectively avoid owing to going out to flow the inhomogeneous and instability problem of spraying that slit distortion causes.
In addition, technique nozzle volume of the present invention is little, simple in structure, and processability of product structure is strong, can meet the requirement of developing process development.
Accompanying drawing explanation
Fig. 1 is the structural representation of preferred embodiment integrated form outgoing runner structural manufacturing process nozzle;
Fig. 2 is the front view of its nozzle body;
Fig. 3 is the A-A cutaway view Amplified image of its nozzle body;
Fig. 4 is the front view of its first plate body;
Fig. 5 is the side-looking enlarged drawing of its first plate body.
The specific embodiment
Below in conjunction with embodiment and accompanying drawing, the present invention is further described.
With reference to Fig. 1-5, this integrated form outgoing runner structural manufacturing process nozzle comprises nozzle body 1 and the first plate body 2, and they are all strip.Nozzle body 1 is provided with storage tank 1b, and the length of storage tank 1b is slightly less than the length of nozzle body 1, and oral area is rectangular.The first plate body 2 is provided with outgoing runner 2a.
The edge-on setting of the first plate body 2, nozzle body 1 be arranged on the first plate body 2 left sides and with the first plate face (left plate face in Fig. 1 of the first plate body 2, right panel face in Fig. 5) 2b seals combination, the first plate body 2 is oppositely arranged storage tank 1b sealing is formed to a cavity 3 with nozzle body 1, and cavity 3 is for storing spray coating liquor.Nozzle body 1 arranges the liquid feeding channel 1a that is communicated with cavity 3.
During use, spray coating liquor flows into cavity 3 from liquid feeding channel 1a, is ejected into out the inner surface of stream slit 2a1 through a plurality of blind hole 2a2, then along the inner surface that goes out to flow slit 2a1 through going out to flow slit 2a1 to downstream to sprayed surface.Because spray coating liquor is not to be directly injected to sprayed surface, but flow to again sprayed surface after being ejected into out the inner surface of stream slit 2a1, so effectively slowed down the pressure of fluid, spray coating liquor is reduced greatly to the impact of sprayed surface, thereby efficiently solve spray coating liquor, go out the excessive difficult problem that sprayed surface was produced to large impact of injection pressure.Meanwhile, the inner surface that spray coating liquor is ejected into out stream slit 2a1 flows to downwards along this inner surface in the process of sprayed surface and easily forms uniform water curtain, thereby can improve the uniformity of spraying.
In this technique nozzle, the slit 2a1 that vertically goes out to flow that forms outgoing runner 2a is all molded over the first plate body 2 with horizontal blind hole 2a2, and outgoing runner is integral type outgoing flow passage structure or integrated form outgoing flow passage structure.Compared to the technique nozzle of separate type outgoing flow passage structure, (described separate type outgoing flow passage structure refers to that the horizontal spray hole of outgoing runner is arranged on a plate body, the slit that vertically goes out to flow of outgoing runner is surrounded by this plate body and another baffle plate), the width that this integrated form outgoing runner structural manufacturing process nozzle in use goes out to flow slit 2a1 is not prone to distortion (especially this advantage is more remarkable when going out to flow slit 2a1 and be sharp mouth slit), has therefore further improved uniformity and the stability of spraying.Integrated form outgoing flow passage structure also makes nozzle assemble simple, good airproof performance, assembling, the sealing problem that can avoid separate type to bring simultaneously.
In order to make spray coating liquor from going out to flow slit 2a1 outflow, can not be gathered in out stream surface, realize better evenly effectively spraying, in preferred embodiment, go out to flow slit 2a1 and adopt sharp mouth narrow slit structure, that is, from the top down, two plate face 2b, 2c of the first plate body 2 are sloping inwardly gradually near lower end, the longitudinal section of the first plate body 2 lower ends is del, and the lower end that goes out to flow slit 2a1 is arranged on the 2d place, summit of below of this del.The interior angle at the 2d place, summit of described del is preferably not more than 90 degree.
Go out to flow slit 2a1 lower end lower than the bottom surface 1c of nozzle body 1, go out to flow slit 2a1 lower end and be less than 3 millimeters to the bottom surface 1c distance of nozzle body 1, and blind hole 2a2 is near the bottom of cavity 3.By arranging littlely by going out to flow distance between slit 2a1 lower end and nozzle body 1 bottom surface and the distance between blind hole 2a2 and cavity 3 bottoms, spray coating liquor can be shortened in the mobile distance that goes out to flow slit 2a1 inner surface, the uniformity of spraying can be further improved.
The better width that goes out to flow slit 2a1 is 0.3 to 1.5 millimeter.A plurality of blind hole 2a2 adopt little aspect ratio, and aspect ratio is preferably not more than 12, to facilitate processing.A plurality of spray hole 2a can be arranged in a row along the long side direction of the first plate body 2, also can be arranged in many rows (being that array is arranged).
In preferred embodiment, nozzle body 1 for the end face with the first plate body 2 combinations (being the right side of Fig. 1 and Fig. 3) 1d on top Yuan Chu He Lianggeshu edge first recessed 1e be set make to form flange face 1f at the oral area of described storage tank 1b; Accordingly, for the first plate face 2b with nozzle body 1 combination, on top edge and two vertical edge edge arrange the first ridge 2e to the first plate body 2, the first plate face 2b is sealed and matched with described flange face 1f and the first ridge 2e coordinates with described first recessed 1e, realizes the assembling of nozzle body 1 and the first plate body 2.The sealing of joint portion can adopt the sealing of viscosity glue.
This technique nozzle is manufactured the developer solution output of field photoetching process developing process for integrated circuit, not only can solve existing nozzle sprayed surface is impacted to excessive technical problem, and can solve the inhomogeneous and instability problem of spraying that existing nozzle causes due to the distortion of nozzle outgoing runner in using.This technique nozzle is not limited at developing process and uses.
By specific embodiment, the present invention has been done to detailed explanation above, these concrete descriptions can not think that the present invention only only limits to the content of these embodiment.Those skilled in the art conceive according to the present invention, these descriptions any improvement of making in conjunction with general knowledge known in this field, be equal to replacement scheme, all should be included in the protection domain of the claims in the present invention.
Claims (8)
1. an integrated form outgoing runner structural manufacturing process nozzle, comprise the nozzle body (1) that is provided with storage tank (1b) and the first plate body (2) that is provided with outgoing runner (2a), the first plate body (2) and nozzle body (1) are oppositely arranged described storage tank (1b) sealing are formed to a cavity (3), nozzle body (1) is provided with the liquid feeding channel (1a) that is communicated with described cavity (3), it is characterized in that: the edge-on setting of described the first plate body, described outgoing runner (2a) comprises that vertically goes out to flow slit (2a1) and a horizontal blind hole (2a2) for a plurality of hydrojet, blind hole outer end connects described cavity (3), blind hole the inner connects stream slit (2a1), the lower surface of the first plate body is run through in the lower end that goes out to flow slit.
2. integrated form outgoing runner structural manufacturing process nozzle according to claim 1, it is characterized in that: from the top down, two plate faces (2b, 2c) of the first plate body (2) are sloping inwardly gradually near lower end, the longitudinal section of the first plate body lower end is del, and the lower end that goes out to flow slit (2a1) is arranged on this del and locates on the summit (2d) of below.
3. integrated form outgoing runner structural manufacturing process nozzle according to claim 2, is characterized in that: the interior angle that the described summit (2d) of described del is located is not more than 90 degree.
4. integrated form outgoing runner structural manufacturing process nozzle according to claim 1, it is characterized in that: described in go out to flow slit (2a1) lower end lower than the bottom surface (1c) of nozzle body (1), go out to flow slit (2a1) lower end and be less than 3 millimeters to the distance of nozzle body bottom surface, described blind hole (2a2) is near the bottom of described cavity (3).
5. integrated form outgoing runner structural manufacturing process nozzle according to claim 1, is characterized in that: described cavity (3) is one side bottom arranges transition circle cambered surface (3a) away from the first plate body.
6. integrated form outgoing runner structural manufacturing process nozzle according to claim 1, is characterized in that: described in go out to flow slit (2a1) width between 0.3 to 1.5 millimeter.
7. integrated form outgoing runner structural manufacturing process nozzle according to claim 1, it is characterized in that: the aspect ratio of described a plurality of blind holes (2a2) is not more than 12, described a plurality of blind holes are arranged in a row or more along the long side direction of the first plate body (2).
8. integrated form outgoing runner structural manufacturing process nozzle according to claim 1, is characterized in that:
Described nozzle body (1) and the first plate body (2) are all strip,
Nozzle body (1) for the end face (1d) of being combined with the first plate body on top Yuan Chu He Lianggeshu edge first recessed (1e) be set make to form flange face (1f) at the oral area of described storage tank (1b);
The first plate body (2) for the first plate face (2b) with nozzle body (1) combination on top edge and two vertical edge edge the first ridge (2e) is set, described the first plate face coordinates with described flange face sealing and described the first ridge (2e) coordinates with described first recessed (1e).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310719283.0A CN103736606B (en) | 2013-12-23 | 2013-12-23 | Integrated form outgoing runner structural manufacturing process nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310719283.0A CN103736606B (en) | 2013-12-23 | 2013-12-23 | Integrated form outgoing runner structural manufacturing process nozzle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103736606A true CN103736606A (en) | 2014-04-23 |
| CN103736606B CN103736606B (en) | 2016-04-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310719283.0A Expired - Fee Related CN103736606B (en) | 2013-12-23 | 2013-12-23 | Integrated form outgoing runner structural manufacturing process nozzle |
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| Country | Link |
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| CN (1) | CN103736606B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105045049A (en) * | 2015-07-31 | 2015-11-11 | 清华大学深圳研究生院 | Developing nozzle with exhaust passages |
| CN107340616A (en) * | 2017-08-30 | 2017-11-10 | 武汉华星光电技术有限公司 | Moisture film generating means and developing machine, cleaning machine |
| CN113631276A (en) * | 2019-03-26 | 2021-11-09 | 荷兰应用自然科学研究组织Tno | Fluid handling structure and method for vapor deposition apparatus |
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| JP2006205120A (en) * | 2005-01-31 | 2006-08-10 | Ikeuchi:Kk | Slit nozzle |
| CN101547744A (en) * | 2007-09-18 | 2009-09-30 | 喷雾系统(日本)株式会社 | Two fluid slit nozzle and method for manufacturing the same |
| CN101879484A (en) * | 2010-05-28 | 2010-11-10 | 友达光电股份有限公司 | Slit nozzle |
| TW201143901A (en) * | 2010-06-07 | 2011-12-16 | Applied Materials Inc | Slit nozzle and wire saw system comprising the same |
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2013
- 2013-12-23 CN CN201310719283.0A patent/CN103736606B/en not_active Expired - Fee Related
Patent Citations (6)
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| CN1574221A (en) * | 2003-06-04 | 2005-02-02 | 大日本网目版制造株式会社 | Liquid supplying device and substrate processing device |
| CN1611304A (en) * | 2003-10-27 | 2005-05-04 | 东京応化工业株式会社 | Slit nozzle |
| JP2006205120A (en) * | 2005-01-31 | 2006-08-10 | Ikeuchi:Kk | Slit nozzle |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105045049A (en) * | 2015-07-31 | 2015-11-11 | 清华大学深圳研究生院 | Developing nozzle with exhaust passages |
| CN105045049B (en) * | 2015-07-31 | 2019-05-14 | 清华大学深圳研究生院 | A kind of developing nozzle with exhaust passage |
| CN107340616A (en) * | 2017-08-30 | 2017-11-10 | 武汉华星光电技术有限公司 | Moisture film generating means and developing machine, cleaning machine |
| CN113631276A (en) * | 2019-03-26 | 2021-11-09 | 荷兰应用自然科学研究组织Tno | Fluid handling structure and method for vapor deposition apparatus |
| CN113631276B (en) * | 2019-03-26 | 2023-05-26 | 荷兰应用自然科学研究组织Tno | Fluid handling structure and method for vapor deposition apparatus |
| US11920241B2 (en) | 2019-03-26 | 2024-03-05 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Fluid handling structure and method for a gas phase deposition apparatus |
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| Publication number | Publication date |
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| CN103736606B (en) | 2016-04-06 |
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Granted publication date: 20160406 Termination date: 20201223 |