KR101684326B1 - Air knife for drying and cleaning the glass panel - Google Patents

Air knife for drying and cleaning the glass panel Download PDF

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Publication number
KR101684326B1
KR101684326B1 KR1020150181920A KR20150181920A KR101684326B1 KR 101684326 B1 KR101684326 B1 KR 101684326B1 KR 1020150181920 A KR1020150181920 A KR 1020150181920A KR 20150181920 A KR20150181920 A KR 20150181920A KR 101684326 B1 KR101684326 B1 KR 101684326B1
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KR
South Korea
Prior art keywords
injection
hole
injection hole
air
air knife
Prior art date
Application number
KR1020150181920A
Other languages
Korean (ko)
Inventor
정찬수
박병규
Original Assignee
창성 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 창성 주식회사 filed Critical 창성 주식회사
Priority to KR1020150181920A priority Critical patent/KR101684326B1/en
Application granted granted Critical
Publication of KR101684326B1 publication Critical patent/KR101684326B1/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02054—Cleaning before device manufacture, i.e. Begin-Of-Line process combining dry and wet cleaning steps
    • H01L51/56—
    • G02F2001/1316—

Abstract

The present invention relates to an air knife having a function of drying and cleaning a panel in a manufacturing process of an LCD or OLED glass panel, and to an air knife for drying and cleaning a panel which not only reduces operation time, and thus saves energy because a spraying pressure is increased while a spraying quantity of air or cleaning liquid is decreased, but also improves drying and cleaning efficiency because the spraying pressure acts evenly on the air knife. The present invention comprises: a body including a guide hole and an injection hole each formed in a longitudinal direction on one surface, and an injection opening formed for supplying air or cleaning liquid therethrough; and a body holder which is installed to be in tight contact with the one surface of the body by using an engaging bolt, and includes a guide hole and an injection hole each formed in a longitudinal direction.

Description

[0001] The present invention relates to an air knife for drying and cleaning a panel,

The present invention relates to an air knife having a function of drying and cleaning a panel in the process of manufacturing LCD and OLDE glass panels. More specifically, the present invention relates to an air knife having a guide hole and an injection hole Since the body and the body holder are closely contacted with each other by surface contact and the air or the cleaning liquid is injected into the fine particles between the body and the body holder, the injection amount of the air or the cleaning liquid is reduced and the injection pressure is increased. Which is capable of shortening the energy consumption and improving the drying and cleaning efficiency by uniformly operating the jetting pressure.

Generally, LCD and OLDE glass panels are the most basic parts in electric and electronic products. They are widely used in electric and electronic products such as LCD TV, DVD, computer, notebook PC, digital camera, mobile phone, PDA, MP3 And the utilization of the glass panel is gradually increasing due to the miniaturization, high density and high function due to the rapid development of the digital method and the advancement of the semiconductor development.

The manufacturing process of LCD and OLDE glass panels is basically performed by an Inner Later Exposing - DF (Dry Film Developing) - Etching - Stripping process, wherein the exposure process is a process for forming a circuit (LPR INK) coated on the surface of the core is coated with an exposure film, and UV is irradiated to photocure the necessary part (LPR INK with UV).

The DF development process is a process of leaving a DF developer on a copper foil in the form of a circuit pattern to form a circuit. The etching process is a process of removing a copper foil with no remaining DF developer by using an etching solution, After the process, the DF developer remaining on the copper foil is removed using an alkaline solution.

The etching process and the peeling process are mostly performed by spraying a cleaning liquid (etching solution, alkali solution) onto the panel using an air knife, and a drying process is performed after the etching process and the peeling process, wherein the drying process is an air knife Air or hot air is sprayed on the panel to dry the cleaning liquid adhering to the surface of the panel.

Korean Patent No. 10-0791726 (air knife for manufacturing PDP) has been proposed as a typical prior art of an air knife for performing an etching process, a peeling process and a drying process by spraying a cleaning liquid or air onto a conventional glass panel.

The prior art includes a body formed of a top plate and a bottom plate and having a space formed therein, an air inlet formed at one side of the top plate or the bottom plate, a nozzle having a fine gap formed at one end between the top plate and the bottom plate, A concave groove formed around the space except for a portion where the nozzle is formed in any one of the upper plate and the lower plate; a packing member coupled to the concave groove; And a control member which is fastened to one end of the body for fine adjustment of the gap of the nozzle.

This prior art can realize a nozzle gap of up to 0.02 mm, which is advantageous in that the gap between the nozzles can be formed to be narrower than 1/5 of that of the prior art. Further, since the nozzle gap can be finely adjusted, Is a technology that maintains the flow rate and pressure distribution uniformly throughout the panel to enhance the drying and cleaning effect of the panel.

However, in the prior art, since the packing member is sandwiched between the upper plate and the lower plate and the body is assembled, the airtightness is lowered due to the packing member during prolonged use and the durability is lowered. There is a problem in that the pressure near the injection port is high, and the pressure at the part far from the injection port is low, causing a deviation in the injection pressure.

Korean Patent No. 10-0527789. Korean Patent No. 10-0791726. Korean Patent No. 10-1020778. Korean Patent No. 10-1521244. Korean Patent No. 10-1568534.

Disclosure of Invention Technical Problem [8] The present invention has been made in order to solve the problems of the prior art of the air knife in which air tightness is deteriorated due to packing members for a long time, durability is lowered, And an air knife for drying and cleaning the panel, which is injected into the guide hole through the injection hole and sprayed to the ultra fine particles through the fine injection gap.

In addition, the present invention reduces the amount of jetting of air or cleaning liquid by spraying ultrafine particles, increases the jetting pressure, reduces energy consumption by shortening the operation time of the apparatus, and improves drying and cleaning efficiency by uniformly operating the jetting pressure. And an object of the present invention is to provide an air knife.

The present invention has been made to solve the above-

A body on which a guide hole and an injection hole are formed in a longitudinal direction on either side and in which an injection hole for supplying air or a cleaning liquid is formed; And a body holder closely attached to one side of the body by fastening bolts and having a guide hole and an injection hole in the longitudinal direction, respectively.

In the embodiment of the present invention, the body and the body holder are formed such that the guide hole and the injection hole are spaced apart from each other by a predetermined distance, the injection hole is formed to have a size smaller by 1/10 than the space of the guide hole, And a lower end portion thereof is formed to be pointed with an inclined surface.

According to an embodiment of the present invention, the body holder is formed with a minute gap from the center of the guide hole to the center of the injection hole, and the groove is formed in the longitudinal direction and the interval is 0.2 to 0.4 mm.

According to an embodiment of the present invention, the body holder includes a plurality of fastening grooves formed at regular intervals around the edges of the guide holes, and a washer and a fastening pin are inserted into fastening grooves located between the guide holes and the injection holes do.

In the embodiment of the present invention, since the body constituting the air knife and the body holder are in close contact with each other in surface contact, the air-tightness and durability are excellent, and air or cleaning liquid is injected into the ultrafine particles through the fine jet- The injection amount of the air or the cleaning liquid is reduced and the injection pressure is increased so that the operation time of the apparatus is shortened and the energy is saved.

In addition, in the embodiment of the present invention, the air or the cleaning liquid injected into the body and the body holder through the supply pipe is filled in the guide hole, and then injected into the ultrafine particles through the fine injection gap through the injection hole, So that the drying and cleaning efficiency can be improved.

1 is an exploded perspective view of an air knife in the present invention;
2 is a perspective view showing an assembled state of the air knife in the present invention.
3 is a side sectional view showing an assembly state of the air knife in the present invention.
Fig. 4 is a rear view of the main body showing the body in the present invention. Fig.
FIG. 5 is a front view of a body portion showing a body holder in the present invention. FIG.
FIG. 6 is a front view of a main portion showing a state in which a body holder is installed in the present invention. FIG.
FIG. 7 is a cross-sectional view of a body portion of the body according to the present invention. FIG.
8 is a perspective view showing a washer and a fastening pin in the present invention.
9 is a side sectional view showing an operating state of the air knife in the present invention.

A guide hole 11 and an injection hole 12 are formed in a longitudinal direction on one side of the injection hole 15, and an injection hole 15 through which air or a cleaning liquid is supplied A formed body 10; And a body holder 20 closely attached to one side of the body 10 by a fastening bolt 13 and having a guide hole 21 and an injection hole 22 in the longitudinal direction.

In the main constitution of the embodiment, the body 10 is one component constituting the air knife. The body 10 is formed to have a predetermined length according to specifications, as shown in Figs. 1 to 4 in the figure, A guide hole 11 is formed in a longitudinal direction at a central portion of the guide hole 11 and an injection hole 12 is formed in a longitudinal direction at one side of the guide hole 11.

The guide hole 11 and the injection hole 12 are spaced apart from each other by a predetermined distance and the injection hole 12 is formed to be about 1/10 smaller than the space of the guide hole 11, And the lower end portion in the direction in which the base plate 12 is positioned is formed to be a pointed oblique surface.

The body 10 is formed with a plurality of fastening holes 14 at predetermined intervals so as to be coupled with a body holder 20 to be described later and the fastening holes 14 are formed around the edges of the guide holes 11 And fastening bolts 13 are fitted in the fastening holes 14 and fastened to the body holder 20, respectively.

The guide hole 11 and the injection hole 12 are formed on the inner side of the body 10 without leaving the one side of the body 10 and the coupling portion 16 is formed on both sides of the body 10 to extend outward A plurality of fastening holes 14 are formed so that the fastening portions 16 can be attached to the structure of the device.

A plurality of injection holes 15 are formed at regular intervals so that air or a cleaning liquid can be injected into the guide holes 11 and the injection holes 15 are passed through the inner space of the guide holes 11 .

In the main structure of the embodiment, the body holder 20 is a function of forming an air knife in close contact with one surface of the body 10, 7, a guide hole 21 is formed in a longitudinal direction at a central portion of one side of the body 10, and an injection hole (not shown) is formed in an outer side portion of the guide hole 21, 22 are formed.

The guide hole 21 and the injection hole 22 are spaced apart from each other by a predetermined distance corresponding to the guide hole 11 and the injection hole 12 formed in the body 10, And the lower end of the injection hole 22 in the direction in which the injection hole 22 is located is formed to be a pointed oblique surface.

A plurality of coupling grooves 23 are formed at regular intervals so as to be coupled to the corresponding surfaces of the body 10 by fastening bolts 13. The coupling grooves 23 are formed around the edges of the guide holes 21 .

The body holder 20 has a groove 24 formed with a minute gap from the center of the guide hole 21 to the center of the injection hole 22 and the groove 24 is formed in the longitudinal direction, ) Is formed to be approximately 0.2 to 0.4 mm.

The guide hole 21 and the injection hole 22 are formed on the inside of the body holder 20 without leaving the one surface of the body holder 20 and the fastening groove 22 is formed between the guide hole 21 and the injection hole 22, The washer 30 and the fastening pin 40 are inserted into the fastening bolt 23 and fastened by the fastening bolt 13.

8, the washer 30 and the fastening pin 40 are circular in shape, the fastening pin 40 is formed of a square plate, and the washer 30 When the body 10 and the body holder 20 are coupled by the fastening bolts 13, the gap A between the grooves 24 is maintained at 0.2 to 0.4 mm It functions to support.

3, the body 10 and the body holder 20 are fastened together with their corresponding surfaces formed with the guide holes 11 and 21 and the injection holes 12 and 22 facing each other, 13, the body 10 and the body holder 20 are coupled to each other in surface contact with each other, so that a gasket or packing is not required, and the airtightness and durability can be improved.

In addition, the body holder 20 is formed with a minute gap B of the injection gap 25 in the lower outward direction in the injection hole 22, the injection gap 25 is formed in the longitudinal direction, Is formed to be approximately 0.04 to 0.06 mm.

Therefore, when the body 10 and the body holder 20 are coupled to each other, the injection gap 25 of the minute gap B is formed outwardly in the injection holes 12 and 22, ) 22 is injected into super-fine particles through the jetting gap 25.

9, the supply pipe 50 is coupled to the injection hole 15 formed in the body 10 so that air or water is supplied to the inner space of the guide holes 11 and 21, The cleaning liquid is filled and filled and the air or the cleaning liquid filled in the guide holes 11 and 21 is filled into the injection holes 12 and 22 through the groove portion 24 and then is injected through the injection gap 25 And is sprayed onto the panel with ultrafine particles.

The air or the cleaning liquid flowing into the air knife through the supply pipe 50 is first filled in the guide holes 11 and 21 and then flows into the inside of the injection holes 12 and 22 through the groove 24 After being filled, it is sprayed through the jetting gap 25, so that the jetting pressure of the air or the cleaning liquid acts uniformly.

Accordingly, since the body and the body holder are in close contact with each other in face contact with each other, the air and the cleaning liquid injected into the body and the body holder are filled in the guide holes through the supply pipe , The injection pressure is applied to the air knife evenly through the fine holes through the injection holes, thereby improving the drying and cleaning efficiency.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, Can be carried out in various ways.

10: Body 11: Guide hole
12: Injection hole 15: Injection hole
16: fastening part 20: body holder
21: guide hole 22: injection hole
24: groove 30: washer
40: fastening pin 50: feed pipe

Claims (5)

(10) having a guide hole (11) and an injection hole (12) formed on one side thereof in the longitudinal direction and provided with an injection hole (15) through which air or a washing liquid is supplied; And a body holder 20 closely attached to one side of the body 10 with a fastening bolt 13 and having a guide hole 21 and an injection hole 22 formed in the longitudinal direction,
The body 10 and the body holder 20 are formed with guide holes 11 and 21 and injection holes 12 and 22 spaced apart from each other by a predetermined distance, (11) (21), and a lower end portion in a direction in which the injection holes (12) and (22) are positioned is formed to be a pointed oblique surface,
The body holder 20 has a groove 24 formed in the center of the guide hole 21 to a central portion of the injection hole 22 and the groove 24 is formed in the longitudinal direction, A plurality of coupling grooves 23 are formed at regular intervals around the edges of the guide holes 21 while a coupling groove 23 is formed between the guide holes 21 and the injection holes 22, The washer 30 and the fastening pin 40 are fitted in the fastening hole 23,
The washer 30 has a circular shape and the coupling pin 40 is formed of a rectangular plate while the washer 30 and the coupling pin 40 are alternately disposed,
Characterized in that the body holder (20) is formed with an injection gap (25) with a minute gap (B) in the lower outward direction in the injection hole (22). delete delete delete delete
KR1020150181920A 2015-12-18 2015-12-18 Air knife for drying and cleaning the glass panel KR101684326B1 (en)

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Application Number Priority Date Filing Date Title
KR1020150181920A KR101684326B1 (en) 2015-12-18 2015-12-18 Air knife for drying and cleaning the glass panel

Publications (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110164800A (en) * 2019-06-05 2019-08-23 京东方科技集团股份有限公司 A kind of sealed in unit and display device
KR20210016175A (en) 2019-08-01 2021-02-15 세메스 주식회사 Air knife

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100527789B1 (en) 2003-07-08 2005-11-09 태화일렉트론(주) Air knife structure of a drier for LCD panel
KR20070119398A (en) * 2006-06-15 2007-12-20 세메스 주식회사 Air knife and substrate drying system using it
KR100791726B1 (en) 2002-02-21 2008-01-03 이중호 Air-knife use for manufacturing for the pdp
KR200438634Y1 (en) * 2007-02-21 2008-02-28 (주) 세아 Air knife for glass flat-plate cleaning capable of cleaning surface finely
KR101020778B1 (en) 2008-08-08 2011-03-09 주식회사 디엠에스 air knife apparatus
KR101521244B1 (en) 2013-03-27 2015-05-20 주식회사 포스코 Air knife for amorphous ribbon peeling device
KR101568534B1 (en) 2013-12-24 2015-11-11 주식회사 포스코 Apparatus for controlling nozzle gap of air knife

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100791726B1 (en) 2002-02-21 2008-01-03 이중호 Air-knife use for manufacturing for the pdp
KR100527789B1 (en) 2003-07-08 2005-11-09 태화일렉트론(주) Air knife structure of a drier for LCD panel
KR20070119398A (en) * 2006-06-15 2007-12-20 세메스 주식회사 Air knife and substrate drying system using it
KR200438634Y1 (en) * 2007-02-21 2008-02-28 (주) 세아 Air knife for glass flat-plate cleaning capable of cleaning surface finely
KR101020778B1 (en) 2008-08-08 2011-03-09 주식회사 디엠에스 air knife apparatus
KR101521244B1 (en) 2013-03-27 2015-05-20 주식회사 포스코 Air knife for amorphous ribbon peeling device
KR101568534B1 (en) 2013-12-24 2015-11-11 주식회사 포스코 Apparatus for controlling nozzle gap of air knife

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110164800A (en) * 2019-06-05 2019-08-23 京东方科技集团股份有限公司 A kind of sealed in unit and display device
CN110164800B (en) * 2019-06-05 2021-09-17 京东方科技集团股份有限公司 Packaging equipment and display device
KR20210016175A (en) 2019-08-01 2021-02-15 세메스 주식회사 Air knife

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