JP4449517B2 - Coating method, coating apparatus, and method for manufacturing plasma display member - Google Patents

Description

  The present invention relates to a valve and a technology using the same, and can be used, for example, in the manufacturing field of a plasma display, a color filter for a color liquid crystal display, an array substrate for TFT, an optical filter, a printed circuit board, an integrated circuit, a semiconductor, etc. More specifically, the present invention relates to a valve, and more specifically, a coating apparatus and a coating method for forming a coating film by controlling the discharge of a coating liquid onto a surface of a coated member such as a glass substrate using the valve, and the valve The present invention relates to an improvement in a method for manufacturing a member for a plasma display using a coating method.

  In the plasma display, a partition having a groove extending in one direction in a striped manner at a constant pitch is formed on a glass substrate, and further, a phosphor of R, G, B is filled in the groove of the partition, and an arbitrary part is irradiated with ultraviolet rays. It emits light and projects a predetermined color pattern. Usually, the side with the partition walls is called the back plate, and the side with the part that generates ultraviolet rays is called the front plate.

  Here, as an important method of forming a partition pattern on the back plate, a partition paste is uniformly applied, dried and molded to a uniform film thickness, and then stripe-shaped grooves having a predetermined pitch are formed by a sandblasting method or the like. The mainstream is engraving and baking by post-processing such as photolithography. The thickness of the partition wall coating film is as thick as 100 to 200 μm even after firing, and means for uniformly coating the partition wall paste to this thickness include a die coating method (for example, Patent Document 1) and a screen printing method.

  In any system, it is necessary to supply a high-viscosity paste of 5000 to 50000 mPaS to the applicator. At that time, a valve and a constant-capacity pump are used as means for controlling supply and stop of supply of the paste. Yes. There are many types of valves such as needle type, diaphragm type, rotary type, bellows type, etc., but the rotary type is short because the opening / closing operation time is short and the capacity change before and after the valve by the opening / closing operation is small. (Also known as ball valve) is often used. On the other hand, there are various types of constant capacity pumps, such as diaphragm type, piston type, tube type, etc., but because of the high reactivity that the paste works immediately for machine operation and the ease of control, the piston type constant capacity Many pumps are used.

In the rotary type valve, the inner hole with a hole through which the paste passes rotates with respect to the outer envelope, and when the inner hole passes through the pipes connected to the front and rear of the valve, the paste passes and the inner hole rotates. Then, when the hole is oriented 90 degrees from the pipe, the passage of the paste can be stopped (for example, Patent Document 2).
JP-A-6-339656 (5th column, 9th line to 7th column, 25th line, FIG. 1) JP-A-6-11054 (3rd column, 28th line to 4th column, 29th line, FIGS. 1 and 2)

  In the rotary type valve, a sealing material is provided at an inlet through which the inner paste flows and an outlet through which the inner paste flows out, thereby preventing the paste from entering the fitting portion between the inner and outer. However, since the inner rotates to open and close the valve while the paste is contained in the through hole provided in the inner, the paste contained in the through hole when the valve is closed is between the inner and the outer. Flows into the clearance.

  In addition, during the transition from the valve open or closed state to the valve closed or open state, the inner through-hole is in a so-called half-open state that leads to both the clearance between the inner and outer and the piping before and after the valve. This also causes the paste near the inner to flow into the gap between the inner and outer. In any case, a small amount of paste flows in, but the paste that has entered the fitting portion and the gap portion between the inner and outer portions stays there and undergoes shear many times. By undergoing stagnation and numerous shears, the paste is transformed into a gel and generates a denatured product. This gel-like material or metamorphic material may be replaced with a newly invading paste, and may flow out of the valve from the fitting portion or the gap portion and flow out to the downstream pipe. In this case, the gel-like or modified product of the paste is mixed with the paste that is being supplied to the applicator, and in a severe case, a serious failure or defect occurs in the coating film.

  The present invention has been made based on the above-mentioned circumstances. The object of the present invention is to use a rotary type valve, even if a high-viscosity paste is passed / stopped for a long time, a gel-like product or a modified product. An object of the present invention is to provide a valve that does not generate any problems.

  Another object of the present invention is to provide a coating apparatus and method capable of easily and inexpensively realizing a high-quality coating film by using the improved valve, and a method for producing a plasma display member using this method. .

The coating apparatus of the present invention that achieves the above-described object has the configuration (1) described below .
(1) An applicator having a discharge port extending in one direction for discharging the coating liquid, a coating liquid supply means for supplying the coating liquid to the coating apparatus, a mounting table for holding a member to be coated, and the coating In a coating apparatus, comprising: a moving means for relatively moving at least one of the container and the mounting table; and a proximity means for bringing the applicator close to the member to be coated, and forming a coating film on the member to be coated The coating liquid supply means includes a rotary valve that controls the passage and stop of the coating liquid by rotation of the inner , and the inner and the outer the coating fluid flowing into the gap portion between, with outlet for each opening and closing of the rotary valve the inner discharged to the outside by become the driving force to rotate is provided, less Coating apparatus also the outer surface and the outer of the inner surface of the inner is HCr, characterized in that it is coated with titanium nitride, titanium carbide, or the cured product of the tungsten carbide and diamond-like carbon.

The coating method of the present invention is a coating method in which a coating film is formed on a member to be coated using the coating apparatus described in (1) above and flows into a clearance between the inner and outer of the rotary valve. The liquid is discharged to the outside of the rotary valve every time the rotary valve is opened and closed .

Furthermore, the manufacturing method of the member for plasma displays of this invention is characterized by manufacturing a member for plasma displays by apply | coating a paste on a to-be-coated member using the coating method of this invention of (2) mentioned above.

In the coating apparatus according to the present invention , as described above, the inner and outer are fitted, and the rotary valve that controls the passage and stop of the coating liquid by the rotation of the inner, the clearance between the inner and the outer A rotary valve with an outer outlet for discharging the fluid flowing into the outside is used, so even if paste enters the fitting part or the gap between the inner and outer parts, Since the outlet for discharging is provided in the outer, the paste does not stay in the same place for a long time. As a result, the gel stays in the same place for a long time, and the generation of gels and metamorphs caused by multiple shearing is eliminated, and even if it is generated, it is prevented from flowing out to the applicator. can do.

In the coating apparatus according to the present invention , as described above, the inner and outer are fitted, and the rotary valve controls the passage and stop of the coating liquid by the rotation of the inner, and at least the outer surface of the inner and the inner surface of the outer Uses a rotary valve coated with a hardened material, so the hardened material coated on the inner and outer prevents the metal reaction with the paste, and the paste stays in the same place for a long time, and the specific metal and It is possible to similarly prevent the formation of gel-like substances and metamorphic substances generated by long-time contact.

  Furthermore, if the coating method and the coating apparatus according to the present invention are used, coating is performed using the above-described excellent valve, so that a high-quality coating film free from defects and failures can be easily formed.

According to the method for producing a member for plasma display according to the present invention , the paste is applied onto the member to be coated by using the above-described excellent coating method to produce a member for plasma display. It becomes possible to manufacture the member for industrial use easily at low cost.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

  1A is a schematic front sectional view of a rotary valve 100 according to the present invention, FIG. 1B is a side sectional view cut along X1-X1 in FIG. 1A, and FIG. FIG. 3A is a side sectional view taken along line X2-X2. FIG. 3A is a schematic front sectional view of the rotary valve 100 when the inner 102 is rotated 90 degrees from the state of FIG. 3 (b) is a side sectional view of FIG. 3 (a), and FIG. 4 is a schematic front view of the die coater 1 to which the rotary type valve of the present invention is applied.

  A rotary valve 100 according to the present invention will be described with reference to FIGS. In the rotary valve 100, an outer periphery 112 has a spherical inner 102, a cylindrical inner surface 114, an outer 104 in contact with two upper and lower apexes of the outer periphery of the inner 102, and a gap between the inner 102 and the outer 104. A pair of circular left and right seals 108A and B that prevent the paste 124 from entering the portion 122, a rotating shaft 106 that rotates a line including two points of contact between the inner 102 and the outer 104 around CC, an outer 104 and a pair of left and right side plates 120A and B that are fastened by a member such as a bolt. 1-3, the paste 124 is shown by a dot pattern. A through hole 116 is provided in the inner 102, and through holes 118A and 118B are also provided in the side plates A and B, respectively. The through holes 118A and B of the side plates A and B are connected to pipes (not shown) on the inflow side I and the outflow side O, respectively, and paste 124 flowing in from the inflow side I pipes through the respective through holes. Can flow out into the pipe. When the side plates 120A and B are fastened to the outer 104, the seals 108A and B and the inner 102 are sandwiched, and the sandwiching force is fixed so that the seals 108A and B and the inner 102 do not move in the direction of the arrow. At the same time, a sealing force that prevents the paste 124 from entering can be provided. Further, if the fastening of the side plates 120A and B with the outer 104 is released and the side plates 120A and B are removed, the seals 108A and B, the inner 102, and the rotating shaft 106 can also be removed from the outer 104. That is, the rotary valve 100 has a structure that can be disassembled and assembled.

  Further, the outer 104 is provided with two discharge holes 110A and B. The discharge holes 110 </ b> A and B discharge the paste 124 that enters the gap 122 between the inner 102 and the outer 104 to the outside. Further, the outer peripheral portion 112 of the inner 102 and the inner surface 114 of the outer 104 are covered with a cured product. The cured product used here is preferably selected from metals, ceramics, resins and the like that do not cause a metal reaction with the paste, but HCr, TiN, TiC, which can constitute a thin film further having wear resistance and durability, WC, diamond-like carbon, aluminum oxide and the like are particularly preferable. The cured product may be attached by any means such as CVD, PVD, plating, thermal spraying, and the thickness is preferably 0.01 to 100 μm, more preferably 0.1 to 10 μm. If it is too thin, the cured product will disappear immediately due to abrasion, so a thicker one is better. However, the upper limit of the thickness is determined by the limitation of the adhesion means. As hardness of hardened | cured material, Preferably it is 400 or more in Vickers hardness, More preferably, it is 500 or more.

  In addition, although these hardened | cured materials should just be coat | covered only on the surface which is contacting the paste of the inner 102 and the outer 104, you may coat | cover all the surfaces. Furthermore, it is more preferable that all the components of the rotary valve 100 that come into contact with the paste are coated with these cured products.

  Next, the operation of the rotary valve 100 will be described with reference to FIGS. In the state of FIG. 1, the through hole 116 of the inner 102 and the through holes 118A, B of the side plates 120A, B communicate with each other, so that the paste can be passed, that is, the rotary valve 100 is In an open state. When the rotary shaft 106 is rotated by 90 degrees around the line CC in the direction of the arrow from the state shown in FIG. 1, as shown in FIG. 3, the through-hole 116 of the inner 102 becomes a hole. Is perpendicular to the through-holes 118A and B of the side plates 120A and 120B. That is, when the inner 102 is viewed from the through holes 118A and 118B, the through hole 116 of the inner 102 is not visible, and even if the paste flows from the through hole 118A on the inflow side I, the flow is blocked by the wall surface of the inner 102. The paste can be blocked, that is, the rotary valve 100 is closed.

  As apparent from FIG. 1A, when the rotary valve 100 is in an open state, the seals 108A and B cause the paste to pass from the through holes 118A and B side of the side plates 120A and B to the inner 102 and the outer. Intrusion into the gaps 122 between 104 is prevented. In addition, when the rotary valve is changed from the open state to the closed state, even if the inner layer 102 rotates and attempts to bring the paste 124 into the outer 104, the seals 108A and 108B are prevented. However, when the rotary valve 100 is closed as shown in FIG. 3, even though the inner 102 has a spherical outer surface, the inner surface of the outer 104 is a cylindrical surface. The inner surface of the outer 104 is not completely covered, and a part of the paste 124 contained in the through hole 116 overflows into the gap portion 122 between the inner 102 and the outer 104. Further, during the transition from the valve open or closed state to the valve closed or open state, both ends of the through hole 116 of the inner 102 are the clearance 122 between the inner 102 and the outer 104 and the through holes of the side plates A and B. It is in a so-called half-open state that leads to both 118A and B. Also by this, the paste near both ends of the through hole 116 of the inner 102 flows into the gap portion 122 between the inner 102 and the outer 104. The amount of the paste 124 that accumulates in the gap portion 122 between the inner 102 and the outer 104 in a single opening / closing operation is small. However, if the opening / closing operation of the rotary valve 100 is repeated many times, the paste 124 is added for each opening / closing operation. Therefore, when the discharge holes 110A and 110B are closed, the entire gap 122 is eventually occupied by the paste 124.

  The paste 124 once trapped in the gap portion 122 is taken out of the outer 104 by the rotation of the inner 102 accompanying the opening / closing operation, or partially penetrates the side plates 120A, B when the valve is in the half-open state during the valve opening / closing operation. Although it flows out to the holes 118A and 118B, most of them will stay in the gaps forever. Only the paste 124 in the vicinity of the outlet / entrance of the through hole 116 of the inner 102 is replaced with the paste 124 contained in the through hole 116 during the opening / closing operation, and is taken out of the outer 104. The taken-out paste flows out downstream through the through hole 118B of the outflow side O side plate 120B.

The paste 124 stored in the clearance 122 is subjected to a large shear each time the inner 102 rotates due to the opening / closing operation. If the paste 124 stays for a long time and is repeatedly subjected to a large shear, it may be transformed into a gel or other modified product. Further, even if the paste stays in the gap portion 122 and is in contact with the outer peripheral portion 112 of the inner 102, which is a metal, or the inner surface 114 of the outer 104 for a long time, a gel-like substance or other modification is caused by the metal reaction of the paste. It may be mutated. The position of the paste in the gap 122 is slightly changed by the rotation of the inner or a newly entering paste. When the generated gel or modified product comes near the outlet of the through hole 116 of the inner 102, it is replaced with the paste in the through hole 116 and enters the through hole. Flowed downstream of the mold valve 100. When a gel-like substance or a modified substance that has flowed out to the downstream process is applied in a mixture with a normal paste to form a coating film, a product defect occurs. On the other hand, when the discharge holes 110A and B leading to the gap portion 122 are provided as in the present invention and the opposite side of the gap portion 122 is opened, the paste 124 accumulated in the gap portion 122 does not stay, Since it will be discharged | emitted outside the outer 104, a gel-like thing and a metamorphosis will not generate | occur | produce. When the inner 102 rotates every time the rotary valve 100 is opened and closed, and a new paste is brought from the through hole 116, it becomes a driving force for discharging the paste in the gap portion 122 from the discharge holes 110A and B. Furthermore, if the pipes are connected to the discharge holes 110A and 110B and a suction force is applied, the paste in the gap portion 122 can be discharged to the outside more easily. Increases the effect of preventing the generation of things.

  Further, in the present invention, a hardened material that prevents a metal reaction with the paste 124 is attached to the outer peripheral portion 112 of the inner 102 and the inner surface 114 of the outer 104, thereby preventing the formation of a gel-like material or a modified product due to the metal reaction. can do. The cured product attached to the outer peripheral portion 112 of the inner 102 is also effective in improving the wear characteristics with the seal 108.

As described above, since the discharge holes 110A and B that lead to the inside of the outer 104 of the rotary valve 100 are provided, even if the paste is stored in the gap portion 122 between the inner 102 and the outer 104 when the valve is opened and closed, It becomes possible to discharge to the outside without fail, and it is possible to prevent the accumulated paste from being repeatedly sheared and becoming a gel-like mutant, and even if a mutant is generated, it is discharged from the discharge holes 110A and B to the outside. As a result, it is possible to eliminate the occurrence of product defects in the coating film by applying the mutant in a normal paste.

  Moreover, since the paste wetted parts of the inner 102 and outer 104 of the rotary type valve 100 of the present invention are coated with a hardened material that does not react with the paste, even if there is no discharge hole 110A, B, it stays. Even if it exists, the generation | occurrence | production of the variation | mutation by a metal reaction can be prevented, and it can eliminate that the variation | mutation is mixed with a normal paste, and a product defect arises in a coating film.

In order to prevent air from entering the discharge holes 110A and B when the rotary valve 100 is opened and closed, first, the outlet side of the discharge holes 110A and B is closed, and the paste 124 is put into the gap portion 122 and the discharge holes 110A and B. It is preferable to start using the rotary valve 100 after the air is completely exhausted and the outlet side of the discharge holes 110A and B is opened.

  The inner 102, outer 104, and side plates 120A, B are preferably made of stainless steel in terms of chemical resistance and strength, but are made of other metals, resins such as fluorine resins, or ceramics. Also good. When using a metal, as described above, it is preferable to attach a cured product that does not react with the metal to the outer peripheral portion 112 of the inner 102 and the inner surface 114 of the outer 104. The discharge holes 110A and B may have any hole diameter as long as the paste can be discharged, but the inner diameter is preferably φ5 to 60 mm, more preferably φ10 to φ24 mm. If the inner diameter is too small, it is difficult to discharge the paste, and if it is too large, the discharge flow rate will decrease.

  Next, a die coater 1 which is a coating apparatus to which the rotary valve 100 of the present invention is applied will be described with reference to FIG.

  The die coater 1 includes a base 2, and a pair of guide rails 4 are provided on the base 2. On this guide rail 4, a stage 6 as a mounting table for the substrate A is disposed. The stage 6 is driven by a linear motor (not shown) and freely reciprocates in the X direction shown in FIG. Further, the upper surface of the stage 6 is a vacuum suction surface made up of suction holes, and can hold the substrate A, which is a member to be coated, by suction.

  Looking at the center of the base 2, there is a gate-shaped column 10. On both sides of the support column 10, an up-and-down lift unit 70 is provided, and a die 20 that performs coating is attached to the up-and-down lift unit 70.

  The die 20 has a front lip 22 and a rear lip 24 extending in a direction perpendicular to the X direction indicated by an arrow, that is, a direction perpendicular to the paper surface, overlapped in the X direction via a shim 32 and integrated by a plurality of connecting bolts (not shown). It is comprised by combining. A manifold 26 is formed at the center of the die 20, and this manifold 26 also extends in the longitudinal direction of the die 20 (direction orthogonal to the X direction). A slit 28 is formed below the manifold 26 so as to communicate therewith. The slit 28 also extends in the longitudinal direction of the die 20, and the lower end thereof becomes an opening at the discharge port surface 36 that is the lowermost end surface of the die 20, thereby forming the discharge port 34. Since the slit 28 is formed by the shim 32, the slit gap (measured in the X direction) is equal to the thickness of the shim 32.

  The vertical lift unit 70 for lifting and lowering the die 20 includes a suspension holding base 80 that holds the die 20 in a suspended form, a pair of left and right lifting bases 78 that raise and lower the suspension holding base 80, and a lift base 78 in the vertical direction. It comprises a guide 74 for guiding and a ball screw 76 for converting the rotational motion of the motor 72 into the linear motion of the lifting platform 78.

  The vertical lift unit 70 has a pair of left and right so as to support both ends of the die 20 in the longitudinal direction, and each can be lifted and lowered independently, so that the tilt angle with respect to the horizontal in the longitudinal direction of the die 20 can be arbitrarily set. Thereby, the discharge port surface 36 of the die 20 and the substrate A can be made substantially parallel over the longitudinal direction of the die 20. Further, the vertical lift unit 70 can provide a clearance, that is, a clearance between the substrate A on the stage 6 and the discharge port surface 36 of the die 20 in an arbitrary size.

  Further, when viewing the left side of the base 2, a thickness sensor 90 for measuring the thickness of the substrate A is attached to the support base 92. The thickness sensor 90 preferably uses a laser. By measuring the thickness of the substrate A by the thickness sensor 90, the clearance that is the gap between the discharge port surface 36 of the die 20 and the substrate A is always constant for the substrate A of any thickness. be able to.

  Looking again at the die 20, the upstream side of the manifold 26 of the die 20 is always connected to a supply hose 60 connected to the coating liquid supply device 40 via an internal passage (not shown). The coating liquid can be supplied from the coating liquid supply apparatus 40. The coating liquid that has entered the manifold 26 is uniformly widened in the longitudinal direction of the die 20 and is discharged from the discharge port 34 through the slit 28.

  The coating liquid supply device 40 includes an outlet side valve 214, a syringe pump 200 that is a piston type constant capacity pump, an inlet side valve 212, a suction hose 62, and a tank 64 on the upstream side of the supply hose 60. A paste 124 is stored in the tank 64 and is connected to a pressure air source 68 so that an arbitrary back pressure can be applied to the paste 124. The paste 124 in the tank 64 is supplied to the syringe pump 200 through the suction hose 62. In the syringe pump 200, the syringe 202 and the piston 204 are attached to the pump base 56. Here, the piston 204 can reciprocate freely in the vertical direction by a drive source (not shown). An O-ring 206 is attached to the piston 204 to provide airtightness between the male piston 204 and the female syringe 202. The rotary valve 100 is used for the outlet side valve 214 and the inlet side valve 212.

  Note that the linear motor, the motor 72, the coating liquid supply device 40, and the like that are operated by the control signal are all electrically connected to the control device 94. Then, a control command signal is transmitted to each device in accordance with an automatic operation program incorporated in the control device, and a predetermined operation is performed. When changing the conditions, if a change parameter is appropriately input to the operation panel 96, it is transmitted to the control device 94, and the change of the driving operation can be realized.

  Next, a coating method using the coating apparatus of the present invention will be described in detail.

  First, when the origin of each operation unit of the coating apparatus 1 is returned, each moving unit moves to the standby position. That is, the stage 6 moves to the left end (position indicated by a broken line) in FIG. 4, and the die 20 moves to the top. Here, the paste 124 is already filled from the tank 64 to the die 20, and the operation of discharging the residual air inside the die 20 has already been completed. At this time, the coating liquid supply device 40 is in a state where the syringe 202 is filled with the paste 66, the inlet side valve 212 is closed, the outlet side valve 214 is opened, and the piston 204 is at the lowermost position. 20 can be supplied.

  First, lift pins (not shown) are raised on the surface of the stage 6, and the substrate A is placed on the lift pins from a loader (not shown). Next, the lift pins are lowered to place the substrate A on the upper surface of the stage 6 and simultaneously hold it by suction.

  Then, the stage 6 starts to move at the coating speed, and the thickness of the substrate A through which the substrate A passes under the thickness sensor 90 is measured. At this time, using the measured thickness data of the substrate A, the vertical lift unit 70 is driven to bring the discharge port surface 36 of the die 20 close to the position separated from the substrate A with a predetermined clearance. When the coating start portion of the substrate A reaches just below the discharge port 34A of the die 20, the piston 204 of the syringe pump 200 is raised at a predetermined speed, and the paste 124 is discharged from the die 20 toward the substrate A. The coating film C is formed by starting application to A. When the coating end portion of the substrate A comes to the position of the discharge port 34 of the die 20, the piston 204 is stopped to stop the supply of the paste 124, and then the vertical lifting unit 70 is driven to raise the die 20. As a result, the bead formed between the substrate A and the die 20A is cut off, and the application is completed.

  During these operations, the stage 6 continues to move, stops when it reaches the end point position, releases the suction of the substrate A, raises the lift pins, and lifts the substrate A. At this time, the lower surface of the substrate A is held by an unloader (not shown), and the substrate A is transported to the next step. When the substrate A is delivered to the unloader, the stage 6 lowers the lift pins and returns to the origin position.

  Thereafter, the syringe pump 200 opens the outlet side valve 214 and closes the inlet side valve 212, lowers the piston 204 at a constant speed, and fills the syringe 202 of the syringe pump 200 with the paste 124 of the tank 64. After the completion of filling, the piston 204 is stopped, the inlet side valve 212 is closed, the outlet side valve 214 is opened, the next substrate A is waited for, and the same operation is repeated.

  When the rotary liquid valve 100 and the syringe pump 200 of the present invention are applied to the coating liquid supply device 40 of the die coater 1 by the above coating method, the gel material and other mutants are discharged from the rotary valve 100. Since the holes 110A and B are discharged to the outside, a high-quality coating film free from defects due to these can be formed at low cost.

  The coating solution to which the present invention can be applied preferably has a viscosity of 1 cps to 100000 cps, more preferably 1000 cps to 50000 cps, and it can be applied to both Newtonian and thixotropic coating solutions. As the substrate A, in addition to glass, a metal plate such as aluminum, a ceramic plate, a resin plate, a silicon wafer, or the like may be used. Further, as application conditions to be used, the clearance between the substrate A and the discharge port surface of the die is 40 to 500 μm, more preferably 80 to 300 μm, and the application speed is 0.1 m / min to 10 m / min, more preferably 0.5 m. / Min to 6 m / min, the die discharge gap is 50 to 1000 μm, more preferably 100 to 600 μm, and the coating thickness is 5 to 400 μm, more preferably 20 to 250 μm.

  A photosensitive silver paste is screen-printed to a thickness of 5 μm on the entire surface of a soda glass substrate having a width of 340 mm, a length of 440 mm, and a thickness of 2.8 mm, and then exposed to light using a photomask, followed by development and firing steps. Then, 1920 striped silver electrodes with a pitch of 220 μm were formed. A glass paste made of glass and a binder was screen-printed on the electrode and then baked to form a dielectric layer. Next, a die having a discharge width of 330 mm and a lip gap (shim thickness) of 500 μm was attached to the die coater 1 of FIG. 4, and a rotary type valve 100 and a syringe pump 200 were used for each valve.

  In addition, the rotary valve 100 was provided with two paste discharge holes having an inner diameter of 10 mm, and the outer peripheral portion 112 of the inner 102 and the inner surface of the outer 104 were covered with TiN. The syringe pump 200 had an inner diameter of φ30 mm, and the O-ring 206 was made of red silicon at P30 whose shape is defined in JISB2401. After completion of preparation, the coating liquid supply line from the tank to the die was filled with a photosensitive glass paste having a viscosity of 20000 cps composed of glass powder and a photosensitive organic component. After lowering the die so that the clearance between the die 20 and the dielectric layer was 350 μm, the above photosensitive glass paste was applied at a coating thickness of 300 μm and a coating speed of 1 m / min. The paste supply rate from the syringe pump at this time was 1.65 cc / sec. The substrate was taken out with a transfer machine, put into a drying furnace using a radiant heater, and dried at 100 ° C. for 20 minutes. When the coating thickness distribution after drying was measured over the entire surface of the substrate, the effective product portion within the range of 140 μm ± 3 μm was 426 mm out of the coating length of 436 mm, which was larger than the length of 424 mm required for pixel surface formation. When 1000 sheets were applied under the same conditions and were visually inspected by sampling, there were no defects such as generation of foreign matters due to gel-like materials, chipping of the coating film, and the like. In addition, a total of 500 cc of paste was discharged from the discharge holes of the two applied rotary valves after 1000 sheets were applied. After forming the coating film by the glass paste, it exposed using the photomask designed so that a partition might be formed between the adjacent electrodes, and developed and baked, and the partition was formed. The shape of the partition wall was a pitch of 220 μm, a line width of 30 μm, and a height of 130 μm, and the number of partition walls in each region was 1921. Thereafter, phosphor pastes of R, G, and B were sequentially applied by screen printing, dried at 80 ° C. for 15 minutes, and finally baked at 460 ° C. for 15 minutes to produce a plasma display back plate. . The surface quality of the obtained plasma display back plate was satisfactory. Next, the plasma display back plate and the front plate were combined, sealed, and mixed with a mixed gas of 5% Xe and 95% Ne, and a driving circuit was connected to obtain a plasma display.

  This invention controls the discharge of coating liquid onto the surface of a coated member such as a glass substrate in the manufacturing field of plasma filters, color filters for color liquid crystal displays, TFT array substrates, optical filters, printed circuit boards, integrated circuits, semiconductors, etc. Thus, the present invention can be utilized for a coating apparatus and a coating method for forming a coating film, and for manufacturing a member for a plasma display using the coating method.

It is the schematic front sectional view at the time of opening of the rotary type | mold valve concerning this invention, and the side surface sectional drawing cut | disconnected by X1-X1. It is side surface sectional drawing cut | disconnected by X2-X2 of Fig.1 (a) of the rotary type | mold valve concerning this invention. It is the schematic front sectional drawing and side sectional drawing of the rotary type | mold valve 100 at the time of closing of the rotary type | mold valve concerning this invention. 1 is a schematic front view of a die coater 1 to which a rotary valve of the present invention is applied.

Explanation of symbols

1 Die coater 2 Base 4 Guide rail 6 Stage 10 Prop 20 Die (applicator)
22 Front lip 24 Rear lip 26 Manifold 28 Slit 32 Shim 34 Discharge port 36 Discharge port surface 40 Application liquid supply device 56 Pump base 60 Supply hose 62 Suction hose 64 Tank 68 Pressure air source 70 Vertical lift unit 72 Motor 74 Guide 78 Lift base 80 Suspension Lower holding base 90 Thickness sensor 92 Support base 94 Control device 96 Operation panel 100 Rotary valve 102 Inner 104 Outer 106 Rotating shaft 108A, B seal 110A, B discharge hole 112 Outer peripheral part 114 Inner surface 116 Through hole 118A, B Through hole 120A , B Side plate 122 Clearance portion 124 Paste 200 Syringe pump 202 Syringe 204 Piston 206 O-ring 212 Inlet side valve 214 Outlet side valve A Substrate (member to be coated)
C Coating film

Claims (3)

An applicator having a discharge port extending in one direction for discharging the coating liquid, a coating liquid supply means for supplying the coating liquid to the coating apparatus, a mounting table for holding a member to be coated, the applicator and the front In the coating apparatus, comprising: a moving unit that relatively moves at least one of the mounting tables; and a proximity unit that brings the applicator close to the member to be coated, and the coating device forms a coating film on the member to be coated. The liquid supply means is configured by fitting an inner and an outer , and has a rotary valve that controls the passage and stoppage of the coating liquid by rotation of the inner, and the outer is provided between the inner and the outer. the coating solution flowing into the gap portion, together with the discharge port for discharging to the outside is provided by the inner becomes the driving force to rotate each opening and closing of the rotary valve, at least the Runners of the outer surface and the outer interior surface is HCr, titanium nitride, titanium carbide, coating apparatus characterized by being coated with any of the cured product of tungsten carbide and diamond-like carbon. A coating film is formed on a member to be coated using the coating apparatus according to claim 1 , and a coating liquid flowing into a gap between an inner and an outer of the rotary valve is opened and closed. Each of the coating methods is characterized by discharging to the outside of the rotary type valve . A method for producing a member for plasma display , comprising: applying a paste on a member to be coated using the coating method according to claim 2 to produce a member for plasma display.

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