TW201534403A - Method and apparatus for preventing liquid condensation in dispenser - Google Patents

Method and apparatus for preventing liquid condensation in dispenser Download PDF

Info

Publication number
TW201534403A
TW201534403A TW104107832A TW104107832A TW201534403A TW 201534403 A TW201534403 A TW 201534403A TW 104107832 A TW104107832 A TW 104107832A TW 104107832 A TW104107832 A TW 104107832A TW 201534403 A TW201534403 A TW 201534403A
Authority
TW
Taiwan
Prior art keywords
pressure
negative pressure
valve
liquid
pressure valve
Prior art date
Application number
TW104107832A
Other languages
Chinese (zh)
Other versions
TWI660792B (en
Inventor
Hyun-Sung Jung
Il-Nam Koo
Soon-Young Kwon
Original Assignee
Ap Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ap Systems Inc filed Critical Ap Systems Inc
Publication of TW201534403A publication Critical patent/TW201534403A/en
Application granted granted Critical
Publication of TWI660792B publication Critical patent/TWI660792B/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B05C11/101Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material responsive to weight of a container for liquid or other fluent material; responsive to level of liquid or other fluent material in a container
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B05C11/1013Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material responsive to flow or pressure of liquid or other fluent material
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Coating Apparatus (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The present invention relates to an apparatus for preventing liquid condensation in a dispenser and a method for preventing liquid condensation in a dispenser, and more particularly, to an apparatus for preventing liquid condensation at a tip of a nozzle when liquids such as liquid crystal and paste are applied to a substrate and a method for operating the same. According to an exemplary embodiment of the present invention, a method for preventing liquid condensation in a dispenser includes: discharging a liquid through a nozzle of a syringe by providing a discharge supply pressure in a positive pressure form to a pressure supply pipe which is connected to the syringe; stopping the discharge of the liquid by providing a discharge stopping pressure in a first negative pressure form to the pressure supply pipe when the discharge of the liquid stops; and preventing the liquid condensation in the nozzle by stopping the discharge of the liquid and then providing a liquid condensation preventing pressure which is a second negative pressure smaller than the discharge stopping pressure to the pressure supply pipe.

Description

用於防止分配器中的液體凝聚的方法以及設備 Method and apparatus for preventing condensation of liquid in a dispenser

本發明涉及一種用於防止分配器中的液體凝聚的設備和一種用於防止分配器中的液體凝聚的方法,且更明確地說,涉及一種用於當將例如液晶或糊狀物的液體塗覆到基板時防止在噴嘴的尖端處的液體凝聚的設備和操作方法。 The present invention relates to an apparatus for preventing agglomeration of a liquid in a dispenser and a method for preventing agglomeration of a liquid in the dispenser, and more particularly to a method for coating a liquid such as a liquid crystal or a paste Apparatus and method of operation for preventing liquid agglomeration at the tip of the nozzle when overlying the substrate.

液晶顯示器(liquid crystal display;LCD)是通過以下方法來製造:用於在單一基板上形成多個圖元圖案,在與其相對的另一基板上形成彩色濾光片層,結合兩個玻璃基板,且接著通過預定方法將液晶注入到空間中,所述空間是由結合的兩個基板和內部密封劑形成。 A liquid crystal display (LCD) is manufactured by forming a plurality of primitive patterns on a single substrate, forming a color filter layer on another substrate opposite thereto, and combining the two glass substrates. And then liquid crystal is injected into the space by a predetermined method, which is formed by the combined two substrates and the inner sealant.

用於在前述液晶顯示器的製造期間按預定圖案將糊狀物排放到玻璃基板的操作由用於排放糊狀物的設備進行。 The operation for discharging the paste to the glass substrate in a predetermined pattern during the manufacture of the aforementioned liquid crystal display is performed by an apparatus for discharging the paste.

一種用於將糊狀物排放到平板基板的排放設備包含:平臺,上部基板和下部基板坐落於其上;分配器,其包含填充有原材料(糊狀物)的針筒和將糊狀物排放至平臺上的基板的噴嘴;感測器,其測 量基板與噴嘴之間的間隙;驅動器,其升高分配器;轉移部分,其水平地移動分配器;和控制器,其控制分配器的操作。 A discharge apparatus for discharging a paste to a flat substrate comprises: a platform on which an upper substrate and a lower substrate are seated; a dispenser including a syringe filled with a raw material (batter) and discharging the paste a nozzle to the substrate on the platform; a sensor, its measurement a gap between the substrate and the nozzle; a driver that raises the dispenser; a transfer portion that moves the dispenser horizontally; and a controller that controls the operation of the dispenser.

為了使用排放設備在基板中形成圖案,首先,使用感測器測量基板與噴嘴之間的間隙。另外,通過垂直地上下移動分配器來控制基板與噴嘴之間的間隙。接下來,通過在從噴嘴排放原料時移動分配器來形成所要的糊狀物圖案。 In order to form a pattern in the substrate using the discharge device, first, a gap between the substrate and the nozzle is measured using a sensor. In addition, the gap between the substrate and the nozzle is controlled by vertically moving the dispenser up and down. Next, the desired paste pattern is formed by moving the dispenser while discharging the material from the nozzle.

例如,當糊狀物圖案形成於用於單一面板的基板的邊緣時,糊狀物圖案20具有如圖1中所說明的形狀。如圖1中所說明,糊狀物圖案20具有從基板10的邊緣圍封基板10的中心的形狀。此處,糊狀物圖案20由位於基板10的邊緣而非每一拐角處的直部分23形成,所述直部分具有均勻的寬度和高度。另外,糊狀物圖案20由位於基板10的每一拐角處的彎曲部分22形成,貫穿糊狀物圖案20,所述彎曲部分具有均勻的寬度和高度。 For example, when the paste pattern is formed on the edge of the substrate for a single panel, the paste pattern 20 has a shape as illustrated in FIG. As illustrated in FIG. 1, the paste pattern 20 has a shape that encloses the center of the substrate 10 from the edge of the substrate 10. Here, the paste pattern 20 is formed by a straight portion 23 located at the edge of the substrate 10 instead of each corner, the straight portion having a uniform width and height. In addition, the paste pattern 20 is formed by a curved portion 22 located at each corner of the substrate 10, penetrating the paste pattern 20, which has a uniform width and height.

因此,糊狀物從作為原點的開始點21排放,且接著到達緊接在開始點21前的結束點24,圍繞直部分23和彎曲部分22以形成糊狀物圖案20。 Therefore, the paste is discharged from the starting point 21 as the origin, and then reaches the end point 24 immediately before the starting point 21, surrounding the straight portion 23 and the curved portion 22 to form the paste pattern 20.

然而,在排放糊狀物圖案後,需要用於形成接下來的糊狀物圖案的等待時間。此時,液體凝聚(液滴)發生在噴嘴的尖端。液體凝聚發生是因為在噴嘴的下部末端處的原材料因由針筒的殘餘高度產生的壓力而聚結。因此,液體凝聚現象發生在等待時間過去之後,而不考慮原材料的黏度。 However, after discharging the paste pattern, a waiting time for forming the next paste pattern is required. At this point, liquid agglomeration (droplets) occurs at the tip of the nozzle. Liquid agglomeration occurs because the raw material at the lower end of the nozzle coalesces due to the pressure generated by the residual height of the syringe. Therefore, liquid agglomeration occurs after waiting time has elapsed regardless of the viscosity of the raw material.

歸因於液體凝聚現象,在下一個糊狀物圖案的開始點意外地排放大量原料,使得圖案的高度整體上可能不均勻。 Due to the liquid agglomeration phenomenon, a large amount of raw materials are accidentally discharged at the starting point of the next paste pattern, so that the height of the pattern may be uneven as a whole.

為了防止液體凝聚,使用用於將殘餘壓力維持在固定值的方 法或用於允許噴嘴的尖端接觸基板的其它表面以防止液體從噴嘴排放的方法。然而,用於將殘餘壓力維持在固定值的方法具有以下問題:取決於使用的液體的量,液體凝聚可能仍會出現,且相反地,液體可被吸入到噴嘴內。用於允許噴嘴的尖端接觸基板的表面的方法具有以下問題:噴嘴的周圍可能被污染且噴嘴可能會損壞。 In order to prevent liquid condensation, use a method for maintaining the residual pressure at a fixed value. A method or method for allowing the tip of the nozzle to contact other surfaces of the substrate to prevent liquid from being discharged from the nozzle. However, the method for maintaining the residual pressure at a fixed value has a problem that depending on the amount of liquid used, liquid agglomeration may still occur, and conversely, the liquid may be sucked into the nozzle. The method for allowing the tip of the nozzle to contact the surface of the substrate has the following problem that the periphery of the nozzle may be contaminated and the nozzle may be damaged.

[有關技術文獻] [Related technical literature] [專利文獻] [Patent Literature]

(專利文獻1)韓國專利特許公開案第10-2013-0007134號 (Patent Document 1) Korean Patent Licensing Publication No. 10-2013-0007134

本揭露內容提供一種用於防止在用於分配器的針筒的噴嘴中的液體凝聚的設備和方法。另外,本揭露內容防止在排放了液體後液體被吸入到用於分配器的針筒的噴嘴內。本揭露內容提供一種用於防止針筒的噴嘴的周圍被污染的設備和方法。 The present disclosure provides an apparatus and method for preventing liquid agglomeration in a nozzle of a syringe for a dispenser. In addition, the present disclosure prevents liquid from being drawn into the nozzle of the syringe for the dispenser after the liquid is discharged. The present disclosure provides an apparatus and method for preventing contamination of the periphery of a nozzle of a syringe.

根據本發明的示範性實施例,一種用於防止分配器中的液體凝聚的方法包含:通過按正壓形式將排放供應壓力提供到連接到針筒的壓力供應管而通過針筒的噴嘴排放液體;通過在希望阻止排放液體的情況下按第一負壓形式將排放阻止壓力提供到壓力供應管來阻止液體的排放;以及通過阻止液體的排放且接著將為小於排放阻止壓力的第二負壓的液體凝聚保護壓力提供到壓力供應管來防止噴嘴中的液體凝聚。 According to an exemplary embodiment of the present invention, a method for preventing agglomeration of a liquid in a dispenser includes discharging a liquid through a nozzle of a syringe by supplying a discharge supply pressure to a pressure supply pipe connected to the syringe in a positive pressure form Preventing the discharge of the liquid by providing the discharge prevention pressure to the pressure supply pipe in the form of the first negative pressure in the event that it is desired to prevent the discharge of the liquid; and by preventing the discharge of the liquid and then the second negative pressure that is less than the discharge prevention pressure The liquid agglomeration protection pressure is supplied to the pressure supply tube to prevent liquid condensation in the nozzle.

液體的排放可包含將正壓提供到壓力供應管作為排放供應壓力,其通過關掉將大氣壓力提供到壓力供應管的大氣壓力閥門、將第一負壓提供到壓力供應管的第一負壓閥門和將為小於第一負壓的壓力的第二負壓提供到壓力供應管的第二負壓閥門,且打開將預設定 的正壓提供到壓力供應管的正壓閥門。 The discharge of the liquid may include providing a positive pressure to the pressure supply pipe as a discharge supply pressure, which supplies the first negative pressure to the pressure supply pipe by turning off the atmospheric pressure valve that supplies the atmospheric pressure to the pressure supply pipe a valve and a second negative pressure valve that will provide a pressure less than the first negative pressure to the second negative pressure valve of the pressure supply tube, and the opening will be preset The positive pressure is supplied to the positive pressure valve of the pressure supply line.

液體的排放的阻止可包含通過關掉正壓閥門、第二負壓閥門、大氣壓力閥門且僅打開第一負壓閥門來將第一負壓提供到壓力供應管作為排放阻止壓力。 The prevention of discharge of the liquid may include providing the first negative pressure to the pressure supply pipe as a discharge prevention pressure by closing the positive pressure valve, the second negative pressure valve, the atmospheric pressure valve, and opening only the first negative pressure valve.

液體的排放的阻止可包含將第一負壓提供到壓力供應管作為排放阻止壓力,其藉由通過關掉正壓閥門、第一負壓閥門和第二負壓閥門且僅打開大氣壓力閥門將壓力供應管轉換到大氣壓力狀態,以及接著僅打開第一負壓閥門。 Blocking the discharge of the liquid may include providing a first negative pressure to the pressure supply pipe as a discharge prevention pressure by closing the positive pressure valve, the first negative pressure valve, and the second negative pressure valve and opening only the atmospheric pressure valve The pressure supply pipe is switched to the atmospheric pressure state, and then only the first negative pressure valve is opened.

噴嘴中的液體凝聚的防止可包含通過關掉正壓閥門、大氣壓力閥門和第一負壓閥門且僅打開第二負壓閥門來將第二負壓提供到壓力供應管作為液體凝聚防止壓力。 Prevention of liquid agglomeration in the nozzle may include providing a second negative pressure to the pressure supply pipe as a liquid agglomeration prevention pressure by closing the positive pressure valve, the atmospheric pressure valve, and the first negative pressure valve and opening only the second negative pressure valve.

噴嘴中的液體凝聚的防止可包含通過關掉大氣壓力閥門和第二負壓閥門且僅打開正壓閥門和第一負壓閥門來將正壓與第一負壓之間的差壓力提供到壓力供應管作為液體凝聚防止壓力。 The prevention of liquid agglomeration in the nozzle may include providing a differential pressure between the positive pressure and the first negative pressure to the pressure by closing the atmospheric pressure valve and the second negative pressure valve and opening only the positive pressure valve and the first negative pressure valve The supply tube acts as a liquid to prevent pressure.

第二負壓可小於第一負壓。第一負壓可範圍從-20Kpa到-10Kpa,且第二負壓可範圍從-3Kpa到-1Kpa。 The second negative pressure may be less than the first negative pressure. The first negative pressure may range from -20 Kpa to -10 Kpa, and the second negative pressure may range from -3 Kpa to -1 Kpa.

根據本發明的另一個示範性實施例,一種用於防止分配器中的液體凝聚的設備包含:正壓閥門,其經配置以將預設定的正壓提供到壓力供應管;大氣壓力閥門,其經配置以將大氣壓力提供到壓力供應管;第一負壓閥門,其經配置以將第一負壓提供到壓力供應管;第二負壓閥門,其經配置以將小於第一負壓的第二負壓提供到壓力供應管;壓力供應管,其經配置以讓正壓閥門、大氣壓力閥門、第一負壓閥門和第二負壓閥門與針筒連通作為一個供應管;以及打開和閉合控制器,其經配置以當阻止液體從針筒排放時,關掉正壓閥門、第二負 壓閥門和大氣壓力閥門且僅打開第一負壓閥門以按第一負壓形式將排放阻止壓力提供到壓力供應管,且接著關掉正壓閥門、大氣壓力閥門和第一負壓閥門且打開第二負壓閥門以將第二負壓提供到壓力供應管作為液體凝聚防止壓力。 In accordance with another exemplary embodiment of the present invention, an apparatus for preventing condensation of liquid in a dispenser includes: a positive pressure valve configured to provide a predetermined positive pressure to a pressure supply tube; an atmospheric pressure valve, Configuring to provide atmospheric pressure to the pressure supply tube; a first negative pressure valve configured to provide a first negative pressure to the pressure supply tube; a second negative pressure valve configured to be less than the first negative pressure a second negative pressure is provided to the pressure supply pipe; the pressure supply pipe is configured to allow the positive pressure valve, the atmospheric pressure valve, the first negative pressure valve, and the second negative pressure valve to communicate with the syringe as a supply tube; and open and Closing the controller configured to close the positive pressure valve, the second negative when the liquid is prevented from being discharged from the syringe Pressing the valve and the atmospheric pressure valve and opening only the first negative pressure valve to supply the discharge prevention pressure to the pressure supply pipe in the form of the first negative pressure, and then closing the positive pressure valve, the atmospheric pressure valve and the first negative pressure valve and opening The second negative pressure valve supplies the second negative pressure to the pressure supply pipe as a liquid condensation prevention pressure.

根據本發明的再一示範性實施例,一種用於防止分配器的液體凝聚的設備包含:正壓閥門,其經配置以將預設定的正壓提供到壓力供應管;大氣壓力閥門,其經配置以將大氣壓力提供到壓力供應管;第一負壓閥門,其經配置以將第一負壓提供到壓力供應管;第二負壓閥門,其經配置以將小於第一負壓的第二負壓提供到壓力供應管;壓力供應管,其經配置以讓正壓閥門、大氣壓力閥門、第一負壓閥門和第二負壓閥門與針筒連通作為一個供應管;以及打開和關閉控制器,其經配置以當阻止液體從針筒排放時,關掉正壓閥門、第二負壓閥門和大氣壓力閥門且僅打開第一負壓閥門以按第一負壓形式將排放阻止壓力提供到壓力供應管,且接著關掉大氣壓力閥門和第二負壓閥門且打開正壓閥門和第一負壓閥門以將正壓與第一負壓之間的差壓力提供到壓力供應管作為液體凝聚防止壓力。 In accordance with still another exemplary embodiment of the present invention, an apparatus for preventing liquid agglomeration of a dispenser includes: a positive pressure valve configured to provide a predetermined positive pressure to a pressure supply tube; an atmospheric pressure valve Configuring to provide atmospheric pressure to the pressure supply tube; a first negative pressure valve configured to provide a first negative pressure to the pressure supply tube; a second negative pressure valve configured to reduce the first negative pressure Two negative pressures are supplied to the pressure supply pipe; the pressure supply pipe is configured to allow the positive pressure valve, the atmospheric pressure valve, the first negative pressure valve, and the second negative pressure valve to communicate with the syringe as a supply pipe; and to open and close a controller configured to close the positive pressure valve, the second negative pressure valve, and the atmospheric pressure valve and only open the first negative pressure valve to block the discharge pressure in the first negative pressure form when the liquid is prevented from being discharged from the syringe Providing to the pressure supply pipe, and then closing the atmospheric pressure valve and the second negative pressure valve and opening the positive pressure valve and the first negative pressure valve to provide a differential pressure between the positive pressure and the first negative pressure to the pressure supply pipe Prevent coagulation liquid pressure.

所述設備可進一步包含:壓力感測感測器,其經配置以檢查壓力供應管的壓力;以及殘餘量感測感測器,其經配置以感測針筒的液體的殘餘量。 The apparatus can further include: a pressure sensing sensor configured to check a pressure of the pressure supply tube; and a residual amount sensing sensor configured to sense a residual amount of liquid of the syringe.

打開和關閉控制器可在液體經排放後使用在大氣壓力狀態中的壓力感測感測器檢查壓力供應管的壓力,且使用殘餘量感測感測器檢查液體的殘餘量以取決於壓力供應管的壓力和液體的殘餘量將排放阻止壓力和液體凝聚防止壓力控制到所要的壓力。 Opening and closing the controller may check the pressure of the pressure supply pipe using a pressure sensing sensor in an atmospheric pressure state after the liquid is discharged, and check the residual amount of the liquid using the residual amount sensing sensor depending on the pressure supply pipe The pressure and residual amount of liquid will discharge to prevent pressure and liquid condensation from preventing pressure control to the desired pressure.

根據本發明的示範性實施例,可通過防止用於分配器的針筒 的噴嘴中的液體凝聚來使噴嘴的周圍的污染最小化。因此,可解決噴嘴清潔操作的不便性。另外,根據本發明的示範性實施例,可通過防止液體被吸入到針筒的噴嘴內來改進下一次排放時的排放回應速度。 According to an exemplary embodiment of the present invention, it is possible to prevent a syringe for a dispenser The liquid in the nozzle agglomerates to minimize contamination around the nozzle. Therefore, the inconvenience of the nozzle cleaning operation can be solved. In addition, according to an exemplary embodiment of the present invention, the discharge response speed at the next discharge can be improved by preventing liquid from being sucked into the nozzle of the syringe.

10‧‧‧基板 10‧‧‧Substrate

20‧‧‧糊狀物圖案 20‧‧‧Battery pattern

21‧‧‧開始點 21‧‧‧ starting point

22‧‧‧彎曲部分 22‧‧‧Bend section

23‧‧‧直部分 23‧‧‧ Straight part

24‧‧‧結束點 24‧‧‧ End point

30‧‧‧平臺 30‧‧‧ platform

100‧‧‧針筒 100‧‧‧Syringe

110‧‧‧噴嘴 110‧‧‧Nozzles

200‧‧‧閥門模組 200‧‧‧ valve module

210‧‧‧第一負壓閥門 210‧‧‧First negative pressure valve

220‧‧‧第二負壓閥門 220‧‧‧Second negative pressure valve

230‧‧‧大氣壓力閥門 230‧‧‧Atmospheric pressure valve

240‧‧‧正壓閥門 240‧‧‧ positive pressure valve

310‧‧‧第一負壓供應模組 310‧‧‧First negative pressure supply module

311‧‧‧第一真空泵 311‧‧‧First vacuum pump

312‧‧‧第一精確度真空調節器 312‧‧‧First Precision Vacuum Regulator

320‧‧‧第二負壓供應模組 320‧‧‧Second negative pressure supply module

321‧‧‧第二真空泵 321‧‧‧Second vacuum pump

322‧‧‧第二精確度真空調節器 322‧‧‧Second precision vacuum regulator

330‧‧‧正壓供應模組 330‧‧‧Positive pressure supply module

331‧‧‧壓縮發電機 331‧‧‧Compressed generator

332‧‧‧升高壓力壓縮器 332‧‧‧High pressure compressor

333‧‧‧比例壓力控制閥 333‧‧‧Proportional pressure control valve

410‧‧‧壓力感測感測器 410‧‧‧ Pressure Sensing Sensor

420‧‧‧殘餘量感測感測器 420‧‧‧Residual Sensing Sensor

500‧‧‧壓力供應管 500‧‧‧pressure supply tube

600‧‧‧打開和關閉控制器 600‧‧‧Open and close the controller

S410‧‧‧步驟 S410‧‧‧Steps

S420‧‧‧步驟 S420‧‧‧ steps

S430‧‧‧步驟 S430‧‧‧Steps

圖1為說明糊狀物圖案形成於用於單一面板的表面的邊緣處的外觀的圖。 FIG. 1 is a view illustrating an appearance of a paste pattern formed at an edge of a surface for a single panel.

圖2為用於排放糊狀物的設備的透視圖。 Figure 2 is a perspective view of an apparatus for discharging a paste.

圖3為說明根據本發明的示範性實施例的用於防止在針筒的噴嘴中的凝聚的設備的圖。 FIG. 3 is a diagram illustrating an apparatus for preventing agglomeration in a nozzle of a syringe, in accordance with an exemplary embodiment of the present invention.

圖4為說明根據本發明的示範性實施例的防止分配器中的液體凝聚的過程的流程圖。 4 is a flow chart illustrating a process of preventing condensation of liquid in a dispenser, in accordance with an exemplary embodiment of the present invention.

下文將參看附圖來詳細描述本發明的示例性實施例。然而,本發明限於下文所揭示的示範性實施例,但可以各種不同形式實施。將僅提供這些示範性實施例以便使本發明的揭露內容完整,且允許所屬領域的技術人員完全認識到本發明的範圍。附圖上的元件可經放大以便描述本發明,且相同元件將由相同參考數位表示。 Exemplary embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, the invention is limited to the exemplary embodiments disclosed below, but can be embodied in a variety of different forms. These exemplary embodiments are only provided to be complete in the light of the present disclosure, and the scope of the present invention is fully understood by those skilled in the art. Elements in the figures may be exaggerated to describe the invention, and the same elements will be denoted by the same reference numerals.

圖2為用於排放糊狀物的設備的透視圖。 Figure 2 is a perspective view of an apparatus for discharging a paste.

下文,雖然本發明將(例如)用於排放糊狀物的設備描述為分配器的實例,但顯而易見,除了用於排放糊狀物的設備外,本發明還可應用於用於排放各種液體的設備,例如,用於排放液晶的設備。本文中,液體的實例可包含具有低黏度的液體(例如,水)、具有高黏度的液體(例如,液晶、溶膠、各種混合液體、漿料和糊狀物)和 液體混合物。 Hereinafter, although the present invention describes, for example, an apparatus for discharging a paste as an example of a dispenser, it is apparent that the present invention can be applied to discharge of various liquids in addition to the apparatus for discharging the paste. A device, for example, a device for discharging liquid crystals. Herein, examples of the liquid may include a liquid having a low viscosity (for example, water), a liquid having a high viscosity (for example, a liquid crystal, a sol, various mixed liquids, a slurry, and a paste) and Liquid mixture.

根據本發明的示範性實施例排放設備包含基板坐落於其上的平臺30和包含針筒100的分配器,所述針筒100具有噴嘴110,通過所述噴嘴110將為原料的糊狀物排放到平臺30上的基板10以形成糊狀物圖案20。 An exhaust apparatus according to an exemplary embodiment of the present invention includes a platform 30 on which a substrate is seated and a dispenser including the syringe 100, the syringe 100 having a nozzle 110 through which a paste of a raw material is discharged The substrate 10 on the platform 30 is formed to form a paste pattern 20.

基板S可為在液晶顯示面板中使用的上部基板和下部基板中的任一者。在此情況下,雖然未在上部基板中說明,但(例如)彩色濾光片和共同電極形成於上部基板上,且(例如)薄膜電晶體和圖元電極形成於下部基板上。另外,當通過結合上部基板與下部基板形成液晶顯示面板時,由金屬糊狀物製成的多個圖案P可形成於上部基板和下部基板中的任一者上以在上部基板與下部基板之間傳導。根據本發明的示範性實施例,將(例如)銀(Ag)糊狀物用作存儲在用於分配器的針筒100中且排放到基板S上的糊狀物。 The substrate S may be any of an upper substrate and a lower substrate used in a liquid crystal display panel. In this case, although not illustrated in the upper substrate, for example, a color filter and a common electrode are formed on the upper substrate, and, for example, a thin film transistor and a picture electrode are formed on the lower substrate. In addition, when a liquid crystal display panel is formed by bonding an upper substrate and a lower substrate, a plurality of patterns P made of a metal paste may be formed on any of the upper substrate and the lower substrate to be on the upper substrate and the lower substrate. Conduction. According to an exemplary embodiment of the present invention, for example, a silver (Ag) paste is used as a paste stored in the syringe 100 for a dispenser and discharged onto the substrate S.

針筒100通過轉移單元在X軸和Y軸方向上移動以在基板S上形成圖案P。在此情況下,平臺30和針筒100通過例如電動機和軌道的驅動裝置移動(驅動運動)。當然,可使用除此之外的各種裝置。多個針筒100可通過單一驅動裝置移動(驅動運動)。此處,驅動單元可由單一轉移單元控制以同時驅動所有針筒100。 The syringe 100 is moved in the X-axis and Y-axis directions by the transfer unit to form a pattern P on the substrate S. In this case, the platform 30 and the syringe 100 are moved (driving motion) by a driving device such as an electric motor and a rail. Of course, various devices other than this can be used. The plurality of syringes 100 can be moved (driving motion) by a single drive. Here, the drive unit can be controlled by a single transfer unit to drive all of the syringes 100 simultaneously.

以上描述了針筒100在X軸和Y軸方向上水平地移動的情況。然而,本發明並不限於此,並且因此平臺30可在X軸和Y軸方向上移動以將糊狀物排放到基板10。另外,平臺30和針筒100兩者皆可在X軸和Y軸方向上移動以排放糊狀物,且平臺30在一個軸線方向上移動且針筒100可在另一軸線方向上移動以排放為液體的糊狀物。 The case where the syringe 100 is horizontally moved in the X-axis and Y-axis directions has been described above. However, the present invention is not limited thereto, and thus the stage 30 is movable in the X-axis and Y-axis directions to discharge the paste to the substrate 10. In addition, both the platform 30 and the syringe 100 are movable in the X-axis and Y-axis directions to discharge the paste, and the platform 30 is moved in one axial direction and the syringe 100 is movable in the other axis direction to discharge It is a liquid paste.

雖未說明,但分配器包含距離感測器(未說明)。距離感測器經安裝以與噴嘴110間隔開以測量噴嘴110與基板10之間的間隙。距離感測器配置有朝向基板10發射光的發光單元(未說明)和接收從發光單元(未說明)發射的光的光接收單元(未說明)。在此情況下,發光單元(未說明)和光接收單元(未說明)被配置為一體,且可經安置以相互間隔開預定距離。另外,針筒100基於由距離感測器測量的測量值而上升和下降,且因此可將基板10與噴嘴110之間的間隙控制為(例如)40μm。 Although not illustrated, the dispenser includes a distance sensor (not illustrated). A distance sensor is mounted to be spaced apart from the nozzle 110 to measure a gap between the nozzle 110 and the substrate 10. The distance sensor is configured with a light emitting unit (not illustrated) that emits light toward the substrate 10 and a light receiving unit (not illustrated) that receives light emitted from the light emitting unit (not illustrated). In this case, the light emitting unit (not illustrated) and the light receiving unit (not illustrated) are configured as one body and may be disposed to be spaced apart from each other by a predetermined distance. In addition, the syringe 100 is raised and lowered based on the measured value measured by the distance sensor, and thus the gap between the substrate 10 and the nozzle 110 can be controlled to, for example, 40 μm.

然而,在排放糊狀物圖案後,需要形成接下來的糊狀物圖案的等待時間。此時,液體凝聚(液滴)發生在噴嘴的尖端。液體凝聚發生是因為在噴嘴的下部末端處的糊狀物因由針筒100中的原材料的殘餘高度產生的壓力而聚結。 However, after discharging the paste pattern, it is necessary to form a waiting time for the next paste pattern. At this point, liquid agglomeration (droplets) occurs at the tip of the nozzle. Liquid agglomeration occurs because the paste at the lower end of the nozzle coalesces due to the pressure generated by the residual height of the raw material in the syringe 100.

為了防止在噴嘴的末端處的液體凝聚,本發明的示範性實施例檢查針筒100中在糊狀物的排放後剩餘的糊狀物的殘餘量,且執行控制以針對每一步驟維持針筒100的內部壓力,由此防止歸因於糊狀物的殘餘量的液體凝聚。此將參看圖3來描述。 In order to prevent liquid agglomeration at the end of the nozzle, an exemplary embodiment of the present invention checks the residual amount of the paste remaining in the syringe 100 after the discharge of the paste, and performs control to maintain the syringe for each step. The internal pressure of 100, thereby preventing liquid agglomeration due to the residual amount of the paste. This will be described with reference to FIG.

圖3為說明根據本發明的示範性實施例的用於防止針筒的噴嘴中的液體凝聚的設備的圖。 3 is a diagram illustrating an apparatus for preventing condensation of liquid in a nozzle of a syringe, in accordance with an exemplary embodiment of the present invention.

將填充有糊狀物的針筒100安裝到配置分配器的頭部單元(未說明),且將噴嘴110安裝在針筒100之下。通過噴嘴110將填充在針筒100中的糊狀物排放到外部,且因此平臺30上的基板10形成有糊狀物圖案。感測針筒中的液體的殘餘量的殘餘量感測感測器420可連接到針筒100。 The syringe 100 filled with the paste is mounted to a head unit (not illustrated) that configures the dispenser, and the nozzle 110 is mounted below the syringe 100. The paste filled in the syringe 100 is discharged to the outside through the nozzle 110, and thus the substrate 10 on the stage 30 is formed with a paste pattern. A residual amount sensing sensor 420 that senses a residual amount of liquid in the syringe can be coupled to the syringe 100.

用於防止分配器中的液體凝聚的設備包含閥門模組200,其 進行打開和關閉以用於確定是否在針筒100和將閥門模組200連接到針筒100的壓力供應管500中提供壓力。閥門模組200包含:正壓閥門240,其將預設定的正壓提供到壓力供應管500;大氣壓力閥門230,其將大氣壓力提供到壓力供應管500;第一負壓閥門210,其將第一負壓提供到壓力供應管500;和第二負壓閥門220,其將第二負壓提供到壓力供應管500。 Apparatus for preventing agglomeration of liquid in a dispenser comprising a valve module 200, Opening and closing are performed for determining whether pressure is supplied in the syringe 100 and the pressure supply tube 500 that connects the valve module 200 to the syringe 100. The valve module 200 includes a positive pressure valve 240 that provides a predetermined positive pressure to the pressure supply tube 500, an atmospheric pressure valve 230 that provides atmospheric pressure to the pressure supply tube 500, and a first negative pressure valve 210 that will The first negative pressure is supplied to the pressure supply pipe 500; and the second negative pressure valve 220 supplies the second negative pressure to the pressure supply pipe 500.

正壓閥門240進行打開和關閉以用於確定是否在呈正(+)壓力形式的設定壓力下將從正壓供應模組330提供的惰性氣體(例如,Ar、N2氣體)提供到壓力供應管500。當打開正壓閥門240時,將正壓的惰性氣體提供到壓力供應管500,且當關掉正壓閥門240時,不將通過正壓閥門240的正壓提供到壓力供應管500。正(+)壓力是預設定的壓力且通過正壓供應模組330提供。在此情況下,正壓意味等於或大於任何參考或正常壓力的壓力。例如,當參考壓力為零(0)時,正壓意味等於或大於零的壓力。正壓供應模組330可包含壓縮發電機331、升高壓力壓縮器332和比例壓力控制閥333。當壓縮發電機331產生預定壓力以將惰性氣體提供到升高壓力壓縮器時332,升高壓力壓縮器332將惰性氣體提供到比例壓力控制閥333,從而將惰性氣體的壓力增大到1MPa,且比例控制閥333將增大到1MPa的惰性氣體控制為設定的正壓(例如,約0到10Kpa)且將受控制的惰性氣體提供到正壓閥門240的入口。 The positive pressure valve 240 is opened and closed for determining whether to supply an inert gas (for example, Ar, N 2 gas) supplied from the positive pressure supply module 330 to the pressure supply pipe at a set pressure in the form of a positive (+) pressure. 500. When the positive pressure valve 240 is opened, a positive pressure inert gas is supplied to the pressure supply pipe 500, and when the positive pressure valve 240 is closed, the positive pressure through the positive pressure valve 240 is not supplied to the pressure supply pipe 500. The positive (+) pressure is a predetermined pressure and is provided by the positive pressure supply module 330. In this case, positive pressure means a pressure equal to or greater than any reference or normal pressure. For example, when the reference pressure is zero (0), positive pressure means a pressure equal to or greater than zero. The positive pressure supply module 330 may include a compression generator 331, a boost pressure compressor 332, and a proportional pressure control valve 333. When the compression generator 331 generates a predetermined pressure to supply the inert gas to the elevated pressure compressor 332, the elevated pressure compressor 332 supplies the inert gas to the proportional pressure control valve 333, thereby increasing the pressure of the inert gas to 1 MPa, And the proportional control valve 333 controls the inert gas increased to 1 MPa to a set positive pressure (for example, about 0 to 10 Kpa) and supplies the controlled inert gas to the inlet of the positive pressure valve 240.

大氣壓力閥門230進行打開和關閉以用於確定是否將大氣壓力提供到壓力供應管500。當打開大氣壓力閥門230時,將壓力供應管500維持在室外大氣壓力下,且當關掉大氣壓力閥門230時,不將室外大氣壓提供到壓力供應管500。 The atmospheric pressure valve 230 is opened and closed for determining whether atmospheric pressure is supplied to the pressure supply pipe 500. When the atmospheric pressure valve 230 is opened, the pressure supply pipe 500 is maintained at outdoor atmospheric pressure, and when the atmospheric pressure valve 230 is turned off, the outdoor atmospheric pressure is not supplied to the pressure supply pipe 500.

第一負壓閥門210進行打開和關閉以用於確定是否將第一負壓從第一負壓供應模組310提供到壓力供應管500。當打開第一負壓閥門210時,將第一負壓提供到壓力供應管500,且當關掉第一負壓閥門210時,不將通過第一負壓閥門210的第一負壓提供到壓力供應管500。第一負(-)壓力具有設定的第一負壓值。在此情況下,負壓意味小於任何參考或正常壓力的壓力。例如,當正常壓力為零(0)時,負壓意味小於零的壓力,即,負壓。通過第一負壓供應模組310提供第一負壓。第一負壓供應模組310可包含第一真空泵311和第一精確度真空調節器312。當第一真空泵311產生第一負壓時,精確度真空調節器312控制第一負壓為所要的第一負值(例如,-20Kpa到-10Kpa的第一負壓),且將受控制的第一負壓提供到第一負壓閥門210的入口。 The first negative pressure valve 210 is opened and closed for determining whether the first negative pressure is supplied from the first negative pressure supply module 310 to the pressure supply pipe 500. When the first negative pressure valve 210 is opened, the first negative pressure is supplied to the pressure supply pipe 500, and when the first negative pressure valve 210 is closed, the first negative pressure through the first negative pressure valve 210 is not supplied to Pressure supply tube 500. The first negative (-) pressure has a set first negative pressure value. In this case, the negative pressure means a pressure less than any reference or normal pressure. For example, when the normal pressure is zero (0), the negative pressure means a pressure less than zero, that is, a negative pressure. The first negative pressure is provided by the first negative pressure supply module 310. The first vacuum supply module 310 can include a first vacuum pump 311 and a first precision vacuum regulator 312. When the first vacuum pump 311 generates the first negative pressure, the accuracy vacuum regulator 312 controls the first negative pressure to a desired first negative value (eg, a first negative pressure of -20 Kpa to -10 Kpa), and will be controlled. The first negative pressure is supplied to the inlet of the first negative pressure valve 210.

第二負壓閥門220進行打開和關閉以用於確定是否將為小於從第一負壓閥門210提供的第一負壓的微負壓的第二負壓從第二負壓供應模組320提供到壓力供應管500。當打開第二負壓閥門220時,將第二負壓提供到壓力供應管500,且當關掉第二負壓閥門220時,不將通過第二負壓閥門220的第二負壓提供到壓力供應管500。第二負壓具有設定的第二負壓值且通過第二負壓供應模組320提供。在此情況下,第二負壓為與以上描述的第一負壓相比的壓力,且小於作為負值的第一負壓。即,第二負壓的絕對值小於第一負壓的絕對值。因此,如與第一負壓相比,在於負方向上施加到物件的力下,第二負壓甚至更弱。第二負壓供應模組320可包含第二真空泵321和第二精確度真空調節器322。當第二真空泵321產生負壓時,第二精確度真空調節器322產生為小於第一負壓的壓力的第二負壓(例如,為微負壓 的-3Kpa到-1Kpa的第二負壓)且將產生的第二負壓提供到第二負壓閥門220的入口。為了參考,可將正壓閥門240、大氣壓力閥門230、第一負壓閥門210和第二負壓閥門220實施為電磁電子閥門。 The second negative pressure valve 220 is opened and closed for determining whether a second negative pressure that is less than the micro negative pressure of the first negative pressure supplied from the first negative pressure valve 210 is supplied from the second negative pressure supply module 320. To the pressure supply pipe 500. When the second negative pressure valve 220 is opened, the second negative pressure is supplied to the pressure supply pipe 500, and when the second negative pressure valve 220 is turned off, the second negative pressure through the second negative pressure valve 220 is not supplied to Pressure supply tube 500. The second negative pressure has a set second negative pressure value and is provided by the second negative pressure supply module 320. In this case, the second negative pressure is a pressure compared to the first negative pressure described above, and is smaller than the first negative pressure as a negative value. That is, the absolute value of the second negative pressure is smaller than the absolute value of the first negative pressure. Therefore, the second negative pressure is even weaker under the force applied to the object in the negative direction as compared with the first negative pressure. The second negative pressure supply module 320 may include a second vacuum pump 321 and a second precision vacuum regulator 322. When the second vacuum pump 321 generates a negative pressure, the second accuracy vacuum regulator 322 generates a second negative pressure that is less than the pressure of the first negative pressure (eg, is a micro-negative pressure) The second negative pressure of -3 Kpa to -1 Kpa) and the resulting second negative pressure is supplied to the inlet of the second negative pressure valve 220. For reference, the positive pressure valve 240, the atmospheric pressure valve 230, the first negative pressure valve 210, and the second negative pressure valve 220 may be implemented as electromagnetic electronic valves.

壓力供應管500為正壓閥門240、大氣壓力閥門230、第一負壓閥門210和第一負壓閥門220與針筒100連通以作為一個供應管所通過的供應管。因此,壓力供應管500中的壓力取決於正壓閥門240、大氣壓力閥門230、第一負壓閥門210和第一負壓閥門220是否每一者被打開而改變,且因此影響連接到壓力供應管500的針筒100內的糊狀物的排氣壓力。因此,壓力供應管500中的壓力等於施加到針筒100中的糊狀物的壓力。另外,可進一步提供感測壓力供應管500中的壓力的壓力感測感測器410。 The pressure supply pipe 500 is a supply pipe through which the positive pressure valve 240, the atmospheric pressure valve 230, the first negative pressure valve 210, and the first negative pressure valve 220 communicate with the syringe 100 as a supply pipe. Therefore, the pressure in the pressure supply pipe 500 depends on whether the positive pressure valve 240, the atmospheric pressure valve 230, the first negative pressure valve 210, and the first negative pressure valve 220 are each opened to change, and thus affects the connection to the pressure supply. The exhaust pressure of the paste within the syringe 100 of the tube 500. Therefore, the pressure in the pressure supply tube 500 is equal to the pressure applied to the paste in the syringe 100. In addition, a pressure sensing sensor 410 that senses the pressure in the pressure supply tube 500 may be further provided.

打開和關閉控制器600將呈正壓形式的排放供應壓力提供到針筒100的壓力供應管500以分別控制正壓閥門240、大氣壓力閥門230、第一負壓閥門210和第一負壓閥門220,以便通過針筒100的噴嘴110排放液體。即,在希望通過針筒100排放糊狀物的情況下,打開和關閉控制器600關掉大氣壓力閥門230、第一負壓閥門210和第二負壓閥門220且僅打開正壓閥門240以將呈正壓形式的排放供應壓力提供到壓力供應管500。 The opening and closing controller 600 supplies a discharge supply pressure in a positive pressure form to the pressure supply pipe 500 of the syringe 100 to control the positive pressure valve 240, the atmospheric pressure valve 230, the first negative pressure valve 210, and the first negative pressure valve 220, respectively. In order to discharge the liquid through the nozzle 110 of the syringe 100. That is, in the case where it is desired to discharge the paste through the syringe 100, the opening and closing controller 600 turns off the atmospheric pressure valve 230, the first negative pressure valve 210, and the second negative pressure valve 220 and opens only the positive pressure valve 240. The discharge supply pressure in the form of a positive pressure is supplied to the pressure supply pipe 500.

另外,打開和關閉控制器600由以下兩個方法控制以用於阻止糊狀物的排放以便防止糊狀物被吸入到噴嘴的內部,同時防止糊狀物被排放。 In addition, the opening and closing controller 600 is controlled by the following two methods for preventing the discharge of the paste in order to prevent the paste from being sucked into the inside of the nozzle while preventing the paste from being discharged.

用於防止糊狀物被吸入到噴嘴內同時防止糊狀物被排放的第一方法首先關掉正壓閥門240、第二負壓閥門220、大氣壓力閥門230且僅打開第一負壓閥門210以按第一負壓形式將排放阻止壓力提 供到壓力供應管500,由此阻止液體被排放。為了阻止通過噴嘴排放的糊狀物,僅打開第一負壓閥門210以將範圍從-20Kpa至-10Kpa的第一負壓提供到壓力供應管500,作為排放阻止壓力。接下來,為了防止噴嘴中的液體凝聚,關掉正壓閥門240、大氣壓力閥門230和第一負壓閥門210且僅打開第二負壓閥門220以將第二負壓提供到壓力供應管500,作為小於排放阻止壓力的液體凝聚防止壓力。打開第二負壓閥門220以將為微壓力的範圍從-3Kpa至-1Kpa的第二負壓提供到壓力供應管500作為液體凝聚防止壓力以防止糊狀物被吸入至噴嘴內,同時防止為液體的糊狀物從針筒100的噴嘴110排放。 The first method for preventing the paste from being sucked into the nozzle while preventing the paste from being discharged first turns off the positive pressure valve 240, the second negative pressure valve 220, the atmospheric pressure valve 230, and opens only the first negative pressure valve 210. In order to prevent the pressure from being discharged in the form of the first negative pressure It is supplied to the pressure supply pipe 500, thereby preventing the liquid from being discharged. In order to prevent the paste discharged through the nozzle, only the first negative pressure valve 210 is opened to supply a first negative pressure ranging from -20 Kpa to -10 Kpa to the pressure supply pipe 500 as a discharge prevention pressure. Next, in order to prevent the liquid in the nozzle from agglomerating, the positive pressure valve 240, the atmospheric pressure valve 230 and the first negative pressure valve 210 are closed and only the second negative pressure valve 220 is opened to supply the second negative pressure to the pressure supply pipe 500. , as a liquid condensation prevention pressure that is less than the discharge prevention pressure. The second negative pressure valve 220 is opened to supply a second negative pressure ranging from -3 Kpa to -1 Kpa to the pressure supply pipe 500 as a liquid agglomeration preventing pressure to prevent the paste from being sucked into the nozzle while preventing The liquid paste is discharged from the nozzle 110 of the syringe 100.

此外,用於防止糊狀物被吸入到噴嘴內同時防止糊狀物被排放的第二方法首先關掉正壓閥門240、第二負壓閥門220、大氣壓力閥門230且僅打開第一負壓閥門210以按第一負壓形式將排放阻止壓力提供到壓力供應管500,由此阻止液體被排放。接下來,關掉大氣壓力閥門230和第二負壓閥門220且打開正壓閥門240和第一負壓閥門210以將正壓與第一負壓之間的差壓力提供到壓力供應管500,作為小於排放阻止壓力的液體凝聚防止壓力。正壓與第一負壓之間的差壓力產生於壓力供應管500內。例如,產生為通過將-20Kpa到-10Kpa的第一負壓加到0Kpa到17Kpa的正壓獲得的差壓力的-3Kpa到-1Kpa的壓力,可將其維持在壓力供應管500中,作為液體凝聚防止壓力。在第一方法的情況下,需要將第一負壓狀態轉換成第二負壓,且因此,回應速度相對較低。另一方面,如第二方法,液體的排放停止且接著添加正壓以立即提供液體凝聚防止壓力作為正壓與第一負壓之間和差壓力,由此使阻止糊狀物的排放的回應速度變快。 Further, the second method for preventing the paste from being sucked into the nozzle while preventing the paste from being discharged first turns off the positive pressure valve 240, the second negative pressure valve 220, the atmospheric pressure valve 230, and opens only the first negative pressure. The valve 210 supplies the discharge prevention pressure to the pressure supply pipe 500 in the form of the first negative pressure, thereby preventing the liquid from being discharged. Next, the atmospheric pressure valve 230 and the second negative pressure valve 220 are closed and the positive pressure valve 240 and the first negative pressure valve 210 are opened to provide a differential pressure between the positive pressure and the first negative pressure to the pressure supply tube 500, The liquid agglomeration prevention pressure is less than the discharge prevention pressure. The differential pressure between the positive pressure and the first negative pressure is generated in the pressure supply tube 500. For example, a pressure of -3 Kpa to -1 Kpa which is a differential pressure obtained by adding a first negative pressure of -20 Kpa to -10 Kpa to a positive pressure of 0 Kpa to 17 Kpa can be maintained in the pressure supply pipe 500 as a liquid Condensation prevents stress. In the case of the first method, it is necessary to convert the first negative pressure state to the second negative pressure, and therefore, the response speed is relatively low. On the other hand, as in the second method, the discharge of the liquid is stopped and then the positive pressure is added to immediately provide the liquid agglomeration prevention pressure as the positive pressure and the first negative pressure and the differential pressure, thereby making the response preventing the discharge of the paste The speed is getting faster.

同時,打開和關閉控制器600可控制排放阻止壓力和液體凝 聚防止壓力。在排放液體後的大氣壓力狀態中,打開和關閉控制器600使用壓力感測感測器410算出壓力供應管500的壓力,且使用殘餘量感測感測器420算出針筒中的糊狀物(液體)的殘餘量以取決於壓力供應管500的壓力和糊狀物的殘餘量將排放阻止壓力和液體凝聚防止壓力控制到所要的壓力。例如,在不排放液體的大氣壓力狀態中,當將壓力供應管500的第一負壓檢查為減小時,可排放糊狀物,且因此可更增大液體凝聚防止壓力。相反,在不排放液體的大氣壓力狀態中,當將壓力供應管500的壓力檢查為具有作為負值的高第一負壓時,可反過來將糊狀物引入到噴嘴內且因此可更降低液體凝聚防止壓力。 At the same time, the opening and closing controller 600 can control the discharge to prevent pressure and liquid condensation. Gather to prevent stress. In the atmospheric pressure state after discharging the liquid, the opening and closing controller 600 calculates the pressure of the pressure supply pipe 500 using the pressure sensing sensor 410, and calculates the paste in the syringe using the residual amount sensing sensor 420 (liquid The residual amount is controlled to the desired pressure by the discharge preventing pressure and the liquid agglomeration preventing pressure depending on the pressure of the pressure supply pipe 500 and the residual amount of the paste. For example, in the atmospheric pressure state in which the liquid is not discharged, when the first negative pressure of the pressure supply pipe 500 is checked to be reduced, the paste can be discharged, and thus the liquid agglomeration preventing pressure can be further increased. In contrast, in the atmospheric pressure state in which the liquid is not discharged, when the pressure of the pressure supply pipe 500 is checked to have a high first negative pressure as a negative value, the paste can be introduced into the nozzle in turn and thus can be further lowered Liquid condensation prevents stress.

圖4為說明根據本發明的示範性實施例的防止分配器中的液體凝聚的過程的流程圖。 4 is a flow chart illustrating a process of preventing condensation of liquid in a dispenser, in accordance with an exemplary embodiment of the present invention.

執行通過按正壓形式將排放供應壓力提供到連接到針筒100的壓力供應管500來通過針筒100的噴嘴排放液體的過程(S410)。在希望排放液體的情況下,關掉將大氣壓力提供到壓力供應管500的大氣壓力閥門230、將第一負壓提供到壓力供應管500的第一負壓閥門210和將為小於第一負壓的壓力的第二負壓提供到壓力供應管500的第二負壓閥門220,且僅打開將預設定的正壓提供到壓力供應管500的正壓閥門240以將正壓提供到壓力供應管500作為排放供應壓力。 The process of discharging the liquid through the nozzle of the syringe 100 by supplying the discharge supply pressure to the pressure supply pipe 500 connected to the syringe 100 in a positive pressure form is performed (S410). In the case where it is desired to discharge the liquid, the atmospheric pressure valve 230 that supplies atmospheric pressure to the pressure supply pipe 500 is turned off, the first negative pressure valve 210 that supplies the first negative pressure to the pressure supply pipe 500, and will be less than the first negative The second negative pressure of the pressure is supplied to the second negative pressure valve 220 of the pressure supply pipe 500, and only the positive pressure valve 240 that supplies the predetermined positive pressure to the pressure supply pipe 500 is opened to supply the positive pressure to the pressure supply Tube 500 acts as a discharge supply pressure.

為了在通過針筒100的噴嘴施加為液體的糊狀物時通過阻止糊狀物的排放來防止噴嘴中的液體凝聚,首先,將呈第一負壓形式的排放阻止壓力提供到壓力供應管500以阻止糊狀物的排放(S420)。關掉正壓閥門240、第二負壓閥門220和大氣壓力閥門230且僅打開第一負壓閥門210以將第一負壓提供到壓力供應管500作為排放阻止 壓力。第一負壓具有範圍從-20Kpa到-10Kpa的大小以破壞針筒100中的糊狀物和排放的糊狀物。然而,可首先執行在施加第一負壓前將排氣壓力狀態轉換成大氣壓力狀態的過程。即,關掉正壓閥門240、第一負壓閥門210和第二負壓閥門220且僅打開大氣壓力閥門230以將壓力供應管500轉換成大氣壓力狀態,且接著僅打開第一負壓閥門210,由此將第一負壓提供到壓力供應管500作為排放阻止壓力。將正壓形式的排氣壓力立即轉換成第一負壓的排放阻止壓力可影響例如閥門的週邊裝置,且因此可執行將排氣壓力轉換成大氣壓力狀態和接著排放阻止壓力的過程。 In order to prevent liquid agglomeration in the nozzle by preventing the discharge of the paste when the paste which is a liquid is applied through the nozzle of the syringe 100, first, the discharge prevention pressure in the form of the first negative pressure is supplied to the pressure supply pipe 500. To prevent the discharge of the paste (S420). The positive pressure valve 240, the second negative pressure valve 220, and the atmospheric pressure valve 230 are turned off and only the first negative pressure valve 210 is opened to supply the first negative pressure to the pressure supply tube 500 as a discharge stop pressure. The first negative pressure has a size ranging from -20 Kpa to -10 Kpa to destroy the paste in the syringe 100 and the discharged paste. However, the process of converting the exhaust pressure state to the atmospheric pressure state before applying the first negative pressure may be performed first. That is, the positive pressure valve 240, the first negative pressure valve 210, and the second negative pressure valve 220 are turned off and only the atmospheric pressure valve 230 is opened to convert the pressure supply tube 500 into an atmospheric pressure state, and then only the first negative pressure valve is opened. 210, thereby supplying the first negative pressure to the pressure supply pipe 500 as the discharge prevention pressure. The discharge pressure in the positive pressure form is immediately converted into the first negative pressure. The discharge prevention pressure can affect the peripheral device such as the valve, and thus the process of converting the exhaust pressure into the atmospheric pressure state and then the discharge prevention pressure can be performed.

在阻止糊狀物阻止針筒100的噴嘴後,執行提供為小於排放阻止壓力的壓力的液體凝聚防止壓力作為絕對值以防止噴嘴中的液體凝聚和防止糊狀物被引入到噴嘴的內部的過程(S430)。甚至在排放停止後,當連續地提供具有-20Kpa到-10Kpa的大小的第一負壓時,可出現反過來將糊狀物引入到噴嘴內的問題。因此,為了防止以上問題,在糊狀物的排放停止後,提供小於第一負壓的液體凝聚防止壓力以防止噴嘴中的液體凝聚和防止糊狀物被反過來引入到噴嘴內。 After the paste is prevented from blocking the nozzle of the syringe 100, a process of providing a liquid agglomeration preventing pressure which is a pressure smaller than the discharge preventing pressure as an absolute value to prevent the liquid in the nozzle from agglomerating and preventing the paste from being introduced into the inside of the nozzle is performed. (S430). Even when the first negative pressure having a size of -20 Kpa to -10 Kpa is continuously supplied after the discharge is stopped, there is a problem that the paste is introduced into the nozzle in turn. Therefore, in order to prevent the above problem, after the discharge of the paste is stopped, the liquid agglomeration preventing pressure smaller than the first negative pressure is supplied to prevent the liquid in the nozzle from agglomerating and to prevent the paste from being introduced into the nozzle in reverse.

用於防止糊狀物被吸入到噴嘴的內部同時防止糊狀物被排放的方法可由以下兩個方法形成。 The method for preventing the paste from being sucked into the inside of the nozzle while preventing the paste from being discharged can be formed by the following two methods.

用於防止糊狀物被吸入到噴嘴內同時防止糊狀物被排放的第一方法關掉正壓閥門240、大氣壓力閥門230和第一負壓閥門210且僅打開第二負壓閥門220以將第二負壓提供到壓力供應管500,作為小於排放阻止壓力的液體凝聚防止壓力。打開第二負壓閥門220以將為微壓力的範圍從-3Kpa至-1Kpa的第二負壓提供到壓力供應管500作為液體凝聚防止壓力以防止糊狀物被吸入至噴嘴內,同時防止 為液體的糊狀物從針筒100的噴嘴110排放。 A first method for preventing the paste from being drawn into the nozzle while preventing the paste from being discharged turns off the positive pressure valve 240, the atmospheric pressure valve 230 and the first negative pressure valve 210 and opens only the second negative pressure valve 220 The second negative pressure is supplied to the pressure supply pipe 500 as a liquid condensation prevention pressure smaller than the discharge prevention pressure. The second negative pressure valve 220 is opened to supply a second negative pressure ranging from -3 Kpa to -1 Kpa to the pressure supply pipe 500 as a liquid coagulation preventing pressure to prevent the paste from being sucked into the nozzle while preventing A paste that is a liquid is discharged from the nozzle 110 of the syringe 100.

此外,用於防止糊狀物被吸入到噴嘴內同時防止糊狀物被排放的第二方法關掉大氣壓力閥門230和第二負壓閥門220且打開正壓閥門240和第一負壓閥門210以將正壓與第一負壓之間的差壓力提供到壓力供應管500,作為小於排放阻止壓力的液體凝聚防止壓力。例如,使用範圍從0Kpa到17Kpa的正壓範圍和從-20Kpa到-10Kpa的第一負壓,且因此產生-3Kpa到-1Kpa的壓力作為其間的差壓力,可將所述差壓力提供到壓力供應管500作為液體凝聚防止壓力。液體的排放停止,且接著提供正壓以立即提供液體凝聚防止壓力作為正壓與第一負壓之間的差壓力,由此使阻止糊狀物的排放的回應速度變快。 Further, a second method for preventing the paste from being sucked into the nozzle while preventing the paste from being discharged turns off the atmospheric pressure valve 230 and the second negative pressure valve 220 and opens the positive pressure valve 240 and the first negative pressure valve 210. The differential pressure between the positive pressure and the first negative pressure is supplied to the pressure supply pipe 500 as a liquid condensation prevention pressure smaller than the discharge prevention pressure. For example, a positive pressure range ranging from 0 Kpa to 17 Kpa and a first negative pressure from -20 Kpa to -10 Kpa are used, and thus a pressure of -3 Kpa to -1 Kpa is generated as a differential pressure therebetween, which can be supplied to the pressure The supply pipe 500 serves as a liquid agglomeration preventing pressure. The discharge of the liquid is stopped, and then a positive pressure is supplied to immediately provide the liquid agglomeration prevention pressure as the differential pressure between the positive pressure and the first negative pressure, thereby making the response speed of preventing the discharge of the paste faster.

本發明是參看附圖及前述示範性實施例描述的,但其並不限於此,且由所附權利要求書限制。本發明可由所屬領域的技術人員在不脫離下文將描述的權利要求書的技術精神的情況下不同地改變和修改。 The invention is described with reference to the drawings and the foregoing exemplary embodiments, but is not limited thereto, and is limited by the appended claims. The present invention can be variously changed and modified by those skilled in the art without departing from the technical spirit of the claims to be described below.

10‧‧‧基板 10‧‧‧Substrate

30‧‧‧平臺 30‧‧‧ platform

100‧‧‧針筒 100‧‧‧Syringe

110‧‧‧噴嘴 110‧‧‧Nozzles

200‧‧‧閥門模組 200‧‧‧ valve module

210‧‧‧第一負壓閥門 210‧‧‧First negative pressure valve

220‧‧‧第二負壓閥門 220‧‧‧Second negative pressure valve

230‧‧‧大氣壓力閥門 230‧‧‧Atmospheric pressure valve

240‧‧‧正壓閥門 240‧‧‧ positive pressure valve

310‧‧‧第一負壓供應模組 310‧‧‧First negative pressure supply module

311‧‧‧第一真空泵 311‧‧‧First vacuum pump

312‧‧‧第一精確度真空調節器 312‧‧‧First Precision Vacuum Regulator

320‧‧‧第二負壓供應模組 320‧‧‧Second negative pressure supply module

321‧‧‧第二真空泵 321‧‧‧Second vacuum pump

322‧‧‧第二精確度真空調節器 322‧‧‧Second precision vacuum regulator

330‧‧‧正壓供應模組 330‧‧‧Positive pressure supply module

331‧‧‧壓縮發電機 331‧‧‧Compressed generator

332‧‧‧升高壓力壓縮器 332‧‧‧High pressure compressor

333‧‧‧比例壓力控制閥 333‧‧‧Proportional pressure control valve

410‧‧‧壓力感測感測器 410‧‧‧ Pressure Sensing Sensor

420‧‧‧殘餘量感測感測器 420‧‧‧Residual Sensing Sensor

500‧‧‧壓力供應管 500‧‧‧pressure supply tube

600‧‧‧打開和關閉控制器 600‧‧‧Open and close the controller

Claims (13)

一種用於防止分配器中的液體凝聚的方法,包括:通過按正壓形式將排放供應壓力提供到連接到針筒的壓力供應管來通過所述針筒的噴嘴排放液體;在希望阻止排放所述液體的情況下,通過按第一負壓形式將排放阻止壓力提供到所述壓力供應管來阻止所述液體的所述排放;以及通過阻止所述液體的所述排放以及接著將為小於所述排放阻止壓力的第二負壓的液體凝聚防止壓力提供到所述壓力供應管來防止所述噴嘴中的所述液體凝聚。 A method for preventing agglomeration of a liquid in a dispenser, comprising: discharging a liquid through a nozzle of the syringe by supplying a discharge supply pressure to a pressure supply pipe connected to the syringe in a positive pressure form; In the case of a liquid, the discharge of the liquid is prevented by providing a discharge prevention pressure to the pressure supply pipe in a first negative pressure form; and by preventing the discharge of the liquid and then going to be less than A liquid agglomeration preventing pressure of a second negative pressure that discharges the prevention pressure is supplied to the pressure supply pipe to prevent the liquid in the nozzle from agglomerating. 如申請專利範圍第1項所述的方法,所述液體的所述排放包含將所述正壓提供到所述壓力供應管作為所述排放供應壓力,其通過關掉將大氣壓力提供到所述壓力供應管的大氣壓力閥門、將第一負壓提供到所述壓力供應管的第一負壓閥門以及將為小於所述第一負壓的壓力的第二負壓提供到所述壓力供應管的第二負壓閥門,以及打開將預設定的正壓提供到所述壓力供應管的正壓閥門。 The method of claim 1, wherein the discharging of the liquid comprises supplying the positive pressure to the pressure supply pipe as the discharge supply pressure, which provides atmospheric pressure to the An atmospheric pressure valve of the pressure supply pipe, a first negative pressure valve that supplies a first negative pressure to the pressure supply pipe, and a second negative pressure that is a pressure smaller than the first negative pressure to the pressure supply pipe a second negative pressure valve, and a positive pressure valve that opens a predetermined positive pressure to the pressure supply tube. 如申請專利範圍第2項所述的方法,所述液體的所述排放的所述阻止包含通過關掉所述正壓閥門、所述第二負壓閥門、所述大氣壓力閥門以及僅打開第一負壓閥門來將所述第一負壓提供到所述壓力供應管作為所述排放阻止壓力。 The method of claim 2, wherein the preventing the discharge of the liquid comprises closing the positive pressure valve, the second negative pressure valve, the atmospheric pressure valve, and only opening the first A negative pressure valve supplies the first negative pressure to the pressure supply pipe as the discharge prevention pressure. 如申請專利範圍第3項所述的方法,所述液體的所述排放的所述阻止包含將所述第一負壓提供到所述壓力供應管作為所述排放阻止壓力,其通過通過關掉所述正壓閥門、所述第一負壓閥門以及所述第二負壓閥門以及僅打開所述大氣壓力閥門將所述壓力供應管轉換到大氣壓力狀態,以及接著僅打開所述第一負壓閥門。 The method of claim 3, the preventing the discharge of the liquid comprising providing the first negative pressure to the pressure supply pipe as the discharge prevention pressure, which is turned off by The positive pressure valve, the first negative pressure valve, and the second negative pressure valve and only opening the atmospheric pressure valve to switch the pressure supply tube to an atmospheric pressure state, and then only opening the first negative Pressure valve. 如申請專利範圍第2項所述的方法,所述噴嘴中的所述液體凝聚的所述防止包含通過關掉所述正壓閥門、所述大氣壓力閥門以及所述第一負壓閥門以及僅打開所述第二負壓閥門來將所述第二負壓提供到所述壓力供應管作為所述液體凝聚防止壓力。 The method of claim 2, wherein the preventing the condensation of the liquid in the nozzle comprises: closing the positive pressure valve, the atmospheric pressure valve, and the first negative pressure valve and only The second negative pressure valve is opened to supply the second negative pressure to the pressure supply pipe as the liquid agglomeration prevention pressure. 如申請專利範圍第2項所述的方法,所述噴嘴中的所述液體凝聚的所述防止包含通過關掉所述大氣壓力閥門以及所述第二負壓閥門以及打開所述正壓閥門以及所述第一負壓閥門來將所述正壓與所述第一負壓之間的差壓力提供到所述壓力供應管作為所述液體凝聚防止壓力。 The method of claim 2, wherein the preventing the condensation of the liquid in the nozzle comprises: closing the atmospheric pressure valve and the second negative pressure valve and opening the positive pressure valve and The first negative pressure valve supplies a differential pressure between the positive pressure and the first negative pressure to the pressure supply pipe as the liquid agglomeration prevention pressure. 如申請專利範圍第2到6項中任一項所述的方法,所述第二負壓小於所述第一負壓。 The method of any one of claims 2 to 6, wherein the second negative pressure is less than the first negative pressure. 如申請專利範圍第7項所述的方法,所述第一負壓範圍從-20Kpa到-10Kpa。 The method of claim 7, wherein the first negative pressure ranges from -20 Kpa to -10 Kpa. 如申請專利範圍第7項所述的方法,所述第二負壓範圍從-3Kpa到-1Kpa。 The method of claim 7, wherein the second negative pressure ranges from -3 Kpa to -1 Kpa. 一種用於防止分配器中的液體凝聚的設備,包括:正壓閥門,其經配置以將預設定的正壓提供到壓力供應管;大氣壓力閥門,其經配置以將大氣壓力提供到所述壓力供應管;第一負壓閥門,其經配置以將第一負壓提供到所述壓力供應管;第二負壓閥門,其經配置以將小於所述第一負壓的第二負壓提供到所述壓力供應管;所述壓力供應管,其經配置以讓所述正壓閥門、所述大氣壓力閥門、所述第一負壓閥門以及所述第二負壓閥門與針筒連通作為一個供應管;以及打開和關閉控制器,其經配置以當阻止所述液體從所述針筒排放時,關掉所述正壓閥門、所述第二負壓閥門以及所述大氣壓力閥門以及僅打開所述第一負壓閥門以按第一負壓形式將排放阻止壓力 提供到所述壓力供應管,以及接著關掉所述正壓閥門、所述大氣壓力閥門以及所述第一負壓閥門以及打開所述第二負壓閥門以將所述第二負壓提供到所述壓力供應管作為液體凝聚防止壓力。 An apparatus for preventing condensation of liquid in a dispenser, comprising: a positive pressure valve configured to provide a predetermined positive pressure to a pressure supply tube; an atmospheric pressure valve configured to provide atmospheric pressure to the a pressure supply tube; a first negative pressure valve configured to provide a first negative pressure to the pressure supply tube; a second negative pressure valve configured to reduce a second negative pressure less than the first negative pressure Provided to the pressure supply pipe; the pressure supply pipe configured to connect the positive pressure valve, the atmospheric pressure valve, the first negative pressure valve, and the second negative pressure valve to a syringe a supply tube; and an opening and closing controller configured to turn off the positive pressure valve, the second negative pressure valve, and the atmospheric pressure valve when the liquid is prevented from being discharged from the syringe And opening only the first negative pressure valve to block the discharge pressure in the form of the first negative pressure Providing to the pressure supply pipe, and then turning off the positive pressure valve, the atmospheric pressure valve, and the first negative pressure valve and opening the second negative pressure valve to provide the second negative pressure to The pressure supply pipe serves as a liquid agglomeration preventing pressure. 一種用於防止分配器中的液體凝聚的設備,包括:正壓閥門,其經配置以將預設定的正壓提供到壓力供應管;大氣壓力閥門,其經配置以將大氣壓力提供到所述壓力供應管;第一負壓閥門,其經配置以將第一負壓提供到所述壓力供應管;第二負壓閥門,其經配置以將小於所述第一負壓的第二負壓提供到所述壓力供應管;所述壓力供應管,其經配置以讓所述正壓閥門、所述大氣壓力閥門、所述第一負壓閥門以及所述第二負壓閥門與針筒連通作為一個供應管;以及打開和關閉控制器,其經配置以當阻止所述液體從所述針筒排放時,關掉所述正壓閥門、所述第二負壓閥門以及所述大氣壓力閥門以及僅打開所述第一負壓閥門以按第一負壓形式將排放阻止壓力提供到所述壓力供應管,以及接著關掉所述大氣壓力閥門和所述第二負壓閥門以及打開所述正壓閥門和所述第一負壓閥門以將所述正壓與所述第一負壓之間的差壓力提供到所述壓力供應管作為液體凝聚防止壓力。 An apparatus for preventing condensation of liquid in a dispenser, comprising: a positive pressure valve configured to provide a predetermined positive pressure to a pressure supply tube; an atmospheric pressure valve configured to provide atmospheric pressure to the a pressure supply tube; a first negative pressure valve configured to provide a first negative pressure to the pressure supply tube; a second negative pressure valve configured to reduce a second negative pressure less than the first negative pressure Provided to the pressure supply pipe; the pressure supply pipe configured to connect the positive pressure valve, the atmospheric pressure valve, the first negative pressure valve, and the second negative pressure valve to a syringe a supply tube; and an opening and closing controller configured to turn off the positive pressure valve, the second negative pressure valve, and the atmospheric pressure valve when the liquid is prevented from being discharged from the syringe And opening only the first negative pressure valve to provide a discharge prevention pressure to the pressure supply pipe in a first negative pressure form, and then closing the atmospheric pressure valve and the second negative pressure valve and opening the Positive pressure valve Said first negative pressure valve to the pressure difference between the pressure of the first negative pressure supplied to the pressure supply tube to prevent a liquid pressure agglomeration. 如申請專利範圍第10或11項所述的設備,進一步包括:壓力感測感測器,其經配置以檢查所述壓力供應管的壓力;以及殘餘量感測感測器,其經配置以感測所述針筒的所述液體的殘餘量。 The apparatus of claim 10, further comprising: a pressure sensing sensor configured to check a pressure of the pressure supply tube; and a residual amount sensing sensor configured to sense The residual amount of the liquid of the syringe is measured. 如申請專利範圍第12項所述的設備,所述打開和關閉控制器在所述液體經排放後使用在大氣壓力狀態中的所述壓力感測感測器檢查所述壓力供應管的所述壓力,以及使用所述殘餘量感測感測 器檢查所述液體的所述殘餘量以取決於所述壓力供應管的所述壓力和所述液體的所述殘餘量將所述排放阻止壓力和所述液體凝聚防止壓力控制到所要的壓力。 The apparatus of claim 12, wherein the opening and closing controller checks the pressure supply tube using the pressure sensing sensor in an atmospheric pressure state after the liquid is discharged Pressure, and sensing sensing using the residual amount The residual amount of the liquid is checked to control the discharge prevention pressure and the liquid condensation prevention pressure to a desired pressure depending on the pressure of the pressure supply pipe and the residual amount of the liquid.
TW104107832A 2014-03-12 2015-03-12 Method and apparatus for preventing liquid condensation in dispenser TWI660792B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020140028723A KR101597236B1 (en) 2014-03-12 2014-03-12 Apparatus for protecting dispenser condensation and method for operating the same
??10-2014-0028723 2014-03-12

Publications (2)

Publication Number Publication Date
TW201534403A true TW201534403A (en) 2015-09-16
TWI660792B TWI660792B (en) 2019-06-01

Family

ID=54083800

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104107832A TWI660792B (en) 2014-03-12 2015-03-12 Method and apparatus for preventing liquid condensation in dispenser

Country Status (3)

Country Link
KR (1) KR101597236B1 (en)
CN (1) CN104914597B (en)
TW (1) TWI660792B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10401246B2 (en) * 2017-05-31 2019-09-03 Oerlikon Metco (Us) Inc. Powder feed control system and method
KR102153183B1 (en) * 2018-11-23 2020-09-07 김정선 pressure controller for meniscus pressure of ink-jet nozzle
KR102490968B1 (en) * 2020-11-19 2023-01-26 김숭현 dispenser capable of precisely controlling meniscus of syringe

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08141464A (en) * 1994-11-17 1996-06-04 Hitachi Techno Eng Co Ltd Paste applying machine
US6464346B2 (en) * 1999-10-29 2002-10-15 Hewlett-Packard Company Ink containment and delivery techniques
KR100996576B1 (en) * 2003-05-09 2010-11-24 주식회사 탑 엔지니어링 Liquid crystal dispensing system and method of dispensing liquid crystal material using thereof
KR100742631B1 (en) * 2006-10-27 2007-07-25 주식회사 탑 엔지니어링 Dispensing apparatus
JP2009092850A (en) * 2007-10-05 2009-04-30 Micronics Japan Co Ltd Circuit defect repairing method and device of liquid crystal display
KR101089749B1 (en) * 2009-11-27 2011-12-07 에이피시스템 주식회사 Dispenser appratus and method for the same
US9023154B2 (en) * 2010-11-29 2015-05-05 Seiko Epson Corporation Cleaning method, cleaning apparatus, and liquid ejecting apparatus
JP5736750B2 (en) * 2010-12-02 2015-06-17 セイコーエプソン株式会社 Liquid ejecting apparatus and cleaning method
KR101288990B1 (en) 2011-06-29 2013-07-23 에이피시스템 주식회사 Apparatus for protecting dispenser condensation and method for operating the same
KR101911701B1 (en) * 2011-12-28 2018-10-26 주식회사 탑 엔지니어링 Paste dispenser and method for controlling the same

Also Published As

Publication number Publication date
TWI660792B (en) 2019-06-01
CN104914597B (en) 2019-06-04
KR20150106538A (en) 2015-09-22
CN104914597A (en) 2015-09-16
KR101597236B1 (en) 2016-02-25

Similar Documents

Publication Publication Date Title
TWI673110B (en) Coating device, coating method, and manufacturing method of member for display
JP2004199076A (en) Dispenser for liquid crystal display panel, and method of controlling gap between nozzle and substrate by using the same
TW201534403A (en) Method and apparatus for preventing liquid condensation in dispenser
KR100996576B1 (en) Liquid crystal dispensing system and method of dispensing liquid crystal material using thereof
JP2014180604A (en) Intermittent coating apparatus and intermittent coating method and method for manufacturing displaying member
KR101827579B1 (en) Substrate processing apparatus and processing solution supply method
JP2000005682A (en) Slit coat-type coating device and slit coat-type coating method and coated base thereby
KR101288990B1 (en) Apparatus for protecting dispenser condensation and method for operating the same
JP2005329305A (en) Sheet type coating method, sheet type coating apparatus, coated substrate and method of manufacturing sheet type coated member
JPH09131560A (en) Coating device and coating method as well as apparatus for production of color filter and its production
KR20050000767A (en) Liquid crystal dispensing system using spacer information and method of dispensing liquid crystal material using thereof
JP2012196613A (en) Coating apparatus and coating method
JP2011125779A (en) Coating method and coating apparatus
JP2011177707A (en) Coating method, coating apparatus and method for manufacturing member for display
JP5349443B2 (en) Coating device control method
KR101057782B1 (en) Syringe pump
JP3541467B2 (en) Single wafer coating apparatus and method
JP2013192983A (en) Coating method, coating apparatus, and method for manufacturing display member
WO2013121814A1 (en) Coating device
KR20050000769A (en) Liquid crystal dispensing system which can read information of liqid crystal container and method of dispensing liquid crystal material using thereof
KR101346143B1 (en) Apparaus for dispensing materials and method for operating the same
KR100978258B1 (en) Apparatus and method of dispensing liquid crystal
KR101588383B1 (en) Apparatus for dispensing
KR102033296B1 (en) Pump Module and Pump System for Liquid Crystal Dispenser
JPH09253563A (en) Coating device and coating method

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees