JPH11314061A - Device and method for coating recessed and projected base with coating liquid, plasma display and device and method for manufacturing plasma display member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To uniformize the discharge amount of respective openings, make the cleaning for openings easy, prevent a coating liquid from remaining in a nozzle and reduce the amount of use of coating liquid and the like when the coating liquid is applied on recessed sections of a base with given recessed and projected patterns such as a pattern plate of a plasma display. SOLUTION: A coating device for applying a coating liquid is provided with a table 6 fixing a base 4, on the surface of which recessed and projected sections are formed at the given pitch, a coating liquid discharge device with a plurality of openings formed facing recessed and projected sections of the base 4, a feed means for feeding the coating liquid to the coating liquid discharge device and a moving means for moving three-dimensionally and relatively the table 6 and the coating liquid discharge device, and the coating liquid discharge device is provided with a liquid reservoir section for storing the given amount of coating liquid, and openings of the diameter in the range of 50-500 μm running through a plate-shaped body of thickness (t) in the range of 0.5-10 d are formed at the given pitches.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma display panel having a specific pattern of concavities and convexities formed on a substrate, in particular, a plasma display panel having fixed-shaped partition walls arranged at equal pitches,
Apparatus and method for applying a coating liquid to a concavo-convex substrate, and a plasma display and a plasma display using these apparatuses and methods, which can be applied to apply a predetermined pattern on the inner surface of a panel of a stripe type black matrix color picture tube or the like The present invention relates to an improvement in a manufacturing apparatus and a manufacturing method of a plasma display member such as a face plate and a front plate.

[0002]

2. Description of the Related Art In recent years, displays have become increasingly diversified in their system. One of the things that are currently attracting attention is a plasma display that is larger, thinner and lighter than conventional cathode ray tubes. That is, stripe-shaped uneven portions are formed on a glass substrate by partition walls extending in one direction at a constant pitch, and the concave portions of the uneven portions are filled with red (R), green (G), and blue (B) phosphors. Then, an arbitrary portion is caused to emit light by ultraviolet rays to achieve a predetermined color pattern.

The structure in which the phosphors are formed in a stripe shape also has a striped black matrix type color picture tube panel.

[0004] In order to manufacture such a structure with high productivity and high quality, it is important to apply a phosphor in a predetermined pattern on a back plate which is a member constituting a plasma display.

Usually, after a partition pattern is formed,
As shown in JP-A-144375, a phosphor of one color is screen-printed on the entire surface, and only a necessary portion is left by photolithography so that a highly accurate pattern can be obtained. However, in this method, R, G, B
In order to form each of the phosphor patterns described above, it is necessary to repeat the steps of coating, exposing, developing, and drying each color three times, which is costly and has a disadvantage that productivity is extremely poor.

As another method of simply forming a striped colored pattern on a glass substrate, there is a method described in Japanese Patent Application Laid-Open Nos. 5-1105 and 5-142407 using a nozzle. Since three colors are simultaneously applied to a substrate having a flat surface by a nozzle having a flat tip, this technique cannot be used as it is for a substrate having a surface having irregularities.

Further, Japanese Patent Application Laid-Open No. 52-134368,
JP-A-54-13250, JP-A-54-1325
No. 1 Publication and the like discloses a control device for preventing meandering or the like as a method of applying a predetermined phosphor to a concave portion between convex black matrices on the inner surface of a panel of a striped black matrix type color picture tube. It has been shown to use an improved nozzle arrangement having However, since a single nozzle is used, the method cannot be applied to a method of simultaneously applying to a plurality of uneven portions on the surface, and there is a problem that it takes time to apply using a single nozzle.

Japanese Patent Laid-Open No. 9-92134 discloses a technique of forming partition walls in a stripe pattern on a flat substrate using a nozzle.
Although it is disclosed in Japanese Patent Application Laid-Open Publication No. H10-157, it is difficult to employ a process in which a coating liquid is applied with high accuracy along a concave portion of the uneven portion because the uneven portion is already formed on the substrate.

Japanese Patent Application Laid-Open No. Hei 9-132812 discloses an apparatus in which a nozzle is formed by combining a block having two grooves and a plate for melt spinning, and a plurality of openings are provided. However, such a nozzle for melt spinning does not require much dimensional accuracy, and cannot be applied to a coating liquid coating apparatus that requires high accuracy such as plasma display manufacturing.

Further, in US Pat. No. 4,774,109, as a nozzle for applying a viscous liquid such as a hot-melt adhesive onto a substrate, a comb-shaped shim is sandwiched between blocks having a manifold. Although a nozzle having an opening formed therein is described, this also applies a coating liquid in a stripe shape on a flat substrate, and the coating liquid is applied along the concave portion of the substrate on which the unevenness has already been formed. It is difficult to adopt it in the process of applying the liquid with high accuracy.

Furthermore, apart from the above-described conventional techniques, the application of a coating liquid requiring high precision, such as plasma display manufacturing, generally has the following problems.
There is a request.

(1) When a coating liquid is applied only to a concave portion from a nozzle having a plurality of discharge holes to a stripe-shaped concave portion of a concave-convex substrate, a discharge hole having high pitch accuracy and high hole accuracy is required. Therefore, it is desired to make the amount applied to the concave portions uniform.

(2) Since the opening of a nozzle for applying a coating liquid to a substrate for a plasma display or the like is small, there is a problem that cleaning is difficult despite that the coating liquid scum easily accumulates. Therefore, in order to produce repeatedly and for a long period of time, it is an essential condition that the opening can be cleaned, and it is desired that the cleaning can be performed easily and efficiently.

(3) A nozzle having a plurality of openings necessarily forms a large manifold for uniform discharge, so that the coating liquid tends to stay, thereby deteriorating the quality of the coating liquid. As a result, the quality of the object to be coated may be reduced. In other words, the stagnation is that the coating liquid stays in the same place, and if the coating liquid is liable to change with time, characteristics such as viscosity change, thereby hindering the coating. In addition, there is a possibility that the quality may be deteriorated due to sedimentation of the contained particles due to deterioration. Therefore, in order to prevent such a problem from occurring, it is desired that stagnation does not occur inside the nozzle.

(4) When the coating liquid to be used is expensive, it is necessary to reduce the amount of the coating liquid. However, the entire path from the supply tank to the nozzle is filled with the coating liquid as usual. If this is the case, the use amount of the coating liquid is inevitably increased. Therefore, it is also desired to be able to apply with a minimum necessary coating solution.

[0016]

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a nozzle having a plurality of discharge holes in a plurality of recesses of a substrate having a predetermined uneven pattern such as a partition wall of a plasma display. An object of the present invention is to produce a concavo-convex substrate in which the amount of application to each concave portion is uniformed when applying a coating liquid, and the characteristics of each portion are more uniform.

Another object of the present invention is to provide a structure in which a member for forming an opening of a coating liquid application device can be disassembled so that the opening can be easily and directly cleaned so that stable production can be performed for a long period of time. is there.

Another object of the present invention is to prevent the coating liquid from staying from the manifold portion of the nozzle of the coating liquid coating apparatus to the discharge port in the opening, and to change the properties of the coating liquid or change the quality of the coating liquid. And to maintain the quality of the substrate on which the coating liquid is applied stably and favorably.

Further, another object of the present invention is to make it possible to reliably perform a desired coating while supplying a necessary minimum amount of a coating liquid to a nozzle, to reduce a useless amount of a coating liquid, and to manufacture. This is to contribute to cost reduction.

[0020]

Means for Solving the Problems In order to solve the above-mentioned problems, an apparatus for applying a coating liquid to an uneven substrate according to the present invention comprises a table for fixing a substrate having an uneven portion formed on a surface thereof at a constant pitch. A coating liquid discharge device having a plurality of openings facing the concave and convex portions of the base material; a supply unit for supplying the coating liquid to the coating liquid discharge device; and a table and the coating liquid discharge device relatively moved three-dimensionally. And a moving means for moving the coating liquid onto the uneven substrate, wherein the coating liquid discharge device has a liquid reservoir for accumulating a predetermined amount of the coating liquid therein, and the opening has a diameter d of 50 to 50.
Holes in the range of 0 μm have a constant pitch and a thickness t of 0.5
(1st device) formed by penetrating the plate-shaped object in the range of 10 to 10d.

In this first apparatus, the surface of the plate-shaped body having the opening formed therein is a linear surface when viewed in cross section, and the thickness of the plate-shaped body is uniform. The thickness uniformity of the plate is preferably ± 10% or less.

Further, according to the present invention, there is provided an apparatus for applying a coating liquid onto an uneven base material, the table for fixing a base material having uneven portions formed on the surface at a constant pitch, and a table facing the uneven portion of the base material. A coating liquid discharge device having a plurality of openings, a supply means for supplying a coating liquid to the coating liquid discharge device, a table and a coating liquid discharge device
In a coating device for applying a coating liquid to an uneven substrate having a moving means for performing a relative movement in a three-dimensional manner, the coating liquid discharge device is formed by stacking two blocks in a direction perpendicular to the arrangement direction of the openings. In addition, it has a reservoir for accumulating a certain amount of coating liquid inside, and a plurality of through passages connecting the reservoir and the outside are provided on the overlapping surface of the two blocks in a direction perpendicular to the overlapping direction of the blocks. An opening is formed by providing the coating at a constant pitch, and the length of the through passage in the coating liquid discharge direction is in the range of 0.1 to 20 mm (second apparatus).

Further, the apparatus for applying a coating liquid to an uneven base material according to the present invention comprises a table for fixing a base material having uneven portions formed on the surface at a constant pitch, and a table facing the uneven portion of the base material. A coating liquid discharge device having a plurality of openings, a supply means for supplying a coating liquid to the coating liquid discharge device, a table and a coating liquid discharge device
In an apparatus for applying a coating liquid to an uneven base material having a moving means for performing a relative movement in a three-dimensional manner, the coating liquid discharging apparatus comprises a plate-shaped shim overlapped between two blocks, and the coating liquid is applied inside. With a reservoir for accumulating a certain amount of liquid,
An opening is formed by providing a plurality of slits in the plate-shaped shim at a constant pitch in the longitudinal direction of the block so as to communicate the liquid reservoir with the outside.
The length of the portion sandwiched between the two blocks in the coating liquid ejection direction is in the range of 0.1 to 20 mm (third device).

In this third device, the plate-shaped shim is
The two blocks having the same thickness sandwiched by the two blocks and having different lengths in the coating liquid discharge direction are overlapped at a constant pitch in the longitudinal direction of the block to form a plurality of slits. The two types of plates are superimposed on one reference plate, or a plate of a certain thickness is provided with a groove of a certain depth corresponding to a plurality of slits communicating the reservoir and the outside. It is preferably provided at a constant pitch in the longitudinal direction of the block.

Further, the apparatus for applying a coating liquid to an uneven base material according to the present invention comprises a table for fixing a base material having uneven portions formed on the surface at a constant pitch, and a table facing the uneven portion of the base material. An uneven substrate including a coating liquid ejection device having a plurality of openings, a supply unit that supplies the coating liquid to the coating liquid ejection device, and a moving unit that relatively moves the table and the coating liquid ejection device three-dimensionally. In the coating liquid application apparatus, the coating liquid discharge device has a liquid reservoir for accumulating a predetermined amount of the coating liquid therein, and the liquid reservoir has a tapered shape toward an opening communicating with the outside. (Fourth device).

Further, the apparatus for applying a coating liquid to an uneven base material according to the present invention comprises a table for fixing a base material having uneven portions formed on the surface thereof at a constant pitch, and a table facing the uneven portion of the base material. Substrate having a plurality of openings, a supply means for supplying the coating liquid to the coating liquid discharge apparatus, and a moving means for three-dimensionally moving the table and the coating liquid discharge apparatus relative to each other In the apparatus for applying a coating liquid to the coating liquid, the coating liquid discharging apparatus further has a coating liquid supply port to which the coating liquid is supplied and a pressure supply port to pressurize the supplied coating liquid, and the pressure supply port is provided from the coating liquid supply port. Are also arranged at the upper part in the direction of gravity (fifth device).

[0027] The method for applying a coating liquid to an uneven substrate according to the present invention comprises a substrate having uneven portions formed on the surface thereof at a constant pitch, and a plurality of openings facing the uneven portions of the substrate. A coating method in which a coating liquid discharge device is relatively moved, and a coating liquid is supplied to the coating liquid discharge device, a coating liquid is discharged from an opening, and a predetermined thickness is coated on a concave portion of the base material. The coating liquid discharge device has a liquid reservoir for accumulating a predetermined amount of coating liquid therein, and the openings have holes having a diameter d in a range of 50 to 500 μm at a constant pitch and a thickness t of 0.5. The method is characterized in that the coating is performed using a material formed by penetrating a plate-like body in the range of 10 to 10d (first method).

Further, the method for applying a coating liquid to an uneven base material according to the present invention comprises the steps of: forming a base material having uneven portions formed on the surface thereof at a constant pitch; The coating method is to relatively move the coating liquid discharge device having, and to supply the coating liquid to the coating liquid discharge device, discharge the coating liquid from the opening, and apply a predetermined thickness to the concave portion of the base material. In addition, the coating liquid discharge device has a structure in which two blocks are overlapped in a direction perpendicular to the direction in which the openings are arranged. An opening is formed by providing a plurality of through passages communicating the liquid reservoir and the outside at a constant pitch in a direction perpendicular to the overlapping direction of the blocks on the overlapping surface of Coating with a length in the direction of 0.1-20mm Consists wherein the Rukoto (second method).

Further, the method for applying a coating liquid to an uneven substrate according to the present invention comprises the steps of: forming a substrate having uneven portions on its surface at a constant pitch; The coating method is to relatively move the coating liquid discharge device having, and to supply the coating liquid to the coating liquid discharge device, discharge the coating liquid from the opening, and apply a predetermined thickness to the concave portion of the base material. There is a coating liquid discharging device comprising a plate-shaped shim overlapped between two blocks, and has a reservoir for accumulating a predetermined amount of coating liquid therein, and a plate-shaped shim having a reservoir. An opening is formed by providing a plurality of slits communicating with the outside at a constant pitch in the longitudinal direction of the block, and the length of the slit portion of the plate-shaped shim sandwiched between the two blocks in the coating liquid discharge direction. With a thickness of 0.1 to 20 mm Consists wherein the door (3
the method of).

In the third method, the plate-shaped shim is
A plurality of slits formed by stacking two types of plates having the same thickness sandwiched between the two blocks and having different lengths in the coating liquid discharge direction at a constant pitch in the longitudinal direction of the block; The two types of plates are superimposed on a single reference plate, or blocks of a certain depth corresponding to a plurality of slits that connect the reservoir to the outside on a plate of a certain thickness Which are provided at a constant pitch in the longitudinal direction.

Further, the method for applying a coating liquid to an uneven base material according to the present invention comprises a base material having uneven portions formed on the surface thereof at a constant pitch, and a plurality of openings facing the uneven portion of the base material. The coating method is to relatively move the coating liquid discharge device having, and to supply the coating liquid to the coating liquid discharge device, discharge the coating liquid from the opening, and apply a predetermined thickness to the concave portion of the base material. In addition, the coating liquid discharging device has a liquid reservoir for accumulating a predetermined amount of the coating liquid therein, and the liquid reservoir has a tapered shape toward an opening communicating with the outside. (Fourth method).

Further, the method for applying a coating liquid to an uneven base material according to the present invention comprises a base material having uneven portions formed on the surface thereof at a constant pitch, and a plurality of openings facing the uneven portion of the base material. A coating method for relatively moving a coating liquid discharge device having a portion, supplying a coating liquid to the coating liquid discharge device, discharging the coating liquid from an opening, and applying a predetermined thickness to a concave portion of the base material. In the coating liquid discharging apparatus, a coating liquid and a pressurizing gas are mixed, and the coating liquid is discharged from the opening by the pressure of the pressurizing gas to apply the coating liquid. Method 5).

The plasma display and the apparatus for manufacturing a member for a plasma display according to the present invention are characterized in that the coating liquid is a paste containing a phosphor powder that emits any one of red, green and blue colors. It is characterized by using such a coating liquid coating device.

Further, in the method of manufacturing a plasma display and a member for a plasma display according to the present invention, the coating liquid is a paste containing a phosphor powder that emits any one of red, green and blue colors. The method is characterized by using such a method of applying a coating liquid.

By using the above first apparatus and method, the coating liquid discharging apparatus (nozzle) is formed from a flat plate-like body at its tip end surface, and has a shape in which holes are easily processed.
The holes are formed with high accuracy, and variations in the discharge amount are reduced. Therefore, the application amount of the coating liquid to the concave portions of the uneven substrate is made uniform.

Further, by using the second and third apparatuses and methods, the member forming the opening can be disassembled, and the opening (groove or the like) can be directly cleaned. Therefore, the opening can be easily and efficiently cleaned, and stable production can be continued by cleaning the opening even when production is repeatedly performed for a long period of time.

Further, by using the above-described fourth apparatus and method, the flow path has a shape converging from the manifold in the nozzle toward the opening, and the stagnation does not occur by preventing the velocity from being zero. . Therefore, stable characteristics of the discharged coating liquid are secured and deterioration is prevented, so that a predetermined coating quality can be stably obtained.

Further, by using the fifth apparatus and the method, the coating liquid is supplied to the nozzle in a necessary minimum amount, and the nozzle is pressurized and discharged. Is reduced, which can contribute to a reduction in manufacturing cost.

By manufacturing a plasma display and a member for a plasma display using such an apparatus and a method, it is possible to stably apply a uniform discharge amount of the coating liquid to the concave portions of the uneven substrate. An excellent quality plasma display and a member for a plasma display can be stably manufactured at a low cost over a long period of time.

[0040]

Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an overall perspective view of a coating apparatus according to one embodiment of the present invention, FIG. 2 is a schematic view around the table 6 and the nozzle 20 in FIG. 1, and FIG. 3 is a nozzle 20 in FIG.
FIG. 5 is an enlarged plan view as viewed from below. FIG. 4 and FIG.
1 shows the structure of a coating liquid application device (nozzle) according to an embodiment of the present invention.

First, the overall configuration of the coating liquid coating apparatus will be described. FIG. 1 shows an example of a coating apparatus applied to manufacture of a member for a plasma display panel according to the present invention. This coating apparatus includes a base 2. A pair of guide groove rails 8 is provided on the base 2, and a table 6 is arranged on the guide groove rails 8.
On the upper surface of the table 6, a plurality of suction surfaces constituting a suction surface are formed so that a substrate 4 having a surface formed with stripes in one direction at a constant pitch can be fixed to the table surface by vacuum suction. A hole 7 is provided. The substrate 4 is held on a table 6 by lift pins (not shown).
Go up and down. Further, the table 6 is reciprocally movable in the X-axis direction on the guide groove rail 8 via the slide legs 9.

A feed screw 10 constituting a feed screw mechanism shown in FIG.
Nut-shaped connector 11 fixed to the lower surface of table 6
Extends through it. Both ends of the feed screw 10 are rotatably supported by bearings 12, and an AC servomotor 16 is connected to one end.

As shown in FIG. 1, above the table 6, a nozzle 20 as a coating liquid discharge device is connected via a holder 22 to a lifting / lowering mechanism 30 and a width direction moving mechanism 36. The elevating mechanism 30 includes an elevating bracket 28 that can be moved up and down, and is attached to a pair of guide rods inside the casing of the elevating mechanism 30 so as to be able to move up and down. A feed screw (not shown) composed of a ball screw is also rotatably disposed in the casing between the guide rods, and is connected to the lifting bracket 28 via a nut-type connector. Further, an AC servomotor (not shown) is connected to the upper end of the feed screw, and the lifting bracket 28 can be arbitrarily moved up and down by rotation of the AC servomotor.

Further, the lifting mechanism 30 is moved by the Y-axis moving bracket 32 (actuator) to the width direction moving mechanism 36.
It is connected to the. The width direction moving mechanism 36 is for moving the Y-axis moving bracket 32 reciprocally in the width direction of the nozzle 20, that is, in the Y-axis direction. The guide rod, feed screw, nut-type connector, AC servomotor, etc. necessary for the operation are provided with a lifting mechanism 3 inside the casing.
It is arranged in the same way as 0. The width direction moving mechanism 36 is fixed on the base 2 by the columns 34.

With these configurations, the nozzle 20 can be freely moved in the Z-axis and Y-axis directions.

The nozzle 20 extends horizontally in the direction orthogonal to the reciprocating direction of the table 6, that is, in the Y-axis direction.
A U-shaped holder 22 for directly holding the holder is rotatably supported in an elevating bracket 28, and can freely rotate in a vertical direction in the direction of the arrow in the figure.

A horizontal bar 24 is also fixed to the lifting bracket 28 above the holder 22. This horizontal bar 2
4 are electromagnetically actuated linear actuators 2 at both ends.
6 is attached. This linear actuator 2
Numeral 6 has telescopic rods projecting from the lower surface of the horizontal bar 24, and these telescopic rods can regulate the rotation angle of the holder 22 by contacting both ends of the holder 22. The degree can be set arbitrarily.

Further, referring to FIG. 1, an inverted L-shaped sensor support 38 is fixed to the upper surface of the base 2, and the tip of the sensor support 38 is positioned at the top (height) of the convex portion of the base material 4 on the table 6. )
Is mounted. Next to the height sensor 40, a camera 72 for detecting the position of the concave portion between the partition walls of the base material 4 is attached to the column 70. As shown in FIG. 2, the camera 72 is connected to the image processing device 7.
4, and can quantitatively determine a change in the position of the concave portion between the partition walls.

Further, a sensor 66 for detecting a vertical position of the lower end surface (opening surface) of the nozzle 20 with respect to the table 6 is attached to one end of the table 6 via a sensor bracket 64. I have.

As shown in FIG. 2, the nozzle 20 has a manifold 41 filled with a coating liquid 42, and the discharge holes 44, which are openings, are arranged in a straight line in the longitudinal direction on the opening end surface 45. (See FIG. 3). And this discharge hole 4
4, the coating liquid 42 is discharged. A supply hose 46 is connected to the nozzle 40.
8, a supply unit 50, a suction hose 52, an electromagnetic switching valve for suction 54, and a coating liquid tank 56. The coating liquid 42 is stored in the coating liquid tank 56. The coating liquid 42
It is composed of a paste containing a phosphor powder that emits light of any of red, green and blue colors.

Specific examples of the supply unit 50 include a piston, a constant volume pump such as a diaphragm type, a tubing pump, a gear pump, a mono pump, and a pressure feed controller for pushing out a liquid by gas pressure. In response to a control signal from the supply device controller 58, the supply unit 50 and each of the electromagnetic switching valves are operated to suck the coating liquid 42 from the coating liquid tank 56 and supply the coating liquid 42 to the nozzle 20. be able to. In order to stabilize the suction operation of the coating liquid 42 from the coating liquid tank 56 to the constant volume pump, pressure may be applied to the coating liquid tank 56 with a gas such as air or nitrogen. The magnitude of the pressure is preferably 0.01 to 1 MPa, particularly preferably 0.02 to 0.5 MPa.

The supply device controller is further electrically connected to the general controller 60. The general controller 60 includes an image processing device 74 of a camera 72 such as a motor controller 62 and electric inputs of the height sensor 40.
All the control information, such as information from the computer, is electrically connected, so that the entire sequence control can be performed. The general controller 60 may be a computer, a sequencer, or any controller having a control function.

The motor controller 62 includes the AC servomotor 16 for driving the table 6 and the lifting mechanism 30.
And each actuator 7 of the width direction moving mechanism 36
6, 78 (for example, an AC servomotor), a signal from a position sensor 68 for detecting the moving position of the table 6, and a linear sensor (not shown) for each of the Y and Z axes for detecting the operating position of the nozzle 20. Is input. Instead of using the position sensor 68, an encoder may be incorporated in the AC servomotor 16 and the position of the table 6 may be detected based on a pulse signal output from the encoder.

Next, a coating method using this coating apparatus will be described. First, when the origin return of each operation unit in the coating apparatus is performed, the table 6 and the nozzle 20 are respectively moved to the X axis and the Y
Move to the preparation position of the axis and Z axis. At this time, the coating liquid tank 5
The coating liquid has already been filled from No. 6 to Nozzle 20, and the discharge electromagnetic switching valve 48 is opened and the suction electromagnetic switching valve 54 is closed. Then, lift pins (not shown) rise on the surface of the table 6, and the base material 4, whose partitions are formed in a stripe pattern at a constant pitch, is placed on the lift pins from a loader (not shown).

Next, the lift pins are lowered to place the substrate 4 on the upper surface of the table 6, and after the positioning on the table 6 is performed by an alignment device (not shown), the substrate 2 is sucked.

Next, the table 6 moves until the partition (the top of the convex portion) of the substrate 4 comes just below the camera 72 and the height sensor 40, and stops. The position of the camera 72 is adjusted in advance so as to project the end of the partition wall on the base material 4 positioned on the table 6, and the position of the endmost concave portion is detected by image processing, and the position change from the camera reference point is performed. Find the quantity la. On the other hand, the reference point of the camera 72 and the nozzle 20 fixed to the holder 22 at the predetermined Y-axis coordinate position Ya
The length lb between the discharge holes 44 located at the end of the partition is measured at the time of advance adjustment, and is input to the overall controller 60 as information. When the change amount la is transmitted, the Y-axis coordinate value Yc at which the discharge hole 44 located at the end of the nozzle 20 is directly above the concave portion at the end of the partition wall is calculated (for example, Yc = Y).
a + lb-la), the nozzle 20 is moved to that position. The same function can be obtained by attaching the camera 72 to the nozzle 20 or the holder 22.

During this time, the height sensor 40 detects the vertical position of the top of the partition wall of the base material 4 and calculates the height of the top of the partition wall of the base material 4 from the difference in position from the upper surface of the table 6. To this height, a predetermined gap value between the opening of the nozzle 20 and the top of the partition wall of the substrate 4 is added, and a value to be lowered on the Z-axis linear sensor of the nozzle 20 is calculated. Move the nozzle to the position. Thus, even if the top position of the partition on the table 6 changes for each substrate, the gap between the opening of the nozzle 20 important for coating and the top of the partition on the substrate can always be kept constant.

Next, the operation is started with the table 6 directed toward the nozzle 20, and the speed is increased to a predetermined coating speed before the coating start position of the base material 4 reaches just below the opening of the nozzle 20. . The distance between the operation start position of the table 6 and the application start position must be sufficiently ensured that the speed can be increased to the application speed.

Further, the application start position of the substrate 4 is
A position sensor 68 for detecting the position of the table 6 is disposed immediately below the opening of the table 6.
When this reaches this position, the operation of the supply unit 50 is started, and the supply of the coating liquid 42 to the nozzle 20 is started. In order for the coating liquid 42 discharged from the opening of the nozzle 20 to reach the base material 4, a time delay occurs by the gap between the base material and the nozzle opening. Therefore, by supplying the coating liquid 42 to the nozzle 20 in advance, a predetermined amount of the coating liquid 42 discharged from the nozzle 20 is applied to the substrate 4 when the coating start position of the base material 4 is just below the opening of the nozzle 20. , The application can be started with almost no thickness unevenness. The position where the supply of the coating liquid 42 is started can be adjusted by changing the installation location of the position sensor 68. This position sensor 6
When an encoder is connected to the motor or the feed screw or a linear sensor is attached to the table instead of 8, a similar operation can be performed even if the value is detected by the encoder or the linear sensor.

In the application, the application end position of the substrate 4 is
The process is performed until the position is just below the opening of 0. That is,
Since the base material 4 is always placed at a predetermined position on the table 6, the coating end position of the base material 4 is (a) 5 mm before, for example, just below the opening of the nozzle 20, or (b) just below. The position sensor and its encoder value are set in advance at the position of the table 6 corresponding to the position
When the table 6 comes to the position corresponding to (a), a stop command is issued from the general controller 60 to the supply device controller 58 to stop supplying the coating liquid 42 to the nozzle 20.
The squeegee coating is performed up to the position (b), and when the table 6 comes to the position corresponding to the position (b), the nozzle 20 is raised to completely turn off the coating liquid 42. When the coating liquid 42 is a liquid having a relatively high viscosity, it is difficult to stop the supply of the coating liquid from the opening of the nozzle 20 due to the residual pressure instantaneously simply by stopping the supply of the coating liquid. Therefore, when the supply of the coating liquid is stopped, the manifold 4 in the nozzle 20 is stopped.
When the pressure is set to atmospheric pressure, the discharge of the coating liquid from the opening can be stopped in a short time. Therefore, the supply unit may be provided with such a function, or the discharge electromagnetic switching valve 48 to the nozzle 20 of the supply unit may be provided. It is desirable to provide an atmosphere release valve between them.

The table 6 continues to operate even after passing the coating end position, and stops when it reaches the end position. At this time, if the portion to be applied still remains, the nozzle is moved by the application width (nozzle pitch × number of holes) in the Y-axis direction to the next start position to be applied, and then the table 6 is moved in the opposite direction. Coating is performed in the same procedure except that it is moved. 1
If the application is performed in the same moving direction of the table 6 as the first time, the nozzle 20 is moved in the Y-axis direction to the next start position to be applied, and the table 6 is returned to the X-axis preparation position.

When the coating process is completed, the table 6 is moved to the place where the substrate 4 is transferred by the unloader and stopped, and the suction of the substrate 4 is released, and the substrate 4 is released to the atmosphere. The material 4 is separated from the surface of the table 6 and lifted.

At this time, the lower surface of the substrate 4 is held by an unloader (not shown), and the substrate 4 is transported to the next step. When the substrate 4 is delivered to the unloader, the table 6 lowers the lift pins and returns to the original position.

At this time, the discharge electromagnetic switching valve 48 is closed,
With the suction electromagnetic switching valve 54 opened, the supply unit 5
0 is operated, and the coating liquid is supplied from the coating liquid tank 56 in an amount necessary for coating one substrate.

For the application of the coating liquid as described above, for example,
A nozzle 80 of the type shown in FIGS. 4 and 5 is used. In the nozzle 80 of the type shown in FIGS. 4 and 5, a manifold 81 as a reservoir for accumulating a predetermined amount of the coating liquid therein is cut out from the block;
A through-hole (discharge hole) 83 as an opening is formed in the plate-like body 82 at the tip and then joined to the manifold 81 (laser welding, bonding with an adhesive, or the like). May be adopted. 84 is the nozzle 8
The drawing shows the inlet of the coating liquid into 0.

The diameter (d) of the through-hole (discharge hole) 83 is set in the range of 50 to 500 μm as described above, and the thickness (t) of the plate-like body 82 is set in the range of 0.5 to 10 d. Is set. The through holes 83 are formed at a constant pitch. If the pore diameter (d) is less than 50 μm, the coating liquid may be clogged immediately and become unusable,
If it is larger than this, there is a possibility that the coating liquid may spill out from the hole which is the opening when the discharge of the coating liquid is stopped. The pitch of the through holes 83 in the longitudinal direction of the nozzle 80 may be arbitrarily set, but when used for a plasma display,
0.3 to 2 mm is preferred.

If the thickness (t) is smaller than 0.5 d, a streamline is not formed, so that stable discharge at a constant discharge speed may not be performed. With a small hole, processing becomes difficult, and the discharge pressure may increase dramatically, making extrusion difficult.

As shown in FIG. 4, the surface 82a of the plate 82 on the coating liquid discharge side is a linear surface when viewed in cross section, and the plate 82 has a uniform thickness. It has a certain configuration. It is preferable that the uniformity of the thickness of the plate member 82 is ± 10% or less.

A member 82 having a uniform thickness is provided at such a tip end.
The nozzle 80 in which holes having a predetermined diameter are provided at a constant pitch in the nozzle 80 can improve the arrangement accuracy of the opening 83 compared to a type in which a discharge member is formed by fixing a pipe-shaped member, for example. Further, by making the plate thickness uniform, the pressure loss is made uniform, and the discharge amount is made uniform. Therefore, the application of the desired coating liquid is performed with higher accuracy.

FIGS. 6 and 7 show a nozzle 90 according to another embodiment of the present invention. A nozzle 90 of the type shown in FIGS. 6 and 7 is configured by combining (overlapping) two blocks, and includes blocks 91 and 92.
One of the mating surfaces 91a and 92a
Are formed at a constant pitch in the nozzle width direction. By overlapping the blocks 91 and 92, these grooves 93 are formed in the openings (through paths). When the blocks 91 and 92 are disassembled, the groove is exposed, so that the groove can be directly cleaned. The cross-sectional shape may be a rectangle, a semicircle, or any other shape. 9
Reference numeral 4 denotes a manifold as a reservoir for accumulating a predetermined amount of the coating liquid therein, and reference numeral 95 denotes an inlet of the coating liquid into the nozzle 90.

The length of the groove forming the cross section of the opening 93 in the coating liquid discharge direction is 0.1 to 20 mm, preferably 0.3 to 20 mm, and more preferably 0.3 to 10 mm.
mm. If it is smaller than this, it is difficult to form the grooves with a uniform length, and a sufficient streamline is not formed, so that stable discharge cannot be performed and the sealing property is also insufficient. On the other hand, if it is larger than this range, there is a possibility that the ejection pressure will be drastically increased and extrusion will be difficult.

As for the cross-sectional shape of the groove, if it is rectangular, it is 50 to 1000 μm in the block overlapping direction, and 50 to 1000 in the pitch direction.
A range of about 500 μm is desirable. It is preferable to increase the shape as the viscosity of the coating liquid used increases. The pitch of the groove 93 in the longitudinal direction of the nozzle 90 may be arbitrarily set, but is preferably 0.3 to 2 mm when used for a plasma display.

In this embodiment, the groove 93 is formed in the block 91 on one side, but the groove may be formed in both blocks. For example, the shape may be a rectangular shape centered on the mating surface of the blocks, or a shape having a circular cross section.

In the nozzle 90 of the block superposition type, the opening can be directly and effectively cleaned easily and easily by disassembly. Prevention and stable production can be maintained.

FIGS. 8 to 10 show a nozzle 100 according to still another embodiment of the present invention. A nozzle 100 of the type shown in the figure comprises two blocks 101, 102
The plate-shaped shim 103 is sandwiched between them, and these are overlapped. By forming slits 104 at a constant pitch under the plate-shaped shim 103, the slits 104 are formed in a through path, that is, in an opening. (Discharge holes). 105 is a manifold as a reservoir for accumulating a fixed amount of coating liquid inside, 106
Indicates the inlet of the coating liquid into the nozzle 100.

The entire area of the plate-shaped shim 103 is the same as the area of the overlapping surface of the blocks. Slit 104
Has reached the inside of the manifold 105, and the slit 104 needs to be in contact with the liquid in the manifold for at least 1 mm or more. Otherwise,
The coating liquid in the manifold 105 cannot be stably discharged outside through the slit 104.

The width of the slit 104 (nozzle width direction) is 5
0 to 500 μm, the thickness of the plate-shaped shim 103 is 50 μm to 1
mm is desirable. Below the respective lower limits, the discharge pressure will increase, making it difficult to discharge the coating liquid, and above the upper limit, the coating liquid may drip and drop when stopped. Further, the slit portion 104 of the plate-shaped shim 103 has two blocks 10.
It is desirable that the length of the portion pressed and sandwiched by 1, 102 (the length of the portion where the coating liquid flow path becomes the narrowest (or the cross section of the opening) in the coating liquid discharge direction) is 0.1 to 20 mm. , More preferably 0.3 to 20 mm, even more preferably 0.3 to 10 mm. If the diameter is smaller than this, it is difficult to form the ejection holes with a uniform length, and a sufficient streamline is not formed, so that stable ejection cannot be performed and the sealing property may be insufficient. On the other hand, if it is larger than this range, there is a possibility that the ejection pressure will be drastically increased and extrusion will be difficult. Furthermore, the slit 10
The pitch in the longitudinal direction of the nozzle 100 may be arbitrarily set, but when used for a plasma display,
0.3 to 2 mm is preferred.

By using the nozzle 100 formed by sandwiching the plate-shaped shim 103 having such a comb-shaped slit 104, the nozzle 100 can be easily disassembled. In addition, since cleaning can be easily performed, accumulation and adhesion of foreign matters and scum can be prevented, and stable production can be maintained even when production is repeatedly performed for a long period of time.

FIG. 13 to FIG. 17 show another embodiment of the plate-shaped shim 103. Referring to FIG. 14, the shim A2
No. 00 has the same thickness as the plate-shaped shim 103, and the plate piece A206 and the plate piece B205 having different lengths in the coating liquid discharge direction are
0 It is configured by overlapping several sets in the longitudinal direction. Since the plate piece B205 has a shorter length in the coating liquid discharge direction than the plate piece A206, the slit 20 through which the coating liquid passes
4 will be configured. Sheet A206 and Sheet B20
The length of the nozzle 100 in the longitudinal direction is determined so that the slit 204 has a predetermined pitch in the longitudinal direction of the nozzle 100. After the plate piece A206 and the plate piece B205 are overlapped in the longitudinal direction of the nozzle 100, they are fixed to each other by joining means such as adhesion.

The shim B210 in FIGS. 15 and 16 is a shim A2.
00 is fixed on a reference plate 218 having a constant thickness, and the cross section where the plate piece A206 and the plate piece B205 are located in the direction F in FIG. 15 is as shown in FIGS. become. In this embodiment, the plate piece A206 and the plate piece B205 are formed with higher accuracy by opposing the reference plate 218.
00 and can be fixed by bonding or the like. In this shim B210, the passage of the coating liquid is shim A
Instead of the slit 204 at the time of 200, it becomes a groove 214, but the slit 204 and the groove 214 have exactly the same shape as a passage of the coating liquid.

The shim C220 in FIG. 17 is provided with a groove 224 corresponding to the slit 204 of the shim A200 from a plate having a constant thickness. The groove 224 has the same shape as the slit 204 as a passage for the coating liquid. I have. In the form in which the groove is provided like the shim C220, the thickness of the shim can be increased, so that the shim can be made much more durable than the shim A200 provided with the slit. Suitable for use. The thickness of the plate forming the groove is 0.3 mm or more, and more preferably 0.5 mm or more.

As the material of the shim, it is preferable to use a material having high hardness such as ceramics in addition to a metal member such as stainless steel. This is because when particles such as phosphors are present in the coating liquid, dust generation and shortened life due to abrasion can be prevented.

FIGS. 11 and 12 show a nozzle 110 according to still another embodiment of the present invention. In a nozzle 110 of the type shown in the figure, a manifold 111 serving as a reservoir for accumulating a predetermined amount of coating liquid therein is formed in a tapered shape (tapered portion 113) toward an opening 112 communicating with the outside. ing. That is, the shape of the manifold 111 is made to converge as it approaches the opening 112, and there is no place where the velocity component becomes zero, so that there is no stagnation. The shape converging toward the opening 112 is preferably formed three-dimensionally as shown. It is particularly desirable to use the nozzle 110 having such a shape when the quality of the coating liquid is significantly deteriorated due to stagnation. Reference numeral 114 denotes an inlet for introducing the coating liquid into the nozzle 110.

By using the nozzle 110 having the manifold 111 having such a shape that converges as it approaches the opening 112, stagnation does not occur, a stable discharge state of the coating liquid is ensured, and deterioration of the coating liquid is prevented. Is prevented, and a stable predetermined coating quality is obtained.

FIG. 13 shows a nozzle 120 according to still another embodiment of the present invention. In a nozzle 120 of the type shown, the manifold 120 is
1, a coating liquid supply port 122 for supplying a coating liquid and a pressure supply port 123 for supplying a pressure fluid (pressurized air) for pressurizing the supplied coating liquid are provided. Pressure supply port 1
23 is located above the coating liquid supply port 122 in the direction of gravity. The lower portion of the nozzle 120 is provided with an opening 124 similar to that shown in FIG.
The coating liquid is discharged through 24.

Since the pressure supply port 123 is positioned higher than the coating liquid supply port 122, the supplied coating liquid is prevented from flowing backward from the pressure supply port 123 (air pressurizing port). In the above structure, the coating liquid is
Even if it is not filled within 0, it can be pressurized and discharged, so that a very small amount of the coating liquid can be discharged and applied. Such a structure can be applied to nozzles of any shape.

The nozzle 1 is provided with such a coating liquid supply port 122 and a pressure supply port 123 separately so that the coating liquid is discharged little by little without filling the inside of the nozzle 120.
By using 20, only the minimum necessary amount of coating liquid is supplied to the nozzle 120, so that the desired coating can be performed efficiently and the amount of coating liquid used in the coating process is suppressed to the minimum necessary. Thus, the manufacturing cost can be reduced.

In the above-described overall configuration of the coating liquid application apparatus, the height sensor 40 may be a non-contact measurement type using a laser, an ultrasonic wave or the like, or a contact measurement using a dial gauge, a differential transformer or the like. Any type of measurable principle such as a type may be used.

Further, the detecting means for detecting the relative position of the opening of the coating liquid discharge device with respect to the concave portion may be constituted by an image processing device using a camera for separately detecting the concave portion of the base material and the nozzle hole. Good.

Further, in the above embodiment, an application example in which the substrate moves in the X-axis direction and the nozzle moves in the Y-axis and Z-axis directions has been described. The table and the nozzle may be moved in any manner as long as the table and the nozzle can be moved three-dimensionally.

In the above-described embodiment, the application is performed by moving the table and the unevenness in the pitch direction is moved by moving the nozzle. However, the application is performed by moving the nozzle and moving the unevenness in the pitch direction. May be performed by moving the table.

Further, the substrate in the present invention may be any sheet-like material such as an iron plate and an aluminum plate, in addition to a glass plate. Further, the case where one type of coating liquid is applied has been described in detail, but the present invention can be applied to a case where phosphors of three colors such as red, blue, and green are applied simultaneously.

[0093]

[Example] width 340 mm x 440 mm x thickness 2.8 mm
5μ of photosensitive silver paste on the entire surface of soda glass substrate
After screen printing to a thickness of m, exposure is performed using a photomask, development and baking are performed, and the pitch 2
1920 silver electrodes having a stripe shape of 20 μm were formed. A glass paste composed of glass and a binder was applied on the electrode by a screen printer, and then fired to form a dielectric layer. Next, a photosensitive glass paste composed of glass powder and a photosensitive organic component was applied to a thickness of 200 μm.
Was applied using a screen printing machine. Then, after drying in a drying oven using a radiation heater, the coating thickness distribution was measured in the width direction of the substrate and found to be within 140 μm ± 3 μm. Thereafter, exposure was performed using a photomask designed to form a partition between adjacent electrodes, and development and baking were performed to form a partition. The shape of the partition is pitch 2.
The thickness was 20 μm, the line width was 30 μm, and the height was 130 μm, and the number of partition walls was 1921. Next, each color phosphor powder 40
g of ethyl cellulose 10 g, terpineol 10 g,
After mixing with 40 g of benzene alcohol, the mixture was kneaded with three ceramic rollers to produce phosphor pastes of R, G, and B colors.

Subsequently, in order to carry out coating with the apparatus shown in FIG. 1, 160 discharge ports having a pitch of 660 μm and an average diameter of 150 μm were provided on a plate having a thickness of 400 μm, and these were provided on a main body member constituting a manifold. The nozzle manufactured by bonding was attached in place of the nozzle 20 of FIG. 1, and the substrate formed up to the partition wall was attached and held on a table such that the side having a length of 340 mm was parallel to the running direction (X direction). Then, after aligning the discharge port of the nozzle with the groove of the partition wall on the substrate, the height of the bottom of the groove with respect to the upper surface of the table was measured with a laser displacement meter, and the measured value was 130 μm in height of the groove. The gap from the discharge port of the nozzle 20 to the top of the partition wall of 100 μm was added to determine the position where the nozzle should descend, and the nozzle was lowered to that position. Subsequently, the table is run on the table in parallel with the side having a length of 340 mm,
A pressure of 2.6 kg / cm ² is applied to the R-color paste at a position 10 mm from the end of the substrate when the coating speed reaches 3 m / min, and the R-color paste is discharged from the nozzle into 160 grooves of the partition walls. Coating was started. When the position reached 320 mm from the end of the substrate, the discharge of the paste was stopped by closing the valve, and when the position reached 330 mm, the nozzle was pulled up to cut off the remaining paste and terminate the application. Next, the nozzle is moved 10 times in the Y direction in FIG.
The substrate was moved 5.6 mm, the substrate was returned to the original position in the X direction, and the same application was performed four times in total, thereby completing the application of the R-color paste and drying at 80 ° C. for 15 minutes. Thereafter, coating and drying are performed in the same manner for B and G colors to produce a member in which R, G, and B color pastes are filled in the partition grooves. A face plate was manufactured. The surface quality of the obtained plasma display back plate was satisfactory. Next, the rear plate and the front plate of the plasma display were joined together, and after sealing, a mixed gas of Xe 5% and Ne 95% was sealed, and a driving circuit was connected to obtain a plasma display.

[0095]

As described above in detail, according to the apparatus and method for applying a coating liquid to an uneven substrate according to the present invention, the variation in the discharge amount between the respective discharge holes of the coating liquid discharged from a plurality of openings. Can be reduced and stable ejection can be performed, so that the quality of the object to be coated can be improved, and stable and uniform coating can be performed for a long time.

Further, since the member forming the opening can be disassembled, the opening can be directly cleaned, maintenance can be facilitated, and the same nozzle can be used repeatedly. Contribute to quality improvement.

Further, since the flow path is converged from the manifold toward the opening so that the speed cannot be reduced to zero, there is no stagnation in the nozzle.
This can prevent deterioration of the coating liquid due to stagnation,
Quality is improved.

Further, since the supply port for the coating liquid and the supply port for the pressurization are provided in the nozzle, even if the minimum necessary amount of the coating liquid is supplied to the nozzle, it is possible to discharge and apply by pressurization. This makes it possible to quickly switch the coating liquid, which is very effective when a large number of products are produced in small quantities. In addition, since the amount of wasted coating liquid can be reduced to the minimum, it can greatly contribute to cost reduction.

According to the apparatus and method for manufacturing a plasma display and a member for a plasma display of the present invention, since the apparatus and method for applying a coating liquid to the uneven substrate are used, a high quality plasma display and a plasma display are provided. Member can be manufactured with high productivity at low cost.

[Brief description of the drawings]

FIG. 1 is an overall perspective view of a coating liquid application apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic diagram showing a configuration around a table and a nozzle of the apparatus shown in FIG. 1;

FIG. 3 is an enlarged plan view of the nozzle in the apparatus of FIG. 1 as viewed from below.

FIG. 4 is a longitudinal sectional view of a nozzle according to an embodiment of the present invention.

5 is a longitudinal sectional view of the nozzle of FIG. 4 in a direction perpendicular to FIG. 4;

FIG. 6 is a longitudinal sectional view of a nozzle according to another embodiment of the present invention.

FIG. 7 is a bottom view of the nozzle of FIG. 6;

FIG. 8 is a longitudinal sectional view of a nozzle according to still another embodiment of the present invention.

FIG. 9 is a front view of a plate-shaped shim of the nozzle of FIG. 6;

FIG. 10 is a bottom view of the nozzle of FIG. 6;

FIG. 11 is a longitudinal sectional view of a nozzle according to still another embodiment of the present invention.

12 is a longitudinal sectional view of the nozzle of FIG. 11 in a direction perpendicular to FIG.

FIG. 13 is a longitudinal sectional view of a nozzle according to still another embodiment of the present invention.

FIG. 14 is a front view of a shim according to another embodiment of the present invention.

FIG. 15 is a front view of a shim according to still another embodiment of the present invention.

FIG. 16 is a longitudinal sectional view of the shim of FIG. 15 in a direction perpendicular to FIG. 15;

FIG. 17 is a front view of a shim according to still another embodiment of the present invention.

[Explanation of symbols]

2 Base 4 Base 6 Table 8 Guide groove rail 10 Feed screw 16 AC servomotor 20 Nozzle 26 Linear actuator 30 Lifting mechanism 36 Width moving mechanism 40 Height sensor 42 Coating liquid 44 Opening (discharge hole) 45 Opening surface Reference Signs List 50 supply unit 56 coating liquid tank 58 supply device controller 60 general controller 66 sensor 72 camera 80, 90, 100, 110, 120 nozzle 81, 94, 105, 111, 121 manifold (liquid reservoir) 82 plate-shaped body at the tip 82a Surface of plate-like body on coating liquid discharge side 83, 112, 124 Through-hole (discharge hole) 84, 93, 106, 114, 122 Supply port of coating liquid 92 Groove (through path) 103 Plate-shaped shim 104 Slit (discharge) Hole) 113 Tapered portion 123 Pressure supply port 200 Shim A 210 Shim B 220 Shim C

──────────────────────────────────────────────────続 き Continued on front page (51) Int.Cl. ⁶ Identification code FI H01J 11/02 H01J 11/02 B

Claims (21)

[Claims] 1. A table for fixing a base material having irregularities formed on the surface thereof at a constant pitch, a coating liquid discharge device having a plurality of openings facing the concave and convex portions of the base material, and a coating liquid discharge device And a moving means for three-dimensionally moving the table and the coating liquid ejecting apparatus, the coating liquid ejecting apparatus has an internal coating liquid ejecting apparatus. In addition to having a reservoir for accumulating a fixed amount of liquid, the opening has a hole having a diameter d in the range of 50 to 500 μm and a plate having a constant pitch t and a thickness t in the range of 0.5 to 10 d. Characterized by being formed by
Apparatus for applying coating liquid to uneven substrates. 2. The plate-like body in which the opening is formed, the surface of the plate-like body on the coating liquid discharge side is a linear surface when viewed in cross section, and the thickness of the plate-like body is uniform. Coating device for coating liquid on uneven substrate. 3. The apparatus for applying a coating liquid to an uneven substrate according to claim 2, wherein the uniformity of the thickness of the plate-like body is ± 10% or less. 4. A table for fixing a base material having irregularities formed on the surface thereof at a constant pitch, a coating liquid ejection device having a plurality of openings facing the irregularities of the substrate, and a coating liquid ejection device. A coating liquid supplying apparatus for supplying a coating liquid to the substrate, and a moving means for moving the table and the coating liquid discharging apparatus relative to each other three-dimensionally. It consists of two blocks superimposed in the direction perpendicular to the arrangement direction, has a liquid reservoir for accumulating a certain amount of coating liquid inside, and a liquid reservoir and the outside on the superimposed surface of the two blocks. The openings are formed by providing a plurality of through passages communicating with each other at a constant pitch in a direction perpendicular to the stacking direction of the blocks, and the length of the through passage in the coating liquid discharge direction is 0.1 to 20 mm. To the uneven substrate, characterized by being in the range Coating liquid coating device. 5. A table for fixing a base material having irregularities formed on the surface thereof at a constant pitch, a coating liquid ejection device having a plurality of openings facing the irregularities of the substrate, and a coating liquid ejection device. A coating liquid applying device for supplying a coating liquid to a substrate, and a moving device for moving the table and the coating liquid discharging device three-dimensionally relative to each other. It consists of a stack of plate-shaped shims between the blocks, has a reservoir for accumulating a certain amount of coating liquid inside, and a plurality of slits that connect the reservoir and the outside to the plate-shaped shim. An opening is formed by providing the same at a constant pitch in the longitudinal direction, and the length of the slit portion of the plate-shaped shim sandwiched between the two blocks is in the range of 0.1 to 20 mm in the coating liquid discharge direction. Coating liquid for uneven substrate characterized by the following: Coating equipment. 6. A plate-shaped shim is formed by stacking two types of plates sandwiched between the two blocks and having the same thickness and different lengths in the coating liquid discharge direction at a constant pitch in the longitudinal direction of the block. The coating device for applying a coating liquid to an uneven substrate according to claim 5, characterized in that the coating device has a configuration in which a slit is formed. 7. The method of claim 6, wherein the plate-shaped shim has a configuration in which the two types of plates are overlapped on a single reference plate. Coating device. 8. The plate-shaped shim is a plate-shaped body having a fixed thickness, and grooves having a fixed depth corresponding to a plurality of slits communicating the liquid reservoir and the outside are provided at a constant pitch in the longitudinal direction of the block. The apparatus for applying a coating liquid to the uneven substrate according to claim 5, wherein: 9. A table for fixing a substrate having irregularities formed on the surface thereof at a constant pitch, a coating liquid ejecting apparatus having a plurality of openings facing the irregularities of the substrate, and a coating liquid ejecting apparatus. And a moving means for three-dimensionally moving the table and the coating liquid ejecting apparatus, the coating liquid ejecting apparatus has an internal coating liquid ejecting apparatus. An apparatus for applying a coating liquid to an uneven base material, comprising: a reservoir for accumulating a fixed amount of liquid; and wherein the reservoir has a tapered shape toward an opening communicating with the outside. 10. A table for fixing a base material having irregularities formed on the surface thereof at a constant pitch, a coating liquid ejection device having a plurality of openings facing the irregularities of the substrate, and a coating liquid ejection device. A coating liquid applying device for supplying a coating liquid to a substrate, and a moving device for three-dimensionally moving the table and the coating liquid discharging device relative to each other. Having a coating liquid supply port to which the liquid is supplied and a pressure supply port for pressurizing the supplied coating liquid, wherein the pressure supply port is disposed above the coating liquid supply port in the direction of gravity. Apparatus for applying a coating liquid to a substrate. 11. A base material having uneven portions formed on the surface thereof at a constant pitch, and a coating liquid discharge device having a plurality of openings facing the uneven portions of the base material, and A coating method for supplying a coating liquid to the coating liquid discharge device, discharging the coating liquid from an opening, and applying a predetermined thickness to a concave portion of the base material,
The coating liquid discharge device has a liquid reservoir in which a predetermined amount of the coating liquid is accumulated, and the opening has a diameter d of 50 to 500 μm.
m having a constant pitch and a thickness t of 0.5 to 1
A method for applying a coating liquid to an uneven base material, wherein the coating liquid is applied by using a material formed by penetrating a plate-like body in a range of 0d. 12. A base material having uneven portions formed at a constant pitch on the surface thereof, and a coating liquid discharge device having a plurality of openings facing the uneven portions of the base material, and A coating method for supplying a coating liquid to the coating liquid discharge device, discharging the coating liquid from an opening, and applying a predetermined thickness to a concave portion of the base material,
The coating liquid discharging device is composed of two blocks superposed in a direction perpendicular to the arrangement direction of the openings, and has a reservoir for accumulating a fixed amount of the coating liquid therein, and the two blocks are superposed. An opening is formed by providing a plurality of through-holes communicating the liquid reservoir and the outside at a constant pitch in a direction perpendicular to the direction in which the blocks overlap, and the length of the through-hole in the coating liquid discharge direction is increased. A method for applying a coating liquid to an uneven base material, wherein the coating liquid is applied using a material having a thickness of 0.1 to 20 mm. 13. A base material having irregularities formed on the surface thereof at a constant pitch, and a coating liquid discharge device having a plurality of openings facing the irregularities of the base material, and relatively moving; A coating method for supplying a coating liquid to the coating liquid discharge device, discharging the coating liquid from an opening, and applying a predetermined thickness to a concave portion of the base material,
The coating liquid discharge device is composed of a plate-shaped shim overlapped between two blocks, and has a reservoir for accumulating a certain amount of coating liquid inside. An opening is formed by providing a plurality of communicating slits at a constant pitch in the longitudinal direction of the block, and the length of the slit part of the plate-shaped shim sandwiched between the two blocks in the coating liquid discharge direction is zero. A method for applying a coating liquid to an uneven substrate, characterized in that the coating is performed using an object having a thickness in the range of 1 to 20 mm. 14. The plate-shaped shim has the same thickness sandwiched between the two blocks and has different lengths in the coating liquid discharge direction.
14. The method of applying a coating liquid to an uneven substrate according to claim 13, wherein a plurality of slits are formed by stacking different types of plates at a constant pitch in the block longitudinal direction. 15. The plate-shaped shim is provided with grooves of a fixed depth corresponding to a plurality of slits communicating the liquid reservoir and the outside at a constant pitch in the longitudinal direction of the block on a plate of a constant thickness. The method for applying a coating liquid to an uneven substrate according to claim 13, wherein the coating liquid is applied. 16. A base material having irregularities formed at a constant pitch on a surface thereof, and a coating liquid ejection apparatus having a plurality of openings facing the irregularities of the base material, and relatively moving; A coating method for supplying a coating liquid to the coating liquid discharge device, discharging the coating liquid from an opening, and applying a predetermined thickness to a concave portion of the base material,
The coating liquid discharging apparatus has a liquid reservoir in which a predetermined amount of the coating liquid is accumulated inside, and the liquid reservoir is coated using a tapered shape toward an opening communicating with the outside. To apply the coating liquid to the uneven substrate. 17. A base material having uneven portions formed at a constant pitch on a surface thereof, and a coating liquid ejection device having a plurality of openings facing the uneven portions of the base material, and A coating method in which a coating liquid is supplied to the coating liquid discharge device, the coating liquid is discharged from an opening, and the coating liquid is applied to a concave portion of the base material to a predetermined thickness. A method for applying a coating liquid to an uneven base material, comprising mixing a pressure gas and discharging and applying the coating liquid from an opening by the pressure of the pressurizing gas. 18. The coating liquid is a paste containing a phosphor powder that emits light of any one of red, green and blue colors, wherein the coating liquid coating apparatus according to claim 1 is used. An apparatus for manufacturing a member for a plasma display, comprising: 19. The method for applying a coating liquid according to claim 11, wherein the coating liquid is a paste containing a phosphor powder that emits light in any one of red, green, and blue colors. A method for producing a member for a plasma display, comprising: 20. A paste containing a phosphor powder that emits light of any one of red, green and blue colors, wherein the coating liquid coating apparatus according to claim 1 is used. An apparatus for manufacturing a plasma display, comprising: 21. The method for applying a coating liquid according to claim 11, wherein the coating liquid is a paste containing a phosphor powder that emits light in any one of red, green, and blue colors. A method for manufacturing a plasma display, comprising: