JP4324998B2 - Coating apparatus and coating method, and plasma display manufacturing method and manufacturing apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention is used in the manufacturing field of, for example, a plasma display, a color filter for a color liquid crystal display, an optical filter, a printed circuit board, an integrated circuit, a semiconductor, and the like. The present invention relates to a coating apparatus and a coating method for forming a coating film while discharging a coating solution, and an improvement in a plasma display manufacturing apparatus and a manufacturing method using these apparatuses and methods.
[0002]
[Prior art]
In recent years, displays have gradually become diversified in their systems, and one of the current attention is a plasma display that is larger than a conventional cathode ray tube and can be reduced in thickness and weight. This is because a partition having grooves extending in one direction in a striped pattern at a constant pitch is formed on a glass substrate, and further, phosphors of R, G, and B are filled in the grooves of the partition, and an arbitrary portion is emitted by ultraviolet rays. And a predetermined color pattern is projected. Usually, the side with the partition is called the back plate, and the side with the electrode that determines the part to be issued is called the front plate.
[0003]
  Here, as an important method of forming a partition pattern on the back plate, a partition paste is uniformly applied, dried and molded with a uniform film thickness, and then striped grooves with a predetermined pitch are formed by a sandblast method or the like. The mainstream is engraving and baking by post-processing such as photolithography. The thickness of the partition wall coating film is as thick as 100 to 200 μm even after firing. As a means for uniformly applying the partition wall paste to this film thickness, a screen printing method can be used according to the paste viscosity of thousands to tens of thousands cps. In general, a method of coating is also used. However, with this method, the number of coatings reaches 10 to 20 times, and in recent years, the introduction of a roll method and a die coating method that can complete the coating in one time has been started actively in order to reduce costs and improve quality. .
[0004]
  Among these, the die coating method using a die can be applied only once, and (1) since the die as an applicator is not in contact with the glass substrate, there is no screen unevenness on the coated surface and the quality is improved. (2) Since there are no consumables such as screens, there is an advantage that the cost can be eliminated.
[0005]
  Even if the paste for forming the partition walls of the plasma display is applied by a single die coating, there is no problem with the film thickness accuracy of the central portion that becomes the product screen portion. Nevertheless, the reason why it is difficult to apply the die coating method to the partition wall formation is that the film thickness and shape of the end portion unrelated to the product screen portion cannot be formed as desired.
[0006]
  That is, there is a problem that even if the discharge ports of the die are made to have a uniform gap, the end portions are thickly coated due to surface tension and other influences.
[0007]
  In order to prevent thickening of the end, Japanese Patent Application Laid-Open No. 10-156255 proposes to suck the coating liquid at the end inside the base before discharging to reduce the discharge amount at the end. However, there is a problem that a complicated forced exclusion means such as suction from the outside must be used. Further, even if the thickening of the end portion is prevented in this way, if the coating speed is increased, a new problem arises that the coating speed cannot be increased because the film is cut off from the end portion. On the other hand, in Japanese Patent Laid-Open No. 4-371259, the clearance at the end is made narrower than that at the center in order to stabilize the application at the end. However, there is a problem that the object is a slide die and cannot be applied to a normal die coating as it is, and further, merely reducing the clearance at the end does not contribute to prevention of thickening of the end.
[0008]
  Japanese Laid-Open Patent Publication No. 4-317770 discloses a technique for preventing a thick film at the end by forming a coating liquid flow channel in a shape that expands in the longitudinal direction of the discharge port as it goes to the discharge port outlet with a slide die. However, the target is a slide die that cannot be applied to a normal die as it is, and since the die itself is processed, the shape of the coating solution channel cannot be easily changed, and the optimum coating solution channel according to the coating solution. There is a problem that the thick film cannot be prevented in the shape. Furthermore, in Japanese Patent Application Laid-Open No. 10-277464, etc., a die discharge port is formed by sandwiching a shim plate between an upper plate and a lower plate, and both ends of the die in the longitudinal direction are inclined in a direction spreading in the coating direction. There is shown a means for preventing the end portion from becoming thicker by reducing the discharge amount of the portion while easily dealing with the change in the coating width. However, there is a problem that a specific shape for preventing thickening is not shown, and when the coating speed is increased, the coating liquid is interrupted from the end portion where the discharge amount is small, and the film is broken. When applying, there is a problem that it is impossible to apply the film uniformly by preventing the end portion from being thickened.
[0009]
[Problems to be solved by the invention]
This invention was made based on the above-mentioned circumstances, and its object is to reduce the discharge amount without using forced exclusion means such as suction from the outside to prevent the end thickening, To provide a uniform application, and to provide a flexible and highly reproducible means that can always maintain the application uniformity even if the type of application liquid changes, Coating apparatus and coating method capable of realizing coating uniformity even at high speed without causing film breakage at the end even if the coating speed is increased, and a plasma display manufacturing method using these coating method and apparatus And providing a manufacturing apparatus.
[0010]
[Means for Solving the Problems]
The object of the present invention is achieved by the means described below.
(1) A coating liquid supply means for supplying a coating liquid, an applicator having a discharge port for discharging the coating liquid supplied from the coating liquid supply means to a member to be coated, and the applicator and the member to be coated In a coating apparatus comprising a moving means for relatively moving at least one to form a coating film on the coated member,The application liquid channel of the applicator has a shape that gradually spreads in the longitudinal direction of the discharge port in the vicinity of both ends of the discharge port so that the discharge amount at both ends in the longitudinal direction of the applicator is relatively small. The tip of the discharge port gradually extends in the coating liquid discharge direction toward the both ends of the discharge port so that the gap between the discharge port and the member to be coated is narrowed at both ends of the discharge port of the applicator according to the shape that gradually spreads in the longitudinal direction. An applicator having a protruding shape.
(2) A shape in which the coating liquid flow path of the applicator gradually spreads in the longitudinal direction of the discharge port in the vicinity of both ends of the discharge port,At the longitudinal end of the discharge portInsertedRuSimThe shim is a discharge portAngle of 100 to 175 degrees at the part, length of 0.1 to 30 mm in the coating liquid discharge directionForm ofConditionHaveIt is characterized by (1).
(3) (1)Or (2)A plasma display manufacturing apparatus, wherein the plasma display is manufactured using the coating apparatus described in 1.
(4)Any one of (1) to (3)A coating film is formed on the member to be coated by relatively moving at least one of the applicator and the member to be coated while discharging a coating liquid from a discharge port extending in one direction of the applicator.It is characterized byApplication method.
(5) (4)A plasma display is produced by using the coating method described in 1 above.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings.
[0012]
  FIG. 1 is an overall perspective view of the coating apparatus according to the present invention, FIG. 2 is a schematic view around the mounting table 6 and the die 40 in FIG. 1, and FIG. 3 is a schematic perspective view showing an example of the structure of the die according to the present invention. is there.
[0013]
  Referring to FIG. 1, there is shown a so-called die coater, which is a coating apparatus by a die coating method applied to the manufacture of a partition wall of a plasma display according to the present invention. The die coater includes a base 2 on which a pair of guide groove rails 4 are provided. The guide groove rail 4 is provided with a mounting table 6 as a holding body, and the upper surface of the mounting table 6 is configured as a suction surface 90 having a suction hole to which the substrate A (coating member) can be fixed by vacuum suction. ing. The mounting table 6 reciprocates freely on the guide groove rail 4 in the horizontal direction via a pair of slide legs 8. Sensors 202 A and 202 B for detecting the position of the lower end surface of the die 40 are attached to the top of the mounting table 6. The guide groove rail is covered with the side cover 4a and the top cover 10.
[0014]
  A casing 12 containing feed screw mechanisms 14, 16, and 18 shown in FIG. 2 is disposed between the pair of guide groove rails 4, and the casing 12 extends in the horizontal direction along the guide groove rails 4. As shown in FIG. 2, the feed screw mechanisms 14, 16, and 18 have a feed screw 14 formed of a ball screw, and the feed screw 14 is a nut-like connector fixed to the lower surface of the mounting table 6. 16, and extends through this connector 16. Both ends of the feed screw 14 are rotatably supported by a bearing (not shown), and an AC servo motor 18 is connected to one end thereof.
[0015]
  As shown in FIG. 1, a die support 24 is disposed substantially at the center of the upper surface of the base 2, and the die support 24 has an inverted L shape. The tip end of the die support 24 is positioned above the reciprocating path of the mounting table 6, and an elevating mechanism 26 is attached. The elevating mechanism 26 includes an elevating bracket (not shown) that can be raised and lowered, and the elevating bracket is attached to a pair of guide rods in the casing 28 so as to be raised and lowered. In addition, a feed screw (not shown) made of a ball screw is also arranged in the casing so as to be rotatable between guide rods. A lifting bracket is attached to the feed screw via a nut-type connector. It is connected. An AC servomotor 30 is connected to the upper end of the feed screw, and this AC servomotor 30 is attached to the upper surface of the casing 28.
[0016]
  A die holder 32 is attached to the elevating bracket via a support shaft (not shown). The die holder 32 has a U-shape and extends horizontally above the pair of guide groove rails 4 between the rails. Yes. The support shaft of the die holder 32 is rotatably supported in the lifting bracket, so that the die holder 32 can rotate in the vertical plane together with the support shaft.
[0017]
  A horizontal bar 36 is also fixed to the lifting bracket. The horizontal bar 36 is located above the die holder 32 and extends along the die holder 32. At both ends of the horizontal bar 36, electromagnetically actuated linear actuators 38 having telescopic rods protruding from the lower surface thereof are respectively attached. These telescopic rods are arranged such that their lower ends are in contact with both ends of the die holder 32.
[0018]
  The die holder 32 holds a die 40 as an applicator. As apparent from FIG. 1, the slit die 40 extends horizontally in the direction orthogonal to the reciprocating direction of the mounting table 6, that is, in the longitudinal direction of the die holder 32, and both ends thereof are supported by the die holder 32.
[0019]
  In addition, on the upper surface of the base 2, a sensor column 20 is disposed on the front side of the die support 24. The sensor column 20 is also in an inverted L shape. A thickness sensor 22 is attached to the tip of the sensor column 20 via a bracket 21 so as to be above the reciprocating path of the mounting table 6. The thickness sensor 22 is disposed at a position where the central portion of the substrate A can be measured when the application start portion of the substrate A stops just below the discharge port of the die 40.
[0020]
  2 and 3, the die 40 is formed by connecting a long block-shaped rear lip 60 and front lip 66 to each other by a plurality of connecting bolts (not shown) in the reciprocating direction of the mounting table 6. Are integrally coupled to each other. The lowermost surfaces of the rear lip 60 and the front lip 66 are discharge port surfaces 74 that hold the coating film C, and the clearance from the discharge port surface 74 to the gap of the substrate A is set to an optimum value in view of the coating property.
[0021]
  Inside the die 40, a slit 64 serving as a flow path for the coating liquid for forming the coating film C is formed between the rear lip 60 and the front lip 66. On the lower surface of the die 40, a discharge port serving as an outlet for the coating liquid. 72. The gap of the slit 64 is secured by the shim 102 sandwiched between the rear lip 60 and the parallel portions 116A and 116B of the front lip 66, and can be set to an arbitrary size. The distribution of the discharge amount in the longitudinal direction of the die 40 (direction perpendicular to the paper surface of FIG. 2) is determined by the distribution of the lip gap in the longitudinal direction of the die 40. That is, when the lip gap is wide, the discharge amount increases, and when the lip gap is narrow, the discharge amount decreases. Further, a manifold 62 is formed on the upstream side of the slit 64 and communicates therewith and extends horizontally in the longitudinal direction of the die 40 (substrate width direction). Further, the manifold 62 is connected to the supply hose 42, the electromagnetic switching valve 46, the syringe pump 44, the suction hose 48, and the tank 50 through the internal passage 112 of the die 40, and supplies the coating liquid 76 in the tank 50. Can receive. The tank 50 is a sealed container and is preferably pressurized with air at a constant pressure or an inert gas such as N2. The applied pressure is preferably 0.02 to 1 MPa, more preferably 0.1 to 0.5 MPa.
[0022]
  The actual supply of the coating liquid to the die 40 can be optionally performed by the cooperative operation of the syringe pump 44 and the electromagnetic switching valve 46. That is, first, after switching the electromagnetic switching valve 46 so that only the suction hose 48 and the syringe 80 of the syringe pump 44 communicate with each other, the piston 52 engaged with the inner surface of the syringe 80 via the sealing material is fixed downward. The amount is moved to fill the syringe 80 with the coating liquid 76 in the tank 50. Subsequently, after switching the electromagnetic switching valve 46 so that only the supply hose 42 and the syringe 80 of the syringe pump 44 communicate with each other, the piston 52 is moved upward at a predetermined speed and supplied to the manifold 62 of the die 40. Is realized.
[0023]
  The operation conditions such as the switching timing of the electromagnetic switching valve 46, the operation timing of the syringe pump 44, the coating liquid discharge amount, and the discharge speed are independently determined for each device by the computer 54 to which each device is electrically connected. Be controlled. Further, in order to control the operation of the syringe pump 44 in conjunction with the mounting table 6 and the like, in addition to the thickness sensor 22, a sequencer 56 is also electrically connected to the computer 54. The sequencer 56 performs sequence control of the operation of the AC servomotor 18 of the feed screw 14 on the mounting table 6 side, the AC servomotor 30 on the lifting mechanism 26 side, and the linear actuator 38. For the sequence control, The sequencer 56 includes a signal indicating the operating state of the AC servomotors 18 and 30, a signal from the position sensor 58 that detects the moving position of the mounting table 6, a signal from a sensor (not shown) that detects the operating state of the die 40, and the like. On the other hand, a signal indicating a sequence operation is output from the sequencer 56 to the computer 54. Instead of using the position sensor 58, it is also possible to incorporate an encoder in the AC servomotor 18 and detect the movement position of the mounting table 6 by the sequencer 56 based on the pulse signal output from the encoder. It is also possible to incorporate control by the computer 54 into the sequencer 56 itself.
[0024]
  4 is a front sectional view showing an embodiment of the die according to the present invention, and FIG. 5 is a partially enlarged view thereof.
[0025]
  Coating liquid contact portions 120A and 120B of the shim 102 are spread in the die longitudinal direction (in the direction of the arrow in FIG. 4) from the middle of the parallel portion 116 toward the discharge port to change the shape of the coating liquid flow path. Thus, when the discharge port width W1 is made wider than the parallel portion 116 width W2, the amount of the coating liquid flowing to the discharge port end portion is reduced, and as a result, the amount of the coating liquid discharged from the discharge port end portion is larger than that of the central portion. Less. In general, when coating is performed on the substrate, the end of the coating solution on the coated substrate moves so as to contract toward the center of the substrate in the longitudinal direction of the die (substrate width direction) due to surface tension. If it is uniform in the substrate width direction, the film thickness at the end where the coating solution is drawn is thicker than at the center. However, as in the present embodiment, when the discharge amount at the end is smaller than that at the center portion, the coating liquid is applied after a short time even if the end portion film thickness immediately after coating is smaller than that at the center portion. Due to the pulling effect due to the surface tension, the end film thickness can be made exactly the same as the central part.
[0026]
  In order to control the amount of the coating liquid flowing to the end, it is necessary to change the shape of the end of the shim 102 as shown in FIG. That is, by changing the angle Θ and the discharge direction length L1 of the notch, the discharge amount at the end can be arbitrarily controlled. Here, Θ is preferably 100 to 175 degrees, and particularly preferably 120 to 150 degrees. Further, L1 is preferably 0.1 to 30 mm, particularly preferably 0.5 to 3 mm. If Θ is larger than the specified range or L1 is smaller than the specified range, the flow path through which the coating liquid flows changes rapidly, so that the coating liquid does not spread well in the longitudinal direction of the die, and the discharge amount at the end portion is small. Since it does not decrease, it is not possible to prevent the end portion from being thickened. If Θ is smaller than the specified range or L1 is larger than the specified range, the change of the flow path through which the coating liquid flows is too slow and the coating liquid spreads sufficiently, and the difference in the discharge amount in the longitudinal direction of the die. This also prevents the end from being thickened.
[0027]
  . FIG. 6 shows another embodiment. By using the end shims 108A and 108B only at the ends, the shape of the application liquid flow path at the ends can be easily changed. This is so that even if the discharge amount at the end changes, it can be easily handled. The shim width L3 of the end shims 108A and 108B is preferably 0.5 to 30 mm, and particularly preferably 1 to 10 mm. Further, the shape of the notch is in accordance with FIG.
[0028]
  As in the case of the shim 102, the end shims 108A and 108B are sandwiched between the parallel portions 116A and 116B of the rear lip 60 and the front lip 66 and fixed in place.
[0029]
  Alternatively, the end shims 108A and 108B may be connected to the shim 102 with an adhesive tape. However, it is necessary to keep the adhesive tape at the position of the manifold 62 so that the adhesive tape does not widen the lip gap.
[0030]
  FIG. 7 shows another embodiment, in which the coating liquid contact portions 120A and 120B of the shim 102 spread from the middle of the parallel portion 116 toward the discharge port 72 in the longitudinal direction of the die (the arrow direction in FIG. 7). As the liquid discharge amount decreases, the discharge port surface 74 at the tip of the lip has oblique portions 124A and 124B that gradually protrude in the coating liquid discharge direction.
[0031]
  When the discharge amount is small, the coating liquid is cut off and does not form a film when coating is performed at high speed unless the clearance that is the gap between the discharge port surface 74 of the die and the substrate A is also small.
[0032]
  On the other hand, in this embodiment, as shown in FIG. 7, the discharge amount of the coating liquid at the end decreases as it goes toward the end in the substrate width direction (arrow direction in FIG. 7) due to the end shape of the shim 102. In addition, the clearance between the ejection port surface 74 and the substrate A is also gradually reduced from the central value C1 to the value C2 at both ends by the skew portions 124A and 124B. Since the clearance is reduced in accordance with the discharge amount, even when the coating speed is increased, only the end portion is not cut off, and high-speed coating and film thickness uniformity can be realized.
[0033]
  The substrate width direction (die longitudinal direction) length of the inclined portions 124A and 124B is preferably 0.5 to 30 mm, and particularly preferably 1 to 10 mm. The difference between the clearances C1 and C2 may be determined according to the behavior of the coating solution, but is preferably 10 to 1000 μm, and particularly preferably 20 to 200 μm.
[0034]
  Further, the oblique portions 124A and 124B may be linear as shown in FIG. 7 or may be arbitrary curves.
[0035]
  Further, the end shape of the shim 102 and the end shims 108A and 108B may be the same or different at both ends of the die, but preferably have the tip shape shown in FIG. Further, in the present embodiment, the description has been given of changing the shape in the longitudinal direction of the die, but the thickness of the shim 102 may be changed to change the discharge amount at the die end.
[0036]
  Further, shims different from the shim 102 may be inserted separately at both end portions corresponding to the oblique portions 124A and 124B in FIG. Accordingly, it is possible to easily cope with a change in the coating width, and it is possible to insert a different shim for each coating solution to obtain an optimum end coating solution channel shape.
[0037]
  Next, a coating method using this coating apparatus will be described.
[0038]
  First, when the origin of each operation unit in the coating apparatus is returned, the mounting table 6 and the die 40 move to the standby position. At this time, the coating liquid is already filled from the coating liquid tank 50 to the die 40, and the so-called air venting operation of discharging the coating liquid with the die 40 facing upward and discharging the residual air inside the die has already been completed. ing.
[0039]
  Next, after the sensors 202A and 202B at the tip of the mounting table 6 are moved directly below the discharge port surface 74A on the upstream side of the die 40, the die 40 is slowly lowered and stopped at a predetermined position, and then the suction of the mounting table 6 is performed. The height distribution in the substrate width direction of the discharge port surface 74 of the die 40 with respect to the surface 90 is measured, and the expansion / contraction amount of the linear actuator 38 is set so that the discharge port surface 74 is parallel to the suction surface 90 of the mounting table 6. Adjust. At this time, the association of the discharge port surface 74 with the suction surface 90 of the mounting table 6 as a reference point and the vertical coordinate axis (Z-axis) value of the elevating mechanism 26, that is, the origin detection of the so-called discharge port surface 74 is simultaneously executed and completed. The Accordingly, if the vertical coordinate axis value is controlled, the ejection port surface 74 can be moved from the suction surface 90 to an arbitrary height position. When these operations are completed, the mounting table 6 and the die 40 are returned to the origin.
[0040]
  After this preparation operation is completed, lift pins (not shown) are raised on the surface of the mounting table 6, and when the substrate A is placed on the upper portion of the loader from the loader (not shown), the lift pins are lowered to place the substrate A on the upper surface of the placement table. Place and adsorb.
[0041]
  Next, the mounting table 6 is moved at a predetermined speed, and is stopped when the coating start portion of the substrate A comes directly under the discharge port of the die 40. In this stop state, the thickness sensor 22 measures the substrate thickness of the substrate A, calculates the value to be lowered of the die 40 from the thickness and the clearance previously given as a condition, and the die 40 is located at the next position. Descend.
[0042]
  On the other hand, the syringe pump 44 sucks a predetermined amount of coating liquid from the tank 50 during this time, and after the clearance setting is confirmed, the coating liquid is fed from the syringe pump 44 to the die 40. A timer in the computer 54 is started after the coating liquid feeding operation of the syringe pump 44 is started. After a predetermined time, a start signal is issued from the computer to the sequencer 56, and the mounting table 6 starts moving at the coating speed. Application is started. At this time, the shape of the end portion of the shim 102 sandwiched between the dies 40 is such that the shape of the coating liquid flow channel extends in the substrate width direction toward the discharge port of the die 40 as shown in FIG. As a result, the discharge amount at the end is reduced, and coating with a uniform film thickness can be performed over the entire substrate A width direction.
[0043]
  When the coating end portion of the substrate A comes to a position just below the discharge port of the die 40, a signal is output from the computer 54, the syringe pump 44 is stopped and the die 40 is raised, and the coating liquid is completely covered from the substrate.
[0044]
  On the other hand, the mounting table 6 continues to move, stops when the substrate A reaches the end point position where the substrate A is transferred by the unloader, releases the suction of the substrate A, raises the lift pins, and lifts the substrate A.
[0045]
  At this time, the lower surface of the substrate A is held by an unloader (not shown), and the substrate A is transported to the next step. When the delivery to the unloader is completed, the mounting table 6 lowers the lift pins and returns to the origin position.
[0046]
  During this time, the syringe pump 44 performs a suction operation to newly fill the liquid from the tank 50. Then, waiting for the next substrate A to come, the same operation is repeated.
[0047]
  The coating liquid to which the present invention can be applied has a viscosity of 1 cps to 100,000 cps, desirably 10 cps to 50,000 cps, and Newtonian is preferable from the viewpoint of coating properties, but it can also be applied to a coating liquid having thixotropy. As the substrate A, in addition to glass, a metal plate such as aluminum, a ceramic plate, a silicon wafer, or the like may be used. Further, as a coating state to be used, the clearance is 40 to 500 μm, more preferably 80 to 300 μm, the coating speed is 0.1 m / min to 10 m / min, more preferably 0.5 m / min to 6 m / min, the die lip The gap is 50 to 1000 μm, more preferably 100 to 600 μm, and the coating thickness is 5 to 400 μm, more preferably 20 to 250 μm.
[0048]
【Example】
After the photosensitive silver paste is screen-printed to a thickness of 5 μm on the entire surface of a soda glass substrate having a width of 340 mm × 440 mm × thickness of 2.8 mm, it is exposed using a photomask, and undergoes development and baking processes, Striped 1920 silver electrodes with a pitch of 220 μm were formed. A glass paste made of glass and a binder was screen-printed on the electrode and then baked to form a dielectric layer. Next, a die having a discharge width of 430 mm and a lip gap (shim thickness) of 500 μm is prepared, and a photosensitive glass paste made of glass powder and a photosensitive organic component is applied at a clearance of 300 μm, a coating thickness of 200 μm, and a coating speed of 1 m / min. did. At this time, the shim has a shape in which both ends are 1 mm in FIG. 5 and Θ is 150 degrees. After drying in a drying furnace using a radiant heater, the coating thickness distribution was measured over the width direction of the substrate. As a result, it was within the range of 140 μm ± 3 μm, and both ends were not particularly thick. Next, exposure was performed using a photomask designed to form a partition between adjacent electrodes, and development and firing were performed to form a partition. The shape of the partition walls was a pitch of 220 μm, a line width of 30 μm, a height of 130 μm, and the number of partition walls was 1921. Thereafter, phosphor pastes of R, G, and B were sequentially applied by screen printing, dried and baked, and were produced up to the back plate of the plasma display.
[0049]
【The invention's effect]
DaThe amount of coating liquid discharged from the end of the discharge port is smaller than that at the center, and not only can the thickness of the end be prevented when applied on the substrate, but also the film thickness is uniform over the longitudinal direction of the die. It becomes possible.
[0050]
MaAs the discharge amount at the end of the die decreases, the tip of the discharge port protrudes from the center so that the clearance between the discharge port tip of the die and the substrate is reduced, so the coating speed is high. However, it becomes possible to apply without cutting the film, and a uniform film thickness can be realized even during high-speed application.
[0051]
  Since the plasma display is manufactured by the manufacturing apparatus and the manufacturing method of the plasma display using the coating apparatus and the coating method having the above excellent effects, a high quality plasma display can be obtained with high productivity.
[Brief description of the drawings]
FIG. 1 is a perspective view schematically showing a die coater according to an embodiment of the present invention.
2 is a schematic configuration diagram showing the die coater of FIG. 1 including a coating solution supply system. FIG.
FIG. 3 is a schematic perspective view showing an example of the structure of a die according to the present invention.
FIG. 4 is a front sectional view showing an embodiment of a die according to the present invention.
FIG. 5 is a partially enlarged view of FIG. 4;
FIG. 6 is a front cross-sectional view showing another embodiment of a die according to the present invention.
FIG. 7 is a front sectional view showing still another embodiment of the die according to the present invention.
[Explanation of symbols]
2: Base
6: Mounting table
14: Feed screw
18: AC servo motor
22: Thickness sensor
26: Lifting mechanism
40: Die (applicator) 10
44: Syringe pump
46: Electromagnetic switching valve
50: Tank
52: Piston
54: Computer
60: Rear lip
62: Manifold
64: slit
66: Front lip
72: Discharge port
74: Discharge port surface
76: Coating liquid
80: Syringe
90: Adsorption surface
102: Sim
108A, 108B: end shims
112: Coating liquid inlet
116: Parallel part
120A, 120B: coating liquid contact portion
124A, 124B: skew section
A: Substrate (member to be coated)
C: Coating film

Claims (5)

A coating liquid supply means for supplying a coating liquid; an applicator having a discharge port for discharging the coating liquid supplied from the coating liquid supply means to the member to be coated; and at least one of the applicator and the member to be coated. In a coating apparatus comprising a moving means for forming a coating film on the coated member by relatively moving, the discharge amount at both longitudinal ends of the coating device is relatively small. The coating liquid flow path of the applicator has a shape that gradually expands in the longitudinal direction of the discharge port in the vicinity of both ends of the discharge port. A coating apparatus having a shape in which a tip of a discharge port gradually protrudes in a coating liquid discharge direction toward the both ends of the discharge port so that a distance from the coating member is narrowed. The coating liquid flow path of the applicator is gradually widened in the discharge port longitudinally around the outlet end portions shaped to form with shims to be inserted in the longitudinal end portion of the discharge port, the angle 100 the shim is at the discharge port portion 175 degrees, the coating apparatus according to claim 1, characterized in that it has a shape of a length 0.1~30mm the coating solution discharge direction. Plasma display manufacturing apparatus characterized by producing a plasma display using a coating apparatus according to claim 1 or 2. The at least one of the said applicator and a to-be-coated member is moved relatively, discharging a coating liquid to the to-be-coated member from the discharge port extended in one direction of the applicator in any one of Claims 1-3. coating method characterized by forming a coating film on the coated member. A method for producing a plasma display, comprising producing a plasma display using the coating method according to claim 4 .

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