JP2001000907A - Method and apparatus for application, plasma display, and method and apparatus for producing member for display - Google Patents

Abstract

PROBLEM TO BE SOLVED: To form a proper coating film easily over a plurality of application areas while a film thickness profile in an application starting part and an application end part is kept constant by controlling discharge from a coating liquid and the vertical movement of an applicator to prevent the heaping of the coating liquid discharged from the coating liquid on a member to be coated. SOLUTION: When a coating liquid is applied on a plurality of coating areas in a substrate A, each quantity of the extension/contraction of linear actuators 38A, 38B is adjusted to make each discharge opening face 74A, 74B in dies 40A, 40B parallel to the suction face of a mounting table 6. Next. the table 6 is moved so that the center of the substrate A is located just under a thickness sensor 22, and each die 40A, 40B is brought down. Next, the table 6 is moved again, when each coating area is located just under each discharge opening 72A, 72B, syringe pumps 44A, 44B are actuated independently, the coating liquid sucked from tanks 50A, 50B is discharged from each die 40A, 40B to be applied on each coating area.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating technique used in the field of manufacturing, for example, a plasma display, a color filter for a color liquid crystal display, an optical filter, a printed circuit board, an integrated circuit, and a semiconductor.
Specifically, a coating apparatus and a coating method for forming a coating film while discharging a coating liquid in a non-contact manner on a surface of a member to be coated such as a glass substrate, and a manufacturing apparatus and a manufacturing method for a plasma display and a display member using these apparatuses and methods It relates to improvement of the method.

[0002]

2. Description of the Related Art In recent years, displays have been gradually diversified in their system, but one of the things that are currently attracting attention is a plasma display which is larger and thinner and lighter than a conventional cathode ray tube. This is because a partition having grooves extending in one direction in a stripe shape at a constant pitch is formed on a glass substrate, and R (red), G
(Green) and B (blue) phosphors are filled, an arbitrary portion is made to emit light by ultraviolet rays, and a predetermined color pattern is projected. Usually, the side with the partition is called the back plate, and the side with the part that generates ultraviolet rays is called the front plate, and they are bonded together to form a plasma display.

Here, the important method of forming the pattern of the partition on the back plate is to apply a partition paste uniformly, dry the paste to form a film having a uniform thickness, and then form a stripe-shaped groove having a predetermined pitch. Is generally engraved by post-processing such as sandblasting or photolithography, and then fired. The thickness of the coating of the partition walls is 100 to 20 even after firing.
As a means for uniformly applying the partition wall paste to a thickness of 0 μm and this film thickness, a method of applying the paste many times by screen printing in accordance with the paste viscosity of thousands to tens of thousands of cps is generally used. I have. However, in this method, since the number of times of application is as many as 10 to 20 times, the introduction of a roll method, a die coating method, or the like, which can complete the application in one time, has been actively started in recent years in order to reduce costs and improve quality. .

Among these, the die coating method in which a coating liquid is discharged onto a glass substrate which moves relatively from a die having a discharge port at the tip to perform coating is performed in addition to (a) application. Since the die, which is not in contact with the glass substrate, is not in contact with the glass substrate, the quality can be improved without screen unevenness remaining on the coating surface, and (b) there is no consumable such as a screen, so that the cost can be eliminated altogether. There is.

[0005] However, in order to improve the productivity in the above-mentioned die coating method, it is effective to apply to a plurality of regions on a substrate so that a plurality of products can be obtained from a single glass substrate (multi-panning). . At this time, it is necessary to form the coating start and end portions in a predetermined film thickness profile. However, once the coating is performed by one die, the coating liquid adheres to the discharge port. It is difficult to form the film thickness profile into a predetermined one by merely controlling the discharge / stop of the coating liquid.

Further, the glass substrate to be coated in the case of performing multiple-panning is (a) an increase in the size of the product itself, and (b) an increase in the size of a product to take out as many products from one substrate as possible to increase productivity. , The size of 1100
× 1440 mm. A die applied to such a large glass substrate has a discharge width of 1100 mm and a weight of 100 kg. It is impossible to attach / detach the heavy die to / from the coating apparatus manually, and it is necessary to easily attach / detach the die to / from the apparatus main body.

[0007] With respect to the above-mentioned multi-paneling, Japanese Patent Laid-Open No.
As described in JP-A-113595 and JP-A-10-43659, application to a plurality of application areas of a member to be applied such as a glass substrate by a die having a plurality of discharge ports or a plurality of dies is shown. Have been. There is no problem if the die and the member to be coated are relatively moved by a length corresponding to the coating area. However, in practice, the die and the member to be coated need to be relatively moved by a length equal to or longer than the length of the coating area to be actually coated due to the restriction of the mechanical configuration, the stable speed, or the time until the stop. As described above, when the relative movement amount between the two increases, the die and the application region adjacent to each other come to a position where they interfere with each other. When the adjacent die and the coating area have such a relationship, the coating is performed in a state where the die and the member to be coated are close to each other. However, there is a problem that the film adheres to an adjacent die and the formed coating film is damaged. Further, as described in the above publication, when the same die is intermittently applied to a plurality of application regions, the application liquid is applied to the discharge port surface of the die in a state where the application liquid in the previous application remains, and the application starts. There is also an inconvenience that the part becomes a thick coating film.

[0008] As for the attachment and detachment of the die to and from the coating apparatus main body, there is a movable independent die transfer device dedicated to attachment and detachment as shown in Japanese Patent Application Laid-Open No. 11-138082. Each time the user attaches or detaches the device, the user must hold the device, which is inconvenient.

[0009]

SUMMARY OF THE INVENTION The present invention has been made based on the above-mentioned circumstances, and has the following objects. 1) A case in which a plurality of product areas are coated on one glass substrate. (Multi-panning) also starts application of each area,
Forming a film thickness profile at the end portion into a predetermined one and providing a means for preventing the formed coating film from being damaged by contact with a die or the like. 2) A long width corresponding to a large-sized substrate which is indispensable in the case of multi-panning. Providing a means for easily exchanging a heavy-weight die without introducing a special device from outside the die coater; a coating device and a coating method capable of; and a plasma display using these coating methods and devices. And a method and apparatus for manufacturing a display member.

[0010]

The object of the present invention is achieved by the following means. The coating apparatus according to the present invention includes: a coating liquid supply unit that supplies a coating liquid; a coating device that has a discharge port that discharges the coating liquid supplied from the coating liquid supply unit to a member to be coated; Moving means for relatively moving at least one of the coating members to form a coating film on the member to be coated, wherein the coating device has a plurality of coating devices. The applicator elevating means capable of independently raising and lowering the applicator, and applying each coating liquid discharged from the plurality of applicators so that a coating film is formed on the object to be applied without overlapping in the traveling direction of the object to be applied. The apparatus is provided with an applicator discharge elevation control means for controlling the discharge of the liquid and the elevation of the applicator.

Here, it is preferable that each applicator has a plurality of discharge ports, and the member to be coated is a single sheet member. Further, an applicator attachment / detachment means for attaching / detaching the applicator to a position for performing application and a position for not performing application is provided inside the application device, and a cleaning unit for cleaning a discharge port surface of the application device is provided. preferable.

An apparatus for manufacturing a plasma display or a member for a display according to the present invention uses the above-described coating apparatus.

[0013] In the coating method according to the present invention, at least one of the coating device and the member to be coated is relatively moved while discharging the coating liquid to the member to be coated from a discharge port extending in one direction of the coating device. A coating method for forming a coating film on a member to be coated, wherein a plurality of the coating devices are provided so that the respective coating liquids discharged from the plurality of coating devices do not overlap in the traveling direction of the member to be coated, The method is characterized in that a coating film is formed on a member to be coated by controlling the discharge of the coating liquid and the elevation of each coating device.

Here, each applicator has a plurality of discharge ports, and N applicators D1, D2,..., DN
And N application regions R1, R2,.
, RN are arranged in this order in the application direction, and the application area D is applied by the applicator D1.
1, D2, R2,..., DN are applied to RN to form a coating film, and the member to be applied is more preferably a single-wafer member.

Further, the applicator is attached and detached to a position for performing application and a position for not performing the application by an applicator attaching / detaching means provided in the applicator. It is advisable to always clean and clean before use.

The method for producing a plasma display or a member for a display of the present invention is a method characterized by producing a plasma display or a member for a display using the above-described coating method.

According to the coating apparatus and the coating method of the present invention, the discharge from the coating liquid and the elevation of the coating apparatus are controlled so that the coating liquid discharged from the coating apparatus does not overlap on the member to be coated. In addition, it is possible to form a coating film on a plurality of regions on a member to be coated while maintaining a predetermined film thickness profile at the start and end portions of the coating. Further, when the attaching / detaching means of the applicator is provided in the applicator main body, the attaching / detaching of the applicator can be performed quickly and easily.

According to the apparatus and method for manufacturing a plasma display and a member for a display of the present invention, a plasma display and a member for a display are manufactured using the above-described excellent coating apparatus and method for coating. A plasma display and a member for a display can be manufactured with high productivity.

[0019]

Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an overall perspective view of a coating apparatus according to the present invention, FIG. 2 is a schematic configuration diagram showing the die coater of FIG. 1 including a coating liquid supply system, and FIG. 3 is a drawing of the coating apparatus of FIGS. It is a schematic side view which shows the application condition to the board | substrate A which consists of a sheet member as a member to be coated.

Referring to FIG. 1, there is shown a so-called die coater 1, which is a coating apparatus based on a die coating method applied to the production of partition walls of a plasma display according to the present invention.
The die coater 1 has a base 2 on which a pair of guide groove rails 4 is provided. A mounting table 6 as a holder for the substrate A is disposed on these guide groove rails 4, and the upper surface of the mounting table 6 holds the substrate A by vacuum suction.
(Applied member) is configured as a suction surface 90 having a suction hole that can be fixed. The mounting table 6 reciprocates freely in the horizontal direction on the guide groove rail 4 via the pair of slide legs 8. Further, sensors 92A and 92B for detecting the lower end surface positions of the dies 40A and 40B are attached to the head of the mounting table 6. Note that the guide groove rail 4 is a side cover 4
a, covered by the top cover 10.

A casing 12 containing feed screw mechanisms 14, 16, 18 shown in FIG. 2 is disposed between the pair of guide groove rails 4, and the casing 12 extends in the horizontal direction along the guide groove rail 4. ing. Feed screw mechanism 1
As shown in FIG. 2, the feed screws 4, 16, and 18 have a feed screw 14 formed of a ball screw, and the feed screw 14 is screwed into a nut-shaped connector 16 fixed to the lower surface of the mounting table 6. This connector 16
Extends through it. Both ends of the feed screw 14 are rotatably supported by bearings (not shown), and an AC servo motor 18 is connected to one end thereof.

As shown in FIG. 1, two die posts 24A and 24B are disposed substantially at the center of the upper surface of the base 2, and these die posts 24A and 24B are both inverted L.
It is shaped like a letter. The tip ends of the die posts 24A and 24B are positioned above the reciprocating path of the mounting table 6, and have lifting mechanisms 26A and 26B, respectively. The elevating mechanisms 26A and 26B include elevating brackets (not shown) that can be moved up and down. The elevating brackets are guided by a pair of guide rods in the casings 28A and 28B so as to be able to move up and down. In the casings 28A and 28B, a feed screw (not shown) formed of a ball screw is also rotatably disposed between the guide rods. The feed screw is connected to the feed screw via a nut-type connector. The lifting bracket is connected.
With this configuration, the lifting bracket can move up and down freely. Further, AC servo motors 30A and 30B are connected to the upper end of the feed screw.
A, 28B.

Die holders 32A and 32B are attached to the respective lifting brackets via support shafts (not shown). The die holders 32A and 32B have a U-shape and extend above a pair of guide groove rails 4. It extends horizontally between the rails. Die holder 32A, 32
The support shaft of B is rotatably supported in the lifting bracket, so that the die holders 32A and 32B can rotate together with the support shaft in a vertical plane.

A horizontal bar 36A is attached to the lifting bracket.
The horizontal bars 36A, 36B are also fixed.
Is located above the die holders 32A and 32B, and extends along the die holders 32A and 32B. Horizontal bar 36
A, 36B, electromagnetically actuated linear actuators 38 having telescopic rods protruding from the lower surface at both ends.
A and 38B are respectively attached. These telescopic rods are arranged such that the lower ends abut against both ends of the die holders 32A and 32B, respectively.

The die holders 32A and 32B hold dies 40A and 40B as applicators. As is clear from FIG. 1, the slit dies 40A and 40B
In the direction orthogonal to the reciprocating direction of the
A and 32B extend horizontally in the longitudinal direction, and both ends thereof are supported by die holders 32A and 32B. With the above structure, the dies 40A and 40B can be independently raised and lowered.

On the upper surface of the base 2, a die support 24A,
The sensor support 20 is disposed closer to the front than 24B. This sensor support 20 also has an inverted L-shape.
A thickness sensor 22 is attached to the tip of the sensor support 20 via a bracket 21 so as to be above the reciprocating path of the mounting table 6.

As shown schematically in FIG. 2, the dies 40A and 40B have long block-shaped rear lips 60A and 60B and front lips 66A and 66, respectively.
B are integrally connected to each other by a plurality of connecting bolts (not shown) in the reciprocating direction of the mounting table 6. Rear lip 60A, 60B, front lip 66A, 66
The lowermost surface of B is a discharge port surface 74 holding the coating films C1 and C2.
A, 74B, and the clearance, which is the gap between the discharge port surfaces 74A, 74B and the substrate A, is set to an optimal value from the viewpoint of applicability.

Inside the dies 40A and 40B, the rear lips 60A and 60B and the front lips 66A and 66B
In between, slits 64A and 64B serving as flow paths of the coating liquid forming the coating films C1 and C2 are formed. The slits 64A and 64B serve as discharge ports 72A and 72B, which are outlets of the coating liquid, on the lower surfaces of the dies 40A and 40B. The gap between the slits 64A, 64B is the rear lip 60A, 60B.
B, which is secured by a shim (not shown) sandwiched between the front lip 66A and the parallel portion of the front lip 66B, and can be set to an arbitrary size. Dies 40A, 40B of discharge amount
The distribution in the longitudinal direction (the direction perpendicular to the plane of FIG. 2) is determined by the distribution of the lip gap in the longitudinal direction of the die 40. That is, when the lip gap is wide, the discharge amount increases, and when the lip gap is narrow, the discharge amount decreases. Further, a slit 64A,
On the upstream side of the 64B, dies 40A, 40
Manifolds 62A and 62B extending horizontally in the longitudinal direction of B (substrate width direction) are formed. Further, the manifolds 62A and 62B are connected to the discharge pipes 42A and 42B via the internal passages of the dies 40A and 40B.

The discharge pipe 4 is located upstream of the dies 40A and 40B.
2A and 42B, discharge valves 84A and 84B, syringe pumps 44A and 44B, suction pipes 82A and 82B, suction valves 86A and 86B, tanks 50A and 50B, and coating liquids 76A and 76B in the tanks 50A and 50B.
0A and 40B.

The syringe pumps 44A and 44B include syringes 80A and 80B, pistons 52A and 52B, and a branch pipe 46.
A, 46B. Suction valve 86A, 8
When the pistons 52A and 52B are lowered by a driving device (not shown) with the 6B opened and the discharge valves 84A and 84B closed, the coating liquid fills the syringes 80A and 80B via the branch pipes 46A and 46B. Then suction valve 8
When the pistons 52A and 52B are raised after closing the discharge valves 84A and 84B while closing the 6A and 86B,
The coating liquid filled in the syringes 80A and 80B is sent to the dies 40A and 40B through the branch pipes 46A and 46B.

The switching conditions of the suction valves 86A and 86B and the discharge valves 84A and 84B, the operation timings of the syringe pumps 44A and 44B, the application liquid discharge amount, the discharge speed, and other operating conditions are as follows. The computer 54 controls each device independently. Further, in order to control the operation of the syringe pumps 44A and 44B in conjunction with the mounting table 6, the computer 54
In addition to the thickness sensor 22, a sequencer 56 is also electrically connected. The sequencer 56 includes an AC servomotor 18 of the feed screw 14 on the mounting table 6 and AC servomotors 30A, 3A and 3B of the lifting mechanisms 26A and 26B.
0B and the operation of the linear actuators 38A and 38B are sequence-controlled. For the sequence control, the sequencer 56 is provided with AC servomotors 18 and 30.
A, a signal indicating an operation state of 30B, a signal from a position sensor 58 for detecting a moving position of the mounting table 6, a die 40A,
A signal or the like from a sensor (not shown) for detecting the operating state of 0B is input. On the other hand, a signal indicating a sequence operation is output from the sequencer 56 to the computer 54.

With the above configuration, the dies 40A, 40B
Discharge of the coating liquid from the dies and the raising and lowering operations of the dies 40A and 40B can be arbitrarily performed. The position sensor 58
Alternatively, an encoder may be incorporated in the AC servomotor 18 and the sequencer 56 may detect the movement position of the mounting table 6 based on a pulse signal output from the encoder. Further, the control by the computer 54 can be incorporated in the sequencer 56 itself.

Next, a method of applying to the two application regions R1 and R2 of the substrate A shown in FIG. 3 using this coating apparatus will be described.

First, when the return of the origin of each operating section in the coating apparatus is performed, the mounting table 6 and the dies 40A and 40B move to the standby positions. By this time, tank 50
A, supply the coating liquid to 50B, tank 50A, 50B ~
The discharge (removal of air) of the residual air in the application liquid supply line up to the dies 40A and 40B has already been completed, and the application liquid supply line is full of the application liquid.

Next, the sensor 92 at the tip of the mounting table 6
A, 92B to the discharge port surface 7 on the upstream side of the dies 40A, 40B.
The dies 40A and 40B are moved down just below 4A and 74B, and slowly lowered to stop at predetermined positions. Thereafter, the height distribution of the discharge port surfaces 74A, 74B of the dies 40A, 40B in the substrate width direction with respect to the suction surface 90 of the mounting table 6 is measured, and the discharge port surfaces 74A, 74B are set to the suction surface of the mounting table 6. 90 so that each linear actuator 38
Adjust the amount of expansion and contraction of A and 38B. At this time, the discharge port surfaces 74A, 74B with the suction surface 90 of the mounting table 6 as a reference point and the vertical coordinate axes (Z-axis) values of the lifting mechanisms 26A, 26B are associated with each other, so-called respective discharge port surfaces 74A, 74B. Origin search is also executed and completed at the same time. By controlling the elevation position of the dies 40A, 40B based on the vertical coordinate axis values, the discharge port surfaces 74A, 74B can be moved from the suction surface 90 to any height position. When these operations are completed, the mounting table 6 and the dies 40A and 40B are returned to their original positions.

After the preparation operation is completed, lift pins (not shown) are raised on the surface of the mounting table 6, and a substrate A is mounted on the upper part of the mounting table 6 by a loader (not shown). A is placed and sucked.

Next, the mounting table 6 is moved at a predetermined speed, and stopped when the central portion of the substrate A comes directly below the thickness sensor 22. In this stop state, the thickness sensor 22 measures the substrate thickness of the substrate A, and calculates the values to be lowered by the dies 40A, 40B from Z1 and Z2 based on the thickness and the clearance given as a condition in advance. Then, the dies 40A and 40B are lowered to that position.

On the other hand, the syringe pumps 44A and 44B draw a predetermined amount of the coating liquid from the tanks 50A and 50B during this time, and are in a standby state.

Next, as shown in FIG. 3, the application table R1 is applied by the die 40A, and the application area R2 is applied by the die 40B.
Here, the correspondence between the coating area and the die is determined as described above, even in a coating execution position in which the die is separated from the substrate A by the clearance in advance, the part coated by another part before the start of coating passes. This is because the thickly applied portion does not adhere to the die and the applied surface is not damaged. As a result, the dies 40A and 40B can be lowered to the predetermined application positions in advance, so that the dies 40A and 40B correspond to the predetermined application regions R1 and R2.
Unnecessary elevating operation for approaching or retreating B can be omitted, and the start of application can be performed reliably and quickly at a predetermined timing. Next, the application start points S1 and S2 of the respective application areas are determined by the discharge port 72A of the die 40A and the die 4
When it comes right below the discharge port 72B of 0B, the syringe pump 4
4A and 44B are independently activated, and the coating solution 76
A and 76B are sent to dies 40A and 40B, and coating is started.

The coating end points E1 and E2 of the coating regions R1 and R2 on the substrate A correspond to the discharge port 72A and the die 4 of the die 40A, respectively.
When the computer 54 comes to a position directly below the discharge port 72B, a signal is output from the computer 54 and the syringe pumps 44A, 44A
The stopping of B and the raising of the dies 40A and 40B are performed independently, and the coating liquids 76A and 76B are completely removed from the substrate A, thereby completing the coating.

On the other hand, the mounting table 6 continues to move further,
Is stopped at the end position where the substrate is transferred by the unloader, the suction of the substrate A is released, and the lift pins are lifted to lift the substrate A.

At this time, the lower surface of the substrate A is held by an unloader (not shown), and the substrate A is transported to the next step. When the delivery to the unloader is completed, the mounting table 6 lowers the lift pins and returns to the home position.

During this time, the syringe pumps 44A, 44B
Performs a suction operation to fill tanks 50A and 50B with new coating liquids 76A and 76B. Then the next substrate A
Waits for, and repeats the same operation.

In the above description, the dies 40A and 40B have one discharge port, but the dies 40A and 40B may have a plurality of discharge ports divided in the longitudinal direction. In this case, the application can be further divided into a large number of application areas.

Next, another embodiment will be described in detail. FIG. 4 is a schematic perspective view showing a die coater 101 in which another embodiment of the present invention is applied to the die coater 1 of FIG. 1, FIG. 5 is a front view of the die attaching / detaching apparatus as viewed from a substrate traveling direction, and FIG. 6 is a side view thereof.

Referring to FIG. 4 in detail, the die coater 101
Is surrounded by a clean booth 100. The die coater 101 has exactly the same configuration as the die coater 1 of FIG. On the other hand, the clean booth 100 is a frame 10 made of square steel or the like.
8, a top plate 102, front covers 105A and 105B using a transparent material such as vinyl chloride, and a side cover 103.
The inside of the booth can be maintained at a predetermined degree of cleanliness.
Die coater 101 surrounded by this clean booth 100
Die attachment / detachment devices 120A and 120B (120A shown in FIG. 6) supported by the cross beams 104A and 104B of the clean booth 100 are respectively mounted just above the two dies 40A and 40B. Die attaching / detaching device 120A, 12
OB has exactly the same structure.

Referring to FIGS. 5 and 6, the die attaching / detaching device 120A moves along the horizontal beam 104A by the upper and lower guide rollers 136A and the horizontal guide rollers 130A attached to the U-shaped frame 122A. Can be. Here, the upper and lower guide rollers 136A are
8A, the horizontal guide roller 130
A is attached to a support receiver 134A via a shaft 132A. In addition, a vertical guide roller 136A and a horizontal guide roller 13 are driven by a driving device such as a servo motor (not shown).
By driving 0A, it can be automatically moved to an arbitrary position. Further, two lifting cylinders 126A are attached to the lower surface of the U-shaped frame 122A. Since these two elevating cylinders 126A are integrated by a bar 127A, they can be raised and lowered at the same timing. Further, by engaging the wire 128A attached to the bar 127A via the hook with the hook 130A attached to the die 40A, the die 40A can be freely raised and lowered by the expansion and contraction operation of the lifting cylinder 126A. Become.

The attachment / detachment of the die by the die attaching / detaching device 120A is performed as follows. First, the die 40A is connected to the die coater 10
In the case of attaching to the die 1, the die 40A is placed within the movable range of the die attaching / detaching device 120A by a cart or the like. Subsequently, after attaching the wire 128A to the hook 130A of the die 40A, the wire 130A is lifted upward by the lifting cylinder 126A. Then, with the die 40A lifted, the die attaching / detaching device is moved to the cross beam 104A.
Along with the die 40A until the die 40A comes to a position directly above the mounting position on the die coater 101. When the die 40A reaches a predetermined place, the movement of the die attaching / detaching device 120A is stopped,
The elevating cylinder 126A is activated to lower the die 40A to the place where the die coater 101 is mounted. Next, the die 40A is firmly fixed to the die coater 101 with bolts or the like, the wire 128A is detached from the hook 130A, and the die attaching / detaching device 120A is moved to a place where the application is not hindered. To remove the die 40A from the die coater 101, the above procedure may be reversed. With this die attaching / detaching device, attaching / detaching can be easily performed even if the die 40A becomes large. The attachment / detachment device of the die 40B by the die attachment / detachment device 120B is exactly the same as that by the die attachment / detachment device 120A.

In the present embodiment, the number of attaching / detaching devices is equal to the number of dies. However, only one die attaching / detaching device which can be moved in the substrate running direction is provided so that a plurality of dies can be attached / detached. Good.

Although the apparatus for cleaning (cleaning) the discharge port surface of the die is not shown in the above description of the present invention,
A means for cleaning the discharge port surface by cleaning such as wiping or cleaning with a cleaning liquid may be added to the die coater. Thus, the coating can be started with the discharge port surface of the die always being cleaned, so that the thickness profile of the coating start portion can be easily controlled to a desired one.

The coating liquid to which the present invention can be applied has a viscosity of 1 cps to 100,000 cps, preferably 10 cps.
It is from ps to 50,000 cps, and Newtonian is preferable from the viewpoint of applicability, but it can also be applied to a coating liquid having thixotropic properties. As the substrate A, besides glass, a metal plate such as aluminum,
A ceramic plate, a silicon wafer, or the like may be used. Further, as a coating condition to be used, a clearance (for required one) is 40 to 500 μm, more preferably 8 to 500 μm.
0 to 300 μm, coating speed 0.1 m / min to 10 m /
Min, more preferably 0.5 m / min to 6 m / min, the die lip gap is 50 to 1000 μm, more preferably 100 m / min.
６００600 μm, the coating thickness is 5 to 400 μm, more preferably 20 to 250 μm.

[0052]

EXAMPLE A 5 μm thick photosensitive silver paste was applied to the entire surface of a soda glass substrate of 440 mm width × 750 mm length × 2.8 mm thickness.
340 mm long x 4 after screen printing to a thickness of m
Exposure is performed using a photomask so as to be separated into two regions each having a width of 40 mm. After each step of development and baking, a stripe-shaped one having a pitch of 220 μm and a length of 330 mm is formed.
920 silver electrodes were formed at two locations. After screen-printing a glass paste composed of glass and a binder on the electrode, firing was performed to form a dielectric layer at two places in the above-described region. Next, the die coater shown in FIG.
Two dies having a lip gap (thickness of shim) of 500 μm were mounted, and a coating liquid supply line from the tank to the die was filled with a photosensitive glass paste having a viscosity of 20,000 cps composed of glass powder and a photosensitive organic component. After lowering each die so that the clearance between the die and the dielectric layer becomes 350 μm, a coating thickness of 300 μm and a coating speed of 1
The photosensitive glass paste was applied at m / min. In the application, a portion corresponding to the region R1 in FIG. 3 is applied with a die corresponding to the die 40A, and a portion corresponding to the region R2 is applied with a die corresponding to the die 40B, and two places of 340 mm length × 440 m are used.
A coating film of a photosensitive glass paste was separately formed in a region having a width of m. The substrate was taken out by a transfer machine, placed in a drying furnace using a radiation heater, and dried at 100 ° C. for 20 minutes.
When the coating thickness distribution after drying was measured over the entire surface of the substrate, it was within the range of 190 μm ± 5 μm. Next, exposure was performed using a photomask designed to form a partition between adjacent electrodes, and development and baking were performed to form a partition. The shape of the partition wall is 220 μm in pitch and 30 μm in line width.
m, the height is 130 μm, and the number of partition walls in each region is 19
There were 21. Thereafter, R, G, and B phosphor pastes were sequentially applied by screen printing, dried at 80 ° C. for 15 minutes, and finally baked at 460 ° C. for 15 minutes to produce a back plate of the plasma display. The surface quality of the obtained plasma display back plate was satisfactory. Next, the rear plate and the front plate of the plasma display were combined and sealed, and a mixed gas of Xe 5% and Ne 95% was sealed therein, and a driving circuit was connected to obtain a plasma display.

[0053]

Since the present invention has the above-described configuration, the following excellent effects can be obtained. (1) The discharge from the coating liquid and the elevation of the coating device are controlled so that the coating liquid discharged from the coating device does not overlap on the member to be coated, or the coating area on the member to be coated in the order of the arrangement of the coating device. It is possible to easily form a coating film on a plurality of regions on a member to be coated while maintaining a predetermined film thickness profile at the start and end portions of the coating. .

(2) Since the attaching / detaching means of the applicator is provided in the main body of the applicator, the attaching / detaching of the applicator capable of applying to a large glass substrate to be subjected to multi-face mounting can be quickly and easily performed. Was.

Since the plasma display and the display member are manufactured by the manufacturing apparatus and the manufacturing method of the plasma display and the display member using the coating apparatus and the coating method having the above excellent effects, a high quality plasma display is manufactured. Further, the display member can be obtained with high productivity.

[Brief description of the drawings]

FIG. 1 is a perspective view schematically showing a die coater according to an embodiment of the present invention.

FIG. 2 is a schematic configuration diagram showing the die coater of FIG. 1 including a coating liquid supply system.

FIG. 3 is a schematic side view showing a state of application to a substrate A by the die coater of FIG.

FIG. 4 is a perspective view schematically showing a die coater according to another embodiment of the present invention.

FIG. 5 is a schematic front view of the die attaching / detaching apparatus according to the present invention as viewed from a substrate traveling direction.

FIG. 6 is a schematic side view of FIG.

[Explanation of symbols]

 Reference Signs List 1 die coater 2 base 6 mounting table 14 feed screw 18 AC servomotor 22 thickness sensor 26 elevating mechanism 40A, 40B die (applicator) 44A, 44B syringe pump 50A, 50B tank 52A, 52B piston 54 computer 60A, 60B rear lip 62A , 62B Manifold 64A, 64B Slit 66A, 66B Front lip 72A, 72B Discharge port 74A, 74B Discharge port surface 76A, 76B Coating liquid 80A, 80B Syringe 90 Suction surface 100 Clean booth 101 Die coater 120A, 120B Die attaching / detaching device A Coating member) C Coating film

[Procedure amendment]

[Submission date] June 6, 2000 (2000.6.6)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0044

[Correction method] Change

[Correction contents]

[0044] In the above, the die 40A, although 40B are discharge ports described in what one coating area on the substrate A is die
40 longitudinal direction (direction perpendicular to the traveling direction of the substrate A,
In the case where there are a plurality of dies in the width direction of the substrate A) ,
The discharge port of the 40B may be divided into a plurality in the longitudinal direction. In this case, the direction of travel of substrate A
Then, the application can be further divided into a large number of application areas. In this case, the width of the substrate A in one application area
A die having one discharge port with a length corresponding to the
The number of application areas in the width direction is aligned in the width direction of the substrate A.
Is also good. At this time, multiple dies are mounted on one die holder.
It may be mounted side by side in the width direction of plate A,
To the same number of independently ascending and descending die holders
And the direction perpendicular to the running direction of the substrate A according to the application area.
It may be arranged shifted. As described above, multiple dies
To be applied to a plurality of application areas in the width direction of the substrate A.
In this case, a die with a shorter length than when performing with one die
Can be used. Shorter dies are usually more mechanical
The high accuracy increases the application accuracy and further improves die operation.
Handling such as carrying and detaching is also easy.

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01J 9/02 H01J 9/02 F 11/02 11/02 B (72) Inventor Isamu Sakuma Otsu, Shiga 1-1-1 Sonoyama F-term (reference) in Shiga Plant of Toray Industries, Inc. 5G435 AA01 AA17 BB06 CC09 HH12 HH14 KK05

Claims (15)

[Claims] A coating liquid supply unit for supplying a coating liquid; a coating device having a discharge port for discharging a coating liquid supplied from the coating liquid supply unit to a member to be coated; A moving device for relatively moving at least one of them to form a coating film on the member to be coated, wherein the coating device includes a plurality of coating devices, and each of the coating devices is moved up and down. Independently moving applicator elevating means, and discharging the coating liquid so that each coating liquid discharged from the plurality of coating apparatuses forms a coating film on the member to be coated without overlapping in the running direction of the member to be coated. An applicator, comprising: an applicator discharge elevating control means for controlling the lifting and lowering of the applicator. 2. The coating device according to claim 1, wherein each coating device has a plurality of discharge ports. 3. The coating apparatus according to claim 1, wherein the member to be coated is a single-sheet member. 4. The coating apparatus according to claim 1, further comprising an applicator attaching / detaching means for attaching / detaching the applicator to a position for performing coating and a position for not performing coating.
4. The coating device according to any one of 3. 5. The coating apparatus according to claim 1, further comprising cleaning means for cleaning a discharge port surface of said coating device. 6. A plasma display manufacturing apparatus for manufacturing a plasma display using the coating apparatus according to claim 1. 7. An apparatus for manufacturing a member for a display, wherein the apparatus for manufacturing a display is manufactured by using the coating apparatus according to any one of claims 1 to 5. 8. A coating liquid is applied to the member to be coated by relatively moving at least one of the coating device and the member to be coated while discharging the coating liquid to the member to be coated from a discharge port extending in one direction of the coating device. In the coating method for forming, there is a plurality of the applicator, each of the application liquid discharged from the plurality of applicators so that each of the coating liquids do not overlap in the traveling direction of the member to be coated, discharge of the coating liquid from the applicator and each A coating film is formed on a member to be coated by controlling lifting and lowering of the coating device. 9. The coating method according to claim 8, wherein the coating device has a plurality of discharge ports. 10. N applicators D1, D2,..., D
N, and N application regions R1, R2,.
, RN are arranged in this order in the coating direction, and the coating region D is applied by the coating device D1.
The coating method according to claim 8 or 9, wherein a coating liquid is formed by coating the coating liquid on the RN with R2, ..., DN with D2. 11. The coating method according to claim 8, wherein the member to be coated is a single sheet member. 12. The coating device according to claim 8, wherein said coating device is attached to and detached from a position where coating is performed and a position where coating is not performed by an application device attaching / detaching means provided in the coating device. The coating method described in Crab. 13. The coating method according to claim 8, wherein the discharge port surface of the coating device is cleaned before coating. 14. A method for manufacturing a plasma display, comprising manufacturing a plasma display using the coating method according to claim 8. Description: 15. A method for manufacturing a member for a display, comprising manufacturing the member for a display using the coating method according to any one of claims 8 to 13.