JP3728109B2 - APPARATUS AND METHOD FOR APPLYING COATING LIQUID ON NOZZLE, CONCRETE SUBSTRATE AND PRODUCTION APPARATUS AND METHOD FOR PLASMA DISPLAY - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a plasma display panel in which a specific uneven pattern is formed on a substrate, particularly a plasma display panel in which partition walls having a fixed shape are arranged at an equal pitch, and a panel inner surface of a striped black matrix type color picture tube. The present invention relates to a nozzle, a coating apparatus and a coating method for applying a coating liquid to a concavo-convex substrate, and an improvement in a plasma display manufacturing apparatus and manufacturing method using these apparatuses and methods.
[0002]
[Prior art]
In recent years, displays have become increasingly diversified in their methods. One thing that is currently attracting attention is a plasma display that is larger, thinner and lighter than conventional cathode-ray tubes. This is because striped uneven portions are formed on a glass substrate by partition walls extending in one direction at a constant pitch, and the concave portions of the uneven portions are filled with phosphors of red (R), green (G), and blue (B). Then, an arbitrary portion is caused to emit light by ultraviolet rays and a predetermined color pattern is displayed.
[0003]
The structure in which the phosphors are formed in a stripe shape also includes a striped black matrix type color picture tube panel.
[0004]
In order to manufacture such a structure with high productivity and high quality, it is important to have a technique of coating phosphors in a certain pattern.
[0005]
Usually, after the barrier rib pattern is formed, as shown in Japanese Patent Laid-Open No. 5-144375, a single color phosphor is screen-printed on the entire surface, and only a necessary portion is left by a photolithography method to obtain a highly accurate pattern. I am trying to do it. However, in this method, in order to form each phosphor pattern of R, G, and B, it is necessary to repeat the steps of applying each color, exposing, developing, and drying three times, which is costly and increases productivity. It has the disadvantage of being significantly inferior.
[0006]
As another method of simply forming a stripe-shaped coloring pattern on a glass substrate, there are methods described in JP-A-5-11105 and JP-A-5-142407 using a nozzle, but the surface is flat. This technique cannot be used as it is for a substrate having irregularities formed on the surface thereof, because a three-color coating is simultaneously applied to a target substrate with a nozzle having a flat tip.
[0007]
In Japanese Patent Laid-Open Nos. 52-134368, 54-13250, 54-13251, etc., the inner surface of a striped black matrix type color picture tube has a convex shape. It has been shown that an improved nozzle device having a control device for preventing meandering is used as a method for applying a predetermined phosphor to the recesses between the black matrices. However, since one nozzle is used, there is a problem that it cannot be applied to a method of applying simultaneously to a plurality of uneven portions on the surface, and it takes time for the application.
[0008]
[Problems to be solved by the invention]
An object of the present invention is to apply a predetermined coating liquid from a nozzle having a plurality of discharge holes to a plurality of recesses of a substrate on which a certain uneven pattern is formed like a partition of a plasma display. The coating liquid is uniformly ejected from the nozzles, and the amount applied to each recess is made uniform. By always realizing this uniform application, nozzles that enable high productivity and high quality, and unevenness An object of the present invention is to provide a coating apparatus and a coating method for a coating liquid on a substrate, and a plasma display manufacturing apparatus and manufacturing method.
[0009]
[Means for Solving the Problems]
In order to solve the above-described problems, the coating apparatus for applying a coating liquid to a concavo-convex base material of the present invention includes a table for fixing a base material having a concavo-convex portion formed on the surface at a constant pitch, and the concavo-convex portion of the base material. a nozzle having a plurality of discharge holes and a supply means for supplying the coating liquid to the nozzle, the coating apparatus of the coating solution to uneven substrates and a moving means for relatively moving the table and the nozzle three-dimensionally ,
(1) The nozzle includes a member having the discharge hole and a member having a manifold portion.
(2) A region where at least the discharge hole of the member having the discharge hole is a plate-like body having a parallelism of 0.1 mm or less,
(3) The diameter of the discharge hole is 50 to 500 μm, and the variation in the diameter of each hole is ± 5% or less,
(4) If the diameter of the discharge hole is d, the radius of the outlet edge of the cross-sectional shape including the opening axis of the discharge hole is equal to or less than d / 2, and the variation in the radius of the entire periphery of the outlet hole is ± d / 20 or less,
(5) The member having the discharge hole and the member having the manifold portion are joined by an adhesive or bolt fastening.
It is characterized by this .
[0010]
In the above apparatus, the nozzle is a member having a manifold portion, Ru configuration der which the member is joined with the discharge hole.
[0011]
In the above apparatus, at least a region of the nozzle where the discharge hole is open is a plate-like body having a parallelism of 0.1 mm or less.
[0012]
In the above apparatus, if the diameter of the discharge hole is d, the radius of the outlet edge of the cross-sectional shape including the opening axis of the discharge hole is not more than d / 2, and the radius of the outlet edge around the entire circumference Variation is ± d / 20 or less .
[0013]
Moreover, in the said apparatus, it is preferable that the maximum height Rmax of the surface roughness of the inner wall of the discharge hole of the said nozzle is 1 micrometer or less.
[0014]
Further, the diameter of the discharge hole of the nozzle of the apparatus is 50 to 500 [mu] m, the variation of the diameter of each hole is less than 5% ±.
[0015]
Furthermore, the nozzle of the coating liquid of the coating apparatus to uneven substrate according to the present invention, diameter has a discharge hole length by a d is L, said discharge Deana diameter and length of the reference value Are d0 and L0, respectively, the diameter d and length L of each discharge hole are
0.7 (d0 ⁴ / L0) ≦ d ⁴ /L≦1.3 (d0 ⁴ / L0) (1)
It is characterized by satisfying .
More preferably, the diameter d and the length L of each discharge hole are
^{0.95 (d0 4 / L0) ≦} d 4 /L≦1.05(d0 4 / L0) (2)
It is desirable to satisfy.
[0016]
Further, in the coating apparatus for coating liquid on the uneven substrate according to the present invention as described above, the diameter and length of the discharge holes adjacent to the nozzle, or the diameter and length of the discharge holes located at both ends are set. If d1, L1, d2, and L2, respectively, d1, d2, L1, and L2 are 0.9 ≦ (d1 / d2) ⁴ (L2 / L1) ≦ 1.1 (3)
It is preferable to satisfy.
[0017]
In the above apparatus, the length of the discharge hole wall surface in the opening axis direction is constant over the entire circumference of the discharge hole, and the pipe frictional resistance that the coating liquid receives from the discharge hole wall surface acts equally on the coating liquid. As a result, the velocity distribution of the coating liquid is axisymmetric, and the discharged coating liquid does not bend, stick, or rotate.
[0018]
In the above apparatus, a manifold member whose manifold portion is processed in advance and a discharge hole member whose discharge hole is processed are joined. After processing the discharge holes, the surface roughness of both surfaces of the discharge hole member can be evenly finished, so that uniform and stable discharge of the coating liquid becomes possible.
[0019]
In the above apparatus, at least the region where the discharge holes are opened is a plate-like body having a parallelism of 0.1 mm or less. By doing so, the length of each discharge hole becomes equal, and the pressure loss when the coating liquid passes through each discharge hole can be matched. Thereby, the variation of each discharge amount becomes small, and the highly accurate and stable application | coating is attained.
[0020]
In the above apparatus, the coating liquid can be discharged more stably by regulating the shape and variation of the outlet edge of the discharge hole.
[0021]
Further, in the above apparatus, if the maximum height Rmax of the surface roughness of the inner wall of the discharge hole of the nozzle is 1 μm or less, the surface of the inner wall of the discharge hole has sufficient smoothness. The particles do not aggregate to form a lump, and the coating liquid flows smoothly through the discharge holes.
[0022]
In the above apparatus, the variation in the diameter of the nozzle discharge hole is ± 5% or less. By regulating the variation in diameter, it is possible to apply a uniform amount of discharge with high accuracy. When the variation in the diameter of the holes exceeds ± 5%, the variation in the discharge amount becomes large, and a highly precise coating operation becomes difficult.
[0023]
At this time, the pore diameter is selected from the range of 50 to 500 μm. If the pore diameter is less than 50 μm, the coating solution may be clogged in a short time, and the coating operation cannot be performed stably for a long time. If it exceeds 500 μm, the liquid may drip at normal pressure, and the intermittent application work may not be maintained.
[0024]
In the above apparatus, variation in pressure loss in the nozzle discharge hole is suppressed to ± 30% or less. That is, if the reference values of the diameter and length of the nozzle discharge hole are d0 and L0, respectively, the diameter d and length L of each discharge hole are
0.7 (d0 ⁴ / L0) ≦ d ⁴ /L≦1.3 (d0 ⁴ / L0) (1)
It is adjusted to satisfy. Such regulation of variations in pressure loss makes it possible to apply a uniform discharge amount with high accuracy.
[0025]
More preferably, the diameter d and the length L of each discharge hole are
^{0.95 (d0 4 / L0) ≦} d 4 /L≦1.05(d0 4 / L0) (2)
As a result, the variation in pressure loss in the nozzle discharge holes is suppressed to ± 5% or less, and a more uniform application with high accuracy of the discharge amount becomes possible.
[0026]
Specifically, such adjustment is performed as follows. Since the nozzle is composed of a plate-like body with discharge holes or a plurality of pipes, when the diameter of the discharge hole is measured and there is something outside the allowable range,
1) In a case where a discharge hole is provided in a plate-like body, only a portion where the hole is present is shaved to reduce the thickness of the discharge hole having a small diameter. The thickness to be reduced at this time can be obtained by combining the pressure loss when the coating liquid passes through the ejection holes. That is, if the reference hole diameter is d0 and the plate thickness is L0, the thickness L of the portion where the hole diameter is d (> d0) is L = L0 × (d / d0) ^4.
Is required. Since it is not possible to increase the thickness of a plate once perforated, it is important to reduce the thickness of the portion of a plate having a small hole diameter. In this way, the variation in pressure loss of the discharge holes can be suppressed to ± 30% or less, preferably ± 5% or less, and coating can be performed with a uniform discharge amount.
2) Even when the discharge hole is formed by a pipe, the length L of the pipe is determined by the above formula, and the nozzle is made with the one selected in this way, or the length of the pipe is cut after it is made. To.
[0027]
In actual adjustment, the thickness / length L needs to have a tolerance of variation in which the variation in pressure loss is ± 30% or less (preferably ± 5%), and the above equation (1) and ( 2) Formula,
0.7 (d0 ⁴ / L0) ≦ d ⁴ /L≦1.3 (d0 ⁴ / L0) (1)
^{0.95 (d0 4 / L0) ≦} d 4 /L≦1.05(d0 4 / L0) (2)
To satisfy. Here, for the reference values d0 and L0, an average value of diameters and lengths of a plurality of holes may be employed.
[0028]
Moreover, in the coating device for applying the coating liquid to the concavo-convex substrate according to the present invention, the diameter and length of the discharge holes adjacent to the nozzles, or the diameter and length of the discharge holes located at both ends are the above-mentioned formula (3) ,
0.9 ≦ (d1 / d2) ⁴ (L2 / L1) ≦ 1.1 (3)
If the condition is satisfied, the ratio of the pressure loss of the adjacent discharge holes or the ratio of the pressure loss of the discharge holes located at both ends can be suppressed to ± 10% or less. This regulation of pressure loss makes it possible to apply uniformly without unevenness (application unevenness, brightness unevenness).
[0029]
If the ratio of pressure loss between adjacent discharge holes is large, unevenness occurs there. The same problem occurs in application from the discharge holes located at both ends. That is, when the part to be applied still remains, the nozzle is moved in the width direction of the nozzle by the application width (nozzle pitch × number of holes) to the next start position to be applied, and the application operation is performed again. At this time, since the concave portion applied in the last hole of the nozzle in the previous application operation and the concave portion applied in the first hole of the nozzle in the next application operation are adjacent, the ratio of the pressure loss of the discharge holes located at both ends of the nozzle It is preferable to regulate the above.
[0030]
An apparatus for manufacturing a plasma display according to the present invention is a paste in which a coating liquid contains phosphor powder that emits light in any one of red, green, and blue, and the plasma display is manufactured using any one of the above-described coating apparatuses. It consists of the apparatus characterized by doing. By using any of the above-described coating apparatuses, it is possible to perform coating with a uniform discharge amount and a stable plasma display with excellent quality.
[0031]
The method for applying the coating liquid to the concavo-convex substrate according to the present invention includes a substrate having concavo-convex portions formed on the surface at a constant pitch, and a nozzle having a plurality of discharge holes facing the concavo-convex portions of the substrate. Is a coating method in which a coating liquid of a predetermined thickness is applied to the concave portion of the base material by relatively moving the nozzle and supplying the coating liquid to the nozzle to discharge the coating liquid from the discharge hole.
(1) The nozzle includes a member having the discharge hole and a member having a manifold portion.
(2) A region where at least the discharge hole of the member having the discharge hole is a plate-like body having a parallelism of 0.1 mm or less,
(3) The diameter of the discharge hole is 50 to 500 μm, and the variation in the diameter of each hole is ± 5% or less,
(4) If the diameter of the discharge hole is d, the radius of the outlet edge of the cross-sectional shape including the opening axis of the discharge hole is equal to or less than d / 2, and the variation in the radius of the entire periphery of the outlet hole is ± d / 20 or less,
(5) The member having the discharge hole and the member having the manifold portion are joined by an adhesive or bolt fastening.
It consists of the method characterized by applying using a thing .
[0032]
In the above method, the nozzle is a member having a manifold portion, Ru configuration der which the member is joined with the discharge hole.
[0033]
In the above method, at least a region of the nozzle where the discharge hole is open is a plate-like body having a parallelism of 0.1 mm or less.
[0034]
In the above method, if the diameter of the discharge hole is d, the radius of the outlet edge of the cross-sectional shape including the opening axis of the discharge hole is not more than d / 2, and the radius of the outlet edge around the entire circumference Variation is ± d / 20 or less.
[0035]
In the above method, the inner wall surface of the discharge hole of the nozzle is preferably a smooth surface having a maximum surface roughness height Rmax of 1 μm or less.
[0036]
In the above method, the nozzle is applied using a nozzle having a diameter of 50 to 500 μm and a variation in diameter of each hole of ± 5% or less.
[0037]
Furthermore, in the method for applying the coating liquid to the uneven substrate according to the present invention, the nozzle has a discharge hole having a diameter d and a length L, and the reference values of the diameter and length of the hole are respectively set. If d0 and L0, the diameter d and length L of each discharge hole are
0.7 (d0 ⁴ / L0) ≦ d ⁴ /L≦1.3 (d0 ⁴ / L0) (1)
It consists of the method characterized by apply | coating using what satisfy | fills. Such regulation of variations in pressure loss makes it possible to apply a uniform discharge amount with high accuracy.
[0038]
More preferably, the diameter d and the length L of each discharge hole are
^{0.95 (d0 4 / L0) ≦} d 4 /L≦1.05(d0 4 / L0) (2)
The application is performed by using a nozzle that satisfies the above conditions, whereby variation in pressure loss in the discharge holes of the nozzles can be further reduced, and application with a more uniform discharge amount can be performed with high accuracy.
[0039]
Furthermore, in the coating method of the coating liquid on the concavo-convex substrate according to the present invention, the diameter and length of the discharge holes adjacent to the nozzle, or the diameter and length of the discharge holes located at both ends are respectively d1, Assuming L1, d2, and L2, d1, d2, L1, and L2 are 0.9 ≦ (d1 / d2) ⁴ (L2 / L1) ≦ 1.1 (3)
It is preferable to apply using what satisfies the above.
[0040]
Furthermore, the plasma display manufacturing method according to the present invention is a paste in which a coating liquid contains phosphor powder that emits light in any one of red, green, and blue, and plasma is produced using any of the above coating methods. The method comprises manufacturing a display. By using any of the above coating methods, it is possible to perform uniform and stable coating with a discharge amount, and to manufacture an excellent quality plasma display with high stability and high productivity.
[0044]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
In FIG. 4, the nozzle 81 has a manifold portion 82 for storing the coating liquid and a plurality of discharge holes 83 for discharging the coating liquid. The discharge hole 83 opens from the inside to the outside of the manifold portion 82, and the cross-sectional shape including the axis 87 in the opening direction of the discharge hole 83 is symmetric with respect to the opening axis 87 in each discharge hole 83. is there. By doing so, the length of the wall surface of the discharge hole becomes constant over the entire circumference of the discharge hole, and the pipe frictional resistance that the coating liquid receives from the wall surface of the discharge hole works equally on the coating liquid. As a result, the velocity distribution of the coating liquid is axisymmetric, and the discharged coating liquid does not bend, stick, or rotate.
[0045]
FIG. 5 is a schematic longitudinal sectional view of a nozzle according to another embodiment of the present invention. In this aspect, a nozzle is formed by joining a manifold member 84 having a manifold portion 82 processed beforehand and a discharge hole member 85 having a discharge hole 83 processed. After processing the discharge hole 83, the surface roughness of both surfaces of the discharge hole member 85 can be finished uniformly. This makes it possible to discharge the coating liquid uniformly and stably. As a joining method of the discharge hole member 85 and the manifold member 84, there are an adhesive, diffusion bonding, laser welding, fastening with a bolt or the like.
[0046]
6 and 7 are schematic longitudinal sectional views of a nozzle according to still another embodiment of the present invention. In this embodiment, at least a region of the discharge hole member 85 having the discharge holes 83 where the discharge holes 83 are open is the plate-like body 86. The parallelism of the plate-like body 86 is preferably 0.1 mm or less. By doing so, the length of each discharge hole 83 becomes equal, and the pressure loss when the coating liquid passes through each discharge hole 83 can be matched. Thereby, the variation of each discharge amount becomes small, and the highly accurate and stable application | coating is attained.
[0047]
As shown in FIG. 8, when the diameter of the discharge hole 83 is d in order to discharge the coating liquid more stably, the radius of the outlet portion edge of the cross-sectional shape including the opening axis of the discharge hole 83 is d / 2 or less. In addition, it is preferable that the variation in the radius of the entire circumference of the outlet edge is ± d / 20 or less.
[0048]
As the shape of the discharge hole 83, the circular shape in FIG. 9, the oval shape or the elliptical shape in FIG. 10, the square shape in FIG. 11, the twin circle shape in FIG. 12, the polygon shape in FIG. 13, or the taper or taper shape in FIG. There is something.
[0049]
As a processing method of the discharge hole 83, there are methods by precision fine processing such as drilling, drilling + reaming, electric discharge machining, photoetching, electroforming and the like. In particular, it is preferable to keep the surface roughness of the inner wall surface of the discharge hole small, and it is preferable to finish so that the maximum height Rmax of the inner wall surface roughness is 1 μm or less.
[0050]
The discharge hole member 85 and the manifold member 84 may be made of a metal such as stainless steel or nickel, or a non-metal such as ceramic.
[0051]
As described above, the hole diameter of the discharge holes 83 is set in the range of 50 to 500 μm. The hole diameters of these discharge holes 83 are measured, and the holes whose variation exceeds ± 5% with respect to the target value (or average value) are as follows. Adjustment processing is performed. For discharge holes with a hole diameter of less than -5%, it is possible to adjust easily by increasing the hole diameter, but for holes exceeding + 5%, it is difficult to reduce the hole diameter. Therefore, the maximum value of the actually measured value or a relatively large value may be adopted as the reference value of the hole diameter, and adjustment processing by increasing the hole diameter may be possible.
[0052]
Further, in the adjustment to make the pressure loss of each discharge hole 83 within ± 30% (preferably within ± 5% according to the above-mentioned equation (2)) according to the above-mentioned equation (1), for example as shown in FIG. The thickness of the portion where the hole having a variation in pressure loss exceeding ± 30% (preferably ± 5%) exists is adjusted. For example, the maximum value of the hole diameter is taken as a reference value, and for the discharge hole 83 having a hole diameter lower than −30% (preferably −5%) with respect to the hole diameter of the reference value, the portion of the discharge hole 83 is present. The upper or lower surface is shaved (the shaving portion 88), and the thickness L of the portion is reduced to reduce the length L of the discharge hole 83, whereby the variation in pressure loss is within ± 30% (preferably within ± 5%). Can be suppressed.
[0053]
FIG. 16 is a schematic longitudinal sectional view of a nozzle according to still another embodiment of the present invention. A pipe 89 having a fixed hole diameter and length is joined to the discharge hole. As a result, the variation in pressure loss can be suppressed by cutting the tip of the pipe 89 and adjusting the length of the pipe (the length L of the discharge hole).
[0054]
In the present invention, as described above, if the nozzle further has the diameter and length of the adjacent discharge holes, or the diameter and length of the discharge holes located at both ends, respectively, d1, L1, d2, and L2, d1 , D2, L1, and L2 are 0.9 ≦ (d1 / d2) ⁴ (L2 / L1) ≦ 1.1 (3)
It is preferable to satisfy the above-mentioned conditions, whereby uneven application and uneven brightness can be further reduced.
[0055]
Next, FIG. 1 is an overall perspective view of a coating apparatus according to one embodiment of the present invention, FIG. 2 is a schematic view around the table 6 and the nozzle 20 in FIG. 1, and FIG. 3 is a view of the nozzle 20 in FIG. It is an enlarged plan view.
[0056]
First, the overall configuration of the coating liquid coating apparatus will be described. FIG. 1 shows an example of a coating apparatus applied to manufacture of a plasma display panel according to the present invention. This coating apparatus includes a base 2. A pair of guide groove rails 8 is provided on the base 2, and the table 6 is disposed on the guide groove rails 8. On the upper surface of the table 6, a plurality of suction members constituting a suction surface are formed so that the base material 4 having unevenness formed on the surface in a striped pattern in one direction can be fixed to the table surface by vacuum suction. A hole 7 is provided. The substrate 4 is moved up and down on the table 6 by lift pins (not shown). Further, the table 6 can reciprocate in the X-axis direction on the guide groove rail 8 via the slide legs 9.
[0057]
A feed screw 10 constituting the feed screw mechanism shown in FIG. 2 extends between the pair of guide groove rails 8 through a nut-like connector 11 fixed to the lower surface of the table 6. Both ends of the feed screw 10 are rotatably supported by the bearing 12, and an AC servo motor 16 is connected to one end of the feed screw 10.
[0058]
As shown in FIG. 1, above the table 6, a nozzle 20 that is a coating liquid discharge device is connected to an elevating mechanism 30 and a width direction moving mechanism 36 via a holder 22. The elevating mechanism 30 includes an elevating bracket 28 that can be moved up and down, and is attached to a pair of guide rods inside the casing of the elevating mechanism 30 so as to be movable up and down. A feed screw (not shown) made of a ball screw is also rotatably disposed in the casing between the guide rods, and is connected to the lifting bracket 28 via a nut-type connector. Further, an AC servo motor (not shown) is connected to the upper end of the feed screw, and the lifting bracket 28 can be arbitrarily moved up and down by the rotation of the AC servo motor.
[0059]
Further, the elevating mechanism 30 is connected to the width direction moving mechanism 36 via a Y-axis moving bracket 32 (actuator). The width direction moving mechanism 36 moves the Y axis moving bracket 32 so as to reciprocate in the width direction of the nozzle 20, that is, the Y axis direction. Guide rods, feed screws, nut type connectors, AC servo motors and the like necessary for operation are arranged in the casing in the same manner as the lifting mechanism 30. The width direction moving mechanism 36 is fixed on the base 2 by a column 34.
[0060]
With these configurations, the nozzle 20 can be freely moved in the Z-axis and Y-axis directions.
[0061]
The nozzle 20 extends horizontally in the direction perpendicular to the reciprocating direction of the table 6, that is, in the Y-axis direction. A U-shaped holder 22 that directly holds the nozzle 20 is rotatably supported in the lifting bracket 28. It can rotate freely in the vertical direction in the direction of the arrow in the figure.
[0062]
A horizontal bar 24 is also fixed to the lifting bracket 28 above the holder 22. Electromagnetically actuated linear actuators 26 are attached to both ends of the horizontal bar 24. The linear actuator 26 has telescopic rods that protrude from the lower surface of the horizontal bar 24, and the rotational angle of the holder 22 can be regulated by contacting these telescopic rods with both ends of the holder 22, resulting in a nozzle A degree of inclination of 20 can be arbitrarily set.
[0063]
Further, referring to FIG. 1, an inverted L-shaped sensor column 38 is fixed to the upper surface of the base 2, and the position (height) of the top of the convex portion of the base material 4 on the table 6 is measured at the tip thereof. A height sensor 40 is attached. Next to the height sensor 40, a camera 72 that detects the position of the recess between the partition walls of the base material 4 is attached to the column 70. As shown in FIG. 2, the camera 72 is electrically connected to the image processing device 74 and can quantitatively determine the change in the recess position between the partition walls.
[0064]
Further, a sensor 66 for detecting a position in the vertical direction with respect to the table 6 of a lower end surface (opening surface) of the nozzle 20 is attached to one end of the table 6 via a sensor bracket 64.
[0065]
As shown in FIG. 2, the nozzle 20 is filled with a coating liquid 42 in the manifold 41, and the discharge holes 44, which are openings, are aligned linearly in the longitudinal direction on the opening front end surface 45 (FIG. 2). 3). Then, the coating liquid 42 is discharged from the discharge hole 44. A supply hose 46 is connected to the nozzle 40, and further connected to a discharge electromagnetic switching valve 48, a supply unit 50, a suction hose 52, a suction electromagnetic switching valve 54, and a coating liquid tank 56. A coating liquid 42 is stored in the coating liquid tank 56. The coating liquid 42 is made of a paste containing phosphor powder that emits light in any one of red, green, and blue.
[0066]
Specific examples of the supply unit 50 include a constant capacity pump such as a piston and a diaphragm type, a tubing pump, a gear pump, a mono pump, and a pressure feed controller that pushes liquid with a gas pressure. In response to a control signal from the supply device controller 58, the supply unit 50 and each electromagnetic switching valve are operated to suck the coating liquid 42 from the coating liquid tank 56 and supply the coating liquid 42 to the nozzle 20. be able to. In order to stabilize the suction operation of the coating liquid 42 from the coating liquid tank 56 to the constant capacity pump, the coating liquid tank 56 is made a sealed container, and pressure is applied with a gas such as air or nitrogen which is an inert gas. Also good. In order to always apply a constant pressure with air, nitrogen or the like, the coating liquid tank 56 may be connected to a supply device such as air or nitrogen to control the pressure. The magnitude of the pressure is preferably 0.01 to 1 MPa, particularly 0.02 to 0.5 MPa.
[0067]
The supply device controller 58 is further electrically connected to the overall controller 60. All the control information such as information from the image processing device 74 of the camera 72 such as the electric input of the motor controller 62 and the height sensor 40 is electrically connected to the overall controller 60, and the entire sequence control is performed. I can manage. The overall controller 60 may be a computer, a sequencer, or any controller having a control function.
[0068]
Further, the motor controller 62 includes the AC servo motor 16 that drives the table 6, the actuators 76 and 78 (for example, AC servo motors) of the elevating mechanism 30 and the width direction moving mechanism 36, and the moving position of the table 6. A signal from the position sensor 68 to be detected, a signal from each of the Y and Z axis linear sensors (not shown) for detecting the operation position of the nozzle 20 are input. Instead of using the position sensor 68, it is also possible to incorporate an encoder in the AC servomotor 16 and detect the position of the table 6 based on a pulse signal output from the encoder.
[0069]
Next, a coating method using this coating apparatus will be described.
First, when the origin of each operating unit in the coating apparatus is returned, the table 6 and the nozzle 20 move to the X-axis, Y-axis, and Z-axis preparation positions, respectively. At this time, the coating liquid is already filled from the coating liquid tank 56 to the nozzle 20, the discharge electromagnetic switching valve 48 is opened, and the suction electromagnetic switching valve 54 is closed. A lift pin (not shown) rises on the surface of the table 6, and a base material 4 in which partition walls are formed in a stripe pattern with a constant pitch from a loader (not shown) is placed on the lift pin.
[0070]
Next, the lift pins are lowered to place the base material 4 on the upper surface of the table 6, and after the positioning on the table 6 is performed by an alignment device (not shown), the base material 2 is sucked.
[0071]
Next, the table 6 moves until the partition wall (the top of the convex portion) of the base material 4 comes under the camera 72 and the height sensor 40 and stops. The camera 72 is adjusted in advance so as to project the end of the partition wall on the substrate 4 positioned on the table 6, detects the position of the concave portion at the end by image processing, and changes its position from the camera reference point. Find the quantity la. On the other hand, the length lb between the reference point of the camera 72 and the discharge hole 44 positioned at the extreme end of the nozzle 20 fixed to the holder 22 when it is at the predetermined Y-axis coordinate position Ya is measured at the time of prior adjustment. Since the information is input to the entire controller 60 as the information, when the position change amount la of the partition wall recess from the camera reference point is transmitted from the image processing device 74, the discharge hole 44 positioned at the extreme end of the nozzle 20 is transmitted. The Y-axis coordinate value Yc that is directly above the recess at the partition wall end is calculated (for example, Yc = Ya + lb−la), and the nozzle 20 is moved to that position. The camera 72 can have the same function even when attached to the nozzle 20 or the holder 22.
[0072]
During this time, the height sensor 40 detects the vertical position of the top of the partition wall of the base material 4 and calculates the height of the top of the partition wall of the base material 4 from the difference in position from the top surface of the table 6. A value to be lowered on the Z-axis linear sensor of the nozzle 20 is calculated by adding the gap value between the opening of the nozzle 20 and the top of the partition wall of the base material 4 given in advance to the height, Move the nozzle to the position. As a result, even when the partition top position on the table 6 changes for each substrate, the gap between the nozzle 20 opening important for coating and the partition top on the substrate can always be kept constant.
[0073]
Next, the operation of the table 6 is started toward the nozzle 20, and the speed is increased to a predetermined application speed before the application start position of the base material 4 reaches just below the opening of the nozzle 20. The distance between the operation start position of the table 6 and the application start position must be sufficiently secured so that the speed can be increased to the application speed.
[0074]
Further, a position sensor 68 for detecting the position of the table 6 is arranged until the application start position of the base material 4 is just below the opening of the nozzle 20, and when the table 6 reaches this position, the supply unit 50 operation is started and supply of the coating liquid 42 to the nozzle 20 is started. In order for the coating liquid 42 discharged from the nozzle 20 opening to reach the substrate 4, there is a time delay by the gap between the substrate and the nozzle opening. Therefore, by supplying the coating liquid 42 to the nozzle 20 in advance, a predetermined amount of the coating liquid 42 discharged from the nozzle 20 when the application start position of the base material 4 is just below the nozzle 20 opening is the substrate 4. Therefore, the coating can be started with almost no thickness unevenness. The position where supply of the coating liquid 42 is started can be adjusted by changing the installation location of the position sensor 68. If an encoder is connected to the motor or the feed screw instead of the position sensor 68 or a linear sensor is attached to the table, the same can be achieved even if the value is detected by the encoder or the linear sensor.
[0075]
The application is performed until the application end position of the base material 4 comes to a position immediately below the opening of the nozzle 20. That is, since the base material 4 is always placed at a predetermined position on the table 6, the application end position of the base material 4 is (a) before the opening of the nozzle 20, for example, 5 mm before just below, or (b) A position sensor and its encoder value are set in advance in the position of the table 6 corresponding to the position just below, and when the table 6 comes to the position corresponding to (a), the overall controller 60 stops the supply device controller 58. A command is issued and the supply of the coating liquid 42 to the nozzle 20 is stopped, and squeegee coating is performed up to the position (b). Then, when the table 6 comes to the position corresponding to (b), the nozzle 20 is raised to complete the operation. The coating liquid 42 is completely covered. When the coating liquid 42 is a relatively high-viscosity liquid, it is difficult to stop the application liquid discharge from the nozzle 20 opening due to the residual pressure instantaneously by simply stopping the supply of the coating liquid. Therefore, when the supply of the coating liquid is stopped and the pressure of the manifold 41 in the nozzle 20 is set to the atmospheric pressure, the discharge of the coating liquid from the opening can be stopped in a short time. It is desirable to provide an air release valve between the discharge electromagnetic switching valve 48 and the nozzle 20 of the supply unit.
[0076]
Even if the application end position is passed, the table 6 continues to operate and stops when it reaches the end position. If the part to be applied still remains at this time, the nozzle is moved in the Y-axis direction by the application width (nozzle pitch × number of holes) to the start position for the next application, and then the table 6 is moved in the opposite direction. The application is performed in the same procedure except that it is moved. If the application is performed in the same movement direction of the table 6 as the first time, the nozzle 20 moves in the Y-axis direction to the start position to be applied next, and the table 6 is returned to the X-axis preparation position.
[0077]
When the coating process is completed, the table 6 is moved to a place where the base material 4 is transferred by the unloader and stopped. After the suction of the base material 4 is released and the atmosphere is released, the lift pins are raised to remove the base material 4. Pull away from the surface of the table 6 and lift.
[0078]
At this time, the lower surface of the base material 4 is held by an unloader (not shown), and the base material 4 is conveyed to the next step. When the base material 4 is delivered to the unloader, the table 6 lowers the lift pins and returns to the origin position.
[0079]
At this time, the discharge electromagnetic switching valve 48 is closed, the suction electromagnetic switching valve 54 is opened, the supply unit 50 is operated, and the coating liquid is applied from the coating liquid tank 56 by an amount necessary for coating one substrate. Supply.
[0080]
In the overall configuration of the above-described coating liquid coating apparatus, the height sensor 40 is a non-contact measurement type using a laser, ultrasonic wave, or the like, or a contact measurement type using a dial gauge, a differential transformer, or the like. Any material having a measurable principle may be used.
[0081]
Further, the detection means for detecting the relative position of the opening of the coating liquid ejection device with respect to the recess may be constituted by an image processing apparatus using a camera that separately detects the recess of the substrate and the hole of the nozzle.
[0082]
Furthermore, in the above-described embodiment, the application example in which the substrate moves in the X-axis direction and the nozzle moves in the Y-axis and Z-axis directions has been described. However, the nozzle 20 and the substrate 4 are relatively three-dimensional. As long as it has a structure and type that can be moved dynamically, the moving direction of the table and nozzle may be any combination.
[0083]
For example, in the above-described embodiment, the application is performed by moving the table and moving the unevenness in the pitch direction by moving the nozzle. However, the application is performed by moving the nozzle and moving the unevenness in the pitch direction of the table. You may do it on the move.
[0084]
Furthermore, as a base material in this invention, what kind of thing may be sufficient if it is a sheet-like thing, such as an iron plate and an aluminum plate other than a glass plate. In addition, the case of applying one kind of coating liquid has been described in detail, but the present invention can also be applied to the case of simultaneously applying phosphors of three colors such as red, blue and green.
[0085]
【Example】
Example 1
A plate having a thickness of 0.5 mm was provided with 50 through holes having a diameter of 100 μm processed at a pitch of 0.5 mm. Before the laser welding to the manifold part, all the hole diameters were measured and varied in the range of φ94 to 110 μm.
[0086]
The maximum value of the hole diameter was taken as the reference value d ₀ (= 110 μm), and the plate thickness was taken as the reference value L ₀ (= 0.5 mm). Calculate the L for each hole according to the above equation (1), and for the place where it is necessary to make it smaller than the plate thickness, cut the plate surface over the width of 5 mm on the manifold side as shown in FIG. And adjusted to a predetermined L.
[0087]
The processed plate was laser welded to the manifold section to create a nozzle, and a 5 poise coating liquid was actually discharged to measure the discharge amount distribution. As a result, the variation in the discharge amount could be reduced from 47% to ± 5% or less.
[0088]
Example 2
16 types of nozzles that fix 30 pipes with an inner diameter of φ160μm and a length of 10mm to the manifold section at 1mm pitch. Before fixing the pipe to the manifold section, measure the diameter d and length L. did.
[0089]
The reference values were a diameter d ₀ = φ150 μm and a length L ₀ = 5 mm, and only those satisfying the formula (1) were selected and incorporated into the manifold portion to be fixed.
[0090]
As a result, when the pipe was not selected, the discharge amount variation of ± 15% was selected and incorporated as described above, so that the discharge amount variation could be reduced to ± 5% or less.
[0091]
【The invention's effect】
As described above in detail, according to the apparatus and method for applying a coating liquid to the nozzle and the uneven substrate of the present invention, variation in the discharge amount of the coating liquid discharged from the plurality of discharge holes is reduced. In addition to improving the quality, it is possible to apply stably and uniformly over a long period of time.
[0092]
According to the apparatus and method for manufacturing a plasma display of the present invention, since the apparatus and method for applying a coating liquid to the uneven substrate are used, a high-quality plasma display panel can be manufactured with high productivity. It becomes possible.
[Brief description of the drawings]
FIG. 1 is an overall perspective view of a coating liquid coating apparatus according to an embodiment of the present invention.
FIG. 2 is a schematic diagram showing a configuration around a table and nozzles in the apparatus of FIG. 1;
FIG. 3 is an enlarged plan view of a nozzle in the apparatus of FIG. 1 as viewed from below.
FIG. 4 is a longitudinal sectional view of a nozzle according to an embodiment of the present invention.
FIG. 5 is a schematic longitudinal sectional view of a nozzle according to another embodiment of the present invention.
FIG. 6 is a schematic longitudinal sectional view of a nozzle according to still another embodiment of the present invention.
FIG. 7 is a schematic longitudinal sectional view of a nozzle according to still another embodiment of the present invention.
FIG. 8 is a schematic longitudinal sectional view of a main part of a nozzle according to still another embodiment of the present invention.
FIG. 9 is a schematic longitudinal sectional view of a main part of a nozzle according to still another embodiment of the present invention.
FIG. 10 is a schematic longitudinal sectional view of a main part of a nozzle according to still another embodiment of the present invention.
FIG. 11 is a schematic longitudinal sectional view of a main part of a nozzle according to still another embodiment of the present invention.
FIG. 12 is a schematic longitudinal sectional view of a main part of a nozzle according to still another embodiment of the present invention.
FIG. 13 is a schematic longitudinal sectional view of a main part of a nozzle according to still another embodiment of the present invention.
FIG. 14 is a schematic longitudinal sectional view of a main part of a nozzle according to still another embodiment of the present invention.
FIG. 15 is a schematic longitudinal sectional view of a main part of a nozzle according to still another embodiment of the present invention.
FIG. 16 is a schematic longitudinal sectional view of a nozzle according to still another embodiment of the present invention.
[Explanation of symbols]
2 Base 4 Base 6 Table 8 Guide groove rail 10 Feed screw 16 AC servo motor 20 Nozzle 26 Linear actuator 30 Lifting mechanism 36 Width direction moving mechanism 40 Height sensor 42 Coating liquid 44 Discharge hole 45 Discharge hole surface 50 Supply unit 56 Coating liquid tank 58 Supply device controller 60 Overall controller 66 Sensor 72 Camera 81 Nozzle 82 Manifold portion 83 Discharge hole 84 Manifold member 85 Discharge hole member 86 Plate-shaped body 87 Open shaft 88 Scraping portion 89 Pipe

Claims (10)

A table for fixing a substrate having irregularities formed on the surface at a constant pitch, a nozzle having a plurality of ejection holes facing the irregularities of the substrate, a supply means for supplying a coating liquid to the nozzle, and a table And a coating device for applying a coating liquid to a concavo-convex substrate comprising a moving means for relatively moving the nozzle three-dimensionally ,
(1) The nozzle includes a member having the discharge hole and a member having a manifold portion.
(2) At least the region where the discharge hole of the member having the discharge hole is a plate-like body having a parallelism of 0.1 mm or less,
(3) The diameter of the discharge hole is 50 to 500 μm, and the variation in the diameter of each hole is ± 5% or less,
(4) When the diameter of the discharge hole is d, the radius of the outlet edge of the cross-sectional shape including the opening axis of the discharge hole is equal to or less than d / 2, and the variation in the radius of the entire circumference of the outlet edge is ± d / 20 or less,
(5) The member having the discharge hole and the member having the manifold portion are joined by an adhesive or bolt fastening.
An apparatus for applying a coating liquid to a concavo-convex substrate. The apparatus for applying a coating liquid to an uneven substrate according to claim 1, wherein the maximum height Rmax of the surface roughness of the inner wall of the discharge hole of the nozzle is 1 µm or less. The nozzle has a discharge hole with a diameter of d and a length of L. If the reference values of the diameter and length of the discharge hole are d0 and L0, respectively, the diameter d and the length L of each discharge hole. Is
0.7 (d0 ^Four / L0) ≦ d ^Four /L≦1.3 (d0 ^Four / L0)
If the diameters and lengths of the adjacent discharge holes of the nozzle or the diameters and lengths of the discharge holes located at both ends are d1, L1, d2, and L2, respectively, d1, d2, L1, and L2 are
0.9 ≦ (d1 / d2) ^Four (L2 / L1) ≦ 1.1
The coating device for applying the coating liquid to the concavo-convex substrate according to claim 1 or 2, wherein Place. The diameter d and length L of each discharge hole is
^{0.95 (d0 4 / L0) ≦} d 4 /L≦1.05(d0 4 / L0)
The coating apparatus for applying a coating liquid to the concavo-convex base material according to claim 3, wherein: The coating liquid is a paste containing phosphor powder that emits light in any one of red, green, and blue, and the coating liquid coating apparatus according to any one of claims 1 to 4 is used. Plasma display manufacturing equipment. A base material having a concavo-convex portion formed at a constant pitch on the surface and a nozzle having a plurality of discharge holes facing the concavo-convex portion of the base material are relatively moved, and a coating liquid is supplied to the nozzle. An application method for discharging a coating liquid from a discharge hole and applying a predetermined thickness of coating liquid to a recess of a substrate,
(1) The nozzle includes a member having the discharge hole and a member having a manifold portion.
(2) A region where at least the discharge hole of the member having the discharge hole is a plate-like body having a parallelism of 0.1 mm or less,
(3) The diameter of the discharge hole is 50 to 500 μm, and the variation in the diameter of each hole is ± 5% or less,
(4) If the diameter of the discharge hole is d, the radius of the outlet edge of the cross-sectional shape including the opening axis of the discharge hole is equal to or less than d / 2, and the variation in the radius of the entire periphery of the outlet hole is ± d / 20 or less,
(5) The member having the discharge hole and the member having the manifold portion are joined by an adhesive or bolt fastening.
A method for applying a coating liquid onto a concavo-convex substrate, characterized in that the coating liquid is applied using an object. The method for applying a coating liquid to an uneven substrate according to claim 6, wherein the maximum height Rmax of the surface roughness of the inner wall of the discharge hole of the nozzle is 1 µm or less. The nozzle has a discharge hole having a diameter of d and a length of L. If the reference values of the diameter and length of the discharge hole are d0 and L0, respectively, the diameter d and the length L of each discharge hole. But
0.7 (d0 ^Four / L0) ≦ d ^Four /L≦1.3 (d0 ^Four / L0)
If the diameters and lengths of the adjacent discharge holes or the discharge holes located at both ends are d1, L1, d2, and L2, respectively, d1, d2, L1, and L2 are
0.9 ≦ (d1 / d2) ^Four (L2 / L1) ≦ 1.1
It applies using what satisfy | fills, The coating method of the coating liquid to the uneven | corrugated base material of Claim 6 or 7 characterized by the above-mentioned. The diameter d and length L of each discharge hole is
0.95 (d0 ^Four / L0) ≦ d ^Four /L≦1.05 (d0 ^Four / L0)
It applies using the nozzle which satisfy | fills, The coating method of the coating liquid to the uneven | corrugated base material of Claim 8 characterized by the above-mentioned. A coating liquid comprising a phosphor powder that emits red, green, or blue light, wherein the coating method according to any one of claims 6 to 9 is used. Production method.

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