JPH09131561A - Coating device, coating method, producing device for color filter and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To stably form a uniform coating film by making a slit die light weight. SOLUTION: This coating device used for producing a color filter is provided with the slit die 40 which is composed of a front tip 58 and a rear lip 60, a slit 68 which is formed between the front lip 58 and the rear lip 60 and has a bottom end opening defined as a discharge port 70, and plural differential screws 80 which is provided on the front lip 58 and for controlling the size of the slit 68 and the discharge port 70, and the axis line of each differential screw 80 is extended along the slit 68 almost in parallel.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating device and a coating method, and is particularly suitable for manufacturing a color filter for a color liquid crystal display, which forms a coating film while discharging a coating liquid on the surface of a flat sheet member. The present invention relates to a coating device and a coating method, and a manufacturing device and a manufacturing method of a color filter using these devices and methods.

[0002]

Related Background Art A color filter for a color liquid crystal display has a fine grid pattern of three primary colors on a glass substrate. Such a grid pattern is formed after a black coating film is formed on the glass substrate. , Red, blue, and green can be obtained by painting them separately. Therefore, in manufacturing a color filter, a coating process for coating a glass substrate with black, red, blue, and green coating liquids to form a coating film is essential. Conventionally, spinners, bar coaters or roll coaters have been used as coating devices in this type of coating process, but in recent years, in order to reduce the consumption of the coating liquid and improve the physical properties of the coating film, Use of a die coater is being considered.

The die coater is equipped with an applicator for discharging a coating solution, a so-called slit die, which is disclosed, for example, in Japanese Utility Model Laid-Open No. 25073/1990. This known slit die has a discharge port that opens upward, from which the coating liquid is discharged toward the web,
As a result, a coating film of the coating liquid is formed on the web.

More specifically, the slit die has a pair of lips positioned in front and back when viewed in the running direction of the web, and the opening end of the slit formed between these lips is defined as a discharge port. One of the lips has a neck portion located on the discharge port side, and the neck portion is formed by a groove extending along the width direction on the outer surface of the lip. Further, a plurality of adjusting bolts are attached to the lip so as to traverse the groove, and these adjusting bolts elastically bend the neck portion of the lip by advancing and retreating, whereby the gap width of the slit,
That is, the gap width of the discharge port can be finely adjusted so as to be uniform in the width direction of the slit die.

[0005]

Since the known slit die discharges the coating liquid upward to the traveling web while being wound around the back roll, even if the slit die is simply arranged downward, It cannot be applied as it is to a single-wafer member such as a glass substrate.

That is, since the adjusting bolt described above is attached so that the bolt axis line faces the slit, the lip on the adjusting bolt side has a large thickness along the running direction of the web. The die is heavier. Further, in recent years, the width of the glass substrate tends to increase due to the increase in size of the color liquid crystal display, and along with this, it is necessary to secure a wide width of the slit die itself. For this reason, the weight of the slit die is further increased. Usually, since the slit die is supported at both ends, when the weight of the slit die increases, the slit die itself bends, and the clearance between the discharge port and the glass substrate becomes uniform along the width direction of the discharge port. This is not the case, and it becomes impossible to form a coating film on the glass substrate with a uniform film thickness.

The present invention has been made based on the above-mentioned circumstances, and an object thereof is to reduce the weight of an applicator and form a stable coating film on a member to be coated with a uniform film thickness. It is an object of the present invention to provide a coating device and a coating method that can be used, and a manufacturing device and a manufacturing method of a color filter.

[0008]

The above object can be achieved by a coating apparatus and a coating method, and a color filter manufacturing apparatus and a manufacturing method according to the present invention. The coating apparatus according to claim 1 supplies a coating liquid. Supply means, an applicator having a discharge port extending in one direction for discharging the coating liquid supplied from the supply means, and a moving means for relatively moving either the applicator or the member to be coated. And, the applicator, when viewed in the relative traveling direction of the member to be coated, a pair of lips arranged along the traveling direction, and a lip gap formed between these lips, One of the pair of lips is provided with a plurality of lip gap adjusting bolts arranged on the lip in the longitudinal direction of the discharge port, and the bolt axis lines of these lip gap adjusting bolts are different from the surface of the member to be coated. Angle is within the range of the traveling direction of the longitudinal 20 ° about the 90 °.

According to the coating apparatus of the first aspect, since each lip gap adjusting bolt extends substantially parallel to the lip gap between the lips, the thickness of the applicator viewed in the relative traveling direction of the member to be coated. With respect to the above, the wall thickness can be reduced. Therefore, the weight of the applicator can be reduced, and the coating film formed on the surface of the member to be coated has a uniform thickness. In the coating apparatus of the second aspect, each lip gap adjusting bolt is composed of a differential screw, and in this case, the sizes of the lip gap and the discharge port are finely adjusted by advancing and retracting these differential screws.

In the coating apparatus according to the third aspect, the lip gap is 0.
The thickness is set to be not less than 05 mm and not more than 0.3 mm, and in this case, the coating liquid is uniformly and stably discharged from the discharge port. In the coating apparatus according to the fourth aspect, a single-wafer member is used as the member to be coated, and in this case, a coating film having a uniform thickness is formed on the surface of the single-wafer member. The color filter manufacturing apparatus according to claim 5 manufactures a color filter using one of the above-mentioned applicators, and in this case, the manufactured color filter has high quality.

According to a sixth aspect of the present invention, in the coating apparatus of the first aspect, one of the applicator and the member to be coated is relatively moved while ejecting the coating liquid from the outlet of the applicator. By doing so, a coating film of the coating liquid is formed on the surface of the member to be coated, and in this case, the same operation as that of the coating apparatus according to claim 1 is exhibited. According to the method of manufacturing a color filter of claim 7, the color filter is manufactured by the coating method of claim 6, and in this case, the manufactured color filter has a high quality.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to FIG. 1, there is shown a so-called die coater applied to the manufacture of a color filter, and the die coater includes a base 2. Base 2
A pair of guide groove rails 4 is provided on the upper side, and a stage 6 is disposed on these guide groove rails 4, and the upper surface of the stage 6 is configured as a suction surface. The stage 6 can reciprocate horizontally on the guide groove rail 4. Specifically, a pair of slide legs 8 are projected from the lower surface of the stage 6, and these slide legs 8 are slidably fitted to the corresponding guide groove rails 4. The outer plate member 4a forming each guide groove rail 4 is bent inward with its upper end edge substantially at a right angle, and is fitted into the side groove 10 formed in the slide leg 8 of the stage 6.

A casing 12 containing a feed mechanism is arranged between the pair of guide groove rails 4, and the casing 12 extends along the guide groove rails 4. The feed mechanism has a feed screw 14 composed of a ball screw as shown in FIG. 2, and the feed screw 14 is screwed into a nut-like connector 16 fixed to the lower surface of the stage 6. Extends through it. Both ends of the feed screw 14 are rotatably supported by bearings (not shown), and an AC servo motor 18 is connected to one end thereof. In addition, casing 1
An opening for allowing the movement of the connector 16 is formed on the upper surface of 2, but the opening is omitted in FIG.

A sensor column 20 is arranged on the upper surface of the base 2 at one end thereof. The sensor column 20 is inverted L
It is in the shape of a letter, the tip of which extends above one of the guide groove rails 4. An electric lift actuator 21 is attached to the tip of the sensor column 20, and a thickness sensor 22 is attached downward to the lift actuator 21. As the thickness sensor 22, a laser displacement meter, an electronic micro displacement meter, an ultrasonic thickness meter, or the like can be used.

Further, the sensor column 20 is provided on the upper surface of the base 2.
The die strut 24 is disposed closer to the center of the base 2 than the base 2, and the die strut 24 also has an inverted L shape. An elevating mechanism 26 is attached to the tip of the die column 24, and although the elevating mechanism 26 is not shown in detail in FIG. 1, an elevating bracket is provided, and the elevating bracket can be raised and lowered by a pair of guide rods. Is attached to. A feed screw composed of a ball screw is arranged between the guide rods, and the feed screw is screwed into the elevating bracket so as to pass through the elevating bracket. The upper end of the feed screw is rotatably supported via a bearing in a casing 28 that houses the guide rod and the feed screw, and an AC servomotor 30 is connected to the upper end of the casing.

A U-shaped die holder 32 is rotatably attached to the lifting bracket in a vertical plane. The die holder 32 extends above the pair of guide groove rails 4 and between the guide groove rails 4. It extends horizontally. Further, a horizontal bar 36 is fixed to the elevation bracket above the die holder 32, and the horizontal bar 36 extends along the die holder 32. At both ends of the horizontal bar 36, a pneumatic adjustment actuator 38 is provided.
Are attached. These adjusting actuators 38 have expandable rods protruding from the lower surface of the horizontal bar 36, and these rods are in contact with both ends of the die holder 32.

A slit die 40 as an applicator is mounted in the die holder 32. As shown in FIG. 2, the supply hose 4 for the coating liquid is supplied from the slit die 40.
2 extends, and the tip of the supply hose 42 is connected to the supply port of the electromagnetic switching valve 46 of the syringe pump 44. A suction hose 48 extends from the suction port of the electromagnetic switching valve 46, and the tip of the suction hose 48 is
It is inserted in the tank 50 that stores the coating liquid.

The pump body 52 of the syringe pump 44 is
It is possible to selectively connect to one of the supply hose 42 and the suction hose 48 by the switching operation of the electromagnetic switching valve 46. The electromagnetic switching valve 46 and the pump main body 52 are electrically connected to a computer 54, and their operations are controlled by receiving a control signal from the computer 54. Computer 5
4, the lifting actuator 21 and the thickness sensor 22 described above are also electrically connected.

A sequencer 56 is also electrically connected to the computer 54 to control the operation of the syringe pump 44. The sequencer 56 includes an AC servomotor 18 of the feed screw 14 on the stage 6 side and an elevating mechanism 26,
In order to control the sequence, the sequencer 56 has a signal indicating the operation state of the AC servomotors 18 and 30, a signal from the position sensor 58 for detecting the moving position of the stage 6, and a slit. A signal from a sensor (not shown) for detecting the operation state of the die 40 is input, and a signal indicating a sequence operation is output from the sequencer 56 to the computer 54. Instead of using the position sensor 58, an encoder may be incorporated in the AC servomotor 18, and the position of the stage 6 may be detected by the sequencer 56 based on a pulse signal output from the encoder.

Although not shown, the die coater is provided with a loader for supplying the glass substrate A for the color filter as a single-wafer member on the stage 6 and an unloader for removing the glass substrate A from the stage 6. For these loaders and unloaders, a cylindrical coordinate system industrial robot can be used for the main components.

As is apparent from FIG. 1, the slit die 40 described above extends horizontally between the pair of guide groove rails 4 in the direction orthogonal to the reciprocating direction of the stage 6, and is supported by the die holder 32 at both ends thereof. Has been done. Here, the horizontal adjustment of the slit die 40 can be performed by advancing and retracting the telescopic rods of the adjustment actuators 38 provided at both ends of the horizontal bar 36, and rotating the die holder 32 around its rotation axis.

Referring to FIG. 3, details of the slit die 40 are shown. The slit die 40 has a long block-shaped front lip 58 and a rear lip 60. The lips 58, 60 are attached to each other in the front-rear direction when viewed in the reciprocating direction of the stage 6 (direction of arrow B in FIG. 3). , Are integrally coupled to each other. The front lip 58 and the rear lip 60 are positioned forward and backward when viewed in the forward direction of the stage 6.

The lower surface of the front lip 58 is the rear lip 6
The part on the 0 side projects downward, while the rear lip 6
An inclined surface is formed in the lower part of the rear surface of the slit die 40 so as to be continuous with the lower surface of the front lip 58, whereby the nozzle portion 6 extending in the width direction is formed at the center of the lower surface of the slit die 40.
2 are formed. A manifold 64 is formed in the center of the slit die 40, and the manifold 64 extends in the longitudinal direction of the slit die 40, that is, in the direction orthogonal to the reciprocating direction of the stage 6. The manifold 64 is always connected to the above-mentioned coating liquid supply hose 42 through an internal passage 66 (see FIG. 4).

A slit 68 extends vertically downward from the manifold 64, and the slit 68 is open at the lower end of the nozzle portion 62 of the slit die 40. The lower end opening of the slit 64, that is, the discharge port 70 extends in the direction orthogonal to the reciprocating direction of the stage 6, like the manifold 64. Specifically, the slit 68 is formed by interposing a shim (not shown) between the front lip 58 and the rear lip 60. Due to the thickness of the shim, the gap between the slit 68 and the discharge port 70 is, for example, 0. It is set to 05 mm or more and 0.3 mm or less.

Further, for example, a groove 72 is formed on the front surface of the front lip 58 on the discharge port 70 side. The groove 72 extends horizontally across both ends of the front lip 58 and divides the front lip 58 into an upper portion 74 and a lower portion 76. The upper portion 74 and the lower portion 76 are necked with each other. Are connected to each other via.

The front lip 58 has a plurality of differential screws 8
The adjusting mechanism having 0 is provided, and these differential screws 80 are arranged at equal intervals in the longitudinal direction of the discharge port 70. To describe each differential screw 80 and its attachment in detail, a screw hole is formed through the upper portion 74 of the front lip 58 in the vertical direction, and the lead screw 82 of the differential screw 80 is formed in this screw hole. It is screwed in from above. The lead screw 82 has a head 84 protruding from the upper surface of the front lip 58, and by turning the head 84, the lead screw 82 can be moved forward and backward in the screw hole.

A screw hole is formed concentrically in the lower end of the lead screw 82, and the child screw 8 is formed in this screw hole.
6 is screwed in from below. The lower end of the child screw 86 is screwed into a nut 88, and the nut 88 is fixed to the lower portion 76 of the front lip 58. Therefore, the upper portion 74 and the lower portion 76 of the front lip 58 are connected to each other via the differential screw 80.

The directions of the lead screw 82 and the lead screw 86 are the same, and the lead screw 82 has a thread pitch P1.
Is set to be larger than the thread pitch P2 of the child screw 86. Then, as apparent from FIG. 3, the differential screw 80
The angle θ formed by the axis N of the slider and the reciprocating direction B is centered at 90 °, and is within a range of 20 ° in the front-back direction when viewed in the reciprocating direction of the slider 6. That is, θ is in the range of 70 ° to 110 °, and the differential screw 80 extends substantially along the slit 68. That is, in the present embodiment, the reciprocating direction B and the plane direction of the glass substrate A coincide with each other, so that the two directions coincide with each other. In short, the bolt axis of each differential screw 80 forms an angle of 90 ° with the glass substrate, that is, the surface of the member to be coated.
It is necessary to be within the range of 70 ° to 110 ° in the front-back direction with respect to the center.

Next, one step relating to the production of the color filter, that is, the coating method performed by using the above-mentioned die coater will be described. First, when the origin of each of the operating parts of the die coater is returned, the stage 6 detects the thickness sensor 22.
Of the slit die 40 through the suction hose 48 and the supply hose 42 from the tank 50.
The inside of the passage extending to the manifold 62 and the slit 64 is filled with the coating liquid.

In this state, the glass substrate A is supplied onto the stage 6 from a loader (not shown), and the glass substrate A is held on the stage 6 under suction pressure. Here, the glass substrate A has a width dimension wider than the ejection width W of the ejection port 66 in the slit die 40. When the loading of the glass substrate A is completed, the thickness sensor 22 is lowered to a predetermined position, and the thickness of the glass substrate A is measured by the thickness sensor 22. After the measurement, the thickness sensor 22 is raised to the original position.

Simultaneously with the start of the loading of the glass substrate A, the electromagnetic switching valve 46 of the syringe pump 44 is switched to connect the pump body 52 and the suction hose 48, and the pump body 52 is connected to the inside of the tank 50. A suction operation of sucking the coating liquid through the suction hose 48 is performed. When a predetermined amount of the coating liquid is sucked into the syringe pump 44, the electromagnetic switching valve 46 of the syringe pump 44 is switched to connect the pump body 52 and the supply hose 42, and the stage 6 moves to the slit die 40. It is moved forward and stopped immediately before the slit die 40. After that, the slit die 40 is lowered, and a predetermined clearance between the lower surface of the slit die 40 and the upper surface of the glass substrate A, that is, several times the thickness of the coating film to be formed, for example, 0.1 mm. The clearance H (see FIG. 5) is secured. The clearance H takes the thickness of the glass substrate A measured by the thickness sensor 22 into consideration and is based on an output signal from a distance sensor (not shown) that measures the distance between the stage 6 and the slit die 40. It is precisely determined by controlling the descent of.

Next, the stage 6 is further moved forward, the start line on which the coating film should be started is positioned directly below the discharge port 66 of the slit die 40 on the upper surface of the glass substrate A, and the stage 6 is once stopped. Substantially simultaneously with the temporary stop of the stage 6, the syringe pump 44 starts the discharge operation of the coating liquid and supplies the coating liquid toward the slit die 40. Therefore, the coating liquid L is discharged onto the glass substrate A from the discharge port 66 of the slit die 40. Here, since the gap of the discharge port 66 is constant along the longitudinal direction of the slit die 40, that is, the reciprocating direction of the stage 6, the discharge port 66 is uniformly distributed along the start line of the glass substrate A. The coating liquid L is discharged, and as a result, a liquid pool C (see FIG. 2) having a meniscus is formed between the slit die 40 and the glass substrate A along the start line.

When the stage 6 is advanced in the forward direction at a constant speed while continuously discharging the coating liquid L from the discharge port 6 simultaneously with the formation of the liquid pool C as shown in FIG. Coating film D of the coating liquid L on the upper surface of the guide substrate A
Are continuously formed. In forming the coating film D, the start line of the glass substrate A is set to the discharge port 6 of the slit die 40 without temporarily stopping the forward movement of the stage 6.
6 at the timing of passing the coating liquid L from the discharge port 66.
May be discharged.

As the stage 6 advances, when the finish line on the glass substrate A where the formation of the coating film D should be finished reaches the position immediately before the slit die 40 and the discharge port 66,
At this point, the discharge operation of the syringe pump 44 is stopped. Thus, even if the discharge of the coating liquid L from the discharge port 66 of the slit die 40 is stopped, the coating liquid D is formed while consuming (squeezing) the coating liquid in the liquid pool C on the upper surface of the glass substrate A. Continue to the finish line. The discharge operation of the syringe pump 44 may be stopped when the finish line on the glass substrate A passes through the discharge port 66 of the slit die 40.

At the time when the finish line on the glass substrate A passes through the discharge port 66 or when it passes, the suction operation of the syringe pump 44 is slightly performed, whereby the coating liquid L in the slit 64 of the slit die 40 is made. Is sucked toward the manifold 62 side. Then, the slit die 40 is raised to the original position, and the process of discharging the coating liquid L from the slit die 40 is completed. The slit die 4
The coating liquid L adhering to the lower end surface at the 0 raised position
Are wiped off by a cleaner (not shown).

On the other hand, the forward movement of the stage 6 is continued even after the discharging step of the coating liquid L is completed, and when the stage 6 reaches the end of the guide groove rail 4, the forward movement is stopped. . In this state, the glass substrate A on which the coating film D is formed
Are removed from the stage 6 by the unloader. After this, the stage 6 is moved back and returned to the initial position shown in FIG. 1 to complete the series of coating steps. At the initial position, the stage 6 waits until a new glass substrate is loaded.

Regarding the formation of the coating film D on the glass substrate A described above, in order to make the film thickness uniform, the slit die 40 is used.
The gap width of the slit 68, that is, the gap width of the discharge port 70 must be adjusted uniformly along the longitudinal direction thereof, but this adjustment can be performed by each differential screw 80. That is, the lead screw 82 of the differential screw 80 is, for example, 1
When rotated, the child screw 86 advances and retreats based on the difference between the thread pitch P1 of the lead screw 82 and the thread pitch P2 of the child screw 86. This forward / backward elastically bends the neck portion 78 of the front lip 58, whereby the gap width of the discharge port 70 in the slit die 40 can be adjusted uniformly in the longitudinal direction. Here, since the axis of the differential screw 80 is attached along the slit 68, the advance / retreat of the child screw 86 does not directly change the gap width of the slit 68. That is, the gap adjustment amount of the discharge port 70 with respect to the advance / retreat amount of the child screw 86 can be suppressed to be small, and the fine adjustment can be performed.

Further, as described above, since each differential screw 80 is attached along the slit 68, each differential screw 80 does not increase in thickness in the forward movement direction of the stage 6 at the front lip 58. The screw 80 can be attached. Therefore, the front lip 58 can be made thinner, and even if the glass substrate A becomes larger,
Even if the width of the slit die 40 is increased, the weight of the slit die 40 can be reduced.

If the weight of the slit die 40 is light, the bending of the slit die 40 as shown by the chain double-dashed line in FIG. 4 can be suppressed to an almost negligible level. The clearance with the substrate A becomes substantially uniform along the longitudinal direction of the ejection port 70.
As a result, regarding the formation of the coating film D on the glass substrate A,
The film thickness can be made stable and uniform. In FIG. 4, the supporting structure is exaggerated in order to clearly show that the slit die 40 is supported at both ends thereof.

In the slit die 40, the slit 6
Since the gap 8 is set in the range of 0.05 to 0.3 mm, the coating liquid L is discharged from the discharge port 70 more uniformly. That is, when the gap of the slit 68 is secured to be 0.05 mm or more, the inner surfaces of the front lip 58 and the rear lip 60 which define the slit 68 can be sufficiently flat in terms of processing accuracy. On the other hand, if the gap between the slits 68 exceeds 0.3 mm, it becomes difficult to sufficiently maintain the discharge pressure of the coating liquid in the slits 68 and the manifold 64, and the coating liquid L is evenly discharged from the discharge ports 70. Can not be discharged.

As described above, in one embodiment, the application to a single-wafer member has been described. However, the present invention can be applied to a belt-shaped long member or an endless member. In this case, It is possible for the applicator to perform continuous coating on the member to be coated. Further, the applicator is not limited to facing downward, but can be similarly applied when facing upward or diagonally.

[0042]

As described above, according to the coating device and the coating method of claims 1 and 6, even if the width of the coating device itself increases as the size of the member to be coated increases, Since it can be used, it is possible to effectively suppress the variation in the clearance between the discharge port and the member to be coated due to the bending of the applicator itself, and to form a coating film having a uniform thickness on the member to be coated. It can be stably formed. According to the coating device of the second aspect, it is possible to finely adjust the lip gap and the discharge port of the coating device. According to the coating device of the third aspect, the coating liquid can be uniformly discharged from the discharging port of the coating device. Becomes possible,
According to the coating apparatus of Claim 4 and the manufacturing apparatus and manufacturing method of Claims 5 and 7, it is possible to manufacture a high-quality color filter.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing a die coater.

FIG. 2 is a schematic configuration diagram showing the die coater of FIG. 1 including a coating liquid supply system.

FIG. 3 is a vertical sectional view showing a slit die.

FIG. 4 is a view showing an inner surface of a front lip of a slit die.

[Explanation of symbols]

 6 stage 14 feed screw 40 slit die (applicator) 44 syringe pump (supplying means) 50 tank 58 front lip 60 rear lip 64 manifold 68 slit (lip gap) 70 discharge port 70 inclined surface 72 groove 80 differential screw (lip gap adjustment) Screw) 82 lead screw 86 child screw A glass substrate (coated member, single-wafer member)

Claims (7)

[Claims] 1. A supply unit for supplying a coating liquid, an applicator having a discharge port extending in one direction for discharging the coating liquid supplied from the supply unit, and either the applicator or a member to be coated. In a coating apparatus including a moving unit that relatively moves one, the applicator, when viewed in the relative traveling direction of the member to be coated, a pair of lips arranged along the traveling direction, A lip gap formed between these lips and a plurality of lip gap adjusting bolts arranged in the longitudinal direction of the discharge port on one of the pair of lips are provided. The coating device is characterized in that the bolt axis line of the bolt is within an angle range of 20 ° with respect to the surface of the member to be coated about 90 ° in the front-back direction of the traveling direction. 2. The applicator according to claim 1, wherein the lip gap adjusting bolt is a differential screw. 3. The lip gap is 0.05 mm or more,
The coating device according to claim 1 or 2, wherein the coating device has a thickness of 0.3 mm or less. 4. The coating apparatus according to claim 1, wherein the member to be coated is a single-wafer member. 5. A color filter manufacturing apparatus, which manufactures a color filter by using the coating apparatus according to claim 1. 6. The applicator according to claim 1, wherein one of the applicator and the member to be coated is relatively moved while ejecting a coating liquid from a discharge port of the applicator. According to the method, a coating film of the coating liquid is formed on the surface of the member to be coated. 7. A method for manufacturing a color filter, which comprises manufacturing a color filter by the coating method according to claim 6.