JP2006239664A - Die head and method for adjusting slit gap - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a die head capable of highly, precisely and easily adjusting a slit gap dimension evenly in the direction of a coating width. <P>SOLUTION: A groove 11 for adjusting a gap is provided parallel with a slit gap 4 at the back of a slit face which forms the slit gap 4 of the die head 1. A gap adjusting device 13 for widening the groove width capable of widening the groove width by applying a voltage to laminated piezoelectric elements and a gap adjusting device 14 for reducing the groove width capable of reducing the groove width by applying a voltage to laminated piezoelectric elements are disposed in the groove so as to be adjustable in the direction of a coating width with respect to the position to be fixed; thus the slit gap dimension is evenly adjustable in the direction of the coating width by widening or reducing the groove width of the groove for adjusting the gap, which is done by applying a voltage to each of the laminated piezoelectric elements of the gap adjusting device 13 for widening the groove width and gap adjusting device 14 for reducing the groove width. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention applies a coating liquid to an object to be coated such as a web or a plate in a color filter manufacturing process, an organic EL element manufacturing process, a fuel cell manufacturing process, a photomask manufacturing process, a packaging material manufacturing process, and the like. The present invention relates to a die head used for the purpose and a method for adjusting the slit gap.

  Conventionally, a coating liquid is applied to a running web (an object to be coated) or to a plate or sheet (an object to be coated) placed on a surface plate. A die head having a slit gap for discharging the film into a film is used. In general, a die head has a structure in which two die blocks each having a surface (referred to as a slit surface) forming an inner surface of a slit gap are abutted with each other so that the slit surfaces face each other, and are integrated by bolt fastening. In coating using this die head, it is necessary in terms of coating film quality to make the dimension of the slit gap of the die head uniform in the coating width direction. However, when the die head is simply assembled due to the processing accuracy of the die head or the occurrence of deflection due to bolt fastening at the time of assembly, even if the bolt fastening force is uniform, the slit gap dimension varies to some extent in the coating width direction (for example, several About micron). In recent years, the demand for coating film thickness accuracy has become stricter, and accordingly, it is desired to reduce the variation in the slit gap size in the coating width direction as much as possible, and means for correcting the variation in the slit gap size are used. Yes.

  Conventionally, as means for correcting variations in slit gap dimensions, conventionally, a plurality of adjustment bolts provided in the application width direction of the die head are used to finely adjust the slit gap to achieve uniformity, or a plurality of hydraulic units provided in the application width direction. In some cases, the slit portion is deflected by applying pressure to the surface to make the slit gap uniform (see Japanese Patent No. 3501159). A die head having a structure in which a large number of piezoelectric materials sandwiched between electrodes are arranged side by side on one slit surface sandwiching the slit gap of the die head, and a protective film is provided on the contact surface with the coating liquid on the surface (See 2004-33965).

However, the fine adjustment of the slit gap with the adjusting bolt is difficult to finely adjust in the micron order because the adjustment amount depends on the pitch of the thread on the male screw side. Fine adjustment of the slit gap by the hydraulic unit can be made in a short time and in the micron order, but it can only be adjusted in the direction of narrowing the slit gap. In addition, the hydraulic unit has a drawback that it does not have complete pressure reproducibility due to reassembly and is vulnerable to temperature changes. Further, the die head proposed in Japanese Patent Application Laid-Open No. 2004-33965 is a thin protection such as a piezoelectric film in which one surface of a slit gap through which a coating liquid flows is arranged in order and a polymer film arranged so as to protect the surface. Although it is formed of a film, it is unlikely that such a structure can realize a slit gap that stably discharges the coating liquid to a uniform thickness. For example, when a large number of piezoelectric materials are arranged side by side, gaps are created between the piezoelectric materials, but the protective film receives the internal pressure of the coating liquid and enters the gaps, and the slit gap size at that part becomes wide and applied. There is a risk that the film may be streaked, the coating liquid supplied from the die head manifold may leak to the back of the protective film, wet the piezoelectric material, and cause failure, or a flat surface perpendicular to the slit gap at the tip of the die head. However, there is a problem in that it is difficult to form such a tip lip surface, and it is unlikely that a practical die head can be constructed. Japanese Patent Application Laid-Open No. 2004-33965 describes that the slit thickness distribution is adjusted by expansion and contraction of the piezoelectric material, but the piezoelectric material only undergoes displacement in the extending direction when energized, and does not contract. For this reason, there also exists a problem that it can adjust only in the direction which narrows a slit gap.
Japanese Patent No. 3501159 JP 2004-33965 A

  The present invention has been made in view of such problems, and the slit gap of the die head can be adjusted both in the narrowing direction and in the widening direction, and can be adjusted in a micron order in a short time, and further assembled. It is an object to provide a die head excellent in reproducibility and to provide a method for adjusting the slit gap of the die head.

  In order to solve the above-mentioned problem, the invention according to claim 1 of the present application provides a slit surface behind at least one of the two slit surfaces disposed opposite each other so as to form a slit gap for discharging the coating liquid of the die head. The gap adjustment groove is formed in parallel with the gap adjustment groove, and the slit gap size can be changed by bending the area between the slit surface and the gap adjustment groove by enlarging or reducing the groove width of the gap adjustment groove. At the same time, the groove adjustment groove can be adjusted in the application width direction with a gap adjustment gap adjustment tool for expanding the gap adjustment groove and a groove reduction gap adjustment tool for reducing the groove width. In addition, the gap adjusting gap adjusting tool is attached to both ends of the laminated piezoelectric element that is extended by applying a voltage, and the laminated piezoelectric element. The structure is provided with an enlargement mounting jig provided with a locking portion for attaching to the side surface of the gap adjusting groove at the front end in the extending direction of the multilayer piezoelectric element, and the groove reducing gap adjusting tool is applied with voltage. A laminated piezoelectric element that extends at the opposite ends of the laminated piezoelectric element, and a latch portion that is attached to a side surface of the gap adjusting groove on both sides of the laminated piezoelectric element at a right angle to the extending direction of the laminated piezoelectric element. The structure includes a reduction mounting jig having a structure in which the interval between the locking portions on both sides is reduced by the extension of the element.

  According to a second aspect of the present invention, in the die head according to the first aspect, a guide groove having a cross-sectional shape that is wider than the opening is formed on a side surface of the gap adjusting groove in the longitudinal direction of the gap adjusting groove. An extended head that is formed so as to extend and is capable of moving through the guide groove but not through the opening of the engaging portion of the groove expanding gap adjusting tool and the groove reducing gap adjusting tool. It is a shape.

  According to a third aspect of the present invention, in the die head according to the first or second aspect, the gap adjusting groove is formed such that the groove width direction is perpendicular to the slit surface.

  According to a fourth aspect of the present invention, in the die head according to the first or second aspect, the gap adjusting groove is formed so that a groove width direction thereof is parallel to the slit surface.

  The invention according to claim 5 is a method for adjusting the size of the slit gap of the die head according to any one of claims 1 to 4, wherein the groove adjusting gap adjusting tool and the groove reducing gap adjusting tool are operated. Measure the distribution of the slit gap dimension in the coating width direction in a state where the slit gap dimension is not applied, and within the gap adjusting groove, use a groove widening gap adjuster for the area where the slit gap dimension is to be reduced, and the area where the slit gap dimension is to be increased. Position the groove adjusting gap adjusting tool, and then apply a voltage to the laminated piezoelectric element provided in the groove expanding gap adjusting tool and the groove reducing gap adjusting tool to reduce the groove width of the gap adjusting groove. In this case, the slit gap size is adjusted by enlarging or reducing the size.

  The invention according to claim 6 is the slit gap adjusting method according to claim 5, wherein the applied voltage to the stacked piezoelectric element provided in the groove expanding gap adjusting tool and the groove reducing gap adjusting tool is adjusted, The slit gap dimension is adjusted by adjusting the amount of expansion and reduction of the groove width of the gap adjusting groove.

  In the die head of the present invention, the groove expanding gap adjusting tool and the groove reducing gap adjusting tool can be attached to a desired position in the coating width direction in the gap adjusting groove formed in the die head. Measure variation in slit gap dimensions, attach a groove enlargement gap adjuster to the area where you want to reduce the slit gap, and attach a groove reducer gap adjuster to the area where you want to increase the slit gap. The slit gap can be adjusted by enlarging or reducing the groove width of the adjusting groove, and the slit gap can be adjusted uniformly even with a thin die head having poor straightness. In addition, since the laminated piezoelectric element is used for the groove expanding gap adjusting tool and the groove reducing gap adjusting tool, the groove expanding gap adjusting tool is expanded and the groove reducing gap is applied by applying a voltage to the laminated piezoelectric element. The adjustment tool can be reduced, and adjustment in a micron order can be performed in a short time. In addition, since the multilayer piezoelectric element has excellent voltage reproducibility, it has excellent assembly reproducibility. For this reason, once the slit gap of the die head is adjusted, the slit gap can be easily and uniformly adjusted in a short time even when the die head is disassembled for cleaning and reassembled. In addition, since the groove adjusting gap adjusting tool and the groove reducing gap adjusting tool need only be disposed at the necessary positions, the number of used parts can be reduced, and the cost can be reduced.

  1 is a schematic perspective view showing a part of a die head according to a preferred embodiment of the present invention in cross section, FIG. 2 is a schematic plan view of the die head, and FIG. 3 is a schematic cross sectional view taken along line AA in FIG. 4A is a schematic cross-sectional view showing a gap adjusting groove forming region of the first die block, FIG. 4B is a schematic side view of the groove expanding gap adjusting tool before being attached to the gap adjusting groove, and FIG. 2 is a schematic cross-sectional view taken along the line B-B in FIG. 2, FIG. 6A is a schematic cross-sectional view showing a gap adjustment groove forming region of the first die block, and FIG. 6B is a groove reduction before being attached to the gap adjustment groove. It is a schematic side view of the gap adjustment tool for use.

  1 to 6, the die head generally indicated by reference numeral 1 includes a first die block 2 and a second die block 3, and the first die block 2 and the second die block 3 are respectively coated. Slit surfaces 2a and 3a which are arranged to face each other so as to form a slit gap 4 for discharging the working liquid, and mating surfaces 2b and 3b for assembling each other are formed. Further, one die block 3 has a manifold 5 Is formed. The manifold 5 may be either a coat hanger type or a straight type. The die head 1 further includes the first die block 2 and the second die block 3 in a state in which the mating surfaces 2b and 3b are abutted, at the position of the mating surface and in the coating width direction (XX direction in FIGS. 1 and 2). ) Is provided with a plurality of fastening means 6 that are fastened to each other at a plurality of positions spaced apart from each other. In this embodiment, a bolt is used as the fastening means 6. End plates 7 are attached to both ends of the first and second die blocks 2 and 3.

  In the first die block 2, a gap adjusting groove 11 is formed behind the slit surface 2a formed in parallel to the slit surface 2a. The gap adjusting groove 11 is formed such that the upper surface (the surface on the tip side of the slit gap 4) is open and the groove width direction is perpendicular to the slit surface 2a. By enlarging or reducing the width of the groove 11, the region 2c sandwiched between the slit surface 2a and the gap adjusting groove 11 is deflected in the direction of arrow C (see FIG. 3) or in the direction of arrow D (see FIG. 5). Thus, the dimension d of the slit gap 4 can be changed. In addition, in order to increase the deflection amount of the region 2c when the groove width of the gap adjusting groove 11 is enlarged or reduced, the thickness of the region 2c is reduced (for example, about 3 to 10 mm) to reduce the rigidity. It is preferable that the thickness of the region 2d sandwiched between the gap adjusting groove 11 and the outer surface of the die block 2 is made thicker than the region 2c (for example, about 1.5 to 5 times) to increase the rigidity. .

  In the gap adjusting groove 11, the groove adjusting gap adjusting tool 13 that expands the groove width of the gap adjusting groove in a form attachable to a desired position in the coating width direction (the XX direction in FIGS. 1 and 2). And a groove reducing gap adjuster 14 for reducing the groove width of the gap adjusting groove. As can be clearly understood from FIGS. 4 and 6, the groove expanding gap adjusting tool 13 and the groove reducing gap adjusting tool 14 are easily slid to the desired positions on the opposite side surfaces of the gap adjusting groove 11. The gap adjusting groove 11 has a guide groove 15 having a cross-sectional shape that is wider than the opening so that it can be connected so as not to come out from the locking portions (details will be described later) of the gap adjusters 13 and 14. Are formed so as to extend in the longitudinal direction (and hence in the coating width direction).

  As can be clearly understood from FIGS. 3 and 4, the gap adjusting tool 13 for expanding the groove is attached to both ends of the laminated piezoelectric element 16 that is expanded by applying a voltage, and the laminated piezoelectric element 16. This is a structure provided with an enlargement mounting jig 17 provided with a locking portion 17a for attaching to the side surface of the gap adjusting groove 11 at the distal end portion in the extending direction. With this structure, a voltage is applied to the multilayer piezoelectric element 16 By doing so, it is possible to extend the laminated piezoelectric element 16 in the direction of arrow E in accordance with the applied voltage, and to move the engaging portions 17a and 17a at both ends in the direction of arrow E, thereby expanding the distance between the two. The locking portion 17a has a shape with an enlarged head that fits into the guide groove 15 and can move in the longitudinal direction but cannot pass through the opening of the guide groove 15. In addition, as a cross-sectional shape of the guide groove 15 and the locking portion 17a, an inverted triangular shape (a combination of a groove and a groove) is used in the embodiment of the drawings, but not limited to this structure, other structures, For example, a T-shaped cross section may be used. The groove enlargement gap adjusting tool 13 is attached so that the laminated piezoelectric element 16 extends in the groove width direction of the gap adjusting groove 11 (that is, extends in a direction perpendicular to the slit surface 2a). The expansion of the piezoelectric element 16 acts to enlarge the groove width of the gap adjusting groove 11 and reduce the slit gap 4.

  As can be clearly understood from FIGS. 5 and 6, the groove adjusting tool 14 for reducing the groove is attached to both ends of the laminated piezoelectric element 19 that is expanded by applying a voltage, and the laminated piezoelectric element 19. A reduction mounting jig 20 having locking portions 20a and 20a for mounting on the guide grooves 15 on the side surface of the gap adjusting groove 11 is provided on both sides in the direction perpendicular to the extending direction (arrow F direction). . In the reduction mounting jig 20, the latching portions 20a, 20a on both sides are pulled in the direction of the arrow G, which is a direction perpendicular to the direction of the arrow F, due to the extension of the laminated piezoelectric element 19 in the direction of the arrow F. The interval between the stop portions 20a and 20a is reduced. With this structure, by applying a voltage to the multilayer piezoelectric element 19, the multilayer piezoelectric element 19 is extended in the direction of arrow F according to the applied voltage, and the locking portions 20a and 20a on both sides are moved in the direction of arrow G accordingly. Thus, the distance between the two can be reduced. Similarly to the locking portion 17a used in the groove enlarging gap adjusting tool 13, the locking portion 20a is fitted in the guide groove 15 and can move in the longitudinal direction, but passes through the opening of the guide groove 15. It has a shape with an enlarged head that cannot be used. The groove reducing gap adjusting tool 14 is attached so that the laminated piezoelectric element 19 extends in a direction perpendicular to the groove width direction of the gap adjusting groove 11 (that is, extends in a direction parallel to the slit surface 2a). The extension of the laminated piezoelectric element 19 acts to reduce the groove width of the gap adjusting groove 11 and increase the slit gap 4.

  1 and 2, a control unit 25 is connected to the groove expanding gap adjusting tool 13 and the groove reducing gap adjusting tool 14 mounted in the gap adjusting groove 11, and each groove expanding gap adjusting tool 13, A voltage can be applied to the stacked piezoelectric elements 16 and 19 of the groove reducing gap adjusting tool 14 and the applied voltage can be adjusted.

  Next, the assembly of the die head 1 having the above structure and the slit gap adjusting operation will be described. First, the 1st die block 2 and the 2nd die block 3 are faced | matched, both are assembled | attached by the fastening means (bolt) 6, and are integrated. At this time, the groove adjusting gap adjusting tool 13 and the groove reducing gap adjusting tool 14 may be positioned at appropriate positions of the gap adjusting groove 11 or may be removed. Further, no voltage is applied to the laminated piezoelectric elements 16 and 19. Next, the dimension d of the slit gap 4 is measured with an appropriate measuring device (for example, an optical microscope) over the entire length in the coating width direction to determine the variation in the slit width dimension in the coating width direction, and to reduce the variation. In addition, a region where the groove expanding gap adjusting tool 13 and the groove reducing gap adjusting tool 14 are to be disposed is determined, and the groove expanding gap adjusting tool 13 and the groove reducing gap adjusting tool 14 are placed in the gap adjusting groove 11 in the regions. Slide to position. For example, when the distribution is such that the slit gap dimension d is narrow at the center in the coating width direction and wide at both ends, the groove reduction used for enlarging the slit gap dimension d is performed in the central region in the coating width direction. The gap adjusting tool 14 is positioned, and the groove expanding gap adjusting tool 13 used for reducing the slit gap dimension d is positioned in both end regions. The number of the gap adjusting gap adjusting tool 13 and the groove reducing gap adjusting tool 14 is appropriately determined in consideration of the slit gap adjustable range by the gap adjusting tools 13, 14 and the adjustment accuracy of the slit gap dimension. deep.

  Next, while measuring the slit gap dimension d with a measuring device (for example, an optical microscope), the control unit 25 applies a voltage to the stacked piezoelectric elements 16 and 19 of the groove expanding gap adjusting tool 13 and the groove reducing gap adjusting tool 14. Apply and adjust the voltage so that the slit width is uniform in the coating width direction. After the adjustment is completed, the die head 1 is attached to the coating device, and a coating liquid (for example, a color resist) is applied to each of the stacked piezoelectric elements 16 and 19 with the adjusted voltage applied, and the film thickness is measured. If there is a variation in film thickness exceeding the allowable range in the coating width direction of the die head 1, the applied voltage is adjusted again with the coating device attached or removed again. As described above, the slit gap dimension can be adjusted extremely uniformly in the coating width direction. The die head 1 is attached to the coating apparatus, and coating is performed with the adjusted voltage applied to the stacked piezoelectric elements 16 and 19. By performing the operation, application with high film thickness accuracy can be performed.

  After adjusting the slit gap dimension as described above, the mounting position of each groove expanding gap adjusting tool 13 and groove reducing gap adjusting tool 14 and the voltage applied to each laminated piezoelectric element 16, 19 are stored. . Then, the application by the die head 1 is continued for an appropriate period, and when the die head 1 needs to be disassembled and cleaned, the die head 1 is removed from the coating apparatus and disassembled and cleaned. Thereafter, the die head 1 is reassembled, and each of the groove expanding gap adjusting tool 13 and the groove reducing gap adjusting tool 14 is attached to the previously determined position, and each of the stacked piezoelectric elements 16 and 19 has the previously adjusted value. Apply voltage. Since the multilayer piezoelectric elements 16 and 19 are excellent in reproducibility of the extension force with respect to the applied voltage, reassembly is performed by applying the voltage of the previously adjusted value to each multilayer piezoelectric element 16 and 19 as described above. After that, the slit gap dimension can be made extremely uniform. Thus, it is not necessary to adjust the slit gap dimension again. Thus, when cleaning the die head 1, disassembly and reassembly are extremely simple and can be performed in a short time.

  In the above description of the operation, both the groove enlargement gap adjustment tool 13 and the groove reduction gap adjustment tool 14 are used for the gap adjustment groove 11, but it is not always necessary to use both. When the slit gap dimension d can be adjusted to a desired uniformity by using only one of them, only one of them may be used. Further, the number of used groove adjusting gap adjusting tools 13 and groove reducing gap adjusting tools 14 can be appropriately increased or decreased according to the required adjustment accuracy.

  In the above-described embodiment, the gap adjusting groove 11 is formed so that the upper surface side is open and the groove width direction is perpendicular to the slit surface 2a. However, the shape and arrangement of the gap adjusting groove are not limited thereto. The slit gap dimension can be arbitrarily changed by bending the region sandwiched between the slit surface and the gap adjusting groove by expanding or reducing the groove width. Hereinafter, a die head using a modification of the gap adjusting groove will be described. FIG. 7 is a schematic cross-sectional view of a portion of a die head 1A according to another embodiment of the present invention, to which a groove expanding gap adjusting tool 13 is attached, and FIG. 8A is a gap adjusting portion of the first die block 2A. FIG. 9B is a schematic cross-sectional view showing a groove forming region, FIG. 9B is a schematic side view of a groove adjusting gap adjusting tool before being attached to the gap adjusting groove, and FIG. 9 is a portion of the die head 1A to which the groove reducing gap adjusting tool 14 is attached. FIG. 10A is a schematic cross-sectional view showing a gap adjusting groove forming region of the first die block 2A, and FIG. 10B is an outline of a groove reducing gap adjusting tool before being attached to the gap adjusting groove. It is a side view.

  7-10, this die head 1A is also provided with the 1st die block 2A and the 2nd die block 3A, and discharges a coating liquid to the 1st die block 2A and the 2nd die block 3A, respectively. Slit surfaces 2a and 3a arranged to face each other so as to form a slit gap 4 and mating surfaces 2a and 3a for assembling each other are formed, and a manifold 5 is formed on the second die block 3A. The first die block 2A and the second die block 3A are integrally assembled by fastening means 6 such as bolts.

  In the first die block 2A, a gap adjusting groove 11A is formed behind the slit surface 2a formed in parallel to the slit surface 2a. The gap adjusting groove 11A used here is formed so that the opening faces the side of the die head 1A and the groove width direction is parallel to the slit surface 2a. Further, a guide groove 15 having a cross-sectional shape similar to that of the guide groove 15 shown in FIG. 4 is formed on the opposite side surfaces of the gap adjusting groove 11A. That is, the gap adjusting groove 11A has the same cross-sectional shape as the gap adjusting groove 11 in the embodiment shown in FIGS. 1 to 6 and is rotated 90 degrees clockwise. Also in the gap adjusting groove 11A of this structure, the area 2c sandwiched between the slit surface 2a and the gap adjusting groove 11A is expanded or reduced by increasing or decreasing the groove width in the direction of arrow C (see FIG. 7) or arrow D. The dimension d of the slit gap 4 can be changed by bending in the direction (see FIG. 9). In order to increase the amount of deflection of the region 2c when the groove width of the gap adjusting groove 11 is enlarged or reduced, the thickness of the region 2c is reduced (for example, about 3 to 10 mm) to reduce the rigidity. It is preferable to keep.

  In the gap adjusting groove 11A, a groove expanding gap adjusting tool 13 (see FIG. 7) and a groove reducing gap adjusting tool 14 (see FIG. 9) can be mounted in a form in which the mounting position in the coating width direction can be adjusted. It has become. The groove enlargement gap adjustment tool 13 and the groove reduction gap adjustment tool 14 used here are also similar in structure to the groove enlargement gap adjustment tool 13 and the groove reduction gap adjustment tool 14 in the embodiment shown in FIGS. In this case, only the mounting direction is rotated 90 degrees.

  Also in this die head 1A, as shown in FIG. 7, a groove enlargement gap adjusting tool 13 used for reducing the slit gap dimension d is positioned in a region where the slit gap dimension d is desired to be narrowed when adjusting the slit gap. Further, as shown in FIG. 9, a groove reducing gap adjusting tool 14 used for enlarging the slit gap dimension d is positioned in an area where the slit gap dimension d is desired to be widened. Then, by applying a voltage to the stacked piezoelectric elements 16 and 19 of the gap adjusters 13 and 14, the groove expanding gap adjuster 13 shown in FIG. 7 pushes up the upper end region 2e of the first die block 2A, The region 2c sandwiched between the slit surface 2a and the gap adjusting groove 11A is deflected toward the slit surface 3a (in the direction of arrow C) to reduce the slit gap dimension d, and to reduce the groove shown in FIG. The gap adjuster 14 pulls down the upper end region 2e of the first die block 2A and deflects the region 2c sandwiched between the slit surface 2a and the gap adjusting groove 11A in the direction away from the slit surface 3a (arrow D direction). The slit gap dimension d is increased. Thus, by adjusting the voltage applied to each of the stacked piezoelectric elements 16 and 19, the slit gap dimension can be made uniform in the coating width direction.

  In the above-described embodiment, the gap adjustment grooves 11 and 11A are provided in the first die block 2 and 2A, and the slit gap dimension variation is adjusted by adjusting the position of the slit surface 2a. However, the present invention is not limited to this configuration, and the second die blocks 3 and 3A may be provided with gap adjusting grooves 11 and 11A to adjust the position of the slit surface 3a. It is good also as a structure which provides the groove | channels 11 and 11A for gap adjustment in both 2, 2A and the 2nd die blocks 3 and 3A, and adjusts the position of the slit surfaces 2a and 3a together. If the positions of both the slit surfaces 2a and 3a can be adjusted, there is an advantage that more precise adjustment is possible. Further, the above-described embodiment is for explaining the present invention, and does not limit the present invention. It goes without saying that the present invention can be variously modified within the scope of the claims.

  The die head of the present invention is used to apply a coating solution to a running web (coating object) and to a plate or sheet (coating object) placed on a surface plate. It can be used for any application for applying a working fluid. In addition, since the die head of the present invention can be precisely coated, it has a thickness with respect to an object to be coated in a color filter manufacturing process, an organic EL element manufacturing process, a fuel cell manufacturing process, a photomask manufacturing process, and the like. Although it is preferable to use it for the coating apparatus for forming a coating film with little unevenness, you may use for not only this but the application | coating of other arbitrary uses.

1 is a schematic perspective view showing a part of a die head according to a preferred embodiment of the present invention in section. Schematic plan view of the die head shown in FIG. 2 is a schematic cross-sectional view taken along line AA in FIG. 3A is a schematic cross-sectional view showing a gap adjusting groove forming region of the first die block of the die head shown in FIG. 3, and FIG. 3B is a schematic side view of a groove expanding gap adjusting tool before being attached to the gap adjusting groove. BB schematic cross-sectional view of FIG. 5A is a schematic cross-sectional view showing a gap adjusting groove forming region of the die block of the die head shown in FIG. 5, and FIG. 5B is a schematic side view of the groove reducing gap adjusting tool before being attached to the gap adjusting groove. The schematic sectional drawing of the part which attached the gap adjustment tool for groove expansion of the die head which concerns on other embodiment of this invention. 7A is a schematic cross-sectional view showing a gap adjusting groove forming region of the first die block of the die head 1A shown in FIG. 7, and FIG. 7B is a schematic side view of the groove expanding gap adjusting tool before being attached to the gap adjusting groove. Figure Schematic cross-sectional view of the same die head as in FIG. 9A is a schematic cross-sectional view showing a gap adjusting groove forming region of the first die block of the die head shown in FIG. 9, and FIG. 9B is a schematic side view of the groove reducing gap adjusting tool before being attached to the gap adjusting groove.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 1A Die head 2, 2A 1st die block 3, 3A 2nd die block 2a, 3a Slit surface 2b, 3b Matching surface 2c Area | region sandwiched by slit surface and gap adjustment groove 4 Slit gap 5 Manifold 6 Fastening means ( bolt)
7 End Plate 11, 11A Gap Adjustment Groove 13 Groove Expansion Gap Adjustment Tool 14 Groove Reduction Gap Adjustment Tool 15 Guide Groove 16, 19 Multilayer Piezoelectric Element 17 Enlargement Mounting Jig 17a Locking Section 20 Reduction Mounting Jig 20a Locking part 25 Control unit

Claims (6)

  A gap adjusting groove formed in parallel with the two slit surfaces disposed opposite to each other so as to form a slit gap for discharging the coating liquid, and behind at least one slit surface, A gap adjusting groove capable of changing a dimension of the slit gap by bending a region sandwiched between the slit surface and the gap adjusting groove by expanding or reducing the width, and the gap adjusting groove in the coating width direction. It is attached in a form in which the attachment position can be adjusted, and a groove adjustment gap adjusting tool for expanding the groove width of the gap adjustment groove, and in the form in which the attachment position in the application width direction can be adjusted in the gap adjustment groove. A stack which is attached and has a groove reducing gap adjusting tool for reducing the groove width of the gap adjusting groove, and the groove expanding gap adjusting tool is extended by applying a voltage. An enlargement mounting jig having a piezoelectric element and a latching part that is attached to both ends of the multilayer piezoelectric element and is attached to a side surface of the gap adjusting groove at a distal end in the extending direction of the multilayer piezoelectric element. The groove-reducing gap adjusting tool is attached to both ends of the laminated piezoelectric element that expands when a voltage is applied, and the gap adjusting groove is formed on both sides of the laminated piezoelectric element in a direction perpendicular to the extending direction. A reduction mounting jig having a locking portion for mounting on a side surface is provided, and the reduction mounting jig has a structure in which the interval between the locking portions on both sides is reduced by the extension of the laminated piezoelectric element. Die head characterized by   A guide groove having a cross-sectional shape that is wider than the opening is formed on a side surface of the gap adjusting groove so as to extend in the longitudinal direction of the gap adjusting groove. 2. The die head according to claim 1, wherein the locking portion of the groove reducing gap adjusting tool has a shape including an enlarged head that can move in the guide groove but cannot pass through the opening. .   3. The die head according to claim 1, wherein the gap adjusting groove is formed so that a groove width direction thereof is perpendicular to the slit surface.   3. The die head according to claim 1, wherein the gap adjusting groove is formed so that a groove width direction thereof is parallel to the slit surface.   5. A method for adjusting the size of a slit gap of a die head according to claim 1, wherein the slit gap size is applied without operating the groove expanding gap adjusting tool and the groove reducing gap adjusting tool. The distribution in the width direction is measured, and in the gap adjusting groove, a groove adjusting gap adjusting tool is located in an area where the slit gap dimension is to be reduced, and a groove reducing gap adjusting tool is located in an area where the slit gap dimension is to be enlarged. Next, a voltage is applied to the laminated piezoelectric element provided in the groove enlarging gap adjusting tool and the groove reducing gap adjusting tool to partially expand and reduce the groove width of the gap adjusting groove. A slit gap adjusting method comprising adjusting a gap dimension.   By adjusting the voltage applied to the laminated piezoelectric element provided in the groove expanding gap adjusting tool and the groove reducing gap adjusting tool, the amount of expansion and reduction of the groove width of the gap adjusting groove is adjusted, and the slit is adjusted. 6. The slit gap adjusting method according to claim 5, wherein the gap dimension is adjusted.

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