JPH09271705A - Coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To limit the variation of coating film thickness within a minute range. SOLUTION: While a nozzle 20 is moved along a substrate W, a coating liquid is discharged from a slit-shaped discharge port thereof to form a coating film on the substrate W. The opening width of the the discharge port of the nozzle 20 is adjusted by displacing one opposite wall 21 in the opposite direction to the other opposite wall 22. A measuring head 41 restrained on a moving body 222 moving on a guide 221 installed in the nozzle 20 is moved in the width direction of the substrate W to measure the coating film thickness. By using the measured results, the opening width of the discharge port of the nozzle 20 is adjusted to limit the coating film thickness to a fixed range.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating apparatus for forming a coating film such as a photoresist solution on various substrates such as semiconductor wafers and glass substrates for liquid crystal displays.

[0002]

2. Description of the Related Art Conventionally, as shown in FIG. 10, a coating apparatus of this type conventionally has a stage 101 for vacuum-adsorbing a substrate W and a slit-like ejection extending on the stage 101 while moving along the substrate W. The nozzle 102 having an outlet is provided, and the coating film F is formed on the substrate W by moving the nozzle 102 at a constant speed while ejecting the coating liquid from the slit-shaped ejection port.
In this case, the thickness of the coating film F (hereinafter referred to as the coating film thickness) is proportional to the discharge amount of the coating liquid and inversely proportional to the moving speed of the nozzle 102. Therefore, the width of the ejection port of the nozzle 102 is adjusted in advance after the coating film is formed on the substrate W in a trial so that the coating film thickness falls within a certain range, and the nozzle 102 and the coating liquid are kept at a certain temperature. The coating liquid is discharged from the discharge port of the nozzle 102 at a constant discharge pressure while being held at.

[0003]

In the above coating apparatus,
Since the nozzle 102 and the coating liquid are kept at a constant temperature, the coating film can be formed with a relatively stable thickness even with changes in the outside air temperature, etc., but the fluctuation of the coating film thickness is, for example, several μm. If an attempt is made to adjust the value so that it falls within a minute range such as tens of μm, the adjustment is not always easy due to unavoidable fluctuations other than temperature such as the moving speed of the nozzle 102, the viscosity of the coating liquid, the discharge pressure, and the like. There is a problem.

The present invention has been made in view of the above problems, and provides a coating apparatus capable of keeping the fluctuation of the coating film thickness within a minute range.

[0005]

The present invention is a coating apparatus for forming a coating film on a substrate, which has a substrate holding means for holding the substrate and a slit-shaped discharge port for discharging the coating liquid. A coating liquid supply unit, a drive unit that relatively moves the substrate holding unit and the coating liquid supply unit so that the surface of the substrate and the discharge port relatively move, and are formed on the substrate. Based on the measurement result of the coating film thickness by the coating film thickness measuring means for measuring the coating film thickness and the film thickness measuring means,
An opening width adjusting means for adjusting the opening width of the discharge port is provided (Claim 1).

In the present invention having the above-mentioned structure, the driving means drives the substrate holding means and the coating means so that the surface of the substrate held by the substrate holding means and the slit-shaped ejection port of the coating liquid supply means move relatively to each other. While relatively moving the liquid supply means, the coating liquid is discharged from the discharge port to form a coating film on the substrate. Then, the film thickness measuring means measures the coating film thickness formed on the substrate, and the opening width adjusting means adjusts the opening width of the ejection port based on the measurement result.

The present invention also provides the above coating apparatus,
A guide formed on the outer surface of the coating liquid supply means along the longitudinal direction of the discharge port, and a movable body that is provided so as to be movable along the guide and that supports a measurement head included in the film thickness measurement means, A moving body driving means for moving the moving body along the guide is further provided (claim 2).

In the present invention having the above-mentioned structure, the moving body driving means moves the moving body along the guide formed on the outer surface of the coating liquid supply means along the longitudinal direction of the discharge port, and is supported by the moving body. The measuring head measures the coating film thickness formed on the substrate.

The present invention also provides the above coating apparatus,
The discharge port is formed of a facing wall that is displaceable in the facing direction, and the opening width adjusting means applies a displacement force to the facing wall to adjust the opening width of the discharge port (claim 3).

In the present invention having the above structure, the opening width adjusting means adjusts the opening width of the discharge port by applying a displacement force to the opposing wall that forms the discharge port and is displaceable in the opposite direction.

The present invention also provides the above coating apparatus,
The opening width adjusting means is provided in the coating liquid supply means corresponding to a plurality of partition portions along the longitudinal direction of the discharge port, and the partition portions are provided based on the measurement result of the coating film thickness corresponding to the partition portions. The opening width is adjusted for each part (claim 4).

In the present invention having the above structure, the opening width adjusting means determines the opening width of the discharge port for each partition based on the measurement result of the coating film thickness corresponding to the plurality of partitions along the longitudinal direction of the discharge port. Adjust.

[0013]

1 is a perspective view of a coating apparatus according to an embodiment of the present invention. This coating apparatus includes a stage 10 that sucks and holds a substrate W, a nozzle 20 that supplies a transparent or semi-transparent coating liquid such as a photoresist liquid onto the substrate W that is sucked and held by the stage 10, and the nozzle 20. A nozzle moving unit 30 that moves along the substrate W and a film thickness meter 40 that measures the thickness of the coating film formed by supplying the coating liquid on the substrate W are provided.

The stage 10 has a plurality of through holes 12 penetrating in the vertical direction formed in the mounting portion 11 of the substrate W in the central portion, and the substrate W mounted on the mounting portion 11 has the through holes 12 formed therein.
By vacuum suction from the lower surface side through the mounting portion 11
It's meant to be kept on top. Also, stage 1
Rails 13 and 14 for guides on which a support body of the nozzle moving means 30 described later slides are formed at both end portions of 0. The substrate W is placed on the placing portion 11 of the stage 10 by a transfer robot (not shown).

The nozzle 20 is constructed as shown in FIGS. 2 is a perspective view of the nozzle 20 viewed from the side opposite to FIG. 1, FIG. 3 is a side sectional view thereof, and FIG. 4 is a bottom view thereof. It should be noted that the illustration of the components related to the film thickness meter 40 is omitted. That is, the nozzle 20
Is composed of a pair of opposed walls 21 and 22 that are long in the lateral direction but abutted against each other, has a supply passage 23 for the coating liquid inside, and has a slit-shaped discharge port 24 connected to the supply passage 23 on the lower surface. It is something that is done. The distance between the pair of opposing walls 21 and 22 forming the discharge port 24, that is, the width of the discharge port 24 is set to about 0.1 mm, for example. The opposing wall 22 has a required thickness so that the supply passage 23 is formed, while the opposing wall 21 is formed of a member thinner than the opposing wall 22, and a lateral direction formed at a proper position in the vertical direction intermediate portion of the outer surface thereof. The groove 211a forms a thin portion 211 in the lateral direction from one side portion to the other side portion.

The thin portion 211 formed in the lateral direction is
It functions as a bending fulcrum of the facing wall 21, and the facing wall 2
The opposing wall 21 can be elastically deformed by applying an appropriate force to the lower end portion of 1 in the opposing direction of the opposing walls 21 and 22. In addition, on the outer surface side of the lower end portion of the opposing wall 21, a plurality of displacement forces (6 in this embodiment) that apply displacement force to the opposing wall 21 are provided.
The individual piezo actuators 212 are arranged at predetermined intervals along the longitudinal direction of the ejection port 24. The piezo actuator 212 has a main body 212 a fixed to an L-shaped support 213 having one end attached to the upper end of the facing wall 21, and each tip 212 b attached to the lower end of the facing wall 21. . By disposing the plurality of piezo actuators 212 on the facing wall 21 in this way, the discharge port 24 is partitioned into a plurality of partition portions along the longitudinal direction, and corresponds to each piezo actuator 212 of the facing wall 21. By displacing the portion to be opened, the opening width of the ejection port 24 can be adjusted for each partition.

In this piezo actuator 212, when a drive voltage is applied to a piezoelectric element (not shown), the tip portion 212b of the piezo actuator 212 expands and contracts in the direction of the arrow shown in FIG. 3 at a rate according to the level of the drive voltage. According to the expansion / contraction ratio, the opposing wall 21 is displaced with the thin portion 211 as a fulcrum, and the distance between the opposing wall 22 and the width of the discharge port 24 is changed. That is, the piezo actuator 212 constitutes an opening width adjusting means for adjusting the opening width of the ejection port 24 of the nozzle 20.

In this embodiment, the opposing wall 2
1 is positioned on the front surface side in the moving direction of the nozzle 20 with respect to the substrate W, and the facing wall 22 is positioned on the rear surface side in the moving direction, so that the measuring head 41 of the film thickness meter 40 described later is positioned on the facing wall 22 side. It can be installed.

A feed pipe 25 is attached to the center of the upper surface of the nozzle 20.
A coating liquid such as a photoresist is fed into the nozzle 20 from the coating liquid supply tank (not shown) via the via at a constant pressure.

Further, as shown in FIG. 1, a linear guide 221 extending in the longitudinal direction of the discharge port 24 is formed on the outer surface of the facing wall 22 from one side portion to the other side portion. This guide 221 has a moving body 2 moving above it.
22 is arranged so as not to be detachable. In addition, a pair of pulleys 223, 22 are provided above the both ends of the guide 221 of the nozzle 20.
4 is attached, and a stepping motor 225 that constitutes a drive unit that moves the moving body 222 is attached to the central portion of the upper surface of the nozzle 20.

A winding wheel 226 is attached to a rotary shaft 225a of the stepping motor 225, and both ends of a wire 227 wound around the winding wheel 226 are provided on both sides of the moving body 222 via the pulleys 223 and 224. It is locked to the part. As a result, when the rotating shaft 225a of the stepping motor 225 rotates, the winding wheel 226 winds up one side of the wire 227 and unwinds the other side, whereby the moving body 222 guides the moving body 222 in accordance with the rotating direction of the rotating shaft 225a.
Move left and right along 21. In the moving body 222,
The measurement head 41 of the film thickness meter 40 is attached in a state of facing the substrate W, and the moving body 222 moves from one side portion of the guide 221 to the other side portion thereof, so that the coating film thickness on the substrate W becomes a nozzle. The measurement can be performed along the width direction of the substrate W, which is a direction orthogonal to the moving direction of 20.

The nozzle moving means 30 fixedly supports the fixed shafts 26 and 27 projecting from the both ends of the nozzle 20 in the width direction, and the rails 13 and 14 at both end parts of the stage 10.
The support bodies 31 and 32 on the left and right sides that move up, the support bodies 31 and 32 are integrally connected, and the connection body 33 disposed via the lower surface side of the stage 10 and the connection body 33 are provided. A screw shaft 34 screwed into a female screw formed in the central portion in the same direction as the rails 13 and 14 and a stepping motor 35 connected to the screw shaft 34 are provided. As a result, when the stepping motor 35 is rotationally driven and the screw shaft 34 is rotated, the connecting body 33 is moved, so that the supporting bodies 31 and 32 move to the rail 13 of the stage 10.
Sliding on 14, the nozzle 20 moves along the surface of the substrate W.

The film thickness meter 40 is attached to a base (not shown) of the coating device, and irradiates light from a light source onto a transparent or semitransparent coating film surface formed on the substrate W by the nozzle 20. The coating film thickness is measured by detecting the spectral reflection spectrum of the interference light of the reflected light from the surface of the coating film and the reflected light from the interface between the surface of the substrate W and the coating film.
That is, the film thickness meter 40 reflects the light of the light source 42 by the half mirror 43 and irradiates it onto the substrate W via the mirror-type imaging element 44 and the optical fiber 45, as shown in the schematic configuration of FIG. To do. This irradiation light is applied to the surface of the coating film and the substrate W.
The light is reflected on the surface, and these reflected lights are condensed on the mirror type image forming element 44 via the optical fiber 45, then pass through the half mirror 43 and enter the spectroscope 46.

Here, the tip of the optical fiber 45 becomes a measuring head 41, and this measuring head 41 is locked by the moving body 222 and moves in the width direction of the substrate W together with the moving body 222. The coating thickness of W in the width direction is continuously measured. The signal detected by the spectroscope 46 is given to the microcomputer 47 which calculates the coating film thickness, and the microcomputer 47 calculates the coating film thickness from the detected spectral reflection spectrum of the coating film based on a predetermined calculation formula. The calculation result is sent to the control unit 50 described later as film thickness data.

FIG. 6 is a block diagram showing the main control configuration of the coating apparatus constructed as described above. Control unit 50
Is composed of a CPU 51 that performs a predetermined arithmetic process, a ROM 52 that stores a predetermined program, a RAM 53 that temporarily stores processing data, and the like, and controls the overall operation of the coating apparatus according to the predetermined program.

That is, the CPU 51 operates the stepping motor 35 for driving the nozzle moving means 30 via the stepping motor drive circuit 35a when a predetermined signal is input from the start switch S, the film thickness meter 40 and the like. The operation of the stepping motor 225 that moves the moving body 222 via the stepping motor drive circuit 225b and the operation of the piezo actuator 212 that adjusts the opening width of the discharge port 24 of the nozzle 20 are controlled via the piezo actuator drive circuit 212c. . The piezo actuator drive circuit 212c can supply a variable voltage within a fixed range to each piezo actuator 212.

Further, the CPU 51 controls a transfer robot (not shown) which delivers the substrate W via the transfer robot drive circuit, and transfers the substrate W to the stage 1 via the vacuum device drive circuit.
A vacuum device (not shown) that is held by suction on 0 is controlled.

The coating apparatus constructed as described above operates as follows. First, based on a command from the control unit 50, when a substrate W is placed on the stage 10 by a transfer robot (not shown), the substrate W is suction-held on the stage 10 by a vacuum device (not shown), and the nozzle 20 is a nozzle. When the moving means 30 is driven, the moving means 30 moves at a constant speed in the arrow direction from the front end position in FIG. Simultaneously with the start of the movement of the nozzle 20, the coating liquid is supplied into the nozzle 20 from a coating liquid tank (not shown) at a constant pressure, and the nozzle 20 discharges the coating liquid from the discharge port 24 onto the substrate W at a constant discharge pressure. While moving, move to the end position.

The above-mentioned coating liquid is kept at a temperature within a certain range by a heater or the like provided in the coating liquid tank, and the nozzle 20 is also kept at a temperature within a certain range like the coating liquid. Is desirable. To maintain the temperature of the nozzle 20, it is desirable that the heater attached inside is controlled by a control circuit. However, even if such a heater is not provided, the temperature of the installation location of the coating device is kept constant. It can also be realized by doing so.

Simultaneously with the start of the movement of the nozzle 20, the stepping motor 225 attached to the nozzle 20 is rotationally driven and the moving body 222 moves on the guide 221 at a constant speed from the left end to the right end of the substrate W in FIG. To do. Due to the movement of the moving body 222, the measurement head 41 moves on the coating film immediately after the coating liquid is discharged from the discharge port 24 of the nozzle 20 and formed, along the width direction orthogonal to the moving direction of the nozzle 20, The coating film thickness is continuously measured by the film thickness meter 40. When the moving body 222 moves to the right end of the substrate W,
The stepping motor 225 is rotationally driven in the opposite direction, and the moving body 222 moves from the right end of the substrate W to the left end. As a result, the measuring head 41 moves on the coating film along the width direction of the substrate W in the same manner as described above, and the coating film thickness is continuously measured by the film thickness meter 40. The film thickness meter 40 sequentially sends the measured film thickness value to the control unit 50. The CPU 51 manages the film thickness value and the measurement position obtained from the movement signal of the stepping motor 225 in association with each other as film thickness data.

The moving body 222 reciprocates between the right end and the left end of the substrate W until the nozzle 20 moves from the start end position to the end position on the substrate W and the formation of the coating film is completed.
As a result, the measuring head 41 moves on the coating film along a locus as shown in FIG. 7 to continuously measure the coating film thickness. In FIG. 7, the measurement head 41 makes five reciprocations on the substrate W, and the control unit 50 causes the CPU 51 to make one reciprocation for each partition unit of the ejection port 24 of the nozzle 20 in which the piezo actuator 212 is arranged. The average value of the film thickness values is calculated, and the corresponding piezoelectric actuator 2 is calculated from this average value.
12 drive levels are controlled.

That is, in the section where the coating film thickness is thicker than the target value, the facing wall 21 of the nozzle 20 is replaced by the facing wall 22.
The piezo actuator 212 in the partition is driven so that the discharge port 24 is bent so that the opening width of the discharge port 24 becomes narrower. Further, for a partition portion having a coating film thickness smaller than the target value, the piezo actuator 212 of the partition portion is driven so that the facing wall 21 of the nozzle 20 is separated from the facing wall 22 and the opening width of the discharge port 24 becomes wider. To do.

In this control, the difference between the film thickness value measured by the film thickness meter 40 and the target value is calculated, and the discharge port 24 is corresponding to the difference.
This is performed by outputting a voltage of a level necessary to adjust the aperture of the piezo actuator drive circuit 212c and applying this voltage to the piezo actuator 212. By repeating such control of the piezo actuator 212 a plurality of times, it becomes possible to keep the coating film thickness in the width direction of the substrate W within a certain range, and as a result, it is uniform in the moving direction of the nozzle 20. It becomes possible to form the coating film F having a thickness. The control of the piezo actuator 212 may be performed not based on the film thickness value for each reciprocation of the measurement head 41, but on the basis of the film thickness value for each reciprocation or based on the film thickness value for each reciprocation. You can choose to do so.

As described above, in order to keep the coating film thickness within a certain range, the adjustment may be completed with only one substrate W due to various factors of the variation of the coating film thickness,
The adjustment may not be completed unless a plurality of substrates W are used. Once the adjustment is completed, it is usually possible to apply a fixed number of substrates W with the set value. The substrate W on which the coating film is formed is transferred to the next processing step by a transfer robot (not shown).

In the above embodiment, the nozzle 2
The adjustment of the opening width of the discharge port 24 of 0 is performed by driving the piezo actuator 212.
Also, the configuration can be performed as shown in FIG. 8 is a view corresponding to FIG. 3, and FIG. 9 is A- of FIG.
FIG. 3 is a sectional view taken along line A. That is, a thin portion 214 similar to the lateral thin portion 211 shown in FIG. 3 which is a bending fulcrum of the facing wall 21 is formed in the vertical middle portion of the outer surface of the facing wall 21 constituting the nozzle 20 from one side to the other. It is formed over the side portion. In addition, on the lower end portion side of the thin portion 214, a plurality of protrusions (in this embodiment, 6
Individual projections 215 are formed along the thin portion 214 from one side to the other side. This protrusion 215
A thread groove 215a is formed at each of the tip ends of the. That is, by the plurality of projecting bodies 215, a plurality of partition portions are set corresponding to each projecting body 215 along the longitudinal direction of the discharge port 24 of the facing wall 21, and the facing wall 21 is displaced for each partition portion. It is possible.

Further, at the upper end of the opposing wall 21, the horizontal portion 21
L-shaped support 216 having 6a and hanging part 216b
Is attached to each of the protrusions 215 on the horizontal portion 216a.
Corresponding to, a plurality of stepping motors 217 are attached with their rotation shafts 217a facing downward. A male screw 217b is integrally fitted to each rotary shaft 217a, and this male screw 217b is screwed into the screw groove 215a of the projecting body 215. As a result, when the stepping motor 217 rotates, the projecting body 215 bends in the vertical direction with the thin portion 214 as a fulcrum in accordance with the rotation direction, whereby the opening width of the discharge port 24 is adjusted.

That is, when the stepping motor 217 is rotated in the direction in which the male screw 217b is pulled out from the thread groove 215a, the support body 216 is not displaced, so that the projecting body 215 moves downward with the thin portion 214 as a fulcrum. Be bent. Then, the lower end of the facing wall 21 is displaced so as to approach the facing wall 22, and the opening width of the discharge port 24 becomes narrower. Further, the stepping motor 217 has a male screw 2
When 17b is rotated in a direction to be inserted into the screw groove 215a, the protrusion 215 is bent upward with the thin portion 214 as a fulcrum. Then, the lower end portion of the facing wall 21 is located at
The discharge port 24 is displaced so as to be separated from the nozzle 2 and the opening width of the discharge port 24 is increased.

In this case, if the projecting length of the projecting body 215 is set to be sufficiently longer than the length from the thin portion 214 of the facing wall 21 to the discharge port 24, the projecting body 215 is formed.
The displacement amount between the bending fulcrum position of the facing wall 21 and the discharge port 24 position is smaller than the displacement amount between the screw groove 215a position and the bending fulcrum position position, and the opening width of the discharge port 24 can be finely adjusted. It will be easy to do.

Further, a displacement sensor 218 is attached to the hanging portion 216b of the support 216, and the discharge port 2
The opening width of 4 can be measured. That is,
The displacement sensor 218 is attached to the hanging portion 216b of the support body 216 in a state in which a tip portion 218b attached to the main body portion 218a so as to move forward and backward by an elastic body such as a spring is in contact with the facing wall 21. Tip 218b
The amount of displacement of the opposing wall 21 can be detected according to the amount of movement. The stepping motor 217 is a film thickness meter 4
Based on the measurement result of 0, the rotation is controlled according to the opening width of the ejection port 24 detected by the displacement sensor 218.

Further, the opening width of the discharge port 24 of the nozzle 20 is adjusted by replacing the piezo actuator 212 shown in FIG. 3 with a stepping motor 217 shown in FIG. 8 at the position of the piezo actuator 212. It is also possible to directly displace the lower end portion of the facing wall 21 with the same configuration as the displacement of the protrusion 215 shown in FIG.

In the above embodiment, the coating film F is formed on the substrate W by moving the nozzle 20 with respect to the substrate W. However, the nozzle 20 is fixed and the substrate W is fixed. Alternatively, the nozzle 20 and the substrate W may be moved in opposite directions. The point is that the ejection port 24 of the nozzle 20 and the surface of the substrate W may be relatively moved.

In the above embodiment, the film thickness meter 4
0 is configured to measure the coating film thickness based on the spectral reflection spectrum, but when the coating film F is not transparent or translucent, it is configured based on another measurement principle such as that using ultrasonic waves. It may have been done.

If the film thickness meter 40 can be miniaturized, not only the measuring head 41 is moved along the ejection port 24, but the entire film thickness meter 40 is moved along the ejection port 24. You can also do it. The measuring head 4
In order to move 1 or the like along the discharge port 24, the moving body 222 driven by the wire 227 as in the above embodiment.
It is also possible to directly attach the measuring head 41 or the like to a moving means such as a belt driven by the stepping motor 225 without using.

The measuring head 41 and the like are attached to a moving body 222 that moves along a guide 221 formed integrally with the nozzle 20, and the moving body 222 is rotated by a stepping motor 225 attached to the nozzle 20.
Although it moves together with the nozzle 20, a moving mechanism including a moving body 222 and the like may be provided at another location independent of the nozzle 20, and the moving mechanism may perform the movement.

Further, as long as the film thickness meter 40 is constructed so that the coating film thickness can be measured along the longitudinal direction of the ejection port 24 even with the measuring head 41 fixed, the measuring head 41, etc. Need not be moved along the longitudinal direction of the discharge port 24.

[0046]

As described above, according to the present invention,
While the coating liquid is discharged from the discharge port to form the coating film on the substrate, the film thickness measuring means measures the coating film thickness formed on the substrate, and the opening width of the discharge port is adjusted based on the measurement result. Therefore, the opening width of the discharge port can be automatically adjusted according to the measurement result of the coating film thickness to adjust the discharge amount of the coating liquid from the discharge port. It can fit within the range.

Further, according to the present invention, the coating formed on the substrate while the moving body driving means moves the moving body supporting the measuring head along the guide formed along the longitudinal direction of the ejection port. Since the film thickness is measured, it is possible to measure the coating film thickness along the longitudinal direction of the ejection port, and as a result, the variation of the coating film thickness is contained within a minute range along the longitudinal direction of the ejection port. be able to.

Further, according to the present invention, since the displacement force is applied to the opposing wall which can be displaced in the opposite direction in order to adjust the opening width of the discharge port, the opening width of the discharge port can be easily adjusted. The fluctuation of the film thickness can be kept within a minute range.

Further, according to the present invention, the opening width adjusting means determines the opening width of the discharge port for each partition based on the measurement result of the coating film thickness corresponding to the plurality of partitions along the longitudinal direction of the discharge port. Is adjusted, it is possible to keep the variation of the coating film thickness within a finer range along the longitudinal direction of the ejection port.

[Brief description of drawings]

FIG. 1 is a perspective view of a coating device according to an embodiment of the present invention.

2 is a perspective view of a nozzle in the coating apparatus of FIG. 1, and is a view seen from the side opposite to FIG.

FIG. 3 is a side sectional view of a main part of the nozzle shown in FIG.

FIG. 4 is a bottom view of the nozzle shown in FIG.

FIG. 5 is a diagram for explaining a configuration of a film thickness meter.

FIG. 6 is a block diagram showing a control configuration of the coating apparatus of the present invention.

FIG. 7 is a diagram showing a movement trajectory of a measurement head of a film thickness meter on a substrate.

FIG. 8 is a side sectional view of an essential part for explaining the configuration of a modified example of the nozzle.

9 is a cross-sectional view taken along the line AA of the nozzle shown in FIG.

FIG. 10 is a perspective view of a conventional coating device.

[Explanation of symbols]

 10 Stage (Substrate Holding Means) 11 Placement Part 12 Through Hole 20 Nozzle (Coating Liquid Supply Means) 21, 22 Opposing Wall 24 Discharge Port 30 Nozzle Moving Means (Drive Means) 40 Film Thickness Meter (Film Thickness Measuring Means) 41 Measurement Head 50 Control unit 212 Piezoactuator 215 Projection body 217 Stepping motor 221 Guide 222 Moving body 225 Stepping motor (moving body driving means)

Claims (4)

[Claims] 1. A coating apparatus for forming a coating film on a substrate, comprising: substrate holding means for holding the substrate; coating liquid supply means having a slit-shaped discharge port for discharging the coating liquid; So that the surface and the discharge port move relative to each other,
Driving means for relatively moving the substrate holding means and the coating liquid supply means, a film thickness measuring means for measuring a coating film thickness formed on the substrate, and a coating film thickness measurement by the film thickness measuring means. An opening width adjusting means for adjusting the opening width of the discharge port based on the result, and a coating apparatus. 2. The coating apparatus according to claim 1, wherein the guide is formed on the outer surface of the coating liquid supply means along the longitudinal direction of the discharge port, and the guide is movable along the guide. A coating device further comprising: a moving body that supports a measuring head of the film thickness measuring means; and a moving body driving means that moves the moving body along the guide. 3. The coating apparatus according to claim 1, wherein the discharge port is formed by a facing wall that is displaceable in a facing direction, and the opening width adjusting means applies a displacement force to the facing wall. A coating device, wherein the opening width of the discharge port is adjusted. 4. The coating apparatus according to claim 3, wherein the opening width adjusting means is provided in the coating liquid supplying means in correspondence with a plurality of partition portions along the longitudinal direction of the discharge port, Based on the measurement result of the coating film thickness corresponding to the division,
An applicator characterized in that the opening width is adjusted for each of the compartments.