JPH09276772A - Coating solution feeder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily and finely adjust the width of the opening of the supply port of a coating soln. feeder. SOLUTION: This feeder is formed from a couple of wall members 11 and 12 opposed to each other to form a gap constituting a supply port 14, an arm 111 projecting from the outer face of the member 11, displaced with a fulcrum formed in the member 11 as the center and with the supply port side of the member 11 displaced in the opposite direction to the member 12 with the fulcrum as the center and a means to impart a displacing power to the arm 111. The distance between the point of action of the means for imparting a displacing power to the arm 111 and the fulcrum is made larger than that between the supply port and fulcrum.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to coating in which the opening width of a slit-shaped supply port for supplying a coating liquid such as a photoresist liquid can be adjusted on various substrates such as a semiconductor wafer and a glass substrate of a liquid crystal display. The present invention relates to a liquid supply device.

[0002]

2. Description of the Related Art A conventional coating liquid supply apparatus 100 is shown in FIG.
As shown in FIG. 2, the coating liquid supply path 101 is provided inside, and a pair of opposed wall members 103 are formed on the lower surface so that slit-shaped supply ports 102 connected to the supply path 101 are opened.
A piezo actuator 105 that abuts 104 and adjusts the opening width of the supply port 102 by displacing the opposing wall member 103 in the direction opposite to the other opposing wall member 104 on the side of the supply port 102 on the outer surface of the one opposing wall member 103. Are arranged.

In the piezo actuator 105, the main body 105a is fixed to an L-shaped support 106 having one end attached to the upper end of the facing wall member 103, and the tip 105b is the lower end of the facing wall 103. When a drive voltage is applied to the internal piezo element, the tip 105b expands and contracts in the direction of the arrow at a rate according to the level of the drive voltage, and a pair of opposing walls are formed at the lower end of the opposing wall member 103. A force is applied to the members 103 and 104 in the opposing direction.

A thin portion 108 is formed by providing a lateral groove 107 extending from one side portion to the other side portion near the upper end of one facing wall member 103, and the facing wall is formed by the piezo actuator 105. When a force is applied to the lower end portion of the member 103 in the opposing direction of the pair of opposing wall members 103 and 104, the thin portion 108 serves as a fulcrum and the lower end portion is displaced in the direction of the applied force, and the supply port The opening width of 102 can be adjusted.

A coating liquid supply device 1 configured as described above.
00 indicates the stepping motor 10 as shown in FIG.
The feed pipe 1 mounted on the central portion of the upper surface of the substrate W, which is supported by the moving means 110 that is driven by the rotation of 9 and is moved on the substrate W adsorbed and held on the stage 120 at a constant speed.
A coating liquid such as a photoresist liquid, which has been fed in through the coating liquid 30, is supplied from a supply port 102 to form a coating film F on the substrate W.
To form

Since the film thickness of the coating film F varies due to various factors such as the temperature of the coating liquid and the supply pressure, the film thickness is appropriately measured, and the piezo actuator 105 is measured according to the measurement result.
The opening width of the supply port 102 is adjusted by changing the level of the drive voltage applied to the film, thereby controlling the supply amount of the coating liquid so that the film thickness falls within a certain range.

[0007]

In the above coating liquid supply apparatus 100, since the opposing wall member 103 is directly displaced by the piezoelectric actuator 105 to adjust the opening width of the supply port 102, the piezoelectric actuator 10
5 is the same as the displacement amount of the tip portion 105b of the opposite wall member 10
The displacement amount is 3. Therefore, there is a problem that it is difficult to give a minute displacement to the facing wall member 103 and finely adjust the opening width of the supply port 102.

The present invention has been made in view of the above problems, and provides a coating liquid supply apparatus capable of easily finely adjusting the opening width of the supply port.

[0009]

SUMMARY OF THE INVENTION The present invention is a coating liquid supply device in which the opening width of a slit-shaped supply port for supplying a coating liquid is adjustable, and a gap is provided so as to configure the supply port. First and second opposing wall members that are arranged to face each other,
The first opposing wall member is displaced around a fulcrum formed on the first opposing wall member, and the first opposing wall member is displaced relative to the second opposing wall member about the fulcrum according to the displacement. An opening width adjusting part and a displacement force applying means for applying a displacement force to the opening width adjusting part are provided, and the distance between the action point by the displacement force applying means and the fulcrum is between the supply port and the fulcrum. The distance is set to be longer than the distance (claim 1).

According to the above structure, when the displacement force applying means applies the displacement force to the opening width adjusting portion, the displacement amount of the opening width adjusting portion is smaller than the displacement amount at the point of action by the displacement force applying means. Then, the first opposing wall member is displaced to finely adjust the opening width of the supply port.

Further, according to the present invention, in the coating liquid supply apparatus, the opening width adjusting portion is formed on the outer surface of the first opposing wall member and projects to the side opposite to the second opposing wall member side. It is composed of an arm, and the displacement force applying means applies a force to the arm in a direction intersecting with the protruding direction of the arm (claim 2).

According to the above construction, the arm formed on the outer surface of the first opposing wall member is displaced by the displacement force applying means, and the displacement of the arm displaces the first opposing wall member to open the supply port. The width is finely adjusted.

Further, according to the present invention, in the coating liquid supply device, the arm is formed with a first screw, and the displacement force applying means is a second screw screwed with the first screw. And rotate the second screw to rotate the first screw and the second screw.
And a rotating means for changing the length of fitting with the screw (claim 3).

According to the above structure, the displacement amount of the arm is adjusted by changing the fitting length of the first screw and the second screw by the rotating means, whereby the first opposing wall member is adjusted. It is displaced and the opening width of the supply port is finely adjusted.

According to the present invention, in the coating liquid supply apparatus, the first opposing wall member is located at a position opposite to the second opposing wall member side along the longitudinal direction of the supply port. A thin portion is formed, and the fulcrum is formed in the thin portion (claim 4).

According to the above construction, the thin portion and the first portion
When the arm is displaced about the fulcrum, the first opposing wall member is displaced about the fulcrum and the opening width of the supply port is finely adjusted.

Further, according to the present invention, in the coating liquid supply device, a plurality of the arms are formed along the longitudinal direction of the supply port, and the displacement force applying means is provided corresponding to each arm. There is (claim 5).

According to the above structure, the opening width of the supply port is adjusted for each partition along the longitudinal direction of the supply port, so that the thickness of the coating film in the width direction of the substrate falls within a certain range.

[0019]

1 is a perspective view of a coating liquid supply apparatus according to an embodiment of the present invention, FIG. 2 is a side sectional view of a main portion thereof, and FIG. 3 is a sectional view taken along the line AA of FIG. In these figures, a coating liquid supply device 10 of the present invention is shown as a pair of opposed wall members 11 and 1 which are made of synthetic resin or the like and are long in the lateral direction.
2 are arranged so as to face each other with a certain interval, and have a coating liquid supply path 13 inside, and a slit-shaped supply port 14 connected to the supply path 13 is opened on the lower surface. It is a thing.

The interval between the pair of opposing wall members 11 and 12 constituting the supply port 14, that is, the width of the supply port 14 is
For example, it is set to about 0.1 mm. Further, the facing wall member 12 has a required thickness capable of forming the supply path 13 with the facing wall member 11, while the facing wall member 11 is formed of a member thinner than the facing wall member 12. Plural (6 in this embodiment) at a position near the lower end of the outer surface
The arm 111 is formed so as to project along the longitudinal direction of the supply port 14 to the side opposite to the opposite wall member 12 side. A female screw (first screw) 111 a is formed at the tip of each arm 111 so as to penetrate the arm 111 in the vertical direction. The supply port 14 is partitioned into a plurality of partition parts by forming the plurality of arms 111 as described above, and the opening width can be adjusted in each partition part within a range of, for example, several μm to ten and several μm. It has become.

Further, the arm 1 is provided on the facing wall member 11.
A thin portion 112 is formed at a position on the side opposite to the supply port 14 of 11 adjacent to the arm 111 along the longitudinal direction of the supply port 14. The thin portion 112 is formed by providing a lateral groove 113 extending from one side portion to the other side portion on the outer surface of the facing wall member 11. This thin part 112
Serves as a fulcrum for displacing the arm 111 and the facing wall member 11. That is, the thin portion 112 is
When a force is applied to the arm 111 in a direction intersecting the protruding direction, the thin portion 112 bends and the arm 111
And the supply port 14 side of the facing wall member 11 corresponds to the displacement of the arm.
It is possible to displace with respect to. Further, the arm 111 has a thin portion 1 on the supply port 14 side of the facing wall member 11.
The opening width adjusting portion is configured to be displaced with respect to the facing wall member 12 around the fulcrum formed on the center 12 and adjust the opening width of the supply port 14.

Further, an L-shaped support 1 having a horizontal portion 114a and a hanging portion 114b at the upper end of the facing wall member 11.
14 is attached to the horizontal portion 114 of the support 114.
A plurality of stepping motors 115 are attached to a corresponding to the respective arms 111 with their rotation shafts 115a facing the arms 111. A male screw (second screw) 115b is coaxially fixed to the tip of each rotating shaft 115a, and this male screw 115b is screwed into a female screw 111a of the arm 111. As a result, the stepping motor 115
When is rotated, the fitting length of the female screw 111a and the male screw 115b is changed in accordance with the rotating direction, whereby the arm 111 is displaced in the vertical direction about the thin portion 113. When the arm 111 is displaced, the supply port 14 side of the opposing wall member 11 is displaced with respect to the opposing wall member 12 according to the displacement, whereby the opening width of the supply port 14 is changed to each arm 1.
It is possible to adjust each partition corresponding to 11.

That is, when the stepping motor 115 rotates in the direction in which the male screw 115b is pulled out from the female screw 111a, the arm 111 is pressed downward,
The thin portion 113 is elastically deformed and the arm 111 is displaced downward. Thereby, the supply port 14 of the facing wall member 11
The side is displaced so as to approach the facing wall member 12, and the opening width of the supply port 14 of the partition corresponding to the arm 111 is narrowed. Further, the stepping motor 115 has the male screw 11
When 5b is rotated in the direction in which the female screw 111a is inserted,
Since the arm 111 is pressed upward, the thin portion 11
3 is elastically deformed and the arm 111 is displaced upward. As a result, the supply port 14 side of the opposing wall member 11 is displaced so as to be separated from the other opposing wall member 12, and the opening width of the supply port 14 of the partition corresponding to the arm 111 is widened.

Incidentally, a female screw 111a formed on the arm 111, a male screw 115b screwed to the female screw 111a, and a stepping motor which is a rotating means for rotating the male screw 115b to change the fitting length of the both. Reference numeral 115 constitutes a displacement force applying means for applying a displacement force to the arm 111. As described above, by arranging the displacement force applying means to change the fitting length of the female screw 111a and the male screw 115b, the rotational movement is converted into the linear movement, and the linear movement amount becomes smaller than the rotational movement amount. Therefore, fine adjustment of the opening width of the supply port 14 can be performed more easily.

As shown in FIG. 4, each arm 111 has a point of action (power point) R of the displacement force imparting means, which is the axial center position of the female screw 111a, on the arm 111 and a thin portion 112 of the opposing wall member 11. The distance L1 from the fulcrum P, which is the bending position, is longer than the distance L2 between the formation point Q of the supply port 14 of the facing wall member 11 (hereinafter referred to as the supply port Q) and the fulcrum P. Is formed. Therefore, compared with the amount of vertical displacement about the fulcrum P at the action point of the arm 111, the amount of displacement in the opposing direction with the opposing wall member 12 about the fulcrum P at the supply port Q of the opposing wall member 11 is greater. The number is reduced, and the fine adjustment of the opening width of the supply port 14 is facilitated.

A displacement sensor 118 is attached to the hanging portion 114b of the support 114, and the supply port 1
The opening width of 4 can be measured. That is,
The displacement sensor 118 has a support body 11 in a state in which a front end portion 118b attached to the main body portion 118a so as to be movable back and forth by an elastic body such as a spring is in contact with the facing wall member 11.
4 is attached to the hanging part 114b, and the tip 11
The amount of displacement of the opposing wall member 11 can be detected by the amount of movement of 8b. Further, a feed pipe 15 is attached to the central portion of the upper surface, and a coating liquid such as a photoresist is fed to the inside through a feeding pipe 15 from a coating liquid supply tank (not shown) at a constant pressure. It has become so.

FIG. 5 is a perspective view of a coating device to which the coating liquid supply device 10 is applied. This coating apparatus is used for the substrate W
The stage 20 for sucking and holding the substrate W, and the coating liquid supply device 10 for supplying a transparent or semi-transparent coating liquid such as a photoresist liquid onto the substrate W sucked and held by the stage 20
It is composed of a moving unit 30 that moves along the upper portion, and a film thickness meter 40 that measures the thickness of the coating film (hereinafter, referred to as coating film thickness) on the substrate W formed by supplying the coating liquid. .

The stage 20 has a plurality of through holes 22 penetrating in the vertical direction formed in the mounting portion 21 of the substrate W in the central portion, and the substrate W mounted on the mounting portion 21 has the through holes 22 formed therein.
By vacuum suction from the lower surface side via
It's meant to be kept on top. Also, stage 2
Supports 3 of the moving means 30 which will be described later are provided at both end portions of 0.
Rails 23 and 24 for guides on which 1 and 32 slide are formed. The substrate W is placed on the placing portion 21 of the stage 20 by a transfer robot (not shown).

The moving means 30 fixedly supports the fixed shafts 16 and 17 projecting from both end portions in the width direction of the coating liquid supply apparatus 10, and also rails 23 and 2 at both end portions of the stage 20.
The support members 31 and 32 on the left and right sides that move on the stage 4 and the support members 31 and 32 are integrally connected, and the stage 20
And a screw shaft 34 screwed into a female screw in the same direction as the rails 23 and 24 bored in the central portion of the connecting member 33, and the connecting member 33 is connected to the screw shaft 34. And a stepping motor 35 which is operated. As a result, when the stepping motor 35 is driven to rotate and the screw shaft 34 rotates, the connecting member 33 moves along the screw shaft 34, so that the supporting members 31 and 32 slide on the rails 23 and 24 of the stage 20. The coating liquid supply device 10 moves along the surface of the substrate W.

The film thickness meter 40 is attached to a base (not shown) of the coating device, and is a transparent or semi-transparent coating film surface formed on the substrate W by the coating liquid supplied from the coating liquid supply device 10. The coating film thickness is measured by irradiating with light from a light source and detecting the spectral reflection spectrum of the interference light between the reflected light from the coating film surface and the reflected light from the substrate W surface.

That is, the film thickness meter 40 reflects the light of the light source 41 by the half mirror 42, as shown in the schematic structure of FIG. 6, and passes through the mirror type image forming element 43 and the optical fiber 44 on the substrate W. To irradiate. This irradiation light is reflected by the surface of the coating film and the surface of the substrate W, and these reflected lights are reflected by the optical fiber 4
After being focused on the mirror-type imaging element 43 via 4, the light passes through the half mirror 42 and enters the spectroscope 45. The signal detected by the spectroscope 45 is given to the microcomputer 46 which calculates the coating film thickness, and the microcomputer 46 calculates the coating film thickness from the detected spectral reflection spectrum of the coating film based on a predetermined calculation formula.
This calculation result is used as film thickness data in the control unit 50 described later.
To be sent.

The tip of the optical fiber 44 constitutes a measuring head 47, and the measuring head 47 moves along the width direction, which is a direction orthogonal to the moving direction of the coating liquid supplying apparatus 10, to obtain a film thickness. The total 40 is capable of continuously measuring the coating film thickness in the width direction of the substrate W. That is, on the outer surface of the opposing wall member 12 of the coating liquid supply device 10, a linear guide 121 extending in the width direction is formed from one side portion to the other side portion. A moving body 122 that moves on the guide 121 is arranged so as not to be detachable.
Further, a pair of pulleys 123 and 124 are attached to the upper ends of both ends of the guide 121 of the coating liquid supply device 10, and a stepping motor 125 that constitutes a drive unit that moves the moving body 122 is attached to the center of the upper surface. .

A winding wheel 126 is attached to the rotary shaft 125a of the stepping motor 125, and both ends of the wire 127 wound around the winding wheel 126 are provided on both sides of the moving body 122 via the pulleys 123 and 124. It is locked to the part. As a result, when the rotating shaft 125a of the stepping motor 125 rotates, the winding wheel 126 winds one side of the wire 127 and unwinds the other side, so that the moving body 122 guides the moving body 122 according to the rotating direction of the rotating shaft 125a.
Move left and right along 21. The measuring head 47
Is attached to the moving body 122 in a state of facing the substrate W, and by moving together with the moving body 122 from one side portion of the guide 121 to the other side portion, the coating film thickness on the substrate W is changed to a coating liquid supply device. It is possible to continuously measure along the width direction of the substrate W, which is the direction orthogonal to the moving direction of 10.

FIG. 7 is a block diagram showing the main control configuration of the coating apparatus configured as described above. Control unit 50
Is composed of a CPU 51 that performs a predetermined arithmetic process, a ROM 52 that stores a predetermined program, a RAM 53 that temporarily stores processing data, and the like, and controls the overall operation of the coating apparatus according to the predetermined program.

That is, the CPU 51 receives a predetermined signal from the start switch S, the film thickness meter 40, the displacement sensor 118, etc., and moves the coating liquid supply apparatus 10 via the stepping motor drive circuit 35a. 35, the operation of the stepping motor 125 that moves the moving body 122 through the stepping motor drive circuit 125b is performed by the stepping motor drive circuit 1
The operation of the stepping motor 115 that displaces the arm 111 of the coating liquid supply apparatus 10 is controlled via 15c.

Further, the CPU 51 controls a transfer robot (not shown) for delivering the substrate W via the transfer robot drive circuit, and transfers the substrate W to the stage 2 via the vacuum device drive circuit.
A vacuum device (not shown) that is held by suction on 0 is controlled.

The coating apparatus constructed as described above operates as follows. First, when a substrate W is placed on the stage 20 by a transfer robot (not shown) based on a command from the control unit 50, the substrate W is suction-held on the stage 20 by a vacuum device (not shown), and the coating liquid supply device is provided. 10 is moved at a constant speed in the direction of the arrow from the starting end position on the front side of FIG. Simultaneously with the start of movement of the coating liquid supply device 10, the coating liquid is supplied from the coating liquid tank (not shown) at a constant pressure, and the coating liquid supply device 10 supplies the coating liquid from the supply port 14 onto the substrate W at a constant pressure. While moving, move to the end position.

The above coating liquid is held at a temperature within a certain range by a heater or the like provided in the coating liquid tank, and the coating liquid supply device 10 is also held at a temperature within a certain range like the coating liquid. It is desirable that To maintain the temperature of the coating liquid supply device 10, it is desirable that the heater attached inside is controlled by a control circuit. However, even if such a heater is not provided, the temperature of the installation place of the coating device is kept constant. It is also feasible by holding it at.

Simultaneously with the start of the movement of the coating liquid supply apparatus 10, a stepping motor 125 attached thereto is provided.
Is driven to rotate and the moving body 122 moves on the guide 121 as shown in FIG.
The substrate W moves from the left end to the right end at a constant speed. By the movement of the moving body 122, the measurement head 47 moves along the width direction of the substrate W on the coating film immediately after the coating liquid is supplied from the supply port 14 to form the coating film thickness by the film thickness meter 40. A continuous measurement of is performed. When the moving body 122 moves to the right end of the substrate W, the stepping motor 125 is rotationally driven in the opposite direction, and the moving body 122 moves from the right end to the left end of the substrate W at a constant speed. As a result, the measuring head 47 moves on the coating film in the width direction in the same manner as described above, and the coating film thickness is continuously measured by the film thickness meter 40. The film thickness meter 40 sequentially sends the measured film thickness value to the control unit 50. The CPU 51 associates the film thickness value with the measurement position obtained from the movement signal of the stepping motor 125 to form film thickness data, and performs a predetermined process based on the film thickness data.

The moving body 122 reciprocates between the right end and the left end of the substrate W until the coating liquid supply device 10 moves on the substrate W from the start end position to the end position and the formation of the coating film is completed. . As a result, the measuring head 47 moves on the coating film along a locus as shown in FIG. 8 to continuously measure the coating film thickness. In FIG. 8, the measurement head 47 makes five reciprocations on the substrate W, and the control unit 50 causes the CPU 51 to move the arms 11 to each other.
1 calculates the average value of the film thickness value for each partition of the discharge port 14 in which the stepping motor 1 is arranged.
The drive of 15 is controlled.

That is, with respect to the partition portion having a coating film thickness larger than the target value, the facing wall member 11 of the coating liquid supply apparatus 10 is provided.
The stepping motor 115 of the partition is driven so that the supply port 14 side is displaced so as to approach the facing wall member 12 and the opening width of the supply port 14 is narrowed. Further, in the partition portion having a coating film thickness smaller than the target value, the supply port 14 side of the facing wall member 11 of the coating liquid supply device 10 is located on the facing wall member 12 side.
The stepping motor 115 in the partition is driven such that the stepping motor 115 is displaced so as to be separated from and the opening width of the supply port 14 is widened.

The opening width of the supply port 14 is adjusted by switching the rotation direction of the stepping motor 115 and controlling the rotation speed. The stepping motor 115 is controlled as follows. . That is, the opening width of the supply port to be adjusted is calculated based on the difference between the film thickness value measured by the film thickness meter 40 and the target value, and the stepping motor 11 is measured while the displacement sensor 118 measures the opening width.
5 is driven, and the driving of the stepping motor 115 is stopped when the opening width is adjusted to a predetermined width.

By repeating such control of the stepping motor 115 a plurality of times, it becomes possible to keep the coating film thickness in the width direction of the substrate W within a certain range, and also in the moving direction of the coating liquid supply apparatus 10. It becomes possible to form the coating film F having a uniform thickness. The control of the stepping motor 115 is performed based on the average value of the film thickness value of each reciprocation of the measuring head 47 in each section of the supply port 14, or the average value of the film thickness value of each reciprocation of a plurality of times and each outward path. It may be performed based on the average value of the film thickness values for each or each return path.

As described above, in order to keep the coating film thickness within a certain range, the adjustment may be completed with only one substrate W due to various factors of the coating film thickness variation.
The adjustment may not be completed unless a plurality of substrates W are used. Once the adjustment is completed, it is usually possible to apply a fixed number of substrates W with the set value. The substrate W on which the coating film is formed is transferred to the next processing step by a transfer robot (not shown).

Although the thin portion 112 is formed at a position adjacent to the arm 111 in the above embodiment of the coating liquid supply apparatus 10, as shown in FIG.
It may be formed at a position away from. In this case, the straight line distance L3 between the action point R of the displacement force applying means, which is the axial center position of the female screw 111a, on the arm 111 and the fulcrum P that is the bending position of the thin portion 112 is the same as the supply port Q and the fulcrum P. The arm 111 may be formed to be longer than the distance L4 between them. Thereby, the displacement amount of the opposing wall member 11 can be made smaller than the displacement amount of the arm 111, and the opening width of the supply port 14 can be finely adjusted.

Further, in the embodiment of the coating liquid supply apparatus 10 described above, the thin portion 112 is formed by providing the groove 113, but the groove 113 is not provided, and the region above the arm 111 of the facing wall member 11 is not particularly provided. The entire shape may be thin, or the entire facing wall member 11 including the area below the arm 111 may be formed of a thin member. Even in this case, the fulcrum for displacing the arm 111 and the facing wall member 11 is formed at a position substantially similar to that of the embodiment shown in FIGS. 2 to 4.

In the embodiment of the coating liquid supply apparatus 10 described above, the rotation control of the stepping motor 115 is performed while the displacement sensor 118 provided near the supply port 14 measures the opening width of the supply port 14. The relationship between the difference between the measured film thickness value and the target value and the number of rotations of the stepping motor 115 for making the aperture width necessary to eliminate the difference is obtained in advance, and the measured film thickness value and the target value are obtained. It may be performed by supplying the stepping motor 115 with the number of pulses corresponding to the difference in value. In such a case, the displacement sensor 118 can be eliminated.

Further, in the embodiment of the coating liquid supply apparatus 10 described above, the arm 111 projects perpendicularly to the facing wall member 11 in the figure, but the facing wall member 1
You may make it project obliquely with respect to 1. Even when it is obliquely projected in this way, the linear distance between the point of action of the displacement force imparting means on the arm 111 and the fulcrum that is the bending position is longer than the distance between the supply port of the facing wall member 11 and the fulcrum. You can do it like this.

Further, in the embodiment of the coating liquid supply apparatus 10 described above, the female screw 111 formed on the arm 111 is formed.
a is a male screw, and the rotation shaft 1 of the stepping motor 115 is
The male screw 115b attached to 15a may be a female screw. Further, the axes of these screws may be inclined with respect to the arm 111. In this case, the stepping motor 115 also has its rotating shaft 115a.
And the screws may be arranged obliquely so that they are coaxially located. Further, in the above-described embodiment of the coating liquid supply device 10, the displacement force applying means for the arm 111 may be constituted by a piezo actuator applied to the conventional example, or may be constituted by other appropriate means.

Furthermore, the coating liquid supply apparatus 1 of the above embodiment
At a position below the arm 111 of the facing wall member 11 at 0, a rod-shaped core material made of steel or the like that is hard to bend is embedded along the longitudinal direction of the supply port 14, and both ends of the core material are applied. The opposing wall member 12 is provided outside the liquid supply device 10 or the like.
It is also possible to have a structure in which it is locked to. In this case, the core material position serves as a fulcrum for displacing the arm 111 and the opposing wall member 11, and the linear distance between the point of action of the displacement force imparting means on the arm 111 and the fulcrum of this core material position is the opposing wall member. It may be set longer than the distance between the supply port 11 and the fulcrum.

Further, when the core material is embedded in the facing wall member 11 as described above, the arm 111 is eliminated,
It is also possible to make the displacement force of the displacement force applying means act directly on the facing wall member 11 at a position above the core material. In this case, the portion of the opposing wall member 11 between the point of action of the displacement force imparting means for the opposing wall member 11 and the fulcrum of the core material position is centered on the fulcrum of the core material position on the supply port side of the opposing wall member 11. Then, it also serves as an opening width adjusting portion that adjusts the opening width of the supply port 14 by displacing the facing wall member 12 in the opposite direction. It may be longer than the distance between the supply port and the fulcrum.

By embedding the core material in the facing wall member 11 as described above, even when the adjacent partition portions of the supply port 14 are adjusted to have greatly different opening widths, the adjacent partition portions are smoothly displaced, A large step does not occur in the coating film thickness. When the core material is embedded in the facing wall member 11 only for the purpose of preventing a large difference in the coating film thickness, it is not necessary to lock both end portions of the core material to the facing wall 12.

In the case of the embodiment shown in FIGS. 1 to 3 in which the arm 111 is formed on the facing wall member 11, the facing wall member 11 and the arm 111 are regarded as different members constituting the coating liquid supply device. However, the arm 111 can also be regarded as a part of the facing wall member 11 for forming an action point for displacing the supply port 14 side of the facing wall member 11. When grasped in this way, using the above core material as a fulcrum,
There is no great difference in technical concept from the case where a part of the facing wall member 11 also serves as the opening width adjusting portion similar to the arm 111.

[0054]

As described above, according to the present invention, in the coating liquid supply device, the action point by the displacement force applying means for exerting the displacement force on the opening width adjusting portion and the fulcrum formed on the first opposing wall member. Since it is set to be longer than the distance between the supply port that supplies the coating liquid and the fulcrum, the displacement amount is smaller than the displacement amount of the opening width adjusting part at the action point. The first opposing wall member is displaced, and the opening width of the supply port can be easily and finely adjusted.

According to the present invention, in the above coating liquid supply apparatus, the displacement force applying means applies a force in a direction intersecting the protruding direction to the arm protruding to the side opposite to the second facing wall member side. Therefore, the displacement amount of the first facing wall member is smaller than the displacement amount of the arm, and the opening width of the supply port can be more easily and finely adjusted.

Further, according to the present invention, in the coating liquid supply device, the displacement amount of the arm and the first opposing wall member is adjusted by changing the fitting length of the first screw and the second screw. Therefore, the linear movement amount of the arm and the first opposing wall member becomes smaller than the rotational movement amount of the screw, and the opening width of the supply port can be more easily and finely adjusted.

Further, according to the present invention, in the coating liquid supply apparatus, a thin portion is formed on the first opposing wall member at a position opposite to the second opposing wall member along the longitudinal direction of the supply port. Since the thin portion is used as a fulcrum to displace the arm, the arm and the first opposing wall member are easily displaced.

Further, according to the present invention, in the coating liquid supply apparatus, a plurality of arms are formed along the longitudinal direction of the supply port, and a displacement force applying means is provided corresponding to each arm. Therefore, the opening width of the supply port can be adjusted for each partition along the longitudinal direction of the supply port, and the coating film thickness in the width direction of the substrate can be kept within a certain range.

[Brief description of drawings]

FIG. 1 is a perspective view of a coating liquid supply device according to an embodiment of the present invention.

FIG. 2 is a side sectional view of a main part of the coating liquid supply apparatus shown in FIG.

FIG. 3 is a cross-sectional view taken along the line AA of the coating liquid supply device shown in FIG.

FIG. 4 is a side sectional view of an essential part for explaining the relationship between the displacement amount of the arm and the displacement amount of the facing wall member on the supply port side of the coating liquid supply device of the present invention.

FIG. 5 is a perspective view of a coating device to which the coating liquid supply device of the present invention is applied.

FIG. 6 is a diagram illustrating a configuration of a film thickness meter.

7 is a block diagram showing a control configuration of the coating apparatus shown in FIG.

FIG. 8 is a diagram showing a movement trajectory of a measurement head of a film thickness meter on a substrate.

FIG. 9 is a side sectional view of a main part for explaining a relationship between a displacement amount of an arm and a displacement amount of a facing wall member on a supply port side in another embodiment of the present invention.

FIG. 10 is a side sectional view of a main part of a conventional coating liquid supply apparatus.

11 is a perspective view of a coating device to which the coating liquid supply device shown in FIG. 10 is applied.

[Explanation of symbols]

 11, 12 Opposing wall member 14 Supply port 111 Arm 112 Thin portion 115 Stepping motor 111a Female screw 115b Male screw

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification number Office reference number FI technical display location // H01L 21/31 H01L 21/30 564Z

Claims (5)

[Claims] 1. A coating liquid supply device in which an opening width of a slit-shaped supply port for supplying a coating liquid can be adjusted, and the coating liquid supply device is arranged so as to constitute the supply port and is arranged to face each other with a gap. And a second opposing wall member, which is displaced around a fulcrum formed on the first opposing wall member, and the first opposing wall member is displaced around the fulcrum according to the displacement. The opening width adjusting part for displacing with respect to the facing wall member of the above, and a displacement force applying means for applying a displacement force to the opening width adjusting part, between the point of action by the displacement force applying means and the fulcrum. A coating liquid supply device, wherein a distance is set to be longer than a distance between the supply port and the fulcrum. 2. The opening width adjusting portion is formed on the outer surface of the first opposing wall member and comprises an arm projecting to the side opposite to the second opposing wall member side, and the displacement force applying means is 2. The coating liquid supply apparatus according to claim 1, wherein the arm applies a force to the arm in a direction intersecting a protruding direction of the arm. 3. A first screw is formed on the arm, and the displacement force applying means rotates the second screw and the second screw to be screwed with the first screw. The coating liquid supply device according to claim 2, further comprising: a rotating unit that changes a fitting length of the first screw and the second screw. 4. A thin portion is formed in the first opposing wall member at a position opposite to the second opposing wall member side along the longitudinal direction of the supply port, and the fulcrum has the thin wall portion. The coating liquid supply device according to claim 2 or 3, wherein the coating liquid supply device is formed in a portion. 5. The plurality of arms are formed along the longitudinal direction of the supply port, and the displacement force applying means is provided so as to correspond to each arm.
The coating liquid supply apparatus according to any one of 1.