JP4179718B2 - Paste film forming method and film forming apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a paste film forming method and apparatus having a paste film automatic adjustment function capable of automatically adjusting a paste film made of a viscous material such as silver paste and silver parapaste to a required film inclination and film thickness with high accuracy. Is. This paste film forming method and apparatus are, for example, flip chip mounting by a stud bump bonding (SBB) method in which a semiconductor chip or the like with a bump having a two-step projection shape or the like is directly connected to an electrode of a wiring board with a conductive adhesive or the like. The present invention can be applied as a film forming method and apparatus for a conductive paste that can be used for, for example.
[0002]
[Prior art]
Conventional paste film forming methods and film forming apparatuses are shown in FIGS.
[0003]
In the conventional paste film forming apparatus of FIG. 6, a gap g is provided between the flat plate 111 and the tip of the blade 112 that forms the paste film on the plate 111, and the plate 111 or the blade 112 is rotated or linearly moved. FIG. 5 is a diagram for forming a paste film 115 on a plate 111 by causing the viscous substance 113 to pass through the gap g by being moved. In FIG. 6, adjustment to obtain the required gap g is accomplished by changing the height of the collar 114 by replacing the collar 114 that supports the blade 112 on the plate 111 with a collar 114 of a different height. A gap g between the blade 112 and the blade 112 is achieved by moving the blade 112 in a direction perpendicular to the plate 111.
[0004]
7 shows that the blade 112 is supported on one end of an arm 112b that can rotate around a fulcrum 112a, and the tip of the micrometer 121 or the like is brought into contact with the other end of the arm 112b. By rotating the other end of the arm 112b around the fulcrum 112a, the blade 112 is moved in an arc around the fulcrum 112a with respect to the plate 111, thereby changing the gap g.
[0005]
Further, since the inclination of the paste film 115 depends on the mounting parallelism between the plate 111 and the blade 112 as shown in FIG. 8, in order to adjust the inclination of the paste film 115, the above mounting parallelism is manually adjusted. There was a need to do.
[0006]
Further, in order to confirm whether the paste film 115 has the required film inclination and film thickness, the plate is removed from the film forming apparatus, and the paste film formed on the plate is disposed separately from the film forming apparatus. Measurements had to be made with a film thickness measuring instrument. Then, the film inclination and film thickness of the paste film 115 were measured with a measuring instrument, and it was confirmed whether the film inclination was required and whether the film thickness was required. When the required film inclination or film thickness was not required, the mounting parallelism of the plate 111 and the blade 112 was adjusted again, and the gap g was changed.
[0007]
[Problems to be solved by the invention]
However, in the conventional configuration as described above, in order to change the gap g between the plate 111 and the blade 112, it is necessary to prepare the collar 114 for each required film thickness. Adjustment of the mounting parallelism with the blade 112 requires highly skilled work.
[0008]
In addition, in order to confirm whether or not the required film inclination and film thickness are satisfied, the plate 111 and blade 112 are once removed from the film forming apparatus, and the film inclination and film thickness of the paste film 115 are confirmed with a measuring instrument. If the required film tilt and film thickness are not satisfied, readjustment is required, and even if the required film tilt film thickness is required, the plate 111 is attached to the apparatus again, so that the reliability is insufficient. There has been a problem that a great amount of time is required for the adjustment confirmation work.
[0009]
Therefore, the present invention solves the above-mentioned problems, without removing the plate and blade from the film forming apparatus, without requiring highly skilled work to adjust the mounting parallelism between the plate and the blade, Another object of the present invention is to provide a paste film forming method and apparatus capable of forming a paste film with a required film inclination and film thickness in a short time and with high reliability.
[0010]
[Means for Solving the Problems]
In order to achieve the above object, the present invention is configured as follows.
[0011]
According to a first aspect of the present invention, the paste film formed on the plate by passing the paste into the gap between the flat plate and the blade,
Measure the thickness of the paste film with the paste film formed on the plate,
When the paste film does not have the required film inclination and film thickness, based on the measurement results, adjust the blade inclination or position relative to the plate,
Paste film formation characterized in that the paste film is passed through the gap between the paste film and the blade without removing the paste film from the plate to adjust the film inclination or film thickness of the paste film. Provide a method.
[0012]
According to the second aspect of the present invention, when the paste film is formed on the plate,
A portion of the paste film is formed on the plate by passing the paste into the gap between the plate and the blade,
Measure the thickness of a part of the paste film in a state where a part of the paste film is formed on the plate,
Based on the measurement results, adjust the inclination or position of the blade relative to the plate,
The paste film forming method according to the first aspect, wherein the paste is passed through the gap between the plate and the blade to form the remaining part of the paste film on the plate .
[0013]
According to the third aspect of the present invention, the difference in inclination of the paste film (41) with respect to the plate (11) is {(T ₁ −T ₂ ) / L ₁ } − {(t ₁ −t ₂ ) / L ₃ }, where T ₁ is from the reference surface of the plate to the plate surface at an arbitrary first point in the vicinity of the paste film of the plate on which the paste film is formed. , T ₂ is the distance from the reference surface to the surface of the plate at an arbitrary second point in the vicinity of the other end opposite to the one end of the paste film, and t ₁ is the arbitrary first point. The distance from the reference surface of the plate to the paste film surface at an arbitrary third point on the paste film in the vicinity of t, and t ₂ is an arbitrary fourth point on the paste film in the vicinity of the arbitrary second point. The distance from the reference plane of the plate to the paste film surface at a point, L ₁ is the distance from the first point to the second point, and L ₃ is the distance from the third point to the fourth point, while the thickness of the paste film is {(t ₁ + t ₂ ) / 2}-{(T ₁ + T ₂ ) / 2} The paste film forming method according to the first or second aspect, which is obtained from the formula:
[0014]
According to the fourth aspect of the present invention, the film inclination of the paste film is calculated based on the measured film thickness of the paste film, and the blade is attached to the plate based on the calculated film inclination. The paste film forming method according to any one of the first to third aspects is provided in which the inclination of the blade with respect to the plate is adjusted by rotating in a plane substantially orthogonal to the movement direction of the plate.
[0015]
According to the fifth aspect of the present invention, the thickness of the paste film is adjusted by bringing the blade into and out of contact with the plate based on the measured thickness of the paste film. The paste film formation method as described in any one of -4 is provided.
[0016]
According to the sixth aspect of the present invention, the paste film forming unit includes a flat plate and a blade, and forms a paste film on the plate by allowing the paste to pass through a gap between the plate and the blade ;
A film thickness measuring unit for measuring the film thickness of the paste film in a state where the paste film is formed on the plate;
The upper Symbol plate and the blade without removing from the paste film formation unit, and adjustable adjustment unit the inclination or the position of the blade relative to the plate,
Based on the measurement result of the film thickness measurement unit, the controller for controlling the paste film formation unit and the adjustment unit to adjust the film inclination or film thickness of the paste film;
Equipped with a,
The control device
Based on the measurement result, it is automatically determined whether the paste film has the required film inclination and film thickness. When the paste film is not the required film inclination and film thickness, After the paste film is formed, the adjustment unit adjusts the inclination or position of the blade with respect to the plate, and then the paste film formation unit pastes the paste into the gap between the paste film and the blade on the plate. The paste film forming apparatus is characterized in that the film inclination or the film thickness of the paste film is adjusted by passing the filter.
[0017]
According to a seventh aspect of the present invention, when the paste film forming unit forms the paste film on the plate, the control device is configured so that a part of the paste film is formed on the plate. After controlling the driving of the film forming unit and adjusting the inclination or position of the blade with respect to the plate by the adjustment unit based on the measurement result of the film thickness of a part of the paste film measured by the film thickness measurement unit, A paste film forming apparatus according to a sixth aspect is provided that controls the drive of the paste film forming unit so that the remaining portion of the paste film is formed on a plate .
[0018]
According to the eighth aspect of the present invention, in the film thickness measurement unit, the difference in inclination of the paste film with respect to the plate is {(T ₁ −T ₂ ) / L ₁ } − {(t ₁ −t ₂ ). / L ₃ }, where T ₁ is the plate surface from the reference plane of the plate at an arbitrary first point in the vicinity of the paste film of the plate on which the paste film is formed. , T ₂ is the distance from the reference plane to the surface of the plate at an arbitrary second point in the vicinity of the other end opposite to the one end of the paste film, and t ₁ is the optional first The distance from the reference surface of the plate to the paste film surface at an arbitrary third point on the paste film in the vicinity of the point, t ₂ is an arbitrary first point on the paste film in the vicinity of the arbitrary second point 4 points from the reference plane of the plate to the paste film surface Be away, L ₁ is the distance from the first point to the second point, while L ₃ is the distance from the third point to the fourth point, the thickness of the paste film, {( The paste film forming apparatus according to the sixth or seventh aspect, wherein the paste film forming apparatus is obtained from an equation of t ₁ + t ₂ ) / 2} − {(T ₁ + T ₂ ) / 2}.
[0019]
According to the ninth aspect of the present invention, the adjusting unit rotates the blade with respect to the plate in a plane substantially orthogonal to the moving direction of the blade based on the measured thickness of the paste film. The paste film forming apparatus according to any one of the sixth to eighth aspects is provided with a film inclination adjusting unit that adjusts the inclination of the blade with respect to the plate.
[0020]
According to the tenth aspect of the present invention, the adjustment unit adjusts the thickness of the paste film by bringing the blade into and out of contact with the plate based on the measured thickness of the paste film. The paste film forming apparatus according to any one of the sixth to ninth aspects is provided with a film thickness adjusting unit.
[0021]
According to an eleventh aspect of the present invention, the film tilt adjusting unit rotates a first actuator fixed to the plate and an arm supporting the blade by driving the first actuator about the axial direction of the arm. A rotating member for driving the first actuator based on the measured film thickness of the paste film to rotate the rotating member relative to the plate, and the blade through the arm. The paste film forming apparatus according to the ninth aspect is configured such that the inclination of the blade with respect to the plate is adjusted by rotating in a plane substantially orthogonal to the moving direction.
[0022]
According to a twelfth aspect of the present invention, the film thickness adjusting unit includes: a second actuator fixed to the plate; and the driving of the second actuator causes the arm to rotate about a direction substantially orthogonal to the axial direction of the arm. A rotation fulcrum for rotation, and the second actuator is driven on the basis of the measured film thickness of the paste film to rotate the arm with respect to the plate to bring the blade into contact with the plate. The paste film forming apparatus according to the tenth aspect, wherein the film thickness of the paste film is adjusted by separating the paste film, is provided.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
[0024]
A paste film forming method and a paste film forming apparatus for carrying out the method according to the first embodiment of the present invention, as shown in FIG. 1, a paste film forming unit 70 for forming a paste film, and measuring the film thickness Measuring unit 71 and automatic adjustment units 72 and 73 for changing the film inclination and film thickness, without removing the plate 11 and the blade 12 from the paste film forming apparatus, and between the plate 11 and the blade 12. The required paste film inclination and film thickness can be obtained in a short time, with high reliability and high accuracy, without requiring high-precision adjustment of the mounting parallelism. This will be described in detail below.
[0025]
In the paste film forming unit 70, a gap is provided between the surface of the circular plate 11 and the lower end of the substantially flat blade 12, and the blade 12 supported on the support base 39 via the arm 62 in FIG. 1. A paste film 41 is formed by placing the viscous material 13 on the right plate 11 and rotating the plate 11 clockwise to pass the viscous material 13 through the gap. In order to pass the viscous substance 13, the blade 12 is fixed and the plate 11 is linearly or rotationally moved, or the plate 11 is fixed and the blade 12 is linearly or rotationally moved. In the apparatus of FIG. 1, the blade 12 is fixed, and the plate 11 is rotated by a motor 21 or the like. In FIG. 1, 22 is a scraping device having a scraping blade for scraping the paste film once formed, and 51 is a film thickness measuring device.
[0026]
FIG. 2 shows a measuring unit 71 for measuring the inclination and thickness of the paste film 41 of the paste film forming apparatus. For example, a film thickness measuring device 51 composed of a commercially available known laser measuring device is fixed and the film forming apparatus is moved by a moving device such as a robot, or the film forming device is fixed and the film thickness measuring device 51 is moved by a robot or the like. By moving by the apparatus, the inclination and thickness of the paste film 41 from the plate 11 are measured using laser light.
[0027]
FIG. 3 shows a method for estimating the inclination and thickness of the paste film 41 of the paste film forming apparatus using the measuring device 51.
[0028]
First, the distance from the reference plane of the paste film forming apparatus at points 1 and 2 on the plate 11 and points 3 and 4 of the paste film 41 is measured by the film measuring device 51. The difference in inclination of the paste film 41 with respect to the plate (11) is obtained by calculating the difference between the inclination of the plate 11 and the inclination of the paste film 41, that is,
[0029]
[Expression 1]
Difference in slope = {(T ₁ −T ₂ ) / L ₁ } − {(t ₁ −t ₂ ) / L ₃ }
It can be obtained from the following formula. Here, T ₁ is a distance from the reference surface of the paste film forming apparatus to the surface of the plate 11 at point 1 (any first point in the vicinity of the paste film of the plate on which the paste film is formed), and T ₂ is The distance from the reference plane to the surface of the plate 11 at point 2 (arbitrary second point near the other end opposite to the one end of the paste film), t ₁ is point 3 (arbitrary _first point The distance from the reference surface of the plate 11 to the paste film surface at an arbitrary third point on the paste film in the vicinity of the point, t ₂ is point 4 (on the paste film in the vicinity of the optional second point) This is the distance from the reference plane of the plate 11 to the paste film surface at an arbitrary fourth point). Here, as shown in FIG. 3, the distance from point 1 to point 2 is L ₁ , the distance from point 3 to point 4 is L ₃ , the center line between point 1 and point 2, and the point The center line between 3 and point 4 coincides. However, (t ₁ + t ₂ )> (T ₁ + T ₂ ). Therefore, the thickness of the paste film 41 is
[0030]
[Expression 2]
Paste film thickness = {(t ₁ + t ₂ ) / 2} − {(T ₁ + T ₂ ) / 2}
It can be obtained from the following formula.
[0031]
FIG. 4 is a flowchart for automatically adjusting the inclination and thickness of the paste film 41 of the paste film forming apparatus.
[0032]
First, the inclination and thickness of the initial paste film 41 are measured by the film measuring instrument 51 in step S1. Next, in step S2, the parallelism between the plate 11 and the blade 12 and the gap between the plate 11 and the blade 12 are changed by the inclination automatic adjustment unit 72 and the thickness automatic adjustment unit 73 described later, respectively. The paste film 41 is formed again by the paste film forming unit 70. In step S3, the film measuring device 51 again measures the inclination and thickness of the paste film 41 formed in step S2, and automatically confirms whether or not the film inclination and film thickness are required. That is, the measured value from the measuring instrument 51 is input to the control device 40 to be described later, and the necessary inclination and thickness values previously input to the control device 40 are compared with the input values, respectively, and the allowable range. It is automatically determined whether it is within or not. If the required film inclination and film thickness are not formed, the process returns to step S2 again to change the parallelism between the plate 11 and the blade 12 and the gap between the plate 11 and the blade 12 to form a paste film. In step S3, readjustment is performed such that the inclination and thickness of the paste film are measured again. The control device 40 also automatically determines whether or not to perform this readjustment. Such an operation is automatically continued by the control device 40 until the required film inclination and thickness are obtained. However, this adjustment operation may be stopped if it cannot be obtained after a predetermined number of times.
[0033]
FIG. 5 is a perspective view showing a portion of the automatic adjustment unit 72 of the inclination of the paste film 41 of the paste film forming apparatus of FIG. This automatic tilt adjustment unit 72 is incorporated in the support mechanism of the blade 12 with respect to the plate 11 of the paste film forming unit 70. The automatic inclination adjustment unit 72 adjusts the inclination of the paste film 41 by changing the inclination of the blade 12 by an actuator 81 such as a piezo element or a motor based on the result of the measurement of the inclination of the paste film 41. That is, in the automatic tilt adjustment unit 72, the support member 60 having a shape in which the L-shaped member and the inverted L-shaped member are integrally combined is fixed to the support base 39 of the plate 11. An actuator 81 is attached to the support member 60 downward from its upper end 60a. In addition, a rotation member 61 is attached to the support base 39 that rotatably supports the plate 11 in the vicinity of the support member 60 so that the rotation guide 82 can rotate forward and backward. A spring 83 that urges the protrusions 60b and 61b to approach each other is disposed between the protrusion 60b that protrudes laterally from the upper end 60a of the support member 60 and the protrusion 61b of the rotating member 61 that faces the protrusion 60b. Accordingly, the lower end driving portion of the actuator 81 fixed to the support member 60 is always in contact with the upper surface of the one end 61 d of the rotating member 61 by the biasing force of the spring 83. The longitudinal axis direction of the arm 62 and the rotation center axis of the rotating member 61 are substantially parallel.
[0034]
The drive of the actuator 81 is controlled by the control device 40. The control device 40 controls the drive of the motor 38 for rotating the plate 11 when the plate 11 is rotated with respect to the blade 12 to form the paste film 41 on the plate 11, and is measured by the measuring device 51. Measurement result information is input. Further, in the control device 40, the inclination and film thickness of the paste film 41 are also calculated by the above two formulas based on the measurement result information input from the measuring device 51.
[0035]
Therefore, based on the inclination of the paste film calculated based on the thickness measurement result of the paste film 41 in the measurement result information input from the measuring device 51, the lower end drive part of the actuator 81 is pulled upward (piezo element). In this case, it is contracted) or is projected so as to move downward (in the case of a piezo element, it is extended), and the one end 61d of the rotating member 61 follows the lower end driving portion of the actuator 81 by the urging force of the spring 83. Therefore, the rotating member 61 rotates counterclockwise around the rotation guide 82 or rotates clockwise as indicated by an arrow A. As a result, the blade 12 at the tip of the arm 62 rotatably supported on the upper portion of the rotating member 61 via the rotation guide 63 rotates counterclockwise or clockwise as indicated by an arrow B. That is, the inclination of the lower end of the blade 12 with respect to the plate 11 in other words, the parallelism can be adjusted.
[0036]
5 is also a perspective view showing a portion of the automatic adjustment unit 73 for the thickness of the paste film 41 of the paste film forming apparatus of FIG. This automatic thickness adjusting unit 73 is also incorporated in the support mechanism of the blade 12 with respect to the plate 11 of the paste film forming unit 70. In the automatic thickness adjusting unit 73, an actuator 85 such as a piezo element or a motor is attached upward on the upper surface of the support portion 61 e extending in the lateral direction of the rotating member 61. Between the protrusion 62c at the rear end of the rear part 62e of the arm 62 and the protrusion 61c of the rotating member 61 opposite to the protrusion 62c, a spring 84 that urges the protrusions 62c and 61c to approach each other is disposed. The upper end drive portion of the actuator 85 fixed to the support portion 61e of the rotating member 61 is always in contact with the lower surface of the rear portion 62e of the arm 62 by the urging force of 84. Note that the longitudinal axis direction of the arm 62 and the rotation center axis of the arm 62 are substantially orthogonal to each other. The drive of the actuator 81 is controlled by the control device 40.
[0037]
Therefore, based on the thickness measurement result of the paste film 41 input from the measuring device 51 to the control device 40, the upper end drive unit of the actuator 85 is projected to move upward (or extended in the case of a piezo element), or When retracted so as to move downward (shrink in the case of a piezo element), the lower surface of the rear portion 62e of the arm 62 moves so as to follow the upper end drive portion of the actuator 85 by the urging force of the spring 84. As shown by an arrow C, it rotates clockwise or counterclockwise around the rotation guide 83. As a result, the blade 12 at the tip of the arm 62 is rotated clockwise or counterclockwise as indicated by an arrow D, and the paste film is adjusted by adjusting the gap with respect to the plate 11 at the lower end of the blade 12. The thickness can be adjusted.
[0038]
In the present invention, after one annular paste film is completely formed, the film thickness is measured and adjusted, and then one annular paste film is completely formed again. It is not limited, and when the paste film of a part (for example, about one-fourth) of the annular shape is formed, it is temporarily stopped, and after measuring and adjusting the film thickness, the remaining part of the annular shape is again formed. If a desired value is obtained by measuring the thickness of the paste film (about three-quarters), the formed paste film is not discarded, and one annular sheet is formed. The paste film may be re-formed.
[0039]
【The invention's effect】
As described above, according to the present invention, after the paste film is formed on the plate, the thickness of the paste film is measured while being formed on the plate, and the film thickness or the slope calculated based on the measurement result is measured. The thickness or inclination of the paste film can be adjusted by adjusting the gap between the plate and the blade or the parallelism between the plate and the blade. Therefore, without removing the plate and the blade from the paste film forming apparatus, and without requiring a highly accurate adjustment of the mounting parallelism with respect to the paste film forming apparatus between the plate and the blade, the required film inclination and film thickness are required. Can be formed in a short time, with high reliability and high accuracy.
[Brief description of the drawings]
FIG. 1 is a perspective view of a paste film forming unit of a paste film forming apparatus according to an embodiment of the present invention.
FIG. 2 is a perspective view of a paste film inclination and thickness measuring unit of the paste film forming apparatus.
FIG. 3 is an explanatory diagram showing a method for estimating the paste film inclination and thickness of the paste film forming apparatus.
FIG. 4 is a flowchart of paste film inclination and thickness automatic adjustment of the paste film forming apparatus.
FIG. 5 is a perspective view of a paste film inclination automatic adjustment unit and a thickness automatic adjustment unit incorporated in a part of the paste film formation unit of the paste film formation apparatus.
FIG. 6 is an explanatory view showing a conventional paste film forming apparatus.
FIG. 7 is an explanatory view showing another conventional paste film forming apparatus.
FIG. 8 is an explanatory diagram for explaining conventional adjustment of the mounting parallelism of a plate and a blade.
[Explanation of symbols]
11 Flat plate 12 Paste film forming blade 13 Viscous substance (paste)
21 Micrometer 41 Paste film 51 Film thickness measuring device 70 Paste film forming unit 71 Paste film thickness measuring unit 72 Paste film inclination automatic adjustment unit 73 Paste film thickness automatic adjustment unit 81, 85 Actuator 82 Rotating guide 83, 84 Spring

Claims (12)

Paste film (41) formed on the plate (11) by passing the paste into the gap between the flat plate and the blade (12),
Measure the thickness of the paste film with the paste film formed on the plate,
When the paste film is not required for film inclination and film thickness, based on the measurement results, adjust the inclination or position of the blade relative to the plate,
Paste film formation characterized in that the paste film is passed through the gap between the paste film and the blade without removing the paste film from the plate to adjust the film inclination or film thickness of the paste film. Method. When forming the paste film on the plate,
A portion of the paste film is formed on the plate by passing the paste into the gap between the plate and the blade,
Measure the thickness of a part of the paste film in a state where a part of the paste film is formed on the plate,
Based on the measurement results, adjust the inclination or position of the blade relative to the plate,
The paste film forming method according to claim 1, wherein the paste is passed through a gap between the plate and the blade to form the remaining part of the paste film on the plate . The difference in inclination of the paste film (41) with respect to the plate (11) is obtained from the equation {(T ₁ −T ₂ ) / L ₁ } − {(t ₁ −t ₂ ) / L ₃ }. Here, T ₁ is the distance from the reference surface of the plate to the plate surface at an arbitrary first point in the vicinity of the paste film of the plate on which the paste film is formed, and T ₂ is the distance of the paste film The distance from the reference plane to the surface of the plate at an arbitrary second point in the vicinity of the other end opposite to the one end, t ₁ is an arbitrary value on the paste film in the vicinity of the arbitrary first point The distance from the reference plane of the plate at the third point to the paste film surface, t ₂ is the reference plane of the plate at any fourth point on the paste film in the vicinity of the arbitrary second point. L ₁ is the distance to the paste film surface, and L ₁ is the first point to the second point. L ₃ is the distance from the third point to the fourth point, while the thickness of the paste film is {(t ₁ + t ₂ ) / 2} − {(T ₁ + T ₂ ) The paste film forming method according to claim 1, wherein the paste film forming method is obtained from an expression of / 2}.   The film inclination of the paste film is calculated based on the measured film thickness of the paste film, and the blade is rotated with respect to the plate in a plane substantially orthogonal to the moving direction of the blade based on the calculated film inclination. The paste film forming method according to claim 1, wherein the inclination of the blade with respect to the plate is adjusted by adjusting the inclination of the blade.   The paste according to any one of claims 1 to 4, wherein the thickness of the paste film is adjusted by bringing the blade into and out of contact with the plate based on the measured thickness of the paste film. Film forming method. A paste film forming unit (70) comprising a flat plate and a blade, and forming a paste film (41) on the plate by passing the paste through a gap between the plate and the blade ;
A film thickness measurement unit (71) for measuring the film thickness of the paste film in a state where the paste film is formed on the plate;
The upper Symbol plate and the blade without removing from the paste film formation unit, an adjustable adjusting unit (72, 73) the inclination or the position of the blade relative to the plate,
Based on the measurement result of the film thickness measurement unit, the controller for controlling the paste film formation unit and the adjustment unit to adjust the film inclination or film thickness of the paste film;
Equipped with a,
The control device
Whether the film tilt and thickness of the paste layer needs based on the measurement results automatically determined, when the paste layer does not thick slope and film requiring the above plate In the state where the paste film is formed on the plate, the adjustment unit adjusts the inclination or position of the blade with respect to the plate, and then the paste film formation unit sets the gap between the paste film and the blade on the plate. A paste film forming apparatus, wherein the paste is passed to adjust the film inclination or film thickness of the paste film. The control device controls driving of the paste film forming unit so that a part of the paste film is formed on the plate when the paste film forming unit forms the paste film on the plate, Based on the measurement result of the film thickness of a part of the paste film measured by the film thickness measurement unit, the adjustment unit adjusts the inclination or position of the blade with respect to the plate, and then the remaining part of the paste film on the plate The paste film forming apparatus according to claim 6, wherein the driving of the paste film forming unit is controlled such that the paste film is formed. In the film thickness measurement unit, the difference in inclination of the paste film (41) with respect to the plate (11) is {(T ₁ −T ₂ ) / L ₁ } − {(t ₁ −t ₂ ) / L ₃ }. Where T ₁ is the distance from the reference surface of the plate to the plate surface at an arbitrary first point in the vicinity of the paste film of the plate on which the paste film is formed, T ₂ is the distance from the reference surface to the surface of the plate at an arbitrary second point near the other end opposite to the one end of the paste film, and t ₁ is the vicinity of the arbitrary first point. The distance from the reference plane of the plate at the arbitrary third point on the paste film to the surface of the paste film, t ₂ is the value at the arbitrary fourth point on the paste film in the vicinity of the arbitrary second point. The distance from the reference plane of the plate to the paste film surface L ₁ is the distance from the first point to the second point, while L ₃ is the distance from the third point to the fourth point, the thickness of the paste film, {(t ₁ + t ₂ ) / 2} - {(T 1 + T 2) / 2} paste film forming apparatus according to claim 6 or 7 so as to obtain the equation of.   Based on the measured film thickness of the paste film, the adjusting unit rotates the blade with respect to the plate in a plane substantially orthogonal to the moving direction of the blade, thereby adjusting the inclination of the blade with respect to the plate. The paste film forming apparatus according to any one of claims 6 to 8, further comprising a film inclination adjusting unit (72) to be adjusted.   The adjustment unit includes a film thickness adjustment unit (73) for adjusting the film thickness of the paste film by bringing the blade into and out of contact with the plate based on the measured film thickness of the paste film. The paste film forming apparatus according to any one of claims 6 to 9.   The film tilt adjusting unit includes a first actuator (81) fixed to the plate and a rotating member (rotating member) that rotates the arm (62) supporting the blade by driving the first actuator about the axial direction of the arm. 61), and the first actuator is driven based on the measured film thickness of the paste film to rotate the rotating member relative to the plate so that the blade is connected to the blade via the arm. The paste film forming apparatus according to claim 9, wherein the inclination of the blade with respect to the plate is adjusted by rotating in a plane substantially orthogonal to the moving direction.   The film thickness adjusting unit includes: a second actuator (85) fixed to the plate; and a rotation fulcrum that rotates the arm about a direction substantially orthogonal to the axial direction of the arm by driving the second actuator. And the second actuator is driven based on the measured thickness of the paste film to rotate the arm with respect to the plate and bring the blade into and out of contact with the plate. The paste film forming apparatus according to claim 10, wherein the film thickness of the film is adjusted.

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