KR20100138793A - Apparatus and method for applying paste - Google Patents

Abstract

PURPOSE: An apparatus for paste-coating is provided to suppress the deviation of a paste coating amount and to shorten coating time. CONSTITUTION: An apparatus(1) for paste-coating comprises: a stage(2) on which a coating subject is placed; a nozzle(4b) for discharging paste; an adjustment part(8) for controlling the pressure of the paste from the nozzle; a moving unit(3,5) which moves the stage and nozzle toward the surface direction of the stage and in the surface-crossing direction; and a control part(9).

Description

Paste application device and paste application method {APPARATUS AND METHOD FOR APPLYING PASTE}

The present invention relates to a paste coating device and a paste coating method for applying a paste to a coating object.

The paste coating device is used to manufacture various devices such as a liquid crystal display panel. This paste coating apparatus is equipped with the coating head which discharges a paste with respect to a coating object, apply | coats a paste on a coating object, moving a coating head and a coating object relatively, and applies a predetermined | prescribed coating pattern (paste pattern). Draw.

At this time, the paste coating device measures the surface height of the substrate to be the coating object in order to obtain a uniform paste coating amount, moves the nozzle of the coating head up and down based on the measured value, The distance between a nozzle tip and the surface of a board | substrate is kept constant (for example, refer patent document 1).

Here, when an application | coating pattern has a corner part (bending part), the application | coating speed in the corner part may be made low speed compared with the application | coating speed of a linear part. At this time, in order to keep the paste coating amount constant, the discharge pressure of the coating head is lowered in accordance with the decrease (deceleration) of the coating speed at the time of entering the corner portion, and thereafter, the coating speed is increased at the time of detachment from the corner portion. In accordance with (acceleration), control to increase the discharge pressure of the coating head is performed, and the paste discharge amount of the coating head is adjusted.

In addition, since the coating head discharges the paste from the nozzle by the pressure of the supply gas, in order to change the discharge pressure, the flow rate of the supply gas is adjusted by the electrostatic regulator. As a result, the paste discharge amount of the coating head changes.

Japanese Patent Publication No. 2007-152261

However, as described above, when controlling to change the discharge pressure of the coating head, that is, the flow rate of the supply gas, in accordance with the change of the application speed at the corner portion, the adjustment pressure by the electro-regulator is the discharge pressure due to the compressibility of the gas. As the responsiveness to acting on the paste is low, it is difficult to precisely control the paste coating amount, resulting in variations in the paste coating amount.

In addition, when deceleration / acceleration of application speed is matched with the low responsiveness of discharge pressure, the acceleration / deceleration distance is necessary in front of the inlet part and the exit part of a corner part, and this acceleration / deceleration distance is based on the responsiveness of an electric regulator and the responsiveness of discharge pressure. Since it is determined by this, as the application speed increases, the acceleration / deceleration distance becomes long, and as a result, the paste application time becomes long.

This invention is made | formed in view of the above, The objective is to provide the paste application apparatus and paste application method which can suppress generation | occurrence | production of the dispersion | variation in the paste application amount, and can shorten paste application time.

According to a first aspect of the present invention, in a paste application device, a stage on which an application target is placed, a nozzle for discharging paste, an adjusting unit for adjusting discharge pressure for discharging paste from the nozzle, and a stage And a moving mechanism for relatively moving the nozzle in the plane direction of the stage and in a direction intersecting the plane direction, and moving the stage and the nozzle in the plane direction relative to each other, with the first straight portion and the first And a control unit for controlling the adjusting unit and the moving mechanism to draw the paste in a pattern having a corner portion continuous to the straight portion of the second portion and a second straight portion continuous to the corner portion, wherein the control portion includes: When the opposite position of the nozzle with respect to the application object on the stage enters the corner portion with respect to the moving mechanism, The relative speed in the plane direction of the stage and the nozzle is lowered, the discharge pressure is lowered, and control is made to narrow the separation distance between the application object on the stage and the nozzle, and the opposite position of the nozzle with respect to the application object on the stage is moved from the corner portion. When going out to the second straight portion, the relative speed in the plane direction between the stage and the nozzle is increased to increase the discharge pressure and to control the distance between the coating object on the stage and the nozzle to be widened.

According to a second aspect of the present invention, there is provided a stage on which a coating object is placed, a nozzle for discharging paste, an adjusting unit for adjusting discharge pressure for discharging paste from the nozzle, and a stage and a nozzle on the surface of the stage. The stage and the nozzle are relatively moved in the plane direction by using a moving mechanism for relatively moving in the direction intersecting the direction and the plane direction, and the first straight portion and the first straight portion with respect to the coating object on the stage. A paste coating method for drawing a paste in a pattern having a continuous corner portion and a second straight portion continuous to the corner portion, wherein the nozzle is opposed to the coating object on the stage with respect to the adjusting portion and the moving mechanism during the drawing of the pattern. Enters the corner portion from the first straight portion, the relative velocity in the plane direction of the stage and the nozzle is lowered, In addition to lowering the force, control is performed to narrow the separation distance between the application object on the stage and the nozzle, and when the opposite position of the nozzle with respect to the application object on the stage goes out from the corner to the second straight portion, the surface direction of the stage and the nozzle. Relative speed is increased to increase the discharge pressure, and control is performed to increase the separation distance between the object to be coated on the stage and the nozzle.

According to this invention, generation | occurrence | production of the dispersion | variation in the paste application amount can be suppressed, and paste application time can be shortened.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows schematic structure of the paste application apparatus which concerns on embodiment of this invention.
It is explanatory drawing for demonstrating an example of the application | coating pattern of the paste which the paste application apparatus shown in FIG. 1 applies.
It is explanatory drawing for demonstrating the application | coating process at the time of apply | coating the application | coating pattern shown in FIG.
It is explanatory drawing for demonstrating the application | coating path | route when apply | coating the application | coating pattern shown in FIG.

EMBODIMENT OF THE INVENTION One Embodiment of this invention is described with reference to drawings.

As shown in FIG. 1, in the paste application apparatus 1 which concerns on embodiment of this invention, the board | substrate K which is an application | coating target object is in a horizontal state (in FIG. 1, in the X-axis direction and the Y-axis direction orthogonal to it). Sealing agent to the stage 2 placed in the following state, the stage moving mechanism 3 which holds the stage 2 and moves it in the X-axis direction and the Y-axis direction, and the substrate K on the stage 2. A coating head 4 for applying a paste such as a paste having a sealability and adhesiveness, a head moving mechanism 5 for moving the coating head 4 in the Z-axis direction, and a stage ( 2) a range finder 6 for measuring the distance of the substrate K on the substrate, a gas supply unit 7 for supplying gas to the coating head 4, and an adjusting unit for adjusting the supply pressure (gas flow rate) of the gas ( 8) and the control part 9 which controls each part.

The stage 2 is a table in which board | substrates K, such as a glass substrate, are put, and is provided in the upper surface of the stage movement mechanism 3. This stage 2 is equipped with the adsorption mechanism which adsorb | sucks the board | substrate K, for example, and fixes and hold | maintains the board | substrate K on the mounting surface of the stage 2 by the adsorption mechanism. As the adsorption mechanism, for example, an air adsorption mechanism or the like is used.

The stage movement mechanism 3 has an X axis movement mechanism, a Y axis movement mechanism, etc., and is a movement mechanism which guides and moves the stage 2 to an X axis direction and a Y axis direction. As the X-axis moving mechanism or the Y-axis moving mechanism, for example, a feed screw moving mechanism using a motor as a driving source, a linear motor moving mechanism using a linear motor as a driving source, and the like are used.

The application head 4 has the syringe 4a which is a container which accommodates paste, and the nozzle 4b which discharges the paste accommodated in the syringe 4a. This coating head 4 is connected to the gas supply part 7 via piping 7a, such as a gas supply tube, and the nozzle | paste in the syringe 4a is made into the nozzle | paste by the gas supplied in the syringe 4a. It discharges from the tip of 4b).

The head movement mechanism 5 is a movement mechanism which has a Z-axis movement mechanism, and guides and moves the coating head 4 to a Z-axis direction. The head moving mechanism 5 is supported by a supporting member (not shown), and supports the coating head 4 so as to be movable in the Z-axis direction orthogonal to the coating surface of the substrate K, and thus the stage 2 Fold in the Z-axis direction with respect to the substrate K on the (). As the head moving mechanism 5, for example, a feed screw mechanism using a servo motor as a driving source, a moving mechanism using a linear motor as a driving source, and the like are used.

The distance measuring device 6 is provided integrally with the application head 4 and is a measuring device for measuring the distance from itself to the surface of the substrate K on the stage 2. The measured value measured by this distance meter 6 is used by the control part 9, and the distance (gap) between the front-end | tip of the nozzle 4b of the application | coating head 4, and the board | substrate K on the stage 2 is shown. Is obtained. In addition, as the range finder 6, a laser displacement meter etc. are used, for example.

The gas supply part 7 is a storage part which stores gas (for example, compressed gas), such as clean dry air (CDA) and nitrogen (N2). This gas supply part 7 is connected to the syringe 4a of the application | coating head 4 via the piping 7a, such as a gas supply tube, and supplies gas in the syringe 4a.

The adjustment part 8 is provided in the middle of the path | route of the piping 7a, and changes the flow volume of the gas which flows in the piping 7a under control of the control part 9, and adjusts the discharge pressure of the application | coating head 4 It is an adjustment unit. As this adjustment part 8, an electromagnet regulator etc. are used, for example. In addition, the discharge pressure of the coating head 4 is the pressure for discharge of the paste from the nozzle 4b of the coating head 4.

The control part 9 is equipped with the microcomputer which controls each part intensively, the memory | storage part which stores various programs, various information, etc., and the operation part which receives input operation from an operator. The control unit 9 is electrically connected to each unit, and controls the operation of each unit based on various programs, various information, and the like stored in the storage unit.

In the storage unit, application information including an application pattern, application conditions, and the like is stored. Application | coating conditions are setting condition information, such as application | coating speed | rate, discharge pressure, and a gap. Such application | coating information is previously memorize | stored in the memory part by the input operation to an operation part, data communication, or the medium of a portable storage device. As the storage unit, a memory, a hard disk drive (HDD), or the like is used.

Next, the application | coating operation | movement which the above-mentioned paste application apparatus 1 performs is demonstrated in detail. Here, as an example of the application | coating pattern (paste pattern) of a paste, the case where one application | coating pattern P is drawn to a rectangular closed loop as shown in FIG. 2 is demonstrated.

The paste application device 1 applies paste in a linear shape, for example, in a clockwise direction, along the periphery of the substrate K on the stage 2, and draws a coating pattern P of a rectangular closed loop. Four straight portions A and four corner portions B exist in the application pattern P of the rectangular closed loop. In addition, the starting point and the end point of the application | coating position in the board | substrate K are the same position.

First, the control unit 9 captures an alignment mark (not shown) on the substrate K with a camera or the like prior to paste application, detects the position by image recognition, and based on the position, the substrate K The position (coating position) at which the paste is applied on the surface of the mask) is specified.

Then, the control part 9 controls the stage movement mechanism 3, the head movement mechanism 5, and the adjustment part 8 based on application | coating information and various programs, and the nozzle 4b of the application | coating head 4, By discharging the paste from the tip of the nozzle 4b of the coating head 4 while moving the substrate K on the stage 2 relative to the surface direction of the substrate K based on the application position specified above. The application pattern P of a rectangular closed loop is drawn to the board | substrate K on (2).

At this time, the control part 9 controls the stage moving mechanism 3, and adjusts the application | coating speed (relative speed between the stage 2 and the application | coating head 4) which is the moving speed of the stage 2, The control part 8 is controlled to adjust the discharge pressure of the application head 4. Moreover, the control part 9 controls the head movement mechanism 5, and adjusts the clearance gap (gap) of the front end of the nozzle 4b of the application | coating head 4, and the board | substrate K on the stage 2. As shown in FIG.

At the time of adjusting this separation distance, the control part 9 uses the distance measured by the distance measuring device 6 to separate the tip of the nozzle 4b of the coating head 4 from the substrate K on the stage 2. The distance is sequentially determined, the head moving mechanism 5 is controlled based on the obtained separation distance, and the application head 4 is placed up and down. In particular, in the linear part A of the application | coating pattern P, in order to make the application | coating amount of the paste apply | coated to the board | substrate K uniform, the front end of the nozzle 4b of the application | coating head 4, and the board | substrate on the stage 2 The separation distance of (K) is maintained at an appropriate value of the gap stored in the storage unit. On the other hand, in the corner portion B of the coating pattern P, the distance between the tip of the nozzle 4b of the coating head 4 and the substrate K on the stage 2 is intentionally changed without making it constant. .

As shown in FIG. 3, the application | coating speed becomes constant at the appropriate value (1st application | coating speed v1) by which paste application amount becomes uniform in the linear part A of the application | coating pattern P, and application | coating In the corner portion B of the pattern P, the inlet b1 (see FIG. 4) of the corner portion B is lowered to a predetermined deceleration (minus acceleration), and after a predetermined time t1, the small It becomes constant at stationary (2nd application | coating speed v2), it becomes high to preset acceleration (acceleration of plus) from the exit b2 (refer FIG. 4) of the corner part B, and after predetermined time t1, It returns to the above-mentioned appropriate value (1st application | coating speed v1), and becomes constant.

Regarding this application speed, the appropriate value (first application speed v1) of the straight portion A is the highest application speed allowed by the stage moving mechanism 3 to shorten the paste application time. In addition, the predetermined value (second coating speed v2) of the corner part B does not change remarkably the preferable coating speed (for example, the line width, thickness, etc. of the coating pattern P) acquired experimentally or experimentally. Speed). Further, in order to shorten the paste application time, it is preferable to make the predetermined time t1 as short as possible, which predetermined time t1 depends on the acceleration / deceleration speed of the stage 2, that is, the motor performance of the stage moving mechanism 3. do.

According to such a change of the application | coating speed, the control value of the discharge pressure given to the adjustment part 8 is adjusted. The control value of this discharge pressure becomes constant at the appropriate value (1st discharge pressure p1) by which paste application amount becomes uniform in the linear part A of the application | coating pattern P, and application | coating pattern P In the corner portion B of the corner portion B, the lower portion of the corner portion B is rapidly lowered to a predetermined value (the second discharge pressure p2) at the inlet b1 (see FIG. 4) and becomes constant. At the outlet b2 (see FIG. 4) at an instant, the constant value (first discharge pressure p1) is increased to a constant value.

Regarding the control value of this discharge pressure, the appropriate value (first discharge pressure p1) of the straight line portion A indicates that the paste discharge amount per unit time is the paste application amount per unit time to be applied to the substrate K and It is determined based on the application | coating speed (maximum rate: 1st application | coating speed v1) of the above-mentioned linear part A, and is a control value calculated | required from the paste application amount. In addition, the predetermined value (second discharge pressure p2) of the corner portion B is theoretically obtained according to the application rate (second coating speed v2) of the corner portion B described above. For example, the control is obtained from a paste discharge amount in which the line width, thickness, etc. of the coating pattern P do not change remarkably, preferably from the discharge amount in which the coating amount becomes uniform at the straight portion A and the corner portion B). Value.

As described above, the control value of the discharge pressure is changed, but the actual value of the discharge pressure (gas pressure acting on the paste in the syringe 4a) is determined by the inlet b1 of the corner portion B of the coating pattern P (Fig. 4) from the time point at which the control value of the discharge pressure is switched from the first discharge pressure p1 to the second discharge pressure p2, the outlet b2 of the corner portion B (see FIG. 4). The pressure is gradually lowered from the first discharge pressure p1 to the second discharge pressure p2. Next, at the outlet b2 of the corner portion B, the first discharge pressure p1 from the time when the control value of the discharge pressure is switched from the second discharge pressure p2 to the first discharge pressure p1. ) Gradually increases, and after a predetermined time t1 + t2, the flow returns to a proper value (first discharge pressure p1) and becomes constant. This change in actual value is obtained empirically or experimentally. In this case, the actual value of the discharge pressure at the outlet b2 of the corner portion B is assumed to reach the second discharge pressure p2, but the timing of the discharge pressure is responsive because of the good or bad responsiveness of the discharge pressure. That is, if the responsiveness of the discharge pressure is good, if the actual value of the discharge pressure reaches the second discharge pressure p2 before reaching the outlet b2 of the corner portion B, and the responsiveness of the discharge pressure is bad, Even when the outlet b2 of the corner portion B is reached, the actual value of the discharge pressure does not satisfy the second discharge pressure p2.

This phenomenon is because the actual discharge pressure of the coating head 4 gradually changes due to the response delay. That is, when lowering the discharge pressure of the application | coating head 4, the adjustment part 8 lowers the pressure (flow rate) of supply gas, and lowers the atmospheric pressure in the syringe 4a of the application | coating head 4. In addition, when increasing the discharge pressure of the application | coating head 4, the adjustment part 8 raises the pressure (flow rate) of supply gas, and raises the atmospheric pressure in the syringe 4a of the application | coating head 4. At this time, because of the compressibility of the gas, a response delay occurs, so it is difficult to control only the discharge pressure in accordance with the application speed and to keep the paste coating amount constant.

Here, the distance (gap) between the tip of the nozzle 4b of the application head 4 and the substrate K on the stage 2 is also adjusted in accordance with the change in the application speed and the change in the discharge pressure. This gap becomes constant at the appropriate value (1st gap g1) which paste application amount becomes uniform in the linear part A of the application | coating pattern P, and the corner part B of the application | coating pattern P is uniform. ), It is lowered to the second gap g2 from the inlet b1 of the corner portion B until the predetermined time t1 passes, and after the predetermined time t1 elapses, the predetermined time ( It gradually rises to the third gap g3 until t2) elapses. Further, a fourth gap larger than the appropriate value (the first gap g1) between the exit b2 of the corner portion B after the predetermined time t2 has elapsed and the predetermined time t1 elapses. after the predetermined time t1 has elapsed, and gradually decreases to the first gap g1 until the predetermined time t2 has elapsed, and after the predetermined time t2 has elapsed, It returns to stationary (first gap g1) and becomes constant.

Regarding this gap, the appropriate value (first gap g1) of the straight portion A is the application rate (maximum speed: the first application rate v1) of the above-mentioned linear portion A and the first. It is a value of the gap determined according to the discharge pressure p1 of (paste discharge amount at the first discharge pressure p1). In addition, the gap (2nd-4th gap g2-g4) in the corner part B is a coating speed (2nd application speed v2) and discharge pressure in the corner part B mentioned above. According to the actual value (actual paste ejection amount), the paste coating amount of the corner portion B is adjusted to be equal to the paste coating amount of the straight portion A. FIG.

Specifically, at the inlet b1 of the corner portion B, the deceleration from the first coating speed v1 to the second coating speed v2 is started, and the control value of the discharge pressure is the first discharge pressure. From p1, the second discharge pressure p2 is switched. Then, after the predetermined time t1 has elapsed, the application speed reaches the second application speed v2, but the actual value of the discharge pressure still does not reach the second discharge pressure p2, but the first discharge pressure p1. Is at a slightly lower discharge pressure. For this reason, as the actual value of the discharge pressure is higher than the second discharge pressure p2, the discharge amount of the paste from the nozzle 4b is larger than the desired discharge amount, so that the coating amount of the paste applied to the substrate K is thus It will become larger than the application amount to be used. Here, the gap is reduced to the second gap g2, the discharge resistance of the paste from the nozzle 4b is increased, and the discharge amount is excessive because the actual value of the discharge pressure is higher than the second discharge pressure p2. Offset minutes. That is, since the discharge amount of the paste from the nozzle 4b decreases when the discharge resistance increases, the paste is formed by setting the gap to the second gap g2 even when the actual value of the discharge pressure is higher than the second discharge pressure p2. Can be made the desired discharge amount.

Further, from the time point at which the predetermined time t1 is reached until the predetermined time t2 elapses (outlet b2), the application speed is maintained at the second application speed v2, while the actual value of the discharge pressure is maintained. It gradually decreases toward the second discharge pressure p2. For this reason, with the gap maintained in the second gap g2, the discharge amount of the paste from the nozzle 4b decreases with the passage of time in accordance with the decrease in the actual value of the discharge pressure. The coating amount of the paste to be applied gradually decreases. Here, the gap is gradually increased from the second gap g2 to the third gap g3 larger than the second gap g2 in order to compensate for the decrease in the paste discharge amount caused by the decrease in the actual value of the discharge pressure. Let's do it. As a result, the discharge resistance of the paste from the nozzle 4b gradually decreases, so that the discharge amount of the paste gradually increases by that amount, and the decrease in the paste discharge amount due to the decrease in the actual value of the discharge pressure is compensated for.

In addition, at the outlet b2 of the corner portion B, the application speed is accelerated from the second application speed v2 to the first application speed v1, and the control value of the discharge pressure is the second discharge. The pressure p2 is switched from the first discharge pressure p1. Then, after the predetermined time t1 has elapsed, the application speed reaches the first application speed v1, but the actual value of the discharge pressure still does not reach the first discharge pressure p1 but the second discharge pressure p2. Is at a slightly higher discharge pressure. Therefore, the discharge amount of the paste from the nozzle 4b is smaller than the desired discharge amount so that the actual value of the discharge pressure is lower than the first discharge pressure p1, so that the coating amount of the paste applied to the substrate K is the target. It becomes less than the application amount to set. Here, the gap is increased to the fourth gap g4 larger than the first gap g1, the discharge resistance of the paste from the nozzle 4b is reduced, and the actual value of the discharge pressure is equal to the first discharge pressure ( The desired discharge amount is obtained by offsetting the shortage of the discharge amount lower than p1).

At the time point when the predetermined time t1 is reached, the application speed is maintained at the first application speed v1, and the actual value of the discharge pressure is equal to the first discharge pressure (T) until the predetermined time t2 elapses. gradually increasing towards p1). For this reason, with the gap maintained in the fourth gap g4, the discharge amount of the paste from the nozzle 4b increases with the passage of time as the actual value of the discharge pressure increases, The coating amount of the paste to be applied gradually increases. Here, the gap is gradually reduced from the fourth gap g4 to the first gap g1 in order to offset the increase in the paste discharge amount caused by the increase in the actual value of this discharge pressure. As a result, since the discharge resistance of the paste from the nozzle 4b gradually increases, the discharge amount of the paste gradually decreases by that amount, and the increase in the paste discharge amount due to the increase in the actual value of the discharge pressure is offset.

As a result, the paste coating amount is uniformly maintained over the straight portions A and the corner portions B (see FIG. 3). Here, when paying attention to one corner part B, it is continuous to the 1st linear part A, the corner part B which is continuous to the 1st linear part A, and the corner part B. In the same pattern as that of the second straight line portion A, the paste coating amount is kept uniform. In addition, the same control as above is performed also in the other straight part A and the corner part B. FIG.

As described above, according to the embodiment of the present invention, when the position where the nozzle 4b of the coating head 4 with respect to the substrate K on the stage 2 enters the corner portion B, the coating speed is increased. Lowering the discharge pressure at which the coating head 4 discharges the paste, and narrowing the separation distance (gap) between the substrate K on the stage 2 and the nozzle 4b of the coating head 4. When the position where the nozzle 4b of the coating head 4 with respect to the substrate K on the stage 2 comes out of the corner portion B, the coating speed is increased, and the coating head 4 discharges the paste. In addition to increasing the discharge pressure, the distance between the substrate K on the stage 2 and the nozzle 4b of the application head 4 is increased, so that the discharge pressure is changed in accordance with the application speed of the corner portion B. In addition, the separation distance between the substrate K on the stage 2 and the nozzle 4b of the application head 4 is also changed.

In this way, in order to keep the paste coating amount constant, in addition to the control for lowering the discharge pressure of the coating head 4 in accordance with the application speed of the corner portion B, the gap control is performed, so that it is easy to control the paste coating amount. Since the variation in the paste coating amount due to the low responsiveness of the discharge pressure is suppressed, the occurrence of the variation in the paste coating amount can be reliably prevented. In addition, due to the low responsiveness of the discharge pressure, the acceleration / deceleration distance required in front of the inlet b1 and the outlet b2 of the corner portion B can be made unnecessary or shorter, even when the application speed is increased. Since the inside distance is suppressed from being long, the paste application time can be shortened.

In addition, when the application speed in the corner portion B decreases and becomes constant (second application speed v2), the substrate K on the stage 2 and the nozzles 4b of the application head 4 are separated. Substrate on the stage 2 when the distance (gap) is gradually widened, and the application speed becomes high in the straight portion A after leaving the corner portion B and becomes constant (first application speed v1). By narrowing the separation distance between (K) and the nozzle 4b of the application head 4 gradually, the finer discharge amount can be controlled and the paste application amount can be adjusted precisely, thus making it possible to more reliably generate the variation in the paste application amount. You can prevent it.

In addition, this invention is not limited to embodiment mentioned above, It can variously change in the range which does not deviate from the summary. For example, some components may be deleted from all the components shown in the above-described embodiment. In addition, you may combine components suitably over other embodiment.

In the above-mentioned embodiment, although the discharge of the paste from the nozzle 4b of the application head 4 is performed by raising or decreasing the air pressure in the syringe 4a of the application head 4, it is not limited to this. In the syringe 4a, a mechanism, for example, a screw-shaped mechanism, may be provided, and the mechanism may be operated to push the paste into the nozzle 4b and discharge it from the nozzle 4b. Also in this case, since the response of discharge pressure may not be high by a mechanism, it is preferable to perform control like embodiment mentioned above. In addition, since the amount of rotation of the screw-shaped mechanism is controlled by the control unit 9 to adjust the paste discharge amount, the screw-shaped mechanism functions as the adjusting unit 8.

In addition, in the above-described embodiment, the gap is linearly lowered or raised in accordance with the change of the coating speed at the corner portion B of the coating pattern P, but the present invention is not limited thereto. You may make it fall or increase a gap gradually with a change of speed | rate.

The gap is linearly lowered or raised in accordance with the change in the actual value of the discharge pressure at a predetermined time t2. However, the gap is not limited thereto, and the gap is changed according to the change in the actual value of the discharge pressure, for example. You may make it fall or increase gradually. In other words, the gap may be reduced or increased so as to offset the increase or decrease of the discharge amount caused by the change in the actual value of the discharge pressure.

In addition, in the above-described embodiment, the stage 2 is moved so as to relatively move the substrate K on the stage 2 and the nozzle 4b of the coating head 4, but the present invention is not limited thereto. For example, the nozzle 4b may be moved along the horizontal direction (X direction and Y direction), and the nozzle 4b is moved in either of the X direction and the Y direction, and the stage 2 may be moved. You may make it move to another direction of a X direction and a Y direction.

In addition, although the above-mentioned embodiment demonstrates that it apply | coats a paste in a uniform application | coating amount in a closed-loop pattern, it is not limited to this, The application amount is increased or decreased in the middle of a pattern as needed, such as a design. You may do so.

1: Paste application device 2: Stage
3, 5: movement mechanism (stage movement mechanism, head movement mechanism)
4b: nozzle 8: adjusting part
9: control part K: application object (substrate)

Claims (6)

A stage on which an application object is placed,
A nozzle for discharging the paste,
An adjusting unit for adjusting a discharge pressure for discharging the paste from the nozzle;
A moving mechanism for relatively moving the stage and the nozzle in a plane direction of the stage and in a direction crossing the plane direction;
The stage and the nozzle are relatively moved in the plane direction, and a first straight portion and a corner portion continuous to the first straight portion and a second portion continuous to the corner portion with respect to the coating object on the stage. And a control unit for controlling the adjustment unit and the moving mechanism to draw the paste in a pattern having a straight portion,
The control unit, during the drawing of the pattern,
About the adjustment part and the moving mechanism,
When the opposite position of the nozzle with respect to the application object on the stage enters the corner portion from the first straight portion, the relative speed in the plane direction of the stage and the nozzle is lowered, and the discharge pressure is lowered. In addition, a control is performed to narrow the separation distance between the coating object and the nozzle on the stage,
When the opposite position of the nozzle with respect to the application object on the stage goes out from the corner portion to the second straight portion, the relative speed in the plane direction of the stage and the nozzle is increased to increase the discharge pressure. And controlling to widen the separation distance between the coating object and the nozzle on the stage. The method according to claim 1,
The control unit,
About the adjustment part and the moving mechanism,
In the corner portion, control is made to be constant at a speed at which the relative speed in the surface direction of the stage and the nozzle is lowered, and during this control, a response delay of the actual discharge pressure to the decrease in the discharge pressure is controlled. And spreading the distance between the coating object and the nozzle on the stage gradually. The method according to claim 2,
The control unit,
About the adjustment part and the moving mechanism,
When the opposite position of the nozzle emerges from the corner portion to the second straight portion, control is performed to make the relative speed in the surface direction of the stage and the application head constant at a speed which is increased, and during this control, And a control for gradually narrowing the separation distance between the application object and the nozzle on the stage in accordance with a delay in response of the actual discharge pressure to the rise of the discharge pressure. A stage on which the application object is placed, a nozzle for discharging the paste, an adjusting unit for adjusting the discharge pressure for discharging the paste from the nozzle, a direction in which the stage and the nozzle intersect the surface direction of the stage and this surface direction The corner part which continues the said 1st linear part and this 1st linear part with respect to the said coating target object on the said stage by making the said stage and the said nozzle move relative to the said surface direction using the moving mechanism which moves relatively to the said surface. And a paste coating method for drawing the paste in a pattern having a second straight portion continuous to the corner portion,
About drawing of the said pattern, about the said adjustment part and the said moving mechanism,
When the opposite position of the nozzle with respect to the application object on the stage enters the corner portion from the first straight portion, the relative speed in the plane direction of the stage and the nozzle is lowered, and the discharge pressure is lowered. In addition, a control is performed to narrow the separation distance between the coating object and the nozzle on the stage,
When the opposite position of the nozzle with respect to the application object on the stage emerges from the corner portion to the second straight portion, the relative speed in the plane direction of the stage and the nozzle is increased to increase the discharge pressure. And controlling to widen the separation distance between the application object and the nozzle on the stage. The method according to claim 4,
About the adjustment part and the moving mechanism,
In the corner portion, control is made to be constant at a speed at which the relative speed in the surface direction of the stage and the nozzle is lowered, and during this control, a response delay of the actual discharge pressure to the decrease in the discharge pressure is controlled. And spreading the distance between the coating object and the nozzle on the stage gradually. The method according to claim 5,
About the adjustment part and the moving mechanism,
When the opposite position of the nozzle emerges from the corner portion to the second straight portion, control is performed to make the relative speed in the surface direction of the stage and the application head constant at a speed which is increased, and during this control, And a control for gradually narrowing the separation distance between the application object on the stage and the nozzle in accordance with a delay in response of the actual discharge pressure to the rise in the discharge pressure.

Images