JP2001171128A - Manufacturing method for printer head and nozzle- processing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method for printer heads and a nozzle- processing apparatus which can obtain a highly accurate nozzle shape and improve productivity. SOLUTION: One face 101a of a nozzle form plate 101 is exposed to a laser light L via a processing mask 204 having a nozzle pattern of a first nozzle 111 and a second nozzle 112, whereby the first nozzle and the second nozzle perpendicular to the one face 101a of the nozzle form plate 101 are simultaneously formed. The other face 101b of the nozzle form plate 101 or a bond face 102a of an inner sheet 102 is exposed to the laser light L, whereby an ink supply path 113 for connecting the first nozzle 111 to an ink storage part 108 is formed almost perpendicularly to the first nozzle 111. The nozzle form plate 101 is bonded to inner sheets 102 and 103.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a two-liquid type printer head for printing on an object by mixing ink and a diluent, and a nozzle processing apparatus.

[0002]

2. Description of the Related Art FIG. 7 is a block diagram showing an example of a conventional printer head. The printer head 1 will be described with reference to FIG. The printer head 1 shown in FIG. 7 includes an outer sheet 2, inner sheets 3, 4, a diaphragm 5, a nozzle base 6, an actuator 7, and the like. The outer sheet 2 is a polymer sheet made of, for example, polyimide or the like, and has a thickness H of, for example, about 50 (μm). The outer sheet 2 has a first nozzle 2a for discharging the ink I and a second nozzle 2b for discharging the diluent DS. The first nozzle 2a is formed obliquely with respect to the surface 2c of the outer sheet 2, and the second nozzle 2b is formed substantially perpendicularly (in the direction of arrow Z) with respect to the outer sheet 2.

[0003] The first inner sheet 3 is an outer sheet 2
The second inner sheet 4 is bonded and fixed to the first inner sheet 3. The first inner sheet 3 and the second inner sheet 4 are formed with an ink storage section 8 for storing the ink I and a diluting liquid storing section 9 for storing the diluting liquid DS. Pressure chambers 8a and 9a are formed in the ink storage section 8 and the diluent storage section 9, respectively, and pressure is applied by actuators 7 and 7 described later.

A diaphragm 5 is bonded and fixed to the second inner sheet 4, and an actuator 7 is bonded and fixed to the diaphragm 5. The diaphragm 5 has a function of transmitting the pressure given by the actuator 7 to the pressure chambers 8a and 9a. The actuator 7 is, for example, a laminated piezoelectric element (piezo element).
It expands and contracts in the direction. Further, the diaphragm 5 is bonded and fixed to the nozzle base 6, and the nozzle base 6 holds from the diaphragm 5 to the outer sheet 2.

FIG. 8 is a plan view showing the shapes of the first nozzle 2a and the second nozzle 2b in the printer head 1 shown in FIG. 7. Referring to FIG. 8, the first nozzle 2a and the second nozzle 2b will be described. explain. As shown in FIG. 8A, the first nozzle 2a is formed in a round shape or a crescent shape with a diameter of, for example, 15 (μm). Here, the distance D between the first nozzle 2a and the second nozzle 2b is, for example, 4 (μm).
And the relative position accuracy is 4
(Μm) ± 1 (μm). As shown in FIG. 8B, the first nozzle 2a is formed to be inclined by an angle θ with respect to the thickness direction of the outer sheet 2 (the direction of the arrow Z). By inclining the first nozzle 2a in this manner, the ink I flows toward the diluent DS, and the ink I and the diluent DS are mixed.

FIG. 9 is a block diagram showing an example of a conventional printer head manufacturing apparatus. The printer head manufacturing apparatus 10 will be described with reference to FIG. The printer head manufacturing apparatus 10 shown in FIG.
3, 15, a mask 14, an imaging lens 16, an object holder 17, and the like. The laser emitting section 11 is, for example, an excimer laser oscillator, and emits the laser light L. The mirrors 12, 13, and 15 change the optical path of the laser beam L, respectively.
Is a cross-sectional shape of the first nozzle 2a and the second nozzle 2b formed on the outer sheet 2. The imaging lens 16 adjusts the focal point of the laser light L sent from the mask 14 via the mirror 15 with respect to the outer sheet 2, and is arranged so as to be movable in the arrow Z direction.

[0007] The object holding section 17 includes an XY table 17.
a, actuators 17b, 17c, angle adjuster 17d
And so on. The XY table 17a holds the motor 17
It has a structure that can be moved in the XY directions by driving b and 17c. The angle adjustment unit 17 is provided on the XY table 17a.
d is arranged, and the outer seat 2 is held by the angle adjustment unit 17d. The angle adjuster 17d is arranged to be rotatable in the direction of the arrow r, and adjusts the position angle of the outer seat 2. Thereby, the first nozzle 2a inclined by the angle θ in the thickness direction (the arrow Z direction) of the outer sheet 2 using the laser light L from a certain direction,
The second nozzle 2b penetrating in the thickness direction (the arrow Z direction) of the outer sheet 2 can be formed.

Next, an operation example of the printer head manufacturing apparatus 10 will be described with reference to FIG. First, the outer sheet 2 is arranged on the angle adjusting section 17d in FIG. 11, and is positioned at a position where the first nozzle 2a or the second nozzle 2b can be formed. At this time, when the first nozzle 2a is formed, the outer sheet 2 is tilted by the angle θ by the angle adjuster 17d. Then, the laser emitting unit 11
Emits a laser beam L from the The laser beam L is transmitted to the mirror 1
The light passes through the mask 14 through 2 and 13. At this time, the laser beam L is applied by the mask 14 to, for example, the first nozzle 2a.
Alternatively, a predetermined pattern having a cross-sectional shape of the second nozzle 2b is formed.

After that, the laser beam L passes through the mirror 15 through the imaging lens 16, and the laser beam L is focused on the portion of the outer sheet 2 where the first nozzle 2a is to be formed. Then, the first nozzle 2a or the second nozzle 2b is formed by the laser light L. Here, as shown in FIG. 8A, the distance D between the first nozzle 2a and the second nozzle 2b is 4
(Μm) ± 1 (μm), so that the angle adjustment unit 17d is required to have a high precision of 1 (μm) or less as the rotational runout accuracy, the angular positioning accuracy, and the end face runout accuracy. Is done.

[0010]

Here, as shown in FIG. 8B, since the formation angles of the first nozzle 2a and the second nozzle 2b are different, the first nozzle 2a and the second nozzle 2 are formed on the outer sheet 2. It is difficult to form 2b simultaneously. Therefore, the first nozzles 2a and the second nozzles 2b are formed on the outer sheet 2 in a step of forming the first nozzles 2a and a step of forming the second nozzles 2b. However, by dividing the forming process of the first nozzle 2a and the second nozzle 2b into two, the relative positional accuracy of the first nozzle 2a and the second nozzle 2b is reduced, and D ± 1 (μm). However, there is a problem that it is difficult to form it with high precision. Further, by separating the step of forming the first nozzle 2a and the step of forming the second nozzle 2b, it takes time and effort to manufacture the outer sheet 2, and the printer head 1 cannot be efficiently manufactured. is there.

On the other hand, a method of simultaneously forming the first nozzle 2a and the second nozzle 2b using two laser beams L is also conceivable. However, when two or more laser beams L are used,
There is a problem that the cost of the entire apparatus increases. Further, even if two laser beams are used, there is a problem that it is difficult to form the relative positions of the first nozzle 2a and the second nozzle 2b with high accuracy.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a printer head manufacturing method and a nozzle processing apparatus which solve the above problems and have a highly accurate nozzle shape and can improve productivity.

[0013]

According to the first aspect of the present invention, there is provided an inner sheet having an ink storage section for storing ink and a diluent storage section for storing a diluent for diluting the ink. A method of manufacturing a printer head having a structure in which a first nozzle for discharging the ink and a nozzle forming plate on which a second nozzle for discharging the diluting liquid are formed are bonded to each other. Second
Through the processing mask having the nozzle pattern of the nozzle,
By irradiating a laser beam to one surface side of the nozzle forming plate, the first nozzle and the second nozzle perpendicular to the one surface of the nozzle forming plate are simultaneously formed, and the other surface of the nozzle forming plate is formed. Irradiating the laser beam to the side or the adhesive surface side of the inner sheet to form an ink supply path connecting the first nozzle and the ink storage portion substantially perpendicular to the first nozzle, This is achieved by a method of manufacturing a printer head in which a forming plate is bonded to the inner sheet.

According to the first aspect of the present invention, the first nozzle and the second nozzle are simultaneously formed by irradiating the laser beam to the nozzle forming plate via the processing mask. At this time, since the laser light is applied to the one surface of the nozzle forming plate from a substantially perpendicular direction, the first nozzle and the second nozzle are formed so as to be substantially perpendicular to the one surface of the nozzle forming plate. . Further, the same pattern as the nozzle pattern formed on the processing mask is formed on the nozzle forming plate. Then, the other surface side of the nozzle forming plate or the bonding surface side of the inner sheet is irradiated with the laser light to form an ink supply path connected to the first nozzle. Then, the nozzle forming plate and the inner sheet are adhered to complete the printer head. As described above, by forming the first nozzle perpendicular to one surface of the nozzle forming plate, the first nozzle and the second nozzle can be formed simultaneously.

According to a third aspect of the present invention, there is provided a laser emitting section for emitting a laser beam for forming a first nozzle for ejecting ink and a second nozzle for ejecting a diluting liquid on a nozzle forming plate. An imaging lens for focusing the laser beam on the nozzle forming plate, and an object holding unit for holding the nozzle forming plate, the imaging lens being arranged to be movable in the thickness direction of the nozzle forming plate. In the nozzle processing apparatus having the first nozzle and the second nozzle, the first nozzle and the second nozzle are disposed between the laser emitting unit and the imaging lens, and the first nozzle and the second nozzle are formed simultaneously. The through-hole having a cross-sectional shape is formed by the first nozzle and the second nozzle.
This is achieved by a nozzle processing apparatus having a processing mask arranged in a pattern to be formed by a nozzle.

According to the third aspect of the present invention, the processing mask is:
The laser beam is applied to the nozzle forming plate via the processing mask, and the first nozzle and the second nozzle are simultaneously formed. At this time, since the laser light is applied to the one surface of the nozzle forming plate from a substantially perpendicular direction, the first nozzle and the second nozzle are formed so as to be substantially perpendicular to the one surface of the nozzle forming plate. . Further, the same pattern as the nozzle pattern formed on the processing mask is formed on the nozzle forming plate. The laser beam emitted from the laser emitting unit is formed into a predetermined nozzle pattern via a processing mask. Then, laser light from the processing mask is irradiated onto the nozzle forming plate by the imaging lens. The first nozzle and the second nozzle are simultaneously formed on the nozzle forming plate by the laser light. At this time, the first nozzle and the second nozzle are simultaneously formed in a direction perpendicular to one surface of the nozzle forming plate.

[0017]

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Note that the embodiments described below are preferred specific examples of the present invention,
Although various technically preferable limits are given, the scope of the present invention is not limited to these modes unless otherwise specified in the following description.

FIG. 1 is a block diagram showing a preferred embodiment of the printer head of the present invention. The printer head 100 will be described with reference to FIG. The printer head 100 shown in FIG. 1 has an outer sheet 10 which is a nozzle forming plate.
1, an inner sheet 102, 103, a diaphragm 104, a nozzle base 105, an actuator 107, and the like. The outer sheet 101 is a polymer sheet made of, for example, polyimide or the like, and has a first nozzle 111, a second nozzle 112, and an ink channel 113 formed therein.

The first nozzle 111 is for discharging the ink I and is provided on one surface 101 of the outer sheet 101.
It is formed substantially perpendicularly to (a) (in the direction of arrow Z). The second nozzle 112 discharges the diluting liquid DS and is formed substantially perpendicularly (in the direction of the arrow Z) to one surface 101a of the outer sheet 101.

The outer sheet 101 is bonded and fixed to the first inner sheet 102, and the first inner sheet 1
02 is adhesively fixed to the second inner sheet 103. First inner sheet 102 and second inner sheet 1
Reference numeral 03 denotes an ink storage unit 107 for storing the ink I by, for example, pressing or etching.
And a diluent storage unit 108 for storing the diluent IE. Ink storage unit 108 and diluent storage unit 1
In 09, pressure chambers 108a and 109a are respectively formed, and pressures are respectively applied by actuators 107 and 107 described later.

The diaphragm 104 is made of, for example, the polyimide layer 10.
4a and a laminated material of a stainless steel thin plate 104b, and is adhered and fixed to the second inner sheet 4. Then, the stainless thin plate 104b of the diaphragm 104
Is formed only at the portion where the head base 105 and the actuator 107 are bonded. The actuator 107 is connected to the pressure chambers 108a, 1
09a is adhesively fixed. The actuator 107 is, for example, a laminated piezoelectric element (piezo element), and expands and contracts in the direction of arrow Z when a driving voltage is supplied. The diaphragm 104 is connected to the actuator 10
7 is transmitted to the pressure chambers 108a and 109a. Further, the diaphragm 104 is adhesively fixed to a nozzle base 105, and the nozzle base 105 holds from the diaphragm 104 to the outer sheet 101.

FIG. 2 shows the printer head 10 of FIG.
FIG. 2 is a structural view showing the shapes of a first nozzle 111 and a second nozzle 112 at 0, and FIG.
And the second nozzle 112 will be described. As shown in FIG. 2A, the diameter of the first nozzle 111 is, for example, 15 (μ).
m) is formed in a round shape or a crescent shape. The distance D between the first nozzle 111 and the second nozzle is, for example, 4
(Μm) apart. FIG. 2 (B)
As shown in FIG. 2, the first nozzle 111 has a thickness of about 10 (μ
m) is formed so as to be substantially perpendicular to one surface 101a of the outer sheet 101. On the other hand, the second nozzle 1
12 is also formed so as to be substantially perpendicular to one surface 101a of the outer sheet 101. As described above, by forming the first nozzle 111 and the second nozzle 112 in the same direction, the first nozzle 111 and the second nozzle 112 are formed.
Can be simultaneously formed.

An ink flow path 113 is connected to the first nozzle 111, and the ink flow path 113 is formed, for example, in a direction substantially perpendicular to the first nozzle 111. This ink flow path 113 has a function of flowing the ink I in the direction of arrow A, and the ink I ejected from the first nozzle 111
Flows toward the second nozzle 112 and mixes with the diluent DS. Therefore, the direction of the flow of the ink I can be set to a direction in which the direction of the flow of the ink I is mixed with the diluting liquid DS without forming the first nozzle at an angle as in the related art.

FIG. 3 is a block diagram showing an example of a printer head manufacturing apparatus according to the present invention. The printer head manufacturing apparatus 200 will be described with reference to FIG. 3 includes a laser emitting unit 201, mirrors 202, 203, and 205, a processing mask 204, an imaging lens 206, an object holding unit 207, and the like. The laser emitting unit 201 is, for example, an excimer laser oscillator that emits the laser light L.

The processing mask 204 is, as shown in FIG.
The outer sheet 101 has through holes 204a and 204b each having a nozzle pattern to be formed. The formation pattern of the through holes 204a and 204b is
The formation patterns of the first and second nozzles 112 are substantially the same. That is, the formation pattern of the through holes 204a and 204b is a reduced transfer mask several times as large as the first nozzle 111 and the second nozzle 112. Processing mask 20
4, a through hole 204a and a through hole 204b are formed so that the first nozzle 111 and the second nozzle 112 can be formed at the same time.

The imaging lens 206 shown in FIG.
Laser beam L sent from the mirror 04 via the mirror 205
For adjusting the focal point with respect to one surface 101a of the outer sheet 101, and is disposed so as to be movable in the arrow Z direction. The object holding unit 207 includes an XY table 207.
a, actuators 207b, 207c and the like. The XY table 207 a
It has a structure that can be moved in the X and Y directions by driving b and 207c. The outer sheet 101 is held on the XY table 207a.

Next, referring to FIG.
An operation example of 0 will be described. First, after the outer sheet 101 is held on the object holding unit 107 in FIG.
Laser light L is emitted from laser emitting section 201. Here, the energy density of the laser beam L on the processing surface is 2 (J
/ Cm) or more, and the taper of the machined hole is suppressed as much as possible to, for example, 2 (°) or less.

Then, the laser light L is applied to the mirrors 202 and 20.
The outer sheet 101 is irradiated to the first nozzle 111 and the second nozzle 112 via the processing masks 205, 205, the processing mask 204 and the imaging lens 206. Then, the first nozzle 111, the second nozzle 112, and the ink channel 113 are formed by the laser light L.

Next, FIG. 5 is a process chart showing an example of a method for manufacturing a printer head according to the present invention. The method for manufacturing a printer head will be described with reference to FIG. First, FIG.
As shown in (A), the laser beam L is applied to the outer sheet 10.
1 is irradiated on one surface 101a side, the outer sheet 1
First, the first nozzle 111 and the second nozzle 112 are formed at the same time. At this time, the first nozzle 111 is opened to, for example, 5 (μm) without penetrating, and the second nozzle 112 is opened.
Are formed to penetrate.

Next, as shown in FIG. 5B, the other surface 101b of the outer sheet 101 is irradiated with a laser beam L to form an ink flow path 113 by, for example, excimer laser simultaneous multi-hole processing. Thereby, the first nozzle 11
1 and the nozzle channel 113 are connected. afterwards,
As shown in FIG. 5C, the laser-processed outer sheet 101 is bonded and fixed to the inner sheet 102. Then, as shown in FIG. 5D, the first inner sheet 102 is bonded and fixed to the second inner sheet 103. Here, a predetermined pattern is formed on the second inner sheet 103 by pressing or etching. Then, the first inner sheet 102 and the second
The inner sheet 103 has an ink storage section 108 and a diluent storage section 109.

Next, the second inner sheet 103 is bonded and fixed to the etched diaphragm 105 of FIG. Thereafter, the nozzle base 105 and the actuator 107 are adhered and fixed to the etched thin stainless steel plate 104b side of the vibration plate 105, and the printer head 100 is completed.

According to the above embodiment, the first nozzle 11
By forming 1 in a direction perpendicular to the one surface 101a of the outer sheet, the outer sheet is formed almost in parallel with the second nozzle 112, so that the laser beam L can be used for reduction transfer processing by the processing mask 204. From this, the first nozzle 1
The relative positional accuracy between the first nozzle 11 and the second nozzle 112 is improved, and the production efficiency can be improved. That is, when the forming process of the first nozzle 111 and the forming process of the second nozzle 112 are separated, the first nozzle 111 and the second nozzle 112
Is difficult to control. On the other hand, by transferring the pattern of the processing mask 204 and simultaneously forming the first nozzle 111 and the second nozzle 112,
The relative positional accuracy between the nozzle 111 and the second nozzle can be improved.

Further, in the nozzle processing apparatus 200 shown in FIG. 3, an angle adjusting section for forming the first nozzle 111 at an angle is not required, and the nozzle processing apparatus 200 can be simplified. In addition, since the angle adjustment unit is not required, the reliability of the entire nozzle processing device 200 is improved.

The embodiment of the present invention is not limited to the above embodiment. In the printer head 100 of FIG.
Although the ink flow path 113 is formed in the outer sheet 101, as shown in FIG.
May be formed. At this time, an ink channel 113 is formed on the bonding surface 102a of the first inner sheet 102 by, for example, laser processing.

[0035]

As described above, according to the present invention,
A printer head manufacturing method and a nozzle processing apparatus that have a highly accurate nozzle shape and can improve productivity can be provided.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a preferred embodiment of a printer head according to the present invention.

FIG. 2 is a view showing an example of the structure of an outer sheet in the printer head of the present invention.

FIG. 3 is a configuration diagram showing a preferred embodiment of the laser processing apparatus of the present invention.

FIG. 4 is a plan view showing an example of a processing mask in the laser processing apparatus of the present invention.

FIG. 5 is a process chart showing a preferred embodiment of the printer head manufacturing method of the present invention.

FIG. 6 is a configuration diagram showing another embodiment of the printer head of the present invention.

FIG. 7 is a configuration diagram illustrating an example of a conventional printer head.

FIG. 8 is a diagram illustrating a structure of an outer sheet in the printer head of FIG. 7;

FIG. 9 is a configuration diagram showing an example of a conventional laser processing apparatus.

[Explanation of symbols]

100: Printer head, 101: Outer sheet, 102, 103: Inner sheet, 104
..Diaphragm, 105 ... head base, 107 ...
Actuator, 108 ... ink storage unit, 109
..Diluent storage section, 111... First nozzle, 112.
..Second nozzle, 113... Ink flow path, 200
-Nozzle processing device, 201 ... laser emission unit, 204
... Processing mask, 206 ... Imaging lens, 207
..Object holders, L: laser light I: ink,
DS: Diluent.

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Yuichi Takai 6-35 Kita Shinagawa, Shinagawa-ku, Tokyo Sony Corporation F-term (reference) 2C057 AF93 AG03 AG13 AG14 AG33 AG44 AP13 AP23 AP25 BA04 BA14 CA02 CA08

Claims (3)

[Claims] A first nozzle for discharging the ink and the diluting liquid are supplied to an inner sheet having an ink storing section for storing ink and a diluting liquid storing section for storing a diluting liquid for diluting the ink. In a method of manufacturing a printer head having a structure in which a nozzle forming plate on which a second nozzle for discharging is formed is bonded, the nozzle forming is performed via a processing mask having a nozzle pattern of the first nozzle and the second nozzle. By irradiating a laser beam to one surface side of the plate, the first nozzle and the second nozzle perpendicular to the one surface of the nozzle forming plate are simultaneously formed, and the other surface side of the nozzle forming plate or the By irradiating the laser beam to the adhesive surface side of the inner sheet, an ink supply path connecting the first nozzle and the ink storage section is formed by the first nozzle.
A method of manufacturing a printer head, comprising forming a nozzle forming plate substantially perpendicular to a nozzle and adhering the nozzle forming plate to the inner sheet. 2. When forming the first nozzle and the second nozzle, the first nozzle is formed so as not to penetrate the nozzle forming plate, and the second nozzle is formed so as to penetrate the nozzle forming plate. The method for manufacturing a printer head according to claim 1, wherein: 3. A laser emitting unit for emitting a laser beam for forming a first nozzle for discharging ink and a second nozzle for discharging a diluting liquid on a nozzle forming plate, and moving in a thickness direction of the nozzle forming plate. A nozzle processing apparatus, which is disposed so as to be capable of converging the laser beam on the nozzle forming plate, and an object holding unit for holding the nozzle forming plate, And a through hole having a cross-sectional shape of the first nozzle and the second nozzle for simultaneously forming the first nozzle and the second nozzle. A nozzle processing apparatus comprising: a nozzle and a processing mask arranged in a pattern to be formed by the second nozzle.