JP4668546B2 - Positioning jig, pattern forming device, head unit - Google Patents

Description

  The present invention relates to a pattern forming apparatus for forming a pattern such as a color filter in a liquid crystal display. More specifically, the present invention relates to a pattern forming apparatus, a head unit, a positioning jig, and the like that form a pattern by an inkjet method or the like.

Conventionally, as a method for forming a color filter pattern in a liquid crystal display on a substrate, there are various methods such as a dyeing method, a pigment dispersion method, an electrodeposition method, and a printing method.
In the dyeing method, a water-soluble polymer material for dyeing is applied on a substrate, and the photolithography process is repeated for three colors, R (red), G (green), and B (blue), to obtain a desired shape on the substrate. A color filter pattern is formed.
In the pigment dispersion method, a photosensitive resin layer is formed on a substrate, and the photolithography process is repeated for three colors of R (red), G (green), and B (blue) to form a color filter pattern of a desired shape on the substrate. Form.
In the electrodeposition method, a transparent electrode is patterned on a substrate and immersed in an electrodeposition coating solution containing a pigment, a resin, an electrolytic solution, and the like, which are R (red), G (green), and B (blue). By repeating the three colors, a color filter pattern having a desired shape is formed on the substrate.
In the printing method, a pigment is dispersed in a thermosetting resin, printing is performed for three colors of R (red), G (green), and B (blue), and a color filter pattern having a desired shape is formed on a substrate.

However, any of the above methods has a problem in terms of cost, yield, and the like because it is necessary to repeat the same process for three colors of R (red), G (green), and B (blue).
Therefore, a pattern forming apparatus has been proposed that forms a colored layer pattern by ejecting ink of three colors of R (red), G (green), and B (blue) onto a substrate by an inkjet method (for example, [Patents] Reference 1]).
According to this ink jet method, pattern formation of three colors of R (red), G (green), and B (blue) can be performed in a single process, and the manufacturing process can be simplified, thereby reducing cost and yield. The improvement etc. can be aimed at.

FIG. 13 is a perspective view of the positioning block and the inkjet head.
FIG. 14 is a cross-sectional view of the positioning block and the inkjet head.
FIG. 15 is a diagram showing a row arrangement of positioning blocks and inkjet heads.

As shown in FIGS. 13 and 14, the inkjet head 1301 is fixed to a predetermined position of the positioning block 1302 with an adhesive 1307 or the like. In this case, the fixed position can be determined based on a straight line 1305 connecting the nozzle holes 1303 of the inkjet head 1301, a straight line 1306 connecting the reference marks 1304 of the positioning block 1302, the nozzle hole position, the reference mark position, and the like. For example, the positioning is performed by setting the straight line 1305 and the straight line 1306 parallel to each other and setting the distance (l, m, etc.) between the nozzle hole and the reference mark to a predetermined length.
It is desirable to use a UV curable adhesive for the adhesive 1307 in order to suppress shrinkage during curing.

  As shown in FIG. 15, the inkjet head 1301 can be positioned by arranging a plurality of positioning blocks 1302 in contact with each other in a row.

JP 2002-361852 A

However, positioning by the positioning block has a problem that a predetermined accuracy is required for the positioning block, for example, a processing accuracy of the order of μm is required, skill is required, and a cost burden is increased.
In addition, there is a problem that it is difficult to maintain accuracy when the positioning block itself undergoes deformation such as contraction due to a temperature change or the like.

  Also, in order to cope with the expansion and change of the coating width, it is necessary to enlarge the inkjet head or increase the number of inkjet heads. However, if a hard material is used to maintain the accuracy of the positioning block itself, the entire apparatus However, there is a problem that the cost of the control mechanism or the like increases and the burden of maintenance and management increases. In addition, there is a problem that the control of each inkjet head is difficult and complicated.

  The present invention has been made in view of the above problems, and provides an inkjet pattern forming apparatus, a head unit, a positioning jig, and the like that can perform pattern formation with high accuracy and efficiency. With the goal.

In order to achieve the above-mentioned object, the first invention is provided for each head in which a plurality of nozzle holes for applying a ink to form a pattern on a substrate are arranged, and a plurality of adjacent nozzles are arranged adjacent to a support member for positioning. A jig that includes a body member that is elastically deformed in a width direction that is an arrangement direction of the plurality of nozzle holes, and a load unit that applies a load in the width direction from the inside of the body member. The load means is capable of extending and contracting the main body member in the width direction, and includes a screw member in which one end is cut into a normal screw and the other end is cut into a reverse screw, and both ends are screwed inside the main body member, The positioning jig is configured to apply the load by rotating the screw member.

  Each of the positioning jigs (positioning block, precision block, etc.) includes an inkjet head or the like, and a plurality of positioning jigs are arranged adjacent to each other on a support member (base, bar, etc.). The plurality of positioning jigs are in contact with each other in the width direction, and maintain the positional accuracy of the inkjet head in the width direction.

The positioning jig includes a main body member that is elastically deformed in the width direction, a loading unit that applies a load in the width direction from the inside of the main body member, and the like.
As the main body member of the positioning jig, various materials can be used, and metals such as aluminum can be used.
In addition, regarding the elastic deformation of the main body member, for example, a frame-like member can be formed by cutting out or scraping the inner side of the main body member to have a predetermined elastic coefficient in the width direction. In this case, a loading means (screw, contact pin, etc.) can be provided in the hollowed out part.

The loading means (loading mechanism) is a mechanism that applies a load (tensile or compression) in the width direction from the inside of the main body member.
Further, it is desirable that the loading means function as a column or the like on the inside of the main body member, and the load is applied in the other width direction by the reaction of the load applied in one width direction. In this case, the rigidity of the main body member can be improved.

Also, the positioning jig, the slide rail on the support member may be provided with removable slide bush.
The positioning jig desirably has a positioning stop surface for positioning.

In the first invention, when the loading means presses against the positioning jig from the inner surface to the outer side in the width direction or pulls inward in the width direction, the positioning jig undergoes elastic deformation, and the width of the positioning jig is The width is adjusted by enlarging or reducing.
In this case, since the positioning jig after width adjustment is in a state of receiving a load, backlash does not occur, and accuracy can be maintained even when a new load is applied during mounting or the like.
In addition, since the loading means is provided in the hollowed portion between both width direction end portions, the loading mechanism plays the role of a pillar and a beam across both width direction end portions, and improves the rigidity of the positioning jig. Can do.

A second invention is a pattern forming apparatus for forming a pattern by applying ink on a substrate, the positioning jig being provided for each head in which a plurality of nozzle holes are arranged , Width adjusting means for adjusting the width by elastically deforming the main body member in the width direction that is the arrangement direction of the plurality of nozzle holes, a support member in which a plurality of positioning jigs are arranged adjacent to each other, the positioning jig, Sliding means provided between the support members, and position adjustment means for adjusting the positions of the plurality of positioning jigs in the support member, wherein the width adjustment means moves the body member in the width direction. A screw member that is extendable and has one end cut into a normal screw and the other end cut into a reverse screw, and both ends screwed into the inside of the body member of the positioning jig , and by rotating the screw member Width adjustment A pattern forming apparatus and performs.

The position adjusting means preferably includes pressing means for pressing the sliding direction end portions of the plurality of positioning jigs.
The positioning jig is preferably detachable from the support member.
The sliding means is preferably constituted by a slide rail provided on the support member and a slide bush provided on the positioning jig and attachable to and detachable from the slide rail.

  The second invention relates to a pattern forming apparatus including the positioning jig of the first invention.

  The pattern forming apparatus is an apparatus for manufacturing a color filter or the like by an inkjet method or the like. The color filter is used for LCD (Liquid Crystal Display Panel), PDP (Plasma Display Panel), Organic EL (Electro Luminescent Display) and the like.

The sliding means is a sliding mechanism that slides a positioning jig (positioning block, precision block) that fixes the position of the head (inkjet head) relative to the support member (base, bar, etc.) in the sliding direction. A slide rail, a slider (slide bush) that can be attached to and detached from the slide rail, and the like can be used.
The positioning jig can be attached to and detached from the support member.

The pressing means is a mechanism that receives the pressing force from the stopper means, and for example, a spring mechanism or the like can be used.
The stopper means is a mechanism for adjusting the position by the stopper. Regarding the adjustment of the stopper position, a positioning jig as a spacer can be mounted before mounting the head, and fine adjustment can be performed by an adjustment mechanism (such as a micrometer) provided in the stopper mechanism.

A third invention is a head unit composed of a plurality of heads, which forms a pattern by applying ink on a substrate, and is provided for each head in which a plurality of nozzle holes are arranged, and performs positioning. A width adjusting means for adjusting the width by elastically deforming the body member of the positioning jig in a width direction that is an arrangement direction of the plurality of nozzle holes; a support member on which a plurality of positioning jigs are arranged adjacent to each other; A sliding means provided between the positioning jig and the support member; and a position adjusting means for adjusting a position of the plurality of positioning jigs in the support member, wherein the width adjusting means is the body member. a retractable to the width direction, one end and the other end is cut to the positive is threaded in the opposite screw, comprising a screw member having both ends screwed to the inner body member of said positioning jig, said threaded member Rotate A head unit and performs width adjustment by causing.

  3rd invention is invention regarding a head unit provided with the positioning jig of 1st invention.

  ADVANTAGE OF THE INVENTION According to this invention, the pattern formation apparatus of an inkjet system, a head unit, a positioning jig, etc. which can perform pattern formation with high precision and efficiency can be provided.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a pattern forming apparatus and the like according to the present invention will be described in detail with reference to the accompanying drawings. In the following description and the accompanying drawings, the same reference numerals are given to components having substantially the same functional configuration, and redundant description will be omitted.

First, the configuration of the pattern forming apparatus 101 according to the embodiment of the present invention will be described with reference to FIG.
FIG. 1 is a schematic perspective view of the pattern forming apparatus 101.
The θ axis indicates the vertical rotation axis, and the θ direction indicates the rotation direction. The Y axis indicates the coating width direction, the X axis indicates the coating direction, and the θ axis, the Y axis, and the X axis are perpendicular to each other.

  A pattern forming apparatus 101 shown in FIG. 1 includes an inkjet head unit 102, a suction table 103, an alignment camera 104, a θ axis moving stage 105, a Y axis moving stage 106, an X axis moving stage 107, and the like.

  The pattern forming apparatus 101 is an apparatus that manufactures a color filter by an inkjet method. The pattern forming apparatus 101 discharges ink containing three color pigments of R (red), G (green), and B (blue) onto a light-transmitting substrate by an ink jet method, and then colors each ink by drying. A pixel portion is formed, and a color filter pattern is formed on the substrate.

The inkjet head unit 102 positions a plurality of inkjet heads and discharges ink onto the substrate to form a pattern. The inkjet head unit 102 will be described later.
The suction table 103 is a table that sucks and fixes a substrate 108 (a glass substrate, a film substrate, or the like) on which a color filter pattern is to be formed. The adsorption of the substrate is performed, for example, by reducing the pressure and vacuum of the air between the adsorption table and the substrate. In this case, the suction table is provided with a small hole (not shown) for sucking air, and at the time of suction, air is sucked by a vacuum pump (not shown) or the like through the hole.

The alignment camera 104 images a predetermined portion of the substrate 108 (such as an alignment mark (not shown) formed on the substrate) in order to detect the θ-direction angle and XY coordinates of the substrate 108 that is suction-fixed to the suction table 103. Camera. A captured image of the alignment camera 104 is input to an alignment unit (not shown) of the pattern forming apparatus 101.
The alignment camera 104 is fixedly supported on a frame (not shown) of the pattern forming apparatus 101.

  An alignment unit (not shown) performs a process of extracting the θ direction angle and XY coordinates of the substrate 108 based on the captured image. An alignment unit (not shown) compares the extracted data with predetermined data, calculates a deviation between them, and calculates a control amount so as to reduce the deviation. An alignment unit (not shown) outputs control amounts to the θ-axis moving stage 105, the Y-axis moving stage 106, and the X-axis moving stage 107 to control the position of each stage. As described above, the alignment unit (not shown) controls the substrate 108 to have a predetermined θ-direction angle and a predetermined XY coordinate based on the captured image of the alignment camera 104.

  The θ-axis moving stage 105 is a rotating stage, and is rotatably supported on a predetermined rotating shaft by a controllable motor such as a step motor or a servo motor. The θ-axis moving stage 105 rotates the suction table 103 based on a control amount output from an alignment unit (not shown).

  The Y-axis movement stage 106 is a linear movement stage, and is supported so as to be movable in a predetermined axial direction by a controllable motor such as a step motor or a servo motor. The Y-axis moving stage 106 moves the θ-axis moving stage 105 in the Y-axis direction based on a control amount output from an alignment unit (not shown).

  The X-axis movement stage 107 is a linear movement stage, and is supported so as to be movable in a predetermined axial direction by a controllable motor such as a step motor or a servo motor. The X-axis moving stage 107 moves the Y-axis moving stage 106 in the X-axis direction based on a control amount output from an alignment unit (not shown).

  As described above, the pattern forming apparatus 101 positions the substrate 108 by the θ-axis moving stage 105, the Y-axis moving stage 106, and the X-axis moving stage 107 so that the predetermined θ-direction angle and the predetermined XY coordinates are obtained. .

Next, the arrangement of a plurality of inkjet heads will be described with reference to FIG.
FIG. 2 is an explanatory diagram of an arrangement of a plurality of inkjet heads.
The nozzle holes will be described as effective nozzle holes excluding unused nozzle holes such as left and right ends of the inkjet head.

  The inkjet heads 201 are arranged in rows while maintaining positioning accuracy by positioning blocks 202 (precision blocks, fixing jigs), and form an array head unit 204 (head row). Each inkjet head 201 includes a plurality of nozzle holes 203.

  The positioning block 202 requires a considerable shape and volume with respect to the inkjet head 201. In an array head unit in one row, there may be a lack of nozzle holes between adjacent inkjet heads. Therefore, by arranging a plurality of array head units in parallel and adjusting the position in the row direction, the phase of the nozzle holes can be matched to prevent overlap or lack of nozzle holes between adjacent ink jet heads.

In this case, the array head unit 204 is formed by arranging the inkjet head 201 so as to satisfy [Equation 1]. FIG. 2 shows the arrangement of the inkjet heads in the case of n = 2.
C = (n−1) × (A + B) + B [Formula 1]
A: Nozzle hole row length 205 in the head
B: Nozzle hole pitch 206
C: Head pitch 207 (nozzle hole pitch between adjacent heads)
n: Number of array head units 204

Next, an ink jet head unit according to an embodiment of the present invention will be described with reference to FIGS.
FIG. 3 is an external perspective view of the inkjet head unit 102.
FIG. 4 is a plan view of the inkjet head unit 102.
FIG. 5 is a cross-sectional view of the inkjet head unit 102.

In FIG. 3, the inkjet head unit 102 includes six rows of arranged head units 301 for three colors (for example, R, G, and B). The array head unit 301 is attached to one bar 315 for each color. The two rows of array head units 301 of the same color are attached to the bar 315 shown in FIG.
4 and 5, the inkjet head unit 102 includes two rows of array head units, and each array head unit includes one row of inkjet heads attached to one bar.

In the following description, the ink jet head unit shown in FIGS. 4 and 5 will be mainly described for easy understanding.
Note that the number and color of array head units provided in one inkjet head unit, the number of rows and colors of inkjet heads provided in one bar, are not limited to those shown in FIGS.

  The inkjet head unit 102 includes a plurality of array head units 301, and is attached to a frame 305 fixed to a surface plate (not shown) via an attachment seat 302, a rotation mechanism 303, and a slide mechanism 304. The overall position of the inkjet head unit 102 can be adjusted by rotation by the rotation mechanism 303, movement by the slide mechanism 304, or the like.

  The array head unit 301 includes an inkjet head 311, a positioning block 312, a lower slider (slide bush) 313, a lower slide rail 314, a bar 315, an upper slider (slide bush) 316, an upper slide rail 317, a lower stopper mechanism 321, a lower It comprises a pressing mechanism 322, an upper stopper mechanism 323, an upper pressing mechanism 324, and the like.

The inkjet head 311 is bonded and fixed to a predetermined position of the positioning block 312.
The positioning block 312 ensures the positional accuracy of the inkjet head 311. Further, by connecting the positioning blocks 312, it is possible to obtain the positional accuracy of the plurality of inkjet heads 311 within the same array head unit.

The lower slider 313 is attached to the positioning block 312 and slides along the lower slide rail 314 laid on the bar 315. The lower slider 313 can be attached to and detached from the lower slide rail 314.
At both ends of the lower slide rail 314, a lower stopper mechanism 321 and a lower pressing mechanism 322 are provided to adjust the position of the inkjet head 311.

The upper slider 316 is attached to the bar 315 and slides along the upper slide rail 317 laid on the attachment seat 302. The upper slider 316 can be attached to and detached from the upper slide rail 317.
The upper slide rail 317 is provided with an upper stopper mechanism 323 and an upper pressing mechanism 324 to adjust the position of the array head units 301.

Regarding the adjustment of the stopper position, a positioning block as a spacer can be mounted before mounting the inkjet head, and fine adjustment can be performed by an adjustment mechanism (such as a micrometer) provided in the stopper mechanism.
As the pressing mechanism, a spring mechanism or the like can be used.
Moreover, a general-purpose thing can be used for a slide mechanism and a linear guide, for example, LM guide (made by THK Corporation) etc. can be used.

As described above, a positioning block is provided for each inkjet head, and the positioning block has a slider. Therefore, the positioning block can be slid along a slide rail provided on the bar, and can be attached to and detached from the bar.
Furthermore, since the bar has a slider, the bar can slide along a slide rail provided on the base, and can be attached to and detached from the base.
In other words, the slide mechanism can quickly and efficiently perform attachment / detachment and replacement of the inkjet head (positioning block, bar) and relative position adjustment in the row direction, thereby reducing the labor burden.
In addition, since a plurality of inkjet heads can be handled as a single unit, the entire apparatus can have a simple structure, and the cost burden can be reduced.
Further, the positioning accuracy can be improved by providing a stopper mechanism and a pressing mechanism at both ends of the slide mechanism.

  4 and 5, it has been described that the mounting mechanism 302 is provided with a stopper mechanism and a pressing mechanism to position the bar 315 of the array head unit 301. However, the positioning mechanism of the bar 315 of the array head unit 301 is as follows. Not limited to this. As shown in FIG. 3, the mounting seat 302 may be provided with a positioning mechanism using a ball screw 331, a servo motor 332, or the like, and the bars 315 of the array head units 301 may be fastened in a manner detachable from the positioning mechanism. Further, when a linear servo motor is used, a ball screw can be dispensed with.

  Next, the width adjustment of the positioning block will be described with reference to FIGS.

FIG. 6 is a diagram illustrating an aspect of the positioning block 601.
As shown in FIG. 6, the positioning block 601 is slidably connected to a support member 613 via a slider 611 and a rail 612, and an inkjet head 614 is provided on the opposite side of the support member 613.

The positioning block 601 has a frame-like member whose center is hollowed out in the direction perpendicular to the paper surface, and all or part of the loading mechanism 602 is disposed in the hollowed-out portion.
The loading mechanism 602 includes a micrometer 603, a pin 604, and the like, and is provided on one or both inside the width direction end of the positioning block 601. Pin 604 is coupled to micrometer 603.
In addition, the width direction edge part shows the part periphery contact | abutted with another positioning block.

As shown in FIG. 6, the width of the positioning block 601 is adjusted by operating the micrometer 603 to adjust the position of the pin 604 (extension / contraction 605).
However, since the positioning block 601 after the width adjustment is in an unloaded state, when a load is applied during mounting or the like, the backlash (mechanical backlash between the positioning block 601 and the load mechanism 602) ), It may not be possible to maintain accuracy.

FIG. 7 is a diagram illustrating an aspect of the positioning block 701.
As shown in FIG. 7, the positioning block 701 is slidably connected to a support member 713 via a slider 711 and a rail 712, and an inkjet head 714 is provided on the opposite side of the support member 713.

The positioning block 701 has a frame-shaped member whose center is cut out in the direction perpendicular to the paper surface, and a loading mechanism 702 is disposed in the cut-out portion.
The loading mechanism 702 includes a screw 703, a contact pin 704, and the like.
The screw 703 is screwed onto the inner surface of one end in the width direction of the positioning block 701.
The contact pin 704 is fixed to the inner surface of the other width direction end of the positioning block 701.
In addition, the width direction edge part shows the part periphery contact | abutted with another positioning block.

  As shown in FIG. 7, by turning the screw 703, the screw 703 and the contact pin 704 are brought into contact with each other (extension and contraction 706), and pressed against the positioning block 701 from the inner surface to the outer side in the width direction. The positioning block 701 undergoes elastic deformation 705 in the width direction, and the width is adjusted.

In this case, since the positioning block 701 after the width adjustment is in a state of receiving a load, backlash does not occur, and accuracy can be maintained even when a new load is applied during mounting or the like.
In addition, since the loading mechanism is provided in a hollowed portion between both end portions in the width direction, the loading mechanism plays a role of a column and a beam between both end portions in the width direction, and can improve the rigidity of the positioning block. it can.

FIG. 8 is a diagram illustrating an aspect of the positioning block 801.
As shown in FIG. 8, the positioning block 801 is slidably connected to a support member 813 via a slider 811 and a rail 812, and an ink jet head 814 is provided on the opposite side of the support member 813.

The positioning block 801 has a frame-shaped member whose center is hollowed out in the direction perpendicular to the paper surface, and a loading mechanism 802 is disposed in the hollowed-out portion.
The load mechanism 802 includes a screw member or the like having a positive screw 803 at one end and a reverse screw 804 at the other end.
The normal screw 803 and the reverse screw 804 are respectively screwed to the inner surfaces of both end portions in the width direction of the positioning block 801. In addition, the normal screw 803 and the reverse screw 804 are fixed to each other or configured integrally.
In addition, the width direction edge part shows the part periphery contact | abutted with another positioning block.

  As shown in FIG. 8, when a screw member including a normal screw 803 and a reverse screw 804 is turned, the positioning block 801 is pressed against the positioning block 801 from the inner surface in the width direction or pulled inward in the width direction. Causes elastic deformation 805 in the width direction, and the width of the positioning block 801 is enlarged or reduced to adjust the width.

In this case, since the positioning block 801 after the width adjustment is in a state of receiving a load, backlash does not occur, and accuracy can be maintained even when a new load is applied during mounting or the like.
In addition, since the loading mechanism is provided in a hollowed portion between both end portions in the width direction, the loading mechanism plays a role of a column and a beam between both end portions in the width direction, and can improve the rigidity of the positioning block. it can.

Next, with reference to FIGS. 9 and 10, the position adjustment of the inkjet head by adjusting the width of the positioning block will be described.
FIG. 9 and FIG. 10 are relationship diagrams of the ink jet head, the nozzle hole position, and the pattern position (pixel arrangement).

The pattern 902 in the application area 901 is formed by ink ejected from the nozzle hole 905 of the inkjet head 904 provided in the positioning block 903.
The inkjet head 904 is positioned by bringing the positioning blocks 903 into contact with each other and pressing the end of the positioning block row with the pressing mechanism 907.

In FIG. 9, the positioning block 903-1 has an error (ΔL) due to problems such as expansion, contraction, or processing accuracy, and has a width (L + ΔL) different from the normal width (L). In this case, the position of the nozzle hole 905-1 and the pattern position do not match, and a precise pattern cannot be formed.
In FIG. 10, the width of the positioning block 903-1 is adjusted to the normal width (L) as described in FIGS. In this case, the position of the nozzle hole 905-1 coincides with the pattern position, and a precise pattern can be formed.
Through the above process, the position of each nozzle hole is matched with the pattern position by adjusting the width of the positioning block.

7 or 8, for example, a positioning block having a width narrower by about 0.1 mm than a desired width dimension is manufactured, and a built-in screw having a pitch of about 0.25 mm is used. Thereby, a displacement in the width direction of about 1 μm can be obtained with a rotation of about 1.5 degrees, and a highly accurate positioning block can be realized.
Note that a positioning block adjusted to a desired width in advance may be attached, or adjustment may be performed after attachment.

FIG. 11 is a front view showing one aspect of the positioning block 1101.
FIG. 12 is a side cross-sectional view showing one aspect of the positioning block 1101.

A positioning block 1101 shown in FIGS. 11 and 12 has a hollowed portion 1103. The hollowed portion 1103 is a gap that penetrates the positioning block 1101 in the direction perpendicular to the paper surface in FIG.
When a compression or tension load is applied by the load applying mechanism 1102, the end in the width direction of the positioning block 1101 is elastically deformed in the width direction (A direction), and the width of the positioning block 1101 is adjusted.

  Note that the shape or the like of the hollowed portion 1103 of the positioning block 1101 is not limited to that shown in FIG. 12 and may be any shape as long as it is elastically deformed uniformly in the width direction. For example, the positioning block 1101 may be processed and molded by designing the left and right objects in the width direction or by unifying the spring constants related to elastic deformation at the left and right width direction ends.

As described above, according to the embodiment of the present invention, the positioning block is cut out to provide a load mechanism (such as a screw), and the load mechanism presses the positioning block from the inner surface to the outer side in the width direction, or Then, the width of the positioning block is adjusted by pulling inward in the width direction to cause elastic deformation of the positioning block.
In this case, since the positioning block after width adjustment is in a state of receiving a load, backlash does not occur, and the accuracy can be maintained even when a new load is applied during mounting or the like.

That is, the positioning block is elastically deformed by a screw or the like, but a force acts in the direction of crushing the screw by its reaction. For example, the screw is protruded from the block and the block width is directly adjusted by the screw. There is no play and high-precision adjustment is possible.
Further, it is not necessary to finish the width dimension of the positioning block itself with high accuracy, and the manufacturing cost can be suppressed.
In addition, it is possible to easily adjust a dimensional error due to a temperature change or the like afterwards.
Further, since a relatively lightweight material such as aluminum can be used as the positioning block, the weight can be reduced.

In addition, a positioning block is provided for each ink jet head, and the plurality of positioning blocks are detachably connected to the support member via a slide mechanism, so that the ink jet head (positioning block, etc.) can be attached and detached by the slide mechanism. Can be performed quickly and efficiently, and the labor burden can be reduced.
In addition, since a plurality of inkjet heads can be handled as a single unit, the entire apparatus can have a simple structure, and the cost burden can be reduced.

  The preferred embodiments of the pattern forming apparatus, the head unit, the positioning jig and the like according to the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It will be apparent to those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea disclosed in the present application, and these are naturally within the technical scope of the present invention. Understood.

  In addition, about the above-mentioned load mechanism, although what provided a screw and a contact pin (FIG. 7), a normal screw, and a reverse screw (FIG. 8) was demonstrated, it is not restricted to this. The displacement of the positioning block may be generated by supplying air or electricity instead of the screw or the like (air actuator, piezo, piezoelectric element, etc.).

Schematic perspective view of the pattern forming apparatus 101 Explanatory drawing of the arrangement of multiple inkjet heads Appearance perspective view of inkjet head unit 102 Plan view of the inkjet head unit 102 Cross-sectional view of the inkjet head unit 102 The figure which shows the one aspect | mode of the positioning block 601 A figure showing one mode of positioning block 701 The figure which shows one aspect | mode of the positioning block 801 Relationship diagram of inkjet, nozzle hole position, pattern position (pixel alignment) (before width adjustment) Relationship diagram of inkjet, nozzle hole position, pattern position (pixel alignment) (after width adjustment) Front view showing one mode of positioning block 1101 Side sectional view showing one mode of positioning block 1101 Perspective view of positioning block and inkjet head Cross section of positioning block and inkjet head The figure which shows the row-like arrangement | positioning of a positioning block and an inkjet head

Explanation of symbols

101 ......... Pattern forming apparatus 102 ......... Inkjet head unit 103 ......... Suction table 104 ......... Alignment camera 105 ......... θ-axis moving stage 106 ......... Y-axis moving stage 107 ......... X-axis moving stage 108 ......... Substrate 301 ......... Arranged head unit,
302 ......... Mounting seat 303 ......... Rotation mechanism 304 ......... Slide mechanism 305 ......... Frame 311 ......... Inkjet head 312 ......... Positioning block 313 ......... Lower slider 314 ......... Lower slide rail 315 ... …… Bar 316 ………… Upper slider 317 ……… Upper slide rail 321 ……… Lower stop mechanism 322 ……… Lower press mechanism 323 ……… Upper stop mechanism 324 ……… Upper press mechanism 331 ……… Ball screw 332 ......... Servo motor 601, 701, 801 ......... Positioning block 602, 702, 802 ...... Load mechanism 603 ......... Micrometer 604 ......... Pin 703 ......... Screw 704 ......... Pin 803 ......... Normal screw 804 ......... Reverse screw 611, 711, 811 ......... Slider 61 , 712, 812 ......... rails 613,713,813 ......... supporting member 614,714,814 ......... inkjet head 1101 ......... positioning block 1102 ......... given loading mechanism 1103 ......... hollowed portion

Claims (12)

A positioning jig that is provided for each head in which a plurality of nozzle holes that apply ink on a substrate to form a pattern are arranged, and is positioned adjacent to a support member to perform positioning,
A body member that elastically deforms in the width direction, which is the arrangement direction of the plurality of nozzle holes ;
Loading means for applying a load in the width direction from the inside of the body member;
The loading means is capable of expanding and contracting the main body member in the width direction, one end is cut into a normal screw, the other end is cut into a reverse screw, and both ends are screwed inside the main body member. A positioning jig, wherein the load is applied by rotating the screw member.   The positioning jig according to claim 1, wherein the load is tension or compression in the width direction.   The positioning jig according to claim 1, wherein the loading unit applies a load in the other width direction by a reaction of a load applied in one width direction.   The positioning jig according to claim 1, further comprising a slide bush detachably attached to a slide rail provided on the support member. A pattern forming apparatus for forming a pattern by applying ink on a substrate,
A positioning jig which is provided for each head in which a plurality of nozzle holes are arranged and performs positioning;
Width adjusting means for adjusting the width by elastically deforming the main body member of the positioning jig in the width direction which is an arrangement direction of the plurality of nozzle holes ;
A support member in which a plurality of positioning jigs are arranged adjacent to each other;
Sliding means provided between the positioning jig and the support member;
Position adjusting means for adjusting the position of the plurality of positioning jigs in the support member;
The width adjusting means is capable of expanding and contracting the main body member in the width direction, one end is cut into a normal screw, the other end is cut into a reverse screw, and both ends are inside the main body member of the positioning jig. A pattern forming apparatus comprising: a screw member to which a screw is screwed, and adjusting the width by rotating the screw member.   The pattern forming apparatus according to claim 5, wherein the position adjusting unit includes a pressing unit that presses end portions in the sliding direction of the plurality of positioning jigs.   The pattern forming apparatus according to claim 5, wherein the positioning jig is detachable from the support member.   6. The pattern forming apparatus according to claim 5, wherein the sliding means includes a slide rail provided on the support member and a slide bush provided on the positioning jig and attachable to and detachable from the slide rail. . A head unit that is composed of a plurality of heads and forms a pattern by applying ink on a substrate,
A positioning jig which is provided for each head in which a plurality of nozzle holes are arranged and performs positioning;
Width adjusting means for adjusting the width by elastically deforming the main body member of the positioning jig in the width direction which is an arrangement direction of the plurality of nozzle holes ;
A support member in which a plurality of positioning jigs are arranged adjacent to each other;
Sliding means provided between the positioning jig and the support member;
Position adjusting means for adjusting the position of the plurality of positioning jigs in the support member;
The width adjusting means is capable of expanding and contracting the main body member in the width direction, one end is cut into a normal screw, the other end is cut into a reverse screw, and both ends are inside the main body member of the positioning jig. A head unit comprising a screw member to which a screw is screwed, and adjusting the width by rotating the screw member.   The head unit according to claim 9, wherein the position adjusting unit includes a pressing unit that presses the sliding direction end portions of the plurality of positioning jigs.   The head unit according to claim 9, wherein the positioning jig is detachable from the support member.   The head unit according to claim 9, wherein the sliding means includes a slide rail provided on the support member and a slide bush provided on the positioning jig and attachable to and detachable from the slide rail.

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