JP2004054271A - Device and method for manufacturing filter, and device and method for ink-jet patterning - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a filter manufacturing device capable of satisfactorily dropping inks of R, G, B to a substrate and forming a pattern, and feeding a predetermined quantity of ink according to the state of an ink drop. <P>SOLUTION: To jet each ink drop from the ink jet head 20 of a 1st coloring means 210, the ink jet head 20 of a second coloring means 220, and the ink jet head 20 of a third coloring means 230, each ink jet head 20 has a driving element to be applied with a respective applying voltage, and is provided with a control means for supplying an applying voltage to the driving element of the ink jet head 20 of the first coloring means 210 according to the state of the red ink drop, a control means for supplying an applying voltage to the driving element of the ink jet head 20 of the second coloring means 220 according to the state of the green ink drop, and a control means for supplying an applying voltage to the driving element of the ink jet head 20 of the third coloring means 230 according to the state of the blue ink drop. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a filter manufacturing apparatus, a filter manufacturing method, and a color filter for manufacturing a filter such as a color filter applied to a display device such as a liquid crystal display device.
[0002]
[Prior art]
With the development of electronic devices such as computers and portable information devices, the use of liquid crystal display devices, especially color liquid crystal display devices, is increasing. This type of liquid crystal display device uses a color filter to color a display image.
[0003]
The color filter has a substrate, and may be formed by landing R (red), G (green), and B (blue) inks on the substrate in a predetermined pattern. As a method of landing ink on such a substrate, an ink jet method is employed.
[0004]
When the ink jet system is adopted, a predetermined amount of ink is ejected from a head of the ink jet to a filter and landed thereon. For example, as disclosed in Japanese Patent Application Laid-Open No. Mounted on stage. The XY stage moves the substrate in the X direction and the Y direction so that the ink from the inkjet head can land on a predetermined position on the substrate.
[0005]
Japanese Patent Application Laid-Open No. 8-292317 discloses a manufacturing apparatus having a set of drawing heads for generating ink droplets of three colors of R, G, and B. Japanese Patent Application Laid-Open No. Hei 9-138306 discloses that a plurality of inkjet heads are provided in one apparatus to perform coloring of a plurality of colors. Japanese Patent Application Laid-Open No. 9-127330 discloses that three types of inks having different colors are discharged to the ink receiving layer for coloring.
[0006]
[Problems to be solved by the invention]
By the way, when manufacturing such a color filter, it is necessary to form the R, G, and B inks accurately and precisely on a substrate in a predetermined area. In such a case, it is desired that the R, G, and B inks of the color filter be separately supplied to the substrate, and that the supply amount of the ink be ejected in an accurate amount in the state of ink droplets.
[0007]
When a plurality of inkjet heads are provided close to each other in one apparatus, it is necessary to align the heads. Then, an adjusting operation or an adjusting mechanism for that is required, and as a result, the apparatus becomes expensive.
[0008]
If a single device performs coloring of a plurality of colors, it is difficult to obtain conditions such as temperature and humidity for maintaining these conditions when the conditions such as the physical properties and characteristics of the respective (color) inks are different. However, an additional device for this is required, which results in an expensive device.
[0009]
When the ink curing conditions are different for each color, if three colors are colored at a time, the curing conditions for each ink must be the same, and it is difficult to set conditions. In addition, an extra additional device is required for that, and as a result, the device becomes expensive.
[0010]
Therefore, the above object of the present invention can be solved, and R, G, and B inks can be accurately formed on a substrate, and a predetermined amount of ink is supplied according to the state of ink droplets to improve the quality of a filter. It is an object to provide an apparatus and a method for producing a filter and a color filter produced thereby.
[0011]
[Means for Solving the Problems]
The present invention is a filter manufacturing apparatus for manufacturing a color filter by causing ink to land on a substrate, and a first inkjet head for discharging ink of a first color onto the substrate, A first coloring unit having a first relative position changing unit for changing a relative position of the substrate with respect to one inkjet head; a second inkjet head for discharging ink of a second color onto the substrate; A second coloring unit having a second relative position changing unit for changing a relative position of the substrate with respect to the head, a third inkjet head for discharging a third color ink to the substrate, and a third inkjet head. A third coloring means having a third relative position changing means for changing a relative position of the substrate, and a supply / discharge of the substrate. And Cormorant substrate sheet discharge means, drying means for drying the ink deposited on the substrate is a filter manufacturing apparatus is arranged corresponding to each coloring means.
[0012]
Thereby, drying can be performed for each color, and drying can be performed according to the characteristics and physical properties of each color, so that a high-quality filter can be manufactured.
[0013]
The present invention is an inkjet patterning apparatus for forming a pattern on a substrate by discharging a material, comprising: a first inkjet head; and a first relative position changing unit that changes a relative position of the substrate with respect to the first inkjet head. A second patterning unit including: a first patterning unit; a second inkjet head; and a second relative position changing unit that changes a relative position of the substrate with respect to the second inkjet head; a third inkjet head; and the third inkjet head. A third patterning means having a third relative position changing means for changing the relative position of the substrate with respect to the substrate, and a substrate feeding / discharging means for feeding / discharging the substrate; and drying the material discharged onto the substrate. Ink for which drying means is provided corresponding to each patterning means E Tsu is a door patterning devices.
[0014]
Thereby, drying can be performed for each material, and drying can be performed according to the characteristics and physical properties of each material, so that a highly accurate pattern can be formed.
[0015]
The present invention relates to a filter manufacturing method for manufacturing a color filter by causing ink to land on a substrate, comprising the steps of: discharging a first color ink from a plurality of inks; A method of supplying and discharging the substrate and a step of drying the ink of the first color that has landed on the substrate, between the step of ejecting the first ink and the step of discharging the ink.
[0016]
By doing so, it is possible to dry the ink attached to the substrate while moving the filter between the step of discharging the first color ink and the step of discharging the second color ink. Therefore, the production efficiency of the filter can be increased.
[0017]
The present invention relates to an inkjet patterning method for forming a pattern on a substrate by discharging a plurality of types of materials, wherein a step of discharging a first material and a step of discharging a second material among the plurality of types of materials are provided. An inkjet patterning method including a step of supplying and discharging the substrate and a step of drying the first material discharged onto the substrate.
[0018]
By doing so, the material attached to the substrate can be dried while the substrate is moved between the step of discharging the first material and the step of discharging the second material, so that the efficiency can be improved. A pattern can be formed.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
[0020]
FIG. 1 shows a part of a preferred embodiment of the filter manufacturing apparatus of the present invention, and FIG. 2 shows a simplified part of the filter manufacturing apparatus of FIG.
[0021]
As shown in FIGS. 1 and 2, the first coloring unit 210, the second coloring unit 220, and the third coloring unit 230 of the filter manufacturing apparatus 10 have substantially the same structure, and It has a first moving means 14, a second moving means 16, an electronic balance (weight measuring means) 18, an inkjet head 20, a capping unit 22, a cleaning unit (cleaning means) 24, a controller 26 and the like.
[0022]
The base (also referred to as a gantry) 12 includes a safety cover 28 that houses the above-described first moving means 14, second moving means 16, electronic balance 18, capping unit 22, cleaning unit 24, and the like. The door of a predetermined portion of the safety cover 28 can be opened.
[0023]
The controller 26 includes a monitor 30, a keyboard 32, a computer 34, and the like.
[0024]
On the base 12, a first moving means 14, an electronic balance 18, a capping unit 22, a cleaning unit 24, and a second moving means 16 are set. A robot 74 and a substrate accommodation unit 70 are arranged around the base 12.
[0025]
The first moving means 14 is preferably set directly on the base 12, and the first moving means 14 is positioned along the Y-axis direction.
[0026]
On the other hand, the second moving means 16 is mounted upright on the base 12 using the columns 16A, 16A, and the second moving means 16 is mounted on the rear portion 12A of the base 12. The X-axis direction of the second moving unit 16 is a direction orthogonal to the Y-axis direction of the first moving unit 14. The Y axis is an axis along the direction of the front part 12B and the rear part 12A of the base 12. On the other hand, the X-axis is an axis along the left-right direction of the base 12, and each is horizontal.
[0027]
First, the first moving means 14 and the second moving means 16 shown in FIGS. 1 and 2 will be described with reference to FIG.
[0028]
FIG. 3 shows the first moving unit 14, the second moving unit 16, the inkjet head 20, and the like. As described above, the columns 16A, 16A of the second moving means 16 are located on the rear portion 12A side of the base 12.
[0029]
The first moving unit 14 in FIG. 3 has a guide rail 40, and the first moving unit 14 can employ, for example, a linear motor. The slider 42 of the first moving means 14 of the linear motor type can be positioned by moving in the Y-axis direction along the guide rail 40.
[0030]
The slider 42 includes a motor 44 for the θ axis. The motor 44 is, for example, a direct drive motor, and the rotor of the motor 44 is fixed to a table 46. Thus, when the motor 44 is energized, the rotor and the table 46 can rotate along the θ direction to index the rotation of the table 46.
[0031]
The table 46 of FIG. 3 positions and holds the substrate 48. The table 46 has a suction holding unit 50, and by operating the suction holding unit 50, the substrate 48 can be sucked and held on the table 46 through the hole 46 </ b> A of the table 46. The substrate 48 can be accurately positioned on the table 46 by the positioning pins 46B of the table 46.
[0032]
The table 46 has a discard area 52 for the ink jet head 20 to discard or test eject ink. The discard area 52 is provided on the rear end side of the table 46 in parallel with the X-axis direction.
[0033]
Next, the second moving means 16 in FIG. 3 has a column 16B fixed to the columns 16A, 16A, and the column 16B has a second moving means 16 of a linear motor type. The slider 60 can be positioned by moving in the X-axis direction along the guide rail 62A, and the slider 60 includes the inkjet head 20 as an ink discharge unit.
[0034]
The ink jet head 20 has motors 62, 64, 66, 68 as swing positioning means. By operating the motor 62, the ink jet head 20 can be moved up and down along the Z axis to be positioned. The Z axis is a direction (vertical direction) orthogonal to the X axis and the Y axis.
[0035]
When the motor 64 is actuated, the ink jet head 20 can swing and position along the β direction. When the motor 66 is operated, the ink-jet head 20 can be positioned by swinging in the γ direction. When the motor 68 is operated, the ink-jet head 20 can be positioned by swinging in the α direction.
[0036]
As described above, the ink jet head 20 shown in FIG. 3 can be positioned by linearly moving in the Z-axis direction and can be positioned by swinging along α, β, and γ in the slider 60. The position or orientation of the ejection surface 20P can be accurately controlled with respect to the substrate 48 on the table 46 side.
[0037]
Next, with reference to the plan views of FIGS. 2 and 4, a substrate loading / unloading operation (load and load) operation between the substrate mounting / dismounting operation position P of the first moving unit 14 and the substrate accommodating unit 72 accommodating the substrate. Will be described.
[0038]
The loading and loading of the substrate is performed by a robot 74 as a substrate supply / discharge unit. This robot 74 is located, for example, in front of the base 12 and in front of the substrate housing means 70, as shown in FIGS.
[0039]
The substrate accommodating means 70 accommodates a plurality of substrates 48, for example, as shown in FIG. 2, and the substrate 48 is exchanged between the substrate attaching / detaching operation position P of the first moving means 14 and the substrate accommodating means 70. ing.
[0040]
The substrate attaching / detaching operation position P is located ahead of the second moving means 16 with respect to the base, and the attaching / detaching operation of the substrate 48 at the substrate attaching / detaching operation position P is not hindered by the presence of the second moving means 16 and the ink jet head. In addition, the robot 74 can perform the operation freely and efficiently. That is, the second moving unit 16 and the inkjet head 20 are located above the first moving unit 14, and more preferably, the second moving unit 16 is located at the rear portion 12A of the base 12, and This is because the substrate mounting / dismounting operation position P is near the table 46 of the first moving means 14, and is more preferably located at the front portion 12B of the base 12.
[0041]
In this manner, the substrate attaching / detaching operation position P and the second moving unit 16 can be separated from each other.
[0042]
The structure of the robot 74 includes, for example, as shown in FIG. 2, a base 74A, a central shaft portion CL, a first arm 74B, a second arm 74C, and the second arm 74C has, for example, a vacuum suction pad 74D. ing. The substrate 48 is sucked by the vacuum suction pad 74D of the robot 74, the first arm 74B and the second arm 74C are rotated along the center axis CL, and the center axis CL is moved up and down in the Z-axis direction. Thus, the exchange of the substrate 48 between the substrate accommodating means 70 and the substrate attaching / detaching operation position P can be smoothly, efficiently, and easily performed.
[0043]
FIG. 5 shows the first coloring means 210, the second coloring means 220, the third coloring means 230, the control means 2000, and the like shown in FIGS.
[0044]
In FIG. 5, the first coloring means 210, the second coloring means 220, and the third coloring means 230, which have already been described, are arranged in order from left to right, with drying means 1000, 1001, and 1002 interposed therebetween. Is arranged.
[0045]
The substrate accommodation unit 70 and the robot 74 are arranged near the first coloring unit 210, the robot 74 is arranged near the second coloring unit 220, and the robot 74 is arranged near the third coloring unit 230. I have.
[0046]
Another substrate accommodating means 70 is arranged near the drying means 1002.
[0047]
The three first coloring means to the third coloring means 210, 220, and 230 can control ink and other management by the control means 2000.
[0048]
The control panel 80 of the first coloring means 210 is connected to the computer 34, and the computer 34 is connected to the ink management controller 98. Similarly, the control panel 80 of the second coloring unit 220 monitors the computer 34 and is connected to the ink management controller 98, and the control panel 80 of the third coloring unit 230 monitors the computer 34 and connects to the ink management controller 98. Have been.
[0049]
The robot 74 of the first coloring means 210 moves the substrate 48 for the color filter to be manufactured from the substrate accommodating means 70 to the substrate attaching / detaching work position P side of the first coloring means 210, and performs the first coloring. The means 210 can eject a red ink droplet onto the substrate 48 and land it. The substrate 74 on which the red ink droplets have landed is moved by the robot 74 to the drying unit 1000 and dried by the drying unit 1000.
[0050]
The robot 74 of the second coloring unit 220 transports the substrate 48 placed on the drying unit 1000 to the substrate attaching / detaching operation position P of the substrate 48 of the second coloring unit 220, and the second coloring unit 220 removes the green ink droplet. The liquid is discharged and landed on the substrate 48. Thereafter, the robot 74 transfers the substrate 48 from the second coloring means 220 to the drying means 1001.
[0051]
Next, the robot 74 moves the substrate 48 onto the drying unit 1001 to a substrate attaching / detaching operation position P of the substrate 48 of the third coloring unit 230. The third coloring means 230 discharges blue ink droplets onto the substrate 48 to land them.
[0052]
As a result, red, green, and blue inks are sequentially formed on the substrate 48, thereby forming a color filter. Then, the robot 74 transfers the substrate 48 from the third coloring unit 230 to the drying unit 1002. The dried substrate 48 on the drying unit 1002 is stored in the substrate storage unit 70 by another robot 74.
[0053]
In this manner, the drying units 1000, 1001, and 1002 dry the red, green, and blue ink droplets colored by the first coloring unit 210, the second coloring unit 220, and the third coloring unit 230, respectively. By performing such a drying process during the movement of the substrate 48, the production efficiency of the color filter can be increased, and inconvenience such as scattering of ink in the color filter can be avoided.
[0054]
FIG. 6 shows a more detailed example of the internal structure of the control means 2000 of FIG. 5, and FIG. 6 shows the first coloring means 210 or the second coloring means 220 or the third coloring means 230 separately. It is a system provided in. The individual systems of the control means 2000 of FIG. 6 can be assembled so as to be applicable to the first coloring means 210, the second coloring means 220, and the third coloring means 230 as shown in FIG.
[0055]
6 and 7, the computer 34 is connected to a control panel 80 on the base 12 side. The control panel 80 is arranged in the base 12, and the first moving means 14 (linear motor), the second moving means 16 (linear motor), and the θ-axis motor 44 are connected to the control panel 80. Have been. Further, motors 62, 64, 66, 68 shown in FIG. 3 related to the ink jet head 20 are connected to the control panel 80. The first moving means 14 and the θ-axis motor 44 operate in response to a command from the control panel 80 to move the table 46 on which the substrate 48 for manufacturing a color filter is mounted in the Y-axis direction and index in the θ-direction. .
[0056]
The four motors 62, 64, 66, 68 of the second moving means 16 operate according to a command from the control panel 80 to control the attitude of the inkjet head 20 with respect to the substrate 48 on the table 46. I have.
[0057]
The operation of the robot 74 as the substrate supply / discharge means shown in FIG. 4 can be controlled by a command from the computer 34 as shown in FIG. 6, for example.
[0058]
Next, an example of the structure of the inkjet head 20 will be described with reference to FIGS.
[0059]
The inkjet head 20 is, for example, a head using a piezo element (piezoelectric element). As shown in FIG. 8A, a plurality of nozzles 91 are formed on an ink ejection surface 20P of the main body 90. A piezo element 92 is provided for each of the nozzles 91.
[0060]
As shown in FIG. 8B, the piezo elements 92 are arranged corresponding to the nozzles 91 and the ink chambers 93. Then, by applying an applied voltage Vh to the piezo element 92 as shown in FIG. 8C, the piezo element 92 is pointed by an arrow as shown in FIGS. 8D, 8F and 8E. By expanding and contracting in the Q direction, the ink is pressurized and a predetermined amount of ink droplet 99 is ejected from the nozzle 91.
[0061]
The ink jet head 20 in FIG. 6 is connected to an ink supply unit 97, and ink is supplied from the ink supply unit 97 to the ink chamber 93 in FIG. A thermometer 96 and a viscometer 95 are connected to the ink supply unit 97. The thermometer 96 and the viscometer 95 measure the temperature and viscosity of the ink contained in the ink supply unit 97, and supply them to the ink management controller 98 as feedback signals S1 and S2 of the state of the ink.
[0062]
The ink management controller 98 gives the temperature and viscosity of the ink to the computer 34 as control information based on the feedback signals S1 and S2 of the ink state. The computer 34 sends a piezo element drive signal S3 to the piezo element drive circuit 101 through the control panel 80. The piezo element drive circuit 101 supplies the piezo element 92 of FIG. 8 with an applied voltage Vh corresponding to the temperature and viscosity of the ink at that time based on the piezo element drive signal S3 to thereby control the temperature and viscosity of the ink. , A predetermined amount of ink droplet 99 can be ejected.
[0063]
Next, an example of manufacturing a color filter by supplying ink to a substrate will be described with reference to FIGS.
[0064]
The substrate 48 shown in FIG. 9 is a transparent substrate that has high mechanical transparency and high light transmittance. As the substrate 48, for example, a transparent glass substrate, acrylic glass, a plastic substrate, a plastic film, and a surface-treated product thereof can be used.
[0065]
For example, as shown in FIG. 10, a plurality of color filter regions 105 are formed in a matrix on a rectangular substrate 48 from the viewpoint of increasing productivity. These color filter regions 105 can be used as color filters suitable for a liquid crystal display device by cutting the glass 48 later.
[0066]
In the color filter area 105, for example, as shown in FIG. 10, R ink, G ink and B ink are formed and arranged in a predetermined pattern. As the formation pattern, as shown in FIG. 8, there are a mosaic type, a delta type, a square type, and the like, in addition to a conventionally known stripe type.
[0067]
FIG. 9 shows an example of a process for forming the color filter region 105 of FIG.
[0068]
In FIG. 9A, a black matrix 110 is formed on one surface of a transparent substrate 48. A resin having no light transmission property (preferably black) is applied to a predetermined thickness (for example, about 2 μm) on a substrate 48 serving as a base of the color filter by a method such as spin coating, and then subjected to photolithography. The black matrix 110 is provided in the form of a matrix by the method described above. The smallest display element surrounded by the lattice of the black matrix 110 is called a filter element, and is, for example, a window having a width of about 30 μm in the X-axis direction and a length of about 100 μm in the Y-axis direction.
[0069]
After the formation of the black matrix 110, the resin on the substrate 48 is baked by, for example, applying heat with a heater.
[0070]
As shown in FIG. 9B, the ink droplet 99 lands on the filter element 112. The amount of the ink droplet 99 is a sufficient amount in consideration of a decrease in the volume of the ink in the heating step.
[0071]
In the heating step of FIG. 9C, when all the filter elements 112 on the color filter are filled with the ink droplets 99, a heating process is performed using a heater. The substrate 48 is heated to a predetermined temperature (for example, about 70 ° C.). As the solvent in the ink evaporates, the volume of the ink decreases. In the case where the volume decrease is remarkable, the ink discharging step and the heating step are repeated until a sufficient ink film thickness as a color filter is obtained. By this processing, the solvent of the ink evaporates, and finally, only the solid content of the ink remains to form a film.
[0072]
In the protective film forming step of FIG. 9D, heating is performed at a predetermined temperature for a predetermined time in order to completely dry the ink droplet 99. When the drying is completed, a protective film 120 is formed to protect the substrate 48 of the color filter on which the ink film is formed and to flatten the filter surface. For forming the protective film 120, for example, a method such as a spin coating method, a roll coating method, and a ripping method can be adopted.
[0073]
In the transparent electrode forming step of FIG. 9E, the transparent electrode 130 is formed over the entire surface of the protective film 120 by using a recipe such as a sputtering method or a vacuum suction method.
[0074]
In the patterning step of FIG. 9F, the transparent electrode 130 is further patterned into a pixel electrode corresponding to the opening of the filter element 112.
[0075]
This patterning is unnecessary when a TFT (Thin Film Transistor) or the like is used for driving the liquid crystal display panel.
[0076]
Next, returning to FIG. 2, the electronic balance 18, the cleaning unit 24, the capping unit 22, and the alignment camera 23 will be briefly described.
[0077]
The electronic balance 18 measures, for example, the weight of one ink droplet 99 (see FIG. 8) ejected from the nozzle of the inkjet head 20, and for example, 2,000 ink droplets from the nozzle 91 of the inkjet head 20. Drop 99 is received. The electronic balance 18 can accurately measure the weight of one ink drop 99 by dividing the weight of the 2000 ink drops 99 by the number of 2000. Based on the measured amount of the ink droplet 99, the amount of the ink droplet 99 ejected from the inkjet head 20 is optimally controlled.
[0078]
The cleaning unit 24 can clean the nozzles 91 and the like of the inkjet head 20 shown in FIG. The capping unit 22 covers the ink ejection surface 20P of the ink-jet head 20 in FIG. 3 during standby without manufacturing a filter in order to prevent the ink ejection surface 20P from drying.
[0079]
The inkjet head 20 can be selectively positioned above the electronic balance 18, the cleaning unit 24 or the capping unit 22 by moving the inkjet head 20 in the X-axis direction by the second moving means 16. That is, even during the filter manufacturing operation, the weight of the ink droplet can be measured by moving the inkjet head 20 to, for example, the electronic balance 18 side. If the inkjet head 20 is moved onto the cleaning unit 24, the inkjet head 20 can be cleaned. If the inkjet head 20 is moved above the capping unit 22, a cap is attached to the ink ejection surface 20P of the inkjet head 20 to prevent drying.
[0080]
The alignment camera 23 detects the position of the substrate 48 by detecting an alignment mark formed on the substrate 48 in advance.
[0081]
Next, an operation example of the illustrated filter manufacturing apparatus will be described with reference to FIG.
[0082]
In step ST1 of FIG. 11, the vacuum suction pad 74D of the robot 74 of FIG. That is, the substrate 48 is supplied onto the table 46 of the first moving unit 14. The board 48 is positioned with respect to the table 46 by being abutted against the positioning pins 46B of FIG. In addition, the motor 44 is operated to set the end faces of the substrate 48 so as to be parallel to the Y-axis direction. The above is the positioning of the substrate and the alignment of the substrate in steps ST2 and ST3 in FIG.
[0083]
Then, the computer 34 calculates the start position of the operation of discharging ink in step ST4 in FIG. 8 based on information from the alignment camera 23 and information from the observation camera 27 in FIG.
[0084]
On the other hand, in step ST5 of FIG. 11, the inkjet head 20 moves along the X-axis direction and is positioned above the electronic balance 18. Then, as shown in steps ST6, ST7, and ST8 in FIG. 11, the parameters are loaded, the designated nozzle is selected, and the counter of the electronic balance 18 is cleared. Then, in step ST9, the designated number of drops (the number of designated ink drops) is ejected. Thus, the electronic balance 18 of FIG. 2 measures the weight of, for example, 2,000 ink drops, and calculates the weight per ink drop.
[0085]
In step ST20 of FIG. 11, it is determined whether or not the weight per ink drop falls within a predetermined appropriate range. If the weight is appropriate, the process proceeds to step ST12.
[0086]
When such weight calculation of one ink droplet is completed for all nozzles of the inkjet head 20 to be measured through steps ST10, ST11, and ST12 in FIG. 11, at step ST13 in FIG. Is moved along the X-axis direction, the substrate 48 is appropriately moved and positioned in the Y-axis direction by the first moving means 14, and the inkjet head 20 is moved by the second moving means 16. It is moved and positioned appropriately in the axial direction.
[0087]
On the other hand, if it is determined in step ST20 that the weight per ink droplet is not within the predetermined appropriate range, the process proceeds to step ST21, where it is determined whether the weight of the ink droplet is within the correctable range.
[0088]
The computer 34 shown in FIG. 7, for example, determines such an appropriate range of the weight of the ink droplet and whether or not the weight can be corrected.
[0089]
In step ST22, the computer 34 of FIG. 6 determines the state of the ink based on the signal from the ink management controller 12 obtained based on the feedback signals S1 and S2 of the state of the ink. By transmitting separate control signals to any or all of the control panels 80 of the coloring means 210 to 230, the control panel 80 to which the control signals have been transmitted transmits the piezo element drive signal S3 shown in FIG. It is supplied to the drive circuit 101. As a result, the piezo element driving circuit 101 supplies a predetermined applied voltage corresponding to the feedback signals S1 and S2 of the state of the inkjet head 20 to the piezo element 92 of the inkjet head 20 shown in FIG. That is, as shown in step ST22 of FIG. 11, the drive waveform of the piezoelectric element, which is a piezoelectric element, is adjusted. FIG. 12 and FIG. 13 show examples of adjustment of an applied voltage which is a driving waveform of a piezoelectric element which is a piezoelectric element.
[0090]
As shown in FIG. 13A, for example, by changing the voltage of the applied voltage, the amount of distortion of the piezoelectric element, which is a piezoelectric element, can be controlled. Alternatively, by changing the frequency of the applied voltage as shown in FIG. 13B, the strain rate of the piezoelectric element, which is a piezoelectric element, is controlled to balance the load with the viscosity of the ink.
[0091]
FIG. 12 shows an example of the applied voltage Vh supplied to the piezo element from the piezo element drive circuit 101 in FIG. 6, and the case where the ink ejection amount is small with respect to the initial setting drive waveform I of the applied voltage Vh. Increases the applied voltage value like the drive waveform I1 for that purpose. On the other hand, when the ink ejection amount is large, a drive waveform I2 having a smaller voltage value than the initially set drive waveform I is supplied. In this case, the waveform times t are the same. The example of FIG. 12 is a case where the voltage of the applied voltage Vh is changed as shown in FIG. 13A, and the distortion amount of the piezoelectric element is controlled.
[0092]
Next, in steps ST14 and ST15 of FIG. 11, a plurality of color filter regions 105 are formed on the substrate, for example, in a stripe pattern as shown in FIG.
[0093]
The ink jet head 20 of the first coloring means 210, the second coloring means 220, and the third coloring means 230 of the filter manufacturing apparatus 10 of FIGS. 1 to 3 is preferably R (red), G (green), B (blue). One of the colors is ejected.
[0094]
As shown in FIG. 5, the first coloring means 210 independently colors the substrate 48 with red ink, and the second coloring means 220 colors green ink with respect to the substrate 48. 230 colors the substrate 48 with blue ink. That is, when the substrate 48 passes through the first coloring unit, the second coloring unit, the third coloring unit, 210, 220, and 230 in order, the substrate 48 is colored with red ink first, Then the green ink can be colored and finally the blue ink can be colored to create a color filter area. During the movement of the substrate 48, the substrate 48 passes through the drying means 1000, 1001, and 1002, so that the colored ink can be dried on the spot. Therefore, the production efficiency of the color filter can be increased while drying, and there is no problem that the colored ink is transferred to another portion and colored when it is not dried.
[0095]
In addition, as shown in FIGS. 11 to 13, in the state of each of the red ink droplet, the green ink droplet, and the blue ink droplet, the control unit that supplies the applied voltage separately controls the ink droplets. An applied voltage can be supplied to the driving elements of the inkjet heads 20 of the first coloring unit, the second coloring unit, and the third coloring unit according to the state of the droplet. For this reason, the respective ink droplets are made to be in an optimum state, and the first to third coloring units are formed so that the ink amounts of the respective colors are correct and land on the substrate 48 efficiently. Can go.
[0096]
Then, when manufacturing a color filter while appropriately monitoring the weight of one ink drop of each color ink, by changing the value of the applied voltage, that is, changing the voltage value, or changing the frequency, during the manufacture of the color filter. A state in which an appropriate amount of ink can be output can be maintained.
[0097]
Since the inkjet head 20 can be moved and positioned independently in the X-axis direction by the second moving means 16, the inkjet head 20 can be cleaned and maintained by the cleaning unit 24 shown in FIG. In addition, the operation of attaching the color balance and measuring the weight of the ink droplets with the electronic balance 18 can be appropriately performed during the color filter forming operation. That is, the inkjet head 20 can be independently sent in the X-axis direction above the cleaning unit 24, the capping unit 22, or the electronic balance 18 side. Thus, maintenance of the ink jet head 20, measurement of the weight of ink droplets, and the like can be easily, smoothly, and efficiently performed without stopping the operation of manufacturing the color filter.
[0098]
Further, since the substrate attaching / detaching operation position P is located on the front side of the inkjet head 20 and the second moving unit 16 and the second moving unit 16 is located above and separated from the first moving unit 14, the attaching / detaching of the substrate 48 is performed. The work can be easily performed without being disturbed by the second moving means 16 and the inkjet head 20. Therefore, the replacement of the substrate 48 can be performed smoothly, easily, and efficiently without being restricted by the position of the inkjet head 20 or the like.
[0099]
The present invention is not limited to the above embodiment, and various changes can be made without departing from the scope of the claims.
[0100]
The filter manufacturing apparatus of the present invention is not limited to manufacturing a color filter for a liquid crystal display device, for example, and can be applied to, for example, an EL (electroluminescence) display element. An EL display element has a configuration in which a thin film containing a fluorescent inorganic or organic compound is sandwiched between a cathode and an anode, and electrons and holes are injected into the thin film and recombined to form excitons. (Exciton), and emits light by utilizing light emission (fluorescence / phosphorescence) when the exciton is deactivated. Of the fluorescent materials used in such EL display elements, a material that emits red, green, and blue luminescent colors is inkjet-patterned onto an element substrate such as a TFT using the manufacturing apparatus of the present invention, so that self-luminous full-color light is emitted. An EL display element can be manufactured. The range of the filter in the present invention includes the substrate of such an EL display element.
[0101]
The filter manufacturing apparatus of the present invention includes a step of performing a surface treatment such as plasma, UV treatment, and coupling on the surface of a resin resist, a pixel electrode, and a lower layer so that an EL material is easily attached. There may be.
[0102]
The EL display element manufactured using the color filter manufacturing apparatus of the present invention can be applied to a low-information field such as a segment display and a simultaneous image emission still image display, for example, a picture, a character, and a label, or a dot, line, or line. It can also be used as a light source having a planar shape. Further, by using an active element such as a TFT for driving, such as a passively driven display element, a full-color display element having high luminance and excellent responsiveness can be obtained.
[0103]
Furthermore, if a metal material or an insulating material is provided to the inkjet patterning technology of the present apparatus, direct fine patterning of a metal wiring, an insulating film, and the like can be performed, and the device can be applied to the production of a novel high-performance device.
[0104]
The ink jet head 20 of the illustrated filter manufacturing apparatus has a R.D. G. FIG. B can discharge one type of ink, but it is of course possible to discharge two or three types of ink at the same time.
[0105]
Further, the first moving means 14 and the second moving means 16 of the filter manufacturing apparatus 10 use linear motors, but the present invention is not limited to this, and other types of motors and actuators can be used.
[0106]
In the embodiment of the present invention, the first coloring means, the second coloring means, and the third coloring means are arranged in this order in FIG. 5, and ink is ejected onto the substrate 48 in the order of red, green, and blue. However, the order is not limited to this, and the order can be changed.
[0107]
【The invention's effect】
In the present invention, since the substrate supply / discharge unit and the drying unit corresponding to each coloring unit are arranged, it is possible to perform drying for each color, and it is possible to perform drying according to the characteristics and physical properties of each color, A good quality filter can be manufactured.
[0108]
In the present invention, since the substrate supply / discharge unit and the drying unit corresponding to each patterning unit are arranged, drying can be performed for each material, and drying can be performed according to the characteristics and physical properties of each material. And a highly accurate pattern can be formed.
[0109]
According to the present invention, the ink attached to the substrate can be dried while the filter is moved between the step of discharging the first color ink and the step of discharging the second color ink. Production efficiency can be increased.
[0110]
In the present invention, since the material attached to the substrate can be dried while the substrate is moved between the step of discharging the first material and the step of discharging the second material, the pattern can be efficiently formed. Can be performed.
[Brief description of the drawings]
FIG. 1 is a diagram showing in detail a preferred embodiment of a filter manufacturing apparatus of the present invention.
FIG. 2 is a diagram showing the filter manufacturing apparatus of FIG. 1 more clearly.
FIG. 3 is a perspective view showing a first moving unit and a second moving unit, an inkjet head, a substrate, and the like of the filter manufacturing apparatus of FIG. 2;
FIG. 4 is a plan view showing a first moving unit, a second moving unit, a robot, a substrate housing unit, and the like.
FIG. 5 is a plan view showing an overall configuration diagram of a filter manufacturing apparatus of the present invention.
FIG. 6 is a diagram showing a computer, a control panel, various control objects, and the like.
FIG. 7 is a block diagram showing each element in the control means.
FIG. 8 is a diagram illustrating a structure of an inkjet head.
FIG. 9 illustrates an example of manufacturing a color filter using a substrate.
FIG. 10 is a diagram showing a substrate and a part of a color filter region on the substrate.
FIG. 11 is a diagram showing an operation example of the filter manufacturing apparatus.
FIG. 12 is a diagram showing an example in which control is performed by changing a voltage value of an applied voltage applied to a piezo element.
FIG. 13 is a diagram showing an example of a change in applied voltage and a change in frequency.
[Explanation of symbols]
14 First moving means 16 Second moving means 20 Ink jet head 46 Table 48 Substrate 74 Robot (substrate feeding / discharging means)
210 first coloring means 220 second coloring means 230 third coloring means 1000, 1001, 1002 drying means 2000 control means

Claims (4)

A filter manufacturing apparatus for manufacturing a color filter by landing ink on a substrate,
A first coloring unit having a first inkjet head for discharging a first color ink onto the substrate, and a first relative position changing unit for changing a relative position of the substrate with respect to the first inkjet head;
A second ink jet head for discharging a second color ink onto the substrate, and a second coloring unit having a second relative position changing unit that changes a relative position of the substrate with respect to the second inkjet head;
A third coloring unit having a third inkjet head for discharging a third color ink onto the substrate, and a third relative position changing unit for changing a relative position of the substrate with respect to the third inkjet head;
Has,
A filter manufacturing apparatus, wherein a substrate supply / discharge unit for supplying / discharging the substrate and a drying unit for drying ink that has landed on the substrate are arranged corresponding to each coloring unit. An inkjet patterning apparatus that forms a pattern on a substrate by discharging a material,
A first patterning unit having a first inkjet head, and a first relative position changing unit that changes a relative position of the substrate with respect to the first inkjet head;
A second patterning unit having a second inkjet head and a second relative position changing unit that changes a relative position of the substrate with respect to the second inkjet head;
A third patterning unit having a third inkjet head, and a third relative position changing unit that changes a relative position of the substrate with respect to the third inkjet head;
Has,
An inkjet patterning apparatus, wherein a substrate supply / discharge unit for supplying / discharging the substrate and a drying unit for drying the material discharged onto the substrate are arranged corresponding to each patterning unit. A filter manufacturing method for manufacturing a color filter by landing ink on a substrate,
A step of supplying and discharging the substrate between the step of ejecting the first color ink and the step of ejecting the second color ink among the plurality of inks; A method for manufacturing a filter, comprising a step of drying ink of one color. An inkjet patterning method for forming a pattern on a substrate by discharging a plurality of types of materials,
A step of supplying and discharging the substrate between the step of discharging the first material and the step of discharging the second material, of the plurality of types of materials, and the step of discharging the first material discharged to the substrate. An inkjet patterning method including a step of drying a material.

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