JP4852989B2 - Droplet landing position correction method for droplet discharge device, droplet discharge device, and electro-optical device manufacturing method - Google Patents

Description

The present invention is the production of work to a plurality of functional liquid droplet droplet landing position correction method of the liquid droplet ejection apparatus which performs drawing processing by ejecting a functional liquid by the discharge head, a droplet discharge equipment and electrical-optical device it relates to mETHODS.

2. Description of the Related Art Conventionally, in a liquid droplet ejection apparatus that is equipped with an ink jet type functional liquid droplet ejection head and performs drawing processing on a workpiece based on ejection pattern data, an angular deviation (assembly error, etc.) In order to correct the deviation of the droplet landing position due to the above, the inspection area on the alignment mask having the reference mark using two nozzles of the nozzle row of the functional droplet discharge head based on the alignment discharge pattern data Two inspection dots (functional droplets for inspection) are landed on the surface, and angle correction data is generated based on the image recognition result of the landing error of each inspection dot with respect to the reference mark. A droplet landing position correction method for correcting rotation in the axial direction is known (see, for example, Patent Document 1).
JP 2004-141758 A

  However, in the conventional droplet landing position correction method, since two inspection dots landed from two nozzles of the nozzle row of a single functional droplet discharge head are used for landing position recognition, The dots are not well separated. For this reason, when the landing position is shifted due to the ejection characteristics of the nozzle, the angle formed by the line connecting the two landing positions with respect to the predetermined direction changes greatly, and the angle correction data is highly accurate. Could not be generated. Therefore, even if the rotation correction is performed using the obtained angle correction data, the droplet landing position in the θ-axis direction cannot be corrected appropriately.

The present invention, droplet landing position correction method of a plurality of functional liquid droplet angle of the head unit comprising a discharge head for rotation correction correction data droplet ejection apparatus capable of obtaining a high precision, a droplet discharge equipment and and to provide a manufacturing how the electric optical apparatus.

The droplet landing position correction method of the droplet discharge apparatus of the present invention includes a head unit comprising a plurality of functional droplet discharge heads mounted in a positioned state so as to be rotatable in the θ-axis direction, and draws and discharges a workpiece. A droplet landing position correction method for a droplet discharge apparatus that performs drawing processing by discharging functional liquid from a plurality of functional droplet discharge heads according to pattern data, and recognizes a reference mark formed on an alignment mask, A plurality of first functional droplets for inspection from at least two functional droplet ejection heads separated from the inspection area of the inspection workpiece by the data generation step for generating the alignment ejection pattern data and the alignment ejection pattern data. First landing stage for landing, first landing position recognition step for recognizing the landing position of each functional droplet for first inspection, and first landing position recognition An average landing position generating step for averaging the image recognition data of a plurality of landing positions for each functional liquid droplet discharge head recognized in the process and generating average landing position data, discharge pattern data for alignment, and average landing position The head unit is moved in the θ-axis direction based on the first landing error acquisition step of comparing the data and acquiring the landing error of each functional droplet for first inspection, and the landing error acquired in the first landing error acquisition step. And an angle correction data generation step for generating angle correction data for rotational correction.

In addition, the droplet discharge device of the present invention includes a head unit in which a plurality of functional droplet discharge heads are mounted in a positioned state, a set table for setting a work, and a θ-axis rotation that rotates the head unit in the θ-axis direction. And a head driving means for ejecting functional liquid from a plurality of functional liquid droplet ejection heads based on predetermined ejection pattern data, and a work set on the set table by drawing ejection pattern data by controlling the head driving means. On the other hand, the functional liquid is ejected from a plurality of functional liquid droplet ejection heads to perform drawing processing, and the reference marks formed on the alignment mask are set on the set table by the alignment ejection pattern data generated by image recognition. Inspection function from at least two functional droplet discharge heads separated from the inspection area of the inspection workpiece Control means for landing each droplet, image recognition means for recognizing the landing position of the functional droplet for inspection, and image recognition data for a plurality of landing positions for each functional droplet discharge head recognized by the image recognition means. Average landing position generation means that averages and generates average landing position data, alignment discharge pattern data, and average landing position data are compared, and landing errors for obtaining the landing error of each test function droplet And an angle correction data generating means for generating angle correction data for correcting the rotation of the head unit in the θ-axis direction by the θ-axis rotating means based on the acquired landing error. To do.

According to these configurations, by ejecting the first functional droplet from at least two functional droplet ejection heads among the plurality of functional droplet ejection heads of the head unit, a single functional droplet ejection is performed. Compared to the case where the inspection functional liquid droplets are landed from two nozzles in the nozzle array of the head, the first inspection functional liquid droplets can be sufficiently separated from each other. For this reason, even if the landing position is shifted due to the ejection characteristics of the nozzle, the angle formed by the line connecting the two landing positions with respect to the predetermined direction is almost the same, and the angle correction data is It can be obtained with high accuracy. Therefore, the angular deviation of the head unit in the θ-axis direction can be corrected appropriately.
It should be noted that the functional liquid droplet ejection heads for landing the first test functional liquid droplets are preferably separated from each other as much as possible.
In addition, it is possible to further reduce the influence of the landing position deviation due to the ejection characteristics of the nozzles, and to improve the accuracy of the angle correction data.
Furthermore, by using an alignment mask, alignment discharge pattern data can be generated accurately and easily.

  Further, in these cases, in the first inspection landing process, each of the first inspection functional liquids in the first landing position recognition process is ejected using the alignment mask having the inspection region as the inspection work and discharging the first inspection functional liquid droplets. In parallel with the image recognition of the droplets, it is preferable to further include a data generation step of generating an alignment discharge pattern data by recognizing the reference mark formed on the alignment mask.

  According to this configuration, the alignment discharge pattern data can be accurately and easily generated by using the alignment mask. In addition, the image of the reference mark on the alignment mask and the first functional droplet for inspection are recognized in parallel, thereby generating the ejection pattern data for alignment and the image recognition of the landing position of the first functional droplet. Can be performed concurrently. For this reason, the time required for the landing position correction process can be shortened.

  In these cases, the drawing process is performed while relatively moving the plurality of functional liquid droplet ejection heads in the X-axis direction, and the head unit is configured to be movable in the Y-axis direction. In consideration of the angle correction data, Y axis movement correction data for correcting the movement of the head unit in the Y axis direction is generated, and the drawing discharge pattern data is corrected so as to correct the relative position of the head unit in the X axis direction. It is preferable to further include an XY correction process for correcting.

  According to this configuration, taking into account angle correction data obtained with high accuracy, generation of Y-axis movement correction data and data correction of drawing ejection pattern data are performed. For this reason, in addition to the angular deviation of the head unit, the positional deviation (mechanical accuracy error or assembly accuracy error) of the head unit in the X-axis direction and the Y-axis direction can be corrected appropriately. Landing position deviations in the axial direction and the Y-axis direction can be appropriately corrected.

  In these cases, the drawing process is performed while relatively moving the plurality of functional liquid droplet ejection heads in the X-axis direction, and the head unit is configured to be movable in the Y-axis direction. Based on the rotation correction step for correcting the rotation of the head unit, and after the rotation correction step, the second droplet for landing the second functional droplet for inspection from the functional droplet discharge head to the inspection region by the alignment discharge pattern data. Inspection landing process, second landing position recognition process for recognizing the landing position of the second functional droplet for inspection, alignment discharge pattern data, and image recognition of the landing position recognized in the second landing position recognition process Based on the landing error acquired in the second landing error acquisition step and the second landing error acquisition step of comparing the data and acquiring the landing error of the second functional droplet for inspection, An XY correction step of generating Y-axis movement correction data for correcting the movement of the head unit in the Y-axis direction, and correcting the drawing discharge pattern data so as to correct the relative position of the head unit in the X-axis direction. It is preferable to provide.

  According to this configuration, the landing position of the second inspection functional liquid droplet from the functional liquid droplet ejection head takes into account the angle correction data obtained with high accuracy, and the landing of the second inspection functional liquid droplet Based on the error, generation of Y-axis movement correction data and data correction of the drawing ejection pattern data are performed. For this reason, in this case, in addition to the angular deviation of the head unit, the positional deviation of the head unit in the X-axis direction and the Y-axis direction can be corrected appropriately.

In these cases, a plurality of head units are mounted so as to be individually rotatable in the θ-axis direction, and landing of the first inspection functional liquid droplet in the first inspection landing process and image recognition of the landing position in the first landing position recognition process The generation of the average landing position data in the average landing position generation step, the acquisition of the landing error in the first landing error acquisition step, and the generation of angle correction data in the angle correction data generation step are preferably performed in units of head units.

  According to this configuration, angle correction data can be obtained with high accuracy in units of head units in a droplet discharge device including a plurality of head units. For this reason, each of the plurality of head units can be appropriately rotationally corrected.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film forming unit is formed on a workpiece using a liquid droplet discharge apparatus that performs the liquid droplet landing position correction method of the liquid droplet discharge apparatus described above. To do.

According to this configuration, by performing the droplet landing position correcting method that can obtain angle correction data for rotationally correcting a head unit equipped with a plurality of functional droplet discharge heads, Position correction can be performed appropriately, and a highly reliable electro-optical device can be manufactured. As an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. Electron emission devices include so-called FED (Field Emission Display) and SED (Surface-conduction).
It is a concept that includes an Electron-Emitter Display device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  Hereinafter, a liquid droplet ejection apparatus and a liquid droplet landing position correction method according to the present invention will be described with reference to the accompanying drawings. This droplet discharge device is incorporated in a flat panel display production line, and by a printing technique (inkjet method) using a functional droplet discharge head which is an inkjet head, a color filter or an organic EL device of a liquid crystal display device A light emitting element or the like to be each pixel is formed. Therefore, first, a substrate to be drawn and an alignment mask used for droplet landing position correction processing will be briefly described.

  The substrate W shown in FIG. 1 is composed of a glass substrate, a sheet-like polyimide base material, or the like, and has a rectangular shape in plan view. The outer edge portion of the substrate W is a non-drawing margin Wn (non-drawing region) where drawing processing is not performed, and a portion surrounded by the non-drawing margin Wn is an actual drawing region Wd where drawing processing is performed.

  A non-drawing margin Wn (one long side portion of the substrate W) is provided with an inspection region Wc that receives landing of a functional droplet for inspection described later. The surface of the inspection area Wc is subjected to a water repellent treatment in order to prevent the landing functional droplets from spreading and getting wet. In addition, a pair of substrate alignment marks Wm that are image-recognized in a substrate alignment operation to be described later are formed on both long side portions of the substrate W.

  On the other hand, although not shown in the drawings, the alignment mask is formed thick and rectangular, for example, with glass or the like. Although details will be described later, the alignment mask is used to generate alignment ejection pattern data for ejecting functional droplets for inspection in the droplet landing position correction processing of the droplet ejection apparatus 1. Prior to the drawing operation, the setting table 21 (described later) of the droplet discharge device 1 is set.

  In the alignment mask, a plurality of reference marks for indicating the ideal (designed) landing positions of functional droplets are arranged, and a pair of mask alignment marks are formed on both long side portions. .

  Next, the droplet discharge device 1 according to the embodiment will be described. As shown in FIG. 2, the droplet discharge device 1 includes a drawing device 2 on which the functional droplet discharge head 17 is mounted and a maintenance device (not shown). In addition to performing function maintenance / recovery, the drawing apparatus 2 performs a drawing operation for discharging the functional liquid onto the substrate W (workpiece). In addition, the droplet discharge device 1 incorporates a controller 3 (control means, see FIG. 5) and the like for overall control of each part.

  The drawing apparatus 2 includes an XY movement mechanism 11 including an X-axis table 12 and a Y-axis table 13 orthogonal to the X-axis table 12, two carriages 14 individually attached to the Y-axis table 13, and each carriage 14 A head unit 15 (see FIG. 3) mounted on a carriage 14 and mounted with a plurality (four) of functional liquid droplet ejection heads 17 and an image recognition means 16 for recognizing an image of the substrate W, the head unit 15, drawing results, and the like. And.

  A region where the movement locus of the substrate W by the X-axis table 12 and the movement locus of the carriage 14 by the Y-axis table 13 intersect is a drawing area for performing drawing processing, and the movement of the head unit 15 by the Y-axis table 13. A region outside the X-axis table 12 on the trajectory and outside (right side in the figure) is a maintenance area, and a part of the maintenance device is installed in this maintenance area. On the other hand, the area on the front side of the X-axis table 12 is a substrate carry-in / out area where the substrate W is carried into / out of the droplet discharge device 1.

  The X-axis table 12 is mounted directly on the floor, has a motor-driven X-axis slider (not shown) that constitutes a drive system in the X-axis direction, and sucks and sets a substrate W and an alignment mask thereon. A set table 21 including a table (not shown) and a substrate θ-axis table (not shown) is movably mounted and configured. When the X-axis slider is moved in the X-axis direction, the substrate W set on the set table 21 moves in the X-axis direction. The X-axis table 12 is provided with an X-axis linear scale 22 (see FIG. 5) for detecting the moving position of the suction table.

  The Y-axis table 13 is supported by left and right columns (not shown) erected on the floor so as to straddle the X-axis table 12, and is a motor-driven Y-axis slider (which constitutes a drive system in the Y-axis direction). There are two sets (not shown), and the head unit 15 is movably mounted on each set of Y-axis sliders via the carriage 14. The two carriages 14 can be individually moved in the Y-axis direction, and of course, they can be moved collectively in the Y-axis direction. The Y-axis table 13 is provided with a Y-axis linear scale 24 (see FIG. 5) that detects the movement position of each carriage 14 (head unit 15).

  Each carriage 14 has a head θ axis table 26 that holds the head unit 15 and finely adjusts (rotates) the θ position of the head unit 15 by driving a motor. In this embodiment, two carriages 14 (head units 15) are provided, but the number is arbitrary.

  A common functional liquid is introduced into the two head units 15, and the number of head units 15 to be operated is increased or decreased according to the size of the substrate W. However, different functional liquids may be introduced and each head unit 15 may be used for separate drawing processes.

  As shown in FIG. 3, each head unit 15 includes four functional liquid droplet ejection heads 17, a head plate 31 that positions and mounts the functional liquid droplet ejection heads 17, and two reference pins 32 that protrude from the head plate 31. And is mounted on the carriage 14 via the head plate 31. The two reference pins 32 are for positioning each head unit 15 on the premise of image recognition. The reference numeral 33 in the figure is the center of rotation of the head unit 15 by the head θ-axis table 26.

  The four functional liquid droplet ejection heads 17 are mounted such that the row directions of nozzle rows 42 to be described later are parallel to each other. When mounted on the carriage 14, each nozzle row 42 is aligned with the Y-axis direction. It is supposed to be parallel. Hereinafter, the nth functional liquid droplet ejection head 17 counted from the left side of the drawing is referred to as an “nth head”.

  The first head 17a and the second head 17b are arranged stepwise while being shifted in the X-axis direction so that the plurality of nozzles 43 are continuous in the Y-axis direction. The third head 17c and the fourth head 17d are functional In order to avoid physical interference between the droplet discharge heads 17, the first head 17 a and the second head are rearranged in the Y-axis direction and have a gap (approximately 5 heads), and the same step shape as described above. It is arranged. That is, the first head 17a and the third head 17c are arranged in the Y-axis direction, and similarly, the second head 17b and the fourth head 17d are arranged in the Y-axis direction.

  As shown in FIG. 4, the functional liquid droplet ejection head 17 is supplied with a functional liquid from a functional liquid pack (not shown) and ejects the functional liquid by an ink jet method (for example, piezoelectric element driving). And two nozzle rows 42 (A row 42A and B row 42B) formed in parallel to each other. Each nozzle row 42 is configured by arranging a plurality of (for example, 180) nozzles 43 at an equal pitch (for example, 141 μm). Both nozzle rows 42 are shifted from each other by a half pitch (70 μm) in the row direction of the nozzle rows 42. That is, the nozzle pitch by the two nozzle rows 42 is 70 μm. Then, a functional liquid is discharged from each nozzle 43 by applying a driving waveform from a head driver 111 described later.

  Although not shown, the maintenance device includes a suction unit that sucks the functional liquid from the nozzle 43 of the functional liquid droplet ejection head 17, a wiping unit that wipes the nozzle surface 41 of the functional liquid droplet ejection head 17, and a functional liquid droplet in the maintenance area. Equipped with a flight observation unit that observes the flight status of the aircraft. In addition, a pair of pre-drawing flushing boxes for performing flushing (disposal discharge) are disposed on both front and rear sides of the suction table.

  The image recognition means 16 is disposed so as to face both the front and rear sides of the substrate carry-in / out area, and recognizes two substrate alignment marks Wm on the substrate W and two mask alignment marks on the alignment mask. A functional liquid discharged to a substrate 51 and the like, a head recognition camera 52 connected to a camera 51 (see FIG. 5), an X-axis slider of the X-axis table 12, and recognizing two reference pins 32 of each head unit 15. A drawing recognition camera 53 that recognizes an image of a reference mark of a droplet or an alignment mask, and a camera moving mechanism 54 that is arranged in parallel with the Y-axis table 13 and moves the head recognition camera 52 in the Y-axis direction by driving a motor. ing.

  By moving the set table 21 to the substrate carry-in / out area by the X-axis table 12, each substrate recognition camera 51 faces the substrate alignment mark Wm and the mask alignment mark, and images it. Further, the head recognition camera 52 is moved to the drawing area by the X-axis table 12 and the head unit 15 is moved in the Y-axis direction by the Y-axis table 13, so that the head recognition camera 52 sequentially moves to the two head units 15. Come and image them. Further, the head recognition camera 52 is moved by moving the head recognition camera 52 in the Y-axis direction by the camera moving mechanism 54 while moving the substrate W and the alignment mask on the movement locus of the head recognition camera 52 by the X-axis table 12. An inspection functional droplet D (see FIG. 7) and a reference mark, which will be described later, are faced and images are taken.

  Next, the control system of the entire droplet discharge device 1 will be described with reference to FIG. The control system of the droplet discharge apparatus 1 basically includes an input unit 101 having an operation panel 4 for inputting various data, and various cameras of the image recognition means 16 to recognize the position of the substrate W and each head unit 15. A position detection unit 102 that performs the X-axis linear scale 22 and the Y-axis linear scale 24, a movement detection unit 103 that detects the position of the suction table and each head unit 15, and a functional liquid droplet ejection head 17, A drive unit 104 having various drivers for driving the XY moving mechanism 11 and the like, and a control unit 105 (controller 3) that comprehensively controls the droplet discharge device 1 including these units are provided.

  The drive unit 104 includes a head driver 111 that controls the ejection of the functional liquid droplet ejection head 17 and a motor driver 112 that controls the respective motors of the XY moving mechanism 11. The head driver 111 generates and applies a predetermined drive waveform in accordance with an instruction from the control unit 105 to control the ejection of the functional liquid droplet ejection head 17. The motor driver 112 includes an X-axis motor driver 113, a Y-axis motor driver 114, a substrate θ-axis motor driver 115, and a head θ-axis motor driver 116, which are in accordance with instructions from the control unit 105, the X-axis table 12, The drive motors of the Y axis table 13, the substrate θ axis table, and the head θ axis table 26 are driven and controlled.

  The control unit 105 includes a CPU 121, a ROM 122, a RAM 123, and a P-CON 124, which are connected to each other via a bus 125. The ROM 122 has a control program area for storing a control program to be processed by the CPU 121, and a control data area for storing control data for performing drawing processing and image recognition.

  The RAM 123 stores, in addition to various register groups, a discharge pattern data area for storing drawing discharge pattern data and alignment discharge pattern data, which will be described later, an image data area for temporarily storing image data, the substrate W, and each head unit 15. It has a correction data area for storing correction data for position correction, and is used as various work areas for control processing.

  The P-CON 124 is configured and incorporated with a logic circuit that complements the functions of the CPU 121 and handles interface signals with peripheral circuits. For this reason, the P-CON 124 fetches image data, various commands from the input unit 101 as they are or processes them into the bus 125, and interlocks with the CPU 121 to output data and control signals output from the CPU 121 and the like to the bus 125. Is output to the drive unit 104 as it is or after being processed.

  The CPU 121 inputs various detection signals, various commands, various data, etc. via the P-CON 124 according to the control program in the ROM 122, processes various data, etc. in the RAM 123, and then drives via the P-CON 124. The entire droplet discharge device 1 is controlled by outputting various control signals to the unit 104 and the like. For example, the CPU 121 controls the functional droplet discharge head 17, the X-axis table 12 and the Y-axis table 13 to perform drawing on the substrate W under predetermined droplet discharge conditions and predetermined movement conditions.

  Here, a series of drawing operations on the substrate W by the droplet discharge device 1 will be briefly described. First, the substrate W is set on the set table 21 moved to the substrate carry-in / out area, and the substrate alignment operation is performed as preparation before discharging the functional liquid droplets. That is, two substrate alignment marks Wm on the substrate W are image-recognized by the two substrate recognition cameras 51, and the position correction in the θ-axis direction by the substrate θ-axis table and the X of the substrate W are performed based on the image recognition result. The position data correction in the axial direction and the Y-axis direction is performed, and the position correction of the substrate W is performed.

  Before and after the substrate alignment operation, a head alignment operation (droplet landing position correction process) for correcting the relative position of each head unit 15 is performed, as will be described in detail later. However, this head alignment operation does not need to be performed every time the substrate W is drawn (every time the substrate W is replaced), and may be performed only during tooling or head replacement in order to shorten the tact time.

  Thus, after the alignment of the substrate W and the head unit 15 is performed, the functional liquid is discharged onto the substrate W. That is, while the substrate W is moved in the X-axis direction by the X-axis table 12, functional droplets are ejected and landed from the plurality of functional droplet ejection heads 17 on the substrate W based on the drawing ejection pattern data. The main scanning and the sub-scanning in which the two head units 15 are moved in the Y-axis direction by the Y-axis table 13 are repeatedly performed, and the drawing process is performed on the entire actual drawing area Wd of the substrate W.

  With reference to FIGS. 6 and 7, the head alignment operation (landing position correction processing) of the droplet discharge device 1 according to the present embodiment will be described in detail. This head alignment operation is performed in units of head units 15, and only one head unit 15 will be described below, but the same operation is performed for the other head unit 15.

  First, the ejection pattern data for alignment is produced | generated using an alignment mask (S11 of FIG. 6). That is, an alignment mask is set on the set table 21, and a pair of mask alignment marks are image-recognized by the substrate recognition camera 51 in the same manner as the above-described substrate alignment operation to align the alignment mask. Next, the drawing recognition camera 53 recognizes an image of a plurality of reference marks on the alignment mask, and acquires and stores an ideal landing position (coordinate data) of the functional liquid droplet. Based on the acquired landing position, alignment ejection pattern data is generated and stored.

  Thereafter, the substrate W to be drawn is set on the set table 21 instead of the alignment mask. The alignment discharge pattern data need not be performed for each head alignment operation if the same type of head unit 15 is used.

  Subsequently, the relative position of the head unit 15 in the θ-axis direction is temporarily corrected (S12). That is, the two reference pins 32 of the head unit 15 are image-recognized by the head recognition camera 52 while the two head units 15 face the head recognition camera 52 sequentially. Based on the image recognition result, the head unit 15 is rotated in the θ-axis direction by the head θ-axis table 26.

  In addition, when the head unit 15 is not extremely shifted in angle, this temporary correction process may be omitted. However, by performing the temporary correction process, the functional droplet D for inspection that has landed on the substrate W can be reliably contained within the field of view of the drawing recognition camera 53 in the image recognition process for the functional droplet D for inspection described later. it can.

  Next, the head unit 15 is exposed to the inspection region Wc formed on the substrate W (inspection work), and the inspection is performed from the two functional liquid droplet ejection heads 17 of the head unit 15 based on the alignment ejection pattern data. Functional droplets are discharged and landed (S13). That is, one test functional droplet D is landed from each of the three nozzles 43 (for example, the 90th, 91st, and 92nd positions from the end) of each nozzle row 42 of the first head 17a and the third head 17c. .

  Next, each inspection functional droplet D is imaged by the drawing recognition camera 53, and the center of gravity (landing position) of each inspection functional droplet D is recognized (S14). Then, the control unit 105 averages the image recognition data of the landing positions of the three functional droplets D for inspection for each nozzle array 42, and sets the average value as the average landing position Pm of each nozzle array 42. The nozzles 43 to be measured for the landing position may be one nozzle 43 for each nozzle row 42, but by using the average value of the plurality of nozzles 43, it is possible to reduce the influence of flight bending or the like.

  Next, the control unit 105 compares the image recognition data of the average landing position Pm of each nozzle array 42 with the ejection pattern data for alignment (ideal landing position), and the inspection function for each nozzle array 42. The droplet landing error is acquired (S15). The symbol Pi in FIG. 7 indicates an ideal landing position based on the alignment discharge pattern data.

  Then, the control unit 105 calculates the average landing position Pm of the A row 42A of the first head 17a and the third head from the landing error of the A row 42A of the first head 17a and the landing error of the A row 42A of the third head 17c. An angle θa formed by a line connecting the average landing position Pm of the A row 42A of 17c with respect to the Y-axis direction is calculated. Similarly, from the landing error of the B row 42B of the first head 17a and the landing error of the B row of the third head 17c, the average landing position Pm of the B row 42B of the first head 17a and the B row 42B of the third head 17c. An angle θb formed by a line connecting the average landing position Pm with respect to the Y-axis direction is calculated. Based on the average value of θa and θb, angle correction data for correcting the angle of the head unit 15 is generated in consideration of the rotation center 33 of the head unit 15 (S16).

  According to this, by ejecting the functional droplet for inspection D from the first head 17a and the third head 17c among the four functional droplet ejection heads 17 of the head unit 15, a single functional droplet ejection is performed. Compared to the case where the inspection functional liquid droplets D are landed from the two nozzles 43 in the nozzle row 42 of the head 17, the inspection functional liquid droplets D can be sufficiently separated from each other. For this reason, even if the landing position is shifted due to the ejection characteristics of the nozzle 43, the angles θa and θb formed by the line connecting the two average landing positions Pm with respect to the Y-axis direction are almost affected. Therefore, angle correction data can be obtained with high accuracy.

  Note that the angle correction data may be generated by obtaining the landing error for only one nozzle row 42. However, angle correction data can be obtained with high accuracy by obtaining the landing errors of both the A row 42A and the B row 42B as in the present embodiment. Further, if the landing error is obtained for the second head 17b and the fourth head 17d in the same manner as the first head 17a and the third head 17c, the angle correction data can be obtained with higher accuracy.

  Further, the control unit 105 generates Y-axis movement correction data for correcting the movement of the head unit 15 in the Y-axis direction by adding angle correction data to the acquired landing error, and corrects the relative position in the X-axis direction. Thus, the drawing ejection pattern data is corrected (X-axis correction) (S17).

  Finally, the head unit 15 is rotationally corrected (θ-axis correction) by the head θ-axis table 26 based on the obtained angle correction data, and the head unit 15 is corrected by the Y-axis table 13 based on the movement correction data. The Y-axis movement correction (Y-axis correction) is performed in the Y-axis direction (S18), and the series of droplet landing position correction processing ends. As a matter of course, the X-axis correction, the Y-axis correction, and the θ-axis correction may be performed in any order, and these may be performed simultaneously in parallel.

  As described above, by performing rotation correction based on the angle correction data obtained with high accuracy, the angle deviation in the θ-axis direction of the head unit 15 can be rotationally corrected with high accuracy, and θ caused by the angle deviation can be obtained. The landing position deviation in the axial direction can be appropriately corrected. Further, by taking into account the angle correction data obtained with high accuracy, the X-axis correction and the Y-axis correction are performed, so that in addition to the angular deviation of the head unit 15, the head unit 15 in the X-axis direction and the Y-axis direction. The positional deviation can be appropriately corrected, and the landing position deviation in the X-axis direction and the Y-axis direction due to the positional deviation can be appropriately corrected.

  As shown in FIG. 8, after angle correction data is generated in the same manner as described above (S16), the head unit 15 is rotationally corrected (S21), and then the second inspection is performed in the same manner as described above. Landing of the functional droplet D (S22), image recognition of the landing position of the functional droplet D for inspection (S23), acquisition of landing error of the functional droplet for inspection (S24), and based on the landing error, Data correction of drawing ejection pattern data and Y-axis movement correction data may be generated (S25), and finally the head unit 15 may be corrected in the Y-axis direction by Y-axis movement (S26). In this case, the process after the landing of the second functional droplet D for inspection (S22) is caused to land from one nozzle 43 of one functional droplet discharge head 17 out of the four functional droplet discharge heads 17. It suffices to perform only one function droplet D for inspection. However, the accuracy can be improved by performing the test on a plurality of test functional droplets D landed from the plurality of nozzles 43.

  Further, in this embodiment, the generation of the alignment ejection pattern data and the image recognition of the functional droplet for inspection are performed separately, but these may be performed in parallel to shorten the processing time. . That is, an inspection area for receiving the inspection functional droplet is formed on the alignment mask, the inspection functional droplet D is ejected using the alignment mask as the inspection work, and in parallel with the image recognition of the inspection functional droplet D. Then, the reference mark is image-recognized to generate alignment discharge pattern data.

  However, if the functional droplet for inspection is not ejected onto the alignment mask as in this embodiment, it is not necessary to clean the alignment mask. For this reason, the labor of the cleaning operation can be saved, the alignment mask can be prevented from being damaged by the cleaning operation, and the alignment mask can always be kept in a good state.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 9 is a flowchart showing the manufacturing process of the color filter, and FIG. 10 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 10B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 10C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 10 (d), functional droplets are ejected by the functional droplet ejection head 17, and each pixel region 507a is surrounded by the partition wall portion 507b. Let it land. In this case, the functional liquid droplet ejection head 17 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. 10E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 11 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 10, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 11 are formed at a predetermined interval. A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 17. Further, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 17.

FIG. 12 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 13 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 14 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a (first bank layer) formed of an inorganic material such as SiO, SiO ₂ or TiO ₂ , and is made of an acrylic resin, a polyimide resin, or the like. The organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance is formed. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 15, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), and an opposing surface. It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 16, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The region to be subjected to the lyophilic treatment is the first laminated portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane as a processing gas. )
By performing this surface treatment process, when forming the functional layer 617 using the functional liquid droplet ejection head 17, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 21 of the droplet discharge device 1 shown in FIG. 2, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 18, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 17 to each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 19, a drying process and a heat treatment are performed, the polar solvent contained in the first composition is evaporated, and a hole injection / transport layer 617a is formed on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 20, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 20)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 21, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 17, as shown in FIG. 22, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 23, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 24 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 21 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 17. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 17, and it corresponds. Land in the color discharge chamber 705.

Next, FIG. 25 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 26A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a plane schematic diagram of the board | substrate used as the drawing object of the droplet discharge apparatus which concerns on embodiment of this invention. It is a plane schematic diagram of a droplet discharge device. It is a schematic plan view of a head unit mounted on a droplet discharge device. It is the schematic diagram which looked at the functional droplet discharge head from the nozzle surface side. It is the block diagram explaining the control system of the droplet discharge apparatus. It is a flowchart which shows the droplet landing position correction process of a droplet discharge device. It is a conceptual diagram explaining a droplet landing position correction process. It is a flowchart which shows the other droplet landing position correction process of a droplet discharge device. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 3 ... Controller 15 ... Head unit 17 ... Functional droplet discharge head 21 ... Set table 26 ... Head (theta) axis table 53 ... Drawing recognition camera 111 ... Head driver W ... Substrate Wc ... Inspection area

Claims (7)

A head unit composed of a plurality of functional liquid droplet ejection heads mounted in a positioning state is mounted so as to be rotatable in the θ-axis direction, and functional liquid is ejected from the plurality of functional liquid droplet ejection heads to the workpiece by drawing ejection pattern data. A droplet landing position correction method for a droplet discharge apparatus that performs a drawing process,
A data generation step of recognizing the reference mark formed on the alignment mask and generating the discharge pattern data for alignment;
A first inspection landing step for landing a plurality of first inspection functional droplets from at least two functional droplet discharge heads separated from each other with respect to the inspection region of the inspection work by the alignment discharge pattern data; ,
A first landing position recognition step for recognizing an image of a landing position of each functional droplet for first inspection;
An average landing position generation step of averaging the image recognition data of the plurality of landing positions for each of the functional liquid droplet ejection heads that have been image-recognized in the first landing position recognition step, and generating average landing position data, respectively.
A first landing error acquisition step of comparing the discharge pattern data for alignment and the average landing position data to acquire a landing error of each functional droplet for first inspection;
An angle correction data generating step for generating angle correction data for correcting the rotation of the head unit in the θ-axis direction based on the landing error acquired in the first landing error acquiring step;
A droplet landing position correction method for a droplet discharge device, comprising: In the first inspection landing step, the first inspection functional droplet is ejected using the alignment mask having the inspection region as the inspection work,
In parallel with the image recognition of the first test functional droplets in the first landing position recognition step, the reference marks formed on the alignment mask are image-recognized to generate the alignment discharge pattern data. The droplet landing position correction method for a droplet discharge device according to claim 1, further comprising a data generation step. The drawing process is performed while relatively moving the plurality of functional liquid droplet ejection heads in the X-axis direction,
The head unit is configured to be movable in the Y-axis direction,
The angle correction data is added to the obtained landing error to generate Y-axis movement correction data for correcting the movement of the head unit in the Y-axis direction, and the relative position of the head unit in the X-axis direction is corrected. said XY correction process for data correcting drawing ejection pattern data, further droplet landing position correction method of a liquid ejecting device according to claim 1 or 2, characterized in that it comprises as. The drawing process is performed while relatively moving the plurality of functional liquid droplet ejection heads in the X-axis direction,
The head unit is configured to be movable in the Y-axis direction,
A rotation correction step of correcting the rotation of the head unit based on the angle correction data;
After the rotation correction step, a second inspection landing step for landing a second inspection functional droplet from the functional droplet discharge head on the inspection region based on the alignment discharge pattern data;
A second landing position recognition step for recognizing an image of the landing position of the second functional droplet for inspection;
A second landing error for obtaining the landing error of the functional droplet for the second inspection by comparing the ejection pattern data for alignment with the image recognition data of the landing position image-recognized in the second landing position recognition step. Acquisition process;
Based on the landing error acquired in the second landing error acquisition step, Y-axis movement correction data for correcting the movement of the head unit in the Y-axis direction is generated, and the relative position of the head unit in the X-axis direction is generated. An XY correction step of correcting the drawing discharge pattern data so as to correct;
Furthermore droplet landing position correction method of a liquid ejecting device according to claim 1 or 2, further comprising a. A plurality of the head units are mounted so as to be individually rotatable in the θ-axis direction,
Landing of the first test functional droplet in the first test landing process, image recognition of the landing position in the first landing position recognition process, generation of the average landing position data in the average landing position generation process, The droplet according to claim 1 or 2 , wherein the acquisition of the landing error in the first landing error acquisition step and the generation of the angle correction data in the angle correction data generation step are performed in units of the head unit. Method for correcting droplet landing position of discharge device. A head unit comprising a plurality of functional liquid droplet ejection heads mounted in a positioning state;
A set table for setting workpieces;
Θ axis rotating means for rotating the head unit in the θ axis direction;
Head driving means for discharging functional liquid from the plurality of functional liquid droplet discharge heads based on predetermined discharge pattern data;
The head driving means is controlled to perform drawing processing by discharging functional liquid from the plurality of functional liquid droplet discharge heads to the work set on the set table based on drawing discharge pattern data, and an alignment mask. For inspection from at least two functional liquid droplet ejection heads separated from the inspection area of the inspection work set on the set table by the alignment discharge pattern data generated by recognizing the reference mark formed on the image . Control means for landing each functional droplet;
Image recognition means for recognizing the landing position of the functional droplet for inspection;
Average landing position generation means for averaging the image recognition data of the plurality of landing positions for each of the functional liquid droplet ejection heads recognized by the image recognition means, and generating average landing position data, respectively;
A landing error acquisition unit that compares the discharge pattern data for alignment with the average landing position data to acquire a landing error of each functional droplet for inspection,
Angle correction data generating means for generating angle correction data for correcting the rotation of the head unit in the θ-axis direction by the θ-axis rotating means based on the obtained landing error;
A droplet discharge apparatus comprising: It claims 1 using a droplet discharge device for implementing the droplet landing position correction method of a liquid ejecting device according to any one of 5, and forming a film forming part by the functional liquid onto the workpiece Manufacturing method of electro-optical device.

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