JP2007144344A - Method for inspection of discharge for functional liquid drop discharge head, device for the same, liquid drop discharge device, manufacturing method of electro-optical device, electro-optical device and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To avoid repeatedly inspecting a drawing on a defect if there is the defect on the surface of an inspection work and to properly perform the image recognition of a drawing result. <P>SOLUTION: In a method for inspection of discharge for a functional liquid drop discharge head, inspecting a drawing by the functional liquid drop discharge head and the image recognition of a drawing result are alternatively performed successively to a plurality of inspection regions set so as to be arranged in an X-axis direction on an inspection work. Image recognition of non-drawing inspection regions containing the inspection regions which are the objects of the next inspection drawing within a plurality of inspection regions is performed being synchronized with the image recognition of the drawing result. When the defect which may be an obstacle for the image recognition of the drawing result by after next inspection drawing is recognized on the surface of the non-drawing inspection regions based on the image recognition result of the non-drawing inspection regions, the position setting in the X-axis direction of the non-drawing inspection region which has the defect is changed or the non-drawing inspection region which has the defect is skipped so as avoid the defect. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a discharge inspection method for a functional droplet discharge head that discharges functional droplets by an inkjet method, a discharge inspection device for a functional droplet discharge head, a droplet discharge device, a method for manufacturing an electro-optical device, an electro-optical device, and It relates to electronic equipment.

Conventionally, a functional droplet that draws a row of dots from a droplet discharge head to a test object (inspection work), draws a dot row, and detects the positional deviation of the dots based on the image recognition result A discharge inspection method for a discharge head is known. (See Patent Document 1).
JP 2005-14216 A

  By the way, there is a case where minute dust and scratches exist on the surface of the inspection work. In particular, as a work for inspection, a test paper coated with a receiving layer into which the functional liquid penetrates is used on the surface of the base material layer. Such a test paper is mixed with minute dust in the manufacturing process, Since the surface of the receiving layer is often finely scratched (about 0.2 mm to 1.0 mm) due to the mixed fine dust, there is a considerable proportion of fine dust and scratches on the surface. If inspection drawing is performed over such dust and scratches, image recognition of the drawing result cannot be performed properly. On the other hand, it is conceivable to introduce equipment for preventing the entry of minute dust, or to conduct inspection before shipping (before use) to make the product having dust or scratches on the surface inappropriate. However, doing so increases the cost and is not realistic.

  The present invention can avoid performing inspection drawing on the surface of the inspection work even if there are wrinkles on the surface of the inspection work, and can properly perform image recognition of the drawing results. It is an object to provide a method, a discharge inspection apparatus for a functional droplet discharge head, a droplet discharge device, a method for manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus.

  According to the discharge inspection method for a functional liquid droplet ejection head of the present invention, an inspection drawing by a functional liquid droplet ejection head is sequentially performed on a plurality of inspection areas set to be aligned in the X-axis direction on an inspection work, and the drawing result. This is a discharge inspection method for a functional liquid droplet ejection head that alternately performs image recognition, and includes an inspection region to be subjected to the next inspection drawing among a plurality of inspection regions in synchronization with image recognition of a drawing result. Based on the image recognition process for recognizing the image of the undrawn inspection area and the image recognition result of the undrawn inspection area in the image recognition process, the drawing result by the next and subsequent inspection drawing on the surface of the undrawn inspection area A setting change step for changing the position setting in the X-axis direction of the undrawn inspection area with the wrinkles so as to avoid the wrinkles when a wrinkle that can be an obstacle to image recognition is recognized. Features and That.

  In addition, the functional droplet discharge head discharge inspection apparatus of the present invention sequentially performs inspection drawing by the functional droplet discharge head on a plurality of inspection regions set to be aligned in the X-axis direction on the inspection work, An apparatus for inspecting a functional liquid droplet ejection head that alternately performs image recognition of a drawing result, an area setting means for setting a plurality of inspection areas, and the functional liquid droplet ejection head with respect to a work for inspection in the X-axis direction Inspection drawing moving means that moves relative to the image, drawing control means that controls the functional liquid droplet ejection head and the inspection drawing moving means to perform inspection drawing on each inspection area, and image recognition of the drawing result The image recognition means for performing image recognition of the undrawn inspection area including the inspection area to be subjected to the next inspection drawing among the plurality of inspection areas, and the image of the undrawn inspection area by the image recognition means Based on recognition result Then, when a wrinkle that can be an obstacle to image recognition of the drawing result by the next inspection drawing is recognized on the surface of the undrawn inspection area, the undrawn inspection area with the wrinkle is avoided so as to avoid the wrinkle. And setting change means for changing the position setting in the X-axis direction.

According to these configurations, when there is a wrinkle in an undrawn inspection area to be subjected to inspection drawing after the next time, the position setting of the undrawn inspection area with a wrinkle is changed so as to avoid the wrinkle. Thus, in the next and subsequent inspection drawing, the inspection drawing is not performed on the portion having the wrinkles. For this reason, even if there is a wrinkle on the surface of the inspection work, it is possible to appropriately perform image recognition of the drawing result without performing inspection drawing on the wrinkle. In addition, since the image recognition of the inspection area is performed in synchronization with the image recognition of the inspection result, no extra processing time is required for the image recognition of the inspection area.
Prior to the first inspection drawing, it is preferable to recognize the presence of wrinkles by performing image recognition of the inspection region to be the first inspection drawing target.
Moreover, the wrinkles that can hinder the image recognition of the drawing result are, for example, dust on the inspection work or scratches on the surface of the inspection work.

  In the functional droplet ejection head ejection inspection apparatus, it is preferable that the setting changing unit changes the position setting of the undrawn inspection area based on the maximum size of the wrinkles acquired in advance.

  According to this configuration, it was possible to recognize the presence of wrinkles on the surface of the inspection area, but even when the entire wrinkle could not be recognized and the actual size of the wrinkles was not known, the X axis It is possible to grasp the distance to change the setting in the direction, and reliably avoid wrinkles. Note that the maximum size of the wrinkles is obtained by, for example, obtaining the sizes of a plurality of wrinkles (samples) in advance and statistically processing them.

  According to another discharge inspection method for a functional droplet discharge head of the present invention, an inspection drawing by a functional droplet discharge head is sequentially performed on a plurality of inspection regions set to be aligned in the X-axis direction on an inspection work, An ejection inspection method for a functional liquid droplet ejection head that alternately performs image recognition of a drawing result, and is an inspection region that is a target of the next inspection drawing among a plurality of inspection regions in synchronization with image recognition of a drawing result An image recognition process for recognizing an undrawn inspection area including the image, and on the surface of the undrawn inspection area based on the image recognition result of the undrawn inspection area in the image recognition process. An area skip step is provided for skipping an undrawn inspection area having a wrinkle so as to avoid the wrinkle when a wrinkle that can be an obstacle to image recognition of a drawing result is recognized.

  In addition, another functional liquid droplet ejection head ejection inspection apparatus of the present invention sequentially performs inspection drawing by a functional liquid droplet ejection head on a plurality of inspection areas set to be aligned in the X-axis direction on an inspection work. , An ejection inspection apparatus for a functional liquid droplet ejection head that alternately performs image recognition of the drawing result, and an area setting means for setting a plurality of inspection areas, and a functional liquid droplet ejection head for an inspection work. Inspection drawing moving means for relatively moving in the axial direction, drawing control means for controlling the functional liquid droplet ejection head and inspection drawing moving means to perform inspection drawing for each inspection region, and drawing result Image recognition means for performing image recognition of an undrawn inspection area including an inspection area to be subjected to the next inspection drawing among a plurality of inspection areas in synchronization with image recognition, and an undrawn inspection area by the image recognition means Image recognition results Therefore, when a wrinkle that can be an obstacle to image recognition of the drawing result by the next inspection drawing is recognized on the surface of the undrawn inspection area, the undrawn inspection with the wrinkle is avoided so as to avoid the wrinkle. And an area skip means for skipping the area.

  According to these configurations, when there is a wrinkle in an undrawn inspection area that is a target for inspection drawing after the next time, an undrawn inspection area with a wrinkle is skipped. For example, if there is a flaw in the next inspection area, the next inspection area is skipped and the next inspection area is set as the next inspection area. For this reason, in the next and subsequent inspection drawing, the inspection drawing is not performed on the portion having the wrinkles. Therefore, also in this case, even if there is a wrinkle on the surface of the inspection work, the inspection drawing is not performed on the wrinkle, and the image recognition of the drawing result can be performed appropriately. Similarly, no extra processing time is required for image recognition of the inspection area.

  In the ejection inspection apparatus for the functional liquid droplet ejection head, it is preferable that the area skip means skips an undrawn inspection area based on the maximum size of the wrinkles acquired in advance.

  According to this configuration, it was possible to recognize the presence of wrinkles on the surface of the inspection area, but even if the whole wrinkle could not be recognized and the actual size of the wrinkles was not known, what number of inspections would be based on the maximum size of the wrinkles. It is possible to grasp whether or not to skip the area, and it is possible to surely skip the inspection area having a wrinkle.

  In these cases, the image recognition means includes an imaging camera that images the drawing result and an undrawn inspection area, and an imaging moving means that moves the imaging camera relative to the inspection work in the X-axis direction. It is preferable.

  According to this configuration, each inspection region can face the imaging camera by the imaging moving means. For this reason, it becomes possible to use a high-magnification (narrow viewing angle) imaging camera, and each inspection region can be imaged accurately.

  In this case, the imaging camera is composed of a drawing observation camera that images a drawing result and a region camera that images an undrawn inspection region, and the region camera has a wider viewing angle than the drawing observation camera. It is preferable.

According to this configuration, the inspection pattern can be appropriately captured by the drawing observation camera, and the entire eyelid can be reliably captured by the area camera having a wide viewing angle. For this reason, the actual size of the cocoon can be grasped and the cocoon can be surely avoided without excess or deficiency.
The area camera is preferably selected to have a viewing angle based on the maximum wrinkle size obtained in advance.

  In these cases, it is preferable that the inspection work is composed of an inspection paper including a base material layer and a receiving layer that is laminated on the surface of the base material layer and into which the functional droplets penetrate.

  According to this configuration, it is more economical than using an expensive glass substrate or the like. In this case, in the inspection paper manufacturing process, dust is likely to be generated, and the dust may scratch the receiving layer, so there is a high risk of flaws on the surface of the inspection paper. As described above, since it is possible to avoid performing inspection drawing on the ridge, image recognition of the drawing result can be performed appropriately.

  The droplet discharge device of the present invention is equipped with the above-described discharge inspection device for the functional droplet discharge head and the drawing work to be actually drawn, and the functional droplet discharge head is relatively positioned with respect to the drawing work. The drawing control means of the ejection inspection apparatus further controls the actual drawing moving means while moving the functional liquid droplet ejection head relative to the drawing work. The functional liquid discharge head discharges functional droplets to perform actual drawing processing.

  According to this configuration, even if there is a wrinkle on the surface of the work for inspection, it is possible to avoid performing inspection drawing on the surface of the wrinkle. Therefore, the discharge inspection apparatus that can appropriately perform image recognition of the drawing result is provided. As a result, the functional liquid droplet ejection head can be appropriately and efficiently inspected while the functional liquid droplet ejection head is mounted between the actual drawing processes.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film forming portion is formed of a functional liquid on a drawing work using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that a film forming portion made of a functional liquid is formed on a drawing work using the above-described droplet discharge device.

  According to these configurations, it is possible to efficiently produce a highly reliable work by manufacturing the droplet discharge apparatus that can appropriately and efficiently perform the discharge inspection of the functional droplet discharge head. As an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described method for manufacturing the electro-optical device or the above-described electro-optical device.

  In this case, examples of the electronic device include a mobile phone and a personal computer equipped with a so-called flat panel display, and various electric products.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, an embodiment of an ejection inspection apparatus for a functional liquid droplet ejection head and a liquid droplet ejection apparatus having the same according to the present invention will be described with reference to the accompanying drawings. The liquid droplet ejection apparatus according to the present embodiment is installed in a drawing system incorporated in an FPD production line such as a liquid crystal display device, and a functional liquid ejection head that uses special liquid such as special ink or light-emitting resin liquid. In this case, a film forming portion is formed by a functional liquid on a substrate such as a color filter.

  As shown in FIG. 1, the droplet discharge device 1 includes a drawing device 2 equipped with a plurality (four) of functional droplet discharge heads 17, a maintenance device 3 attached to the drawing device 2, and functional droplets. And a discharge inspection unit 4 for performing a discharge inspection of the discharge head 17. The maintenance device 3 performs maintenance processing (function maintenance / recovery) of the functional liquid droplet discharge head 17 and also the substrate W (actual drawing) by the drawing device 2. The actual drawing process for discharging and landing the functional liquid droplets on the work) is performed. In addition, the droplet discharge device 1 is provided with an operation panel 5 for inputting various data, a controller 6 (see FIG. 4) for overall control of each part, and the like. In the figure, for convenience, the functional liquid droplet ejection head 17 is shown as a single unit.

  The drawing apparatus 2 includes an X-axis table 12 and an XY moving mechanism 11 including a Y-axis table 13 orthogonal to the X-axis table 12, a carriage 14 movably attached to the Y-axis table 13, and a hanging structure on the carriage 14. A head unit 15 (see FIG. 2) equipped with four functional liquid droplet ejection heads 17 and an alignment device 16 that performs image recognition for alignment processing are provided.

  An area where the movement trajectory of the substrate W by the X-axis table 12 and the movement trajectory of the carriage 14 by the Y-axis table 13 becomes a drawing area for performing an actual drawing process. A region outside the X-axis table 12 on the movement locus and outside (right side in the drawing) is a maintenance area, and a part of the maintenance device 3 is installed in this maintenance area. On the other hand, the area on the front side of the X-axis table 12 is a substrate carry-in / out area where the substrate W is carried into / out of the droplet discharge device 1.

  The X-axis table 12 is directly placed on the floor, has a motor-driven drawing X-axis slider (not shown) constituting a drive system in the X-axis direction, and a suction table on which the substrate W is suction-set. A set table 21 including a substrate θ axis table (not shown) for finely adjusting the θ position of the substrate W (not shown) and the like is movably mounted.

  The X-axis table 12 has a motor-driven inspection X-axis slider that constitutes a drive system in the X-axis direction independently of the drawing X-axis slider. Is mounted freely. That is, the X-axis table 12 moves the substrate W mounted on the set table 21 in the X-axis direction with respect to the functional liquid droplet ejection head 17 and is mounted on the drawing unit 61 with respect to the functional liquid droplet ejection head 17. The inspection roll paper S is moved in the X-axis direction, and further, the inspection roll paper S is moved in the X-axis direction with respect to an inspection camera 66 described later.

  The Y-axis table 13 is supported by left and right columns (not shown) erected on the floor so as to straddle the X-axis table 12, and is a motor-driven Y-axis slider (which constitutes a drive system in the Y-axis direction). The head unit 15 is movably mounted on a Y-axis slider via a carriage 14.

  The carriage 14 has a head θ axis table 26 that holds the head unit 15 and θ corrects the head unit 15. In the present embodiment, a single carriage 14 (head unit 15) is provided, but the number thereof is arbitrary.

  As shown in FIG. 2, the head unit 15 includes four functional liquid droplet ejection heads 17, a head plate 31 that positions and mounts the functional liquid droplet ejection heads 17, and two reference pins 32 that protrude from the head plate 31. It is configured and mounted on the carriage 14 via the head plate 31. The two reference pins 32 are image-recognized by a head recognition camera 52 to be described later, whereby the head unit 15 is mounted on the carriage 14 in a positioned state. The reference numeral 33 in the figure is the center of rotation of the head unit 15 by the head θ-axis table 26.

  The four functional liquid droplet ejection heads 17 are mounted such that the row directions of nozzle rows 42 to be described later are parallel to each other. When mounted on the carriage 14, each nozzle row 42 is aligned with the Y-axis direction. It arrange | positions so that it may become parallel. Hereinafter, the nth functional liquid droplet ejection head 17 counted from the left side of the drawing is referred to as an “nth head”.

  The first head 17a and the second head 17b are disposed so as to be displaced in the X-axis direction so that the plurality of nozzles 43 are continuous in the Y-axis direction. The third head 17c and the fourth head 17d are functional liquids. In order to avoid physical interference between the droplet discharge heads 17, the first head 17a and the second head are rearranged in the Y-axis direction with respect to the first head 17a and the second head, and a gap (several heads) exists. It is arrange | positioned similarly to. That is, the first head 17a and the third head 17c are arranged in the Y-axis direction, and similarly, the second head 17b and the fourth head 17d are arranged in the Y-axis direction. However, the number and arrangement of the functional liquid droplet ejection heads 17 are not limited to this and are arbitrary.

  As shown in FIG. 3, each functional liquid droplet ejection head 17 is supplied with functional liquid from a functional liquid pack (not shown) and ejects functional liquid droplets by an ink jet method (for example, piezoelectric element driving). Two nozzle rows 42 (A row 42A and B row 42B) formed in parallel to the surface 41 are provided.

  Each nozzle row 42 is configured by arranging a plurality of (for example, 180) nozzles 43 at an equal pitch (for example, 141 m). The two nozzle rows 42 are shifted from each other by a half pitch (70 · m) in the row direction of the nozzle rows 42. That is, the nozzle pitch by the two nozzle rows 42 is 70 · m. The distance between the two nozzle rows 42 is, for example, 2.2 mm. Then, a functional droplet is ejected from each nozzle 43 by applying a driving waveform from a head driver 111 (see FIG. 4) described later.

  As shown in FIG. 1, the alignment device 16 is disposed so as to face both the front and rear sides of the substrate carry-in / out area, and two substrate recognition cameras for recognizing images of two substrate alignment marks (not shown) of the substrate W, respectively. 51 (see FIG. 4), and a head recognition camera 52 connected to the drawing X-axis slider of the X-axis table 12 and recognizing images of the two reference pins 32 of the head unit 15.

  The maintenance device 3 includes, in the maintenance area, a suction unit 56 that sucks the functional liquid from the nozzles 43 of the functional liquid droplet ejection head 17, a wiping unit (not shown) that wipes the nozzle surface 41 of the functional liquid droplet ejection head 17, and a functional liquid. A flight observation unit (not shown) for observing the flight state of the drops is provided.

  As will be described in detail later, the ejection inspection unit 4 has an inspection roll paper S (inspection paper) on which a predetermined inspection pattern P (see FIG. 7) is drawn by the functional liquid droplet ejection head 17 stretched in the Y-axis direction. A drawing unit 61 and an inspection imaging unit 62 that images the inspection pattern P are provided.

  Next, with reference to FIG. 4, the control system of the droplet ejection apparatus 1 as a whole will be described. The control system of the droplet discharge device 1 basically includes an input unit 101 having an operation panel 5 for inputting various data, an image recognition unit 102 having various cameras of the alignment device 16 and the discharge inspection unit 4, and a functional liquid. A drive unit 104 having various drivers for driving the droplet discharge head 17 and the XY moving mechanism 11 and the like, and a control unit 105 (controller 6) that comprehensively controls the droplet discharge apparatus 1 including these units are provided.

  The drive unit 104 includes a head driver 111 that controls the ejection of the functional liquid droplet ejection head 17 and a motor driver 112 that controls the respective motors of the XY moving mechanism 11. The head driver 111 generates and applies a predetermined drive waveform in accordance with an instruction from the control unit 105 to control the ejection of the functional liquid droplet ejection head 17. The motor driver 112 includes an X-axis motor driver 113, a Y-axis motor driver 114, a substrate θ-axis motor driver 115, and a head θ-axis motor driver 116, which are in accordance with instructions from the control unit 105, the X-axis table 12, The drive motors of the Y axis table 13, the substrate θ axis table, and the head θ axis table 26 are driven and controlled.

  The control unit 105 includes a CPU 121, a ROM 122, a RAM 123, and a P-CON 124, which are connected to each other via a bus 125. The ROM 122 has a control program area for storing a control program to be processed by the CPU 121, and a control data area for storing control data for performing an actual drawing process and image recognition.

  In addition to various register groups, the RAM 123 has a drawing data area for performing actual drawing processing, a discharge inspection data area for performing discharge inspection processing described later, an image data area for temporarily storing image data, and the like. Used as various work areas for control processing.

  The P-CON 124 is configured and incorporated with a logic circuit that complements the functions of the CPU 121 and handles interface signals with peripheral circuits. For this reason, the P-CON 124 fetches image data, various commands from the input unit 101 as they are or processes them into the bus 125, and interlocks with the CPU 121 to output data and control signals output from the CPU 121 and the like to the bus 125. Is output to the drive unit 104 as it is or after being processed.

  The CPU 121 inputs various detection signals, various commands, various data, etc. via the P-CON 124 according to the control program in the ROM 122, processes various data, etc. in the RAM 123, and then drives via the P-CON 124. The entire droplet discharge device 1 is controlled by outputting various control signals to the unit 104 and the like. For example, the CPU 121 controls the functional droplet discharge head 17, the X-axis table 12 and the Y-axis table 13 to perform drawing on the substrate W under predetermined droplet discharge conditions and predetermined movement conditions.

  Here, a series of actual drawing processes on the substrate W by the droplet discharge device 1 will be briefly described. First, the substrate W is set on the set table 21 moved to the substrate carry-in / out area, and in preparation for discharging the functional liquid droplets, based on the image recognition results of the substrate alignment marks by the two substrate recognition cameras 51. Then, the substrate alignment operation is performed.

  Subsequently, the functional liquid droplets are ejected while moving the functional liquid droplet ejection head 17 relative to the substrate W. In other words, main scanning for ejecting and landing functional droplets from the plurality of functional droplet ejection heads 17 on the substrate W while moving the substrate W in the X-axis direction by the X-axis table 12, and the Y-axis table 13. Sub-scanning for moving the head unit 15 in the Y-axis direction is repeated, and functional droplets are ejected (drawn) over the entire area of the substrate W.

  With reference to FIG. 1 and FIGS. 5 to 9, the discharge inspection process of the discharge inspection unit 4 and the functional liquid droplet discharge head 17 using the discharge inspection unit 4 will be described in detail. This discharge inspection process is performed before and after the actual drawing process described above, and inspects the discharge state of each nozzle 43 of the functional liquid droplet discharge head 17. If no abnormality is confirmed in each of the nozzles 43 by this discharge inspection process, the next actual drawing process is continuously performed. If the abnormality is confirmed, the function is performed before performing the next actual drawing process. Maintenance processing of the droplet discharge head 17 is performed.

  As described above, the ejection inspection unit 4 images the inspection pattern P and the drawing unit 61 in which the inspection roll paper S on which the inspection pattern P is drawn by the functional liquid droplet ejection head 17 is stretched in the Y-axis direction. Whether or not the functional liquid droplets are normally ejected from each nozzle 43 by ejecting the inspection pattern P from each functional liquid droplet ejection head 17 and recognizing the drawing result. It is to inspect.

  For example, the test pattern P is obtained by ejecting and landing one shot of functional liquid droplets from all the nozzles 43 of each nozzle array 42 of the functional liquid droplet ejection head 17 at the same timing. A plurality of functional liquid droplets (dots) from the nozzle 43 constitute one inspection line L (see FIG. 7).

  In addition, while the drawing unit 61 is moved in the X-axis direction by the X-axis table, the ejection timing is shifted between the two nozzle rows 42 and the inspection lines L are drawn respectively. Of course, the inspection line L (inspection pattern P) may be drawn while the drawing target unit 61 is stationary, but by doing so, the distance between the inspection lines L is set to the actual distance between the nozzle rows 42. Shorter (for example, 0.15 mm). For this reason, a plurality of inspection lines L can be collectively captured within the field of view of the inspection camera 66 described later, and the imaging time can be shortened.

  Further, among the four functional liquid droplet ejection heads, the first head 17a and the second head 17b (the same applies to the third head 17c and the fourth head 17d) are arranged spaced apart in the X-axis direction. , Each inspection line L is discharged at the timing of drawing at the same position in the X-axis direction. Thereby, the inspection pattern P can be drawn without waste in the width direction of the inspection roll paper S, and the inspection roll paper S can be saved.

  Although not shown, the inspection roll paper S is a roll of inspection paper comprising a base material layer and a receiving layer that is laminated (coated) on the surface of the base material layer and into which functional droplets penetrate. Thus, the inspection pattern P is drawn on a portion fed out by a winding mechanism (described later) of the drawing unit 61.

  The width of the inspection roll paper S corresponds to a plurality of inspection drawings (for example, 100 mm). That is, on the inspection roll paper S, a plurality of inspection patterns P obtained by a plurality of inspection drawing operations are drawn while being shifted in order in the width direction (X-axis direction) (details will be described later). Then, when the inspection pattern P for a plurality of times is drawn to the full width of the inspection roll paper S, the drawn portion is sent in the Y-axis direction, and a plurality of inspection drawings are similarly performed on the new undrawn portion. Is to be done. The length of the inspection roll paper S is preferably longer to some extent (for example, 50 m) in order to reduce the replacement frequency.

  The inspection roll paper S is produced as follows. First, a wide inspection paper is wound into a roll. Subsequently, this is sliced into a predetermined width (for example, 100 mm). Next, a predetermined length (for example, 50 m) is wound around the core so as to have a size that can be loaded into a winding mechanism, which will be described later, and the trailing end is cut to form one roll of inspection roll paper S.

  Thus, since the manufacturing process of the inspection roll paper S includes a step of cutting the inspection paper, the inspection paper chips and the like may be generated as dust, and the dust may be mixed into the inspection roll paper S. Therefore, a device that sucks and removes dust during the manufacturing process is provided. However, even in such a case, relatively large dust can be removed, but minute dust is mixed. Therefore, the surface of the inspection roll paper S has minute dust and scratches formed by the mixed dust.

  The size of the scratch present on the surface of the inspection roll paper S is calculated by calculating the size of a plurality of wrinkles (samples) in advance and statistically processing it, for example, m ± 3σ (m: average value) , Σ: standard deviation) is 0.2 mm to 1.0 mm. In addition, since the scratches are formed when the dust moves (rubs) on the receiving layer, the size of the dust becomes smaller than this. Therefore, the maximum size of dust and scratches existing on the surface of the inspection roll paper S can be said to be 1.0 mm.

  In addition, what receives the discharge | emission of the test | inspection pattern P is not restricted to the test | inspection roll paper S, For example, a strip-shaped test paper may be sufficient. However, the replacement frequency can be reduced by using roll-shaped inspection paper. Further, although a cleaning process is required, a glass substrate can be used.

  The drawing unit 61 stretches the inspection roll paper S in the Y-axis direction, and draws a plurality of inspection patterns P on the inspection roll paper S to the full width by the inspection drawing a plurality of times. After that, the drawn portion is sent (rolled up) in the Y-axis direction.

  Although the drawing unit 61 is mounted on the inspection X-axis slider and is not shown in the drawing, the drawing unit 61 is wound on the inspection X-axis slider and a winding mechanism for winding the loaded inspection roll paper S while feeding it. And an inspection stand that supports the winding mechanism.

  The drawing unit 61 is movable in the X-axis direction between the drawing area and an inspection camera 66 (to be described later) by moving the X-axis slider for inspection in the X-axis direction. For this reason, the functional liquid droplet ejection head 17 can face each inspection region R (described later) set on the inspection roll paper S, and the drawing unit 61 is moved in the X-axis direction as described above. The inspection pattern P can be drawn from each functional liquid droplet ejection head 17 while being moved.

  In the present embodiment, the drawing unit 61 and the set table 21 are individually placed on the inspection X-axis slider and the drawing X-axis slider, but both are placed on a common X-axis slider. Also good. Moreover, you may make it provide a movement table separately.

  The winding mechanism is not shown, but the inspection roll paper S is loaded, the supply reel that feeds out the inspection roll paper S, and the inspection roll paper that is fed in the Y-axis direction with respect to the supply reel. A take-up reel for winding S and a take-up motor for rotating the take-up reel are provided.

  The inspection roll paper S fed out from the feeding reel travels horizontally in the Y-axis direction and is taken up by the take-up reel, and receives the inspection pattern P in this horizontal traveling path. ing. The length of the horizontal traveling path in the Y-axis direction (separation distance between the supply reel and the take-up reel) is set so that inspection drawing from all the functional liquid droplet ejection heads 17 of the head unit 15 can be received collectively. Has been.

  The inspection imaging unit 62 is arranged in parallel with the inspection camera 66 (imaging camera) for imaging the inspection pattern P (drawing result) drawn on the inspection roll paper S and the Y-axis table 13, and is driven by a motor. And a camera moving mechanism 67 that moves the inspection camera 66 in the Y-axis direction. Then, the drawing unit 61 (inspection roll paper S) is caused to face the inspection camera 66 by the X-axis table 12, and a plurality of functional liquid droplets (dots) are moved while moving the inspection camera 66 in the Y-axis direction. The inspection pattern P is imaged in units. Although details will be described later, the inspection camera 66 captures the inspection region R that is the next inspection drawing target in synchronization with the imaging of the inspection pattern P drawn in the inspection region.

  Here, a series of operations of the ejection inspection process will be described. First, the control unit 105 sets a plurality of inspection regions R on the inspection roll paper S so as to be aligned in the X-axis direction (see S11 in FIG. 5 and FIG. 6).

  That is, as described above, for each inspection drawing, by shifting the drawing unit 61 (inspection roll paper S) in the X-axis direction, the inspection roll paper S is subjected to a plurality of inspections by a plurality of inspection drawings. A plurality of inspection regions R are set so as to be aligned in the X-axis direction in the inspection drawing order and adjacent to each other so that the pattern P is drawn while being sequentially shifted in the width direction (X-axis direction). As shown in FIG. 6, here, there is no dust or scratches on the surface of the inspection area Ra to be subjected to the first inspection drawing, but the inspection areas (Rb, Rc, Rd,.・ ・), There are minute dust and scratches (dust scratch D).

  Subsequently, while moving the drawing unit 61 by the X-axis table 12, the test pattern P is ejected from the nozzles 43 of the respective functional liquid droplet ejection heads 17 to the first test area Ra to perform test drawing. Perform (S12).

  Next, the inspection imaging unit 62 recognizes an image of the inspection pattern P drawn in the first inspection region Ra, and is adjacent to the inspection region R in synchronization with the image recognition of the inspection pattern P. An image of the undrawn inspection area Rb to be subjected to the second inspection drawing is recognized (S13). That is, the X-axis table 12 causes the first inspection area Ra and the second inspection area Rb to face the inspection camera 66, and the inspection camera 66 is moved in the Y-axis direction while the drawing result and the second The image of the second inspection region R is recognized. As described above, since each inspection region R can face the inspection camera 66 by the X-axis table 12, it becomes possible to use the inspection camera 66 having a high magnification (narrow viewing angle). Can be accurately captured.

  As shown in FIG. 7, the inspection camera 66 captures the inspection pattern P drawn in the first inspection region Ra and the second inspection region Rb in the field of view F, and there Part of garbage scratch D is reflected. Of course, the undrawn inspection areas (Rc, Rd,...) After the third time may also be captured in the field of view F.

  Then, the control unit 105 determines whether or not the landing position deviation (flight bend) or non-ejection (clogging) of the functional liquid droplets is based on the image recognition result of the inspection pattern P, and an abnormality is recognized. Performs a maintenance process before the next actual drawing process.

  Further, the controller 105 causes the image recognition failure of the drawing result by the second inspection drawing on the surface of the second inspection region Rb based on the image recognition result of the second inspection region Rb. It is determined whether or not there is any possible garbage or scratches (S14). For example, it is assumed that dust or scratches having a predetermined size or larger can be an obstacle to image recognition of the inspection pattern P.

  If it is determined that there is dust or a scratch (S14; Yes), the control unit 105 causes the second inspection region Rb with dust scratch D to avoid the dust or scratch (dust scratch D). The position setting in the X-axis direction is changed, and accordingly, the position setting in the X-axis direction of the third and subsequent inspection areas (Rc, Rd, Re,...) Is changed (S15, see FIG. 8). ). At this time, the position setting of the inspection region R is changed based on the maximum size (1.0 mm) of dust and scratches described above. That is, even if the dust scratch D partially confirmed in the second inspection region Rb is the maximum size dust or scratch, the second inspection region Rb completely avoids this, so that the X axis The position of the inspection region Rb in the direction is shifted by, for example, 1.5 mm. Accordingly, even when the entire dust scratch D is not captured in the field of view F and the actual size of the dust scratch D is not known, the dust scratch D can be reliably avoided.

  Further, instead of changing the position setting in the X-axis direction, the inspection region Rb having the dust scratch D may be skipped. For example, when it is recognized that the dust scratch D partially confirmed in the second inspection area R exists from the second inspection area Rb to the fifth inspection area Re from the maximum size. The fifth inspection area Re is skipped from the second inspection area Rb, and the sixth inspection area Rf is set as the object of the second inspection drawing.

  After changing the position setting of the inspection region R or skipping the region, the second inspection drawing is performed after completion of the next actual drawing process. According to this, in the second inspection drawing, the inspection drawing is not performed at the place where the dust scratch D is present. For this reason, even if there are dust scratches D on the surface of the inspection roll paper S, the inspection pattern P is not drawn over the dust scratches D, and the image recognition of the drawing result can be performed appropriately. In addition, since the imaging of the inspection region R is performed in synchronization with the imaging of the inspection pattern P, no extra processing time is required for the imaging of the inspection region R. Note that it is preferable that the first inspection area Ra is image-recognized prior to the first inspection drawing to check for dust and scratches.

  On the other hand, if there is no dust or a flaw in the second inspection area R, it is determined that there is no dust or a flaw based on the image recognition result of the inspection area R (S14; No), and the position of the inspection area R The second inspection drawing (S12) is performed after the next actual drawing process or the like without changing the setting or skipping the area.

  The above inspection drawing and image recognition are repeated a plurality of times. Then, a plurality of inspection patterns P are drawn over the entire width of the inspection roll paper S (excluding a portion where dust scratches D are avoided), and when drawing of all inspection regions R is completed (S16; Yes), a series of ejections is performed. The inspection process is terminated. Thereafter, when the ejection inspection process is further performed, the drawn part of the inspection roll paper S is sent in the Y-axis direction, and the same process as described above is performed on the new undrawn part.

  In the above-described embodiment, the inspection pattern P and the next inspection region R are imaged by the common inspection camera 66. However, the inspection imaging unit 62 has a high magnification and narrow viewing angle drawing observation. A camera and a low magnification / wide viewing angle region camera may be provided, and the inspection pattern P may be captured by the drawing observation camera, and the undrawn inspection region R may be captured by the region camera.

  As shown in FIG. 9, the drawing observation camera captures the inspection pattern P drawn in the first inspection region Ra in the field of view Fp, while the region camera captures in the field of view Fr. A plurality of undrawn inspection areas R (Rb, Rc, Rd,...) Including the inspection area Rb to be subjected to the second inspection drawing are captured, and the entire dust scratch D is reflected. According to this, the inspection pattern P can be picked up with high precision by the high magnification drawing observation camera, and the entire dust scratch D can be reliably captured by the area camera having a wide viewing angle, and the actual dust scratch D can be actually detected. The size can be grasped.

  In this case, when changing the position setting of the inspection region R in the X-axis direction or performing region skipping, the actual size of the dust scratch D captured by the region camera is used instead of the maximum size of dust and scratches obtained in advance as described above. Do it based on size. Thereby, it is possible to reliably avoid the dust scratch D without excess or deficiency.

  As described above, according to the ejection inspection process of the present embodiment, even if there is dust or scratches on the surface of the inspection roll paper S, the inspection pattern P is drawn over the dust or scratches (dust scratch D). Therefore, the image recognition of the inspection pattern P can be performed appropriately. In addition, according to the droplet discharge device 1 of the present embodiment, the functional droplet discharge head 17 is mounted between the actual drawing processes by including the discharge inspection unit 4 for performing such a discharge inspection process. This can be properly and efficiently inspected.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 10 is a flowchart showing the manufacturing process of the color filter, and FIG. 11 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 11B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 11C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 11 (d), functional droplets are ejected by the functional droplet ejection head 17, and each pixel region 507a surrounded by the partition wall portion 507b is placed. Let it land. In this case, the functional liquid droplet ejection head 17 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. 11E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 12 is a cross-sectional view of a main part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 11, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 12 are formed at a predetermined interval. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 17. Further, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 17.

FIG. 13 is a cross-sectional view of an essential part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 14 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 15 is a cross-sectional view of a main part of a display region of the organic EL device (hereinafter simply referred to as a display device 600).

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 16, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 17, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by, for example, plasma treatment using oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane as a processing gas. )
By performing this surface treatment process, when forming the functional layer 617 using the functional liquid droplet ejection head 17, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 21 of the droplet discharge device 1 shown in FIG. 2, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 19, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 17 to each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 20, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 21, the second composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 21) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 22, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 17, as shown in FIG. 23, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 24, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 25 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are disposed at the bottom of the blue discharge chamber 705B and the bottom, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following process is performed with the first substrate 701 placed on the set table 21 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 17. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode forming regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 17, and it corresponds. Land in the color discharge chamber 705.

Next, FIG. 26 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 27A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the above-described droplet discharge device 1 for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

1 is a schematic plan view of a droplet discharge device according to an embodiment of the present invention. 2 is a schematic plan view of a head unit mounted on a droplet discharge device. FIG. It is the schematic diagram which looked at the functional droplet discharge head from the nozzle surface side. It is the block diagram explaining the control system of the droplet discharge apparatus. It is a flowchart which shows the discharge inspection process of a droplet discharge apparatus. It is a figure which shows the state which set the some test | inspection area | region on the roll paper for a test | inspection. It is a figure which shows the state which imaged the test | inspection pattern and the test | inspection area | region with the camera for a test | inspection. It is a figure which shows the state which changed the position setting of the some test | inspection area | region on the roll paper for a test | inspection. It is a figure which shows the state which imaged the test | inspection pattern with the drawing observation camera, and imaged the test | inspection area | region with the area camera. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 4 ... Discharge test | inspection unit 6 ... Controller 12 ... X-axis table 17 ... Functional droplet discharge head 62 ... Imaging unit for inspection 66 ... Camera for inspection 67 ... Camera moving mechanism R ... Inspection area 105 ... Control part R: Inspection area S: Roll paper for inspection W: Substrate

Claims (13)

A functional liquid droplet ejection head that alternately performs inspection drawing by the functional liquid droplet ejection head and image recognition of the drawing result in order for a plurality of inspection areas set to be arranged in the X-axis direction on the inspection work. A discharge inspection method,
An image recognition step of performing image recognition of the undrawn inspection area including the inspection area to be subjected to the next inspection drawing among the plurality of inspection areas in synchronization with the image recognition of the drawing result;
Based on the image recognition result of the undrawn inspection area in the image recognition step, a wrinkle that can be an obstacle to image recognition of the drawing result by the next inspection drawing is recognized on the surface of the undrawn inspection area. A setting change step for changing the position setting in the X-axis direction of the undrawn inspection region with the wrinkles, so as to avoid the wrinkles,
An ejection inspection method for a functional liquid droplet ejection head, comprising: A functional liquid droplet ejection head that alternately performs inspection drawing by the functional liquid droplet ejection head and image recognition of the drawing result in order for a plurality of inspection areas set to be arranged in the X-axis direction on the inspection work. A discharge inspection method,
An image recognition step of performing image recognition of the undrawn inspection area including the inspection area to be subjected to the next inspection drawing among the plurality of inspection areas in synchronization with the image recognition of the drawing result;
Based on the image recognition result of the undrawn inspection area in the image recognition step, a wrinkle that can be an obstacle to image recognition of the drawing result by the next inspection drawing is recognized on the surface of the undrawn inspection area. In order to avoid the wrinkle, an area skip step for skipping the undrawn inspection area with the wrinkle,
An ejection inspection method for a functional liquid droplet ejection head, comprising: A functional liquid droplet ejection head that alternately performs inspection drawing by the functional liquid droplet ejection head and image recognition of the drawing result in order for a plurality of inspection areas set to be arranged in the X-axis direction on the inspection work. A discharge inspection device,
Area setting means for setting the plurality of inspection areas;
Inspection drawing moving means for moving the functional liquid droplet ejection head relative to the inspection work in the X-axis direction;
Drawing control means for controlling the functional liquid droplet ejection head and the inspection drawing moving means to perform the inspection drawing on each of the inspection areas;
Image recognition means for performing image recognition of the undrawn inspection area including the inspection area to be subjected to the next inspection drawing among the plurality of inspection areas in synchronization with the image recognition of the drawing result;
Based on the image recognition result of the undrawn inspection area by the image recognition means, a wrinkle that can be an obstacle to image recognition of the drawing result by the next and subsequent inspection drawing is recognized on the surface of the undrawn inspection area. The setting change means for changing the position setting in the X-axis direction of the undrawn inspection area with the wrinkles so as to avoid the wrinkles,
A functional liquid droplet ejection head ejection inspection apparatus comprising:   4. The ejection inspection apparatus for a functional liquid droplet ejection head according to claim 3, wherein the setting change unit changes the position setting of the undrawn inspection area based on the maximum size of the wrinkles acquired in advance. . A functional liquid droplet ejection head that alternately performs inspection drawing by the functional liquid droplet ejection head and image recognition of the drawing result in order for a plurality of inspection areas set to be arranged in the X-axis direction on the inspection work. A discharge inspection device,
Area setting means for setting the plurality of inspection areas;
Inspection drawing moving means for moving the functional liquid droplet ejection head relative to the inspection work in the X-axis direction;
Drawing control means for controlling the functional liquid droplet ejection head and the inspection drawing moving means to perform the inspection drawing on each of the inspection areas;
Image recognition means for performing image recognition of the undrawn inspection area including the inspection area to be subjected to the next inspection drawing among the plurality of inspection areas in synchronization with the image recognition of the drawing result;
Based on the image recognition result of the undrawn inspection area by the image recognition means, a wrinkle that can be an obstacle to image recognition of the drawing result by the next and subsequent inspection drawing is recognized on the surface of the undrawn inspection area. If so, area skip means for skipping the undrawn inspection area with the wrinkles, so as to avoid the wrinkles,
A discharge inspection apparatus for a functional droplet discharge head, comprising:   6. The ejection inspection apparatus for a functional liquid droplet ejection head according to claim 5, wherein the area skip means skips the undrawn inspection area based on the maximum size of the wrinkles acquired in advance. The image recognition means includes
An imaging camera for imaging the drawing result and the undrawn inspection area;
An imaging moving means for relatively moving the imaging camera in the X-axis direction with respect to the inspection work;
The ejection inspection apparatus for a functional liquid droplet ejection head according to claim 3, comprising: The imaging camera is composed of a drawing observation camera that images the drawing result and an area camera that images the undrawn inspection area,
8. The functional droplet ejection head ejection inspection apparatus according to claim 7, wherein the area camera has a wider viewing angle than the drawing observation camera.   9. The inspection work is constituted by an inspection paper comprising a base material layer and a receiving layer laminated on the surface of the base material layer and into which functional droplets permeate. A discharge inspection apparatus for a functional droplet discharge head according to any one of the above. A discharge inspection apparatus for a functional liquid droplet discharge head according to any one of claims 3 to 9,
The actual drawing target is mounted, and the actual drawing moving means for moving the functional liquid droplet ejection head relative to the drawing work is provided,
The drawing control means of the discharge inspection apparatus further controls the actual drawing moving means to function by the functional liquid discharge head while moving the functional liquid droplet discharge head relative to the drawing work. A droplet discharge apparatus characterized by discharging a droplet to perform an actual drawing process.   11. A method for manufacturing an electro-optical device, wherein the droplet discharge device according to claim 10 is used to form a film-forming portion with a functional liquid on the drawing work.   An electro-optical device using the droplet discharge device according to claim 10, wherein a film-forming portion made of a functional liquid is formed on the drawing work.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 11 or the electro-optical device according to claim 12 mounted thereon.

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