JP2008188807A - Flushing unit, liquid droplet delivering apparatus, method for manufacturing electrooptic apparatus, electrooptic apparatus, and electronic instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flushing unit capable of easily storing a functional liquid delivered from a functional liquid droplet delivering head in a lower part and preventing it from flowing outward, a liquid droplet delivering apparatus, a method for manufacturing an electrooptic apparatus, the electrooptic apparatus and an electronic instrument. <P>SOLUTION: This unit is provided with a pan-shaped unit main body 81 for receiving throw away delivering from an inkjet type functional liquid droplet delivering head 13, and an absorbing material 82 laid down on the unit main body 81 and receiving a functional liquid throw away-delivered. The absorbing material 82 has an upper absorbing material 91 for trapping the throw away-delivered functional liquid, and a lower absorbing material 92 laid down on the bottom face of the unit main body 81, coming into contact with the undersurface of the upper absorbing material 91 and absorbing and storing the functional liquid of the upper absorbing material 91. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a flushing unit, a droplet discharge device, a method for manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus that receive and discharge a functional liquid from an inkjet functional droplet discharge head.

2. Description of the Related Art Conventionally, a droplet discharge device that forms a color filter of a liquid crystal display device, a light emitting element that becomes each pixel of an organic EL device, or the like by drawing processing using an inkjet functional droplet discharge head has been considered. This droplet discharge device is known to include a flushing unit that receives the discharge of the functional liquid from the functional droplet discharge head. The flushing unit has a flushing box that receives the functional liquid ejected from the functional liquid droplet ejection head, and an absorbing material that absorbs the functional liquid is laid on the bottom of the flushing unit. Then, the functional liquid droplet ejection head is allowed to face the flushing box and the functional liquid is discharged and the functional liquid ejection state of the functional liquid droplet ejection head is stabilized. In addition, the flushing box is provided with a warpage prevention mechanism for preventing the warping and bending of the absorbent material, and by preventing the warpage of the absorbent material, the absorbent material absorbs the functional liquid and becomes swollen. The absorbing material is prevented from contacting the nozzle surface of the functional liquid droplet ejection head. (For example, refer to Patent Document 1.)
JP 2006-76066 A

  By the way, the conventional absorbent material is a hard absorbent material having a relatively low porosity in consideration of swelling when the functional liquid is impregnated and rebounding of the functional liquid, and is in a state of floating from the bottom of the flushing box Is laid in. For this reason, there is a problem that it is difficult for the functional liquid to drop from the absorbent material to the bottom surface, and even if the functional liquid is sucked, air is preferentially sucked and the functional liquid is not sucked. Further, there is a problem that the functional liquid accumulated in the absorbent material does not drop on the bottom surface of the flushing box but accumulates so as to rise on the edge of the bread, and the accumulated functional liquid overflows from the edge of the bread.

  The present invention relates to a flushing unit, a droplet discharge device, a method for manufacturing an electro-optical device, and an electro-optical device that can easily store functional liquid discharged from a functional droplet discharge head in the lower part and prevent outflow to the outside. And an electronic device.

  The flushing unit of the present invention comprises a pan-like unit main body that receives discarded discharge from the inkjet functional droplet discharge head, and an absorbent material that is laid on the unit main body and receives the discarded discharged functional liquid. The absorbent material is an upper absorbent material that traps the discharged and discharged functional liquid, and a lower absorbent material that is laid on the bottom surface of the unit body and contacts the lower surface of the upper absorbent material to absorb and store the functional liquid of the upper absorbent material. It is characterized by having.

  According to this configuration, by trapping the functional liquid ejected from the functional liquid droplet ejection head with the upper absorbent material, it is possible to prevent the ejected functional liquid from rebounding, and the functional liquid is placed outside the unit body and the unit. It is possible to prevent scattering. Further, since the functional liquid gradually permeates into the upper absorbent material, the upper absorbent material can be moisturized. Furthermore, since the functional liquid trapped by the upper absorbent material is absorbed and stored by the lower absorbent material, the functional liquid does not easily accumulate in the upper absorbent material, and swelling of the upper absorbent material by the functional liquid can be suppressed. As a result, it is possible to prevent the functional liquid from being accumulated in the upper absorbent material and overflowing from the edge of the unit.

  In this case, it is preferable to further include a suction port that opens to the bottom surface of the unit main body and continues to the vacuum suction means.

  According to this configuration, the functional liquid accumulated in the unit main body can be discharged to the outside of the unit main body by vacuum suction of the functional liquid from the suction port formed in the bottom of the unit main body. Thereby, it can prevent that a functional liquid overflows from a unit main body.

  In these cases, the lower absorbent material preferably has a higher porosity than the upper absorbent material.

  According to this configuration, since the porosity of the lower absorbent material is higher than the porosity of the upper absorbent material, the functional liquid discharged to the upper absorbent material is sucked so as to be absorbed by the lower absorbent material. Thereby, swelling of the upper absorbent material can be suppressed. Further, by increasing the porosity of the lower absorbent material, the retention of the functional liquid is reduced, and the functional liquid can be stored at the bottom of the lower absorbent material.

  In these cases, it is preferable that the lower absorbent material is formed thicker than the upper absorbent material.

  According to this configuration, by increasing the storage capacity of the functional liquid in the lower absorbent material, the functional liquid can be completely stored in the lower absorbent material even when the amount of the functional liquid discharged is large, and the upper absorption Functional liquid does not stay on the material. Thereby, swelling of the upper absorbent material can be suppressed and the functional liquid can be prevented from overflowing.

  A droplet discharge device according to the present invention includes a functional droplet discharge head and a functional droplet while moving the function droplet discharge head relative to the flushing unit according to any one of claims 1 to 4 and a workpiece. And a drawing means for drawing by discharging.

  According to this configuration, since the functional liquid discharged from the functional liquid droplet discharge head is easily stored in the lower portion of the head cap and the flushing unit that can prevent the liquid from flowing out is mounted, the functional liquid droplet discharge head In addition to stabilizing the functional liquid ejection state, the work and the liquid droplet ejection apparatus can be prevented from being contaminated by the ejected functional liquid, and a liquid droplet ejection apparatus that performs an accurate drawing process on the work can be realized. .

  In this case, the flushing unit includes at least a regular flushing unit that receives discarded discharge during drawing pause, a pre-drawing flushing unit that receives discarded discharge immediately before the drawing operation, and a side flushing unit that receives discarded discharge when measuring the weight of functional droplets. It is preferable that it is mounted as one unit.

  According to this configuration, by mounting the flushing unit of the present invention as the regular flushing unit, it is possible to prevent nozzle clogging of the functional liquid droplet ejection head and thickening of the functional liquid during drawing suspension. Moreover, by installing it as a pre-drawing flushing unit, the meniscus at each discharge nozzle of the functional liquid droplet discharge head immediately before drawing can be maintained well (function maintenance), and accurate drawing processing can be performed on the workpiece. it can. Further, by mounting as a flushing unit, it is possible to maintain the function of the functional liquid droplet ejection head other than the functional liquid droplet ejection head that is a measurement target in weight measurement.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film forming portion is formed by a functional liquid on a workpiece using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used, and a film-forming portion made of a functional liquid is formed on a workpiece.

  According to these configurations, by using the droplet discharge device, it is possible to prevent the discharged functional liquid from flowing out to the outside when the functional droplet discharge head is flushed. In addition to the drawing process, the work interruption and member corrosion caused by the discharged functional liquid are eliminated, and the productivity of the workpiece can be improved. As an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described method for manufacturing the electro-optical device or the above-described electro-optical device.

  In this case, examples of the electronic device include a mobile phone and a personal computer equipped with a so-called flat panel display, and various electric products.

  Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. The liquid droplet ejection apparatus according to the present embodiment is incorporated in a flat panel display production line, and uses, for example, a functional liquid droplet ejection head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced, and a liquid crystal A color filter of a display device, a light emitting element to be each pixel of an organic EL device, or the like is formed.

  As shown in FIGS. 1 and 2, the droplet discharge device 1 is disposed on an X-axis support base 2 supported by a stone surface plate, and extends in the X-axis direction, which is the main scanning direction, An X-axis table 11 that moves W in the X-axis direction (main scanning direction), and a pair (two) of Y-axis support bases that span the X-axis table 11 via a plurality of support columns 4 3, and a Y-axis table 12 extending in the Y-axis direction, which is the sub-scanning direction, and ten carriage units 20 on which a plurality of functional liquid droplet ejection heads 13 (see FIG. 3) are mounted. Ten carriage units 20 are suspended from the Y-axis table 12.

  The droplet discharge device 1 includes a maintenance device 5 including a suction unit 14, a wiping unit 15, a discharge performance inspection unit 16, a flushing unit 17, and a weight measurement unit 18, and these units are used as the functional droplet discharge head 13. Thus, the function of the functional liquid droplet ejection head 13 is maintained and recovered. Of the units constituting the maintenance device 5, the discharge performance inspection unit 16, the flushing unit 17, and the weight measurement unit 18 are mounted on the X-axis table 11, and the suction unit 14 and the wiping unit 15 are included in the X-axis table 11. The carriage unit 20 is disposed on the gantry 6 at a position where the carriage unit 20 can be moved by the Y-axis table 12.

  Hereinafter, components of the droplet discharge device 1 will be described. As shown in FIG. 1 or FIG. 2, the X-axis table 11 includes a set table 21 for setting a work W, an X-axis slider 22 for slidably supporting the set table 21 in the X-axis direction, and the above discharge performance inspection. A maintenance slider 23 that slidably supports the unit 16 and the flushing unit 17 (periodic flushing unit 101 described later) in the X-axis direction, and extends in the X-axis direction. And a pair of left and right X-axis linear motors (not shown) that move the discharge performance inspection unit 16 and the flushing unit 17 in the X-axis direction via the maintenance slider 23, and an X-axis linear motor. A pair (two) of guiding the movement of the X-axis slider 22 and the maintenance slider 23 A shaft common support base 24, and a.

  The set table 21 includes a suction table 31 for sucking and setting the work W, and a θ table 32 for supporting the suction table 31 and correcting the position of the work W set on the suction table 31 in the θ-axis direction. Yes. In addition, a pair of pre-drawing flushing boxes 106 of a pre-drawing flushing unit 105 described later are attached to a pair of sides parallel to the Y-axis direction of the set table 21.

  1 is the alignment position of the workpiece W, and when the unprocessed workpiece W is introduced into the suction table 31 (feeding), the processed workpiece W is collected ( At the time of material removal), the suction table 31 is moved to this position. Then, the work W is carried in and out (replaced) with respect to the suction table 31 by a robot arm (not shown). Further, based on the imaging result of the work alignment camera 33 for recognizing the position of the work W, data correction in the X-axis direction and the Y-axis direction is performed, and θ correction of the work W by the θ table 32 is performed. Although not shown in the drawing, the droplet discharge device 1 is accommodated in a constant temperature chamber, and the robot arm performs the material supply / removal of the workpiece W from the outside of the constant temperature chamber.

  The Y-axis table 12 includes 10 bridge plates 36 each fixing 10 carriage units 20 constituting the head unit 35, and 10 sets of Y-axis sliders (10 sets of Y-axis sliders) that support the 10 bridge plates 36 in both ends. A pair of Y-axis linear motors (not shown) installed on the pair of Y-axis support bases 3 and moving the bridge plate 36 in the Y-axis direction via 10 sets of Y-axis sliders; It has.

  When the pair of Y-axis linear motors are driven (synchronously), each Y-axis slider translates in the Y-axis direction simultaneously with the pair of Y-axis support bases 3 as a guide. As a result, the bridge plate 36 moves in the Y-axis direction, and the carriage unit 20 moves in the Y-axis direction (sub scanning). In this case, by controlling the driving of the Y-axis linear motor, the carriage unit 20 can be moved independently and individually, or the ten carriage units 20 can be moved together. is there. Further, the Y-axis table 12 has a function of moving the carriage unit 20 in the Y-axis direction as sub-scanning and a function of moving the carriage unit 20 in the Y-axis direction so that the maintenance unit 5 can be faced. Yes.

  Each carriage unit 20 includes twelve functional liquid droplet ejection heads 13 and a carriage plate 37 that supports the twelve functional liquid droplet ejection heads 13 in two groups.

  As shown in FIG. 3, the functional liquid droplet ejection head 13 has a so-called double structure, a functional liquid introduction part 41 having two connection needles 42, and a dual head substrate that is continuous with the functional liquid introduction part 41. 43, and a head main body 44 which is connected to the lower side of the functional liquid introducing portion 41 and has an in-head flow path filled with the functional liquid therein. The connection needle 42 is connected to a functional liquid tank (not shown) and supplies the functional liquid to the functional liquid introduction unit 41. The head body 44 includes a cavity 45 (piezoelectric element) and a nozzle plate 46 having a nozzle surface 47 with a large number of ejection nozzles 48 opened. When the functional liquid droplet ejection head 13 is driven to eject, a functional liquid droplet is ejected from the ejection nozzle 48 by the pump action of the cavity 45 (a voltage is applied to the piezoelectric element).

  Note that a large number of discharge nozzles 48 formed on the nozzle surface 47 are arranged at an equal pitch to form two divided nozzle rows 48 a each including 180 discharge nozzles 48. The two divided nozzle rows 48a are displaced from each other by a half pitch. That is, high-resolution drawing can be performed on the functional liquid droplet ejection head 13 by the two divided nozzle rows 48a.

  As shown in FIG. 4, each carriage unit 20 is mounted with a plurality (12 pieces) of functional liquid droplet ejection heads 13 via a carriage plate 37. The twelve functional liquid droplet ejection heads 13 are divided into two groups in the Y-axis direction, and six heads are arranged in the X-axis direction to form a head group 49. A drawing line continuous in the Y-axis direction is formed by all-function liquid droplet ejection heads 13 (12 × 10) mounted on a plurality of carriages. The length of the drawing line corresponds to the width of the maximum size workpiece W that can be mounted on the set table 21. In the figure, an R, G, B single color device is assumed. However, in an apparatus capable of drawing R, G, B three colors, two functional liquid droplet ejection heads 13 each in two R A color head, a G color head, and a B color head are used. In drawing, the former does not require sub-scanning, whereas the latter performs sub-scanning.

  The carriage unit 20 supports the carriage plate 37 on the Y-axis table 12 (each bridge plate 36) via the θ rotation mechanism 51 that supports the carriage plate 37 so as to be capable of θ correction (θ rotation). A suspension member 52 (see FIG. 2 for both). Although not shown, the suspension member 52 incorporates a head lifting mechanism (not shown) that lifts and lowers the carriage plate 37 via the θ rotation mechanism 51, and the carriage plate 37 (the functional liquid droplet ejection head 13). The nozzle surface 47) can be adjusted in height.

  Next, the suction unit 14, the wiping unit 15, the discharge performance inspection unit 16, the flushing unit 17 and the weight measurement unit 18 constituting the maintenance means will be described in order.

  The suction unit 14 sucks the functional liquid droplet ejection head 13 and forcibly discharges the functional liquid from the ejection nozzle 48 of the functional liquid droplet ejection head 13. As shown in FIG. 1, the suction unit 14 is configured to correspond to the head unit 35, that is, ten carriage units 20, and ten divided suction units 61 configured similarly are placed on the gantry 6. They are aligned. Each divided suction unit 61 faces the carriage unit 20 that performs suction from the lower side, and corresponds to each of 12 nozzles 47 corresponding to the 12 functional liquid droplet ejection heads 13 mounted on the carriage unit 20. A cap unit 62 for bringing the cap 63 into close contact with each other, and a cap raising / lowering mechanism (not shown) for moving the cap unit 62 up and down to separate the cap 63 from the functional liquid droplet ejection head 13 (nozzle surface 47). Suction means (ejector: not shown) for applying a suction force to each functional liquid droplet ejection head 13 via a cap 63 is provided.

  The suction of the functional liquid is performed in order to eliminate / prevent clogging of the functional liquid droplet ejection head 13 (ejection nozzle 48), or when the liquid droplet ejection apparatus 1 is newly installed, or the head of the functional liquid droplet ejection head 13 For example, when the replacement is performed, the functional liquid is filled in the functional liquid flow path from the functional liquid tank to the functional liquid droplet ejection head 13. The cap 63 of the suction unit 14 is also used for storing the functional liquid droplet ejection head 13 when the liquid droplet ejection apparatus 1 is not in operation.

  The wiping unit 15 is for wiping the nozzle surface 47 of the functional liquid droplet ejection head 13 with a wiping sheet 65 sprayed with a cleaning liquid (wiping). The wiping unit 15 is wound up while being rolled out. A winding unit 66 is provided, a cleaning liquid supply unit 67 for spraying the cleaning liquid onto the fed wiping sheet 65, and a wiping unit 68 for wiping the nozzle surface 47 with the wiping sheet 65 sprayed with the cleaning liquid (see FIG. 1). The wiping operation is performed after suction by the suction unit 14 and wipes off dirt adhering to the nozzle surface 47. The wiping unit 15 is disposed closer to the X-axis table 11 than the suction unit 14, and faces the head unit 35 (each carriage unit 20) that returns to the home position after suction by the suction unit 14. It can be operated.

  As shown in FIG. 1 or FIG. 2, the discharge performance inspection unit 16 determines whether or not the functional liquid is properly discharged from the all-function liquid droplet discharge head 13 (discharge nozzle 48) mounted on the head unit 35. It is for inspection (presence / absence of discharge, flight bend, etc.), receives the functional liquid inspected and discharged from all the discharge nozzles 48 of the all-function liquid droplet discharge head 13 of the head unit 35, and draws a predetermined inspection pattern. And an inspection camera 72 for imaging and inspecting an inspection pattern drawn on the drawing unit 71. The drawing unit 71 receives an inspection discharge from the functional liquid droplet discharge head 13, is wound in a roll shape, and has an elongated drawing sheet 73 for drawing an inspection pattern, and an inspection stage on which the drawing sheet 73 is placed. The inspection pattern discharged to the drawing sheet 73 is imaged by the inspection camera 72, and the control device (not shown) recognizes the image and determines whether there is a discharge failure.

  Next, the flushing unit 17 will be described. The flushing unit 17 receives the functional liquid discarding (flushing) from the functional liquid droplet ejection head 13, and the functional liquid ejection state of the functional liquid droplet ejection head 13 is stabilized by performing this flushing. As shown in FIG. 5, the flushing unit 17 includes a pan-like flushing box 81 (unit body) that receives the functional liquid ejected from the functional liquid droplet ejection head 13, and a function that is laid and ejected in the flushing box 81. Absorbing material 82 that absorbs liquid, a frame-shaped absorbing material holder 83 that is provided at the upper end of the flushing box 81 and restricts the upper limit position of the absorbing material 82, and opens to the bottom surface of the flushing box 81 and accumulates in the box. A suction port 84 for discharging the functional liquid to the outside of the box, and a suction mechanism 85 (vacuum suction unit) for discharging the functional liquid in the flushing box 81 by vacuum suction from the suction port 84 are provided.

  The absorbent material 82 is disposed on the bottom surface of the flushing box 81 and receives the functional liquid discarded from the functional liquid droplet ejection head 13, and is in contact with the lower surface of the upper absorbent material 91. And a lower absorbent material 92 that absorbs and stores the functional liquid that has permeated the liquid.

  The upper absorbent material 91 is formed of a member having a relatively low porosity, suppresses the rebound of the discharged functional liquid, and gradually absorbs the functional liquid. On the other hand, the lower absorbent material 92 is formed of a member having a higher porosity than the upper absorbent material 91. As a result, the functional liquid absorbed by the upper absorbent material 91 is absorbed by the suction force from the lower absorbent material 92 and absorbed by the lower absorbent material 92. Further, by using a member having a high porosity for the lower absorbent material 92, the force that the lower absorbent material 92 holds the functional liquid is weakened, and the functional liquid absorbed by the lower absorbent material 92 is the bottom of the flushing box 81. As it sinks towards the sea, it is stored.

  Further, by forming the lower absorbent material 92 thick with respect to the upper absorbent material 91, the storage amount of the functional liquid in the lower absorbent material 92 is increased. Thereby, even when the amount of the discharged functional liquid is large, the lower absorbent material 92 can completely absorb and store the functional liquid, and the functional liquid does not stay on the upper absorbent material 91. Moreover, the upper absorbent material 91 can be prevented from being clogged without being dried and solidified while the functional liquid is stored in the upper absorbent material 91.

  The absorbent material presser 83 functions to control the upper limit position of the absorbent material 82 and to press the swollen absorbent material 82. Thereby, when the gap between the absorbent material 82 (upper absorbent material 91) and the nozzle surface 47 of the functional liquid droplet ejection head 13 is small, the absorbent material 82 swollen by the functional liquid is removed from the nozzle surface of the functional liquid droplet ejection head 13. 47 is prevented from interfering.

  The suction mechanism 85 functions by sucking the suction tube 93 whose upstream end is connected to the suction port 82, the sealed waste liquid tank 94 provided at the downstream end of the suction tube 93, and the upper air of the waste liquid tank 94. An ejector 95 that sucks the liquid into the waste liquid tank 94 and a vacuum tube 96 that connects the waste liquid tank 94 and the ejector 95 are configured. The suction mechanism 85 drives the ejector 95 to perform vacuum suction from the suction port 84 of the flushing box 81, thereby discharging the functional liquid deposited on the bottom inside the box to the outside of the flushing box 81 (flushing unit 17). Collected in the waste liquid tank 94.

  The above-mentioned flushing unit 17 is mounted as the regular flushing unit 101, the pre-drawing flushing unit 105, and the side-by-side flushing unit 111 depending on the application, and receives ejection from the functional liquid droplet ejection head 13.

  As shown in FIG. 1 or FIG. 2, the regular flushing unit 101 is mounted on the regular flushing box 102 that receives the functional liquid and the maintenance slider 23, and supports both ends of the regular flushing box 102 so that the height can be adjusted. And a pair of box support members 103. The regular flushing unit 101 is a function of regular flushing performed by ejecting and driving the all-function liquid droplet ejection head 13 of the head unit 35 when the drawing process is temporarily stopped, such as when the workpiece W is replaced. For receiving liquid. As a result, it is possible to prevent the functional liquid droplet ejection head 13 from drying and clogging the nozzles when drawing is suspended.

  The pre-drawing flushing unit 105 includes a pair of pre-drawing flushing boxes 106 that receive the functional liquid, and a pair of box support members (not shown) that support the pair of pre-drawing flushing boxes 106 on the suction table 31. Yes. The pre-drawing flushing unit 105 is for receiving the functional liquid for pre-drawing flushing performed by ejecting the full-function liquid droplet ejection head 13 of the head unit 35 immediately before the functional liquid is ejected onto the workpiece W. Thereby, the ejection of the functional liquid droplet ejection head 13 immediately before the drawing can be stabilized, and the drawing process with high accuracy can be performed on the workpiece W. In this case, the flushing is performed as a part of the drawing operation, and the flushing operation is incorporated in a part of the drawing data (bitmap data).

  The side flushing unit 111 has a side flushing box 112 that receives the functional liquid, and is configured as a part of the weight measurement unit 18. The weight measuring unit 18 includes a plurality of (four) weight measuring devices 113 arranged in parallel in the Y-axis direction, and one weight measuring device 113 corresponds to one head group 49. That is, the weight measurement is performed for each of the two carriage units 20 by the four weight measuring devices 113. Each weight measuring device 113 receives the functional liquid discharged from any one of the six functional liquid droplet ejection heads 13 constituting the head group 49, and the weight thereof is an electronic balance (illustrated). (Omitted) Thereby, the drive voltage applied to the functional liquid droplet ejection head 13 and the average ejection amount of each ejection nozzle 48 are measured, and it is determined whether or not the functional liquid is normally ejected from the functional liquid droplet ejection head 13. .

  On the other hand, the side flushing box 112 receives waste discharge from the other five functional liquid droplet ejection heads 13 during measurement ejection from one functional liquid droplet ejection head 13. The measurement using the electronic balance requires a predetermined time until the numerical value is stabilized, and most of the time required for the weight measurement is waiting for this stabilization. For this reason, the function droplet discharge head 13 is maintained in function by discarding discharge from the other five function droplet discharge heads 13 that are not to be measured.

  Here, the process of absorbing and discharging the functional liquid by the flushing unit 17 will be described with reference to FIG. FIG. 6A is a diagram in which the functional liquid discarded and discharged from the functional liquid droplet discharge head 13 is trapped by the upper absorbent 91 in the flushing unit 17 (in the flushing box 81). Since the upper absorbent material 91 is formed of a member capable of completely trapping the discharged functional liquid, the discharged functional liquid does not rebound on the upper surface of the upper absorbent material 91, and the upper absorbent material 91 is moisturized. And gradually penetrates.

  FIG. 5B is a diagram in which the functional liquid that has penetrated into the upper absorbent material 91 is sucked into the lower absorbent material 92 and absorbed. Since the porosity of the lower absorbent material 92 is higher than the porosity of the upper absorbent material 91, the suction force from the lower absorbent material 92 is superior to the force of the upper absorbent material 91 holding the functional liquid, and the upper absorbent material 91 The permeated functional liquid is sucked so as to be sucked into the lower absorbent material 92. Thereby, a functional liquid does not remain in the upper absorbent material 91, and swelling of the upper absorbent material 91 by the functional liquid can be prevented.

  Next, FIG. 3C is a diagram in which the functional liquid absorbed in the lower absorbent material 92 penetrates toward the lower portion of the lower absorbent material 92. By using a member having a high porosity for the lower absorbent material 92, the force for holding the absorbed functional liquid is reduced. As a result, the absorbed functional liquid permeates toward the lower portion of the lower absorbent material 92 (the bottom portion of the flushing box 81) without being held on the upper portion of the lower absorbent material 92.

  Finally, the functional liquid is stored in the lower part of the lower absorbent material 92 as shown in FIG. Thereafter, as shown in FIG. 4E, the ejector 95 is driven to discharge the functional liquid out of the flushing box 81, and the function stored from the suction port 84 drilled in the bottom of the flushing box 81. The liquid is discharged to the waste liquid tank 94. This prevents the functional liquid from collecting in the flushing box 81 and reducing the absorbing power of the absorbent 82, and prevents the functional liquid accumulated in the flushing box 81 from overflowing outside the flushing box 81. Further, the sucked functional liquid can be stored so as to be reusable.

  As described above, according to the present embodiment, by performing flushing using the flushing unit 17 in which two absorbent materials 82 (upper absorbent material 91 and lower absorbent material 92) having different properties are laid in two layers, It is possible to prevent the functional liquid ejected from the functional liquid droplet ejection head 13 from being rebounded and to be reliably received by the absorbent material 82. Therefore, the functional liquid ejection state of the functional liquid droplet ejection head 13 is stabilized and the functional liquid is scattered outside the flushing unit 17 itself and the flushing unit 17. It is possible to prevent the device 1 from being contaminated.

  Further, since the functional liquid trapped by the upper absorbent material 91 is absorbed and stored by the lower absorbent material 92, the functional liquid does not easily accumulate in the upper absorbent material 91, and swelling of the upper absorbent material 91 by the functional liquid can be suppressed. Furthermore, by making the porosity of the lower absorbent material 92 higher than that of the upper absorbent material 91 and forming it with a thick member, the functional liquid discharged to the upper absorbent material 91 is absorbed by the lower absorbent material 92 and functions. The liquid can be completely stored at the bottom of the lower absorbent material 92. Thereby, the functional liquid is accumulated in the upper absorbent 91, and the accumulated functional liquid can be prevented from overflowing from the edge of the flushing unit 17.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate over which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 7 is a flowchart showing a manufacturing process of the color filter, and FIG. 8 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix formation step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 8B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 8C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and the colored layer (film forming unit) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 8 (d), functional droplets are ejected by the functional droplet ejection head 13 to enter each pixel region 507a surrounded by the partition wall portion 507b. Let it land. In this case, the functional liquid droplet ejection head 13 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. When the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. 8E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 9 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 8, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 9 are formed at a predetermined interval. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 13. Furthermore, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 13.

FIG. 10 is a cross-sectional view of a main part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 11 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 12 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a (first bank layer) formed of an inorganic material such as SiO, SiO ₂ or TiO ₂ , and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, the manufacturing process of said display apparatus 600 is demonstrated with reference to FIGS.
As shown in FIG. 13, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 14, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618a of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using tetrafluoromethane as a processing gas, for example. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 13, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 21 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 16, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 13 to each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 17, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Next, as shown in FIG. 17, the second composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 17) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 19, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 13, as shown in FIG. 20, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 21, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 22 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 21 of the droplet discharge device 1.
First, the liquid material (functional liquid) containing the conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 13. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 13 to cope with it. Land in the color discharge chamber 705.

Next, FIG. 23 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 24A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a top view of the droplet discharge device concerning this embodiment. It is a side view of a droplet discharge device. It is an external appearance perspective view of a functional droplet discharge head. It is a figure of the functional droplet discharge head which comprises a head group. It is a conceptual diagram of the flushing unit which concerns on this embodiment. It is a figure explaining the absorption and discharge | emission process of the functional liquid by a lashing unit. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 13 ... Functional droplet discharge head 17 ... Flushing unit 81 ... Flushing box 82 ... Absorbent material 84 ... Suction port 85 ... Suction mechanism 91 ... Upper absorbent material 92 ... Lower absorbent material 101 ... Regular flushing unit 105 ... Pre-drawing flushing unit 111 ... Combined flushing unit W ... Work

Claims (9)

A pan-like unit main body that receives discarded discharge from the inkjet function droplet discharge head,
An absorbent that is laid on the unit body and receives the discharged and discharged functional fluid;
The absorbent material is an upper absorbent material that traps the discharged and discharged functional liquid;
A flushing unit, comprising: a lower absorbent material laid on a bottom surface of the unit main body and in contact with a lower surface of the upper absorbent material to absorb and store a functional liquid of the upper absorbent material.   2. The flushing unit according to claim 1, further comprising a suction port that opens to a bottom surface of the unit main body and communicates with a vacuum suction unit.   The flushing unit according to claim 1 or 2, wherein the porosity of the lower absorbent material is higher than the porosity of the upper absorbent material.   The flushing unit according to any one of claims 1 to 3, wherein the lower absorbent material is thicker than the upper absorbent material. A flushing unit according to any one of claims 1 to 4,
And a drawing means for performing drawing by discharging functional droplets from the functional droplet discharge head while moving the functional droplet discharge head relative to a workpiece. apparatus.   The flushing unit includes at least one of a regular flushing unit that receives discarded discharge when drawing is suspended, a pre-drawing flushing unit that receives discarded discharge immediately before a drawing operation, and a flushing unit that receives discarded discharge when measuring the weight of functional droplets. The droplet discharge device according to claim 5, wherein the droplet discharge device is mounted as a unit.   7. A method of manufacturing an electro-optical device, wherein the droplet discharge device according to claim 5 or 6 is used to form a film forming portion with functional droplets on the workpiece.   7. An electro-optical device using the droplet discharge device according to claim 5 or 6, wherein a film forming portion is formed by functional droplets on the workpiece.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 7 or the electro-optical device according to claim 8.

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