JP2007105704A - Head cap, suction unit and droplet discharge apparatus, method of manufacturing electrooptic device, electrooptic device and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a head cap capable of simply changing a seal member, a functional liquid absorbing material or the like for a short time, a suction unit and a droplet discharge apparatus provided with the same, method of manufacturing an electrooptic device, the electrooptic device and electronic equipment. <P>SOLUTION: The head cap is provided with a cap base 151, an absorbing material housing part 171 provided on the surface of the cap base 151, a functional liquid absorbing material 152 housed in the absorbing material housing part 171, a circular seal member 154 being in close contact with a nozzle surface of a functional liquid droplet discharge head, a frame like seal fixing member 155 fixed to the cap base 151 so as to press the seal member 154, a magnet 174 provided on one of the surface of the cap base 151 and the back surface of the seal fixing member 155 and a magnetic member provided on another surface. The seal fixing member 155 is fixed to the cap base 151 by magnetizing the magnetic member by the magnet 174. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a head cap, a suction unit, a droplet discharge device, a method for manufacturing an electro-optical device, and an electric device that are in close contact with a functional droplet discharge head represented by an inkjet head and maintain the discharge nozzle of the functional droplet discharge head. The present invention relates to an optical device and an electronic apparatus.

  Conventionally, a head cap used for maintenance of a functional liquid droplet ejection head includes a cap base having a concave groove formed on a surface thereof, a functional liquid absorbent material filled in the concave groove, an absorbent presser that holds the functional liquid absorbent material, and a nozzle. A seal member for sealing the surface; and a seal fixing member for fixing the seal member to the cap base.

In this case, the seal fixing member is fixed to the cap base by sandwiching the seal member with a plurality of fixing screws. As a result, when the seal member is deteriorated or the functional liquid absorbent is clogged, the seal member and the functional liquid absorbent can be exchanged by loosening the fixing screw and removing the seal fixed member from the cap base. (See Patent Document 1).
JP 2004-142422 A

In the conventional head cap configured as described above, since the seal fixing member is fixed to the cap base with the fixing screw, a tool is required for replacing the seal member and the functional liquid absorbing material, and the operation is complicated. In addition, there was a problem that it took time to work.
In particular, a large amount of labor and time are required when periodically replacing a large number of head caps provided in a single suction unit.

  The present invention provides a head cap capable of easily and quickly exchanging a seal member, a functional liquid absorbent, and the like, a suction unit and a droplet discharge device including the head cap, a method of manufacturing an electro-optical device, An object is to provide an optical device and an electronic device.

  The head cap of the present invention is provided along the cap base, the absorbent material accommodating portion provided on the surface of the cap base, the functional liquid absorbent accommodated in the absorbent material accommodating portion, and the absorbent material accommodating portion. An annular seal member that is in close contact with the nozzle surface of the ejection head, a frame-shaped seal fixing member that is fixed to the cap base so as to hold the sealing member, and a cap base surface or a back surface of the seal fixing member And a magnetic member provided on the other, and the magnet fixing the magnetic member to fix the seal fixing member to the cap base.

  According to this configuration, since the seal fixing member and the cap base are fixed by magnetizing the magnetic member with the magnet, it is not necessary to attach and detach the fixing screw, and a tool is required to attach and detach the seal fixing member. Can be done easily. Therefore, the replacement work of the seal member and the functional liquid absorbent can be performed efficiently in a short time. In addition, it is also possible to comprise a magnet with an electromagnet. Furthermore, it is preferable that a pair of the magnet and the magnetic member is provided with the absorbent material accommodating portion interposed therebetween.

  In this case, it is preferable that the magnet is provided on the cap base, the magnetic member is provided on the seal fixing member, and the seal fixing member is formed of a magnetic body and a part thereof also serves as the magnetic member.

  According to this configuration, it is possible to reduce the number of parts and assembly man-hours of the seal fixing member.

  In this case, it is preferable that the seal fixing member has a substantially rectangular outer shape, and at least one of the two sets of two sides facing each other protrudes laterally from the peripheral edge of the cap base.

  According to this configuration, since the finger hooking portions can be formed on the two sides of the seal fixing member, the seal fixing member can be easily attached and detached against the magnetic force of the magnet, and the workability is further improved. Can do.

  In this case, a positioning convex portion is provided on one of the front surface of the cap base and the back surface of the seal fixing member, and a positioning concave portion that engages with the positioning convex portion is provided on the other side. It is preferable that the cap base and the seal fixing member are positioned with respect to each other by the engagement.

  According to this configuration, if the seal fixing member is fixed to the cap base using the positioning convex portion and the positioning concave portion as a guide, poor positioning due to the influence of the magnetic force of the magnet can be avoided. In addition, it is preferable that the positioning convex part and the positioning concave part have dimensions that can be guided from a position where the magnetic force of the magnet does not act.

  The suction unit of the present invention includes the above-described head cap, a suction unit that sucks the functional liquid from the discharge nozzle of the functional liquid droplet discharge head via the head cap, a suction channel that connects the head cap and the suction unit, It is provided with.

  According to this configuration, it is possible to provide a suction unit in which the seal member and the functional liquid absorbent can be easily replaced in a short time. The suction means may be a suction pump or an ejector.

  In this case, it is preferable to further include pressure measuring means for measuring the pressure in the suction flow path, and suction monitoring means for monitoring a suction failure by the head cap based on the measurement result of the pressure measuring means.

  According to this configuration, since the user can recognize the suction failure, it is possible to prompt the user to take appropriate measures such as maintenance.

  In this case, it is preferable that the suction monitoring means informs that when the measurement result of the pressure measuring means is outside the predetermined pressure range.

  Further, in this case, the suction monitoring unit notifies that the capping is defective when the measurement result of the pressure measuring unit is outside the upper limit of the pressure range, and when the measurement result is outside the lower limit of the pressure range, It is preferable to notify that the cap is defective.

  According to this configuration, since the defective portion is specified, it is possible to further prompt the user to take appropriate measures such as maintenance.

  A liquid droplet ejection apparatus according to the present invention includes the above-described suction unit and a functional liquid droplet ejection head that ejects functional liquid droplets onto a workpiece.

  According to this configuration, the replacement operation of the seal member, the functional liquid absorbent, and the like can be performed efficiently in a short time, so that the operation stop time of the apparatus can be shortened and productivity can be improved.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film forming portion is formed by a functional liquid on a workpiece using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used, and a film-forming portion made of a functional liquid is formed on a workpiece.

  According to these configurations, the productivity of the workpiece can be improved by manufacturing with the droplet discharge device that can efficiently perform the replacement operation of the seal member, the functional liquid absorbent, and the like in a short time. As an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  The electronic apparatus according to the present invention is mounted on the electro-optical device manufactured by the above-described method of manufacturing the electro-optical device or the above-described electro-optical device.

  In this case, examples of the electronic device include a mobile phone and a personal computer equipped with a so-called flat panel display, and various electric products.

  Hereinafter, a head cap, a suction unit, and a droplet discharge device according to an embodiment of the present invention will be described with reference to the accompanying drawings. The droplet discharge device is incorporated in a flat panel display production line, and a color filter of an LCD device or an organic EL device is printed by a printing technique (inkjet method) using a functional droplet discharge head which is an inkjet head. A light emitting element or the like to be each pixel is formed.

  As shown in FIG. 1, the droplet discharge device 1 is mounted on a machine base 2, a drawing device 3 that is widely mounted on the entire area of the machine base 2, and has a functional liquid droplet discharge head 17. And a maintenance device 4 including a suction unit 61 and a wiping unit 62 attached to the drawing device 3. The maintenance device 4 performs maintenance processing (function maintenance / recovery) of the functional liquid droplet ejection head 17, and the drawing device. 3 performs a drawing operation for discharging the functional liquid onto the substrate W (work). The droplet discharge device 1 is composed of an air supply device (not shown) that supplies compressed air for driving and control to each component, a personal computer, etc., and controls each part of the droplet discharge device 1 and will be described later. The control apparatus 5 incorporating the display (suction monitoring means) 77 for monitoring the suction unit 61 is provided (see FIG. 3).

  The drawing apparatus 3 includes an XY moving mechanism 11 including an X-axis table 12 and a Y-axis table 13 orthogonal to the X-axis table 12, a carriage 14 that is movably attached to the Y-axis table 13, and a hanging structure on the carriage 14. And a head unit 15. A functional liquid droplet ejection head 17 is mounted on the head unit 15. On the other hand, the substrate W is mounted on the X-axis table 12 by a pair of substrate recognition cameras (not shown) facing the end of the X-axis table 12.

  The X-axis table 12 includes a motor-driven X-axis slider 21 that constitutes a drive system in the X-axis direction. A set table 22 including a suction table 23 and a substrate θ table 24 is movably mounted on the X-axis table 21. It is configured. Similarly, the Y-axis table 13 has a motor-driven Y-axis slider 31 that constitutes a drive system in the Y-axis direction, and the head unit 15 is movably mounted on the carriage 14 via the carriage 14. Has been. The X-axis table 12 is directly supported on the machine base 2, while the Y-axis table 13 is supported by left and right support columns 32 erected on the machine base 2, and the X-axis table 12, the maintenance device 4, It extends to straddle.

  The Y-axis table 13 includes the head unit 15 mounted on the Y-axis table 13 between the drawing area 91 positioned immediately above the X-axis table 12 and the maintenance area 92 positioned directly above the maintenance device 4. Move as appropriate. In other words, the Y-axis table 13 is used when performing the drawing operation on the substrate W introduced into the X-axis table 12, when the head unit 15 faces the drawing area 91 and the maintenance process of the functional liquid droplet ejection head 17 is performed. Causes the head unit 15 to face the maintenance area 92. The carriage 14 also has a head Z-axis table (not shown) that moves the suspended head unit 15 in the Z-axis direction (vertical direction) by motor drive.

The head unit 15 includes a functional liquid droplet ejection head 17 and a head plate 16 that positions and mounts the functional liquid droplet ejection head 17. The functional liquid droplet ejection head 17 is mounted on the carriage 14 via the head plate 16.
As shown in FIG. 2, the functional liquid droplet ejection head 17 ejects a functional liquid by an ink jet method, and includes two connection needles 42 that supply the functional liquid to the functional liquid droplet ejection head 17 and a connection needle. 42, a head substrate 43 including two connectors 56 connected to the side of the functional liquid introduction part 41 and connected to the control device, and below the functional liquid introduction part 41 (in FIG. And a head main body 44 in which an in-head flow path filled with a functional liquid is formed.
The head main body 44 further includes a pump unit 51 (not shown) formed of a piezo element and the like, and a nozzle plate 52 having a nozzle surface 53 in which two nozzle rows 54 are formed in parallel to each other. Each nozzle row 54 is configured by arranging a plurality of discharge nozzles 55 at an equal pitch. The functional liquid is discharged from each discharge nozzle 55 by applying a driving waveform to the pump unit 51 via the connector 56. In the head unit of the present embodiment, twelve functional liquid droplet ejection heads 17 are mounted in the same arrangement (see FIG. 5) as a head cap 71 described later.

  As described above, the drawing apparatus 3 drives the functional liquid droplet ejection head 17 to eject the functional liquid onto the substrate W in synchronization with the movement of the set table 22 on which the substrate W is placed in the X-axis direction. Scan. Next, the head unit 15 moves in the Y-axis direction and performs sub-scanning in the Y-axis direction. Thereafter, the substrate W is moved back in the X-axis direction, and the functional liquid droplet ejection head 17 is driven in synchronization to perform main scanning again. By repeating the above operation, desired drawing is performed on the substrate W.

  As shown in FIG. 1, the maintenance device 4 wipes the functional liquid adhering to the suction unit 61 that sucks the functional liquid from the ejection nozzle 55 of the functional liquid droplet ejection head 17 and the nozzle surface 53 of the functional liquid droplet ejection head 17. And a wiping unit 62 that wipes and removes the sheet 81. The suction unit 61 and the wiping unit 62 are provided on the movement locus of the head unit 15 by the Y-axis table 13, and the functional liquid droplet ejection head 17 is placed directly above these units 61 and 62 by the Y-axis table 13. You can make it come. The wiping unit 62 is disposed between the suction unit 61 and the drawing device 3, and the head unit 15 faces the wiping unit 62 after the suction operation of the suction unit 61, and after performing the wiping process, Introduced into the drawing apparatus 3.

  The wiping unit 62 includes a wiping roller 82 for bringing the wiping sheet 81 into contact with the nozzle surface 53 of the functional liquid droplet ejection head 17, a sheet supply unit 83 for supplying the wiping sheet 81 to the wiping roller 82, and a wiping sheet. 81, a cleaning liquid discharge unit 84 for spraying the cleaning liquid. The wiping sheet 81 sprayed with the cleaning liquid is caused to face the head unit 15 by the wiping roller 82, and the wiping sheet 81 is sent in one direction to wipe the functional liquid droplet ejection head 17.

  Next, the suction unit 61 will be described with reference to FIGS. 3, 4, and 5. The suction unit 61 includes a head cap 71 (12 in this embodiment), a suction pump (suction means) 72 that sucks the functional liquid from the discharge nozzle 55 of the functional liquid droplet discharge head 17 via the head cap 71, and a suction A waste liquid tank 73 for storing the functional liquid sucked by the pump 72; a suction flow path 74a for connecting the head cap 71 and the suction pump 72; a waste liquid flow path 74b for connecting the suction pump 72 and the waste liquid tank 73; An elevating mechanism 75 for elevating and lowering the head cap 71 for capping the droplet discharge head 17 is provided. The suction unit 61 includes a pressure sensor (pressure measuring means) 76 that measures the pressure in the suction flow path 74 a, and the pressure sensor 76 is connected to the control device 5. As will be described in detail later, the head cap 71 has a suction port 173 connected to the suction pump 72 and an air release valve. Further, the suction pump 72 is configured as a single unit with respect to the twelve head caps 71, and a plurality of suction flow paths 74 a connected to the head caps 71 join at the upstream side of the suction pump 72. ing. The suction means employs the suction pump 72 in this embodiment, but an ejector may be employed.

  The elevating mechanism 75 includes an upper upper elevating cylinder 112 that elevates and lowers the head cap 71 directly, a lower elevating cylinder 113 that elevates the head cap 71 together with the upper elevating cylinder 112, and a base portion 111 that supports the lower elevating cylinder 113. And a sub-cylinder 131 that opens and closes the air release valve of the head cap 71. The lower lifting / lowering cylinder 113 greatly lowers the head cap 71 when the head unit 15 is replaced, and the upper lifting / lowering cylinder 112 causes the head cap 71 to be separated from the nozzle surface 53 of the functional liquid droplet ejection head 17. . The sub-cylinder 131 opens the atmosphere release valve at the final stage of the suction operation, so that the functional liquid does not remain in the head cap 71.

  Next, referring to the conceptual diagram of FIG. 3 and the flowchart shown in FIG. The lower elevating cylinder 113 is moved to the rising end position, the upper elevating cylinder 112 is moved to the lower end position (separated position), and the sub cylinder 131 is moved to the valve closing position. From this state, the upper elevating cylinder 112 is driven, the head cap 71 is brought into close contact with the nozzle surface 53 of the functional liquid droplet ejection head 17, and so-called capping is performed (S1). Next, the suction pump 72 is driven to suck the functional liquid from the discharge nozzle 55 of the functional liquid droplet discharge head 17 through the suction flow path 74a and the head cap 71 (S2). In this case, the driving of the suction pump 72 is controlled by a timer or the number of rotations of the suction pump 72. During the suction operation, the pressure (negative pressure) in the suction flow path 74a is measured by the pressure sensor 76 (S3), and it is determined whether or not the measured pressure is within a predetermined pressure range (S4). ). Here, when it is determined that the pressure is within the predetermined pressure range (YES), the pump driving is continued for a predetermined time or a predetermined number of times. Then, immediately before the suction is completed, the air release valve is opened by the sub-cylinder 131 and the functional liquid impregnated in the functional liquid absorbent 152 in the head cap 71 is sucked and the process ends.

  On the other hand, if it is determined (NO) that the pressure is outside the upper limit (small negative pressure) of the predetermined pressure range, it is assumed that air leaks between the functional liquid droplet ejection head 17 and the head cap 71. Therefore, the display 77 displays (notifies) that “capping failure” (S5). On the other hand, when it is determined (NO) that the pressure is outside the lower limit (high negative pressure) of the predetermined pressure range, clogging of the cap 71 or nozzle clogging of the discharge nozzle 55 is assumed. Therefore, the display 77 displays (notifies) that “cap failure or nozzle failure” (S5). When it is determined that “capping failure” and “cap failure or nozzle failure”, the driving of the suction pump 72 is immediately stopped. In the case of “capping failure”, it is preferable to display a maintenance method such as cleaning or replacement of the head cap 71 at the same time. Similarly, in the case of “cap defect or nozzle defect”, it is preferable to display a maintenance method such as replacement of the head unit 15 at the same time. In this way, when the suction operation is completed, the upper elevating cylinder 112 is driven again to separate the cap from the head unit 15. Note that “cap defect or nozzle defect” may be displayed as “cap defect” or “nozzle defect”.

  On the other hand, if the above suction operation is performed with the cap separated, and this is measured by the pressure sensor 76, “cap failure” such as clogging of the cap or partial blockage of the suction flow path 74a can be detected. . That is, when the measurement result of the pressure sensor 76 exceeds a predetermined pressure value (negative pressure), it is determined as “cap defect” and this is displayed on the display 77. At the same time, the head cap 71 is instructed (displayed) for maintenance such as a cleaning method and replacement. The pressure measurement is mainly performed immediately before the suction operation, but may be performed at the time of flushing or the like.

  Next, the head cap 71 constituting the main part of the present invention will be described with reference to FIG. The head cap 71 swells the cap base 151 serving as the base of the head cap 71, the functional liquid absorbent 152 accommodated in the absorbent accommodating section 171 formed on the surface of the cap base 151, and the functional liquid absorbent 152. The functional liquid absorbent presser 153 that can be prevented and kept flat, the seal member 154 that is installed on the surface of the cap base 151 and is in close contact with the nozzle surface 53 of the functional liquid droplet ejection head 17, and the seal member 154 is connected to the cap base 151. And a cap holder 156 in which the cap base 151 is accommodated.

  The cap holder 156 is made of a corrosion-resistant material such as stainless steel, and is made up of an elongated holder main body 161 and a pair of position restriction blocks 162 fixed to upper surfaces of both end portions in the longitudinal direction of the holder main body 161 with fixing screws. . The holder main body 161 has a pair of coil springs 163 and a pair of pins 164 that hold the coil springs 163 (see FIG. 8). The cap base 151 is biased from below by the coil spring 163 in a state where the upward movement is restricted by the position restriction block 162. Then, the coil spring 163 absorbs a shock when it comes into close contact with the nozzle surface 53 of the functional liquid droplet ejection head 17. Further, the position restricting block 162 restricts the position of the cap base 151 so that the cap base 151 is slightly inclined to prevent the functional liquid from being largely scattered when the nozzle surface 53 of the functional liquid droplet ejection head 17 is separated. Yes.

  The functional liquid absorbent 152 is configured by laminating two kinds of functional liquid absorbents 152 of different materials, and corresponds to the suction port 173 and the air inlet 172 formed in the absorbent accommodating portion 171 of the cap base 151. A small hole is formed in each of the portions. The functional liquid absorbent 152 is not limited to a two-layer structure, and may be a single-layer structure or a multilayer structure. The absorbent material holder 153 is made of a corrosion-resistant material such as stainless steel and is formed into a thin plate, and is integrally formed of a rectangular frame-shaped portion and a cross-shaped portion (three) formed so as to cross the frame-shaped portion. Yes.

  The seal member 154 is made of rubber, resin, or the like, and is formed in a crank shape in a cross section and in an annular shape along the absorbent material accommodating portion 171 (see FIG. 8). As a result, the seal member 154 and the cap base 151 are fixed so as to sandwich the absorbent material presser 153 by the reaction force received from the nozzle surface 53 by being in close contact with the nozzle surface 53, so that the absorbent material presser 153 is stably fixed. It becomes possible to do.

  The seal fixing member 155 is made of a magnetic material such as iron or ferrite, or a part thereof is made of a magnetic member, and is formed in a substantially rectangular frame shape. The peripheral edge of the seal fixing member 155 is chamfered so as to be inclined, and the seal fixing member 155 is formed with a pair of circular pin holes 157 for positioning on both sides of the opening portion. Further, the opposing long sides of the seal fixing member 155 are formed so as to protrude laterally from the long side of the cap base 151 in a state of being fixed to the cap base 151, and both protruding portions thereof are connected to the seal fixing member 155. It becomes a finger-hanging part when removing.

  The cap base 151 is formed in a substantially square shape. In order to fix the seal fixing member 155 to the surface of the cap base 151, a total of four pairs are provided at both ends in the longitudinal direction and a pair at both ends in the short direction. Two magnets 174 are provided. The magnet 174 is formed of a rectangular permanent magnet such as a ferrite magnet or a metal magnet, and is embedded on the surface of the cap base 151 so as to be flush with each other. In addition, a pair of positioning pins 175 are provided on the surface of the cap base 151 so as to be close to the magnet 174 and fitted into the pin holes 157. By positioning the positioning pin 175 in the pin hole 157 and attaching the seal fixing member 155 to the cap base 151, the seal fixing member 155 is positioned and fixed to the cap base 151 in the front-rear and left-right directions. Further, an absorbent material accommodating portion 171 that accommodates the functional liquid absorbent 152 is formed so as to protrude from the center of the surface of the cap base 151. The absorbent material accommodating portion 171 includes a concave groove portion 171a for accommodating the functional liquid absorbent material 152 and an annular peripheral edge portion 171b that protrudes from the surface of the cap base and seats the absorbent material retainer 153. A suction portion is provided at the bottom of the concave groove portion 171a. A suction port 173 connected to the flow path 74a and an air inlet 172 connected to the air release valve are formed (see FIG. 8).

  Here, the assembly procedure of the head cap 71 will be described with reference to FIG. First, after laying the functional liquid absorbent 152 in the concave groove 171a of the absorbent accommodating portion 171 formed in the cap base 151, the absorbent retainer 153 is capped so that the functional liquid absorbent 152 is pressed against the cap base 151. The base 151 is seated on the annular peripheral edge 171b. In this state, the seal member 154 is mounted so as to be along the edge of the annular peripheral edge portion 171b on the surface of the cap base 151, and the absorbent material presser 153 is moved from above and below between the lower surface of the seal member 154 and the upper surface of the annular peripheral edge portion 171b. Pinch. Thereafter, the pin hole 157 formed in the seal fixing member 155 is aligned with the positioning pin 175 of the cap base 151, and the seal fixing member 155 is moved to the cap base according to the magnetic adhesion force of the magnet 174 embedded in the surface of the cap base 151. 151 is fixed.

  In this way, the seal fixing member 155 is magnetically attached to the magnet 174 of the cap base 151, so that the functional liquid absorbing material 152, the absorbing material presser 153, and the sealing member 154 are sandwiched between the seal fixing member 155 and the cap base 151. To be fixed. Therefore, it can be easily disassembled in a short time simply by lifting the seal fixing member 155 against the magnetic adhesion force of the cap base 151. In the maintenance work after the disassembly, the functional fluid absorbent 152 and the seal member 154 are replaced, and the absorbent retainer 153 is wiped off. For example, the work time of this maintenance work is about 5 minutes per replacement work of one cap in the conventional screw fixing, and is about 1 minute in the present embodiment. Therefore, for the 12 caps, the conventional one requires about 60 minutes, and in this embodiment, the process is completed in about 12 minutes.

  In this embodiment, the seal fixing member 155 is made of a magnetic material or part of a magnetic member and fixed by being magnetized to the magnet 174 provided on the cap base 151. A magnet 174 may be provided on the back surface of the member 155, and a part of the cap base 151 that is magnetically attached to the magnetic body or the magnet 174 may be formed of a magnetic member.

  Next, in this embodiment, the pin hole 157 of the seal fixing member 155 and the positioning pin 175 of the cap base 151 are aligned, but instead of the pin hole 157 and the positioning pin 175, the seal fixing member 155 is provided. Positioning may be performed by fitting the concave portion and the convex portion provided on the cap base 151 together.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 10 is a flowchart showing the manufacturing process of the color filter, and FIG. 11 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 11B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 11C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 11 (d), functional droplets are ejected by the functional droplet ejection head 17, and each pixel region 507a surrounded by the partition wall portion 507b is placed. Let it land. In this case, the functional liquid droplet ejection head 17 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. 11E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 12 is a cross-sectional view of a main part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 11, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 12 are formed at a predetermined interval. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 17. Further, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 17.

FIG. 13 is a cross-sectional view of an essential part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 14 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 15 is a cross-sectional view of a main part of a display region of the organic EL device (hereinafter simply referred to as a display device 600).

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 16, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 17, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by, for example, plasma treatment using oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane as a processing gas. )
By performing this surface treatment process, when forming the functional layer 617 using the functional liquid droplet ejection head 17, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 22 of the droplet discharge device 1 shown in FIG. 2, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 19, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 17 to each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 20, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 21, the second composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 21) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 22, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 17, as shown in FIG. 23, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 24, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 25 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are disposed at the bottom of the blue discharge chamber 705B and the bottom, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 22 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 17. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode forming regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 17, and it corresponds. Land in the color discharge chamber 705.

Next, FIG. 26 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 27A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the above-described droplet discharge device 1 for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a plane schematic diagram of a droplet discharge device. It is an external appearance perspective view of a functional droplet discharge head. It is a schematic diagram of a functional droplet discharge head and a suction unit. It is a side view of a suction unit. It is a top view of a suction unit. It is a flowchart of the monitoring method of a suction failure. It is a perspective view of a head cap. It is sectional drawing of a head cap. It is a disassembled perspective view of a head cap. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 17 ... Functional droplet discharge head 53 ... Nozzle surface 55 ... Discharge nozzle 61 ... Suction unit 71 ... Head cap 72 ... Suction pump 74a ... Suction flow path 76 ... Pressure sensor 77 ... Display 151 ... Cap base 152 ... Functional liquid absorbent 154 ... Sealing member 155 ... Seal fixing member 171 ... Absorbent containing part 174 ... Magnet 508 ... Colored layer W (workpiece) ... Substrate

Claims (12)

A cap base,
An absorbent material accommodating portion provided on the cap base surface;
A functional liquid absorbent material accommodated in the absorbent material accommodating portion;
An annular seal member that is provided along the absorber accommodating portion and is in close contact with the nozzle surface of the functional liquid droplet ejection head;
A frame-like seal fixing member fixed to the cap base so as to press the sealing member;
A magnet provided on one of the front surface of the cap base and the back surface of the seal fixing member, and a magnetic member provided on the other,
The head cap, wherein the seal fixing member is fixed to the cap base by magnetizing the magnetic member with the magnet. The magnet is provided on the cap base, and the magnetic member is provided on the seal fixing member;
The head cap according to claim 1, wherein the seal fixing member is made of a magnetic material and a part of the seal fixing member also serves as the magnetic member.   The seal fixing member has a substantially square outer shape, and at least one set of two sides out of two sets of opposing sides protrudes laterally from the peripheral edge of the cap base. The head cap according to claim 1. Either one of the front surface of the cap base and the back surface of the seal fixing member is provided with a positioning convex portion, and the other is provided with a positioning concave portion that engages with the positioning convex portion,
4. The head cap according to claim 1, wherein the cap base and the seal fixing member are positioned relative to each other by engagement between the positioning convex portion and the positioning concave portion. A head cap according to any one of claims 1 to 4,
A suction means for sucking the functional liquid from the discharge nozzle of the functional liquid discharge head via the head cap;
A suction unit comprising: a suction flow path connecting the head cap and the suction means. Pressure measuring means for measuring the pressure in the suction channel;
The suction unit according to claim 5, further comprising suction monitoring means for monitoring a suction failure by the head cap based on a measurement result of the pressure measuring means.   The suction unit according to claim 6, wherein the suction monitoring unit notifies that when the measurement result of the pressure measuring unit is out of a predetermined pressure range. The suction monitoring means informs that there is a capping failure when the measurement result of the pressure measuring means is outside the upper limit of the pressure range,
The suction unit according to claim 7, wherein when it is outside the lower limit of the pressure range, it is notified that the nozzle is defective and / or the cap is defective. A suction unit according to any one of claims 5 to 8,
A liquid droplet ejection apparatus comprising the functional liquid droplet ejection head for ejecting functional liquid droplets onto a workpiece.   10. A method for manufacturing an electro-optical device, wherein the droplet discharge device according to claim 9 is used to form a film forming portion with functional droplets on the workpiece.   An electro-optical device using the droplet discharge device according to claim 9, wherein a film forming portion using functional droplets is formed on the workpiece.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 10 or the electro-optical device according to claim 11.

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