JP2009034622A - Functional fluid feeding device, fluid droplet discharge device, manufacturing method of electro-optical device and electro-optical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enable inhibiting of the deterioration of drawing quality on exchanging a used functional fluid with a new one caused by the exchange of functional fluid tanks. <P>SOLUTION: This functional fluid feeding device comprises the following components: (1) A first tank-side flow path 134a which is connected with a first main tank 181a and branches into 10 paths, (2) a second tank-side flow path 134b which is connected with a second main tank 181b and branches into 10 paths, (3) 10 sets of individual flow paths whose upstream sides are connected with respective confluences 135 of corresponding flow paths branching into 10 paths and also, whose downstream sides are connected with a plurality of head units, respectively, (4) 10 sets of flow path switching mechanisms 143 which switch the functional fluids flowing into individual flow paths, i.e. a used functional fluid for a new one, and (5) a control part which controls 10 sets of the flow path switching mechanisms 143 individually i.e. controls the plurality of the flow path switching mechanisms 143 individually so as to allow the new functional fluid to reach the plurality of the head units simultaneously. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention provides a function of supplying a functional liquid to each of a plurality of head units, which is provided in an ink jet type liquid droplet ejection apparatus that performs drawing on a workpiece, with a head unit including one or more functional liquid droplet ejection heads as a supply unit. The present invention relates to a liquid supply device, a droplet discharge device, an electro-optical device manufacturing method, and an electro-optical device.

Conventionally, as a functional liquid supply device (ink supply means) provided for a six-color ink jet printer, two intermediate ink packs for supplying ink to four ink jet heads for each color and two intermediate ink packs for each color are provided. There has been known one including an ink cartridge for each color for replenishing a functional liquid and a tube unit for connecting these devices (see Patent Document 1). The ink cartridge is a so-called main tank, and is designed to detect and replace the liquid drop.
JP 2003-118136 A

  However, in the conventional inkjet printer, the ink consumption of each inkjet head differs depending on the drawing pattern (printed image). Therefore, when the ink cartridge is replaced, there is a difference in the timing at which new ink reaches each inkjet head. On the other hand, in an inkjet type droplet discharge device used for manufacturing a color filter or an organic EL device, a special functional liquid (ink) such as a filter material or a light emitting material is used. When the above-described conventional functional liquid supply device is applied to this, the old functional liquid is ejected from any functional liquid droplet ejection head, the new functional liquid is ejected from another functional liquid droplet ejection head, and the old and new functional liquids are Duplicate drawing on the workpiece. At this time, functional liquids having different production lots as the old and new functional liquids, that is, functional liquids having different properties such as viscosity due to the problem of manufacturing accuracy may be drawn in duplicate. In such a case, there is a problem in that color unevenness and stripes occur on the work, and the drawing quality on the work to be created is degraded.

  The present invention provides a functional liquid supply device, a droplet discharge device, a method of manufacturing an electro-optical device, and an electro-optical device capable of suppressing deterioration in drawing quality when replacing old and new functional liquids caused by replacement of the functional liquid tank. The issue is to provide.

  The functional liquid supply apparatus of the present invention is provided in an ink jet type liquid droplet ejection apparatus that performs drawing on a workpiece, and a head unit including one or more functional liquid droplet ejection heads is used as a supply unit, and a functional liquid is supplied to a plurality of head units. Functional liquid supply device that supplies each of the functional liquid continuously to multiple head units using the old and new functional liquid tanks that are exchanged through repeated use, and the old and new functional liquid tanks. A first tank-side channel composed of a plurality of first branch channels branched from the first main channel according to the number of connected first main channels and the number of head units, and a second connected to the old and new functional liquid tanks A second tank side channel composed of a plurality of second branch channels branched from the second main channel in accordance with the number of main channels and the number of head units, and each first branch channel and each associated with the upstream side Connected to the junction with the branch channel, the downstream side has a head-side channel composed of a plurality of individual channels connected to the plurality of head units, and each of the junctions, and each first branch channel and A plurality of flow path switching means for switching the functional liquid flowing into each individual flow path between the old functional liquid and the new functional liquid and the plurality of flow path switching means are individually controlled via each second branch flow path. Control means, and the control means individually controls the plurality of flow path switching means so that the new functional liquid reaches the plurality of head units at the same time.

  According to this configuration, the plurality of flow path switching units are arranged so that the new functional liquid supplied from the new functional liquid tank reaches the plurality of head units (one or more functional liquid droplet ejection heads) simultaneously by the control unit. By individually controlling each of the head units, the arrival timing of the new functional liquid can be made the same in each head unit. Therefore, the new and old functional liquids can be shifted simultaneously in the introduction of the functional liquid into the plurality of head units, and the drawing process can always be performed with the functional liquid having the same property. As a result, high drawing quality for the workpiece can be maintained.

  In the above-described functional liquid supply apparatus, it is preferable that each flow path switching unit is constituted by a three-way valve.

  According to this configuration, each flow path switching means can be configured with a simple configuration, and the flow path switching between the old functional liquid and the new functional liquid of the inflowing functional liquid by each flow path switching means is easily performed. be able to.

  In the above-described functional liquid supply apparatus, each flow path switching unit is preferably composed of a mixing valve that changes the mixing ratio of the new functional liquid with respect to the old functional liquid from 0% to 100% over time.

  According to this configuration, even if a slight deviation occurs in the arrival timing of the new functional liquid in the plurality of head units, the arrived functional liquid is the new and old mixed liquid, so the difference between the old and new properties can be alleviated. Can

  In this case, it is preferable that each mixing valve includes a first electric valve provided in each first branch flow path and a second electric valve provided in each second branch flow path.

  According to this configuration, each mixing valve can be configured with a simple configuration, and opening / closing control of each mixing valve can be easily performed.

  In this case, it is preferable that the control means individually controls the plurality of flow path switching means based on a control table obtained in advance by experiments.

  According to this configuration, by referring to the control table obtained in advance through experiments, the flow path can be easily switched, and the flow path can be switched with high accuracy.

  The control means preferably has rewriting means for rewriting data in the control table based on a drawing pattern for the workpiece.

  According to this configuration, by having the rewriting means for rewriting the data of the control table, the control table is provided to cope with the difference in the functional liquid consumption ratio (discharge amount ratio, etc.) of each head unit caused by the difference in the drawing pattern. By rewriting, flow path switching corresponding to a plurality of drawing patterns can be easily performed.

  A liquid droplet ejection apparatus according to the present invention includes the functional liquid supply device described above.

  According to this configuration, when the functional liquid tank is replaced, it is possible to create a high-quality work by having the functional liquid supply device that simultaneously supplies a new functional liquid when introducing the functional liquid into each head unit. .

  In this case, each head unit is equipped with a plurality of functional liquid droplet ejection heads, and has a plurality of carriage units each equipped with each head unit, and a moving table that individually moves the plurality of carriage units in the sub-scanning direction. It is preferable.

  According to this configuration, a higher quality work can be created by performing drawing processing with a plurality of carriage units equipped with a plurality of functional liquid droplet ejection heads supplied with functional liquids having no difference in properties. Can do.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming unit made of functional droplets is formed on a workpiece using the above-described droplet discharge device.

  An electro-optical device according to the present invention is characterized in that a film forming unit using functional droplets is formed on a workpiece using the above-described droplet discharge device.

  According to this configuration, a high-quality electro-optical device can be efficiently manufactured. In addition, as a functional material, the light emitting material (Electro-Luminescence light emitting layer / hole injection layer) of the organic EL device, the filter material (filter element) of the color filter used for the liquid crystal display device, the electron emission device (Field Emission) Display, FED) fluorescent material (phosphor), fluorescent material (phosphor) of PDP (plasma display panel) device, electrophoretic material (electrophore) of electrophoretic display device, etc. A liquid material that can be discharged by an inkjet head). Examples of the electro-optical device (Flat Panel Display, FPD) include an organic EL device, a liquid crystal display device, an electron emission device, a PDP device, and an electrophoretic display device.

  Hereinafter, a droplet discharge device to which a functional liquid supply device of the present invention is applied will be described with reference to the accompanying drawings. This droplet discharge device is incorporated in a flat panel display production line, and uses, for example, a function droplet discharge head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced, and the color of a liquid crystal display device A light emitting element or the like to be used for each pixel of a filter or an organic EL device is formed.

  As shown in FIGS. 1, 2 and 3, the droplet discharge device 1 is disposed on an X-axis support base 2 supported by a stone surface plate and extends in the X-axis direction which is the main scanning direction. The X-axis table 11 that moves the workpiece W in the X-axis direction (main scanning direction) and a pair (two) of Ys that are spanned across the X-axis table 11 via a plurality of columns 4 Ten carriage units 51 mounted on the shaft support base 3 and mounted with a Y-axis table (moving table) 12 extending in the Y-axis direction serving as the sub-scanning direction and a plurality of functional liquid droplet ejection heads 17 are mounted. The ten carriage units 51 are suspended from the Y-axis table 12 so as to be movable. Further, the droplet discharge device 1 includes a chamber 6 that accommodates these devices in an atmosphere in which temperature and humidity are controlled, and a functional droplet discharge head 17 that passes through the chamber 6 from the outside of the chamber 6 to the inside. And a functional liquid supply unit 7 having three sets of functional liquid supply devices 101 for supplying the functional liquid. The functional liquid droplet discharge head 17 is driven to discharge in synchronization with the driving of the X-axis table 11 and the Y-axis table 12, thereby discharging the R, G, B three-color functional liquid droplets supplied from the functional liquid supply unit 7. A predetermined drawing pattern is drawn on the workpiece W.

  The droplet discharge device 1 includes a maintenance device 5 including a flushing unit 14, a suction unit 15, a wiping unit 16, and a discharge performance inspection unit 18, and these units are used for maintenance of the functional droplet discharge head 17. The function of the functional liquid droplet ejection head 17 is maintained and recovered. Of the units constituting the maintenance device 5, the flushing unit 14 and the discharge performance inspection unit 18 are mounted on the X-axis table 11, and the suction unit 15 and the wiping unit 16 extend from the X-axis table 11 at a right angle, In addition, the Y-axis table 12 is disposed on a pedestal disposed at a position where the carriage unit 51 can move (strictly speaking, the discharge performance inspection unit 18 includes a stage unit 77 which will be described later, the X-axis table 11. The camera unit 78 is supported by the Y-axis support base 3).

  The flushing unit 14 includes a pair of pre-drawing flushing units 71 and 71 and a regular flushing unit 72, and is performed immediately before the ejection of the functional liquid droplet ejection head 17 or when the drawing process is suspended such as when the workpiece W is replaced. Then, the functional liquid droplet ejection head 17 is subjected to the discarded ejection (flushing). The suction unit 15 includes a plurality of divided suction units 74 and forcibly sucks the functional liquid from the discharge nozzle 98 of each functional liquid droplet discharge head 17 and performs capping. The wiping unit 16 has a wiping sheet 75 and wipes the nozzle surface 97 of the functional liquid droplet ejection head 17 after suction. The ejection performance inspection unit 18 includes a stage unit 77 on which an inspection sheet 83 that receives functional droplets ejected from the functional droplet ejection head 17 is mounted, and a camera unit 78 that inspects functional droplets on the stage unit 77 by image recognition. And the ejection performance (the presence / absence of ejection and the flight curve) of the functional droplet ejection head 17 is inspected.

  Next, components of the droplet discharge device 1 will be briefly described. As shown in FIG. 2 or FIG. 3, the X-axis table 11 includes a set table 21 for setting a work W, an X-axis first slider 22 for slidably supporting the set table 21 in the X-axis direction, and the flushing described above. An X-axis second slider 23 that supports the unit 14 and the stage unit 77 slidably in the X-axis direction, and extends in the X-axis direction, and the set table 21 (work W) is moved through the X-axis first slider 22 to the X A pair of left and right X-axis linear motors (not shown) that move in the axial direction and move the flushing unit 14 and the stage unit 77 in the X-axis direction via the X-axis second slider 23, and parallel to the X-axis linear motor A pair of (two) X-axis common support bases 24 for guiding the movement of the X-axis first slider 22 and the X-axis second slider 23. That.

  The set table 21 includes a suction table 31 for sucking and setting the work W, and a θ table 32 for supporting the suction table 31 and correcting the position of the work W set on the suction table 31 in the θ-axis direction. Yes. The pre-drawing flushing unit 71 is attached to each of a pair of sides parallel to the Y-axis direction of the set table 21.

  The Y-axis table 12 includes 10 bridge plates 52 each of which has 10 carriage units 51 suspended therein, 10 sets of Y-axis sliders (not shown) that support the 10 bridge plates 52 in both ends, A pair of Y-axis linear motors (not shown) are provided on the pair of Y-axis support bases 3 and move the bridge plate 52 in the Y-axis direction via 10 sets of Y-axis sliders. Further, the Y-axis table 12 sub-scans the functional liquid droplet ejection head 17 at the time of drawing via each carriage unit 51, and the functional liquid droplet ejection head 17 is exposed to the maintenance device 5 (the suction unit 15 and the wiping unit 16). I will.

  When the pair of Y-axis linear motors are driven (synchronously), each Y-axis slider translates in the Y-axis direction simultaneously with the pair of Y-axis support bases 3 as a guide. As a result, the bridge plate 52 moves in the Y-axis direction, and the carriage unit 51 moves in the Y-axis direction at the same time. In this case, by controlling the driving of the Y-axis linear motor, each carriage unit 51 can be moved independently and individually, or ten carriage units 51 can be moved together. It is.

  Further, on both sides of the Y-axis table 12, a cable carrier 81 is disposed in parallel with the Y-axis table 12. One end of each cable carrier 81 is fixed to the Y-axis support base 3 and the other end is fixed to one of the bridge plates 52. The cable carrier 81 accommodates cables for each carriage unit 51, air tubes, functional liquid flow paths (10 merging flow paths 136 described later), and the like.

  Each carriage unit 51 includes a head unit 13 including twelve functional liquid droplet ejection heads 17 and a head plate 53 that supports the twelve functional liquid droplet ejection heads 17 in two groups. (See FIG. 4). Each carriage unit 51 supports the head unit 13 via the θ rotation mechanism 61 that supports the head unit 13 so as to be capable of θ correction (θ rotation), and the Y axis table 12 (each bridge plate 52) via the θ rotation mechanism 61. And a suspension member 62 to be supported on. In addition, each carriage unit 51 is provided with a sub-tank 121 described later (actually disposed on the bridge plate 52), and each functional droplet is discharged from the sub-tank 121 using a natural water head. A functional liquid is supplied to the discharge head 17.

  As shown in FIG. 5, the functional liquid droplet ejection head 17 is a so-called double type, a functional liquid introduction unit 91 having two connection needles 92, and a dual head substrate that is continuous with the functional liquid introduction unit 91. 93, and a head main body 94 which is connected to the lower side of the functional liquid introducing portion 91 and has an in-head flow path filled with the functional liquid therein. The connection needle 92 is connected to the functional liquid supply unit 7 (functional liquid supply apparatus 101) and supplies the functional liquid to the functional liquid introduction unit 91. The head main body 94 includes a cavity 95 (piezoelectric piezoelectric element) and a nozzle plate 96 having a nozzle surface 97 in which a large number of discharge nozzles 98 are opened. When the functional liquid droplet ejection head 17 is driven to eject (a voltage is applied to the piezoelectric element), functional liquid droplets are ejected from the ejection nozzle 98 by the pump action of the cavity 95.

  In addition, two nozzle rows 98b made up of a large number of discharge nozzles 98 are formed on the nozzle surface 97 in parallel with each other. The two nozzle rows 98b are displaced from each other by a half nozzle pitch.

  The chamber 6 is configured to keep the internal temperature and humidity constant. That is, the drawing on the workpiece W by the droplet discharge device 1 is performed in an atmosphere in which the temperature and humidity are controlled to be constant values. A tank cabinet 84 for storing the tank unit 122 is provided in a part of the side wall of the chamber 6. In the case of manufacturing an organic EL device or the like, the chamber 6 is preferably configured in an atmosphere of an inert gas (nitrogen gas).

  Next, the functional liquid supply unit 7 will be described with reference to FIGS. 1 and 6. The functional liquid supply unit 7 includes three sets of functional liquid supply devices 101 that supply functional liquids of R, G, and B colors. The functional liquid supply unit 7 includes a nitrogen gas supply facility 85 that supplies compressed nitrogen gas for control to main tanks 181a and 181b, which will be described later, and a compressed air supply facility that supplies compressed air for controlling various on-off valves. 86, a gas exhaust equipment 87 for exhausting gas from each part, and a vacuum equipment 89 connected to a bubble removing unit 139 described later. The three sets of functional liquid supply devices 101 are connected to the functional liquid droplet ejection heads 17 corresponding to the R, G, and B colors, respectively. Liquid is supplied.

  As shown in FIG. 6, the functional liquid supply device 101 for each color includes a tank unit 122 having a first main tank (functional liquid tank) 181a and a second main tank (functional liquid tank) 181b that constitute a functional liquid supply source. 10 sub-tanks 121 provided corresponding to each carriage unit 51, an upstream-side functional liquid channel 126 connecting the tank unit 122 and the 10 sub-tanks 121, each sub-tank 121 and each functional liquid droplet ejection head 10 sets of downstream-side functional liquid flow channels 127 that connect the 17.

  The functional liquid in each of the main tanks 181 a and 181 b is connected to this and pressurized by compressed nitrogen gas from the nitrogen gas supply equipment 85, and is selectively supplied to the ten sub tanks 121 via the upstream functional liquid channel 126. To be supplied. At that time, various open / close valves are controlled to open and close by the compressed air of the compressed air supply facility 86. At the same time, each sub tank 121 is opened to the atmosphere via the gas exhaust equipment 87 and receives a necessary amount of functional liquid. The functional liquid in each sub tank 121 is supplied to the functional liquid droplet ejection head 17 via the downstream functional liquid flow path 127 while maintaining a predetermined hydraulic head pressure by driving the functional liquid droplet ejection head 17 connected thereto. .

  The tank unit 122 includes a first main tank 181a and a second main tank 181b serving as functional liquid supply sources, and a pair of weight measuring devices 182 and 182 for measuring the weights of the pair of main tanks 181a and 181b, respectively. ing. Each main tank 181a, 181b is connected to a nitrogen gas supply facility 85, and is configured to be capable of pressurization control when the functional liquid is fed under pressure.

  The weight measuring device 182 is composed of, for example, a load cell, and issues a warning to prompt replacement when the functional liquid in the main tanks 181a and 181b is consumed and reaches a predetermined weight. Instead of the weight measuring device 182, an alarm may be issued by a liquid level detection sensor or a bubble detection sensor.

  The upstream functional fluid channel 126 includes a first main channel 131a having an upstream side connected to the first main tank 181a, and a first branch channel (the first main channel 131a having an upstream side connected to the first main channel 131a and dividing the channel into ten branches ( (Manifold) 132a and a first tank side channel 134a composed of ten first branch channels 133a whose upstream side is connected to the first branch channel 132a, and a second main stream whose upstream side is connected to the second main tank 181b. 10 second branch flows having a path 131b, an upstream side connected to the second main channel 131b, a second branch channel (manifold) 132b that branches the channel into 10 branches, and an upstream side connected to the second branch channel 132b The second tank side flow path 134b formed of the path 133b and the upstream side are connected to the merging portion 135 of the correlated first branch flow path 133a and second branch flow path 133b, and the downstream side is connected to the ten sub tanks 121. It includes a merge channel 136 of ten which is continued, the. The functional liquid supplied from the first main tank 181a is divided into ten directions by the first branch flow path 132a, and is supplied to the ten sub tanks 121 via the ten merge flow paths 136. On the other hand, the functional liquid supplied from the second main tank 181b is divided into 10 directions by the second branch flow path 132b, and is supplied to the 10 sub tanks 121 via the 10 merge flow paths 136. In addition, the individual flow path referred to in the claims is a flow path (the merge flow path 136, the sub tank 121, and the downstream functional liquid flow located on the downstream side of the merge portion 135 of the first branch flow path 133a and the second branch flow path 133b. The head side flow path referred to in the claims indicates these 10 sets of individual flow paths.

  The first main channel 131a and the second main channel 131b are respectively provided with a first on-off valve 138, a bubble removal unit 139, a second on-off valve 140, an air vent unit 141, and a third on-off valve 142 from the upstream side. Has been. Further, 10 sets of channel switching mechanisms (channel switching means) 143 are provided at the junction 135 of each of the first branch channels 133a and each of the second branch channels 133b so as to serve as the above-described junction channel 136. Has been. Further, the fourth on-off valve 144 is interposed in the vicinity of the sub-tank 121 of the 10 merging flow paths 136.

  Each of the downstream functional liquid channels 127 includes a head-side main channel 146 whose upstream side is connected to each sub-tank 121, a four-branch channel 147 whose upstream side is connected to the head-side main channel 146, and a four-branch flow upstream. And a plurality of head side branch channels 148 connected to the path 147. Thereby, the functional liquid is divided into four directions from each sub tank 121 and supplied to the respective functional liquid droplet ejection heads 17. As a result, the functional liquid is supplied to 10 × 4 functional liquid droplet ejection heads 17. In addition, since the functional liquid supply unit 7 has three sets of functional liquid supply devices 101 of R, G, and B, the functional liquid is supplied to 10 × 12 functional liquid droplet ejection heads 17. Further, a fifth on-off valve 149 and a pressure reducing valve 150 are interposed in the head side main flow path 146.

  The above-described vacuum equipment 89 is connected to each bubble removing unit 139, and the internal channel separated by the gas permeable membrane is evacuated, and the bubbles are transmitted from the functional fluid in the internal channel through the gas permeable membrane. To remove. Since the bubble removing unit 139 is a consumable item, it is preferable to prepare a spare bubble removing unit 139 so that replacement can be performed quickly (see FIG. 6).

  Each air vent unit 141 includes an air vent joint 155 interposed in each of the first and second main flow paths 131 a and 131 b, an air vent valve 157 including an on-off valve and a bubble detection sensor, and an air connected to the air vent valve 157. A drain passage 156. Each air vent channel 156 merges on the downstream side, and a liquid storage tank 158 is connected to the downstream end thereof. The air vent unit 141 functions when the functional fluid supply apparatus 101 is initially filled with the functional fluid, and opens the air vent valve 157 when the functional fluid is fed from the main tanks 181a and 181b. The third on-off valves 142 and 142 are closed to discharge the air in the main flow paths 131a and 131b. Then, when the air vent valve 157 detects air bubbles (after a while), the air vent valve 157 is closed and the third on-off valve 142 is opened to end the air vent. When the functional liquid flowing down to the liquid storage tank 158 is reused, the number of the liquid storage tanks 158 is three corresponding to each color, and when not reused, the number of the liquid storage tanks 158 is one.

  Each flow path switching mechanism 143 includes a three-way valve 161, and is configured to be able to switch the supply of the functional liquid to either the first main tank 181a or the second main tank 181b. The flow path switching mechanism 143 switches the supply of the pair of main tanks 181a and 181b, and when it is determined that one of the main tanks needs to be replaced, supplies the other main tank. During this period, one main tank is exchanged to keep supplying the functional liquid without stopping the operation of the droplet discharge device 1. In this way, by configuring each flow path switching mechanism 143 with the three-way valve 161, each flow path switching mechanism 143 can be configured with a simple configuration, and supply switching (flow path switching) of functional liquid can be performed. It can be done easily. Although details will be described later, each flow path switching mechanism 143 is individually controlled by the control unit 197.

  In addition, each flow path switching mechanism 143 (three-way valve 161) is replaced when the main tank that needs to be replaced is replaced (for example, from the first main tank 181a in the liquid reduction state to the main tank 181a in the full liquid state). The first and second tank-side flow paths 134a and 134b are connected to a pair of drain valves 172a and 172b, respectively, for extracting the functional liquid from the main tank before replacement. The liquid storage tank 158 is connected to the downstream side of the pair of drain valves 172a and 172b via the waste liquid passages 171a and 171b. For example, when the first main tank 181a is replaced and the functional liquid in the first tank side flow path 134a is discharged, the waste liquid valve 172a is opened while the replaced first main tank 181a is pressurized. . As a result, the functional liquid is supplied from the first main tank 181a after the replacement, and the functional liquid in the first main tank 181a before the replacement is pushed to the liquid storage tank 158 via each first waste liquid channel 171a. Thereafter, until the functional liquid in the first main tank 181a before replacement in the first tank side flow path 134a is replaced with the functional liquid in the first main tank 181a after replacement (timer control), the process waits to close the waste liquid valve 172a. I speak. By performing such waste liquid treatment, the above-described flow path switching is filled in the tank-side flow paths 134a and 134b with the functional liquids in the first and second main tanks 181a and 181b after replacement. Can be done in the state.

  The pressure reducing valve 150 operates on the basis of atmospheric pressure and maintains the water head value with the corresponding functional liquid droplet ejection head 17 within a predetermined allowable range. By using the pressure reducing valve 150, the water head value of the functional liquid on the nozzle surface 97 of the functional liquid droplet ejection head 17 can be managed with high accuracy.

  The sub tank 121 stores the functional liquid supplied to each of the four functional liquid droplet ejection heads 17. The sub tank 121 has a liquid level detection mechanism that detects the liquid level of the stored functional liquid, and supplies the functional liquid while maintaining the liquid level at a constant height. When the liquid level of the functional liquid drops to the lower limit liquid level due to the ejection driving of the functional liquid droplet ejection head 17, the fourth on-off valve 144 is opened to open the tank unit 122 (the first main tank 181a or the second main tank 181a). When the functional liquid is supplied from the main tank 181b) and the liquid level of the functional liquid rises to the upper limit liquid level due to the supply from the tank unit 122, the fourth on-off valve 144 is closed and the supply from the tank unit 122 is stopped. .

  Next, the main control system of the droplet discharge device 1 will be described with reference to FIG. As shown in the figure, the droplet discharge device 1 includes a droplet discharge unit 191 having a head unit 13 (functional droplet discharge head 17) and an X-axis table 11, and moves a workpiece W in the X-axis direction. A work moving unit 192 for moving the head unit 13 and moving the head unit 13 in the Y-axis direction, a maintenance unit 194 having units for maintenance means, and a functional liquid supply unit 7. A functional liquid supply unit 198 that supplies a functional liquid to the functional liquid droplet ejection head 17, a detection unit 195 that includes various sensors and performs various detections, and a drive unit 196 that includes various drivers that drive and control the respective units. And a control unit (control means) 197 that is connected to each unit and controls the entire droplet discharge device 1.

  The control unit 197 includes an interface 201 for connecting each means, a storage area that can be temporarily stored, a RAM 202 that is used as a work area for control processing, and various storage areas. ROM 203 for storing control programs and control data; drawing data for drawing a predetermined drawing pattern on the work W; various data from each means; and a program for processing various data A hard disk 204, a CPU 205 that performs arithmetic processing on various data according to programs stored in the ROM 203 and the hard disk 204, and a bus 206 that connects them to each other.

  The control unit 197 inputs various data from each unit via the interface 201 and causes the CPU 205 to perform arithmetic processing according to a program stored in the hard disk 204 (or sequentially read by a CD-ROM drive or the like). The processing result is output to each means via the drive unit 196 (various drivers). Thereby, the whole apparatus is controlled and various processes of the droplet discharge apparatus 1 are performed.

  Here, the operation of supplying the functional liquid to the functional liquid droplet ejection head 17 will be described. This operation is performed in a state where the functional liquid is stored in the main tanks 181a and 181b and the sub tanks 121 and the functional liquid is filled in the flow paths. Here, the case where the functional liquid of the first main tank 181a is supplied will be described. Therefore, at least the first main tank 181a is pressurized by the nitrogen gas supply facility 85, and each first tank side flow path 134a is provided in each merging flow path 136 by the flow path switching mechanism 143 (three-way valve 161). It is assumed that the flow path is connected.

  First, in the state where the fourth on-off valve 144 provided upstream of the sub tank 121 is closed, the functional liquid droplet ejection head 17 is driven to eject functional liquid droplets. Since the fourth on-off valve 144 is closed, the sub tank 121 is pressure-cut from the first main tank 181a (the sub tank 121 is open to the atmosphere), and the pump action of the functional liquid droplet ejection head 17 The functional liquid is sent from each sub tank 121 to each functional liquid droplet ejection head 17. The water head value on the nozzle surface 97 of the functional liquid droplet ejection head 17 is finally adjusted by the pressure reducing valve 150 provided in the downstream functional liquid flow path 127.

  Next, replenishment of the functional liquid to the sub tank 121 will be described. When the functional liquid in the sub-tank 121 decreases by a certain amount and reaches the lower limit liquid level by the ejection operation of the functional liquid droplet ejection head 17, it is determined that the liquid is in a liquid-reduced state. When it is determined that the liquid is reduced, the fourth on-off valve 144 is opened to replenish the functional liquid from the first main tank 181a to the sub tank 121. Since the first main tank 181 a is pressurized, the functional liquid in the first main tank 181 a is automatically sent to the sub tank 121 by opening the fourth on-off valve 144. At this time, the ejection operation of the functional liquid droplet ejection head 17 is continuously performed.

  When the functional liquid is fed from the first main tank 181a to the sub tank 121 and a certain amount of the functional liquid is stored in the sub tank 121, it is determined that the sub tank 121 is in a full state. If it is determined that the liquid is full, the fourth on-off valve 144 is closed and the replenishment operation is terminated.

  Next, the coping process when the functional liquid is reduced in the first main tank 181a will be described. When the replenishment operation from the first main tank 181a to the sub tank 121 is repeated, the functional liquid in the first main tank 181a is reduced, and the corresponding weight measuring device 182 determines that the first main tank 181a is in a liquid reduction state. The When it is determined that the first main tank 181a is in the liquid-reduced state, the supply is switched from the first main tank 181a to the second main tank 181b, and the second main liquid is switched from the old functional liquid supplied from the first main tank 181a. A supply switching operation for switching the supply to the new functional liquid supplied from the tank 181b is performed. While the supply from the second main tank 181b is being performed, the first main tank 181a in the reduced liquid state is replaced with the first main tank 181a in the full liquid state. Thereby, the drawing process of the workpiece | work W can be performed continuously, without stopping an apparatus. In addition, when the second main tank 181b is in a liquid reduction state, the supply switching operation from the second main tank 181b to the first main tank 181a is similarly performed.

  By the way, in the supply switching operation of the first main tank 181a and the second main tank 181b, when the flow paths are simply switched simultaneously by the plurality of flow path switching mechanisms 143, a head unit that consumes a large amount of functional liquid per unit time. 13 and the head unit 13 that consumes less functional liquid per unit time cause a difference in the arrival timing of the new functional liquid (see FIG. 8A). Therefore, here, the supply switching operation for solving such a problem (that is, without causing a difference in arrival timing in each head unit 13) will be described in detail. The supply switching operation is performed based on a control table configured on the control unit 197 (strictly, on the ROM 203 and the hard disk 204) in order to control the plurality of flow path switching mechanisms 143. Each timer control is performed based on an internal clock provided in the control unit 197.

  In the supply switching operation, the new functional liquid is introduced to the flow path switching mechanism 143 as described above, and then the plurality of flow path switching mechanisms 143 are individually controlled by the control unit 197 and each flow path switching is performed. This is done by switching the supply by shifting the timing by the mechanism 143. These timings are set based on the arrival time of the functional liquid from the flow path switching mechanism 143 to the head unit 13 in each head unit 13 (four functional liquid droplet ejection heads 17) obtained in advance by experiments. Is done. That is, in the head unit 13 having a long arrival time, the supply is switched at an early timing, and in the head unit 13 having a short arrival time, the supply is switched at a later timing. Strictly speaking, the switching timing is delayed by the difference in arrival times between the plurality of head units 13. The two head units 13 will be described with a specific example to be more strict. When the arrival time in one head unit 13 is 60 minutes and the arrival time in the other head unit 13 is 30 minutes, the difference Is 30 minutes, therefore, after switching the supply to one head unit 13, the supply switching to the other head unit 13 is performed with a delay of 30 minutes (see FIG. 9). The arrival time is obtained from the functional liquid consumption (discharge amount, etc.) per unit time of the plurality of head units 13 (the four functional liquid droplet ejection heads 17) and the flow path capacity to the head unit 13. .

  As described above, as a result of shifting the switching timing, as shown in FIG. 8B and FIG. 10, the new functional liquid can be reached (supplied) at the same timing in the introduction of the plurality of head units 13. That is, a plurality of flow path switching mechanisms are arranged so that the new functional liquid supplied from the second main tank 181b by the control unit 197 reaches the plurality of head units 13 (four functional liquid droplet ejection heads 17) simultaneously. By individually controlling 143, the arrival timing of the new functional liquid can be made the same in each head unit 13. Therefore, the new and old functional liquids can be shifted simultaneously in the introduction of the functional liquid into the plurality of head units 13, and the drawing process can always be performed with the functional liquid having the same property. As a result, high drawing quality for the workpiece W can be maintained.

  In the present embodiment, the flow path switching of each flow path switching mechanism 143 is controlled based on the control table obtained from the experimental data. For example, when the liquid reduction state is determined, The flow rate per unit time is measured by a flow rate detection sensor or the like provided in the flow channel 136, the arrival time is calculated from the measurement result, and used for the flow channel switching control of each flow channel switching mechanism 143. You can do it. However, in the present embodiment, by using the control table, the flow path can be easily switched, and the flow path can be switched with high accuracy.

  The difference in arrival time between the plurality of head units 13 varies depending on the drawing pattern used for the drawing process. Therefore, the control unit 197 rewrites the control table based on the drawing pattern (print image). That is, the channel switching corresponding to a plurality of drawing patterns can be easily performed by rewriting the control table corresponding to the drawing pattern so as to correspond to the drawing pattern used in the drawing process. Further, the rewriting means referred to in the claims is constituted by the control unit 197 as described above.

  Next, with reference to FIG. 11, a different part is mainly demonstrated about the functional liquid supply apparatus 101 which concerns on 2nd Embodiment of this invention. In this embodiment, the flow path switching mechanism 143 includes a first electric valve 162 interposed in the first branch flow path 133a and a second electric valve 163 interposed in the second branch flow path 133b. When supplying the first main tank 188a, the first electric valve 162 is opened 100%, and the second electric valve 163 is opened 0% (closed). When supplying the second main tank 181b, the first electric valve 162 is opened by 0% (closed), and the second electric valve 163 is opened by 100%. Further, when supplying a mixed liquid obtained by mixing the new functional liquid and the old functional liquid, for example, the first electric valve 162 is opened by 50% and the second electric valve 163 is opened by 50%. In this case, a functional liquid mixed by 50% is supplied.

  In the supply switching operation, at the above switching timing, the mixing ratio of the functional liquid supplied by the electric valves 162 and 163 is changed over time from 0% to 100%, and the supply is switched from the old functional liquid to the new functional liquid. . Actually, control is performed so that the point at which the mixing ratio is 50% or 50% becomes the switching timing of the first embodiment. As described above, the mixing valve that changes the mixing ratio with respect to the old functional liquid from 0% to 100% with time can be achieved even when a slight deviation occurs in the arrival timing of the new functional liquid. Since the functional liquid is a mixture of the old and new functional liquids, the difference between the old and new properties can be alleviated. In addition, each mixing valve is configured by a pair of electric valves 162 and 163, whereby each mixing valve can be configured with a simple configuration, and opening / closing control of each mixing valve can be easily performed.

  According to the above configuration, the new functional liquid supplied from the second main tank 181b by the control unit 197 reaches the plurality of head units 13 (four functional liquid droplet ejection heads 17) at the same time. By individually controlling the plurality of flow path switching mechanisms 143, the arrival timing of the new functional liquid can be made the same in each head unit 13. Therefore, the new and old functional liquids can be shifted simultaneously in the introduction of the functional liquid into the plurality of head units 13, and the drawing process can always be performed with the functional liquid having the same property. As a result, high drawing quality for the workpiece W can be maintained.

  In the present embodiment, a device including the droplet discharge device 1 including ten carriage units 51 is used, but the number of carriage units 51 is arbitrary.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 12 is a flowchart showing the manufacturing process of the color filter, and FIG. 13 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 13B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 13C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 13 (d), functional droplets are ejected by the functional droplet ejection head 17, and each pixel region 507a surrounded by the partition wall portion 507b is placed. Make it land. In this case, the functional liquid droplet ejection head 17 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. When the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. 13E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 14 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 13, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 14 are formed at predetermined intervals. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 17. Further, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 17.

FIG. 15 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 16 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 17 is a cross-sectional view of a main part of a display area of an organic EL device (hereinafter simply referred to as a display device 600).

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 18, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 19, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film using a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using oxygen as a treatment gas, for example. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b. )
By performing this surface treatment process, when forming the functional layer 617 using the functional liquid droplet ejection head 17, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 21 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 21, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 17 to each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 22, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 23, the second composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 23) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, the second composition after discharge is dried by performing a drying process and the like, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 24, the hole injection / transport layer 617a is dried. A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 17, as shown in FIG. 25, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 26, the cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
At the top of the cathode 604, Al film as the electrode, Ag film and a protective layer of SiO _2, SiN, or the like for its antioxidant is appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 27 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 21 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 17. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 17, and it corresponds. Land in the color discharge chamber 705.

Next, FIG. 28 is a cross-sectional view of an essential part of an electron emission device (also referred to as FED device or SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  A first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed on the upper surface of the first substrate 801 so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 that is formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 29A, and when these are formed, as shown in FIG. 29B. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a perspective view of the droplet discharge device concerning an embodiment. It is a top view of a droplet discharge device. It is a side view of a droplet discharge device. It is a figure of the functional droplet discharge head which comprises a head group. It is an external appearance perspective view of a functional droplet discharge head. It is a piping system diagram of a functional liquid supply device. It is the block diagram explaining the main control system of the droplet discharge apparatus. It is the figure shown about the arrival timing in normal supply switching and supply switching of this embodiment. It is the schematic diagram which showed the specific example about the supply switching operation | movement of two head units. It is a schematic diagram explaining the supply switching operation. It is a piping system diagram of the functional fluid supply apparatus according to the second embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

1: droplet ejection device, 12: Y-axis table, 13: head unit, 17: functional droplet ejection head, 51: carriage unit, 101: functional liquid supply device 121: sub tank, 122: tank unit, 127: downstream side Functional liquid channel 131a: first main channel 131b: second main channel 133a: first branch channel 133b: second branch channel 134a: first tank side channel 134b: second tank side Flow path, 135: Merge section, 136; Merge flow path, 143: Flow path switching mechanism, 161: Three-way valve, 162: First electric valve, 163: Second electric valve, 181a: First main tank, 181b: First 2 main tanks, 197: control unit, W: work

Claims (10)

A functional liquid supply apparatus that is provided in an ink jet type liquid droplet ejection apparatus that performs drawing on a workpiece, and that supplies a functional liquid to each of the plurality of head units, with a head unit including one or more functional liquid droplet ejection heads as a supply unit Because
A tank unit that continuously supplies functional liquids to the plurality of head units by using old and new functional liquid tanks that are exchanged through repeated use;
A first main channel connected to the old and new functional liquid tank, and a first tank side channel comprising a plurality of first branch channels branched from the first main channel according to the number of the head units;
A second main channel connected to the old and new functional fluid tank, and a second tank side channel comprising a plurality of second branch channels branched from the second main channel in accordance with the number of the head units;
A head side composed of a plurality of individual channels connected to the joining portion of each of the correlated first branch channels and the second branch channels on the upstream side, and connected to the plurality of head units on the downstream side. A flow path;
The functional liquid flowing in each individual flow path is switched between the old functional liquid and the new functional liquid via each of the first branch flow paths and each of the second branch flow paths. A plurality of flow path switching means;
Control means for individually controlling the plurality of flow path switching means,
The functional liquid supply apparatus, wherein the control means individually controls the plurality of flow path switching means so that the new functional liquid reaches the plurality of head units simultaneously.   The functional fluid supply device according to claim 1, wherein each of the flow path switching units includes a three-way valve.   2. The function according to claim 1, wherein each of the flow path switching units is configured by a mixing valve that changes a mixing ratio of the new functional liquid with respect to the old functional liquid from 0% to 100% over time. Liquid supply device.   4. Each of the mixing valves includes a first electric valve interposed in each of the first branch flow paths and a second electric valve interposed in each of the second branch flow paths. The functional liquid supply device described in 1.   5. The functional liquid supply device according to claim 1, wherein the control unit individually controls the plurality of flow path switching units based on a control table obtained in advance by an experiment.   6. The functional liquid supply apparatus according to claim 5, wherein the control means includes rewriting means for rewriting data in the control table based on a drawing pattern for a workpiece.   A droplet discharge device comprising the functional liquid supply device according to claim 1. Each head unit is equipped with a plurality of functional liquid droplet ejection heads,
The liquid droplet ejection according to claim 7, further comprising: a plurality of carriage units on which the head units are mounted; and a moving table that individually moves the plurality of carriage units in a sub-scanning direction. apparatus.   9. A method of manufacturing an electro-optical device, wherein the droplet discharge device according to claim 7 or 8 is used to form a film forming portion with functional droplets on the workpiece.   9. An electro-optical device, wherein the droplet discharge device according to claim 7 or 8 is used, and a film-forming unit made of functional droplets is formed on the workpiece.

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