JP2008238128A - Sub-tank unit, liquid droplet discharge device, method of manufacturing electrooptical device, electrooptical device and electronic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sub-tank unit capable of absorbing the pulsation of a functional liquid produced on the downstream side. <P>SOLUTION: A sub-tank 121 is constituted so as not only to receive the replenishment of the functional liquid from a main tank 181 through an upstream functional liquid flow channel 126 but also to supply the functional liquid to an ink jet type functional liquid droplet discharge head 17 and equipped with a sub-tank body 171 for storing the functional liquid and a control part 197 for controlling the liquid level at the time of replenishment of the functional liquid of the sub-tank body 171 to an vertically intermediate position. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention receives a functional liquid supply from a main tank via a functional liquid flow path, and supplies a functional liquid to an ink jet type functional liquid droplet ejection head, and manufacture of an electro-optical device The present invention relates to a method, an electro-optical device, and an electronic apparatus.

Conventionally, a sub-tank unit of this type includes a tank body that stores functional liquid and a liquid level control unit that controls the liquid level when the tank body is replenished with functional liquid (Patent Document 1). reference). The functional liquid from the main tank is pumped into the sub tank unit, and the functional liquid is supplied to the sub tank unit by opening a valve provided in front of the sub tank unit. On the other hand, the liquid level control means has an upper limit sensor and a lower limit sensor, and maintains the liquid level of the sub tank unit between the two sensors, thereby managing the water head value with the functional liquid droplet ejection head, The discharge amount is stabilized.
JP 2003-266673 A

  In such a conventional sub tank unit, the upper limit sensor is disposed at a position higher than the middle position in the vertical direction, and the lower limit sensor is disposed at a lower position. The upper space becomes narrower and the gas volume becomes smaller. For this reason, if pulsation occurs when the valve is opened for replenishing the functional liquid, there is a problem that the damper effect of the upper space cannot be expected and is transmitted to the functional liquid droplet ejection head via the sub tank unit. When the pulsation of the functional liquid is propagated to the functional liquid droplet ejection head, the ejection of the functional liquid droplet ejection head is not stable, and defective ejection occurs.

  It is an object of the present invention to provide a sub tank unit and a droplet discharge device that can absorb pulsation of a functional liquid generated on the downstream side, a method for manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus.

  The sub-tank unit of the present invention receives the functional liquid from the main tank via the functional liquid flow path, and supplies the functional liquid to the ink-jet functional liquid droplet ejection head. And a liquid level control means for controlling the liquid level at the time of replenishment of the functional liquid in the tank body to the upper and lower intermediate position.

  According to this configuration, the tank main body has a sufficient gas capacity in its substantially upper half by controlling the liquid level when supplying the functional liquid to the tank main body to the upper and lower intermediate position. The pulsation of the functional liquid generated on the downstream side is absorbed by the gas space having approximately half the capacity of the tank body. That is, the gas space becomes a so-called air damper and can absorb the pulsation of the functional liquid. Thereby, it is possible to suppress the pulsation from being transmitted to the upstream side of the tank body, in particular, to the functional liquid droplet ejection head, and it is possible to suppress the ejection failure of the functional liquid droplet ejection head.

  In this case, a long ventilation tube having one end communicating with the upper space of the tank body and the other end opened to the atmosphere, and a tube opening / closing valve disposed on the atmosphere opening end side of the ventilation tube are further provided. Is preferred.

  According to this configuration, even when the pulsation of the functional liquid propagates in the open air state and the gas space fluctuates, this pressure fluctuation escapes to the outside of the tank body due to the pressure loss of the long ventilation tube. There is no end. For this reason, the pressure fluctuation due to pulsation can be efficiently absorbed by the gas space without impairing the air release function, and the pulsation of the functional liquid can be further suppressed.

  In this case, a flow path opening / closing valve is interposed in the functional liquid flow path in the vicinity of the upstream side of the tank body, and the flow path opening / closing valve is composed of an air operated valve that can open and close the functional liquid flow path without volume change. It is preferable that

  According to this configuration, it is possible to suppress the pulsation of the functional liquid that occurs during the opening / closing operation. Moreover, by using an air operated valve, the temperature rise of the functional liquid that passes through the valve can be suppressed.

  In this case, the tank body preferably has a drop lid-like float.

  According to this configuration, the contact area between the liquid level in the functional liquid in the tank and the gas in the tank can be reduced by the drop lid-like float. Therefore, it is possible to further suppress the bubbles from being dissolved in the functional liquid in the tank. Further, it is possible to suppress the shaking and undulation of the liquid surface as much as possible, and to prevent the generation of bubbles and the change of the head, that is, the generation of pulsation in the tank body.

  In this case, the head side flow path connecting the tank body and the functional liquid droplet ejection head, and the head side flow path, which operates on the basis of the atmospheric pressure and sets the water head value between the functional liquid droplet ejection head to a predetermined value. It is preferable to further comprise a pressure reducing valve that maintains the allowable range.

  According to this configuration, by using the pressure reducing valve, it is possible to absorb pulsation and accurately manage the water head value of the functional liquid on the nozzle surface of the functional liquid droplet ejection head.

  The liquid droplet ejection apparatus of the present invention includes a drawing means for performing drawing by ejecting a functional liquid droplet from a functional liquid droplet ejection head while moving the functional liquid droplet ejection head of an ink jet type with respect to a work, and a functional liquid droplet ejection And a sub-tank unit for supplying a functional liquid to the head.

  According to this configuration, the drawing process can be performed with high accuracy by including the sub tank unit that can suppress the ejection failure of the functional liquid droplet ejection head.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming unit made of functional droplets is formed on a workpiece using the above-described droplet discharge device.

  An electro-optical device according to the present invention is characterized in that a film forming unit using functional droplets is formed on a workpiece using the above-described droplet discharge device.

  According to this configuration, a high-quality electro-optical device can be efficiently manufactured. In addition, as a functional material, the light emitting material (Electro-Luminescence light emitting layer / hole injection layer) of the organic EL device, the filter material (filter element) of the color filter used for the liquid crystal display device, the electron emission device (Field Emission) Display, FED) fluorescent material (phosphor), fluorescent material (phosphor) of PDP (plasma display panel) device, electrophoretic material (electrophore) of electrophoretic display device, etc. A liquid material that can be discharged by an inkjet head). Examples of the electro-optical device (Flat Panel Display, FPD) include an organic EL device, a liquid crystal display device, an electron emission device, a PDP device, and an electrophoretic display device.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described method for manufacturing the electro-optical device or the above-described electro-optical device.

  In this case, examples of the electronic device include a mobile phone and a personal computer equipped with a so-called flat panel display, and various electric products.

  Hereinafter, a droplet discharge device to which a sub tank unit of the present invention is applied will be described with reference to the accompanying drawings. This droplet discharge device is incorporated in a flat panel display production line, and uses, for example, a function droplet discharge head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced, and the color of a liquid crystal display device A light emitting element or the like to be used for each pixel of a filter or an organic EL device is formed.

  As shown in FIGS. 1, 2 and 3, the droplet discharge device 1 is disposed on an X-axis support base 2 supported by a stone surface plate and extends in the X-axis direction which is the main scanning direction. The X-axis table 11 that moves the workpiece W in the X-axis direction (main scanning direction) and a pair (two) of Ys that are spanned across the X-axis table 11 via a plurality of columns 4 Eight carriage units 51 mounted on the shaft support base 3 and mounted with a Y-axis table 12 extending in the Y-axis direction, which is the sub-scanning direction, and a plurality of functional liquid droplet ejection heads 17 (not shown). The eight carriage units 51 are suspended from the Y-axis table 12. Further, the droplet discharge device 1 includes a chamber 6 that accommodates these devices in an atmosphere in which temperature and humidity are controlled, and a functional droplet discharge head 17 that passes through the chamber 6 from the outside of the chamber 6 to the inside. And a functional liquid supply unit 7 having three sets of functional liquid supply devices 101 for supplying the functional liquid. The functional liquid droplet discharge head 17 is driven to discharge in synchronization with the driving of the X-axis table 11 and the Y-axis table 12, thereby discharging the R, G, B three-color functional liquid droplets supplied from the functional liquid supply unit 7. A predetermined drawing pattern is drawn on the workpiece W. The drawing means described in the claims is composed of an X-axis table 11, a Y-axis table 12, and eight carriage units 51.

  The droplet discharge device 1 includes a maintenance device 5 including a flushing unit 14, a suction unit 15, a wiping unit 16, and a discharge performance inspection unit 18, and these units are used for maintenance of the functional droplet discharge head 17. The function of the functional liquid droplet ejection head 17 is maintained and recovered. Of the units constituting the maintenance device 5, the flushing unit 14 and the discharge performance inspection unit 18 are mounted on the X-axis table 11, and the suction unit 15 and the wiping unit 16 extend from the X-axis table 11 at a right angle, In addition, the Y-axis table 12 is disposed on a pedestal disposed at a position where the carriage unit 51 can move (strictly speaking, the discharge performance inspection unit 18 includes a stage unit 77 which will be described later, the X-axis table 11. The camera unit 78 is supported by the Y-axis support base 3).

  The flushing unit 14 includes a pair of pre-drawing flushing units 71 and 71 and a regular flushing unit 72, and is performed immediately before ejection of the functional liquid droplet ejection head 17 or when drawing work is suspended such as when the workpiece W is replaced. Then, the functional liquid droplet ejection head 17 is subjected to the discarded ejection (flushing). The suction unit 15 includes a plurality of divided suction units 74 and forcibly sucks the functional liquid from the discharge nozzle 98 of each functional liquid droplet discharge head 17 and performs capping. The wiping unit 16 has a wiping sheet 75 and wipes the nozzle surface 97 of the functional liquid droplet ejection head 17 after suction. The ejection performance inspection unit 18 includes a stage unit 77 on which an inspection sheet 83 that receives functional droplets ejected from the functional droplet ejection head 17 is mounted, and a camera unit 78 that inspects functional droplets on the stage unit 77 by image recognition. The ejection performance (the presence or absence of ejection and the flight curve) of the functional liquid droplet ejection head 17 is inspected.

  Next, components of the droplet discharge device 1 will be briefly described. As shown in FIG. 2 or FIG. 3, the X-axis table 11 includes a set table 21 for setting a work W, an X-axis first slider 22 for slidably supporting the set table 21 in the X-axis direction, and the flushing described above. An X-axis second slider 23 that supports the unit 14 and the stage unit 77 slidably in the X-axis direction, and extends in the X-axis direction, and the set table 21 (work W) is moved through the X-axis first slider 22 to the X A pair of left and right X-axis linear motors (not shown) that move in the axial direction and move the flushing unit 14 and the stage unit 77 in the X-axis direction via the X-axis second slider 23, and parallel to the X-axis linear motor A pair of (two) X-axis common support bases 24 for guiding the movement of the X-axis first slider 22 and the X-axis second slider 23. That.

  The set table 21 includes a suction table 31 for sucking and setting the work W, and a θ table 32 for supporting the suction table 31 and correcting the position of the work W set on the suction table 31 in the θ-axis direction. Yes. The pre-drawing flushing unit 71 is attached to each of a pair of sides parallel to the Y-axis direction of the set table 21.

  The Y-axis table 12 includes eight bridge plates 52 each having eight carriage units 51 suspended therein, eight sets of Y-axis sliders (not shown) that support the eight bridge plates 52 in both ends, and A pair of Y-axis linear motors (not shown) are provided on the pair of Y-axis support bases 3 and move the bridge plate 52 in the Y-axis direction via eight sets of Y-axis sliders. Further, the Y-axis table 12 sub-scans the functional liquid droplet ejection head 17 at the time of drawing via each carriage unit 51, and the functional liquid droplet ejection head 17 is exposed to the maintenance device 5 (the suction unit 15 and the wiping unit 16). I will.

  When the pair of Y-axis linear motors are driven (synchronously), each Y-axis slider translates in the Y-axis direction simultaneously with the pair of Y-axis support bases 3 as a guide. As a result, the bridge plate 52 moves in the Y-axis direction, and the carriage unit 51 moves in the Y-axis direction at the same time. In this case, by controlling the drive of the Y-axis linear motor, each carriage unit 51 can be moved independently and individually, or the eight carriage units 51 can be moved together. It is.

  Further, on both sides of the Y-axis table 12, a cable carrier 81 is disposed in parallel with the Y-axis table 12. One end of each cable carrier 81 is fixed to the Y-axis support base 3 and the other end is fixed to one of the bridge plates 52. The cable carrier 81 accommodates cables for each carriage unit 51, air tubes, functional liquid flow paths (downstream functional liquid flow paths 127 described later), and the like.

  Each carriage unit 51 includes a head unit 13 including twelve functional liquid droplet ejection heads 17 and a carriage plate 53 that supports the twelve functional liquid droplet ejection heads 17 in two groups. (See FIG. 4). Further, each carriage unit 51 supports the head unit 13 via the θ rotation mechanism 61 that supports the head unit 13 so as to be capable of θ correction (θ rotation), and the Y axis table 12 (each bridge plate 52) via the θ rotation mechanism 61. And a suspension member 62 to be supported on. In addition, each carriage unit 51 is provided with a sub tank 121 described later (actually disposed on the bridge plate 52), and the functional liquid is supplied from the sub tank 121 to each functional liquid droplet ejection head 17. Is to be supplied.

  As shown in FIG. 5, the functional liquid droplet ejection head 17 is a so-called double type, a functional liquid introduction unit 91 having two connection needles 92, and a dual head substrate that is continuous with the functional liquid introduction unit 91. 93, and a head main body 94 which is connected to the lower side of the functional liquid introducing portion 91 and has an in-head flow path filled with the functional liquid therein. The connection needle 92 is connected to the functional liquid supply unit 7 and supplies the functional liquid to the functional liquid introduction unit 91. The head main body 94 includes a cavity 95 (piezoelectric piezoelectric element) and a nozzle plate 96 having a nozzle surface 97 in which a large number of discharge nozzles 98 are opened. When the functional liquid droplet ejection head 17 is driven to eject (a voltage is applied to the piezoelectric element), functional liquid droplets are ejected from the ejection nozzle 98 by the pump action of the cavity 95.

  In addition, two nozzle rows 98b made up of a large number of discharge nozzles 98 are formed on the nozzle surface 97 in parallel with each other. The two nozzle rows 98b are displaced from each other by a half nozzle pitch.

  The chamber 6 is configured to keep the internal temperature and humidity constant. That is, the drawing on the workpiece W by the droplet discharge device 1 is performed in an atmosphere in which the temperature and humidity are controlled to be constant values. A tank cabinet 84 for storing a main tank unit 122 described later is provided on a part of the side wall of the chamber 6. In the case of manufacturing an organic EL device or the like, the chamber 6 is preferably configured in an atmosphere of an inert gas (nitrogen gas).

  Next, the functional liquid supply unit 7 will be described with reference to FIG. 1 and FIGS. The functional liquid supply unit 7 includes three sets of functional liquid supply devices 101 corresponding to R, G, and B3 colors. The functional liquid supply unit 7 includes a nitrogen gas supply facility 85 that supplies compressed nitrogen gas for control of a main tank 181 and a sub-tank 121 that will be described later, and a compressed air supply that supplies compressed air for controlling various on-off valves. A facility 86, a gas exhaust facility 87 for exhausting gas from each part, and a vacuum facility 89 connected to a bubble removing unit 135 described later are provided. The three sets of functional liquid supply devices 101 are connected to the functional liquid droplet ejection heads 17 corresponding to the R, G, and B colors, respectively. Liquid is supplied.

  As shown in FIG. 6, each functional liquid supply device 101 includes eight main tank units 122 having two main tanks 181 and 181 constituting a functional liquid supply source, and eight corresponding to each carriage unit 51. A sub tank (sub tank unit) 121, a main tank unit 122, an upstream side functional liquid channel (functional liquid channel) 126 connecting the eight sub tanks 121, and each sub tank 121 and each functional liquid droplet ejection head 17 are connected. 8 sets of downstream functional liquid channels (head-side channels) 127.

  The functional liquid in each main tank 181 is connected to this and pressurized by compressed nitrogen gas from the nitrogen gas supply equipment 85, and selectively supplied to the eight sub tanks 121 via the upstream functional liquid flow path 126. The At that time, various open / close valves are controlled to open and close by the compressed air of the compressed air supply facility 86. At the same time, each sub tank 121 is opened to the atmosphere via the gas exhaust equipment 87 and receives a necessary amount of functional liquid. The functional liquid in each sub tank 121 is supplied to the functional liquid droplet ejection head 17 via the downstream functional liquid flow path 127 while maintaining a predetermined hydraulic head pressure by driving the functional liquid droplet ejection head 17 connected thereto. . Although details will be described later, compressed nitrogen gas is supplied to each sub-tank 121 by the nitrogen gas supply equipment 85 when the functional liquid is fed back from each sub-tank 121, while each main tank 181 is connected to the atmosphere via the gas exhaust equipment 87. Open (actually negative pressure control).

  The main tank unit 122 includes a pair of main tanks 181 and 181 serving as a functional liquid supply source, a pair of weight measuring devices 182 and 182 that respectively measure the weights of the pair of main tanks 181 and 181, and a pair of main tanks 181. , 181 and a switching mechanism 183 connected to the upstream functional liquid channel 126. Each main tank 181 is connected to a nitrogen gas supply equipment 85 and a gas exhaust equipment 87, and pressurization control when the functional liquid is pumped and negative pressure control when the functional liquid is fed back (corresponding to release to the atmosphere) ) Is configured to be possible.

  The switching mechanism 183 includes a pair of tank passages 186 and 186 connected to the pair of main tanks 181 and 181, and a pair of tank passages 186 and 186 connected to the upstream side, and an upstream functional liquid flow on the downstream side. A tank flow path joint 187 to which the path 126 is connected, and tank open / close valves 188 and 188 interposed in the tank flow paths 186 and 186, respectively. By opening one tank on-off valve 188 and closing the other tank on-off valve 188, the connection to the upstream side functional liquid channel 126 is alternately switched between the pair of main tanks 181 and 181. .

  The weight measuring device 182 is constituted by, for example, a load cell, and issues a warning for prompting replacement when the functional liquid in the main tank 181 is consumed and reaches a predetermined weight. Each of the tank channels 186 and 186 is provided with a bubble detection sensor 189 (consisting of two optical sensors). After one main tank 181 reaches a predetermined weight, this bubble detection is performed. When the sensor 189 detects bubbles, the flow path is switched to the other main tank 181 (automatic or manual). Instead of the weight measuring device 182, an alarm may be issued by a liquid level detection sensor or a bubble detection sensor.

  As described above, when the weight measuring device 182 and the bubble detection sensor 189 determine that one main tank 181 needs to be replaced, the connection to the upstream functional liquid channel 126 is made via the switching mechanism 183. By switching to the tank 181, the sub-tank 121 can be replenished by the other main tank 181. That is, even when one main tank 181 is replaced, the sub tank 121 can be continuously supplied by the other main tank 181.

  The upstream-side functional liquid channel 126 includes, from the upstream side, a main channel 131 whose upstream side is connected to the main tank unit 122, an 8-branch channel 132 whose upstream side is connected to the main channel 131, and an 8-branch channel on the upstream side. And eight branch channels 133 connected to the path 132 and connected to the sub tank 121 on the downstream side. The functional liquid supplied from the main tank unit 122 is divided into eight by the eight branch flow path 132 and is supplied to each sub tank 121.

  In addition, a bubble removing unit 135, a first on-off valve 136, an air vent unit 137, and a second on-off valve 138 are interposed in the main channel 131 from the upstream side. Each 8-branch flow path 132 is provided with a third open / close valve (flow path open / close valve) 139 located in the vicinity of each sub tank 121.

  Each downstream functional liquid channel 127 includes, from the upstream side, a head-side main channel 146 whose upstream side is connected to each sub tank 121, a four-branch channel 147 whose upstream side is connected to the head-side main channel 146, and an upstream side. And a plurality of individual channels 148 connected to the four-branch channels 147. As a result, the functional liquid branches from each sub tank 121 in four directions, and the respective functional liquid droplet ejection heads 17 are connected. That is, the functional liquid is supplied to the 8 × 4 functional liquid droplet ejection heads 17 by the eight branches of the upstream functional liquid channel 126 and the four branches of the downstream functional liquid channel 127. In addition, since the functional liquid supply unit 7 has three sets of functional liquid supply devices 101 of R, G, and B, the functional liquid is supplied to 8 × 12 functional liquid droplet ejection heads 17. Further, a fourth on-off valve 149 and a pressure reducing valve 150 are interposed in the head side main flow path 146.

  The above-described vacuum equipment 89 is connected to the bubble removal unit 135, and the internal flow passage separated by the gas permeable membrane is evacuated to allow the bubbles to permeate from the functional liquid in the internal flow passage through the gas permeable membrane. Remove. Since the bubble removal unit 135 is a consumable item, it is preferable to prepare a spare bubble removal unit 135 so that replacement can be performed quickly (see FIG. 6).

  The air vent unit 137 includes an air vent joint 155 provided in the main channel 131, an air vent valve 157 including an on-off valve and a bubble detection sensor, an air vent channel 156 connected to the air vent valve 157, and an air vent channel. And a liquid storage tank 158 provided at the downstream end of 156. The air vent unit 137 functions when the functional fluid supply apparatus 101 is initially filled with the functional fluid, and when the functional fluid is fed from the main tank 181, the air vent valve 157 is opened and the second open / close is opened. The valve 138 is closed and the air in the main flow path 131 is discharged. Then, when the air vent valve 157 detects air bubbles (a little time passes), the air vent valve 157 is closed and the second on-off valve 138 is opened to end the air vent. When the functional liquid flowing down to the liquid storage tank 158 is reused, the number of the liquid storage tanks 158 is three corresponding to each color, and when not reused, the number of the liquid storage tanks 158 is one.

  The third on-off valve 139 and the fourth on-off valve 149 provided in the vicinity of the upstream side and the downstream side of each sub-tank 121 are constituted by air operated valves that can be opened and closed without volume change, and are generated when the on-off valves are opened and closed. The pulsation of the functional fluid can be suppressed. For this reason, it is possible to suppress the pulsation from being transmitted to the functional liquid droplet ejection head 17, and to suppress ejection defects caused by the functional liquid droplet ejection head 17. In addition, it is preferable that these on-off valves are constituted by, for example, a diaphragm type air operated valve. As a result, the on-off valve can be opened and closed slowly, so that it can be easily opened and closed without volume change. Moreover, by using an air operated valve, in addition to the explosion-proof function, the temperature rise of the functional liquid passing through the on-off valve can be suppressed.

  The eight-branch flow path 132 is divided into three stages from the upstream end to the downstream end by two branches by a T-shaped joint 161 and a pair of connecting short pipes 162 connected to the downstream side of the T-shaped joint 161. It is configured repeatedly (see FIG. 8). The 8-branch channel 132 is arranged with the upstream side down and the downstream side up, and the functional liquid supplied from the main tank unit 122 flows from the bottom to the top.

  The 8-branch channel 132 has a T-shaped joint 161 belonging to the most upstream stage and a T-shaped joint 161 belonging to the most downstream stage and the pair of connecting short pipes 162 and 162 in order to minimize pressure loss. The pair of connecting short tubes 162 and 162 are formed with a large diameter.

  Moreover, it is preferable that the 4-branch channel 147 of each downstream functional liquid channel 127 has the same configuration as that of the 8-branch channel 132 described above. However, in this case, it is preferable that the upstream side of the four-branch channel 147 is on the upper side and the downstream side is on the lower side. Thereby, even if bubbles are mixed into the downstream functional liquid flow path 127, the bubbles are extracted to the sub tank 121 side.

  The pressure reducing valve 150 operates on the basis of atmospheric pressure and maintains the water head value with the corresponding functional liquid droplet ejection head 17 within a predetermined allowable range. By using the pressure reducing valve 150, the water head value of the functional liquid on the nozzle surface 97 of the functional liquid droplet ejection head 17 can be managed with high accuracy.

  As shown in FIG. 9, the sub-tank 121 has a sub-tank main body (tank main body) 171 that has a gas space at the top and stores functional liquid, a lid float (float) 172 that falls on the sub-tank main body 171 and floats like a lid, A transparent bypass tube 176 disposed on the side of the sub tank main body 171, a liquid level detection mechanism 173 that faces the bypass tube 176 and detects the level of the stored functional liquid, and a side lower portion of the sub tank main body 171 And a hydraulic pressure sensor 174 disposed therein.

  The sub tank main body 171 is made of a metal material such as stainless steel, and is formed into a thin rectangular parallelepiped shape by a top plate 171a, a bottom plate 171b, a front plate 171c, a back plate 171d, and both side plates 171e and 171f, and one side plate 171e. A ventilation tube 166, which will be described later, is connected to the upper portion, a bypass tube 176 is disposed on the other side plate 171f, and a functional plate inflow path 151, which will be described later, and a bottom plate 171b formed thicker. An outflow path 152 is formed. The top plate 171a also serves as a lid and is detachably attached in a sealed state.

  A long ventilation tube 166 communicates with the upper portion of the sub-tank main body 171, and the ventilation tube 166 is connected to a nitrogen gas supply facility 85 and a gas exhaust facility 87 (see FIG. 6). A tube opening / closing valve 168 and a gas pressure introduction valve 169 are disposed on the atmosphere opening end side of the ventilation tube 166 via a two-branch joint 167, and a gas exhaust equipment 87 is connected to the tube opening / closing valve 168. A nitrogen gas supply facility 85 is connected to the gas pressure introduction valve 169. That is, the inside of the sub tank main body 171 can be opened to the atmosphere by the gas exhaust equipment 87 by opening the tube opening / closing valve 168 and closing the gas pressure introduction valve 169 when liquid is supplied from the main tank 181. The gas pressure introduction valve 169 is opened and the tube opening / closing valve 168 is closed when the gas is fed back to the main tank 181 to be described later, and the pressurization can be controlled by the nitrogen gas supply equipment 85. ing.

  Thus, even if the subtank main body 171 is opened to the atmosphere via the long ventilation tube 166, the pulsation of the functional liquid propagates and the gas space of the subtank main body 171 changes in pressure. Due to the pressure loss of the tube 166, the pressure fluctuation does not escape to the outside of the sub tank body 171. For this reason, the pressure fluctuation due to pulsation can be efficiently absorbed by the gas space without impairing the function of opening to the atmosphere, and the pulsation of the functional liquid can be suppressed. Further, since the gas space can be filled with the saturated gas of the functional liquid, the functional liquid can be prevented from being altered.

  An inflow joint 163 to which the branch channel 133 is connected and an outflow joint 164 to which the head side main channel 146 is connected are provided below the sub tank main body 171. An inflow path 151 between the inflow joint 163 and the bottom of the sub tank main body 171 is bent in an “L” shape and communicates upward in the sub tank main body 171. Similarly, an outflow path 152 between the outflow joint 164 and the bottom portion of the sub tank main body 171 is bent in an “L” shape and communicates upward in the sub tank main body 171. Therefore, the functional liquid is configured to flow from below the sub tank main body 171 and flow out from below. Thereby, the functional liquid in the sub tank main body 171 flows while stirring, and aggregation of the functional liquid can be suppressed.

  The lid float 172 is formed of a chemical-resistant metal material into a thin rectangular parallelepiped shape having a hollow inside. More specifically, the lid float 172 is formed by processing a stainless steel plate into a box shape, and is formed so as to be substantially similar to the inner surface of the sub tank main body 171 when viewed from above (see FIG. 10B). ). Thereby, since the area | region where the swell of a functional liquid generate | occur | produces becomes very narrow, a liquid level shake and a swell are suppressed as much as possible, and a head value fluctuation | variation can be prevented. Further, since the contact area between the liquid level in the functional liquid in the sub tank 121 and the gas in the sub tank 121 can be reduced, it is possible to suppress bubbles from being dissolved in the functional liquid in the sub tank 121.

  Although not shown in the drawing, a sheet member-like thin plate that suppresses rolling of the lid float 172 in the sub tank main body 171 may be provided on the upper surface and the lower surface of the lid float 172. In this case, the thin plate is formed of a resinous material having chemical resistance to the functional liquid, and the whole or a part of the thin plate slightly protrudes from the upper surface and the lower surface of the lid float 172 at least in the Y-axis direction. Configure to size. More specifically, it is preferable that the thin plate is formed larger than the top view lid float 172 as long as the lid float 172 is smoothly moved up and down by the liquid level of the functional liquid. As a result, the roll of the lid float 172 accompanying the movement of the sub tank 121 in the Y-axis direction can be suppressed, and the occurrence of liquid level fluctuations and ripples of the functional liquid by the lid float 172 itself can be prevented. The contact area between the liquid level in the functional liquid in the sub tank 121 and the gas in the sub tank 121 can be reduced. In addition, if the lid float 172 is formed of a resinous material having chemical resistance to the functional liquid, it can be integrally formed with a thin plate.

  The liquid level detection mechanism 173 faces the bypass tube 176 and is provided at an upper and lower intermediate position for detecting the liquid level of the upper limit functional liquid and detects the liquid level of the functional liquid at the time of replenishment. And a lower limit detection sensor 179 for detecting the lower liquid level of the functional liquid. The upper limit detection sensor 178 is provided to prevent the sub tank 121 from overflowing. When the upper limit detection sensor 178 detects the upper limit liquid level, the liquid supply from the main tank 181 is stopped. On the other hand, the lower limit detection sensor 179 is provided to prevent the sub-tank 121 from becoming empty, and when the lower limit detection sensor 179 detects the lower limit liquid level, when the drawing of the current workpiece W is finished, the liquid is detected. The droplet discharge device 1 is stopped.

  Further, when the upper limit detection sensor 178 detects the upper limit liquid level, a reverse feed operation for returning the functional liquid in the sub tank 121 to the main tank 181 is performed thereafter. In this reverse feed operation, the fourth on-off valve 149 is closed, the third on-off valve 139 is opened, the pressurization to the main tank 181 is released (negative pressure control), and then the inside of the sub tank 121 is pressurized. (Pressurization control) to make the functional liquid flow backward. Then, when the liquid level detection sensor 177 detects the liquid level, the reverse operation is terminated.

  The liquid level detection sensor 177 detects a liquid level in consideration of an ideal water head value of the functional liquid droplet ejection head 17. When the liquid level detection sensor 177 detects the liquid level of the functional liquid, the control described later is performed. In cooperation with the unit 197, it is determined that the liquid is full or low. That is, from the state where the liquid level is above the liquid level detection sensor 177, the functional liquid is reduced by the discharge operation, and when the liquid level is detected by the liquid level detection sensor 177, it is determined that the liquid level is low. Further, from the state where the liquid level is below the liquid level detection sensor 177, the functional liquid is increased by the replenishment operation, and after the liquid level is detected by the liquid level detection sensor 177, it is determined that the liquid is full.

  Thus, the liquid level detection sensor 177 and the control unit 197 control the liquid level of the functional liquid in the sub tank main body 171 to the upper and lower intermediate position. By controlling the liquid level of the functional liquid to the upper and lower intermediate position of the sub tank main body 171, the sub tank main body 171 has a sufficient gas capacity in its substantially upper half. The pulsation of the functional liquid generated on the downstream side is absorbed by the gas space having approximately half the capacity of the sub tank main body 171. That is, the gas space becomes a so-called air damper and can absorb the pulsation of the functional liquid. Thereby, it is possible to suppress the pulsation from being transmitted to the upstream side of the sub-tank main body 171, particularly to the functional liquid droplet ejection head 17, and to suppress the ejection failure of the functional liquid droplet ejection head 17.

  As shown in FIG. 7, each component from the main tank unit 122 to the 8-branch flow path 132 of each functional liquid supply apparatus 101 is housed in a tank cabinet 84 disposed on the side wall of the chamber 6 (see FIG. 7). 1). The tank cabinet 84 is disposed above the main tank storage unit 111, the unit storage unit 112 storing each bubble removing unit 135, and the unit storage. And a branch channel storage portion 113 that is provided next to the section 112 and stores each of the eight branch channels 132.

  The main tank storage unit 111 has an opening / closing door 105 a that opens and closes outside the chamber 6. Although not shown, the opening and closing doors of the unit storage unit 112 and the branch flow path storage unit 113 open and close inside the chamber 6. That is, each bubble removing unit 135 and each eight-branch channel 132 is disposed in the chamber 6, and each main tank unit 122 is disposed outside the chamber 6. Therefore, the main tank unit 122 is configured such that the main tank 181 can be replaced without replacing the inside of the chamber 6 with the atmosphere.

  Next, the main control system of the droplet discharge device 1 will be described with reference to FIG. As shown in the figure, the droplet discharge device 1 includes a droplet discharge portion 191 having a head unit 13 (functional droplet discharge head 17) and an X-axis table 11, and moves a workpiece W in the X-axis direction. A work moving unit 192 for moving, a head moving unit 193 having the Y-axis table 12 and moving the head unit 13 in the Y-axis direction, a maintenance unit 194 having each unit of maintenance means, and a functional liquid supply unit 7, a functional liquid supply unit 198 that supplies a functional liquid to the functional liquid droplet ejection head 17, a detection unit 195 that includes various sensors and performs various detections, and a drive unit that includes various drivers that drive and control the respective units. 196 and a control unit (liquid level control means) 197 that is connected to each unit and controls the entire droplet discharge device 1.

  The control unit 197 includes an interface 201 for connecting each means, a storage area that can be temporarily stored, a RAM 202 that is used as a work area for control processing, and various storage areas. ROM 203 for storing control programs and control data; drawing data for drawing a predetermined drawing pattern on the work W; various data from each means; and a program for processing various data A hard disk 204, a CPU 205 that performs arithmetic processing on various data according to programs stored in the ROM 203 and the hard disk 204, and a bus 206 that connects them to each other.

  The control unit 197 inputs various data from each unit via the interface 201 and causes the CPU 205 to perform arithmetic processing according to a program stored in the hard disk 204 (or sequentially read by a CD-ROM drive or the like). The processing result is output to each means via the drive unit 196 (various drivers). Thereby, the whole apparatus is controlled and various processes of the droplet discharge apparatus 1 are performed.

  Here, the operation of supplying the functional liquid to the functional liquid droplet ejection head 17 will be described. This operation is performed in a state where the functional liquid is stored in each main tank 181 and each sub tank 121 and the functional liquid is filled in each flow path. In addition, it is assumed that one main tank 181 connected to the upstream functional liquid flow path 126 is pressurized by the nitrogen gas supply equipment 85.

  First, in the state where the third on-off valve 139 provided upstream of the sub tank 121 is closed, the functional liquid droplet ejection head 17 is driven to eject functional liquid droplets. Since the third on-off valve 139 is closed, the pressure from the main tank 181 is cut off, and the functional liquid is sent from each sub tank 121 to each functional liquid droplet ejection head 17 by the pump action of the functional liquid droplet ejection head 17. To be liquidated. The water head value on the nozzle surface 97 of the functional liquid droplet ejection head 17 is finally adjusted by the pressure reducing valve 150 provided in the downstream functional liquid flow path 127.

  Next, replenishment of the functional liquid to the sub tank 121 will be described. When the functional liquid in the sub-tank 121 is reduced by a certain amount by the ejection operation of the functional liquid droplet ejection head 17, the liquid level detection mechanism 173 determines that the liquid is in a liquid reduction state. When it is determined that the liquid is reduced, the third on-off valve 139 is opened to replenish the functional liquid from the main tank 181 to the sub tank 121. Since the main tank 181 is pressurized, the functional liquid in the main tank 181 is automatically sent to the sub tank 121 by opening the third on-off valve 139. At this time, the ejection operation of the functional liquid droplet ejection head 17 is continuously performed.

  When the functional liquid is sent from the main tank 181 to the sub tank 121 and a certain amount of functional liquid is stored in the sub tank 121, the liquid level detection mechanism 173 determines that the sub tank 121 is full. If it is determined that the liquid is full, the third on-off valve 139 is closed to end the replenishment operation. In addition, the above-described reverse feeding operation of the functional liquid is also performed by the above control system.

  Next, a coping operation when the functional liquid runs out in the main tank 181 connected to the upstream functional liquid flow path 126 will be described. When the replenishment operation to the sub tank 121 is repeated, the functional liquid in the main tank 181 is reduced, and the corresponding weight measuring device 182 determines that the main tank 181 needs to be replaced. When it is determined that the main tank 181 needs to be replaced, the switching mechanism 183 connects the upstream functional liquid channel 126 to the other main tank 181 (the main tank 181 in a full state) from the main tank 181 that needs replacement. ). Then, the supply operation to the sub tank 121 is performed by the other main tank 181. At this time, the main tank 181 requiring replacement can be replaced, and the main tank 181 can be replaced without stopping the supply operation to the sub tank 121 (discharge driving of the functional liquid droplet discharge head 17).

  According to the configuration as described above, the sub tank body 171 has a sufficient gas capacity in its substantially upper half by controlling the liquid level when the sub tank body 171 is replenished with the functional liquid to the upper and lower intermediate positions. Become. The pulsation of the functional liquid generated on the downstream side is absorbed by the gas space having approximately half the capacity of the sub tank main body 171. That is, the gas space becomes a so-called air damper and can absorb the pulsation of the functional liquid. Thereby, it is possible to suppress the pulsation from being transmitted to the upstream side of the sub-tank main body 171, particularly to the functional liquid droplet ejection head 17, and to suppress the ejection failure of the functional liquid droplet ejection head 17.

  In this embodiment, the droplet discharge device 1 includes eight carriage units 51, but the number of carriage units 51 is arbitrary.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate over which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 11 is a flowchart showing the manufacturing process of the color filter, and FIG. 12 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 12B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 12C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 therebelow serve as a partition wall portion 507b that partitions each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 12D, the functional liquid droplets are ejected by the functional liquid droplet ejection head 17, and each pixel region 507a surrounded by the partition wall portion 507b is disposed. Let it land. In this case, the functional liquid droplet ejection head 17 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. When the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 13 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 12, the corresponding parts are denoted by the same reference numerals, and the description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 13 are formed at predetermined intervals. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 17. Further, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 17.

FIG. 14 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 15 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 16 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a (first bank layer) formed of an inorganic material such as SiO, SiO ₂ or TiO ₂ , and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 17, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 18, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The region to be subjected to the lyophilic treatment is the first laminated portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using tetrafluoromethane as a processing gas, for example. )
By performing this surface treatment process, when forming the functional layer 617 using the functional liquid droplet ejection head 17, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 21 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 20, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 17 to each opening 619 that is a pixel region. Discharge inside. Thereafter, as shown in FIG. 21, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 22, the second composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 22) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the second composition after discharge is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 23, a hole injection / transport layer 617a is obtained. A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 17, as shown in FIG. 24, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 25, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 26 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 21 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 17. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 17, and it corresponds. Land in the color discharge chamber 705.

Next, FIG. 27 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 28A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a perspective view of the droplet discharge device concerning an embodiment. It is a top view of a droplet discharge device. It is a side view of a droplet discharge device. It is a figure of the functional droplet discharge head which comprises a head group. It is an external appearance perspective view of a functional droplet discharge head. It is a piping system diagram of a functional liquid supply device. It is the figure which showed the tank cabinet. It is the figure which showed the 8-branch flow path. It is the figure which represented the subtank circumference typically. It is the block diagram explaining the main control system of the droplet discharge apparatus. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  1: droplet ejection device, 11: X-axis table, 12: Y-axis table, 17: functional droplet ejection head, 51: carriage unit, 121: sub tank, 126: upstream functional liquid flow path, 127: downstream function Liquid flow path, 139: third on-off valve, 150: pressure reducing valve, 166: tube for ventilation, 168: tube on-off valve, 171: sub tank body, 172: lid float, 181; main tank, 197: control unit, W :work

Claims (9)

In the sub tank unit that receives the functional liquid supply from the main tank via the functional liquid flow path and supplies the functional liquid to the ink jet type functional liquid droplet ejection head,
A tank body for storing functional fluid;
A sub-tank unit, comprising: a liquid level control means for controlling a liquid level at the time of replenishing the functional liquid of the tank main body to an upper and lower intermediate portion position. A long ventilation tube having one end communicating with the upper space of the tank body and the other end opened to the atmosphere;
The sub-tank unit according to claim 1, further comprising a tube opening / closing valve disposed on an air release end side of the ventilation tube. In the functional liquid flow path in the vicinity of the upstream side of the tank body, a flow path opening / closing valve is interposed,
The sub-tank unit according to claim 1, wherein the flow path opening / closing valve is configured by an air operated valve capable of opening / closing the functional liquid flow path without volume change.   The sub tank unit according to any one of claims 1 to 3, wherein the tank main body has a drop lid-like float. A head-side flow path connecting the tank body and the functional liquid droplet ejection head;
A pressure reducing valve that is interposed in the head-side flow path, operates on the basis of atmospheric pressure, and maintains a water head value with the functional liquid droplet ejection head within a predetermined allowable range. The sub tank unit according to any one of claims 1 to 4. A drawing means for performing drawing by ejecting a functional liquid droplet from the functional liquid droplet ejection head while moving the functional liquid droplet ejection head of the ink jet system with respect to the workpiece;
A liquid droplet ejection apparatus comprising: the sub tank unit according to claim 1 that supplies a functional liquid to the functional liquid droplet ejection head.   7. A method for manufacturing an electro-optical device, wherein the droplet discharge device according to claim 6 is used to form a film forming portion with functional droplets on the workpiece.   An electro-optical device using the droplet discharge device according to claim 6, wherein a film forming portion using functional droplets is formed on the workpiece.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 7 or the electro-optical device according to claim 8.

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