JP2006163733A - Pressure regulating valve, functional fluid supply mechanism therewith, droplet discharge device, method for producing electro-optic device, electro-optic device, and electronic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a functional fluid supply device or the like capable of reducing the use amount of a functional fluid, and stabilizing its discharge. <P>SOLUTION: A pressure regulating valve 46 supplies to a functional fluid droplet discharge head 3 via a secondary chamber 79 in a valve housing 69 the functional fluid introduced from a functional fluid tank 43 into a primary chamber 70 in the valve housing 69, and regulates pressure in the secondary chamber 79 by causing a valve element 76 to open and close by means of a diaphragm 75 that faces the atmosphere and forms one side of the secondary chamber 79, the valve element 76 provided in a communication flow passage 80 that makes the primary chamber 70 communicate with the secondary chamber 79. The secondary chamber side opening 92 of the communication flow passage 80 and the outlet opening 94 of an outlet flow passage 93 leading to the functional fluid droplet discharge head 3 open to the secondary chamber 79. The interior surface wall 91 of the secondary chamber 79 is shaped so that the diaphragm 75 deformed maximally in the minus direction makes contact therewith. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a pressure adjusting valve interposed between a functional liquid tank and a functional liquid droplet ejection head, a functional liquid supply mechanism including the pressure adjusting valve, a liquid droplet ejection apparatus, a method for manufacturing an electro-optical apparatus, and an electro-optical apparatus. , And electronic equipment.

2. Description of the Related Art Conventionally, a pressure adjustment valve (liquid supply valve unit) that is mounted on a carriage of an inkjet recording apparatus and supplies a pressure-adjusted functional liquid (ink) to an inkjet head is known (for example, see Patent Document 1). The pressure regulating valve has a primary chamber connected to a functional liquid tank (ink tank) and a secondary chamber connected to a functional liquid droplet ejection head (inkjet head) formed in a flat housing and a primary chamber. A valve body is provided in a communication channel that communicates with the secondary chamber, and the valve body is opened and closed by a diaphragm provided on one surface of the secondary chamber to adjust the pressure on the secondary chamber side. . In this case, the secondary chamber is formed in a cylindrical shape concentric with the diaphragm, and the secondary chamber side opening of the communication channel is formed at the center of the facing wall facing the diaphragm, and at an eccentric position. Is formed with an outflow opening of the outflow channel. In addition, a contact protrusion is formed around the opening on the secondary chamber side of the facing wall to prevent the diaphragm from sticking to the facing wall when the head is sucked.
JP 2004-142405 A (page 37, FIG. 32, FIG. 33)

  By the way, an inkjet method using a functional liquid droplet ejection head (inkjet head) can form a minute film with a functional liquid, and can be applied to a manufacturing apparatus such as a color filter of a liquid crystal display device and an organic EL device. It is conceivable that the above-described pressure regulating valve is also incorporated in this type of device. In this type of apparatus, the initial filling operation of the functional liquid pressure adjustment valve stored in the functional liquid tank and the functional liquid droplet ejection head is performed by so-called head suction, which sucks the functional liquid from the functional liquid droplet ejection head. Similarly, the liquid draining operation in the replacement of the functional liquid is performed by releasing the functional liquid in the flow path by opening the functional liquid tank to the atmosphere while the head is sucked.

  However, in the conventional pressure regulating valve, a gap is inevitably generated between the diaphragm and the facing wall of the secondary chamber due to the structure provided with protrusions when the head is sucked, and air and functional liquid remain in this space. There is a problem. For this reason, the air remaining in the gap at the time of initial filling is mixed into the filled functional liquid, which causes a problem of blanking of the functional liquid droplet ejection head. Further, when the functional liquid is exchanged, the functional liquid remaining in the gap is mixed with the newly introduced functional liquid, which causes a problem of deterioration of the functional liquid.

  The present invention relates to a pressure regulating valve capable of discharging air and functional liquid as much as possible at the time of initial filling or draining of a functional liquid, a functional liquid supply mechanism provided with the same, a droplet discharge device, and a method for manufacturing an electro-optical device It is an object to provide an electro-optical device and an electronic apparatus.

  The pressure regulating valve of the present invention supplies the functional liquid introduced from the functional liquid tank to the primary chamber in the valve housing to the functional liquid droplet ejection head through the secondary chamber in the valve housing and faces the atmosphere. With the diaphragm constituting one surface of the secondary chamber, the secondary chamber is opened and closed by opening and closing the valve body provided in the communication channel that communicates the primary chamber and the secondary chamber with the atmospheric pressure as the adjustment reference pressure. A pressure regulating valve for pressure regulation, wherein the secondary chamber has an opening on the secondary chamber side of the communication channel, and an outflow opening on the outflow channel connected to the functional liquid droplet ejection head. The inner wall of the secondary chamber excluding the two surfaces is formed in a shape in which the diaphragm that is deformed at most minus is in contact.

  According to this configuration, the inner wall of the secondary chamber is formed into a shape in which the diaphragm constituting one surface of the secondary chamber comes into contact with the maximum negative deformation, so that the diaphragm is in the maximum negative deformation as described above. Thus, it is possible to minimize the remaining of the functional liquid and bubbles in the pressure regulating valve. That is, it is possible to prevent air or the functional liquid before replacement from being mixed with the new functional liquid that has been initially filled or replaced at the time of initial filling or draining of the functional liquid that causes the diaphragm to undergo the maximum negative deformation. In the case where the primary chamber and the secondary chamber are configured back to back, the housing can be formed thin.

  In this case, the secondary chamber is formed into a truncated cone shape including the inner wall and having the diaphragm side as a bottom surface, and the secondary chamber side opening opens to the end wall of the inner wall serving as the top surface of the truncated cone shape. It is preferable that the outflow opening is opened in the peripheral wall of the inner wall that forms a truncated cone-shaped tapered surface.

  According to this configuration, the diaphragm can be brought into contact with the entire inner wall of the secondary chamber, the volume of the secondary chamber itself can be reduced, and functional fluid and bubbles remain in the secondary chamber. Can be further reduced.

  In this case, the inner wall of the secondary chamber is formed with an auxiliary flow path that partially prevents contact with the diaphragm that has undergone a maximum minus deformation and communicates the secondary chamber side opening and the outflow opening. Is preferred.

  According to this configuration, even if the diaphragm is negatively deformed to the maximum and is in close contact with the inner wall, air and functional liquid can be discharged from the primary chamber side via the auxiliary flow path. Initial filling and draining will not be impossible. In addition, depending on the close contact form of the diaphragm that has undergone the maximum minus deformation, the vicinity of the outflow opening may be in close contact first, but even in this case, the functional liquid in the secondary chamber is discharged through the auxiliary flow path. Can do. As a result, air and other functional liquids do not remain in the primary chamber when the head is sucked, and these can be prevented from being mixed into the initially filled (or replaced) functional liquid.

  In this case, the auxiliary flow path is formed on the inner wall of the secondary chamber, and is formed by a narrow groove that is connected to the secondary chamber side opening and the outflow opening and is covered with a diaphragm whose open portion is deformed to the maximum extent. It is preferable.

  In this case, the diaphragm has a membrane-like diaphragm main body and a pressure receiving plate that is attached to the inside of the diaphragm main body and opens and closes the valve body, and the auxiliary flow path is formed on the inner wall and is on the secondary chamber side. The narrow groove that extends from the opening to the position beyond the outer peripheral edge of the pressure receiving plate and is covered with the diaphragm whose opening is negatively deformed at maximum, and the narrow groove and the outflow opening communicate with each other, and the thickness of the pressure receiving plate of the diaphragm and the diaphragm Due to the tension, it is preferable that the gap is formed between the diaphragm main body and the inner wall.

  According to this configuration, the auxiliary flow path can be easily processed.

  In this case, it is preferable that the secondary chamber is disposed such that the diaphragm has a vertical posture and the outflow opening is positioned below the secondary chamber side opening.

  According to this configuration, when the functional liquid is exchanged, the functional liquid on the primary chamber side that has flowed in from the opening on the secondary chamber side by head suction can flow down naturally by gravity along the auxiliary flow path. The functional liquid can be efficiently discharged from the outflow opening. For this reason, it is possible to prevent air and other functional liquids from remaining in the secondary chamber.

  In this case, the outflow opening is opened at the upper and lower intermediate portions of the lower slope of the peripheral wall, and the inner wall of the secondary chamber extends downward from the outflow opening and has a diaphragm that has a maximum negative deformation. It is preferable that a liquid draining groove to be covered is formed.

  According to this configuration, even if the diaphragm that has undergone the maximum negative deformation at the time of suction of the head may be in close contact with the inner wall, the drainage groove covered with the diaphragm by the diaphragm functions as a functional liquid discharge channel. The functional liquid accumulated below the next chamber can be efficiently discharged.

  In this case, it is preferable that the inner wall of the secondary chamber is formed with an air vent groove extending upward from the opening on the secondary chamber side and covered with a diaphragm whose open portion is maximally minus deformed.

  According to this configuration, even if the diaphragm that has undergone the maximum minus deformation at the time of suction of the head may be in close contact with the inner wall, the air vent groove whose opening is covered by the diaphragm functions as a discharge passage for bubbles (air). Bubbles accumulated above the secondary chamber can be efficiently discharged.

  In this case, the inner wall of the secondary chamber is formed with an air vent / fluid groove that extends in the horizontal direction from the opening on the secondary chamber side and is covered with a diaphragm whose opening is negatively deformed at most. preferable.

  According to this configuration, even if the diaphragm that has undergone maximum negative deformation during head suction may come into close contact with the inner wall, the air vent / fluid groove covered with the diaphragm will discharge air bubbles and functional fluid. Since it functions as a flow path, it is possible to efficiently discharge bubbles and functional liquid accumulated in the left-right direction of the secondary chamber.

  In this case, on the inner wall of the secondary chamber, there is an air vent / fluid drain groove that extends upward in the circumferential direction from either the outflow opening or the auxiliary flow path and that is covered with a diaphragm that has a maximum negative deformation of the open portion. It is preferable that it is formed.

  According to this configuration, even if the diaphragm that has undergone maximum negative deformation during head suction may come into close contact with the inner wall, the air vent / fluid groove covered with the diaphragm will discharge air bubbles and functional fluid. Since it functions as a flow path, it is possible to efficiently discharge both the bubbles accumulated above the secondary chamber and the functional liquid accumulated below the secondary chamber. In the embodiment, a pair of air vent and liquid drain grooves are formed.

  The functional liquid supply mechanism of the present invention includes a functional liquid tank for storing functional liquid, the pressure adjusting valve connected to the functional liquid appropriate discharge head, an upstream end connected to the functional liquid tank, and a downstream end connected to the functional liquid tank. And a functional liquid supply channel connected to the pressure regulating valve.

  According to this configuration, the functional liquid can be supplied to the functional liquid droplet ejection head while preventing air and other functional liquids from being mixed.

  The liquid droplet ejection apparatus of the present invention includes the above-described functional liquid supply mechanism, a functional liquid droplet ejection head that ejects functional liquid droplets onto the workpiece, and the X axis direction and the Y axis direction with respect to the functional liquid droplet ejection head. It is preferable that an X / Y moving mechanism for relatively moving the X and Y is provided.

  According to this configuration, since the functional liquid that does not mix air and other functional liquids is supplied to the functional liquid droplet ejection head, the reliability of products manufactured by the liquid droplet ejection apparatus can be improved. Specifically, there is no occurrence of product film formation failure, light emission failure, or the like.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming portion made of functional droplets is formed on a workpiece using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used, and a film forming portion using functional droplets is formed on a workpiece.

  According to these configurations, since the droplet discharge device that can efficiently perform the initial filling and replacement of the functional liquid is used, it is possible to manufacture a highly reliable electro-optical device. As the electro-optical device (flat panel display), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described electro-optical device manufacturing method or the above-described electro-optical device.

  In this case, the electronic apparatus corresponds to various electric products in addition to a mobile phone and a personal computer equipped with a so-called flat panel display.

  Hereinafter, a liquid droplet ejection apparatus to which a pressure regulating valve of the present invention is applied will be described with reference to the accompanying drawings. This droplet discharge device is incorporated into a so-called flat panel display production line, and becomes a color filter of a liquid crystal display device or each pixel of an organic EL device by a droplet discharge method using a functional droplet discharge head. A light emitting element or the like is formed.

  As shown in FIGS. 1 and 2, the droplet discharge device 1 includes a machine base 2 and a functional liquid droplet discharge head 3, and a drawing device 4 widely placed over the entire area of the machine base 2, and drawing A functional liquid supply mechanism 6 connected to the apparatus 4 and a head maintenance apparatus 5 placed on the machine base 2 so as to be attached to the drawing apparatus 4 are provided. The droplet discharge device 1 is provided with a control device (not shown). In the droplet discharge device 1, the drawing device 4 is supplied with the functional liquid by the functional liquid supply mechanism 6 and is controlled by the control device. Based on the above, the drawing device 4 performs a drawing operation on the workpiece W, and the head maintenance device 5 appropriately performs a maintenance operation (maintenance) on the functional liquid droplet ejection head 3.

  The drawing device 4 moves to the Y-axis table 8 and the X / Y movement mechanism 11 including the X-axis table 7 for main scanning (moving in the X-axis direction) and the Y-axis table 8 orthogonal to the X-axis table 7. A main carriage 12 that is freely attached, and a head unit 13 that is suspended from the main carriage 12 and has the functional liquid droplet ejection head 3 mounted thereon.

  The X-axis table 7 has an X-axis slider 14 driven by an X-axis motor (not shown) constituting a drive system in the X-axis direction, and a set table 17 including a suction table 15 and a θ table 16 can be freely moved on the X-axis table 14. It is configured on board. Similarly, the Y-axis table 8 has a Y-axis slider 18 for driving a Y-axis motor (not shown) constituting a drive system in the Y-axis direction, and the main carriage 12 supporting the head unit 13 is mounted on the Y-axis slider 18. It is configured to be movable in the axial direction. The X-axis table 7 is disposed in parallel with the X-axis direction and is directly supported on the machine base 2. On the other hand, the Y-axis table 8 is supported by left and right columns 21 erected on the machine base 2 and extends in the Y-axis direction so as to straddle the X-axis table 7 and the head maintenance device 5 (see FIG. 1 and FIG. 2).

  In the droplet discharge device 1, the area where the X-axis table 7 and the Y-axis table 8 intersect is the drawing area 22 for drawing the work W, and the area where the Y-axis table 8 and the head maintenance device 5 intersect is for the functional droplet discharge head 3. It is a maintenance area 23 where function recovery processing is performed. The head unit 13 is allowed to face the drawing area 22 when drawing on the workpiece W and to the maintenance area 23 when performing function recovery processing. Yes.

  As shown in FIG. 3, the head unit 13 includes a plurality (twelve) of functional liquid droplet ejection heads 3, a head plate 24 on which the functional liquid droplet ejection heads 3 are mounted via a head holding member (not shown), It has. The head plate 24 is detachably supported by a support frame 25 described later, and the head unit 13 is positioned and mounted on the support frame 25 via a carriage body 26. Although details will be described later, the support frame 25 supports the valve unit 27 and the tank unit 28 of the functional liquid supply mechanism 6 along with the head unit 13 (see FIGS. 1 to 3).

  As shown in FIG. 4, the functional liquid droplet ejection head 3 is a so-called double series, a functional liquid introduction part 32 having two series of connecting needles 31, and a dual head substrate connected to the functional liquid introduction part 32. 33 and a head main body 34 which is connected to the lower side of the head substrate 33 and has an in-head flow path (not shown) filled with a functional liquid therein. The connection needle 31 is connected to the functional liquid supply mechanism 6 (not shown), and supplies the functional liquid to the in-head flow path of the functional liquid droplet ejection head 3. The head body 34 has a cavity (not shown) provided with a piezoelectric element (not shown) facing the flow path in the head, and a nozzle plate 36 having a nozzle surface with an ejection nozzle 35 opened. . On the nozzle surface 37, a nozzle row 38 including a large number (180) of discharge nozzles 35 is formed. When the functional droplet discharge head 3 is driven to discharge, the functional droplet is discharged from the discharge nozzle 35 by the pumping action of the cavity.

  As shown in FIG. 3, the head plate 24 is formed of a rectangular thick plate made of stainless steel or the like. In the head plate 24, 12 functional liquid droplet ejection heads 3 are positioned, and 12 mounting openings (not shown) are formed to fix them from the back side via a head holding member (not shown). Has been. The twelve mounting openings are divided into six groups of two, and the mounting openings of each group are arranged in the direction perpendicular to the nozzle row 38 of the functional liquid droplet ejection head 3 (head The position is shifted in the longitudinal direction of the plate 24. That is, the twelve functional liquid droplet ejection heads 3 are divided into six groups of two, and the nozzle arrays 38 of the functional liquid droplet ejection heads 3 of each group partially overlap in the direction orthogonal to the nozzle array 38. Are arranged in a staircase pattern.

  The two nozzle rows 38 formed in each functional liquid droplet ejection head 3 are each constituted by a large number (180) of ejection nozzles 35 disposed with a pitch of 4 dots, Both nozzle rows 38 are arranged so as to be displaced by 2 dots in the row direction. That is, a partial drawing line of ½ resolution is formed in each functional liquid droplet ejection head 3 by the two nozzle rows 38. For this reason, each of the two adjacent functional liquid droplet ejection heads 3 in the same set is disposed so that each (1/2 resolution) partial drawing line is displaced by one dot in the column direction. The functional droplet discharge head 3 forms a drawing line with the maximum resolution. That is, the two functional liquid droplet ejection heads 3 in the same set are arranged so that the nozzle rows 38 of 1/4 resolution are displaced from each other. Thus, a high-resolution nozzle array 38 for one drawing line is configured together with the other five groups and ten functional liquid droplet ejection heads 3.

  As shown in FIG. 2, the main carriage 12 is attached to an appearance “I” -shaped suspension member 41 fixed to the Y-axis slider 18 of the Y-axis table 8 from below, and a lower surface of the suspension member 41. A θ rotation mechanism 42 for correcting the position of the head unit 13 with respect to the θ direction and a carriage body 26 attached so as to be suspended below the θ rotation mechanism 42 are configured. The carriage body 26 has a frame-like frame 29 having a positioning mechanism, and the head unit 13 is fixed to the frame body 29 via a support frame 25 described later.

  As shown in FIGS. 1 to 3, the functional liquid supply mechanism 6 is mounted on the support frame 25 together with the head unit 13 and includes a plurality of (12) functional liquid tanks 43 that store the functional liquid. The unit 28, a plurality (twelve) of functional liquid supply tubes 44 (functional liquid supply channels) for connecting the functional liquid tanks 43 and the functional liquid droplet ejection heads 3, and the functional liquid supply tubes 44 are connected to the functional liquids. A valve comprising a plurality (12) of connecting tools 45 for connection to the tank 43 and the respective functional liquid droplet ejection heads 3 and a plurality (12) of pressure adjusting valves 46 interposed in the plurality of functional liquid supply tubes 44. And a unit 27.

  As shown in FIG. 3, the support frame 25 is formed in a substantially rectangular frame shape, and the head unit 13, the valve unit 27, and the tank unit 28 are mounted in this order in the longitudinal direction. ing. Note that a pair of handles 47 are attached to the support frame 25 at its long side portion, and the support frame 25 can be attached to and detached from the main carriage 12 with the pair of handles 47 as a hand-held part.

  The tank unit 28 has twelve functional liquid tanks 43, twelve set portions (not shown) for positioning them, a tank plate 48 that supports the twelve functional liquid tanks 43, and each functional liquid tank. And a tank setting jig 51 for mounting (setting) 43 on each set part. As shown in FIG. 5, the functional liquid tank 43 is of a cartridge type, and includes a functional liquid pack 52 in which the functional liquid is vacuum-packed, and a resin cartridge case 53 that accommodates the functional liquid pack 52. ing. Note that the functional liquid stored in the functional liquid pack 52 has been degassed in advance, and the amount of dissolved gas is substantially zero.

  The functional liquid pack 52 is formed by attaching a resin-made supply port 54 for supplying a functional liquid to a bag-like one in which two rectangular (flexible) film sheets are stacked and heat-welded. The supply port 54 is formed with a communication opening (not shown) communicating with the inside of the pack. The communication opening is closed by a closing member (not shown) made of an elastic material having a functional liquid corrosion resistance, so that air (oxygen) and moisture can be prevented from entering from the communication opening.

  The tank plate 48 is a thick plate made of stainless steel or the like and is formed in a substantially parallelogram. As shown in FIG. 3, on the tank plate 48, the functional liquid tank 43 is positioned vertically with the supply port of the functional liquid tank 43 facing the valve unit 27, and is detachably set. A set portion 55 is provided. As shown in the figure, the set portion 55 is arranged following the arrangement of the twelve functional liquid droplet ejection heads 3 mounted on the head plate 24. That is, the twelve functional liquid tanks 43 are divided into six groups of two, and the long side of the tank plate 48 is placed with the supply port 54 (front surface of the functional liquid tank) facing the functional liquid droplet ejection head 3. The support frame 25 is disposed so as to be displaced in the short side direction.

  The tank setting jig 51 is configured to slide the functional liquid tank 43 forward and set it in the set portion 55 by pushing the rear surface of the functional liquid tank 43 (the surface facing the front surface of the functional liquid tank 43) forward. And a pressing lever 56 that pushes out the functional liquid tank 43 and a support member 57 that supports the pressing lever 56. By moving the support member 57 in accordance with the set position of the functional liquid tank 43, the pressing lever 56 is opposed to each functional liquid tank 43 so that the functional liquid tank 43 can be set appropriately.

  The functional liquid supply tube 44 (functional liquid supply flow path) connects the tank side tube 58 that connects each functional liquid tank 43 and each pressure adjustment valve 46, and each pressure adjustment valve 46 and each functional liquid droplet ejection head 3. A head-side tube 61.

  As shown in FIG. 5, the connector 45 includes a tank side adapter 62 for connecting the functional liquid tank 43 and the tank side tube 58, and a head side for connecting the functional liquid droplet ejection head 3 and the head side tube 61. And an adapter 63. The tank-side adapter 62 is provided with a communication needle 30 having a channel formed in the axis thereof, and the communication needle 30 is inserted through a closing member (not shown) of the functional liquid pack 52 (communication opening). As a result, the functional liquid pack 52 is connected.

  The valve unit 27 supports 12 pressure control valves 46, 12 valve support members 57 that support the 12 pressure control valves 46, and 12 pressure control valves 46 through the valve support member 57. And a valve plate 65 (see FIG. 3).

  Twelve valve support members 57 are erected on the valve plate 65 in a state of being displaced in six pairs of two in the short side direction of the support frame 25, and twelve pressure regulating valves 46 are supported by these. (See FIG. 3). Each pressure regulating valve 46 will be described later.

  Next, the head maintenance device 5 will be described with reference to FIG. The head maintenance device 5 seals the nozzle surface of the functional liquid droplet ejection head 3 to prevent the nozzle 35 from drying when the liquid droplet ejection device 1 is not in operation, and from the ejection nozzle 35 of the functional liquid droplet ejection head 3. A storage / suction unit 67 for sucking and removing the thickened functional liquid and a wiping unit 68 for wiping off dirt adhering to the nozzle surface 37 of the functional liquid droplet ejection head 3 are provided. Both units 67 and 68 are mounted on a moving table 71 mounted on the machine base 2 so as to extend in the X-axis direction, and are configured to be movable in the X-axis direction by the moving table 71. .

  The storage / suction unit 67 is connected to the sealing cap 72 that also functions as a flushing box that receives the discarded discharge of the functional liquid droplet discharge head 3, a cap lifting mechanism 73 that lifts and lowers the sealing cap 72, and the sealing cap 72. A suction mechanism 74 (see FIG. 11) configured by an ejector or a pump for sucking the functional liquid droplet ejection head 3 in a state, and a waste liquid tank (not shown) for collecting the waste liquid sucked and removed by the suction mechanism 74. is doing. At the time of drawing suspension, the functional liquid droplet ejection head 3 has moved to the maintenance area 23 on the moving table 71, and the sealing cap 72 is located slightly away from the functional liquid droplet ejection head 3. 3 flushing (discarding discharge). Then, when the functional liquid droplet ejection head 3 enters an operation standby state, the sealing cap 72 is completely raised to perform capping of the nozzle surface 37 of the functional liquid droplet ejection head 3, and all the nozzles of each functional liquid droplet ejection head 3 are capped. 35 is sealed. Subsequently, when the functional liquid droplet ejection head 3 in the capped state is driven again, the suction mechanism 74 is driven as necessary to prevent the nozzle clogging due to the thickening of the functional liquid, and the thickening from the nozzle 35 is performed. Aspirate the functional fluid. This suction operation is also used when the functional liquid is initially filled or when the functional liquid is removed, which will be described later.

  As shown in the figure, the wiping unit 68 is provided with a wiping sheet 68a that can be unwound and rewinded, and the wiping unit 68 is moved in the X-axis direction by the moving table 71 while feeding the wiping sheet 68a. The nozzle surface 37 of the functional liquid droplet ejection head 3 is wiped off while being moved. For this reason, the functional liquid adhering to the nozzle surface of the functional liquid droplet ejection head 3 is removed by the above-described suction operation or the like, and the flying bending of the ejected functional liquid droplets is prevented. As the head maintenance device 5, in addition to the above-described units 67 and 68, a discharge inspection unit (not shown) for inspecting the flight state of the functional liquid droplets ejected from the functional liquid droplet ejection head 3 is mounted. Is preferred.

  Here, the pressure regulating valve 46 of the present embodiment will be described in detail with reference to FIGS. 6 to 8. In the valve housing 69, the pressure regulating valve 46 communicates the primary chamber 70 connected to the functional liquid tank 43, the secondary chamber 79 connected to the functional liquid droplet ejection head 3, the primary chamber 70 and the secondary chamber 79. A communication channel 80 is formed, and a diaphragm 75 is provided on one surface of the secondary chamber 79 so as to face the outside, and a valve element 76 that is opened and closed by the diaphragm 75 is provided in the communication channel 80. It has been. The functional liquid introduced from the functional liquid tank 43 into the primary chamber 70 is supplied to the functional liquid droplet ejection head 3 through the secondary chamber 79. At this time, the diaphragm 75 uses the atmospheric pressure as an adjustment reference pressure. The pressure of the secondary chamber 79 is adjusted by opening and closing the valve body 76 provided in the communication flow path 80.

  As shown in FIG. 8, the pressure regulating valve 46 is used in a vertical position so that the diaphragm 75 takes a vertical posture. In the following description, the front side of the page is “up”, the front side is “down”, the left side is “front”, and the right side is “rear”. 6 and 7, the pressure adjusting valve 46 is attached to the attachment plate 77 for attaching it to the frame or the like (the valve support member 57 in this embodiment), and the inflow connector for connecting the tank side tube 58 described above. 78 (union joint) and the outflow connector 81 (union joint) for connecting the head side tube 61 are shown.

  The valve housing 69 has a housing body 82, a lid 83 that forms a primary chamber 70 together with the housing body 82, and a secondary chamber 79 that forms a secondary chamber 79 together with the housing body 82, and fixes the diaphragm 75 to the housing body 82. The ring plate 84 is composed of three members, all of which are made of a corrosion resistant material such as stainless steel. The lid 83 and the ring plate 84 are assembled to the housing main body 82 by overlapping the ring plate 84 and the lid 83 from the front and the rear, positioning each with a plurality of stepped parallel pins (not shown), and then screwing. Both have a polygonal (octagonal) or circular appearance that is concentric with an axis passing through the center of the circular diaphragm 75. The lid 83 and the housing main body 82 are airtightly butt-joined with each other via the packing 85, and the housing main body 82 and the ring plate 84 are airtight with each other by sandwiching the edge of the diaphragm 75 and the packing 85. Butt-joined.

  The primary chamber 70 formed by the housing main body 82 and the lid 83 is formed in a substantially cylindrical shape concentric with the diaphragm 75, and its open end is closed by the lid 83. An inflow port 86 extending obliquely in the radial direction from the primary chamber 70 is formed on the left side of the upper boss portion * formed on the upper back of the housing body 82 on the primary chamber side. 78 is connected.

  The inflow port 86 includes an inflow port 87 that opens to the outer peripheral surface of the housing main body 82, and an inflow path 88 that communicates the inflow port 87 with the inner peripheral surface of the primary chamber 70. Is formed eccentric to the primary chamber 70 side. An inflow connector 78 is screwed into the inflow port 87 (tapered screw), and the tank side tube 58 is connected through the inflow connector 78. The internal flow path of the inflow connector 78 is formed so as to expand at the downstream end, so that no step is generated in the internal flow path and the flow rate of the functional liquid is not greatly changed. Similarly, the downstream end of the inflow port 87 has a tapered shape so that no step portion is generated between the inflow path and the inflow path.

  As shown in FIGS. 8 and 9, the secondary chamber 79 is formed into a truncated cone shape having the diaphragm 75 as a bottom surface as a whole by a diaphragm 75 and an inner wall 91 formed in the housing body 82. The diaphragm 75 is arranged in a vertical posture and constitutes one surface of the secondary chamber 79. Further, the inner wall 91 is constituted by each surface excluding the surface (one surface) of the diaphragm 75 of the secondary chamber 79, and has a shape in which the diaphragm 75 deformed at the maximum minus is in contact (FIG. 11 ( b) Reference, details will be described later).

  In addition, a secondary chamber side opening 92 of the above-described communication flow path 80 that is concentric with the diaphragm 75 is opened on an end wall 91 a that is a truncated cone-shaped top surface of the inner surface wall 91. An outflow opening 94 of an outflow passage 93 to be described later is formed at the upper and lower intermediate portions of the lower slope of the peripheral wall 91b that is a truncated cone-shaped tapered surface. In this case, the secondary chamber side opening 92 also serves as a spring chamber that houses a pressure receiving plate urging spring 95 described later, and is formed to have a larger diameter than the main channel 96 of the communication channel 80. In addition, the outflow opening 94 is disposed vertically below the secondary chamber side opening 92, and the functional liquid smoothly flows from the secondary chamber side opening 92 to the outflow opening 94. It is supposed to be. Further, a flow path groove 97 extending in a cross shape in the vertical and horizontal directions is formed in the inner wall 91 of the secondary chamber 79 with the secondary chamber side opening 92 as the center.

  As shown in FIG. 9, the outflow port 98 is formed in the inclined boss portion 101 located at the lower portion of the housing main body 82, and the outflow port 102 opened at the lower portion of the inclined boss portion 101 and the outflow opening of the secondary chamber 79. The part 94 and the above-described outflow channel 93 that communicates these are configured. The outflow channel 93 extends obliquely from the peripheral wall 91 b of the inner surface wall 91 and communicates with the downward outlet 102. An outflow connector 81 is screwed into the outflow port 102 from the axial direction of the outflow passage 93, and is connected to the head side tube 61 through the outflow connector 81. The internal flow path of the outflow connector 81 is widened at the upstream end so that no step is generated in the internal flow path and the flow rate of the functional liquid is not greatly changed. The functional liquid flowing out from the secondary chamber 79 flows obliquely from the outflow opening 94 according to the gradient of the outflow channel 93 and flows out to the functional liquid droplet ejection head 3 side.

  As shown in FIGS. 8 and 9, the housing main body 82 is formed with the communication flow path 80 that connects the primary chamber 70 and the secondary chamber 79. The communication flow path 80 includes a main flow path 96 and a secondary chamber side opening 92 connected to the main flow path 96. The primary chamber 70, the secondary chamber 79, and the communication flow path 80 all have a circular cross section concentric with the diaphragm 75. However, the main flow channel 96 includes a circular cross-section shaft insertion portion 104 in which a shaft portion 103 of a valve body 76, which will be described later, is slidably accommodated, and a cross-shaped cross-section flow passage extending from the shaft free insertion portion 104 in four radial directions. Part 105 (see FIG. 7B). Note that an annular housing body annular groove 106 is formed on the diaphragm 75 side facing surface of the housing body 82 for a packing 85 described later.

  The diaphragm 75 includes a diaphragm main body 107 made of a resin film, and a resin pressure receiving plate 108 attached to the inside of the diaphragm main body 107. The pressure receiving plate 108 is formed in a disc shape concentric with the diaphragm main body 107 and has a sufficiently small diameter with respect to the diaphragm main body 107, and a shaft portion 103 of a valve body 76 described later contacts the center thereof. The diaphragm main body 107 is formed by laminating heat-resistant PP (polypropylene), special PP, and PET (polyethylene terephthalate) vapor-deposited on silica, and is formed in a circular shape having the same diameter as the front surface of the housing main body 82. The pressure plate 108 may be provided outside the diaphragm 75. However, since a shaft portion 103 of a valve body 76, which will be described later, repeats separation and contact, the pressure receiving plate 108 is provided inside in the present embodiment in order to prevent the diaphragm 75 from being damaged. Yes.

  The valve body 76 includes a disc-shaped valve body main body 111, a shaft portion 103 that extends in one direction so as to form a transverse “T” shape from the center of the valve body main body 111, and a shaft portion 103 of the valve body main body 111. And an annular valve seal 112 provided (adhered) on the side (front surface). The valve body main body 111 and the shaft portion 103 are integrally formed of a corrosion resistant material such as stainless steel. The valve seal 112 is formed in an annular shape with, for example, soft silicon rubber. For this reason, when the valve body 76 is closed, the valve seal 112 strongly contacts the opening edge of the communication flow path 80 serving as a valve seat, and the communication flow path 80 is liquid-tightly closed from the primary chamber 70 side.

  The shaft 103 is slidably fitted in the communication flow path 80 (the main flow path 96), and abuts against the pressure receiving plate 108 of the diaphragm 75 whose front end (front end) is in the neutral position in the valve-closed state. That is, in the positive deformation state in which the diaphragm 75 bulges outward, a predetermined gap is generated between the front end of the shaft portion 103 and the pressure receiving plate 108, and the diaphragm 75 is deformed to the negative side from this state. Then, the front end of the shaft portion 103 and the pressure receiving plate 108 come into contact with each other in a neutral state, and when the diaphragm 75 is further deformed negatively, the pressure receiving plate 108 pushes the valve body main body 111 through the shaft portion 103 to open the valve. I will let you. Therefore, of the volume of the secondary chamber 79, the volume of the diaphragm 75 in which the diaphragm 75 becomes neutral from the plus deformation is supplied with the functional liquid without receiving any pressure on the primary chamber 70 side.

  Between the back surface of the valve body 76 and the wall body 113 of the primary chamber 70, a valve body urging spring 114 for urging the valve body 76 in the secondary chamber 79 side, that is, the valve closing direction is interposed. . Similarly, a pressure receiving plate urging spring 95 that urges the diaphragm main body 107 toward the outside via the pressure receiving plate 108 is interposed between the pressure receiving plate 108 and the inner wall 91. In this case, the valve body biasing spring 114 complements the water head of the functional liquid tank 43 applied to the back surface of the valve body 76, and due to the water head of the functional liquid tank 43 and the spring force of the valve body biasing spring 114, The valve body 76 is pressed in the closing direction. On the other hand, the pressure receiving plate biasing spring 95 complements the positive deformation of the diaphragm 75 and acts so that the secondary chamber 79 becomes a negative pressure with respect to the atmospheric pressure.

  The pressure adjustment valve 46 opens and closes when the diaphragm 75 (and the valve body 76 with which the diaphragm 75 abuts) deforms (advances and retreats) due to the pressure balance between the atmospheric pressure and the secondary chamber 79 connected to the functional liquid droplet ejection head 3. The chamber 79 side is depressurized to a predetermined pressure. At this time, force acts on the valve body biasing spring 114 and the pressure receiving plate biasing spring 95 in a distributed manner, and the valve body 76 opens and closes very slowly by the valve seal 112 (elastic force thereof) of soft silicone rubber. For this reason, pressure fluctuation (cavitation) due to opening and closing of the valve body 76 is suppressed, and the ejection drive of the functional liquid droplet ejection head 3 is not affected. Of course, the pulsation and the like generated on the functional liquid tank 43 side (primary chamber 70 side) are also edged by the valve body 76 and can be absorbed (damper function).

  Further, since the primary pressure chamber 70 and the secondary chamber 79 are arranged back to back in the pressure adjustment valve 46 of the present embodiment, the pressure adjustment valve 46 is coupled to the thin shape of the secondary chamber 79 as much as possible. It can be formed thin. However, although the thickness of the pressure regulating valve 46 is determined by the diameters of the inflow connector 78 and the outflow connector 81, the thickness can be further reduced by using a smaller connector.

Next, the operation principle of the pressure adjustment valve 46 will be described. The primary chamber 70 has a head based on the liquid level of the functional liquid stored in the functional liquid tank 43 (in terms of design, between the central axis of the supply port 54 of the functional liquid tank 43 and the central axis of the primary chamber 70. The pressure based on this water head and the spring force of the valve body urging spring 114 act as the valve closing force of the valve body 76.
That is, when the pressure per unit area based on the water head is P1, the area of the back surface of the valve body 111 is S1, and the spring force of the valve body biasing spring 114 is W1, the valve body from the primary chamber 70 side. The force F1 acting on 76 is
F1 = (P1 × S1) + W1
It becomes. W1 is a value that takes into account the elastic force of the valve seal 112, and here, the total of the spring force and the elastic force (biasing force) of the valve seal 112 is W1.
On the other hand, the force F2 acting on the valve body 76 from the secondary chamber 79 side is when the internal pressure of the secondary chamber 79 is P2, the area of the diaphragm 75 is S2, and the spring force of the pressure receiving plate urging spring 95 is W2. In addition,
F2 = (P2 × S2) −W2
It becomes. P1 and P2 are gauge pressures. The center diameter D of the diaphragm 75 is an average diameter of the outer diameter of the diaphragm main body 107 and the outer diameter of the pressure receiving plate 108.
S2 = (D / 2) × (D / 2) × π
It is represented by

  The valve body 76 opens in the state of F2> F1, and closes in the state of F1> F2. In this embodiment, W1 and W2 are determined experimentally, and S1 is set based on W1. Then, according to the above relationship, the center diameter D of the diaphragm 75 is further obtained so that the valve body 76 opens and closes using the atmospheric pressure as the reference adjustment pressure, and the outer diameter of the diaphragm main body 107 and the outer diameter of the pressure receiving plate 108 are set. It has become.

That is, when the functional liquid is consumed (discharged) by the functional liquid droplet ejection head 3 from the positively deformed state of the diaphragm 75 and the negative pressure in the secondary chamber 79 increases, the diaphragm 75 is pushed to the atmospheric pressure and is brought into the neutral state. Move to negative deformation. Thereby, the valve body 76 is pushed through the pressure receiving plate 108 and slowly opens. When the valve body 76 is opened, the functional liquid flows from the primary chamber 70 into the secondary chamber 79 through the communication channel 80. As a result, the pressure in the secondary chamber 79 increases, and the valve body 76 slowly closes. Even after the valve body 76 is closed, the pressure receiving plate urging spring 95 acts against the atmospheric pressure, and the diaphragm 75 is positively deformed, and the functional fluid pressure in the secondary chamber 79 is brought to a predetermined pressure state. Let By slowly repeating the above operation, the functional liquid is supplied while the secondary chamber 79 is maintained at a substantially constant pressure.
Note that the functional fluid pressure in the secondary chamber 79 becomes the operating pressure of the valve body 76, but the pressure in the secondary chamber 79 also changes when the characteristics (for example, specific gravity) of the functional fluid change. In this case, the operating pressure also changes, but it can be adjusted by changing the mounting position of the pressure adjusting valve 46 and changing the relative height difference between the nozzle surface 37 and the pressure adjusting valve 46.

  Next, with reference to FIG. 10, the cross-shaped flow channel 97 formed in the inner surface wall 91 of the secondary chamber 79 will be described. The channel groove 97 includes an auxiliary channel 115 (narrow groove 115a) that extends vertically downward from the secondary chamber side opening 92, an air vent groove 116 that extends vertically upward from the secondary chamber side opening 92, and 2 It comprises a pair of first air vent / fluid vent grooves 117 extending from the next chamber side opening 92 in the horizontal direction (left-right direction). Each groove 115, 116, 117 is formed in a square shape with a width of about 1 mm and a depth of about 0.5 mm. The open portions of the grooves 115, 116, 117 are covered with a diaphragm 75 (mainly, the pressure receiving plate 108) that is deformed to the maximum minus, thereby functioning as a flow path for functional liquid or air.

  The auxiliary flow path 115 includes a narrow groove 115 a extending from the secondary chamber side opening 92 to a position beyond the outer peripheral end of the pressure receiving plate 108, and a gap 115 b extending from the narrow groove 115 a to the outflow opening 94. (Refer FIG.11 (b)). The narrow groove 115a is covered with the pressure receiving plate 108 of the diaphragm 75 that is deformed to the maximum minus extent, and always maintains the flow path. The gap 115b is formed by a minute gap generated between the diaphragm main body 107 and the peripheral wall 91b by the outer peripheral end of the pressure receiving plate 108 of the diaphragm 75 that has undergone maximum negative deformation. The flow path is always maintained by the tension. As described above, even if the auxiliary flow passage 115 causes the diaphragm 75 deformed in the most minus direction to come into contact (close contact) with the inner wall 91 of the secondary chamber 79, the secondary chamber side opening 92 and the outflow opening 94 are connected to each other. A communicating channel is secured. It is more preferable to extend the narrow groove 115a to the outflow opening 94.

  The air vent groove 116 extends from the secondary chamber side opening 92 to a position beyond the outer peripheral end of the pressure receiving plate 108 (see FIG. 9). Also in this case, the air vent groove 116 is covered with the pressure receiving plate 108 of the diaphragm 75 that is deformed to the maximum minus, and always maintains the flow path. As a result, even if the diaphragm 75 is non-uniformly negatively deformed, the air accumulated in the upper portion of the secondary chamber 79 can be efficiently discharged through the air vent groove 116.

  The pair of first air vent / fluid vent grooves 117 respectively extend from the secondary chamber side opening 92 to a position beyond the outer peripheral end of the pressure receiving plate 108. Also in this case, the first air vent / fluid drain groove 117 is covered with the pressure receiving plate 108 of the diaphragm 75 which is deformed to the maximum minus, and always maintains the flow path. As a result, even if the diaphragm 75 is unevenly negatively deformed, the air and functional liquid accumulated in the left-right direction of the secondary chamber 79 can be efficiently discharged via the first air vent / fluid drain groove 117. I am doing so.

  Next, with reference to FIG. 11 and FIG. 12, an initial filling operation of the functional liquid and a liquid draining operation in the replacement of the functional liquid will be described. The initial filling of the functional liquid is performed by passing the functional liquid from the functional liquid tank 43 while the functional liquid droplet ejection head 3 is sucked (head suction) by the suction mechanism 74 and discharging the functional liquid droplets from the functional liquid tank 43. The functional liquid is filled in the flow path of the functional liquid reaching the head 3. The pressure receiving plate urging spring 95 is omitted in the figure.

  As shown in FIG. 11A, in the initial filling operation of the functional liquid, first, the functional liquid tank 43 is connected to the connection tool 45, and the functional liquid droplet ejection head 3 is sealed with the sealing cap in the maintenance area 23. After the 72 is brought into close contact, the suction mechanism 74 is driven to start the head suction. When the head suction is started, the air in the secondary chamber 79 of the pressure adjustment valve 46 is discharged (bleed out) through the functional liquid supply tube 44. As a result, the inside of the secondary chamber 79 becomes a negative pressure (predetermined operating pressure) with respect to the atmospheric pressure, and the diaphragm 75 is pushed to the atmospheric pressure and is negatively deformed (maximum minus). Deform. At the same time, the valve body is pushed by the pressure receiving plate 108 to open the pressure adjusting valve 46. In this valve open state, the air in the secondary chamber is sucked through the air vent groove 116 and the first air vent / fluid drain groove 117 through the auxiliary flow path 115, and the air on the primary chamber 70 side is also communicated. It is discharged to the suction mechanism 74 through the flow path 80 and the auxiliary flow path 115.

  If the head suction is continued in this state, as shown in FIG. 11B, the functional liquid in the functional liquid tank 43 flows down after the discharged air, and the functional liquid flows in the order of the primary chamber 70 and the secondary chamber 79. It will be filled. In this way, when the functional liquid is passed (sensed) to the sealing cap 72 (see FIG. 12A), the driving of the suction mechanism 74 is stopped. Here, the greatly deformed diaphragm 75 returns to its original state by both springs 95 and 114 and its own restoring force, and finally the valve body 76 is closed to complete a series of filling operations (FIG. 12). (See (b)). Thus, immediately after the start of the head suction, the diaphragm 75 is deformed so as to be in close contact with the inner wall 91 of the secondary chamber. However, the auxiliary flow path causes the diaphragm 75 to be interposed between the secondary chamber side opening 92 and the outflow opening 94. Since the flow path is secured, the flow path is not blocked by the diaphragm 75, and the air on the primary chamber 70 side can be discharged efficiently. Further, the air in the secondary chamber 79 can be sucked to the maximum by the air vent groove 116 and the first air vent / liquid drain groove 117. Note that an air reservoir (not shown) may be provided above the air vent groove 116 to hold a slight amount of remaining air. Furthermore, it is also preferable to form an air vent (not shown) connected to the air reservoir.

  On the other hand, in the replacement work of the functional liquid, the liquid draining work is performed prior to the cleaning work, and the liquid draining work is to discharge the functional liquid in the flow path by the same principle as the above-described initial air bleeding. This liquid draining operation is performed by removing the functional liquid tank 43 from the connection tool 45 and sucking the head while the connection tool 45 is opened to the atmosphere.

  When the suction mechanism 74 is driven in the atmosphere open state, the functional liquid in the secondary chamber 79 is discharged and the secondary chamber 79 becomes negative pressure, and the diaphragm 75 is pushed to the atmospheric pressure and contacts the inner wall 91. (Valve open). Also in this case, similarly to the initial filling described above, the auxiliary flow path 115 functions and the functional liquid on the upstream primary chamber 70 side is also discharged to the suction mechanism 74, and air flows in after the functional liquid. In this case, in the secondary chamber 79, air and functional liquid accumulated in the upper portion of the secondary chamber 79 are discharged via the air vent groove 116, and also the secondary chamber via the first air vent / fluid drain groove 117. The functional liquid at both left and right end portions 79 is discharged to the suction mechanism 74 side. In this manner, the functional liquid can be almost completely drained from the pressure regulating valve 46, and the functional liquid can be completely washed away in the subsequent cleaning step. Then, the functional liquid is refilled in this, and the functional liquid replacement work is completed. In this case, refilling is performed in the same procedure as the initial filling described above.

  Also in this case, immediately after the head suction is started, the diaphragm 75 is deformed so as to be in close contact with the inner wall 91 of the secondary chamber. However, the auxiliary flow passage 115 causes the secondary chamber side opening 92 and the outflow opening 94 to be separated. Therefore, the functional liquid on the primary chamber 70 side can be efficiently discharged. Further, the functional fluid in the secondary chamber 79 can be sucked to the maximum by the air vent groove 116 and the first air vent / liquid drain groove 117.

  Note that a three-way valve (not shown) may be provided downstream of the above-described connector, and the initial filling or draining operation may be performed using the three-way valve. That is, the one port of the three-way valve is opened to the atmosphere to drain the liquid. When discharging air by suctioning the head during initial filling, the above-mentioned one port of this three-way valve is closed, and after discharging the air, the three-way valve is opened (communication) and passed into the pressure regulating valve 46. You may make it liquid. According to this initial filling method, the functional liquid is vigorously passed through the pressure regulating valve 46, and the air remaining in the valve can be efficiently discharged to the suction mechanism 74 side.

  Next, a second embodiment of the flow channel 97 of the pressure regulating valve 46 will be described with reference to FIG. The flow path groove 97A of the second embodiment is formed in a “single letter” shape in the vertical direction. The flow path groove 97A is formed of an air vent groove 116 extending vertically upward from the secondary chamber side opening 92, an auxiliary flow path 115, and a narrow line extending downward (peripheral wall 91b) from the outflow opening 94 so as to be continuous therewith. It has a groove-shaped liquid draining groove 118. The auxiliary flow path 115, the air vent groove 116, and the liquid drain groove 118 are formed in a shape covered with a diaphragm 75 whose open portion is deformed to the maximum extent. The air vent groove 116 extends to the upper end of the peripheral wall 91b so that air can be discharged efficiently. The auxiliary flow path 115 connects the secondary chamber side opening 92 and the outflow opening 94 so that the flow path can be reliably secured. In the liquid draining groove 118, a portion below the outflow opening 94 of the secondary chamber 79 and the outflow opening 94 are connected to each other, and the functional liquid remaining in the lower portion of the secondary chamber 79 can be discharged. ing.

  According to the flow path groove 97A of the second embodiment, the functional liquid accumulated in the lower portion of the secondary chamber 79 can be efficiently discharged when the head is sucked. Similarly, the air accumulated in the upper part of the secondary chamber 79 can be efficiently discharged when the head is sucked.

  Next, with reference to FIG. 13B, a third embodiment of the flow channel 97 of the pressure regulating valve 46 will be described. The channel groove 97B of the third embodiment has the auxiliary channel 115, the liquid draining groove 118, and the air venting groove 116 of the second embodiment described above, and from the secondary chamber side opening 92 (spring chamber *). A pair of left and right first air vent / liquid drain grooves 117 extending on both sides in the horizontal direction are provided, and in this case as well, it is formed in a cross shape as a whole. In this case, the air vent groove 116, the first air vent / liquid drain groove 117 and the liquid drain groove 118 are formed so as to extend to the peripheral wall 91b of the secondary chamber 79, and the functional liquid and air are efficiently discharged. It can be done.

  Next, with reference to FIG.13 (c), 4th Embodiment of the flow-path groove 97 of the pressure regulation valve 46 is described. The channel groove 97C of the fourth embodiment includes the auxiliary channel 115 and the liquid draining groove 118 as in the second embodiment, and bypasses the secondary chamber side opening 92 from the outflow opening 94 to surround the peripheral wall 91b. A pair of second air vent / fluid drain grooves 121 extending upward are provided. The second air vent / fluid drain groove 121 is concentric with the diaphragm 75, and is formed in a groove shape covered with the diaphragm 75 whose open portion is deformed to the maximum minus extent.

  According to the flow path groove 97 </ b> C of the pressure regulating valve 46 of the fourth embodiment, not only the air accumulated at the upper end of the secondary chamber 79 by the second air vent / fluid drain groove 121 but also the left and right ends of the secondary chamber 79. The air and functional liquid accumulated in the nozzle can be efficiently discharged when the head is sucked. In addition, you may make it connect the termination | terminus of both 2nd air bleeding and the liquid draining groove | channel 121. FIG. Further, in the fourth embodiment, the second air vent / fluid drain groove 121 is formed so as to extend from the outflow opening 94, but the same effect can be obtained even if it is formed so as to extend from the auxiliary flow path 115. Can do.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 14 is a flowchart showing the manufacturing process of the color filter, and FIG. 15 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in a bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 15B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 15C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 therebelow serve as a partition wall portion 507b that partitions each pixel region 507a, and colored layers (film forming portions) 508R, 508G, and 508B are formed by the droplet discharge head 3 in a subsequent colored layer forming step. The landing area of the functional droplet is defined when forming the.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. The landing position accuracy is improved.

  Next, in the colored layer forming step (S103), as shown in FIG. 15 (d), functional droplets are ejected by the functional droplet ejection head 3, and each pixel region 507a is surrounded by the partition wall portion 507b. Let it land. In this case, the functional liquid droplet ejection head 3 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. When the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. 15E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 16 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 15, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 520 is roughly composed of a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 16 are formed at a predetermined interval. A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 3. Furthermore, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 3.

FIG. 17 is a cross-sectional view of an essential part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 18 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 19 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 stacked on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power line 614 is disposed on the first interlayer insulating film 611a, and the power line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. In addition, you may further form the other functional layer which has another function adjacent to this light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 20, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 21, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 3, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 17 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 23, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 3 to each opening 619 that is a pixel region. Discharge inside. Thereafter, as shown in FIG. 24, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform a surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 25, a pixel region (with the second composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 25)) as a functional droplet is used. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 26, a hole injection / transport layer 617a is obtained. A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 3, as shown in FIG. 27, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 28, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 29 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701 and a second substrate 702 that are disposed to face each other, and a discharge display portion 703 that is formed therebetween. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence. The red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 14 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 3. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
In the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the droplet ejection head 3, and the corresponding color In the discharge chamber 705.

Next, FIG. 30 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 includes a first substrate 801, a second substrate 802, and a field emission display unit 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 31A, and when these are formed, as shown in FIG. 31B. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a plane schematic diagram of a droplet discharge device. It is a side surface schematic diagram of a droplet discharge device. It is a top view of a carriage main body. It is an external appearance perspective view of a functional droplet discharge head. It is a side surface schematic diagram of a functional liquid supply mechanism. It is an external appearance perspective view of a pressure control valve. It is the rear view (a) of a pressure regulating valve, and a front view (b). It is the longitudinal cross-sectional view which cut | disconnected the pressure regulation valve in the axial direction of the inflow port. It is the longitudinal cross-sectional view which cut | disconnected the pressure regulation valve in the axial direction of the outflow port. It is detail drawing of the flow-path groove | channel of a secondary chamber. It is operation | movement explanatory drawing which showed the pressure adjustment valve before (a) head attraction | suction, and (b) just after a head attraction | suction start. (C) It is operation | movement explanatory drawing showing the pressure regulation valve during head attraction | suction, and (d) after completion | finish of head attraction | suction. These are the flow channel groove (a) of the second embodiment, the flow channel groove (b) of the third embodiment, and the flow channel groove (c) of the fourth embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

W Work 1 Droplet discharge device 3 Function droplet discharge head 6 Function liquid supply mechanism 11 X / Y movement mechanism 43 Function liquid tank 44 Function liquid supply tube 46 Pressure adjustment valve 69 Valve housing 70 Primary chamber 79 Secondary chamber 80 Communication Flow path 75 Diaphragm 76 Valve element 91 Inner wall 91a End wall 92 Secondary chamber side opening 91b Peripheral wall 93 Outflow flow path 94 Outflow opening 97 Flow path groove 115 Auxiliary flow path 116 Air vent groove 117 First air vent / fluid vent Groove 118 Liquid drain groove 121 Second air vent / fluid drain groove

Claims (15)

Supplying the functional liquid introduced from the functional liquid tank to the primary chamber in the valve housing to the functional liquid droplet ejection head via the secondary chamber in the valve housing;
Opening and closing operation of the valve body provided in the communication channel that connects the primary chamber and the secondary chamber with the atmospheric pressure as the adjustment reference pressure by the diaphragm that faces the atmosphere and forms one surface of the secondary chamber A pressure regulating valve for regulating the pressure in the secondary chamber,
The secondary chamber has an opening on the secondary chamber side of the communication channel and an outflow opening of an outflow channel connected to the functional liquid droplet ejection head,
The pressure regulating valve, wherein an inner wall of the secondary chamber excluding the one surface is formed in a shape in which the diaphragm deformed by a maximum minus deformation is in contact. The secondary chamber is formed in a truncated cone shape with the diaphragm side as a bottom surface,
The secondary chamber side opening opens to the end wall of the inner wall that becomes the top surface of the truncated cone shape,
The pressure regulating valve according to claim 1, wherein the outflow opening is opened in a peripheral wall of the inner wall that becomes the tapered surface of the truncated cone shape.   An auxiliary flow path is formed on the inner wall of the secondary chamber to partially prevent the diaphragm that has undergone the maximum negative deformation and to communicate the secondary chamber side opening and the outflow opening. The pressure regulating valve according to claim 2.   The auxiliary flow path is formed in the inner wall and includes a narrow groove that is connected to the secondary chamber side opening and the outflow opening and is covered with the diaphragm whose open portion is deformed to the maximum extent. The pressure regulating valve according to claim 3. The diaphragm has a membrane-like diaphragm body, and a pressure receiving plate that is attached to the inside of the diaphragm body and opens and closes the valve body,
The auxiliary flow path is formed in the inner wall, extends from the secondary chamber side opening to a position beyond the outer peripheral end of the pressure receiving plate, and has a narrow groove portion covered with the diaphragm having a maximum negative deformation of the open portion, The narrow groove portion and the outflow opening portion are communicated with each other, and a gap portion formed between the diaphragm main body and the inner wall is caused by the thickness of the pressure receiving plate of the diaphragm and the tension of the diaphragm. The pressure regulating valve according to claim 3, wherein   5. The secondary chamber is arranged such that the diaphragm is in a vertical posture and the outflow opening is positioned below the secondary chamber side opening in the vertical direction. Or the pressure regulating valve of 5. The outflow opening is open in the upper and lower middle part of the lower slope of the peripheral wall,
The pressure regulating valve according to claim 6, wherein a drainage groove is formed in the inner wall so as to extend downward from the outflow opening and to be covered with the diaphragm having a maximum minus deformation of the opening. .   8. The air release groove covered with the diaphragm that extends upward from the opening portion on the secondary chamber side and has the opening portion deformed to the maximum minus extent is formed in the inner surface wall. The pressure regulating valve described.   The inner wall of the secondary chamber is formed with a first air vent / fluid groove extending in the horizontal direction from the opening on the side of the secondary chamber and covered with the diaphragm with the opening portion deformed to the maximum minus extent. The pressure regulating valve according to any one of claims 6 to 8.   The inner wall extends from either one of the outflow opening and the auxiliary flow path to bypass the secondary chamber side opening and extends upward, and is covered with the diaphragm whose opening is maximally negatively deformed. 8. The pressure regulating valve according to claim 6 or 7, wherein a drain / fluid drain groove is formed. The functional liquid tank for storing the functional liquid;
The pressure regulating valve according to any one of claims 1 to 10, which is connected to the functional fluid appropriate ejection head,
A functional liquid supply mechanism comprising: a functional liquid supply flow path that connects an upstream end to the functional liquid tank and connects a downstream end to the pressure regulating valve. A functional liquid supply mechanism according to claim 11,
The functional liquid droplet ejection head for ejecting functional liquid droplets to a workpiece;
An apparatus for discharging liquid droplets, comprising: an XY movement mechanism for moving the workpiece relative to the functional liquid droplet discharge head in the X-axis direction and the Y-axis direction.   13. A method of manufacturing an electro-optical device, wherein the droplet discharge device according to claim 12 is used to form a film forming portion using the functional droplets on the workpiece.   An electro-optical device using the droplet discharge device according to claim 12, wherein a film forming portion using the functional droplet is formed on the workpiece.   15. An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 13 or the electro-optical device according to claim 14.