JP2002207518A - Pressure control valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pressure control valve allowing simplification of washing operation for its portions in contact with fluid, while also avoiding troubles such as accumulation of air in chambers. SOLUTION: The pressure control valve 10 comprises a first chamber 12 with an inflow part 13; a second chamber 14 with an upper outflow part 15 and a lower outflow part 16; a body 11 with a valve seat 18; a rod part 21 with a valve part 22 for opening and closing the valve seat; and a valve mechanism body 20 with a first diaphragm part 30 and a second diaphragm part 40. The first diaphragm part separates the first chamber into an inner first valve chamber 51 and an outer first pressure regulating chamber 52 and the second diaphragm part separates the second chamber into an inner second valve chamber 55 and an outer second pressure regulating chamber 56. Pressure regulating means M1 and M2 for regulating the respective diaphragm parts are provided in the respective pressure regulating chambers.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a pressure control valve for controlling a fluid (liquid or gas) to a predetermined pressure state.

[0002]

2. Description of the Related Art The inventors of the present invention have previously disclosed a pressure control valve (Japanese Patent No. 2671183, Japanese Patent Application Laid-Open No. 2000-2001) that can control the pressure of a fluid on the secondary side (outflow side) to a predetermined state using a diaphragm. 193106) and a pressure control valve (back pressure control valve) that can control the pressure of the fluid on the primary side (inflow side) to a predetermined state.

[0003] In this type of pressure control valve, the internal pressure of the valve may be reduced to eliminate problems such as the generation of bacteria inside or to change the controlled fluid from one fluid to another. Fluid contact portions that come into contact with the controlled fluid, such as the inner wall of the chamber and the valve mechanism, may be cleaned. The cleaning of the fluid contact portion is performed by injecting a cleaning fluid, such as a cleaning liquid or cleaning air, into the pressure control valve from one of an inlet and an outlet formed one by one in the pressure control valve. This is done by discharging the cleaning fluid out of the pressure control valve. However, it has been difficult to say that the pressure control valve according to the above-mentioned prior invention can simply and efficiently clean the fluid contact portion. That is, the cleaning requires much time, labor and a large amount of cleaning fluid, and is not economical. Further, when the pressure control valve is reused after the cleaning, air accumulates in the chamber,
There is also a problem that the air cannot be successfully discharged to the outside of the pressure control valve.

In the pressure control valve, the volume of the chamber accommodating the diaphragm is larger than the area of the membrane of the diaphragm on the side where the outer diameter of the membrane (effective diaphragm diameter) is smaller. It is often the case that the controlled fluid remains in the chamber. In particular, when the controlled fluid is a highly viscous liquid or the like, due to the stagnation of the controlled fluid, the replacement characteristic of the fluid as a pressure control valve of this type is reduced, and further, the stagnation of the fluid There is the problem of acting as a source of contamination causing bacterial outbreaks.
Such a problem is a great disadvantage when such a pressure control valve is used for controlling ultrapure water, a chemical solution or the like.

[0005]

SUMMARY OF THE INVENTION The present invention has been proposed to address the above-mentioned problems, and has the disadvantage that the operation of cleaning the fluid contact portion can be simplified and that air is accumulated in the chamber. In addition, it is an object of the present invention to provide a novel pressure control valve structure in which there is no stagnation of the controlled fluid, and there is no decrease in fluid replacement characteristics or germs or the like due to stagnation of the fluid. Aim.

[0006]

That is, a first aspect of the present invention is a pressure control valve (10) for controlling a primary or secondary fluid to a predetermined pressure state. A first chamber (12) having an inlet (13), an upper outlet (15) and a lower outlet (1) for a controlled fluid;
A body (11) having a communication chamber (14) having a second chamber (14) having a valve seat (18) and communicating with the first and second chambers;
A rod part (21) having a valve part (22) for opening and closing the valve seat, which is inserted into the communication flow path so as to be able to advance and retreat, and disposed on one side of the rod part and arranged in the first chamber; A valve mechanism (20) comprising a first diaphragm part (30) and a second diaphragm part (40) also provided on the other side of the rod part and arranged in the second chamber. One diaphragm part has its outer peripheral seal part (3
2) is fixed to a body main body constituting the first chamber, and the first chamber is divided into a first valve chamber (51) including the inflow portion inside the first diaphragm portion and a first pressure regulating chamber (5) outside.
2), the outer peripheral seal portion (42) of the second diaphragm portion is fixed to a body main body constituting the second chamber, and the second chamber is connected to the upper outflow portion and the lower portion inside the second diaphragm portion. The second valve chamber (5
5) and an outer second pressure regulating chamber (56), and the first pressure regulating chamber is provided with first pressure regulating means (M1) for regulating the first diaphragm section in a predetermined direction at a predetermined set pressure. And a second pressure adjusting means (M) for adjusting the second diaphragm portion in a predetermined direction at a predetermined pressure in the second pressure adjusting chamber.
2) is provided.

According to a second aspect of the present invention, there is provided the pressure control valve for controlling the secondary fluid to a predetermined pressure state according to the first aspect, wherein the outer diameter of the membrane portion of the first diaphragm portion is the second diaphragm. The outer diameter of the membrane portion of the first diaphragm portion and the inner diameter of the first valve chamber of the first chamber are substantially equal to each other.

Further, the invention of claim 3 is the pressure control valve according to claim 1 for controlling the primary fluid to a predetermined pressure state, wherein the outer diameter of the membrane portion of the first diaphragm portion is equal to that of the second diaphragm portion. Wherein the outer diameter of the membrane portion of the second diaphragm portion and the inner diameter of the second valve chamber of the second chamber are substantially the same.

Still further, the invention of claim 3 provides the invention of claim 2
In 3 or 3, the membrane portion of the diaphragm portion having the smaller outer diameter of the membrane portion and the outer peripheral seal portion are formed with a step provided through the upright portion (80), and the upright portion has a body main body. A sealing projection (81) to be crimped on the inner wall is formed.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a front view of a pressure control valve according to one embodiment of the present invention, FIG. 2 is a cross-sectional view of the pressure control valve of FIG. 1 taken along line 2-2, and FIG. 4 is a front view of a pressure control valve according to another embodiment, FIG. 5 is a cross-sectional view of the pressure control valve of FIG. 4 taken along line 5-5, and FIG. FIG. 7 is a cross-sectional view of the pressure control valve taken along line 6-6, and FIG. 7 is a cross-sectional view illustrating a main part of a pressure control valve according to still another embodiment.

The pressure control valve 10 shown in FIGS.
According to one embodiment of the present invention, it is used to control the pressure of a secondary fluid to a predetermined state in response to a pressure fluctuation of a primary fluid. The pressure control valve 10 includes a body 11 and a valve mechanism 20.

The body body 11 is formed of a resin having high corrosion resistance and chemical resistance such as fluororesin, and has a first chamber 12 having an inflow portion 13 for a controlled fluid, and an upper outlet for a controlled fluid. It has a second chamber 14 having a portion 15 and a lower outlet 16, and a communication channel 17 communicating with the first chamber 12 and the second chamber 14 and having a valve seat 18 formed therein. In the communication flow path 17, the opening amount between the valve portion 22 and the valve seat 18 of the valve mechanism body 20 changes due to the movement of the valve mechanism body 20 to be described later. The flow rate (secondary pressure) of the controlled fluid flowing to the secondary side (outflow sections 15 and 16 side) is controlled. The body main body 11 of this embodiment is divided into a first block 11a, a second block 11b, and a third block 11c, and these are integrally assembled by a fixing member B such as a bolt. Also, an inflow pipe is provided in the inflow section 12,
An outflow pipe is connected to the upper outflow portion 15 or the lower outflow portion 16, respectively. The position and the forming direction (direction) of the inflow portion 13 provided in the first chamber 12 are not particularly limited. In the illustrated example, the inflow portion 13 is formed in a direction orthogonal to the upper outflow portion 15 and the lower outflow portion 16, that is, along a horizontal direction.

Here, preferably, when the use of the pressure control valve 10 (pressure control) is started again after the cleaning of the fluid contact portion described later, the air inside the pressure control valve 10 (in the chamber) is discharged to the upper outflow portion 15. As shown in the figure, it is preferable to form the chamber-side opening 15a (at least a part of the peripheral wall of the opening) of the upper outflow portion 15 at the uppermost position of the second chamber 14 in order to completely remove the water from the outside. good. Also,
In order to prevent the cleaning fluid used for cleaning from remaining in the pressure control valve 10 during or after cleaning the fluid contact portion,
As shown, the chamber-side opening 16 of the lower outflow portion 16 is provided.
a (strictly speaking, at least a part of the peripheral wall of the opening) is desirably formed at the lowermost position of the second chamber 14 so that the cleaning fluid is discharged from the lower outlet 16.

The valve mechanism body 20 is formed of a resin having high corrosion resistance and chemical resistance, such as fluorocarbon resin, like the body body 11, and has a rod portion 21 which is inserted into the communication passage 17 so as to be able to advance and retreat. , A first diaphragm portion 30 disposed in the first chamber 12 and a second diaphragm portion 40 disposed in the second chamber 14. In addition,
In the embodiment, the respective diaphragm portions 30 and 40 are disposed such that their radial directions substantially coincide with the vertical direction Y of the body main body 11.

The rod portion 21 has a valve portion 22 for opening and closing the valve seat 18. In this embodiment, the valve 2
2 is a rod portion 2 so as to be located on the first chamber 12 side.
It is formed so as to protrude from one outer peripheral surface. In this embodiment, the surface of the valve section 22 is formed as a tapered surface.

The first diaphragm portion 30 is provided at an end of the rod portion 21 on the first chamber side, and has a thin film portion (movable portion) 31 as a diaphragm surface and an outer peripheral seal portion 32 on the outer peripheral side. are doing. The second diaphragm portion 40 is provided at an end of the rod portion 21 on the second chamber side, and has a thin film portion (movable portion) 41 which is a diaphragm surface.
And an outer peripheral seal portion 42 on the outer peripheral side thereof. In this embodiment, the outer diameter (effective diaphragm diameter) L1 of the film part 31 of the first diaphragm part 30 is larger than the outer diameter (effective diaphragm diameter) L2 of the film part 41 of the second diaphragm part 40. .

The first diaphragm portion 30 and the second diaphragm portion 40 have their outer peripheral seal portions 32 and 42 fixed to the body main body 11, and are disposed in the first chamber 12 or the second chamber 14, respectively. I have. In the embodiment, as shown in the drawing, the first diaphragm portion 30 has an outer peripheral seal portion 32 formed by the first block 11 of the body main body 11.
a and the second block 11b. On the other hand, the outer peripheral sealing portion 42 of the second diaphragm portion 40 is
And the third block 11c.
The reference numeral 71 denotes a sealing member for sealing between the body main body 11 (11a, 11b) and the first diaphragm portion 30, and 72 denotes a sealing member for sealing between the body main body 11 (11b, 11c) and the second diaphragm portion 40. It is a sealing member.

Due to the first diaphragm portion 30, the first chamber 12 is located upstream of the valve seat 18 inside the first diaphragm portion 30 and a first valve chamber 51 including the inflow portion 13 and a first diaphragm portion. 30 first pressure regulation chamber 52 outside
It is divided into and. In addition, the second diaphragm portion 40 allows the second chamber 14 to be located downstream of the valve seat 18 inside the second diaphragm portion 40 and to be connected to the upper outlet portion 15.
And a second valve chamber 55 including the lower outflow section 16 and a second pressure regulation chamber 56 outside the second diaphragm section 40.

In the embodiment, the outer diameter of the membrane portion of the first diaphragm portion 30 (the maximum diameter of the portion in contact with the controlled fluid) L1 and the inner diameter of the first valve chamber 51 (the first The length between the upper and lower inner wall surfaces of the valve chamber 51) is substantially the same. Thereby, the portion of the first diaphragm portion 30 that comes into contact with the controlled fluid can be limited to the portion that is movable by receiving pressure, that is, the non-movable portion of the first diaphragm portion 30 is provided in the first valve chamber 51. Does not exist, so that the stagnation of the controlled fluid can be significantly reduced as compared with the related art. As a result, the fluid replacement characteristics are improved, and bacteria and the like are less likely to be generated. This pressure control valve 10 can be optimally used for controlling ultrapure water, a chemical solution, and the like.

The first diaphragm section 30 and the second diaphragm section 40 are provided with a first pressure regulating means M1 and a second pressure regulating means provided in the first pressure regulating chamber 52 and the second pressure regulating chamber 56, respectively. By M2, the pressure is regulated at a predetermined set pressure in a predetermined direction, and in this example, each valve chamber direction (inward) always.
At a constant pressure. The first pressure adjusting means M1 in the embodiment comprises a spring S1 having a predetermined spring constant. The spring S1 is provided between the inner wall of the first pressure adjusting chamber 52 and the spring receiving portion 70 fixed to the first diaphragm portion 30. Be attached. The first pressure adjusting means M1 is not limited to the spring S1, but employs a pressurized gas, or employs both a spring and a pressurized gas, and further employs a solenoid (electromagnet) or the like. You may. In the case where the spring is used alone, it is preferable that a spring holding member be screwed into the spring device to adjust the load, though not shown. Further, a servo motor or the like may be connected to the load-adjustable spring device so that the spring constant can be automatically controlled. Reference numeral 53 shown in the figure represents a respiratory path through which air enters and exits the first pressure regulation chamber 52.

Further, the second pressure adjusting means M2 of the embodiment comprises a pressure adjusting gas (here, pressurized gas) A1. When the second pressure adjusting means M2 is the pressure adjusting gas A1, there is an advantage that the adjustment of the set pressure is easy and it is effective when a large set pressure is required. In the drawing, reference numeral 57 denotes an air supply port for a regulated gas, 58 denotes its exhaust port, 59 denotes a check valve provided in the air supply port 57,
Reference numeral 0 denotes a supply source for supplying a pressure-regulated gas, and reference numeral 61 denotes an adjustment / control device such as an electro-pneumatic converter or an electro-pneumatic regulator for adjusting and controlling the pressure of the pressure-regulated gas. Note that, as the second pressurizing means M2, the above-described load-adjustable spring device, solenoid, or the like may be employed.

In the present embodiment, the rod portion 21 of the valve mechanism 20 is provided integrally with the first diaphragm portion 30 and is connected to the first member 23 having the valve portion 22 and the second diaphragm portion 40. The first member 23 is integrally provided.
And a second member 25 which is detachably and loosely connected. The loosely-fitted connection between the first member 23 and the second member 25 is made by a frustoconical projection 24 formed on the first member 23 and a frustoconical recess 26 formed on the second member 25. You. Contrary to this example, a frustum-shaped concave portion may be formed on the first member 23 and a frustum-shaped convex portion may be formed on the second member 25. With this configuration, there is an advantage that the positioning of the first member 23 and the second member 25 at the time of connection can be reliably performed. The first member 51 and the second member 6
1 may be formed integrally with the diaphragm main body, or may be formed independently and connected integrally by screwing or the like. Needless to say, the rod portion 21 may not be a loosely-fitting coupling structure composed of a plurality of members, and the rod portion 21 may be formed of an undivided single member as in a pressure control valve described in Japanese Patent No. 2671183. In that case, the rod portion 21 and one of the first diaphragm portion 30 and the second diaphragm portion 40 may be integrally formed, and the other diaphragm portion may be screwed and fixed to the rod portion 21. Each may be screwed and fixed, or each part may be integrally formed.

Further, in this embodiment, the rod 21
The recess 26 of the second member 25 is provided with a flow groove 27 for discharging the fluid in the recess 26 to the outside in accordance with the connection of the projection 24 of the first member 23. In this way, even if the controlled fluid enters between the convex portion 24 and the concave portion 26 due to the separation of the first member 23 and the second member 25, which will be described later, the fluid does not stay in the concave portion 26. Can be prevented,
Even when the first member 23 and the second member 26 are re-coupled, the rapid coupling of the two members is not hindered, the response characteristic of the flow rate control is not reduced, and the stagnation of the fluid causes the generation of bacteria. Can be prevented from acting as a pollution source. Further, cleaning of a fluid contact portion described later can be performed more efficiently. The flow groove 2
7 may be any structure as long as it allows the recess 26 to communicate with the outside. In the illustrated example, a cross-shaped open groove (U-shaped groove) is formed in the inner bottom of the concave portion 26 to form a flow groove 27. This is particularly advantageous when the controlled fluid is a highly viscous liquid or the like.

Next, the operation of the pressure control valve 10 will be described. Here, a case will be described in which the pressure control (flow rate control) of the fluid is performed in a state where the lower outflow portion 16 side is closed by the on-off valve V1 and only the upper outflow portion 15 side is opened. If necessary, the pressure control valve 10 can perform pressure control with the upper outflow portion 15 side closed and the lower outflow portion 16 side opened. This pressure control valve 1
0, the valve mechanism 20 is controlled by the pressure adjusting means M1 and M2 of the first pressure adjusting chamber 52 and the second pressure adjusting chamber 56.
The first diaphragm part 30 and the second diaphragm part 4
Through 0, the first set pressure and the second set pressure are constantly applied in the valve chamber direction, that is, inward. In a normal control state (water passing state), the first set pressure and the second set pressure are configured to be balanced when the controlled fluid is at a predetermined pressure (a predetermined flow rate), and the valve mechanism body The amount of opening between the valve section 20 and the valve seat 18 is maintained at a constant interval. As a result, the controlled fluid that has flowed into the second valve chamber 55 from the inflow portion 13 side (primary side) through the first valve chamber 51 flows out to the upper outflow portion 15 side (secondary side) at a predetermined flow rate. .

If there is any change in the controlled fluid on the inflow section 13 side (primary side), the change appears as a primary side pressure fluctuation, and the second set pressure of the valve mechanism body 20 to which the second set pressure is applied. Appears as a back pressure (outward pressure) fluctuation on the diaphragm section 40. The valve mechanism body 20 fluctuates in order to maintain a balance between the outward fluctuating pressure on the primary side and the inward set pressures of the pressure adjusting means M1 and M2, and the valve section 22 moves accordingly. The opening amount between the valve portion 22 and the valve seat 18 changes, and the pressure (flow rate) of the controlled fluid is controlled. In this normal control state, the inward set pressure and the outward back pressure are balanced, so
The first member 23 and the second member 25 of the valve mechanism 20 operate in an integrated state.

On the other hand, when the pressure on the secondary side is increased, the back pressure, that is, each diaphragm 3 of the valve mechanism 20 is increased.
The outward pressure acting on 0,40 is higher than in the normal control state. As a result, the second diaphragm part 40 moves outward (to the right in FIG. 2), and accordingly, the valve part 22
And the first diaphragm part 30 is a second diaphragm part 40
Side, and the valve seat 18 is closed by the valve portion 22. In the embodiment, when the back pressure acts on the second diaphragm portion 40 after the valve seat 18 is closed, the first member 23 and the second member 25 of the valve mechanism 20 are separated from each other.
This prevents a large load from being applied to the valve mechanism body 20 and the valve seat 18 even if a large back pressure is applied to the second diaphragm portion 40, and prevents fine dust (so-called particle) accompanying their deterioration, damage or breakage. ) Is prevented.

An example of cleaning a fluid contact portion (here, a liquid contact portion since the controlled fluid is a liquid) in contact with the controlled fluid inside the pressure control valve 10 will be described below. First, the inflow portion 13, the upper outflow portion 15, and the lower outflow portion 16
, And a cleaning fluid such as a cleaning liquid or cleaning air is injected from the inflow portion 13 or the upper outflow portion 15, the cleaning fluid is circulated inside the pressure control valve 10, and the cleaning fluid flows from the lower outflow portion 16. By discharging to the outside, the fluid contact portion can be washed. Cleaning the fluid contact portion in this way not only simplifies the operation and shortens the operation time, but also reduces waste of cleaning fluid, is economical, and completely cleans each fluid contact member to every corner. become able to. In addition, after the washing, if the use of the pressure control valve 10 (pressure control) is started with the lower outflow portion 16 closed and the upper outflow portion 15 opened, air (gas) The air inside the pressure control valve 10 can be completely discharged from the upper outflow portion 15 to the outside according to the nature of the above and the flow of the controlled fluid inside the pressure control valve 10.

In the above embodiment, the pressure control valve for controlling the secondary fluid to a predetermined pressure state has been described. However, the present invention relates to a pressure control valve for controlling the primary fluid to a predetermined pressure state. (Also referred to as a back pressure control valve). Hereinafter, the pressure control valve 10A that controls the pressure of the fluid on the primary side will be described with reference to FIGS. In the following description of the pressure control valve 10A, description of the same components as those in the previous embodiment will be omitted, and only different components will be described.

In the pressure control valve 10A, the first diaphragm 30A disposed in the first chamber 12A on the primary side is used.
The outer diameter L3 of the film portion 31A of the second chamber 14A on the secondary side
The outer diameter L4 of the membrane portion 41A of the second diaphragm portion 40A and the inner diameter of the second valve chamber 55A of the second chamber 14A are made larger than the outer diameter L4 of the membrane portion 41A of the second diaphragm portion 40A disposed therein. Are approximately the same size. In the illustrated valve mechanism 20A, the rod portion 21A and the first diaphragm portion 30A are integrally formed, and the rod portion 21A is formed.
The second diaphragm portion 40A is screwed and fixed to the second portion. Of course, not limited to this, the rod portion 21A and the second diaphragm portion 40A may be integrally formed, and the first diaphragm portion 30A may be screwed and fixed to the rod portion 21A, or each portion may be screwed and fixed. Alternatively, the respective parts may be integrally formed.

The reference numeral 11A denotes the body body, 1
3A is an inflow portion for a controlled fluid provided in the first chamber 12A, 15A is an upper outflow portion for a controlled fluid provided in the second chamber 14A, 16A is a lower outflow portion, and 17A is a first outflow portion. One chamber 12A and second chamber 14
A, a communication passage communicating with A, 18A is a valve seat, 22A is a valve portion for opening and closing the valve seat 18A of the rod portion 21A, 32A is an outer peripheral seal portion of the first diaphragm portion 30A, and 42A is an outer peripheral portion of the second diaphragm portion 40A. A seal portion, 51A is a valve chamber of the first chamber 12A, 52A is a first pressure regulating chamber of the first chamber 12A, 56A is a second pressure regulating chamber of the second chamber 14A, B
Is a bolt for assembling the body body.

In this embodiment, the first pressure adjusting means M1 for adjusting the pressure of the first diaphragm 30A is constituted by a pressure adjusting gas (here, pressurized gas) A1, while adjusting the pressure of the second diaphragm 40A. The second pressure adjusting means M2 includes a spring S1 having a predetermined spring constant.
It is mounted between the A inner wall and the spring receiving portion 73 screwed to the second diaphragm portion 30A. Each of the pressure regulating means M1, M
2 is not limited to the above example. Reference numeral 74 denotes an air supply port for supplying the pressure-regulated gas to the first pressure-regulating chamber 52A, 75 denotes an exhaust port for discharging the pressure-regulated gas,
Reference numeral 76 denotes a supply source for supplying a pressure-regulated gas, 77 denotes an adjustment / control device such as an electro-pneumatic converter or an electro-pneumatic regulator for adjusting / controlling the pressure of the pressure-regulated gas, and 78 denotes air supply in the second pressure-regulating chamber 56A. It is a respiratory tract that goes in and out.

Further, in this embodiment, the effective pressure receiving area of the diaphragm of the second diaphragm portion 40A, at the position where the outer diameter and the inner diameter of the membrane portion 41A (the outer diameter of the small diameter portion of the rod portion 21A) in the example shown in FIG. The area equivalent to the value obtained by subtracting the area of the circle having the inner diameter as the outer circumference from the area of the circle having the intermediate diameter as the outer circumference is the effective area of the valve seat 18A of the communication flow path 17A. The opening area between the rod portions 21A (small diameter portion) is made equal. With this configuration, when the valve seat 18A is opened, a force acting outward from the controlled fluid on the valve portion 22A and a force acting outward from the controlled fluid on the second diaphragm portion 40A. Therefore, even if a pressure fluctuation occurs on the secondary side, the rod portion 21 of the valve mechanism 20A
It is possible to prevent the movement of A from being suppressed.

Next, the operation of the pressure control valve 10A will be described. In this example, the lower outflow portion 16A
The side is closed by the on-off valve V2 and the pressure control (flow rate control) of the fluid is performed in a state where only the upper outflow portion 15A side is opened. However, if necessary, the upper outflow portion 15 side is closed and the lower outflow portion is closed. It is also possible to perform pressure control with the 16 side open. When the pressure control valve 10A is provided as a safety valve or the like downstream of a use point in a fluid circuit, in a normal state, the first setting pressure of the first pressure adjusting means M1 and the second setting of the second pressure adjusting means M2 are set. The pressure (spring elastic force) is applied to the valve mechanism 20.
The valve portion 22A of A is at a predetermined position, in this example, a position for closing the valve seat 18A.

If there is any change in the pressure of the controlled fluid on the primary side, specifically, if the pressure of the controlled fluid increases on the primary side, the first diaphragm 30
The outward force applied to the inner surface of A overcomes the inward force applied to the outer surface of the first diaphragm 30A from the first pressure adjusting means M1, and the rod 21A of the valve mechanism 20A moves toward the first pressure adjusting chamber. Then, the valve seat 18A is opened, and the fluid in the fluid circuit is discharged to the outside through the upper outflow portion 5A. When the pressure of the controlled fluid decreases on the primary side after the opening of the valve seat 18A, an outward force applied to the inner surface of the first diaphragm 30A is applied from the first pressure adjusting means M1 to an inward direction applied to the outer surface of the first diaphragm 30A. , The rod portion 21 moves toward the second chamber, the valve seat 18A is closed, and the discharge of fluid to the secondary side is reduced. Further, as described above, if the effective diaphragm pressure receiving area of the second diaphragm portion 40A is made substantially equal to the effective area of the valve seat 18A,
The controlled fluid on the primary side can be accurately controlled to a desired constant pressure state without being affected by the load fluctuation on the secondary side. Further, also in the pressure control valve 10A, the fluid contact portion can be easily cleaned by the same method as the pressure control valve 10 of the above-described embodiment.

The present invention is not limited to the above two embodiments, but can be implemented by appropriately changing a part of the configuration without departing from the spirit of the invention. For example, as shown in FIG. 7, the diaphragm portion having the smaller outer diameter of the membrane portion, in this example, the first diaphragm portion 30B
The film portion 31B and the outer peripheral seal portion 32B are formed with a step (in the figure, a step where the film portion 31B protrudes inward) via the standing portion 80, and the standing portion 80 is formed.
A sealing projection 81 is formed on the inner wall of the main body 11 at the boundary between the standing portion 80 and the film portion 31B in the drawing. By doing so, the first diaphragm portion 3
In addition to reducing the volume (internal volume) of the first valve chamber 51 inside the membrane portion 31B of the valve portion 0B, the valve chamber side opening 13 of the inflow portion 13 can be reduced.
o, the film part 31B of the first diaphragm part 30B
, The stagnation of the controlled fluid can be further reduced, and the fluid replacement characteristics can be further improved. As shown in the drawing, if the first valve chamber side surface 31x of the membrane portion 31B of the first diaphragm portion 30B and the first diaphragm portion side inner wall portion 13x of the inflow portion 13 are at the same height position, that is, if they are flush, This is particularly preferable because the fluid replacement characteristics are further improved.
Further, according to the above configuration, the diaphragm portion and the body main body are sealed at the two locations of the outer peripheral seal portion 32B and the sealing projection 81, so that the sealing effect is dramatically improved. In FIG. 7, the same members as those of the pressure control valve 10 shown in FIGS. 1 to 3 are denoted by the same reference numerals.

[0036]

As shown and described above, in the pressure control valve of the present invention, the upper outlet and the lower outlet are provided in the second chamber on the secondary side of the body main body. When using, i.e., during pressure control, only one of the two outlets is opened, and when cleaning the fluid contact portion inside the pressure control valve, both outlets are opened to perform the cleaning. The operation can be performed simply and efficiently, and more economically, and the accumulation of air in the chamber can be prevented when the pressure control valve is reused after the cleaning.

Further, if the outer diameter of the membrane portion of the diaphragm portion on the small diameter side and the inner diameter of the valve chamber of the corresponding chamber are substantially equal to each other as in the inventions of claims 2 and 3, it is possible to cover the inside of the chamber. The stagnation of the control fluid can be remarkably reduced as compared with the related art, the replacement characteristics of the fluid are improved, and bacteria and the like hardly occur. Further, as in the invention of claim 4, the membrane portion of the diaphragm portion on the small diameter side and the outer peripheral seal portion are formed by providing a step via an upright portion having a sealing projection pressed against the inner wall of the body main body. By doing so, it is possible to reduce the volume of the valve chamber corresponding to the diaphragm portion on the small diameter side, further improve the fluid replacement characteristics, and significantly improve the sealing performance between the diaphragm portion and the body main body. I do.

[Brief description of the drawings]

FIG. 1 is a front view of a pressure control valve according to one embodiment of the present invention.

FIG. 2 is a sectional view of the pressure control valve of FIG. 1 taken along line 2-2.

FIG. 3 is a sectional view of the pressure control valve of FIG. 1 taken along line 3-3.

FIG. 4 is a front view of a pressure control valve according to another embodiment.

FIG. 5 is a sectional view of the pressure control valve of FIG. 4 taken along line 5-5.

FIG. 6 is a sectional view of the pressure control valve of FIG. 4 taken along line 6-6.

FIG. 7 is a sectional view showing a main part of a pressure control valve according to still another embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Pressure control valve 11 Body main body 12 First chamber 13 Inflow part 14 Second chamber 15 Upper outflow part 16 Lower outflow part 17 Communication flow path 18 Valve seat 20 Valve mechanism body 21 Rod part 22 Valve part 30 First diaphragm part 31 Membrane part of first diaphragm part 32 Outer peripheral seal part of first diaphragm part 40 Second diaphragm part 41 Membrane part of second diaphragm part 42 Outer peripheral seal part of second diaphragm part 51 First valve chamber 52 First pressure regulation chamber 55 Second valve chamber 56 Second pressure regulating chamber M1 First pressure regulating means M2 Second pressure regulating means

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3H059 AA03 BB29 CC17 CD05 CD13 CF14 FF01 5H316 AA20 BB07 DD20 EE02 EE10 EE12 GG01 JJ09 JJ13 KK01 KK02 KK04 KK10

Claims (4)

[Claims] A pressure control valve (10) for controlling a primary or secondary fluid to a predetermined pressure state, said first chamber (12) having an inlet (13) for a fluid to be controlled. And an upper outlet (15) for the controlled fluid
Chamber (14) having a lower outlet (16) and a lower outlet (16)
A body main body (11) having a communication flow path (17) communicating with the first chamber and the second chamber and having a valve seat (18) formed therein; A rod part (21) having a valve part (22) for opening and closing the valve seat; a first diaphragm part (30) provided on one side of the rod part and arranged in the first chamber; And a second diaphragm portion (40) provided on the other side of the second chamber and having a second diaphragm portion (40) disposed in the second chamber. The first diaphragm portion has an outer peripheral seal portion (32). The first chamber is fixed to a body body constituting the first chamber, and the first chamber is partitioned into a first valve chamber (51) including the inflow portion inside the first diaphragm portion and a first pressure regulating chamber (52) outside. The second diaphragm portion has an outer peripheral surface. A second valve chamber (55) including the upper outflow portion and the lower outflow portion inside the second diaphragm portion, and a second valve chamber (55) fixed to a body main body constituting the second chamber. And a first pressure adjusting means (M1) for adjusting the pressure of the first diaphragm in a predetermined direction at a predetermined pressure is provided in the first pressure adjusting chamber. A pressure control valve, wherein the second pressure regulating chamber is provided with second pressure regulating means (M2) for regulating the second diaphragm section in a predetermined direction at a predetermined pressure. 2. A pressure control valve for controlling a fluid on a secondary side to a predetermined pressure state.
1) The outer diameter is made smaller than the outer diameter of the membrane part (41) of the second diaphragm part, and the outer diameter of the membrane part of the first diaphragm part and the inner diameter of the first valve chamber of the first chamber are substantially the same. The pressure control valve according to claim 1, wherein the pressure control valve is provided. 3. A pressure control valve for controlling a fluid on a primary side to a predetermined pressure state, wherein an outer diameter of a membrane portion of a first diaphragm portion is larger than an outer diameter of a membrane portion of a second diaphragm portion, and The pressure control valve according to claim 1, wherein an outer diameter of the membrane portion of the second diaphragm portion and an inner diameter of the second valve chamber of the second chamber are substantially equal. 4. A diaphragm portion and a peripheral seal portion of a diaphragm portion having a smaller membrane portion outer diameter are formed by providing a step via an upright portion (80), and a body portion is formed in the upright portion. The pressure control valve according to claim 2 or 3, wherein a sealing projection (81) that is crimped to the inner wall of the body is formed.