JP2547366Y2 - Fluid operated on-off valve - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid-operated on-off valve for controlling an on-off valve by operating fluid to control pure water or a chemical solution.

[0002]

2. Description of the Related Art In a semiconductor manufacturing apparatus, a solvent, a cleaning liquid and the like used in the manufacture of an LSI are introduced through a pressure reducing valve and used in a cleaning step and the like. In the manufacture of such LSIs, high-purity qualities are required for the solvents and cleaning liquids used in order to cope with an increase in memory capacity and an increase in processing speed. For this reason, in a semiconductor manufacturing apparatus, it is necessary to eliminate contaminants such as a liquid pool in the main body of the pressure reducing valve.

On the other hand, in a semiconductor manufacturing apparatus, not only a pressure reducing valve but also an opening / closing valve which opens and closes a valve with an operating fluid is used.

Such an on-off valve is disclosed in Japanese Utility Model Laid-Open Publication No. 63-17 / 1988.
There is one disclosed in Japanese Patent Publication No. 1807. The on-off valve includes a diaphragm (hereinafter, referred to as a diaphragm) that receives the pressure of the operating fluid.
A diaphragm that receives the pressure of the working fluid (hereinafter, referred to as a fluid-side diaphragm)
And the valve body is operated via the fluid-side diaphragm to open and close the passage of the working fluid. The valve body is urged in the direction of the air-side diaphragm by a spring disposed in the passage-side chamber.
When an excessive pressure is generated in the working fluid, the pressure is released to the outside from between the two diaphragms.
The stem is separated from the fluid-side diaphragm to open a hole, and the pressure is released to the outside.

[0005]

However, in such an on-off valve, since the valve element is separated from the fluid-side diaphragm, the operation of the diaphragm with respect to the pressure of the operating fluid is poor, and the opening and closing of the valve is poor. Not only cannot be performed accurately, but also it is difficult to control the working fluid to a desired pressure.

[0006] In addition, sudden opening and closing of the valve may cause a water hammer. This water hammer may generate dust from equipment or piping.

Further, since the spring for urging the valve element is configured to come into contact with the working fluid, impurities such as rust may be mixed.

Therefore, it is unsuitable as an on-off valve used in a semiconductor manufacturing apparatus, particularly a process apparatus.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-described disadvantages, and has an excellent response characteristic, preferably suppresses water hammer, and does not contaminate a controlled fluid. It is an object to provide an on-off valve.

[0010]

In order to achieve the above object, the present invention comprises a main body and an interior of the main body,
A first diaphragm disposed in a first chamber to which a controlled fluid is supplied, a second diaphragm defined in the main body and disposed in a second chamber to which an operating fluid is supplied, A stem member disposed between the first diaphragm and the second diaphragm and integrally connecting the first diaphragm and the second diaphragm; and a stem member disposed between the first diaphragm and the second diaphragm. A stem guide for guiding the stem member, an elastic member disposed between the first diaphragm and the second diaphragm, and biasing the first diaphragm toward the second chamber;
A valve body fixed to a distal end portion of the stem member protruding toward the first chamber, a valve seat portion seated when the valve body is displaced in the second chamber direction, the valve body and the valve seat And an inlet and an outlet for a controlled fluid which are communicated with each other through a fluid passage between the control unit and the fluid passage.

[0011]

In the fluid-operated on-off valve constructed as described above, the valve element is resiliently moved by the elastic member through the second diaphragm, the stem member and the first diaphragm by the operating fluid supplied into the second chamber. The valve is separated from the valve seat portion against the pressure, and the inlet and outlet of the controlled fluid communicate with each other at a predetermined opening. In this case, the first diaphragm is pressed by the pressure of the controlled fluid, but since this pressure is in the opposite direction to the direction of the pressure of the operating fluid, even if a sudden change in pressure due to water hammer occurs, the valve is not affected. Excessive displacement of the body is suppressed. Also,
The pressure of the controlled fluid and the pressure of the operating fluid are balanced, the distance between the valve body and the valve seat is constant, and a desired pressure is obtained. On the other hand, when the operation fluid is discharged from the second chamber,
The valve body is seated on the valve seat by the elastic force of the elastic member, and the supply of the controlled fluid is stopped.

Since the stem member and the elastic member are disposed between the first diaphragm and the second diaphragm and do not come into contact with the fluid to be controlled, no liquid pool is generated during operation, and Also, no dust is generated by sliding.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a fluid-operated on-off valve according to the present invention will be described below with reference to the accompanying drawings.

FIG. 1 is a longitudinal sectional view of a fluid operated on-off valve according to an embodiment of the present invention.

In FIG. 1, reference numeral 10 denotes a fluid-operated on-off valve. The fluid operated on-off valve 10 basically includes a valve body 12, a stem guide 14, and a lid 16.

In the side wall of the valve body 12, an inlet 18 into which a fluid such as pure water or a solvent is introduced is defined.
0 is concatenated. The fluid introduced from the inlet 18 reaches the valve chamber 22 via the passage. On the other hand, a hole 24 defined in the valve body 12 communicates with the upper part of the valve chamber 22.
The hole 24 is provided with a valve seat 28 on which the valve body 26 is seated from below. The hole 24 communicates with the outlet 32 through a first chamber 30 defined on the upper part.

The stem guide 14 mounted on the upper part of the valve body 12 has a recess 3 in which a valve spring 34 is disposed.
6 is formed, and an annular projection 42 having a hole 40 into which the stem 38 is slidably fitted is formed at the center of the recess 36.

The range of movement of the stem 38 is limited by the contact of the step 44 of the stem 38 with the upper end of the annular projection 42.

A valve body 26 is fixed to the lower end of the stem 38, a first diaphragm 46 is fixed to the upper part of the valve body 26, and a second diaphragm 48 is fixed to the upper end.

Above the first diaphragm 46, a diaphragm receiver 50 is provided together with a seal member 52 on a stem 38.
It is stuck to.

The first and second diaphragms 46,
The space between the passages 48 is formed by passages 5 defined in the stem guide 14.
It communicates with the outside through 4, 56.

The first diaphragm 46 has an inner peripheral portion formed to be thicker and gradually thinner in the radial direction, and an outer peripheral portion thereof is fixed to a side wall of the first chamber 30.

The second diaphragm 48 is fixed to an upper portion of the stem guide 14, and the second diaphragm 48
A chamber 58 is defined. A passage 60 to which an operation fluid is supplied communicates with the second chamber 58.

The fluid-operated on-off valve 10 of this embodiment is constructed as described above, and the operation thereof will be described below.

First, an operating fluid is introduced into the second chamber 58 through a passage 60 defined in the lid 16. The pressure of the operating fluid at this time deforms the first and second diaphragms 46 and 48 against the elastic force of the valve spring 34,
Is separated from the valve seat 28 (see FIG. 2).

Then, the fluid supplied from the inlet 18 passes through the gap between the valve body 26 and the valve seat 28 and is decompressed and discharged from the outlet 32 through the first chamber 30. In this case, the fluid that has flowed into the first chamber 30 is the first diaphragm 4
6 is to be deformed and the second diaphragm 48 is to be raised. This pressure and the pressure of the operation fluid are balanced by so-called feedback, and a fluid having a predetermined pressure can be obtained.

The fluid operated on-off valve 10 of this embodiment is
Utilizing such a feedback control, the control fluid pressure can be adjusted and the discharge fluid pressure controlled to be used as an on-off valve with a pressure reducing function.

FIG. 3 is a graph showing the operating characteristics of the pressure (P1) of the operating fluid and the pressure (P2) of the fluid discharged from the fluid-operated on-off valve 10 of this embodiment. in this case,
It is possible to obtain a pressure of the discharge fluid which is very well proportional to the pressure of the operating fluid. Moreover, since the direction of the pressure applied to the first diaphragm 46 is opposite to the direction of the pressure of the operating fluid applied to the second diaphragm 48, the pressure of the water hammer generated at the time of opening and closing the valve is suppressed.
6 will be displaced gently. When the valve is opened and closed, the pressure of the discharged fluid does not fluctuate due to pulsation. Further, by adjusting the supply and discharge amounts of the operation fluid with a speed controller or the like, the above-described characteristics can be set effectively even when the piping conditions and the like change.

FIG. 4 shows a comparative example in which the second diaphragm 48 is displaced upward in FIG.
Pressure of the operating fluid (P
It is a figure which shows the operating characteristic of 1) and pressure (P2) of the fluid discharged | emitted. In this example, as shown in the figure, when the operating fluid is introduced, a delay (T) in the initial response occurs, and the followability of the pressure (P2) of the discharge fluid with respect to the pressure (P1) of the operating fluid. bad. In addition, when the valve is opened and closed, the direction of the pressure of the operating fluid and the direction of the pressure of the discharged fluid are the same, so that the moving speed of the valve body 26 is accelerated, and pulsation (P3) due to water hammer occurs. ing.

As described above, in the fluid-operated on-off valve 10 of this embodiment, the discharge fluid of a desired pressure (P2) can be obtained by controlling the pressure (P1) of the operation fluid. In addition, the effect of water hammer can be suppressed, stable fluid pressure characteristics can be obtained, and there is no impact, so there is no noise or dust. Further, since the inflow of the fluid is prevented by the first diaphragm 46, the fluid does not come into contact with the sliding portion of the diaphragm receiver 50 and the stem 38, so that dust and the like do not enter the fluid. Further, since there is no component such as the valve spring 34 in the first chamber 30, it is possible to prevent the liquid pool from being generated, thereby avoiding the problem that the fluid is contaminated.

[0031]

According to the fluid-operated on-off valve according to the present invention, the following effects can be obtained.

Since the first diaphragm and the second diaphragm are fixed to the stem integrated with the valve body, the second diaphragm receives the pressure of the operating fluid and the valve body is separated from the valve seat at the same time. Fluid is withdrawn at a predetermined pressure.
In this case, the valve body is quickly displaced by following the change in the pressure of the operating fluid, and a fluid having a desired pressure can be obtained.

Further, since the occurrence of water hammer when opening and closing the valve body can be suppressed, dust generation can be prevented.

Here, since the elastic member, the stem and the like are isolated from the fluid by the first diaphragm, it is possible to prevent dust and the like from being mixed in the fluid and to reduce the contamination element of the solvent and pure water. it can. Further, it is possible to prevent accumulation of impurities by eliminating a liquid pool such as a solvent and pure water.

Thus, for example, by using the fluid-operated on-off valve of the present invention instead of the pressure reducing valve used in the semiconductor manufacturing apparatus, particularly in the process apparatus, it is necessary to increase the memory capacity and increase the processing speed. In this case, it is possible to improve the production efficiency when manufacturing an LSI corresponding to.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a fluid operated on-off valve according to an embodiment of the present invention.

FIG. 2 is a longitudinal sectional view showing an open state of the fluid-operated on-off valve shown in FIG.

FIG. 3 is a diagram showing operating characteristics of a fluid operated on-off valve of a comparative example.

FIG. 4 is a diagram showing the operating characteristics of a conventional on-off valve.

[Explanation of symbols]

 Reference Signs List 10 fluid operated on-off valve 12 valve body 14 stem guide 16 lid 22 valve chamber 26 valve body 28 valve seat 30 first chamber 34 valve spring 38 stem 46 first diaphragm 48 … Second diaphragm 58… second chamber 60… passage

Claims (1)

(57) [Scope of request for utility model registration] 1. A main body, a first diaphragm defined inside the main body and provided in a first chamber to which a controlled fluid is supplied, and an operating fluid defined inside the main body. A second diaphragm provided in a second chamber to which the first and second diaphragms are supplied, and a stem member provided between the first and second diaphragms and integrally connecting the first and second diaphragms; A stem guide disposed between the first diaphragm and the second diaphragm and guiding the stem member; a stem guide disposed between the first diaphragm and the second diaphragm; An elastic member for urging in the direction of the second chamber, a valve element fixed to a distal end of the stem member protruding toward the first chamber, and a valve element displaced in the direction of the second chamber. Seated valve seat A fluid-operated on-off valve, comprising: a control fluid introduction port and a discharge port that are communicated through a fluid passage between the valve body and the valve seat.