JPH0694142A - Pneumatic function type metal diaphragm valve - Google Patents
Pneumatic function type metal diaphragm valveInfo
- Publication number
- JPH0694142A JPH0694142A JP24503592A JP24503592A JPH0694142A JP H0694142 A JPH0694142 A JP H0694142A JP 24503592 A JP24503592 A JP 24503592A JP 24503592 A JP24503592 A JP 24503592A JP H0694142 A JPH0694142 A JP H0694142A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- metal diaphragm
- valve seat
- output shaft
- diaphragm valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 title claims abstract description 36
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 36
- 230000035939 shock Effects 0.000 abstract description 4
- 230000006866 deterioration Effects 0.000 abstract description 3
- 239000011859 microparticle Substances 0.000 abstract 1
- 239000010419 fine particle Substances 0.000 description 5
- 239000012530 fluid Substances 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- PYVHTIWHNXTVPF-UHFFFAOYSA-N F.F.F.F.C=C Chemical compound F.F.F.F.C=C PYVHTIWHNXTVPF-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
Landscapes
- Fluid-Driven Valves (AREA)
- Details Of Valves (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、例えば半導体産業等に
おいて超高純度流体用遮断弁として使用される空気圧作
動式メタルダイヤフラム弁に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pneumatically actuated metal diaphragm valve used as a shutoff valve for ultra-high purity fluid in the semiconductor industry, for example.
【０００２】[0002]
【従来の技術】従来の空気圧作動式メタルダイヤフラム
弁においては、図５，図６に例示するように、空気圧式
駆動部側の出力軸ａおよび弁部側の駆動部材ｂを含むメ
タルダイヤフラムｃの駆動機構は、すべて剛性金属材料
から形成されている。2. Description of the Related Art In a conventional pneumatically actuated metal diaphragm valve, as shown in FIGS. 5 and 6, a metal diaphragm c including an output shaft a on the pneumatic drive side and a drive member b on the valve side is provided. The drive mechanism is entirely made of a rigid metal material.
【０００３】[0003]
【発明が解決しようとする課題】したがって、上記従来
例においては弁座ｄに対する弁閉時の衝撃力が大きく、
メタルダイヤフラムｃと相互に圧接する弁座ｄのシール
面が劣化し易いという難点があった。このような問題点
を回避するためには駆動部側の操作空気供給口にオリフ
ィスを設けることも効果的であるが、弁の動作速度が遅
くなるため必然的に高速切替動作などが不可能になるた
め用途が限定されてしまう。Therefore, in the above-mentioned conventional example, the impact force on the valve seat d when the valve is closed is large,
There is a drawback that the sealing surface of the valve seat d, which is in pressure contact with the metal diaphragm c, is easily deteriorated. In order to avoid such a problem, it is effective to provide an orifice in the operating air supply port on the drive unit side, but the operating speed of the valve becomes slow, so high speed switching operation is inevitably impossible. Therefore, the use is limited.
【０００４】また、上記従来例においては衝撃力の繰返
しに基づくシール面の劣化により、微小粒子の発生量が
増加するばかりでなく、シール面に施した不動態化膜
（例えばＣｒ2 Ｏ3 ）が剥離するため、流通される流体
が例えばハロゲン系ガスの場合には弁座の腐食および漏
洩量の増加などを生じ易く、また、例えば超純水が流通
される場合にはＦe ，Ｎi イオンが溶出するなどの問題
が派生する。Further, in the above-mentioned conventional example, not only the generation amount of fine particles increases due to deterioration of the sealing surface due to repeated impact force, but also a passivation film (eg Cr 2 O 3 ) applied to the sealing surface. Therefore, when the flowing fluid is, for example, a halogen-based gas, corrosion of the valve seat and an increase in the amount of leakage are likely to occur, and, for example, when ultrapure water is passed, Fe and Ni ions are generated. Problems such as elution occur.
【０００５】本発明は上述のような不具合を解消するた
めになされたもので、弁作動に基づく微小粒子の発生が
防止され、かつ耐久性に優れた空気圧作動式メタルダイ
ヤフラム弁を提供することを目的とする。The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a pneumatically actuated metal diaphragm valve which prevents generation of fine particles due to valve operation and has excellent durability. To aim.
【０００６】[0006]
【課題を解決するための手段】本発明は、弁座と接離自
在に対向するメタルダイヤフラムを駆動する空気圧式駆
動部を備えたメタルダイヤフラム弁において、上記弁座
と駆動部出力軸との間に介設された緩衝体を具備するこ
とを特徴とするものである。SUMMARY OF THE INVENTION The present invention is a metal diaphragm valve having a pneumatic drive unit for driving a metal diaphragm facing the valve seat so as to come in contact with and away from the valve seat, and between the valve seat and the drive unit output shaft. It is characterized in that it is provided with a cushioning body interposed in the.
【０００７】[0007]
【作用】上記の構成において、駆動部出力軸からの衝撃
は緩衝体によって緩和され、シール面の劣化が防止され
る。In the above structure, the shock from the output shaft of the drive unit is alleviated by the cushioning member, and the deterioration of the seal surface is prevented.
【０００８】[0008]
【実施例】以下、本発明につき図１に示す一実施例を参
照しながら説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to an embodiment shown in FIG.
【０００９】図１において、空気圧作動式メタルダイヤ
フラム弁は弁部１および、これと一体的に連結された空
気圧式駆動部２（図は、圧搾空気導入時に弁閉動作をな
すものの左半分と、弁開動作をなすものの右半分とを同
時に示す）を備えている。In FIG. 1, a pneumatically actuated metal diaphragm valve includes a valve portion 1 and a pneumatic drive portion 2 integrally connected to the valve portion 1 (the left half of the valve closing operation when compressed air is introduced, The right half of the valve opening operation is shown at the same time).
【００１０】弁部１の弁箱３には凹所４ならびに、これ
の底部にそれぞれ開口する流入路５および流出路６が形
成されている。凹所４の開口部側には蓋体７が、底部側
には介挿体８がそれぞれ嵌装されており、これら蓋体７
および介挿体８の間にはメタルダイヤフラム９の周縁部
が流体密に支持されている。メタルダイヤフラム９は複
数枚重合したものであってもよい。The valve body 3 of the valve portion 1 is formed with a recess 4 and an inflow passage 5 and an outflow passage 6 which are open at the bottom of the recess 4. A lid 7 is fitted on the opening side of the recess 4 and an interposer 8 is fitted on the bottom side thereof.
A peripheral portion of the metal diaphragm 9 is fluid-tightly supported between the and the insert 8. A plurality of metal diaphragms 9 may be polymerized.
【００１１】上記介挿体８とメタルダイヤフラム９との
間に形成された弁室１０は、介挿体８の中央部に開口す
る弁孔１１を介して上記流入路５と連通されるととも
に、外周寄りに開口する連通孔１２を介して上記流出路
６と連通されている。介挿体８には、メタルダイヤフラ
ム９が接離自在に当接して弁孔１１を開閉するための弁
座１３が形設されている。弁座１３にメタルダイヤフラ
ム９を接離自在に押圧する駆動軸１４は、上記蓋体７に
開設された貫通孔１５に摺動自在に嵌装される軸部およ
び、貫通孔１５よりも大径でメタルダイヤフラム９と対
向する頭部を備えている。A valve chamber 10 formed between the interposer 8 and the metal diaphragm 9 is communicated with the inflow passage 5 through a valve hole 11 opening at the center of the interposer 8. It communicates with the outflow passage 6 through a communication hole 12 that opens toward the outer periphery. A valve seat 13 for opening and closing the valve hole 11 by contacting the metal diaphragm 9 so that the metal diaphragm 9 can freely come in and out of contact is formed on the interposer 8. The drive shaft 14 that presses the metal diaphragm 9 against the valve seat 13 so as to be separable is larger than the shaft portion slidably fitted in the through hole 15 formed in the lid 7 and the through hole 15. And has a head portion that faces the metal diaphragm 9.
【００１２】上記弁部１は、流通される流体の滞留容積
が極小になるようにして該流体に適応する金属材料から
形成されるとともに、流体との全接触面には適宜の鏡面
仕上げが施されている。The valve portion 1 is made of a metal material that is adapted to the fluid so that the staying volume of the fluid is minimized, and the entire contact surface with the fluid is appropriately mirror-finished. Has been done.
【００１３】上記空気圧式駆動部２は、シリンダ部１６
およびこれに内装されたピストン１７を備えている。シ
リンダ部１６には、ピストン１７によって仕切られたシ
リンダ室１８および１９が形成されている。ピストン１
７は、シリンダ部１６の内部に位置する支持軸２０およ
び、先端部がシリンダ部１６を気密に貫通して外部に突
出する出力軸２１を備えている。出力軸２１は、上記弁
部１における貫通孔１５と摺動自在に嵌合して駆動軸１
４と対向している。The pneumatic drive unit 2 includes a cylinder unit 16
And a piston 17 installed therein. In the cylinder portion 16, cylinder chambers 18 and 19 partitioned by a piston 17 are formed. Piston 1
7 includes a support shaft 20 located inside the cylinder portion 16, and an output shaft 21 having a tip portion that penetrates the cylinder portion 16 in an airtight manner and projects to the outside. The output shaft 21 is slidably fitted in the through hole 15 in the valve portion 1 and is fitted into the drive shaft 1.
Opposite 4
【００１４】上記シリンダ部１６に開設された圧搾空気
流入口２２は、支持軸２０（または支持軸２０および出
力軸２１）に設けられた連通孔２３（または２４）を介
して一方のシリンダ室１８（または１９）と連通され、
他方のシリンダ室１９（または１８）は排気孔２５（ま
たは２６）を介して外部と連通されている。また、他方
のシリンダ室１９（または１８）には、ピストン１７を
弁開（または弁閉）方向に付勢するばね部材２７（また
は２８）が内装されている。The compressed air inflow port 22 opened in the cylinder portion 16 is connected to one cylinder chamber 18 via a communication hole 23 (or 24) provided in the support shaft 20 (or the support shaft 20 and the output shaft 21). (Or 19),
The other cylinder chamber 19 (or 18) communicates with the outside through an exhaust hole 25 (or 26). A spring member 27 (or 28) for urging the piston 17 in the valve opening (or valve closing) direction is installed inside the other cylinder chamber 19 (or 18).
【００１５】そして、上記弁部１における弁座１３と、
駆動部２における出力軸２１との間には、緩衝体２９が
介設されている。なお、図１においては緩衝体２９が駆
動軸１４と出力軸２１との間に介在しているが本発明は
これに限られることはなく、弁座１３と出力軸２１との
間であれば位置、形状、数量、相互連携手段等はそれぞ
れ適宜に設定可能である。次に、上記実施例の作用につ
いて説明する。Then, the valve seat 13 in the valve portion 1 and
A buffer 29 is provided between the drive unit 2 and the output shaft 21. Although the shock absorber 29 is interposed between the drive shaft 14 and the output shaft 21 in FIG. 1, the present invention is not limited to this, and may be any position between the valve seat 13 and the output shaft 21. The position, shape, quantity, mutual cooperation means, etc. can be set appropriately. Next, the operation of the above embodiment will be described.
【００１６】駆動部２が上記左側のように構成されたも
のにおいては、流入口２２からシリンダ室１８内に圧搾
空気を導入するとピストン１７、出力軸２１および緩衝
体２９を介して駆動軸１４がメタルダイヤフラム９を弁
座１３に圧接することにより弁孔１１が閉鎖され、シリ
ンダ室１８の内圧が解放されるとピストン１７がばね部
材２７により開方向に移動されるのに伴い、メタルダイ
ヤフラム９はこれ自体の復元力により開状態に復帰す
る。In the drive unit 2 configured as shown on the left side, when compressed air is introduced into the cylinder chamber 18 from the inlet 22, the drive shaft 14 is moved through the piston 17, the output shaft 21 and the buffer 29. When the valve hole 11 is closed by pressing the metal diaphragm 9 against the valve seat 13 and the internal pressure of the cylinder chamber 18 is released, the piston 17 is moved in the opening direction by the spring member 27, and the metal diaphragm 9 is closed. It returns to the open state by its own restoring force.
【００１７】また、駆動部２が上記右側のように構成さ
れたものにおいては、上記流入口２２からシリンダ室１
９内に圧搾空気を導入すると、ピストン１７が開方向に
移動されるのに伴いメタルダイヤフラム９はこれ自体の
復元力により開状態になり、シリンダ室１９の内圧が解
放されるとピストン１７がばね部材２８により閉方向に
移動され、出力軸２１および緩衝体２９を介して駆動軸
１４がメタルダイヤフラム９を弁座１３に圧接すること
により弁孔１１が閉鎖される。Further, in the case where the drive unit 2 is constructed as shown on the right side, the cylinder chamber 1 is introduced from the inflow port 22.
When compressed air is introduced into the cylinder 9, the metal diaphragm 9 is opened by its own restoring force as the piston 17 is moved in the opening direction, and when the internal pressure of the cylinder chamber 19 is released, the piston 17 springs. The valve 28 is moved by the member 28 in the closing direction, and the drive shaft 14 presses the metal diaphragm 9 against the valve seat 13 via the output shaft 21 and the buffer 29 to close the valve hole 11.
【００１８】上記実施例においては、弁座１３と出力軸
２１との間に緩衝体２９を介設したので、弁閉時におけ
るシール部の衝撃が効果的に緩和される。また、緩衝体
２９の反力によってシールされるから面圧が充分小さ
く、金属微粒子の生成および弁座１３の摩耗などが抑制
されるとともにシール性がさらに向上される。In the above embodiment, since the cushion 29 is provided between the valve seat 13 and the output shaft 21, the impact of the seal portion when the valve is closed is effectively mitigated. Further, since the sealing is performed by the reaction force of the buffer body 29, the surface pressure is sufficiently small, the generation of metal fine particles and the abrasion of the valve seat 13 are suppressed, and the sealing property is further improved.
【００１９】すなわち、図２に示すように３台の実施例
Ａ、Ｂ、Ｃを直列接続してＮ2 によりパージしたのち、
内圧８kgf/cm2 G 、純度９９．９％のＣl2を４sec/cycl
e で流通させて耐蝕性試験を行ったところ、図３に繰返
し作動回数Ｎ（×１０4 ）と漏洩量Ｌ（Torr・l/sec ）
との関係を示すように、漏洩量が２×１０-11 Torr.l/s
ec未満に安定していることが認められた。That is, as shown in FIG. 2, after three units A, B and C were connected in series and purged with N2,
Internal pressure 8kgf / cm 2 G2, Cl2 with 99.9% purity for 4 sec / cycl
When a corrosion resistance test was conducted by circulating the product at e, the number of repeated operations N (× 10 4 ) And leakage amount L (Torr · l / sec)
The leakage amount is 2 × 10 -11 Torr.l / s
It was found to be stable below ec.
【００２０】これは、メタルダイヤフラム９および弁座
１３が共に金属製であるにも拘らずシール部における金
属微粒子の生成が極小であり、かつ実質的に摩耗するこ
ともなく、漏洩量が極少領域に安定して耐久性に優れて
いることを示している。This is because even though both the metal diaphragm 9 and the valve seat 13 are made of metal, the generation of metal fine particles in the seal portion is extremely small, and there is substantially no wear and the amount of leakage is extremely small. It shows that it is stable and has excellent durability.
【００２１】また、駆動力伝達機構が剛性材料のみから
構成された従来例と比較すれば、同等以上の高速作動が
可能でありながらシール部に作用する弁閉時の衝撃が大
幅に緩和され、長期に亘って高速弁閉作動を繰返しても
シール部が劣化するようなことがなく、高速作動に好適
な空気圧作動式メタルダイヤフラム弁を提供することが
できる。Further, as compared with the conventional example in which the driving force transmission mechanism is made of only a rigid material, the shock at the time of valve closing which acts on the seal portion can be remarkably alleviated while the same or higher speed operation is possible. Even if the high-speed valve closing operation is repeated for a long period of time, the seal portion does not deteriorate, and it is possible to provide a pneumatically operated metal diaphragm valve suitable for high-speed operation.
【００２２】なお、本発明は上記実施例のみに限定され
るものではなく、例えば空気圧式駆動部２の代りにその
他の適宜空気圧式駆動部を組合せてもよい。また、緩衝
体２９は図４（Ａ）に例示するように駆動軸１４の中間
部（軸部と頭部との間など）に設けるようにしてもよ
い。要すれば、図４（Ｂ）に示すように緩衝体が、弁座
１３と背向するメタルダイヤフラム９面に被覆した樹脂
膜３０（例えば４弗化エチレンなど）であってもよい。
その他、本発明の要旨とするところの範囲内で種々の変
更ないし応用が可能である。The present invention is not limited to the above embodiment, and for example, instead of the pneumatic drive unit 2, another suitable pneumatic drive unit may be combined. Further, the buffer 29 may be provided in an intermediate portion (between the shaft portion and the head portion, etc.) of the drive shaft 14 as illustrated in FIG. If necessary, as shown in FIG. 4 (B), the buffer may be a resin film 30 (for example, ethylene tetrafluoride) covering the surface of the metal diaphragm 9 facing the valve seat 13.
Besides, various modifications and applications are possible within the scope of the gist of the present invention.
【００２３】[0023]
【発明の効果】以上説明したように本発明によれば、弁
作動に基づく微小粒子の発生が防止され、かつ耐久性に
優れた空気圧作動式メタルダイヤフラム弁を提供するこ
とができる。As described above, according to the present invention, it is possible to provide a pneumatically actuated metal diaphragm valve which prevents generation of fine particles due to valve operation and has excellent durability.
【図１】本発明の一実施例をす断面図。FIG. 1 is a sectional view showing an embodiment of the present invention.
【図２】同実施例の漏洩試験ラインを例示する系統図。FIG. 2 is a system diagram illustrating a leakage test line of the same embodiment.
【図３】同実施例の漏洩試験データを例示する線図。FIG. 3 is a diagram showing an example of leakage test data of the same embodiment.
【図４】（Ａ）および（Ｂ）は本発明の相異なる要部を
例示する部分断面図。4A and 4B are partial cross-sectional views illustrating different essential parts of the present invention.
【図５】従来例を示す切欠側面図。FIG. 5 is a cutaway side view showing a conventional example.
【図６】他の従来例を示す切欠側面図。FIG. 6 is a cutaway side view showing another conventional example.
１…弁部、２…空気圧式駆動部、９…メタルダイヤフラ
ム、１３…弁座、１４…駆動軸、２１…出力軸、２２…
圧搾空気流入口、２５，２６…排気孔、２９…緩衝体、
３０…樹脂膜。DESCRIPTION OF SYMBOLS 1 ... Valve part, 2 ... Pneumatic drive part, 9 ... Metal diaphragm, 13 ... Valve seat, 14 ... Drive shaft, 21 ... Output shaft, 22 ...
Compressed air inlet, 25, 26 ... Exhaust hole, 29 ... Buffer,
30 ... Resin film.
Claims (2)
フラムを駆動する空気圧式駆動部を備えたメタルダイヤ
フラム弁において、上記弁座と駆動部出力軸との間に介
設された緩衝体を具備することを特徴とする空気圧作動
式メタルダイヤフラム弁。1. A metal diaphragm valve provided with a pneumatic drive unit for driving a metal diaphragm facing a valve seat so as to come into contact with and away from the valve seat, and a buffer body interposed between the valve seat and the drive unit output shaft. A pneumatically actuated metal diaphragm valve characterized by being provided.
ルダイヤフラム面を被覆することを特徴とする請求項１
の空気圧作動式メタルダイヤフラム弁。2. The cushioning body covers a surface of the metal diaphragm facing the valve seat.
Pneumatically operated metal diaphragm valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24503592A JPH0694142A (en) | 1992-09-14 | 1992-09-14 | Pneumatic function type metal diaphragm valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24503592A JPH0694142A (en) | 1992-09-14 | 1992-09-14 | Pneumatic function type metal diaphragm valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0694142A true JPH0694142A (en) | 1994-04-05 |
Family
ID=17127619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24503592A Pending JPH0694142A (en) | 1992-09-14 | 1992-09-14 | Pneumatic function type metal diaphragm valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0694142A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1281898A2 (en) | 2001-07-31 | 2003-02-05 | Fujikin Incorporated | Diaphragm valve |
| WO2004023011A1 (en) | 2002-09-02 | 2004-03-18 | Fujikin Incorporated | Fluid controller |
| EP2110585A1 (en) * | 2008-04-18 | 2009-10-21 | Bürkert Werke GmbH & Co. KG | Valve with pneumatic drive unit |
| JP2016528460A (en) * | 2013-08-26 | 2016-09-15 | パーカー・ハニフィン・コーポレーション | High cycle high speed valve |
| KR20230062400A (en) | 2021-10-29 | 2023-05-09 | 가부시키가이샤 깃츠 에스시티 | Valves for semiconductor manufacturing device |
-
1992
- 1992-09-14 JP JP24503592A patent/JPH0694142A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1281898A2 (en) | 2001-07-31 | 2003-02-05 | Fujikin Incorporated | Diaphragm valve |
| JP2003042314A (en) * | 2001-07-31 | 2003-02-13 | Fujikin Inc | Diaphragm valve |
| EP1281898A3 (en) * | 2001-07-31 | 2003-06-04 | Fujikin Incorporated | Diaphragm valve |
| US6786471B2 (en) | 2001-07-31 | 2004-09-07 | Fujikin Incorporated | Diaphragm valve |
| KR100480759B1 (en) * | 2001-07-31 | 2005-04-06 | 가부시키가이샤 후지킨 | Diaphragm valve |
| JP4700234B2 (en) * | 2001-07-31 | 2011-06-15 | 株式会社フジキン | Diaphragm valve |
| WO2004023011A1 (en) | 2002-09-02 | 2004-03-18 | Fujikin Incorporated | Fluid controller |
| US7278441B2 (en) | 2002-09-02 | 2007-10-09 | Fujikin Incorporated | Fluid controller |
| EP2110585A1 (en) * | 2008-04-18 | 2009-10-21 | Bürkert Werke GmbH & Co. KG | Valve with pneumatic drive unit |
| JP2016528460A (en) * | 2013-08-26 | 2016-09-15 | パーカー・ハニフィン・コーポレーション | High cycle high speed valve |
| US9885421B2 (en) | 2013-08-26 | 2018-02-06 | Parker-Hannifin Corporation | High cycle and speed valve |
| KR20230062400A (en) | 2021-10-29 | 2023-05-09 | 가부시키가이샤 깃츠 에스시티 | Valves for semiconductor manufacturing device |
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