JP4715129B2 - Discharge head device, droplet discharge device, and electro-optical device manufacturing method - Google Patents

Description

The present invention, the discharge head unit for ejecting a functional liquid relates to the production how the droplet discharge device and an electro-optical device.

Conventionally, an ink supply chamber (primary chamber) and a pressure chamber (secondary chamber) connected to the ink supply chamber via an ink supply hole (communication hole) are provided, and based on the pressure (ink pressure) in the pressure chamber. There is known a pressure adjusting valve that adjusts the ink pressure in the pressure chamber to a predetermined pressure by opening and closing the ink supply hole. In a conventional ink jet recording apparatus, a pressure adjusting valve of this type is provided in a tube connecting an ink cartridge (functional liquid tank) and a recording head (functional liquid droplet ejection head), thereby removing the ink cartridge. The ink supply pressure of the ink (functional liquid) supplied to the recording head is accurately maintained.
JP 2003-211701 A

By the way, when bubbles are mixed in the functional liquid droplet ejection head, dot dropout or the like occurs. Therefore, it is preferable that the functional liquid supplied to the functional liquid droplet ejection head has a high degree of deaeration. However, when a configuration in which a pressure regulating valve is connected by a tube as in a conventional ink jet recording apparatus is used, air dissolves into the functional liquid being fed through the tube, so the degree of deaeration of the functional liquid is reduced. It cannot be maintained.
In addition, when the pressure adjustment valve and the functional liquid droplet ejection head are connected using a flexible tube, the functional liquid supplied from the pressure adjustment valve to the functional liquid droplet ejection head due to bending or bending of the tube The supply pressure is likely to vary, which may adversely affect the discharge accuracy of the functional liquid droplet discharge head.
Furthermore, since a joint is required for pipe connection using a tube, there is a problem that the functional liquid flow path from the functional liquid tank to the functional liquid droplet ejection head becomes long and the amount of functional liquid that is wasted increases.

In view of the above problems, the present invention, it is possible to eject the functional liquid stable, functional liquid channel discharge head device without prolonging producing how the droplet discharge device and an electro-optical device The issue is to provide.

An ejection head device according to the present invention includes a head unit in which a plurality of functional liquid droplet ejection heads for ejecting a functional liquid are mounted on a single head plate in a positioned state, and a plurality of functional liquids disposed immediately above the head unit. a valve unit and the plurality of pressure regulating valve equipped with positioning state to a single valve plate that adjusts the supply pressure of the supply functional liquid tank or et plurality of functional liquid droplet ejection head a constant pressure, through a valve plate A plurality of connecting pipe blocks that flow- connect the secondary side of each pressure regulating valve and each functional liquid droplet ejection head, and the plurality of pressure regulating valves include a plurality of connected connecting pipe blocks, Positioned on the valve plate so that it follows the arrangement pattern of each functional liquid droplet ejection head on the head plate, and connects multiple connecting pipe blocks to the head unit When aligning the valve units, connected with a plurality of functional liquid droplet ejecting heads and a plurality of connection tube block, characterized in that the carried out collectively.

According to this configuration, since the outflow port of the pressure regulating valve and the functional liquid droplet ejection head are connected by the connecting pipe block, the functional liquid flow path from the outflow port to the functional liquid droplet ejection head is bent or bent. There is nothing. Accordingly, the functional liquid can be fed to the functional liquid droplet ejection head with a stable functional liquid supply pressure, and the ejection performance of the functional liquid droplet ejection head can be kept stable.
Further, according to this configuration, the plurality of connection pipe blocks are positioned and arranged following the arrangement pattern of the connection needles of the functional liquid droplet ejection head on the head plate via the pressure adjustment valve. That is, the arrangement patterns of the plurality of connection pipe blocks supported by the valve plate and the connection needles of the plurality of functional liquid droplet ejection heads mounted on the head unit can be made the same. Therefore, by positioning the valve plate with respect to the head unit, it is possible to connect a plurality of connection pipe blocks and the connection needles of a plurality of functional liquid droplet ejection heads in a lump. And the convenience can be remarkably improved.

  In this case, one end of the connecting pipe block connected to the outflow port is formed with a threaded portion that is screwed into a threaded portion formed at the downstream end of the outflow port to connect the outflow port and the connection flow path. It is preferable.

  According to this configuration, the outflow port and the connection tube block can be directly connected by screwing the screw portion of the connection tube block into the screw portion of the outflow port. That is, it is not necessary to separately provide connection means such as a joint in order to connect the outflow port and the connection pipe block, which can contribute to shortening of the functional liquid flow path. The thread portion of the outflow port may be a female screw, the thread portion of the connecting pipe block may be a male screw, the thread portion of the outflow port may be a male screw, and the thread portion of the connecting pipe block may be a female screw.

  In these cases, the functional liquid droplet ejection head has a head main body for ejecting the functional liquid and a connection needle for introducing the functional liquid into the head main body, and a connection pipe connected to the functional liquid droplet ejection head. It is preferable that one end of the block is provided with a receiving portion for receiving the connecting needle in a removable manner.

  According to this configuration, the connection block and the functional liquid droplet ejection head can be connected by inserting the connection needle of the functional liquid droplet ejection head into the receiving part of the connection block, and the functional liquid can be connected from the receiving part of the connection block. By pulling out the connection needle of the droplet discharge head, the functional droplet discharge head can be removed from the connection block. That is, the functional liquid droplet ejection head can be easily and quickly attached to and detached from the connection block, and the operability when the functional liquid droplet ejection head is attached and detached can be improved.

  The droplet discharge device of the present invention moves relative to the discharge head device according to any one of the above, a head moving unit that moves the discharge head device relative to the workpiece, and the workpiece. And a control unit that performs drawing with functional liquid droplets on the workpiece by driving the discharge head device to discharge.

  According to this configuration, since the liquid droplet ejection apparatus of the present invention includes any one of the above-described ejection head devices, it is possible to perform drawing on a workpiece with high accuracy. Moreover, since the ejection head device described above is intended to shorten the functional liquid flow path, the functional liquid can be used efficiently.

A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming unit made of functional droplets is formed on a work using the droplet discharge device described above .

  According to these configurations, the electro-optical device is manufactured using the above-described droplet discharge device that can perform drawing on a workpiece with high accuracy and can efficiently use the functional liquid for drawing. , Efficient production becomes possible. Examples of the electro-optical device (device) include a liquid crystal display device, an organic EL (Electro-Luminescence) device, an electron emission device, a PDP (Plasma Display Panel) device, and an electrophoretic display device. The electron emission device is a concept including a so-called FED (Field Emission Display) device or SED (Surface-Conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  Hereinafter, a droplet discharge device according to a first embodiment to which the present invention is applied will be described with reference to the accompanying drawings. This droplet discharge device is incorporated in a so-called flat display production line, and emits light to be used as a color filter of a liquid crystal display device and each pixel of an organic EL device by a droplet discharge method using a functional droplet discharge head. Elements and the like are formed.

  As shown in FIGS. 1 and 2, the droplet discharge device 1 includes a machine base 2, a drawing device 3 that is widely placed on the entire area of the machine base 2 and has a functional liquid droplet discharge head 61, and the drawing device 3. And a head maintenance device 4 mounted on the machine base 2 so as to be attached thereto. The droplet discharge device 1 is provided with a control device 5 (not shown). The drawing device 3 performs a drawing operation on the workpiece W based on the control by the control device 5, and the functional droplet discharge head 61. On the other hand, the head maintenance device 4 appropriately performs a maintenance operation (maintenance).

  The drawing apparatus 3 is movable to an X / Y moving mechanism 11 including an X-axis table 21 extending in the main scanning direction (X-axis direction) and a Y-axis table 31 orthogonal to the X-axis table 21, and the Y-axis table 31. And a discharge head device 13 mounted on the main carriage 12 and mounted with a plurality of functional liquid droplet discharge heads 61.

  The X-axis table 21 is configured by movably mounting a set table 23 for setting a workpiece W on an X-axis slider 22 driven by an X-axis motor (not shown) that constitutes a drive system in the X-axis direction. The set table 23 includes a suction table 24 for sucking and setting the work W, a θ table 25 for correcting the position of the work W set on the suction table 24 in the θ-axis direction, and the like. The Y-axis table 31 is configured in substantially the same manner as the X-axis table 21, and has a Y-axis motor (not shown) drive Y-axis slider 32 that constitutes a drive system in the Y-axis direction. A main carriage 12 that supports 13 is mounted so as to be movable in the Y-axis direction. That is, the X / Y moving mechanism 11 constitutes the head moving means described in the claims. The workpiece W is moved in the main scanning direction by the X-axis table 21, and the discharge head device 13 is moved by the Y-axis table 31. Move in the scanning direction.

  The X-axis table 21 is directly supported on the machine base 2 and arranged in parallel with the X-axis direction. On the other hand, the Y-axis table 31 is supported by left and right columns 41 erected on the machine base 2 and extends in the Y-axis direction so as to straddle the X-axis table 21 and the head maintenance device 4 (see FIG. 1 and FIG. 2). In the drawing device 3, the area where the X-axis table 21 and the Y-axis table 31 intersect is the drawing area 42 where the workpiece W is drawn, and the area where the Y-axis table 31 and the head maintenance device 4 intersect is for the functional liquid droplet ejection head 61. A maintenance area 43 is provided for performing function recovery processing. The ejection head device 13 is allowed to face the drawing area 42 when drawing on the workpiece W, and the maintenance area 43 when performing function recovery processing. ing.

  As shown in FIG. 3, the ejection head device 13 includes a head unit 51 on which a plurality of functional liquid droplet ejection heads 61 are mounted, and a plurality of functional liquid tanks that supply functional liquid to the functional liquid droplet ejection heads 61 of the head unit 51. A tank unit 52 provided with 101, a valve unit 53 equipped with a plurality of pressure adjusting valves 141 for adjusting the supply pressure of the functional liquid supplied from the functional liquid tank 101 to the functional liquid droplet ejection head 61 to a constant pressure, and a functional liquid A tank 101, a pressure adjustment valve 141, and a connection unit 54 for connecting the functional liquid droplet ejection head 61 are provided.

  As shown in FIG. 4, the head unit 51 includes a plurality (12) of functional droplet ejection heads 61 on which the functional droplet ejection heads 61 are mounted, and a head plate 62 that supports the 12 functional droplet ejection heads 61. And a head support frame 63 that is supported by the main carriage 12 and supports the head plate 62.

  As shown in FIG. 5, the functional liquid droplet ejection head 61 has a so-called double structure, a functional liquid introduction part 71 having two connection needles 72, and a double head substrate that is continuous with the functional liquid introduction part 71. 73, and a head main body 74 that is connected to the lower side of the functional liquid introducing portion 71 and has an in-head flow path filled with the functional liquid therein.

  The connection needle 72 is connected to a functional liquid tank 101 (not shown) and supplies the functional liquid to the flow path in the head of the functional liquid droplet ejection head 61. The head main body 74 is composed of a cavity 75 (piezoelectric element) and a nozzle plate 76 having a nozzle surface 77 in which a discharge nozzle 78 is opened. On the nozzle surface 77, two rows of nozzle rows composed of a large number (180) of discharge nozzles 78 are formed. When the functional droplet discharge head 61 is driven to discharge, the functional droplet is discharged from the discharge nozzle 78 by the pump action of the cavity 75.

  The head plate 62 is a square thick plate made of stainless steel or the like. The head plate 62 is formed with twelve mounting openings (not shown) for positioning the twelve functional liquid droplet ejection heads 61 via the head holding member 81 from the back side. . The twelve mounting openings are divided into six groups of two, and the mounting openings of each group are arranged in a direction perpendicular to the nozzle row of the functional liquid droplet ejection head 61 (head plate so that a part thereof overlaps). 62 in the longitudinal direction). That is, the twelve functional liquid droplet ejection heads 61 are divided into two groups of six, and the nozzle rows of each group of functional liquid droplet ejection heads 61 partially overlap in the direction orthogonal to the nozzle rows. They are arranged in steps (see FIG. 4).

  The two nozzle rows formed in each functional liquid droplet ejection head 61 are configured by a large number (180) of ejection nozzles 78 arranged with a pitch of 4 dots. The nozzle rows are arranged so as to be displaced by 2 dots in the row direction. That is, in each functional liquid droplet ejection head 61, a two-dot pitch drawing line is formed by two nozzle rows. On the other hand, two adjacent functional liquid droplet ejection heads 61 of the same set are arranged so that each drawing line (with a 2-dot pitch) is displaced by one dot in the column direction, The ejection head 61 forms a 1-dot pitch drawing line. That is, the two functional liquid droplet ejection heads 61 of the same set are arranged so that the nozzle rows of ¼ resolution are displaced from each other, and together with the other 5 groups 10 functional liquid droplet ejection heads 61, A high resolution (one resolution) nozzle row of one drawing line is configured.

  The head support frame 63 is detachably supported by a carriage body 313 (described later) of the main carriage 12. The head support frame 63 is formed in a substantially rectangular frame shape, and has a head opening (not shown) for loosely fitting the head plate 62 (mounted with the functional liquid droplet ejection head 61) from below. The head support frame 63 is provided with three positioning pins for contacting and positioning the side end surface of the head plate 62 so that the head plate 62 is accurately positioned and held with respect to the head support frame 63. Be able to. A pair of handles 82 are attached to the head support frame 63 so that the head support frame 63 (head unit 51) can be detachably inserted into the main carriage 12 using the pair of handles 82 as a hand-held part. It has become.

  As shown in FIGS. 3 and 6, the tank unit 52 is supported by the common support frame 91 together with the valve unit 53 described above, and is mounted on the main carriage 12 (carriage body 313) via the common support frame 91. The The common support frame 91 supports the tank plate 102 of the tank unit 52 and the valve unit 53 of the valve unit 53 (both will be described later) in a positioned state. Similar to the head support frame 63, the common support frame 91 is also provided with a pair of handles 92 that serve as grips.

  As shown in FIG. 6, the tank unit 52 corresponds to each functional liquid droplet ejection head 61 of the head unit 51, and includes twelve functional liquid tanks 101 for supplying functional liquid thereto, and twelve functional liquid tanks. And a tank plate 102 for supporting 101.

  The functional liquid tank 101 is of a cartridge type, and includes a functional liquid pack 111 in which the functional liquid is vacuum-packed, and a flat box-shaped resin cartridge case 112 that accommodates the functional liquid pack 111. (See FIG. 9). The functional liquid stored in the functional liquid pack 111 has been degassed in advance so that the amount of dissolved gas becomes substantially zero, and bubbles are generated in the functional liquid when the liquid droplets are ejected from the functional liquid droplet ejection head 61. Therefore, consideration is given to avoid missing dots.

  The functional liquid pack 111 is a bag-shaped package in which two rectangular (flexible) film sheets 113 are superposed and thermally welded, and a resin supply port 114 for supplying the functional liquid is attached. It is configured so that the functional fluid can be used up to the end by being deformed into a flat shape with a decrease in the stored functional fluid. The film sheet 113 has a laminated structure in which a plurality of materials having corrosion resistance against functional liquid, gas impermeability, waterproofness, and the like are laminated. The supply port 114 is formed with a communication opening 115 communicating with the inside of the pack, and the communication opening 115 is closed by a closing member 116 made of an elastic material such as butyl rubber having functional liquid corrosion resistance (see FIG. 9). ). With such a configuration, intrusion of air (oxygen) or moisture into the functional liquid pack 111 can be prevented as much as possible.

  As shown in FIG. 6, the tank plate 102 is a thick plate made of stainless steel or the like and is formed in a substantially parallelogram, and is positioned and fixed to the common support frame 91. In the tank plate 102, the functional liquid tank 101 is positioned vertically with the supply port 114 of the functional liquid tank 101 directed toward the valve unit 53, and twelve setting portions 121 for detachably setting the functional liquid tank 101 are provided. A set guide portion 122 that guides the functional liquid tank 101 before setting to the set portion 121 is provided. The term “vertical placement” as used herein refers to a placement method in which the film sheet 113 of the functional liquid pack 111 is substantially vertical, and the installation space for the functional liquid tank 101 is compact compared to the horizontal placement in which the film sheet 113 is substantially horizontal. Can be suppressed.

  As shown in the figure, the twelve set portions 121 are arranged to set twelve functional liquid tanks 101 in accordance with the arrangement of the twelve functional liquid droplet ejection heads 61 mounted on the head plate 62. Yes. The set guide portion 122 is a groove that is connected to the set portion 121 and is formed according to the thickness of the functional liquid tank 101 (cartridge case 112).

  Reference numeral 131 shown in the drawing is a tank setting jig for setting the functional liquid tank 101 on the set guide portion 122 in the setting portion 121 by sliding. The tank setting jig 131 includes a set member 132 for setting the functional liquid tank 101 in the set portion 121 by pushing the rear surface of the functional liquid tank 101 (the surface facing the forming surface of the supply port 114) forward, and a set member And a set support member 133 that supports 132. A guide groove 134 is formed in the tank plate 102 along the side on the rear side of the tank, and the set support member 133 is guided by the guide groove 134 and slides on the tank plate 102. And by moving the set support member 133 according to the set position of the functional liquid tank 101, the set support member 133 can be opposed to the functional liquid tank 101 (rear surface) temporarily placed on the set guide portion 122, The functional liquid tank 101 can be set appropriately.

  As shown in FIG. 6, the valve unit 53 includes 12 sets of 24 pressure adjustment valves 141, 24 valve support members 142 that support 12 sets of 24 pressure adjustment valves 141, and 24 valve support members. And a valve plate 143 that supports 24 pressure regulating valves 141 via 142.

  The twelve sets of pressure regulating valves 141 correspond to twelve functional liquid droplet ejection heads 61, and one pressure regulating valve 141 corresponds to each connection needle 72 of the functional liquid droplet ejection head 61 (FIG. 3, see FIG. As shown in FIG. 7 and FIG. 8, in the valve housing 151 constituting the outline of the pressure regulating valve 141, there are a primary chamber 161 connected to the functional liquid tank 101 and a secondary chamber 162 connected to the functional liquid droplet ejection head 61. And a communication channel 163 communicating with the primary chamber 161 and the secondary chamber 162 is formed. A circular diaphragm 164 facing the outside is provided on one surface of the secondary chamber 162, and a valve body 165 that is opened and closed by the diaphragm 164 is provided in the communication channel 163. The functional liquid introduced from the functional liquid tank 101 into the primary chamber 161 is supplied to the functional liquid droplet ejection head 61 through the secondary chamber 162. At this time, the diaphragm 164 adjusts the atmospheric pressure to the reference pressure. As a result, the valve body 165 provided in the communication flow path 163 is opened and closed to adjust the pressure in the secondary chamber 162 (functional liquid).

  In the following, the pressure regulating valve 141 will be described in detail. Since the pressure regulating valve 141 is used in a vertical position with the diaphragm 164 vertical, the front side of the paper in FIG. ”, The left side is“ front ”, and the right side is“ rear ”. In addition, the code | symbol 166 in a figure is the attachment plate 166 for attaching the pressure regulation valve 141 to a flame | frame etc. (this embodiment valve support member 142).

  As shown in FIGS. 7 and 8, the valve housing 151 includes a primary chamber housing 152 in which a primary chamber 161 is formed, and a secondary chamber 162 in the interior, which is slightly larger than the primary chamber housing 152. The secondary chamber housing 153 and the ring plate 154 for fixing the diaphragm 164 to the secondary chamber housing 153 are composed of three members, all of which are made of a corrosion-resistant material such as stainless steel. The primary chamber housing 152, the secondary chamber housing 153, and the ring plate 154 are positioned with respect to the secondary chamber housing 153 by overlapping the ring plate 154 and the primary chamber housing 152 from the front and rear, respectively, with a plurality of stepped parallel pins or the like. After that, they are assembled so as to be screwed, and all have an appearance that is concentric with an axis passing through the center of the circular diaphragm 164. The primary chamber housing 152 and the secondary chamber housing 153 are airtightly butt-joined with each other via an O-ring 157, and the secondary chamber housing 153 and the ring plate 154 sandwich the edge of the diaphragm 164 and the packing 158. They are butt-joined in an airtight manner. Note that the primary chamber housing 152 and the secondary chamber housing 153 can be formed integrally.

  As shown in FIG. 8, the primary chamber housing 152 is formed with a truncated cone (substantially cylindrical) primary chamber 161 concentric with the diaphragm 164. The inner peripheral wall 161a of the primary chamber 161 The taper surface expands slightly toward the surface. An inflow port 172 connected to the functional liquid tank 101 is formed in the upper boss portion 171 formed at the upper back of the primary chamber housing 152.

  The inflow port 172 includes an inflow port 173 that opens to the outer peripheral surface of the primary chamber housing 152, a primary chamber side opening 174 that opens to the upper end of the primary chamber 161, and an inflow channel 175 that communicates these. The inflow channel 175 is formed obliquely in the circumferential direction so as to have a predetermined downward gradient. An inflow connector (union joint) is screwed into the inflow port 173 from the axial direction of the inflow channel 175, and a connection tube 271 (described later) of the connection unit 54 is connected through the inflow connector 176. Yes. The internal flow path of the inflow connector 176 is formed so as to expand at the downstream end, so that a step portion does not occur in the internal flow path and a large change in the flow rate of the functional liquid does not occur. The primary chamber side opening 174 opens at a position away from the top of the primary chamber in the circumferential direction, and the functional liquid flowing in from the functional liquid tank 101 flows down obliquely according to the gradient of the inflow channel 175, It flows into the primary chamber 161 from the secondary chamber side opening 174 along the inner peripheral wall 161 a of the primary chamber 161.

  As shown in FIG. 8, a first annular groove 178 having a rectangular cross section is formed on the front surface of the primary chamber housing 152 that is in close contact with the secondary chamber housing 153 and is located outside the primary chamber 161. The O-ring 157 is inserted into the annular groove. Further, the lower portion of the primary chamber housing 152 is cut out in an arcuate shape, and a connecting pipe block 301 (described later) of the connecting unit 54 is disposed in the missing portion.

  As shown in FIG. 8, the secondary chamber housing 153 is connected to the main chamber 181 having a truncated cone (substantially cylindrical) shape with an open front surface for attaching the diaphragm 164, and to the rear of the main chamber 181. A secondary chamber 162 composed of an expanded truncated cone (substantially cylindrical) spring chamber 182 and the communication channel 163 communicating with the spring chamber 182 and the primary chamber 161 are formed. The main chamber 181, the spring chamber 182, and the communication channel 163 all have a circular cross section concentric with the diaphragm 164. However, the communication flow path 163 includes a circular cross-section shaft insertion portion 191 in which a shaft portion 222 of a valve body 165, which will be described later, is slidably accommodated, and a cross-shaped cross-section flow extending from the shaft free insertion portion 191 in four radial directions. It is comprised with the road part 192 (refer FIG.7 (b)).

  The inner peripheral wall 181a of the main chamber 181 has a tapered surface that greatly expands forward so as to follow the negative deformation of the diaphragm 164, and an outflow port 201 is formed so as to face the lower end of the tapered surface. Yes. The outflow port 201 is formed in the inclined boss portion 202 positioned at the lower back of the secondary chamber housing 153 and opens to the lower back of the secondary chamber housing 153 (the arcuate missing portion of the primary chamber housing 152). 203, the secondary chamber side opening 204 opened to the taper surface of the secondary chamber 162, and the outflow channel 205 which connects these. The outflow channel 205 is formed obliquely in the front-rear direction so as to have a predetermined downward gradient substantially orthogonal to the tapered surface, and the functional liquid flowing out from the secondary chamber 162 flows out of the secondary chamber side opening 204. It flows down obliquely according to the gradient of 205 and flows out to the functional liquid droplet ejection head 61 side.

  An internal thread portion 206 is formed on the inner peripheral surface of the secondary chamber housing 153 constituting the outflow port 203 so as to screw the connection pipe block 301 of the connection unit 54 (details will be described later). To do).

  As shown in FIG. 8A, the diaphragm 164 includes a diaphragm main body 211 made of a resin film and a resin pressure receiving plate 212 attached to the inside of the diaphragm main body 211. The pressure receiving plate 212 is formed in a disc shape concentric with the diaphragm main body 211 and has a sufficiently small diameter with respect to the diaphragm main body 211, and a shaft portion 222 of a valve body 165 described later contacts the center thereof. The diaphragm main body 211 is configured by laminating heat-resistant PP (polypropylene), special PP, and PET (polyethylene terephthalate) on which silica is vapor-deposited, and is formed in a circular shape having the same diameter as the front surface of the secondary chamber housing 153. . The diaphragm 164 is hermetically fixed to the front surface of the secondary chamber housing 153 by a ring plate 154 together with a packing 158 attached to the diaphragm 164 from the outside. The pressure receiving plate 212 may be provided outside the diaphragm main body 211. However, since a shaft portion 222 of a valve body 165, which will be described later, repeatedly contacts and disconnects, the pressure receiving plate 212 is provided inside in the present embodiment to prevent damage to the diaphragm main body 211. Provided.

  As shown in FIG. 8, the valve body 165 includes a disc-shaped valve body main body 221, a shaft portion 222 extending in one direction so as to form a transverse “T” shape from the center of the valve body main body 221, An annular valve seal 223 provided (adhered) on the shaft side (front surface) of the body main body 221 is configured. The valve body main body 221 and the shaft portion 222 are integrally formed of a corrosion-resistant material such as stainless steel, and an annular small protrusion 224 is formed on the front surface of the valve body main body 221 so as to be located outside the shaft portion 222. Yes. The valve seal 223 is made of soft silicon rubber, and a seal projection 225 that is an annular projection is provided on the front surface of the valve seal 223 so as to correspond to the small projection 224. For this reason, when the valve body 165 is closed, the seal projection 225 strongly contacts the back surface of the secondary chamber valve housing 151 serving as a valve seat, that is, the opening edge of the communication channel 163, so that the communication channel 163 becomes the primary chamber. Clogged liquid-tight from the side. The valve body 221 is formed to be sufficiently smaller than the diaphragm 164 so that the valve body 165 can be opened and closed in response to slight pressure fluctuations in the secondary chamber 162.

  The shaft portion 222 is slidably fitted in the communication flow path 163 (shaft loose insertion portion 191), and abuts against the pressure receiving plate 212 of the diaphragm 164 whose front end (front end) is in the neutral position in the valve-closed state. That is, in the positive deformation state where the diaphragm 164 bulges outward, a predetermined gap is generated between the front end of the shaft portion 222 and the pressure receiving plate 212, and the diaphragm 164 is deformed to the negative side from this state. As a result, the front end of the shaft portion 222 and the pressure receiving plate 212 come into contact with each other in a neutral state parallel to the ring plate 154, and when the diaphragm 164 is further deformed negatively, the pressure receiving plate 212 is moved through the shaft portion 222 to the valve body. The main body 221 is pushed and opened. Therefore, of the volume of the secondary chamber 162, the functional fluid is supplied without receiving any pressure on the primary chamber side for the volume of the diaphragm 164 that is in a neutral state from the plus deformation.

  On the other hand, between the back surface of the valve body 165 (valve body main body 221) and the rear wall of the primary chamber 161, the valve body urging the valve body 165 toward the secondary chamber, that is, in the valve closing direction. A spring 231 is interposed. Similarly, between the pressure receiving plate 212 and the spring chamber 182 of the secondary chamber 162, a pressure receiving plate urging spring 232 that urges the diaphragm main body 211 to the outside via the pressure receiving plate 212 is interposed. In this case, the valve body urging spring 231 complements the water head of the functional liquid tank 101 applied to the back surface of the valve body 165, and due to the water head of the functional liquid tank 101 and the spring force of the valve body urging spring 231, The valve body 165 is pressed in the closing direction. On the other hand, the pressure receiving plate urging spring 232 complements the positive deformation of the diaphragm 164 and acts so that the secondary chamber 162 is slightly negative with respect to the atmospheric pressure. In the present embodiment, the diaphragm 164, the valve body, the valve body biasing spring 231, and the pressure receiving plate biasing spring 232 constitute a pressure adjusting unit described in the claims.

  Here, the operation of the pressure regulating valve 141 will be described. When the negative pressure of the secondary chamber 162 increases due to the consumption (discharge) of the functional liquid by the functional liquid droplet ejection head 61, the diaphragm 164 is pushed from the positive deformation state, and the diaphragm 164 is pushed to the atmospheric pressure to change from the neutral state to the negative deformation. Transition. Thereby, the valve body 165 is pushed through the pressure receiving plate 212 and slowly opens. When the valve body 165 is opened, the functional liquid flows from the primary chamber 161 into the secondary chamber 162 through the communication channel 163. As a result, the pressure in the secondary chamber 162 increases, and the valve body 165 is slowly closed. Even after the valve body 165 is closed, the pressure receiving plate urging spring 232 acts against the atmospheric pressure, and the diaphragm 164 is positively deformed and the functional fluid pressure in the secondary chamber 162 is slightly negative. Let me. By slowly repeating the above operation, the functional liquid is supplied while the secondary chamber 162 is maintained at a substantially constant pressure.

  As described above, the valve body 165 opens and closes by the pressure balance between the secondary chamber 162 connected to the atmospheric pressure and the functional liquid droplet ejection head 61, and the valve body 165 opens and closes. Since the force acts on the plate urging spring 232 in a distributed manner and the elastic force of the valve seal 223 made of soft silicone rubber acts, the opening / closing operation becomes extremely slow. Therefore, pressure fluctuation (cavitation) due to opening and closing of the valve body 165 is suppressed, and the ejection driving of the functional liquid droplet ejection head 61 is not affected. Of course, the pulsation and the like generated on the functional liquid tank side (primary side) are also edged by the valve body 165 and can be absorbed (damper function).

  And since the pressure regulating valve 141 of this embodiment has a structure in which the valve body opens and closes using atmospheric pressure as an adjustment reference pressure, the functional fluid is supplied at a constant low pressure unless the primary side becomes extremely high pressure. It can be supplied to the droplet discharge head 61. That is, the functional liquid can be stably supplied to the functional liquid droplet ejection head 61 without being affected by the head of the functional liquid tank 101.

  The pressure of the functional liquid in the secondary chamber 162 is maintained at a pressure lower than the atmospheric pressure by the pressure receiving plate urging spring 232, and the position of the functional liquid droplet ejection head 61 (nozzle surface 77) and the pressure adjusting valve are maintained. By making the difference in height from the position of 141 (center of the diaphragm 164) a constant value (95 mm in this embodiment), dripping from the functional liquid droplet ejection head 61 is also prevented. In this embodiment, a linear mark 241 indicating the center position of the diaphragm 164 is engraved on both surfaces of the mounting plate 166, and this mark 241 is used as an index when the pressure regulating valve 141 is installed. It is supposed to be.

  Each valve support member 142 includes a fixing portion 245 that is screwed to the valve plate 143, and a vertical support portion 246 that extends vertically from the fixing portion 245 and screws the pressure regulating valve 141 (attachment plate). The pressure regulating valve 141 is positioned and supported vertically (via 166) (see FIG. 9 and the like). As described above, the primary chamber 161, the secondary chamber 162, and the communication channel 163 of the pressure regulating valve 141 are formed in a circular shape concentric with the diaphragm 164. Therefore, when the pressure regulating valve 141 is placed vertically, its inner wall Air bubbles are less likely to remain on the surface. Therefore, by placing the pressure regulating valve 141 vertically, even if bubbles are mixed in the functional liquid supplied from the inflow port 172, the bubbles accumulate above the primary chamber 161 or the secondary chamber 162. Air bubbles can be prevented from flowing out from the port 201.

  As shown in FIG. 6, the valve plate 143 is positioned and fixed to the common support frame 91 in the same manner as the tank unit 52 (tank plate 102). The valve plate 143 is provided with 12 sets of 24 valve support members 142 and 12 valve openings 251, which correspond to the 12 functional liquid droplet ejection heads 61, respectively. is doing. Specifically, when 12 groups of 24 pressure regulating valves 141 are fixed to the valve support member 142, the 24 connecting pipe blocks 301 fixed to the pressure regulating valves 141 are replaced with 12 functional liquid droplet ejection heads 61. Are arranged following the arrangement of the connection needles 72, and one end (receiving portion: described later) protrudes downward from the valve opening 251, and each connection pipe is connected to each connection needle 72 of the functional liquid droplet ejection head 61. The block 301 can be plugged in and connected (details will be described later).

  As shown in FIG. 9, the connection unit 54 includes a tank side connection unit 261 that connects the functional liquid tank 101 and the pressure adjustment valve 141, and a head side connection that connects the functional liquid droplet ejection head 61 and the pressure adjustment valve 141. And a unit 262.

  The tank side connection unit 261 is connected to the functional liquid tank 101 and the twelve connection tubes 271 that connect the functional liquid tank 101 and the (two) pressure regulating valves 141 corresponding to the same functional liquid droplet ejection head 61. And a connection tool 272 for connecting the connection tube 271. The inlet 173 of the pressure adjustment valve 141 is provided with an inflow connector 176 formed of a union joint, and the pressure adjustment valve 141 and the connection tube 271 are connected via the inflow connector 176.

  As shown in FIG. 9, each connection tube 271 is bifurcated in the middle so that a single functional liquid tank 101 and two pressure regulating valves 141 can be connected. Similar to the functional liquid pack 111, the connection tube 271 has a laminated structure in consideration of corrosion resistance, gas impermeability, waterproofness, etc. with respect to the functional liquid.

  As shown in FIG. 9, the connection tool 272 has twelve tank-side adapters 273 for connecting the functional liquid tank 101 and the connection tube 271. The tank side adapter 273 includes a tube connection portion 274 that is directly connected to one end of the connection tube 271, and a tank connection portion 275 that is connected to the functional liquid tank 101, and the inside of both the connection portions 274 and 275. Is formed with a functional liquid channel for supplying the functional liquid.

  The tube connecting portion 274 includes a cylindrical male screw portion 281 that fits the connecting tube 271 in the axial center, a tube side flange 282 that supports the cylindrical male screw portion 281, a female screw cap 283 that is screwed to the outside of the cylindrical male screw portion 281, The tube side O-ring 284 is interposed between the cylindrical male screw portion 281 and the female screw cap 283 and holds the connection tube 271 in a liquid-tight manner. On the other hand, the tank connecting portion 275 is a tank connecting needle 291 having a channel formed in the axis, a tank side flange 292 that holds the tank connecting needle 291, and a tank interposed in the connecting needle receiving groove 285 of the tube side flange 282. The side O-ring 293 is configured. The tube connection part 274 and the tank connection part 275 are connected by flange-joining the tube side flange 282 and the tank side flange 292. Both O-rings 284 and 293 preferably have functional liquid corrosion resistance such as butyl rubber, gas impermeability, and waterproofness.

  Although not shown, the tank connection needle 291 has a sharp tip, and a plurality of minute inflow holes connected to the internal flow path are formed at the tip. That is, the tank connection needle 291 is connected to the functional liquid pack 111 (functional liquid tank 101) by being inserted through the closing member 116 of the functional liquid pack 111 and causes the functional liquid to flow out from the functional liquid pack 111. A flow path is formed. The base of the tank connection needle 291 is inserted into the connection tube 271, and the internal flow path and the flow path of the connection tube 271 are connected.

  The twelve tank-side adapters 273 are fixed to the tank plate 102 and supported by the adapter fixing members 296 that are bent at a right angle and are supported by the set unit 121. When the functional liquid tank 101 is completely set (mounted), the tank connection needle 291 of the tank side adapter 273 and the communication opening 115 of the functional liquid tank 101 are connected (see FIG. 9).

  The head side connection unit 262 includes 24 connection pipe blocks 301 that connect the pressure adjusting valve 141 and each connection needle 72 of the functional liquid droplet ejection head 61 mounted on the head unit 51 (see FIG. 3 and the like). ). The connecting pipe block 301 is made of stainless steel having corrosion resistance against the functional liquid, and a functional liquid flow path is formed inside.

  As shown in FIGS. 7 to 9, a male threaded portion 302 is formed at one end of the connecting pipe block 301, and this male threaded portion 302 is screwed into a female threaded portion 206 formed at the outlet 203 of the pressure regulating valve 141. By combining, the functional liquid flow path of the connecting pipe block 301 and the outflow port 201 of the pressure regulating valve 141 can be connected. In addition, the internal flow path of the connection pipe block 301 in which the male thread portion 302 is formed is widened at the upstream end, and a large change occurs in the flow rate of the functional liquid so that no stepped portion is generated in the flow path. Is configured to not.

  On the other hand, the other end (downstream end) of the connection tube block 301 is provided with a receiving portion 303 that removably receives the connection needle 72 of the functional liquid droplet ejection head 61. An annular groove 304 is formed on the inner peripheral surface of the receiving part 303 constituting the functional liquid flow path, and a sealing material 305 (O-ring) having functional liquid corrosion resistance is provided in this groove. As a result, the receiving portion 303 and the connection needle 72 of the functional liquid droplet ejection head 61 inserted therein are sealed in a liquid-tight manner, and the functional liquid flow path of the connection tube block 301 and the functional liquid droplet ejection head 61 are connected. Is done.

  The connection pipe block 301 is formed in a substantially “L” shape in a side view, and when the male screw portion 302 of the connection pipe block 301 is fixed to the pressure regulating valve 141, the receiving portion 303 is in a state parallel to the diaphragm 164, and Hold down. The connection pipe block 301 is positioned on the valve plate 143 via the pressure adjustment valve 141. When the pressure adjustment valve 141 is supported by the valve support member 142, the connection of the functional liquid droplet ejection head 61 on the head unit 51 is performed. The receiving part 303 is arranged following the arrangement of the needle 72. At this time, the receiving part 303 protrudes downward from the valve opening 251 of the valve plate 143, and can be connected to the connection needle 72 of the functional liquid droplet ejection head 61. Therefore, when the valve plate 143 mounted with the pressure adjustment valve 141 is positioned with respect to the head unit 51 positioned and fixed to the main carriage 12, a plurality of functional liquid droplet ejection heads 61 (connection needles 72) and a plurality of connection pipe blocks are provided. 301 can be connected at once (details will be described later).

  Thus, since the functional liquid droplet ejection head 61 and the pressure regulating valve 141 are directly connected by the connecting tube block 301, the connecting tube block 301 and the function liquid droplet discharging head 61 are connected to the connecting tube block 301 as in the case of using a flexible tube. There is no need to interpose a joint between the functional liquid droplet ejection head 61 or the connecting pipe block 301 and the pressure regulating valve 141, and the functional liquid flow path can be shortened accordingly. Moreover, since the connecting pipe block 301 does not bend like a flexible tube, the functional liquid flow path is not deformed. Therefore, the functional liquid supply pressure can be kept constant, and the functional liquid can be stably supplied from the pressure adjusting valve 141 to the functional liquid droplet ejection head 61. In addition, by forming the shape of the receiving portion 303 of the connection tube block 301 in accordance with the shape of the connection needle 72 of the functional droplet discharge head 61 to be applied, various functions including the general-purpose function droplet discharge head 61 are provided. The droplet discharge head 61 can be mounted on the droplet discharge apparatus 1.

  As shown in FIG. 2, the main carriage 12 is attached to the Y-axis table 31 (Y-axis slider 32) from the lower side of the “I” -shaped hanging member 311 and the lower surface of the hanging member 311. A θ rotation mechanism 312 for correcting the position in the θ direction (of the head unit 51), a box-shaped carriage body 313 that is attached to be suspended below the θ rotation mechanism 312 and supports the discharge head device 13. , Is composed of.

  A rectangular opening for loosely fitting the head unit 51 is formed in (on the lower surface of) the carriage main body 313, and the head unit 51 is positioned below the carriage main body 313 (via the head support frame 63). It is supposed to be fixed from. The carriage body 313 is also provided with a positioning mechanism similar to that of the head support frame 63 so that the head unit 51 can be fixed to the carriage body 313 in a positioned state.

  The carriage main body 313 is provided with four rectangular parallelepiped support blocks 314 that support a common support frame 91 on which the tank unit 52, the valve unit 53, and the connection unit 54 are mounted. The support block 314 is provided with a positioning guide mechanism 371 (described later) for mounting the common support frame 91 on the carriage body 313 in a state where the head unit 51 mounted on the carriage body 313 is aligned. .

  As described above, in the present embodiment, the functional liquid flow path from the functional liquid tank 101 to the functional liquid droplet ejection head 61 is remarkably shortened by mounting the entire ejection head device 13 on the main carriage 12 (carriage body 313). Be able to.

  Here, a drawing operation in the drawing apparatus 3 will be briefly described. First, as preparation before drawing, θ correction of the work W set on the set table 23 is performed and θ correction of the head unit 51 is performed. Next, the XY movement mechanism 11 (X-axis table 21) is driven to move the workpiece W forward in the main scanning (X-axis) direction. In synchronization with the forward movement of the work W, the (12) functional liquid droplet ejection heads 61 are selectively driven, and the functional liquid is selectively ejected onto the work W (main scanning). When the workpiece W moves once, the XY movement mechanism 11 (Y axis table 31) is further driven to move the head unit 51 by a predetermined distance in the sub scanning (Y axis) direction (sub scanning).

  Then, the X / Y moving mechanism 11 is driven to move the workpiece W backward, and the functional liquid droplet ejection head 61 is selectively driven in synchronism with this (main scanning). When the backward movement of the workpiece W is completed, the head unit 51 is sub-scanned by the XY movement mechanism 11. By repeating such main scanning and sub-scanning, drawing on the workpiece W is performed.

  In the present embodiment, the main scanning is performed by moving the work W. However, the head unit 51 is supported on the X-axis table 21 and the main unit 51 is moved with respect to the fixed work W. It is also possible to scan. In this case, the pressure adjustment valve 141 of the valve unit 53 mounted on the main carriage 12 is disposed such that its diaphragm 164 is parallel to the main scanning direction. Thereby, the influence of the inertia which the diaphragm 164 receives at the time of main scanning (at the time of functional droplet discharge) can be minimized. Therefore, it is possible to suppress pressure fluctuations in the secondary chamber 162 during main scanning, and it is possible to stabilize the drawing accuracy for the workpiece W.

  The head maintenance device 4 is placed on the machine base 2, and a moving table 321 extending in the X-axis direction, a suction unit 322 placed on the moving table 321, and the moving table 321 aligned with the suction unit 322. And a wiping unit 323 disposed in the space. The moving table 321 is configured to be movable in the X-axis direction, and is configured to appropriately move the suction unit 322 and the wiping unit 323 to the maintenance area 43 when the functional liquid droplet ejection head 61 is maintained. In addition to the above units, a discharge inspection unit for inspecting the flight state of the functional liquid droplets ejected from the functional liquid droplet ejection head 61, and the weight of the functional liquid droplets ejected from the functional liquid droplet ejection head 61 are measured. It is preferable to mount a weight measuring unit or the like on the head maintenance device 4.

  As shown in FIG. 1, the suction unit 322 is supported by the cap stand 331 and the cap stand 331, and is brought into close contact with the nozzle surface 77 of the functional liquid droplet ejection head 61 (12 corresponding to the arrangement of the functional liquid droplet ejection head 61). ) Caps 332, a single suction pump 333 capable of sucking (12) functional liquid droplet ejection heads 61 through each cap 332, and suction tubes (which connect each cap 332 and suction pump 333) (Not shown). Although not shown, the cap stand 331 incorporates a cap lifting mechanism 334 that lifts and lowers each cap 332 by motor driving, and each functional liquid droplet ejection head 61 of the head unit 51 facing the maintenance area 43. In contrast, the corresponding cap 332 can be separated.

  When sucking the functional liquid droplet ejection head 61, the cap lifting mechanism 334 is driven to bring the cap 332 into close contact with the nozzle surface 77 of the functional liquid droplet ejection head 61 and the suction pump 333 is driven. Accordingly, a suction force can be applied to the functional liquid droplet ejection head 61 through the cap 332, and the functional liquid is forcibly discharged from the functional liquid droplet ejection head 61. The suction of the functional liquid is performed in order to eliminate / prevent clogging of the functional liquid droplet ejection head 61. In addition, when the liquid droplet ejection apparatus 1 is newly installed, or the head of the functional liquid droplet ejection head 61 in the head unit 51. This is performed, for example, when the replacement is performed, and the functional liquid is filled in the functional liquid flow path from the functional liquid tank 101 to the functional liquid droplet ejection head 61.

  The cap 332 has a function of a flushing box that receives the functional liquid ejected by the discarding (preliminary ejection) of the functional liquid droplet ejection head 61, and drawing on the workpiece W as when the workpiece W is replaced. The function liquid of the regular flushing performed when stopping temporarily is received. In the discard discharge (flushing operation), the cap lifting mechanism 334 moves the cap 332 (the upper surface thereof) slightly away from the nozzle surface 77 of the functional liquid droplet discharge head 61.

  The suction unit 322 is also used for storing the functional liquid droplet ejection head 61 when the liquid droplet ejection apparatus 1 is not in operation. In this case, the head unit 51 faces the maintenance area 43 and the cap 332 is brought into close contact with the nozzle surface 77 of the functional liquid droplet ejection head 61. As a result, the nozzle surface 77 is sealed, the functional liquid droplet ejection head 61 (ejection nozzle 78) is prevented from drying, and the nozzle clogging of the ejection nozzle 78 can be prevented.

  As shown in FIG. 1, the wiping unit 323 includes a winding unit 341 that winds up a wiping sheet 343 wound in a roll shape by driving a winding motor 342 (not shown), and a cleaning liquid nozzle (spray). And a cleaning liquid supply unit 344 for spraying the cleaning liquid on the fed wiping sheet 343, and a wiping unit 345 for wiping the nozzle surface 77 with the wiping sheet 343 sprayed with the cleaning liquid. . Then, the wiping unit 323 faces the head unit 51 located in the maintenance area 43, and the nozzle surface 77 of the functional liquid droplet ejection head 61 is wiped with the wiping sheet 343 impregnated with the cleaning liquid (wiping). Dirt (functional liquid) adhering to the nozzle surface 77 can be removed.

  The control device 5 is composed of a personal computer or the like. Although not shown, an input device such as a keyboard and a mouse, various drives (not shown) such as an FD drive and a CD-ROM drive, and peripheral devices such as a monitor display are connected to the apparatus body.

  Next, the main control system of the droplet discharge device 1 will be described with reference to FIG. The droplet discharge device 1 includes a drawing unit 351 having the drawing device 3, a head maintenance unit 352 having the head maintenance device 4, and various sensors of the drawing device 3 and the head maintenance device 4, and a detection unit that performs various detections. 353, a drive unit 354 that drives each unit, and a control unit 355 (control device 5) that is connected to each unit and controls the entire droplet discharge device 1.

  The control unit 355 has an interface 361 for connecting the drawing device 3 and the head maintenance device 4, a storage area that can be temporarily stored, a RAM 362 that is used as a work area for control processing, and various storage areas ROM 363 for storing control programs and control data, drawing data for drawing on the workpiece W, various data from the drawing device 3 and the head maintenance device 4, and the like, and processing various data Are provided with a hard disk 364 for storing the program, a CPU 365 for processing various data in accordance with the program stored in the ROM 363 and the hard disk 364, and a bus 366 for connecting them together.

  The control unit 355 inputs various data from the drawing device 3 and the head maintenance device 4 through the interface 361 and is stored in the hard disk 364 (or sequentially read out by a CD-ROM drive or the like). Each means is controlled by causing the CPU 365 to perform arithmetic processing according to a program and outputting the processing result to the drawing apparatus 3, the head maintenance apparatus 4, and the like via the interface 361.

  By the way, in the liquid droplet ejection apparatus 1 of the present embodiment, the arrangement of the plurality of connecting pipe blocks 301 corresponds to the arrangement pattern of the plurality of functional liquid droplet ejection heads 61 in the head unit 51. When the head unit 51 is attached or detached, the plurality of functional liquid droplet ejection heads 61 and the plurality of connection tube blocks 301 can be connected at a time. Specifically, by aligning and fixing the common support frame 91 on which the valve plate 143 is positioned and mounted on the carriage body 313 on which the head unit 51 is positioned and mounted, all the functional liquids of the head unit 51 are mounted. The droplet discharge head 61 and all the connecting pipe blocks 301 of the valve plate 143 can be connected.

  As shown in FIG. 3, the common support frame 91 is aligned (guided) so that the all-function liquid droplet ejection head 61 and all the connecting pipe blocks 301 are properly connected to the carriage body 313 and the common support frame 91. The positioning guide mechanism 371 is provided. The positioning guide mechanism 371 includes four guide columns 41 erected on the four support blocks 314 of the carriage main body 313 and four guide holes formed on the common support frame 91 and inserted through the guide columns 41. 373.

  Although not shown in the drawings, of the four guide columns, three guide columns 41 are loosely inserted into the guide hole, and the tapered portion that is continuous with the loosely inserted portion and expands downward. And have. The base (lower end) of the tapered portion is formed to have the same diameter as the guide hole 373. Accordingly, when the common support frame 91 is placed on the carriage main body 313 so that the (corresponding) guide columns 41 are inserted into the four guide holes 373, the common support frame 91 has a tapered portion of the three guide columns 41. Be guided to. Thereby, the common support frame 91 is aligned with the head unit 51 mounted on the carriage body 313 and positioned by the bases of the three tapered portions. In addition, the external thread is cut at the front-end | tip part of the guide support | pillar 41, and the common support frame 91 is four support blocks 314 by fastening a nut (illustration omitted) in the state which aligned the common support frame 91. FIG. It is fixed to the (carriage body 313).

  Thus, in the present embodiment, by using the positioning guide mechanism 371, the twelve functional liquid droplet ejection heads 61 mounted on the head unit 51 and the twenty-four connection pipe blocks 301 mounted on the valve plate 143 are provided. Can be easily aligned, and these can be quickly connected.

  Next, a droplet discharge device according to a second embodiment will be described. The droplet discharge device 1 of the second embodiment is configured in substantially the same manner as in the first embodiment, but includes a functional liquid storage chamber 421 corresponding to a functional liquid tank and a pressure adjustment valve mechanism 422 corresponding to a pressure adjustment valve. The functional liquid supply device 401 is different in that it is integrally configured. The pressure regulating valve mechanism 422 here refers to the portion of the pressure regulating valve 141 in the first embodiment excluding the valve housing 151, that is, the mechanism portion of the pressure regulating valve 141, and the pressure regulating valve mechanism 422 in the first embodiment. The pressure of the functional fluid is adjusted by the same operating principle as that of the adjusting valve. Hereinafter, a description will be given centering on differences from the first embodiment. In the drawings, members having the same concept as in the first embodiment are denoted by the same reference numerals as in the first embodiment.

  As shown in FIG. 11, the functional liquid supply device 401 is configured by a common housing 411 (stainless steel in the embodiment) having solvent resistance and gas barrier properties. The common housing 411 includes a functional liquid storage chamber 421 that stores functional liquid and a diaphragm 164, and a pressure adjustment valve mechanism 422 that adjusts the pressure of the functional liquid supplied from the functional liquid storage chamber 421 to the functional liquid droplet ejection head 61. And a housing main body 412 built in and an opening / closing lid 413 for opening and closing the upper portion of the functional liquid storage chamber 421.

  As shown in FIG. 11, the functional fluid storage chamber 421 and the secondary chamber 162 of the pressure regulating valve mechanism 422 are formed adjacent to each other across the partition wall 431 in the housing body 412. A communication channel 163 that communicates the functional liquid storage chamber 421 and the secondary chamber 162 is formed. As shown in the figure, the secondary chamber 162 is formed in a truncated cone (taper) shape that expands from the functional liquid storage chamber 421 side, and is orthogonal to the parallel arrangement direction of the functional liquid storage chamber 421 and the secondary chamber 162. A diaphragm 164 is provided for this purpose. A valve body 165 is loosely inserted in the communication channel 163. An opening edge formed in the partition wall 431 on the side of the functional liquid storage chamber 421 serves as a valve seat. When the valve body 165 is closed, the communication channel 163 is opened from the side of the functional liquid storage chamber 421 (by the valve body main body 221). Occluded liquid-tightly.

  The functional liquid storage chamber 421 is provided with a spring receiving plate 432 erected in parallel with the diaphragm 164 so as to face the valve seat, and between the spring receiving plate 432 and the back surface of the valve body 165, A valve body biasing spring 231 of the pressure regulating valve mechanism 422 is interposed. That is, the space between the spring receiving plate 432 and the partition wall 431 on the side of the functional liquid storage chamber 421 corresponds to the primary chamber 161. In the functional liquid supply device 401, the functional liquid storage chamber 421, the primary chamber 161, Are integrally formed. The spring receiving plate 432 is formed narrower than the width of the functional liquid storage chamber 421, and the primary chamber 161 and the functional liquid storage chamber 421 are in communication with each other.

  The functional liquid storage chamber 421 is a so-called open tank whose upper end is opened to the outside by opening the opening / closing lid 413. The functional liquid storage chamber 421 is provided with a functional liquid supply port 114 so that the functional liquid can be appropriately replenished from the outside. Although not shown, a discharge port for discharging the functional liquid is provided on the bottom surface of the functional liquid storage chamber 421. By connecting a functional liquid processing facility to the discharge port, the functional liquid storage chamber 421 remains in the functional liquid storage chamber 421. Functional fluid can be discharged to the outside.

  The housing body 412 has an outflow port 201 extending downward from the secondary chamber 162. The secondary chamber side opening 204 opens to the tapered surface of the lower end of the secondary chamber 162, the outflow port 203 opens to the bottom surface of the housing body 412, and the outflow passage connecting them has a predetermined downward slope It is formed to become. As in the first embodiment, a female thread portion 206 is formed at a portion of the housing main body 412 forming the outlet 203, so that the connecting pipe block 301 can be screwed in.

  The connecting pipe block 301 is formed in a straight tube shape, and when a male screw portion 302 that is one end of the connecting pipe block 301 is screwed into the female screw portion 206 of the housing body 412, a receiving portion that is the other end of the connecting pipe block 301. 303 is held in a vertical posture downward.

  In addition, the functional liquid storage chamber 421 of the present embodiment is formed in a rectangular shape in plan view that is long in the displacement direction of the diaphragm 164, and the functional liquid storage chamber 421 has a wave-dissipating unit 441 that prevents the stored functional liquid from ripple Is provided. As shown in FIG. 11, the wave-absorbing means 441 is a float member 451 provided so as to cover substantially the entire liquid level of the functional liquid stored in the functional liquid storage chamber 421, and floats on the liquid level of the functional liquid. In this way, the liquid surface is prevented from wobbling. Thereby, the pressure fluctuation resulting from the ripple of the functional liquid in the functional liquid storage chamber 421 can be prevented.

  Further, the same effect can be obtained by providing a plurality of partition walls 461 that partition the functional liquid storage chamber 421 in the longitudinal direction of the functional liquid storage chamber 421 instead of the float member 451 (FIG. 12). reference). Each partition wall 461 is disposed over the upper limit position and the lower limit position of the functional liquid in the functional liquid storage chamber 421, and a plurality of spaces partitioned by the partition wall 461 communicate with each other at the lower end portion.

  A tank plate 102 on which 12 functional liquid supply devices 401 are mounted is placed on the main carriage 12 via a common support frame 91. Each functional liquid supply device 401 is connected to 12 functional liquid droplet ejection heads 61 on the head unit 51 via 12 connection pipe blocks 301. In the present embodiment, the functional liquid is supplied to only one of the two connection needles 72 of the functional liquid droplet ejection head 61.

  As shown in FIG. 11 or 12, the tank plate 102 is formed with twelve loose insertion openings 471 for loosely inserting the receiving portions 303 of the connection pipe block 301 protruding downward from the functional liquid supply device 401. . The twelve functional liquid supply devices 401 are positioned and arranged on the tank plate 102, and the arrangement pattern of the twelve connection pipe blocks 301 (reception portions 303) fixed to the functional liquid supply device 401. It is set based on the arrangement. That is, the arrangement of the twelve functional liquid supply devices 401 is set so that the arrangement of the connection needle 72 of the functional liquid droplet ejection head 61 that receives the supply of the functional liquid matches the arrangement of the receiving portion 303 of the connection pipe block 301. Has been. Accordingly, when the tank plate 102 is positioned and placed on the main carriage 12, the connection pipe block 301 and the connection needle 72 of the functional liquid droplet ejection head 61 are connected together.

  As described above, in the functional liquid supply device 401 of this embodiment, the functional liquid storage chamber 421 and the pressure adjustment valve mechanism 422 are built in the common housing 411, and a part of the functional liquid storage chamber 421 is the pressure adjustment valve mechanism 422. Since the structure also serves as the primary chamber 161, there is no need to provide connection means (tank side connection unit 261 in the first embodiment) for connecting the functional liquid storage chamber 421 and the pressure regulating valve mechanism 422. . That is, the functional liquid flow path between the functional liquid storage chamber 421 and the pressure regulating valve mechanism 422 can be minimized, and the apparatus configuration around the functional liquid supply apparatus 401 can be simplified.

  Next, a droplet discharge device according to a third embodiment will be described. The droplet discharge device 1 according to the third embodiment is also configured in substantially the same manner as in the first embodiment, but a pressure adjustment valve mechanism 422 corresponding to a pressure adjustment valve and a function droplet discharge corresponding to a function droplet discharge head. The head mechanism 481 (the discharge mechanism part excluding the housing part of the functional liquid droplet discharge head 61) is built in the common housing 411, and is different in that it is integrally formed.

  As shown in FIG. 13, a primary chamber 161, a secondary chamber 162, and a communication channel 163 of the pressure regulating valve mechanism 422 are formed above the common housing 411. On the other hand, a functional liquid droplet ejection head mechanism 481 is provided in the lower part of the common housing 411, and an in-head flow path that is connected to the secondary chamber 162 via the supply flow path 491 is formed. 73, and a head main body 74 including a cavity 75 and a nozzle plate 76 is incorporated.

  Thus, by providing the pressure regulating valve mechanism 422 and the functional liquid droplet ejection head mechanism 481 in the same common housing 411, the functional liquid flow path between the pressure regulating valve mechanism 422 and the functional liquid droplet ejection head mechanism 481 is shortened. can do. Further, the secondary chamber 162 of the pressure regulating valve mechanism 422 and the in-head flow path of the functional liquid droplet ejection head mechanism 481 can be directly communicated without connecting means such as the connection tube 271 and the connection pipe block 301. Therefore, the functional liquid can be stably supplied to the flow path in the head.

  In the present embodiment, the pressure adjustment valve mechanism 422 and the functional liquid droplet ejection head mechanism 481 are constructed in a single housing. However, the common housing 411 is a valve housing portion in which the pressure adjustment valve mechanism 422 is incorporated. And a head housing portion incorporating the functional liquid droplet ejection head mechanism 481 and a structure in which these are integrally fixed with screws or the like.

  In this case, it is preferable to form an outflow port continuous with the secondary chamber 162 in the valve housing portion and an inflow port continuous with the in-head flow path in the head housing portion. And the outflow port of the outflow port opened to the valve housing part is configured in the same manner as the receiving part 303 of the connecting pipe block 301 described above. On the other hand, the inflow port is formed inside the head housing portion protruding like a connecting needle of the functional liquid droplet ejection head 61. According to this configuration, by inserting the protruding portion of the head housing portion into the outflow port of the outflow port, it is possible to easily connect the inflow port of the head housing portion and the outflow port of the valve housing portion. If a problem occurs in the droplet discharge head mechanism 481, it can be easily replaced. As a matter of course, the valve housing portion may be further divided as in the pressure regulating valve 141 (valve housing 151) of the first embodiment.

  Next, a droplet discharge device according to a fourth embodiment will be described. As shown in FIG. 14, the ejection head device 13 of the droplet ejection apparatus 1 includes a functional droplet ejection head mechanism 481 corresponding to a functional droplet ejection head, a pressure adjustment valve mechanism 422 equivalent to a pressure adjustment valve, and a functional liquid. A functional liquid storage chamber 421 corresponding to a tank is built in the common housing 411 and is integrally formed. Thus, by forming the functional liquid droplet ejection head mechanism 481, the pressure adjustment valve mechanism 422, and the functional liquid storage chamber 421 in the common housing 411, it is not necessary to separately provide connection means for connecting them. The liquid flow path can be extremely shortened. The droplet discharge device 1 of this embodiment is substantially the same as the first to third embodiments, and the device configurations of the functional droplet discharge head mechanism 481, the pressure adjustment valve mechanism 422, and the functional liquid storage chamber 421 are also these. It is based on.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 15 is a flowchart showing the manufacturing process of the color filter, and FIG. 16 is a schematic cross-sectional view of the color filter 600 (filter base body 600A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step ( S101 ), a black matrix 602 is formed on a substrate (W) 601 as shown in FIG. The black matrix 602 is formed of metal chromium, a laminate of metal chromium and chromium oxide, or resin black. In order to form the black matrix 602 made of a metal thin film, a sputtering method, a vapor deposition method, or the like can be used. Further, when forming the black matrix 602 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step ( S102 ), the bank 603 is formed in a state of being superimposed on the black matrix 602. That is, first, as shown in FIG. 16B, a resist layer 604 made of a negative transparent photosensitive resin is formed so as to cover the substrate 601 and the black matrix 602. Then, an exposure process is performed with the upper surface covered with a mask film 605 formed in a matrix pattern shape.
Further, as shown in FIG. 16C, the resist layer 604 is patterned by etching an unexposed portion of the resist layer 604 to form a bank 603. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 603 and the black matrix 602 below the bank 603 become partition wall portions 607b that divide each pixel region 607a. When forming 608B, the landing area of the functional droplet is defined.

The filter substrate 600A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material of the bank 603, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 601 is lyophilic (hydrophilic), the droplets into each pixel region 607a surrounded by the bank 603 (partition wall portion 607b) in the colored layer forming step described later. The landing position accuracy is improved.

Next, in the colored layer forming step ( S103 ), as shown in FIG. 16D, functional droplets are ejected by the functional droplet ejection head 61 to enter each pixel region 607 a surrounded by the partition wall portion 607 b. Let it land. In this case, the functional liquid droplet ejection head 61 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating) to form three colored layers 608R, 608G, and 608B. When the colored layers 608R, 608G, and 608B are formed, the process proceeds to the protective film forming step ( S104 ), and as shown in FIG. A protective film 609 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 601 where the colored layers 608R, 608G, and 608B are formed, the protective film 609 is formed through a drying process.
Then, after forming the protective film 609, the color filter 600 proceeds to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 17 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 600 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 620, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 600 is the same as that shown in FIG. 16, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 620 is roughly constituted by a color filter 600, a counter substrate 621 made of a glass substrate, and a liquid crystal layer 622 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them. The filter 600 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are disposed on the outer surfaces of the counter substrate 621 and the color filter 600 (surfaces opposite to the liquid crystal layer 622 side), and the polarizing plates positioned on the counter substrate 621 side are also provided. A backlight is disposed outside.

On the protective film 609 of the color filter 600 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 623 elongated in the left-right direction in FIG. 17 are formed at predetermined intervals. The color of the first electrode 623 A first alignment film 624 is formed so as to cover the surface opposite to the filter 600 side.
On the other hand, a plurality of strip-shaped second electrodes 626 elongated in a direction orthogonal to the first electrode 623 of the color filter 600 are formed on the surface of the counter substrate 621 facing the color filter 600 at a predetermined interval. A second alignment film 627 is formed so as to cover the surface of the two electrodes 626 on the liquid crystal layer 622 side. The first electrode 623 and the second electrode 626 are made of a transparent conductive material such as ITO.

The spacer 628 provided in the liquid crystal layer 622 is a member for keeping the thickness (cell gap) of the liquid crystal layer 622 constant. The sealing material 629 is a member for preventing the liquid crystal composition in the liquid crystal layer 622 from leaking to the outside. Note that one end portion of the first electrode 623 extends to the outside of the sealing material 629 as a lead-out wiring 623a.
A portion where the first electrode 623 and the second electrode 626 intersect with each other is a pixel, and the color layers 608R, 608G, and 608B of the color filter 600 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 623 and application of the first alignment film 624 are performed on the color filter 600 to create a portion on the color filter 600 side. Patterning of the electrode 626 and application of the second alignment film 627 are performed to create a portion on the counter substrate 621 side. Thereafter, a spacer 628 and a sealing material 629 are formed in a portion on the counter substrate 621 side, and the portion on the color filter 600 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 622 is injected from the inlet of the sealing material 629, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, the spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 600 side is bonded to the portion on the counter substrate 621 side, the sealing material The liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 629. Further, the printing of the sealing material 629 can be performed by the functional liquid droplet ejection head 61. Furthermore, the first and second alignment films 624 and 627 can be applied by the functional liquid droplet ejection head 61.

FIG. 18 is a cross-sectional view of a principal part showing a schematic configuration of a second example of the liquid crystal device using the color filter 600 manufactured in the present embodiment.
The liquid crystal device 630 is significantly different from the liquid crystal device 620 in that the color filter 600 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 630 is generally configured by sandwiching a liquid crystal layer 632 made of STN liquid crystal between a color filter 600 and a counter substrate 631 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 631 and the color filter 600, respectively.

On the protective film 609 of the color filter 600 (on the liquid crystal layer 632 side), a plurality of strip-shaped first electrodes 633 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 633 is formed. A first alignment film 634 is formed so as to cover the surface on the layer 632 side.
A plurality of strip-shaped second electrodes 636 extending in a direction orthogonal to the first electrode 633 on the color filter 600 side are formed on the surface of the counter substrate 631 facing the color filter 600 at a predetermined interval. A second alignment film 637 is formed so as to cover the surface of the second electrode 636 on the liquid crystal layer 632 side.

The liquid crystal layer 632 is provided with a spacer 638 for keeping the thickness of the liquid crystal layer 632 constant, and a sealing material 639 for preventing the liquid crystal composition in the liquid crystal layer 632 from leaking to the outside. Yes.
Similarly to the liquid crystal device 620 described above, a portion where the first electrode 633 and the second electrode 636 intersect with each other is a pixel, and the colored layers 608R, 608G, and 608B of the color filter 600 are located in the portion that becomes the pixel. Is configured to do.

FIG. 19 shows a third example in which a liquid crystal device is configured using a color filter 600 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 650, the color filter 600 is arranged on the upper side (observer side) in the drawing.

The liquid crystal device 650 includes a color filter 600, a counter substrate 651 disposed so as to face the color filter 600, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 600. The polarizing plate 655 is generally configured by a polarizing plate 655 and a polarizing plate (not shown) disposed on the lower surface side of the counter substrate 651.
A liquid crystal driving electrode 656 is formed on the surface of the protective film 609 of the color filter 600 (the surface on the counter substrate 651 side). The electrode 656 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 660 described later is formed. An alignment film 657 is provided so as to cover the surface of the electrode 656 opposite to the pixel electrode 660.

  An insulating layer 658 is formed on the surface of the counter substrate 651 facing the color filter 600, and the scanning lines 661 and the signal lines 662 are formed on the insulating layer 658 so as to be orthogonal to each other. A pixel electrode 660 is formed in a region surrounded by the scanning lines 661 and the signal lines 662. Note that in an actual liquid crystal device, an alignment film is provided over the pixel electrode 660, but the illustration is omitted.

  In addition, a thin film transistor 663 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 660 and the scanning line 661 and the signal line 662. . The thin film transistor 663 is turned on / off by application of a signal to the scanning line 661 and the signal line 662 so that energization control to the pixel electrode 660 can be performed.

  The liquid crystal devices 620, 630, and 650 of the above examples have a transmissive configuration, but a reflective layer or a semi-transmissive reflective layer is provided to form a reflective liquid crystal device or a transflective liquid crystal device. You can also

  Next, FIG. 20 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 700) of the organic EL device.

The display device 700 is schematically configured with a circuit element portion 702, a light emitting element portion 703, and a cathode 704 laminated on a substrate (W) 701.
In this display device 700, light emitted from the light emitting element portion 703 to the substrate 701 side is transmitted through the circuit element portion 702 and the substrate 701 and emitted to the observer side, and the light emitting element portion 703 is opposite to the substrate 701. After the light emitted to the side is reflected by the cathode 704, the light passes through the circuit element portion 702 and the substrate 701 and is emitted to the observer side.

  A base protective film 706 made of a silicon oxide film is formed between the circuit element portion 702 and the substrate 701, and an island-like semiconductor film 707 made of polycrystalline silicon is formed on the base protective film 706 (on the light emitting element portion 703 side). Is formed. In the left and right regions of the semiconductor film 707, a source region 707a and a drain region 707b are formed by high concentration cation implantation, respectively. A central portion where no cation is implanted is a channel region 707c.

  In the circuit element portion 702, a transparent gate insulating film 708 covering the base protective film 706 and the semiconductor film 707 is formed, and a position corresponding to the channel region 707c of the semiconductor film 707 on the gate insulating film 708 is formed. For example, a gate electrode 709 made of Al, Mo, Ta, Ti, W or the like is formed. A transparent first interlayer insulating film 711 a and second interlayer insulating film 711 b are formed on the gate electrode 709 and the gate insulating film 708. Further, contact holes 712a and 712b are formed through the first and second interlayer insulating films 711a and 711b and communicating with the source region 707a and the drain region 707b of the semiconductor film 707, respectively.

A transparent pixel electrode 713 made of ITO or the like is patterned and formed on the second interlayer insulating film 711b in a predetermined shape, and the pixel electrode 713 is connected to the source region 707a through the contact hole 712a. .
A power line 714 is disposed on the first interlayer insulating film 711a, and the power line 714 is connected to the drain region 707b through the contact hole 712b.

  Thus, the driving thin film transistors 715 connected to the pixel electrodes 713 are formed in the circuit element portion 702, respectively.

The light emitting element portion 703 includes a functional layer 717 stacked on each of the plurality of pixel electrodes 713, and a bank portion 718 provided between each pixel electrode 713 and the functional layer 717 to partition each functional layer 717. It is roughly structured.
The pixel electrode 713, the functional layer 717, and the cathode 704 provided on the functional layer 717 constitute a light emitting element. Note that the pixel electrode 713 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 718 is formed between the pixel electrodes 713.

Bank unit 718, for example SiO, and SiO _2, the inorganic bank layer is formed of an inorganic material such as TiO _2, 718a (first bank layer), stacked on the inorganic bank layer 718a, an acrylic resin, such as polyimide resin It is composed of an organic bank layer 718b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank portion 718 is formed on the peripheral edge of the pixel electrode 713.
Between each bank portion 718, an opening 719 that gradually expands upward with respect to the pixel electrode 713 is formed.

The functional layer 717 includes a hole injection / transport layer 717a formed on the pixel electrode 713 in a stacked state in the opening 719 and a light emitting layer 717b formed on the hole injection / transport layer 717a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 717b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 717a has a function of transporting holes from the pixel electrode 713 side and injecting them into the light emitting layer 717b. The hole injection / transport layer 717a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 717b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material insoluble in the hole injection / transport layer 717a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 717b. By using the light emitting layer 717b, the light emitting layer 717b can be formed without re-dissolving the hole injection / transport layer 717a.

  The light emitting layer 717b is configured such that holes injected from the hole injection / transport layer 717a and electrons injected from the cathode 704 are recombined in the light emitting layer to emit light.

  The cathode 704 is formed so as to cover the entire surface of the light emitting element portion 703, and plays a role of flowing current to the functional layer 717 in a pair with the pixel electrode 713. Note that a sealing member (not shown) is disposed on the cathode 704.

Next, a manufacturing process of the display device 700 will be described with reference to FIGS.
As shown in FIG. 21, the display device 700 includes a bank part forming step ( S111 ), a surface treatment step ( S112 ), a hole injection / transport layer forming step ( S113 ), a light emitting layer forming step ( S114 ), It is manufactured through an electrode forming step ( S115 ). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank portion forming step ( S111 ), as shown in FIG. 22, an inorganic bank layer 718a is formed on the second interlayer insulating film 711b. The inorganic bank layer 718a is formed by forming an inorganic film at a formation position and then patterning the inorganic film using a photolithography technique or the like. At this time, a part of the inorganic bank layer 718 a is formed so as to overlap with the peripheral edge of the pixel electrode 713.
When the inorganic bank layer 718a is formed, an organic bank layer 718b is formed on the inorganic bank layer 718a as shown in FIG. This organic bank layer 718b is also formed by patterning using a photolithography technique or the like, similarly to the inorganic bank layer 718a.
In this way, the bank portion 718 is formed. Accordingly, an opening 719 that opens upward with respect to the pixel electrode 713 is formed between the bank portions 718. The opening 719 defines a pixel region.

In the surface treatment step ( S112 ), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 718aa of the inorganic bank layer 718a and the electrode surface 713a of the pixel electrode 713. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 713.
In addition, the lyophobic treatment is performed on the wall surface 718s of the organic bank layer 718b and the upper surface 718t of the organic bank layer 718b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane. )
By performing this surface treatment process, when the functional layer 717 is formed using the functional liquid droplet ejection head 61, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functioning liquid droplets from overflowing from the opening 719.

The display device base 700A is obtained through the above steps. This display device substrate 700A is placed on the set table 23 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step ( S113 ) and light emitting layer forming step ( S114 ) are performed. .

As shown in FIG. 24, in the hole injection / transport layer forming step ( S113 ), each opening 719 that is a pixel region is transferred from the functional liquid droplet ejection head 61 with the first composition containing the hole injection / transport layer forming material. Discharge inside. Thereafter, as shown in FIG. 25, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 717a on the pixel electrode (electrode surface 713a) 713.

Next, the light emitting layer forming step ( S114 ) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 717a, a hole injection / transport layer 717a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 717a has a low affinity for the nonpolar solvent, the hole injection / transport layer 717a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 717a. There is a possibility that the injection / transport layer 717a and the light emitting layer 717b cannot be adhered to each other or the light emitting layer 717b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 717a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform a surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in forming the light emitting layer or a similar solvent is applied on the hole injection / transport layer 717a, and this is applied. This is done by drying.
By performing such a treatment, the surface of the hole injection / transport layer 717a is easily adapted to the nonpolar solvent, and in the subsequent process, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 717a.

  Then, as shown in FIG. 26, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 26)) is used as a functional droplet. A predetermined amount is driven into the opening 719). The second composition driven into the pixel region spreads on the hole injection / transport layer 717a and fills the opening 719. Even if the second composition deviates from the pixel region and lands on the upper surface 718t of the bank portion 718, the upper composition 718t is subjected to the liquid repellent treatment as described above, and thus the second composition An object is easy to roll into the opening 719.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 27, a hole injection / transport layer 717a is obtained. A light emitting layer 717b is formed thereon. In the case of this figure, a light emitting layer 717b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 61, as shown in FIG. 28, the same steps as in the case of the light emitting layer 717b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 717b corresponding to green (G)) is formed. Note that the order in which the light-emitting layers 717b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

As described above, the functional layer 717, that is, the hole injection / transport layer 717 a and the light emitting layer 717 b are formed on the pixel electrode 713. And it transfers to a counter electrode formation process ( S115 ).

In the counter electrode forming step ( S115 ), as shown in FIG. 29, a cathode 704 (counter electrode) is formed on the entire surface of the light emitting layer 717b and the organic bank layer 718b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 704 is configured, for example, by laminating a calcium layer and an aluminum layer.
On top of the cathode 704, an Al film, an Ag film as electrodes, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are provided as appropriate.

  After forming the cathode 704 in this way, the display device 700 is obtained by performing other processing such as sealing processing and wiring processing for sealing the upper portion of the cathode 704 with a sealing member.

Next, FIG. 30 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 800). In the figure, the display device 800 is shown with a part thereof cut away.
The display device 800 includes a first substrate 801, a second substrate 802, and a discharge display portion 803 formed between the first substrate 801 and the second substrate 802, which are disposed to face each other. The discharge display unit 803 includes a plurality of discharge chambers 805. Among the plurality of discharge chambers 805, the three discharge chambers 805 of the red discharge chamber 805R, the green discharge chamber 805G, and the blue discharge chamber 805B are arranged to form one pixel.

Address electrodes 806 are formed in stripes at predetermined intervals on the upper surface of the first substrate 801, and a dielectric layer 807 is formed so as to cover the address electrodes 806 and the upper surface of the first substrate 801. On the dielectric layer 807, partition walls 808 are provided so as to be positioned between the address electrodes 806 and along the address electrodes 806. The partition 808 includes one extending on both sides in the width direction of the address electrode 806 as shown, and one not shown extending in a direction orthogonal to the address electrode 806.
A region partitioned by the partition 808 is a discharge chamber 805.

  A phosphor 809 is disposed in the discharge chamber 805. The phosphor 809 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 809R is located at the bottom of the red discharge chamber 805R, and the green discharge chamber 805G. A green phosphor 809G and a blue phosphor 809B are disposed at the bottom and the blue discharge chamber 805B, respectively.

On the lower surface of the second substrate 802 in the figure, a plurality of display electrodes 811 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 806. A dielectric layer 812 and a protective film 813 made of MgO or the like are formed so as to cover them.
The first substrate 801 and the second substrate 802 are bonded so that the address electrodes 806 and the display electrodes 811 face each other in a state of being orthogonal to each other. The address electrode 806 and the display electrode 811 are connected to an AC power source (not shown).
When the electrodes 806 and 811 are energized, the phosphor 809 emits light in the discharge display portion 803, and color display is possible.

In the present embodiment, the address electrode 806, the display electrode 811, and the phosphor 809 can be formed using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 806 in the first substrate 801 will be exemplified.
In this case, the following steps are performed with the first substrate 801 placed on the set table 23 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 61. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 806 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 806 has been exemplified in the above, the display electrode 811 and the phosphor 809 can also be formed through the above steps.
In the case of forming the display electrode 811, as in the case of the address electrode 806, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 809, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional droplet ejection head 61, and corresponding. Land in the color discharge chamber 805.

Next, FIG. 31 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 900). In the figure, a part of the display device 900 is shown as a cross section.
The display device 900 is schematically configured to include a first substrate 901 and a second substrate 902 that are arranged to face each other, and a field emission display portion 903 formed therebetween. The field emission display unit 903 includes a plurality of electron emission units 905 arranged in a matrix.

  A first element electrode 906a and a second element electrode 906b constituting the cathode electrode 906 are formed on the upper surface of the first substrate 901 so as to be orthogonal to each other. In addition, a conductive film 907 having a gap 908 is formed in a portion partitioned by the first element electrode 906a and the second element electrode 906b. In other words, the first element electrode 906a, the second element electrode 906b, and the conductive film 907 constitute a plurality of electron emission portions 905. The conductive film 907 is made of, for example, palladium oxide (PdO), and the gap 908 is formed by forming after forming the conductive film 907.

  An anode electrode 909 facing the cathode electrode 906 is formed on the lower surface of the second substrate 902. A lattice-shaped bank portion 911 is formed on the lower surface of the anode electrode 909, and a phosphor 913 is disposed in each downward opening 912 surrounded by the bank portion 911 so as to correspond to the electron emission portion 905. Yes. The phosphor 913 emits fluorescence of any color of red (R), green (G), and blue (B), and each opening 912 has a red phosphor 913R, a green phosphor 913G, and a blue color. The phosphors 913B are arranged in the predetermined pattern described above.

  The first substrate 901 and the second substrate 902 configured as described above are bonded together with a minute gap. In this display device 900, electrons that jump out of the first element electrode 906 a or the second element electrode 906 b serving as the cathode through the conductive film (gap 908) 907 are formed on the phosphor 913 formed on the anode electrode 909 serving as the anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 906a, the second element electrode 906b, the conductive film 907, and the anode electrode 909 can be formed using the droplet discharge device 1 and each color. The phosphors 913R, 913G, and 913B can be formed using the droplet discharge device 1.

  The first element electrode 906a, the second element electrode 906b, and the conductive film 907 have the planar shape shown in FIG. 32A. When these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 906a, the second element electrode 906b, and the conductive film 907 are previously formed. Next, the first element electrode 906a and the second element electrode 906b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 907 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 907, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 901 and the second substrate 902 and a lyophobic process on the bank portions 911 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a plane schematic diagram of the drawing apparatus which concerns on embodiment of this invention. It is a front schematic diagram of the drawing apparatus which concerns on embodiment of this invention. It is a front view around a carriage body. It is a top view of a head unit. It is an external appearance perspective view of a functional droplet discharge head. It is explanatory drawing around a common support frame. It is explanatory drawing around a pressure regulation valve, (a) is the external appearance perspective view seen from the back surface, (b) is a rear view. It is explanatory drawing around a pressure regulation valve, (a) is a longitudinal cross-sectional view, (b) is the longitudinal cross-sectional view which expanded the surroundings of the primary chamber. It is explanatory drawing which showed the connection relationship of the discharge head apparatus. It is a block diagram explaining the main control system of the drawing apparatus. It is explanatory drawing of the discharge head apparatus in 2nd Embodiment. It is explanatory drawing of the discharge head apparatus in 2nd Embodiment. It is explanatory drawing of the discharge head apparatus in 3rd Embodiment. It is explanatory drawing of the discharge head apparatus in 4th Embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Droplet discharge device 3 Drawing apparatus 5 Control apparatus 11 X / Y moving mechanism 51 Head unit 53 Valve unit 61 Functional droplet discharge head 62 Head plate 72 Connecting needle 74 Head main body 101 Functional liquid tank 141 Pressure adjustment valve 143 Valve plate 151 Valve housing 161 Primary chamber 162 Secondary chamber 163 Communication flow path 201 Outflow port 206 Female thread portion 301 Connection pipe block 303 Receiving portion 441 Wave breaking means 451 Float member 461 Partition wall W Workpiece

Claims (5)

A head unit in which a plurality of functional liquid droplet ejection heads for ejecting functional liquid are mounted on a single head plate in a positioning state ;
Wherein it is disposed right above the head unit, a plurality of functional liquid tank or et plurality of functional liquid plurality of single valve and pressure regulating valve for regulating the constant pressure supply pressure of the functional liquid to be supplied to the droplet discharge head A valve unit mounted in a positioning state on the plate ;
The extending through the valve plate, and a plurality of connecting tube block to the passage connecting the secondary side of said respective functional liquid droplet ejection heads of the respective pressure regulating valves,
The plurality of pressure regulating valves are positioned on the valve plate such that the plurality of connected connecting pipe blocks are arranged following the arrangement pattern of the functional liquid droplet ejection heads on the head plate,
When the valve unit in which the plurality of connection pipe blocks are connected to the head unit is aligned, the plurality of functional liquid droplet ejection heads and the plurality of connection pipe blocks are collectively connected. Discharge head device characterized.   One end of the connecting pipe block connected to the outflow port is formed with a threaded portion that is screwed into a threaded portion formed at the downstream end of the outflow port to connect the outflow port and the connection flow path. The discharge head device according to claim 1, wherein the discharge head device is a discharge head device. The functional liquid droplet ejection head includes a head body that ejects the functional liquid;
A connection needle for introducing the functional liquid into the head body,
3. The ejection head device according to claim 1, wherein a receiving portion that receives the connection needle in a removable manner is provided at one end of the connection pipe block connected to the functional liquid droplet ejection head. . An ejection head device according to any one of claims 1 to 3 ,
A head moving means for moving the ejection head device relative to the workpiece;
A droplet ejection apparatus comprising: a control unit configured to perform drawing with functional droplets on the workpiece by ejecting and driving the ejection head device that moves relative to the workpiece. . 5. A method of manufacturing an electro-optical device, wherein the droplet discharge device according to claim 4 is used to form a film forming portion with functional droplets on the workpiece.