JP2006082070A - Functional liquid filling method, droplet delivery apparatus, method for manufacturing electrooptic apparatus, electrooptic apparatus, and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently discharge air bubbles mixed in a pressure control valve and to shorten a filling time at the time of initial filling with a functional liquid. <P>SOLUTION: The subject filling method is for initially filling a functional liquid into a functional liquid feed passage comprising an in-valve passage 61r in a pressure control valve 61 for feeding the functional liquid introduced from a functional liquid tank 62 into a functional liquid droplet delivery head 71 and regulating the pressure by a diaphragm 221 using the atmospheric pressure as a regulating standard pressure, a tank-side feed passage 81r continued from the functional liquid tank 62 into the pressure control valve 61, a head-side feed passage 82r continued from the pressure control valve 61 into a functional liquid droplet delivery head 71, and an in-head passage 71r in the functional liquid droplet delivery head 71. This method comprises the steps of subjecting the diaphragm 221 to minus deformation by a pressing means 7, sucking the functional liquid through a cap 102 in intimate contact with a nozzle face 78 in the functional liquid droplet delivery head 71, and releasing the pressing force in the pressing means 7 after passing of the functional liquid into the functional liquid feed passage by functional liquid suction. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  In the present invention, when the functional liquid introduced from the functional liquid tank is supplied to the functional liquid droplet ejection head via the pressure regulating valve, the functional liquid is supplied to the functional liquid supply channel from the functional liquid tank to the functional liquid droplet ejection head. The present invention relates to a functional liquid filling method for initial filling, a droplet discharge device, a method for manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus.

  Conventionally, a droplet ejection device that performs drawing by ejecting a functional droplet ejection head and that consumes a large amount of functional liquid (ink), such as a commercial one, is connected from a large ink cartridge through a tube. A so-called off-carriage type ink supply mechanism that supplies ink to a functional liquid droplet ejection head mounted on the carriage is employed.

In such an off-carriage type configuration, particularly when the print size is large, the tube drawing distance becomes long, and the dynamic pressure (pressure loss) increases in the tube from the ink cartridge to the carriage. For this reason, in order to suppress the influence of the dynamic pressure, the ink pack accommodated in the ink cartridge is pressurized with air to generate a forced ink flow and supply the ink to the sub tank mounted on the carriage. A method is known (see, for example, Patent Document 1).
Japanese Patent Laid-Open No. 2001-199080

  However, since the method as described above supplies ink to the sub tank by air pressurization, ink can be reliably supplied to the functional liquid droplet ejection head. However, the supply amount to the functional liquid droplet ejection head is reduced. In order to stabilize, it is necessary to control the amount of ink stored in the sub-tank to be within a certain range. Therefore, the liquid level detection sensor for detecting the liquid level in the sub-tank and the control configuration thereof are complicated, and the size and cost of the apparatus cannot be avoided.

Therefore, in recent years, ink is introduced into a pressure regulating valve having a self-sealing function from an ink cartridge arranged at a position separated from the carriage, and ink is supplied to the functional liquid droplet ejection head via the pressure regulating valve. A system has been proposed (see, for example, Patent Document 2).
JP 2003-211701 A

  This configuration eliminates the need for a liquid level detection sensor and the like, thus simplifying the control configuration and absorbing pressure fluctuations by the pressure adjustment valve. It is known that there is an effect that the discharge can be performed.

  However, when the system as described above is used, the use of the pressure regulating valve causes new problems such as problems that air bubbles are mixed in the pressure regulating valve and that the initial ink filling takes time. Was. In particular, when a large amount of bubbles are mixed in the pressure control valve, this flows together with the ink to the functional liquid droplet ejection head, resulting in defective ejection of the functional liquid droplet ejection head, or oxygen in the air bubbles depending on the ink type (functional liquid type) Since it reacts with water and changes its quality, discharging bubbles (preventing mixing) is an important issue. Further, in the invention of the above-mentioned Patent Document 2, since the outlet for drawing out ink is formed at the uppermost part in the gravity direction of the pressure regulating valve, the bubbles remaining in the joint part and the corner part due to the flow of ink are at the uppermost part. There is a problem that air bubbles are easily mixed into the functional liquid supplied to the functional liquid droplet ejection head.

  Accordingly, the present invention provides a functional liquid filling method, a droplet discharge device, and an electro-optical device manufacturing method capable of realizing efficient discharge of bubbles mixed in the pressure regulating valve and shortening of the filling time at the time of initial functional liquid filling. An object is to provide an electro-optical device and an electronic apparatus.

  In the functional liquid filling method of the present invention, the functional liquid introduced into the primary chamber from the functional liquid tank is supplied to the functional liquid droplet ejection head through the secondary chamber, and the diaphragm is provided on one surface of the secondary chamber. A flow path in the valve of a pressure regulating valve that adjusts the pressure in the secondary chamber by opening and closing a valve body provided in the communication flow path that communicates the primary chamber and the secondary chamber with the atmospheric pressure as the adjustment reference pressure; A functional liquid comprising a tank-side supply flow path that extends from the functional liquid tank to the primary chamber, a head-side supply flow path that extends from the secondary chamber to the functional liquid droplet ejection head, and a flow path in the head of the functional liquid droplet ejection head. A functional liquid filling method in which a functional liquid is initially filled in a supply flow path, and a diaphragm deforming step in which the diaphragm is negatively deformed to the other surface side of the secondary chamber by a pressing unit, and a nozzle surface of the functional liquid droplet ejection head Aspirate the functional fluid through the tight cap A function liquid suction step, once passed through the functional liquid to the functional liquid supply flow path by the function liquid suction, characterized in that and a press releasing step of releasing the pressing of the pressing means.

  Further, the droplet discharge device of the present invention supplies the functional liquid introduced from the functional liquid tank to the primary chamber to the functional droplet discharge head via the secondary chamber and is provided on one surface of the secondary chamber. A flow path in the valve of the pressure regulating valve that adjusts the pressure in the secondary chamber by opening and closing the valve body provided in the communication flow path that communicates the primary chamber and the secondary chamber with the atmospheric pressure as the adjustment reference pressure by the diaphragm And a tank-side supply channel that is connected from the functional liquid tank to the primary chamber, a head-side supply channel that is connected from the secondary chamber to the functional droplet discharge head, and an in-head channel of the functional droplet discharge head. In the liquid droplet ejection apparatus having the functional liquid supply channel, the functional liquid is applied via a pressing means for negatively deforming the diaphragm to the other surface side of the secondary chamber, and a cap in close contact with the nozzle surface of the functional liquid droplet ejection head. Functional liquid suction means to suck and release of pressing means Comprising a pressure release means that the pressing releasing means, after passed through the functional liquid to the functional liquid supply flow path by the function liquid suction means, characterized by releasing the pressure.

  According to these configurations, when the functional liquid introduced from the functional liquid tank is supplied to the functional liquid droplet ejection head via the pressure regulating valve, the functional liquid supply channel from the functional liquid tank to the functional liquid droplet ejection head When the functional liquid is initially filled, the functional liquid is sucked by pressing the diaphragm provided on one surface of the secondary chamber of the pressure regulating valve to suck the functional liquid, and the functional liquid is passed through the functional liquid supply channel. Later, in order to release the pressure, the amount of air bubbles in the pressure adjustment valve is decreased and the amount of functional liquid filling the pressure adjustment valve is increased compared to the case of performing initial filling only by suction of the functional liquid. Can do. That is, if the initial filling is performed only by sucking the functional liquid, bubbles may remain in the upper part of the secondary chamber, but according to the above configuration, the pressure can be adjusted correspondingly by deforming the diaphragm negatively. The air in the valve can be discharged, and the flow rate of the functional fluid is increased by returning the shape of the diaphragm based on the release of the pressure after passing the functional fluid. It is possible to discharge even a small amount of bubbles, and as a result, it is possible to reduce the amount of bubbles mixed in the pressure regulating valve at the time of initial filling. Further, the diaphragm can be rapidly deformed negatively by the pressing means, and the flow rate of the functional liquid is increased by returning the shape of the diaphragm, so that the time required for the initial filling can be shortened.

  In this case, an on-off valve for opening and closing the tank-side supply flow path is interposed in the tank-side supply flow path, and prior to the diaphragm deformation process, a flow-path closing process for closing the tank-side supply flow path with the open / close valve, and a diaphragm deformation process It is preferable to further include a flow path opening step for opening the tank-side supply flow channel with an on-off valve between the first and the functional liquid suction step.

  Further, in this case, an on-off valve that opens and closes the tank-side supply flow path is further provided. The open-close valve closes the tank-side supply flow path prior to the deformation of the diaphragm by the pressing means, and after the deformation of the diaphragm, It is preferable to open the supply flow path.

  According to these configurations, prior to the deformation of the diaphragm, the on-off valve provided in the tank-side supply flow path is closed, and after the diaphragm is deformed, the on-off valve is opened. The air and the functional liquid present in the inner flow path do not flow back to the tank side supply flow path or the functional liquid tank due to the deformation of the diaphragm by the pressing means. Therefore, it is possible to prevent the functional liquid from deteriorating and deteriorating due to the backflow of the functional liquid and the functional liquid remaining in the tank-side supply flow path.

  In another functional liquid filling method of the present invention, the functional liquid introduced into the primary chamber from the functional liquid tank is supplied to the functional liquid droplet ejection head through the secondary chamber, and is provided on one surface of the secondary chamber. The flow path in the valve of the pressure adjustment valve that adjusts the pressure in the secondary chamber by opening and closing the valve body provided in the communication flow path that communicates the primary chamber and the secondary chamber with the atmospheric pressure as the adjustment reference pressure by the diaphragm A tank-side supply channel that is continuous from the functional liquid tank to the primary chamber and is provided with an on-off valve, a head-side supply channel that is connected from the secondary chamber to the functional droplet discharge head, and a head of the functional droplet discharge head A functional liquid filling method for initially filling a functional liquid into a functional liquid supply flow path comprising an internal flow path, the flow path closing process for closing the tank-side supply flow path with an on-off valve; Suction movement through a cap closely attached to the nozzle surface of the functional liquid droplet ejection head The diaphragm is deformed negatively to the other side of the secondary chamber, and after the diaphragm deforming step, the tank-side supply channel is opened by the on-off valve to release the functional liquid to the functional liquid supply channel. And a functional liquid filling step for filling.

  Another droplet discharge device of the present invention supplies the functional liquid introduced from the functional liquid tank to the primary chamber to the functional droplet discharge head via the secondary chamber, and on one surface of the secondary chamber. Inside the valve of the pressure regulating valve that adjusts the pressure of the secondary chamber by opening and closing the valve body provided in the communication channel that communicates the primary chamber and the secondary chamber with the atmospheric pressure as the adjustment reference pressure by the provided diaphragm A flow path, a tank-side supply flow path that extends from the functional liquid tank to the primary chamber, a head-side supply flow path that extends from the secondary chamber to the functional liquid droplet ejection head, and a flow path in the head of the functional liquid droplet ejection head; In a droplet discharge device having a functional liquid supply channel, the diaphragm is operated by suction through an on-off valve that opens and closes the tank-side supply channel and a cap that is in close contact with the nozzle surface of the functional droplet discharge head. Negatively deform the other side of the secondary chamber The diaphragm deforming means and the functional liquid filling means for filling the functional liquid supply flow path with the functional liquid are provided. The diaphragm deforming means performs the suction operation after closing the tank side supply flow path with the on-off valve, The filling means is characterized in that after the diaphragm is deformed, the tank-side supply flow path is opened by an on-off valve to fill the functional liquid.

  According to these configurations, when the functional liquid introduced from the functional liquid tank is supplied to the functional liquid droplet ejection head via the pressure regulating valve, the functional liquid supply channel from the functional liquid tank to the functional liquid droplet ejection head When the functional liquid is initially filled, the diaphragm is negatively deformed by suctioning through the cap with the tank-side supply flow path closed, and then the tank-side supply flow path is opened to function as the functional liquid supply flow path. Compared with the case where the diaphragm is not negatively deformed because the liquid is filled, the amount of bubbles mixed in the pressure regulating valve can be reduced and the amount of the functional liquid filled in the pressure regulating valve can be increased. That is, if the functional liquid is sucked (initially filled) without negatively deforming the diaphragm, bubbles may remain in the upper part of the secondary chamber. Since the inside of the regulating valve can be brought close to a vacuum state, residual bubbles can be reduced, and the flow rate of the functional fluid is increased by returning the shape of the diaphragm, so that it remains at the corners in the pressure regulating valve. It is possible to discharge even a small amount of bubbles, and as a result, it is possible to reduce the amount of bubbles mixed in the pressure regulating valve at the time of initial filling. Furthermore, by performing the suction operation with the tank side supply flow path closed, the diaphragm can be suddenly negatively deformed, and the flow rate of the functional fluid is increased by returning the shape of the diaphragm. Can be shortened.

  In another functional liquid filling method of the present invention, the functional liquid introduced into the primary chamber from the functional liquid tank is supplied to the functional liquid droplet ejection head through the secondary chamber, and is provided on one surface of the secondary chamber. The flow path in the valve of the pressure adjustment valve that adjusts the pressure in the secondary chamber by opening and closing the valve body provided in the communication flow path that communicates the primary chamber and the secondary chamber with the atmospheric pressure as the adjustment reference pressure by the diaphragm And a tank-side supply channel that leads from the functional liquid tank to the primary chamber, a head-side supply channel that leads from the secondary chamber to the functional droplet discharge head, and an in-head channel of the functional droplet discharge head. A functional liquid filling method in which a functional liquid is initially filled in a functional liquid supply flow path, the functional liquid suction step for sucking the functional liquid through a cap in close contact with the nozzle surface of the functional liquid droplet ejection head, and the functional liquid suction If the functional liquid is passed through the functional liquid supply channel by After the functional liquid suction stop process and the functional liquid suction stop process, the air suction means opens the flow path in the valve through the auxiliary discharge port connected to the upper end of the secondary chamber while maintaining the sealing state of the nozzle surface. And an air suction step for sucking air.

  Another droplet discharge device of the present invention supplies the functional liquid introduced from the functional liquid tank to the primary chamber to the functional droplet discharge head via the secondary chamber, and on one surface of the secondary chamber. Inside the valve of the pressure regulating valve that adjusts the pressure of the secondary chamber by opening and closing the valve body provided in the communication channel that communicates the primary chamber and the secondary chamber with the atmospheric pressure as the adjustment reference pressure by the provided diaphragm A flow path, a tank-side supply flow path that extends from the functional liquid tank to the primary chamber, a head-side supply flow path that extends from the secondary chamber to the functional liquid droplet ejection head, and a flow path in the head of the functional liquid droplet ejection head; In the liquid droplet ejection apparatus having the functional liquid supply flow path, the functional liquid suction means for sucking the functional liquid through the cap in close contact with the nozzle surface of the functional liquid droplet ejection head and the sealing state of the nozzle surface are maintained. However, air is supplied through an auxiliary outlet connected to the upper end of the secondary chamber. Air suction means for sucking air in the flow path in the valve by the suction means, and the functional liquid suction means stops the functional liquid suction when the functional liquid is passed through the functional liquid supply flow path, and the air suction means Then, after the functional liquid suction is stopped, air suction is performed.

  According to these configurations, when the functional liquid introduced from the functional liquid tank is supplied to the functional liquid droplet ejection head via the pressure regulating valve, the functional liquid supply channel from the functional liquid tank to the functional liquid droplet ejection head When the functional liquid is initially filled, after the functional liquid is sucked, air is sucked through the auxiliary discharge port connected to the upper end of the secondary chamber. The amount of bubbles mixed in the pressure regulating valve can be reduced, and the amount of functional liquid charged into the pressure regulating valve can be increased. That is, when air is not sucked, bubbles may remain in the upper part of the secondary chamber. However, according to the above configuration, the air is sucked after sucking the functional liquid, so The bubbles in the space can be discharged, and the amount of bubbles mixed in the pressure regulating valve can be reduced. Air suction not only reduces the amount of bubbles mixed during initial filling, but also prevents alteration of the functional liquid due to reaction with oxygen and moisture contained in the bubbles. Preferably, it is executed periodically. Moreover, when it is comprised so that detection of the bubble quantity in a pressure regulation valve (especially secondary chamber) is possible, it is preferable to be performed at any time when it exceeds detecting the predetermined bubble quantity.

  In these cases, it is preferable that the tank-side supply channel is continuous from the functional liquid tank to the upper end portion of the primary chamber, and the head-side supply channel is continuous from the lower end portion of the secondary chamber to the functional liquid droplet ejection head.

  According to this configuration, it is possible to gravity-feed the functional liquid from the functional liquid tank to the functional liquid droplet ejection head from the functional liquid tank without using air pressurization or a supply pump, Even if bubbles remaining in the flow path in the valve accompany the flow of air, the bubbles do not flow out directly to the functional liquid droplet ejection head. Discharge failure can be prevented.

  According to another functional liquid filling method of the present invention, the functional liquid introduced into the primary chamber from the functional liquid tank is gravity-supplied to the functional liquid droplet ejection head through the secondary chamber, and is provided on one surface of the secondary chamber. The internal flow of the pressure regulating valve that adjusts the pressure in the secondary chamber by opening and closing the valve body provided in the communication channel that communicates the primary chamber and the secondary chamber with the atmospheric pressure as the adjustment reference pressure by the diaphragm A tank-side supply flow path that is continuous from the path, the functional liquid tank to the upper end of the primary chamber, and has flexibility, and a head side that is continuous from the lower end of the secondary chamber to the functional liquid droplet ejection head and has flexibility A functional liquid filling method for initially filling a functional liquid into a functional liquid supply flow path comprising a supply flow path and an in-head flow path of the functional liquid droplet ejection head, wherein the tank side supply flow path and the head side are The pressure adjustment valve is turned upside down while allowing the supply flow path to bend. Reversing step, functional liquid suction step for sucking the functional liquid through the cap closely attached to the nozzle surface of the functional liquid droplet ejection head, and reversal when the functional liquid is passed through the functional liquid supply channel by the functional liquid suction. And a reversal return step of reversing and returning the pressure regulating valve to the original position by a mechanism.

  Further, another droplet discharge device of the present invention gravity-feeds the functional liquid introduced from the functional liquid tank into the primary chamber to the functional droplet discharge head through the secondary chamber, and also has one surface of the secondary chamber. The valve of the pressure regulating valve that adjusts the pressure in the secondary chamber by opening and closing the valve body provided in the communication channel that communicates the primary chamber and the secondary chamber using the atmospheric pressure as the adjustment reference pressure by the diaphragm provided in An internal flow path, a tank-side supply flow path that is continuous from the functional liquid tank to the upper end portion of the primary chamber and has flexibility, and a flexible liquid droplet discharge head that is continuous from the lower end portion of the secondary chamber and has flexibility. In a droplet discharge device having a functional liquid supply flow path comprising a head side supply flow path and an in-head flow path of the functional liquid drop discharge head, the tank side supply flow path and the head side supply flow path are allowed to bend. While the reversing mechanism that flips the pressure regulating valve upside down and the functional droplet And a functional liquid suction means for sucking the functional liquid through a cap in close contact with the nozzle surface of the ejection head, and the reversing mechanism reverses the pressure adjustment valve upside down prior to the functional liquid passing through the functional liquid suction means. In addition, after the functional liquid is passed through the functional liquid supply channel, the pressure adjustment valve is reversed and returned to the original position.

  According to these configurations, when the functional liquid introduced from the functional liquid tank is gravity-supplied to the functional liquid droplet ejection head via the pressure regulating valve, the pressure is adjusted when the functional liquid is initially filled in the functional liquid supply flow path. Since the functional fluid is sucked in with the valve turned upside down and then the pressure adjustment valve is reversed and returned to its original position, the amount of air bubbles in the pressure adjustment valve is reduced compared to when the pressure adjustment valve is not turned upside down. It is possible to decrease and increase the filling amount of the functional liquid into the pressure regulating valve. In other words, when the functional liquid is sucked (initially filled) in a normal state where the pressure regulating valve is not turned upside down (the functional liquid is introduced from the upper end side and discharged from the lower end side), bubbles are formed in the upper part of the secondary chamber. However, according to the above configuration, since the functional liquid is introduced from the lower end side of the pressure regulating valve and discharged from the upper end side, the functional liquid is discharged to the upper portion of the secondary chamber as the functional liquid is discharged. The remaining bubbles can be easily removed, and as a result, the amount of bubbles mixed in the pressure regulating valve can be reduced. In addition, after passing the functional liquid, the pressure adjustment valve is reversed and returned to its original position, preventing ejection failure of the functional liquid droplet ejection head caused by discharging the functional liquid from the upper end where bubbles are likely to remain. can do. Moreover, since the tank side supply flow path and the head side supply flow path have flexibility, the pressure regulating valve can be turned upside down with both flow paths connected.

  The method of manufacturing an electro-optical device according to the present invention uses the droplet discharge device according to any one of the above, and discharges the functional liquid while moving the functional droplet discharge head relative to the workpiece. A film forming portion is formed by functional droplets.

  In addition, an electro-optical device according to the present invention uses any one of the above-described liquid droplet ejection apparatuses, and ejects a functional liquid while moving the functional liquid droplet ejection head relative to the work, thereby allowing the electro-optical device to be applied onto the work. It is characterized in that a film forming part is formed by functional droplets.

  According to these configurations, at the time of initial filling of the functional liquid, it is possible to effectively discharge the air bubbles mixed in the pressure regulating valve, so it is possible to discharge a stable functional liquid from the functional liquid droplet discharge head, As a result, a high-quality electro-optical device can be manufactured. The electro-optical device (device) includes a liquid crystal display device, an organic EL (Electro-Luminescence) device, an electron emission device, a PDP (Plasma Display Panel) device, an electrophoretic display device, and the like. The electron emission device is a concept including a so-called FED (Field Emission Display) device or SED (Surface-Conduction Electron-Emitter Display) device. Further, the electro-optical device includes a device for forming a metal wiring, a lens, a resist, and a light diffuser.

  An electronic apparatus according to the present invention includes the above-described electro-optical device.

  According to this configuration, since the bubbles mixed in the pressure regulating valve can be effectively discharged during the initial filling of the functional liquid, it is possible to discharge a stable functional liquid from the functional liquid droplet ejection head, and consequently High quality electronic equipment can be manufactured. Note that electronic devices include various electric products in addition to mobile phones and personal computers equipped with so-called flat panel displays.

  As described above, according to the functional liquid filling method and the droplet discharge device of the present invention, when the functional liquid is initially filled in the functional liquid supply flow path, the initial filling is performed only by the functional liquid suction operation. Thus, bubbles remaining in the upper part of the secondary chamber can be efficiently discharged, and as a result, the filling amount of the functional liquid in the pressure regulating valve can be increased. In addition, since the electro-optical device manufacturing method, the electro-optical device, and the electronic apparatus of the present invention are manufactured using the above-described droplet discharge device, they are manufactured efficiently with a high yield.

  Hereinafter, a droplet discharge device to which the present invention is applied will be described with reference to the accompanying drawings. This droplet discharge device is incorporated in a so-called flat display production line, and emits light that becomes a color filter of a liquid crystal display device or each pixel of an organic EL device by a droplet discharge method using a functional droplet discharge head. An element or the like is formed.

  FIG. 1 is a schematic plan view of the droplet discharge device 1, and FIG. 2 is a schematic side view of the droplet discharge device 1. As shown in both figures, the droplet discharge device 1 includes a machine base 2 and a functional liquid droplet discharge head 71, and a drawing unit 3 widely placed on the entire area of the machine base 2 and a drawing unit 3. The head maintenance means 4 placed on the machine base 2 to be attached, the functional liquid supply mechanism 6 for supplying the functional liquid in which the functional material is dissolved in the functional liquid droplet ejection head 71, and the control connected thereto. Means 16. The droplet discharge device 1 controls the entire apparatus by the control unit 16, supplies the functional liquid to the functional droplet discharge head 71 using the drawing unit 3, and draws the functional droplet on the workpiece W. In addition, the head maintenance means 4 is used to appropriately perform a function recovery process (maintenance) of the drawing means 3 (functional liquid droplet ejection head 71).

  The functional liquid supply mechanism 6 includes a functional liquid tank 62 that supplies the functional liquid, a pressure adjustment valve 61 that has a self-sealing function, and that adjusts the pressure of the functional liquid supplied to the functional liquid droplet ejection head 71, and a pressure adjustment. A pressing means 7 for pressing a diaphragm 221 (see FIG. 8A) provided in the valve 61; a tank side tube 81 having an upstream end connected to the functional liquid tank 62 and a downstream end connected to the pressure regulating valve 61; , And a head side tube 82 having an upstream end connected to the pressure regulating valve 61 and a downstream end connected to the functional liquid droplet ejection head 71. The pressing means 7 forcibly deforms the diaphragm 221 of the pressure regulating valve 61 during the initial filling of the functional liquid, thereby discharging the air in the secondary chamber 210 to which the diaphragm 221 is attached. This will be described later in detail.

  The drawing unit 3 moves to the Y-axis table 22 and the X / Y movement mechanism 11 including the X-axis table 21 for moving the workpiece W in the main scanning (moving in the X-axis direction) and the Y-axis table 22 orthogonal to the X-axis table 21. And a main carriage 12 on which a functional liquid tank 62 is mounted.

  The X-axis table 21 has an X-axis slider 31 driven by an X-axis motor 23 that constitutes a drive system in the X-axis direction. Configured. Similarly, the Y-axis table 22 has a Y-axis slider 41 driven by a Y-axis motor 24 that constitutes a drive system in the Y-axis direction. It is configured so that it can be moved freely.

  The X-axis table 21 is disposed parallel to the head maintenance means 4 in the X-axis direction and is directly supported on the machine base 2. On the other hand, the Y-axis table 22 is supported by left and right support columns 51 erected on the machine base 2 and extends in the Y-axis direction so as to straddle the X-axis table 21 and the head maintenance means 4 (see FIG. 1). In the droplet discharge device 1, the area where the Y axis table 22 and the X axis table 21 intersect is the drawing area 52 where the workpiece W is drawn, and the area where the Y axis table 22 and the head maintenance means 4 intersect performs the function recovery process. The Y-axis table 22 is a maintenance area 53, and the Y-axis table 22 is placed in the drawing area 52 when drawing on the work W, and in the maintenance area 53 when performing functional recovery processing or initial filling of functional liquid. The discharge head 71 is allowed to face.

  As shown in FIG. 2, the main carriage 12 includes a bridge plate 15 that extends between the Y-axis tables 21, a hanging member 16 that is suspended from the bridge plate 15, and a head unit that is supported by the lower end of the hanging member 16. 70, and a θ rotation mechanism 42 interposed between the hanging member 16 and the head unit 70. The head unit 70 includes the head plate 13 and a functional liquid droplet ejection head 71 attached to the head plate 13.

  On the head plate 13, a pressure adjustment valve 61 that supplies a functional liquid to the functional liquid droplet ejection head 71 and a pressing unit 7 that presses the diaphragm 221 of the pressure adjustment valve 61 are mounted. As shown in the figure, the pressure regulating valve 61 and the functional liquid droplet ejection head 71 are disposed so as to be displaced in the height direction, and the functional liquid naturally flows through the head side tube 82. ing. Further, the functional liquid naturally flows from the functional liquid tank 62 mounted on the main carriage 12 through the tank side tube 81 to the pressure adjusting valve 61. That is, the inflow port 212 for introducing the functional liquid into the pressure regulating valve 61 is formed on the upper end side of the pressure regulating valve 61, and the outflow port 227 for discharging the functional liquid is formed on the lower end side of the pressure regulating valve 61. The functional liquid is gravity-supplied from the functional liquid tank 62 to the pressure regulating valve 61 and from the pressure regulating valve 61 to the functional liquid droplet ejection head 71 (see FIG. 6).

  As shown in FIG. 3, the functional liquid droplet ejection head 71 is a so-called double series, a functional liquid introduction unit 72 having two series of connecting needles 73, and a dual head substrate connected to the functional liquid introduction unit 72. 74 and a head main body 75 which is connected to the lower side (upper side in the drawing) of the functional liquid introduction portion 72 and has an in-head flow path filled with the functional liquid therein. The connection needle 73 is connected to the functional liquid supply mechanism 6 (pressure adjustment valve 61) via the head side tube 82, and supplies the functional liquid supplied from the pressure adjustment valve 61 to the functional liquid introduction unit 72. The head main body 75 includes a cavity 76 (piezoelectric piezoelectric element) and a SUS nozzle plate 77 constituting a nozzle surface 78. A large number (180) of discharge nozzles 79 constituting two nozzle rows are opened on the nozzle surface 78. The functional liquid droplet ejection head 71 ejects the functional liquid from the ejection nozzle 79 by the pump action of the cavity 76 while receiving the supply of the functional liquid from the connection needle 73.

  As shown in FIG. 1, the head maintenance unit 4 includes a moving table 91 placed on the machine base 2, and a suction unit 92 and a wiping unit 93 placed on the moving table 91. The moving table 91 is configured to be movable in the X-axis direction, and when the functional liquid droplet ejection head 71 is maintained, the suction unit 92 and the wiping unit 93 are appropriately moved to the maintenance area 53. As the head maintenance means 4, in addition to the above units, a discharge inspection unit for inspecting the flight state of the functional liquid droplets discharged from the functional liquid droplet discharge head 71 and functions discharged from the functional liquid droplet discharge head 71. It is preferable to mount a weight measuring unit or the like for measuring the weight of the droplet.

  The suction unit 92 is supported by the cap stand 101, the cap 102 that is supported by the cap stand 101 and in close contact with the nozzle surface 78 of the functional liquid droplet ejection head 71, and the suction that sucks the functional liquid droplet ejection head 71 through the cap 102. A pump 103 and a suction tube 107 that connects the cap 102 and the suction pump 103 are provided (see FIG. 4). The cap stand 101 incorporates a cap lifting mechanism 104 (see FIG. 4) that lifts and lowers the cap 102 by driving a motor so that the cap 102 can be attached to and detached from the head unit 70 facing the maintenance area 53. It has become.

  Then, the functional liquid droplet ejection head 71 is aspirated during maintenance of the functional liquid droplet ejection head 71 or when the functional liquid is initially filled into the functional liquid supply flow path (the flow path connecting from the functional liquid tank 62 to the functional liquid droplet ejection head 71) When performing the above, the cap lifting mechanism 104 is driven to bring the cap 102 into close contact with the nozzle surface 78 of the functional liquid droplet ejection head 71 and the suction pump 103 is driven. Thereby, a suction force can be applied to the functional liquid droplet ejection head 71 via the cap 102, and the functional liquid is forcibly discharged from the functional liquid droplet ejection head 71. Although not shown, in order to detect an air leak in addition to a liquid detection sensor for detecting the presence or absence of a functional liquid passing through the suction tube on the downstream side (suction pump 103 side) of the cap 102 of the suction tube, A suction pressure detection sensor for detecting the suction pressure of the cap 102 is provided.

  The cap 102 has a function of a flushing box that receives the functional liquid ejected by the discarding (preliminary ejection) of the functional liquid droplet ejection head 71. It is designed to receive a functional fluid for periodic flushing that is performed when the operation is temporarily stopped. In this flushing operation, the cap lifting mechanism 104 moves the cap 102 to a position where the cap 102 (the upper surface thereof) is slightly separated from the nozzle surface 78 of the functional liquid droplet ejection head 71.

  The suction unit 92 is also used for storing the functional liquid droplet ejection head 71 when the liquid droplet ejection apparatus 1 is not in operation. In this case, the functional liquid droplet ejection head 71 faces the maintenance area 53, and the cap 102 is brought into close contact with the nozzle surface 78 of the functional liquid droplet ejection head 71. As a result, the nozzle surface 78 is sealed, the functional liquid droplet ejection head 71 (ejection nozzle 84) is prevented from drying, and the nozzle clogging of the ejection nozzle 84 can be prevented.

  On the other hand, the wiping unit 93 is for wiping the nozzle surface 78 of the functional liquid droplet discharge head 71 with the wiping sheet 111. The wiping sheet 111 wound in a roll shape is mounted and fed out. The wiping sheet 111 has a winding unit 112 that winds up, a wiping unit 113 that wipes the nozzle surface 78 with the fed wiping sheet 111, and a cleaning liquid nozzle (not shown) that sprays the cleaning liquid. And a cleaning liquid supply unit 114 for spraying the cleaning liquid.

  When the wiping operation is performed, first, the XY movement mechanism 11 (Y-axis table 22) is driven to move the functional liquid droplet ejection head 71 (subcarriage 13) to the maintenance area 53. Since the normal wiping operation is performed following the suction operation by the suction unit 92, the moving operation of the functional liquid droplet ejection head 71 to the maintenance area 53 can be omitted. Next, the winding unit 112 and the cleaning liquid supply unit 114 are activated to spray the cleaning liquid onto the wiping sheet 111 from the cleaning liquid nozzle. Then, while continuing to spray the cleaning liquid, the cleaning liquid-impregnated portion of the wiping sheet 111 is sent to the wiping unit 113 side, and the wiping sheet 111 is wound up by the winding unit 112.

  At this time, while continuing the spraying of the cleaning liquid and the feeding of the wiping sheet 111, the roller lifting mechanism (not shown) is driven to raise the wiping unit 113 to a predetermined height, and the moving table 91 is driven to perform wiping. The unit 93 is moved toward the maintenance area 53. Accordingly, the wiping unit 93 passes the maintenance area 53 while bringing the wiping sheet 111 (impregnated with the cleaning liquid) into contact with the nozzle surface 78 of the functional liquid droplet ejection head 71 and adheres to the nozzle surface 78 with the wiping sheet 111. Wipe off dirt.

  When the wiping unit 93 passes through the maintenance area 53, the spraying of the cleaning liquid and the driving of the moving table 91 are stopped, and the driving of the winding unit 112 is stopped to stop the feeding of the wiping sheet 111. And a roller raising / lowering mechanism is driven, the wiping unit 113 is lowered | hung, and wiping operation | movement is complete | finished.

  Next, details of the functional liquid supply mechanism 6 will be described. As shown in FIGS. 1, 2, and 4, the functional liquid supply mechanism 6 presses a functional liquid tank 62 that stores the functional liquid, a pressure adjustment valve 61, and a diaphragm 221 provided in the pressure adjustment valve 61. The pressing means 7, a tank side tube 81 that connects the functional liquid tank 62 and the pressure adjustment valve 61, and a head side tube 82 that connects the pressure adjustment valve 61 and the functional liquid droplet ejection head 71. . In addition, a tank-side supply flow path 81r connected from the functional liquid tank 62 to the pressure adjustment valve 61, a valve internal flow path 61r in the pressure adjustment valve 61, and a head-side supply connected from the pressure adjustment valve 61 to the functional liquid droplet ejection head 71. The functional liquid supply flow path from the functional liquid tank 62 to the functional liquid droplet ejection head 71 is configured by the flow path 82 r and the in-head flow path 71 r of the functional liquid droplet ejection head 71.

  As shown in FIG. 2, the functional liquid tank 62 is installed in the main carriage 12 via the bridge plate 15, and has a functional liquid pack 63 accommodated in a resin case 62a. As shown in FIG. 5, the functional liquid pack 63 is made of, for example, an aluminum vapor-deposited film, and is made of a flexible bag-like pack body 64 and a resin material having a predetermined strength, and is provided at one end of the pack body. And a functional liquid supply port 65. The functional liquid supply port 65 is configured by an attachment hole 66 attached to the pack body 64 and a flange part 67 formed integrally with the attachment hole 66, and the flange part 67 communicates with the pack body at the center. A circular opening 68 serving as a functional liquid outlet is formed. The opening 68 is formed with an elastic connecting portion 69 made of butyl rubber for removably receiving a hollow needle (not shown) attached to the upstream end of the tank side tube 81, and the hollow needle is connected to the elastic connecting portion 69. By being inserted, the functional liquid tank 62 (functional liquid pack 63) and the pressure regulating valve 61 are communicated with each other via the tank side tube 81.

  The functional liquid tank 62 is filled with a functional liquid that has been sufficiently deaerated during the manufacturing process in an airtight state in which air is discharged, resulting in a decrease in discharge performance due to oxygen remaining or dissolved in the functional liquid, This prevents problems such as quality change and cracking in the drying process.

  The tank side tube 81 and the head side tube 82 have flexibility, and the upstream end of the tank side tube 81 has the hollow needle (connecting needle) in which a flow path is formed in the axial center, On the downstream side, a tank side valve 85 (see FIG. 4) that restricts the supply of the functional liquid to the pressure regulating valve 61 is interposed. Further, on the downstream side of the head side tube 82, there is an elastic connection part (not shown) into which a connection needle 73 (see FIG. 3) formed on the functional liquid droplet ejection head 71 is inserted.

  The tubes used for the tank-side tube 81 and the head-side tube 82 have gas barrier properties such as an inner layer made of ethylene vinyl alcohol having a low gas permeability and an exterior made of polyethylene having a high waterproof property. It is preferable to use a material having excellent waterproofness. Thereby, oxygen, moisture, etc. in the atmosphere can be prevented from reacting with the functional liquid flowing through the tube through the tube.

  As shown in FIGS. 6 to 8, the pressure regulating valve 61 includes a primary chamber 210 connected to the functional liquid tank, a secondary chamber 220 connected to the functional liquid droplet ejection head, the primary chambers 2 and 2 in the valve housing 200. A communication channel 230 that communicates with the next chamber is formed. A diaphragm 221 is provided on one surface of the secondary chamber 220 so as to face the outside, and the communication channel 230 is opened and closed by the diaphragm 221. A valve body 231 is provided. The functional liquid introduced from the functional liquid tank into the primary chamber 210 is supplied to the functional liquid droplet ejection head via the secondary chamber 220. At this time, the diaphragm 221 communicates with the atmospheric pressure as an adjustment reference pressure. The pressure of the secondary chamber 220 is adjusted by opening and closing the valve body 231 provided in the passage 230.

  Since the pressure regulating valve 61 is used in a vertical position as shown in FIG. 8, the front side of the paper is “up”, the front side is “down”, the left side is “front” and the right side. Let's proceed with the explanation as “after”. These drawings shown in FIGS. 6 to 8 are an attachment plate 290 for attaching the pressure adjusting valve to a frame or the like, an inflow connector 292 (union joint) for connecting the tank side tube 81, and The state which incorporated the outflow connector 293 (union joint) for connecting said head side tube 82 is shown.

  The valve housing 200 includes a primary chamber housing 201 having a primary chamber 210 formed therein, a secondary chamber housing 201 having a secondary chamber 220 formed therein, and a ring plate for fixing the diaphragm 221 to the secondary chamber housing 201. 203, all of which are made of a corrosion resistant material such as stainless steel. The primary chamber housing 201, the secondary chamber housing 202, and the ring plate 203 are positioned with respect to the secondary chamber housing 202 by overlapping the ring plate 203 and the primary chamber housing 201 from the front and the back with a plurality of stepped parallel pins or the like. After that, they are assembled so as to be screwed, and all have an appearance that is concentric with an axis passing through the center of the circular diaphragm 221. The primary chamber housing 201 and the secondary chamber housing 202 are water-tightly butt-joined with each other via an O-ring 261, and the secondary chamber housing 202 and the ring plate 203 sandwich the edge of the diaphragm 221 and the packing 262. They are butt-joined in an airtight manner. In addition, the primary chamber housing 201 and the secondary chamber housing 202 can be formed integrally.

  The primary chamber housing 201 is formed with a truncated cone (substantially cylindrical) primary chamber 210 concentric with the diaphragm 221, and the inner peripheral wall of the primary chamber 210 is a taper that slightly expands toward the rear. It is a surface. Further, an inflow port 212 and a primary chamber air vent port 213 connected to the functional liquid tank 62 are formed in the upper boss portion 211 formed at the upper back of the primary chamber housing 201. The primary chamber air vent port 213 extends in the vertical direction, and the primary chamber air vent port (primary chamber auxiliary discharge port) 213a opened to the primary chamber 210 is a primary chamber 210 serving as an air reservoir. It opens to the top of the rear inner peripheral surface. In addition, a mechlet lid 213b is screwed into the illustrated primary chamber air vent port 213, but when an air tube is connected, a connector (joint) is screwed in place of the mekaku lid 213b. It will be.

  The inflow port 212 includes an inflow port 215 that opens to the outer peripheral surface of the primary chamber housing 201, a primary chamber side opening 216 that opens to the upper end of the primary chamber 210, and an inflow channel 217 that communicates these. The inflow channel 217 is formed obliquely in the circumferential direction so as to have a predetermined downward gradient. An inflow connector 292 is screwed into the inflow port 215 from the axial direction of the inflow channel 217, and the tank side tube 65 is connected to the inflow port 215 through the inflow connector 292. The inside of the inflow channel 217 is formed so as to expand at the upper end, so that no step is generated in the internal channel and the flow rate of the functional liquid is not greatly changed. The primary chamber side opening 216 opens to a position adjacent to the primary chamber air vent 213a, that is, a position away from the top of the primary chamber 210 in the circumferential direction. The functional liquid flowing in from the functional liquid tank flows down obliquely according to the gradient of the inflow passage 217 and flows into the primary chamber 210 from the primary chamber side opening 216 along the inner peripheral wall of the primary chamber 210.

  A first annular groove 219 having a wedge-shaped cross section is formed outside the primary chamber 210 on the front surface of the primary chamber housing 201 in close contact with the secondary chamber housing 202, and the first annular groove 219 has the above-described shape. An O-ring 261 is inserted. Further, the lower portion of the primary chamber housing 201 is cut out in an arcuate shape, and an outflow connector 293 described later is disposed in the missing portion.

  The secondary chamber housing 202 has a truncated cone (substantially cylindrical) -shaped main chamber 223 with an open front surface for mounting the diaphragm 221 and a truncated cone (substantially cylindrical) that is connected to the rear of the main chamber and expands toward the main chamber. ) -Shaped spring chamber 224 and the above-described communication channel 230 that connects the spring chamber 224 and the primary chamber 210, and the main chamber 223, the spring chamber 224, and the communication channel 230 are all diaphragms. 221 has a circular cross section concentric with 221. However, the communication flow path 230 includes a circular cross-section shaft insertion portion 233 in which a shaft portion 232 of a valve body 231 described later is slidably received, and a cross-shaped cross-section flow extending from the shaft free insertion portion 233 in the four radial directions. And a road portion 234. In addition, an annular shallow groove 247 that faces a fixing groove for a packing 262 described later is formed on the front surface of the secondary chamber housing 202.

  The inner peripheral wall of the main chamber 223 has a tapered surface that greatly expands forward so as to follow the negative deformation of the diaphragm 221, and the secondary chamber air vent port 226 and the outflow port 227 face the tapered surface. Are formed vertically. The secondary chamber air vent port 226 is formed on a vertical boss portion 228 formed on the upper rear surface (upper rear surface) of the secondary chamber housing 202 and extends slightly inclined in the vertical direction. The secondary chamber air vent port (secondary chamber auxiliary discharge port) 226a of the secondary chamber air vent port 226 opened to the secondary chamber 220 includes a tapered surface of the front inner peripheral surface of the secondary chamber 220 serving as an air reservoir. Open to the top. Also in this case, the mecha lid 226b is screwed into the illustrated secondary chamber air vent port 226, but when an air tube is connected, a connector (joint) is screwed in place of this mecha lid 226b. Will be.

  The outflow port 227 is formed in an inclined boss portion 229 located at the lower back of the secondary chamber housing 202, and is formed at the outlet 240 opened at the lower back of the secondary chamber housing 202 and at the lower end of the secondary chamber 220. The secondary chamber side opening 241 that is opened and an outflow channel 242 that communicates these are configured. The outflow channel 242 is formed obliquely in the front-rear direction so as to have a predetermined downward slope substantially orthogonal to the tapered surface. The outflow port 240 is screwed with an outflow connector 293 from the axial direction of the outflow channel 242, and the head side tube 66 is connected through the outflow connector 293. The outflow channel 242 is formed so as to expand at the upper end, so that a step portion does not occur in the internal channel and a large change in the flow rate of the functional liquid does not occur. The secondary chamber side opening 241 opens to the full width of the slope with respect to the tapered surface including the valley portion of the secondary chamber 220. The functional liquid flowing out from the secondary chamber 220 flows obliquely from the secondary chamber side opening 241 according to the gradient of the outflow channel, and flows out to the functional liquid droplet ejection head 71 side.

  The ring plate 203 sandwiches and fixes the diaphragm 221 between the front surface of the secondary chamber housing 202, and a fixing groove 231 for the packing 262 that contacts the edge of the diaphragm 221 on the inner surface of the secondary chamber 220 side. Is formed. Since the packing 262 itself has elasticity, the fixing groove 231 is not necessarily formed.

  The diaphragm 221 includes a diaphragm main body 271 formed of a resin film, and a resin pressure receiving plate 272 attached to the inside of the diaphragm main body 271. The pressure receiving plate 272 is formed in a disk shape concentric with the diaphragm main body 271 and has a sufficiently small diameter with respect to the membrane main body, and a shaft portion 232 of a valve body 231 described later contacts the center thereof. The diaphragm main body 271 is formed by stacking heat-resistant PP (polypropylene), special PP, and PET (polyethylene terephthalate) on which silica is vapor-deposited, and is formed in a circular shape having the same diameter as the front surface of the secondary chamber housing 202. . The diaphragm 221 is airtightly fixed to the front surface of the secondary chamber housing 202 by a ring plate 203 together with a packing 262 attached to the diaphragm 221 from the outside. The pressure receiving plate 272 may be provided on the outer side of the diaphragm 221, but since a shaft portion 232 of a valve body 231 to be described later repeats separation and connection, the pressure receiving plate 272 is provided on the inner side in the present embodiment in order to prevent damage to the diaphragm 221. ing.

  The valve body 231 includes a disc-shaped valve body main body 231a, a shaft portion 232 extending in one direction so as to form a transverse “T” shape from the center of the valve body main body 231a, and a shaft portion side of the valve body main body 231a. And an annular valve seal 236 provided (adhered) on the (front surface). The valve body 231a and the shaft portion 232 are integrally formed of a corrosion-resistant material such as stainless steel, and an annular small protrusion 237 is formed on the front surface of the valve body 231a so as to be located outside the shaft portion 232. Yes. The valve seal 236 is made of, for example, soft silicon rubber, and a seal protrusion 236a that is an annular protrusion is protruded from the front surface of the valve seal 236 corresponding to the small protrusion 237. For this reason, when the valve element 231 is opened, the seal protrusion 236a strongly contacts the back surface of the secondary chamber valve housing 202 serving as a valve seat, that is, the opening edge of the communication channel 230, so that the communication channel 230 becomes the primary chamber. Clogged liquid-tight from the side.

  The shaft portion 232 is slidably fitted in the communication flow path 230, and abuts against the pressure receiving plate 272 of the diaphragm 221 whose tip (front end) is in a neutral position in the valve-closed state. That is, when the diaphragm 221 bulges outward, a predetermined gap is generated between the front end of the shaft portion 232 and the pressure receiving plate 272. From this state, the diaphragm 221 is deformed to the minus side. Then, when the front end of the shaft portion 232 and the pressure receiving plate 272 come into contact with each other in a neutral state parallel to the ring plate 203, and when the diaphragm 221 is further deformed negatively, the pressure receiving plate 272 passes through the shaft portion 232 to the valve body. The main body 231a is pushed and opened. Therefore, of the volume of the secondary chamber 220, the functional fluid is supplied without receiving any pressure on the side of the primary chamber 210 for the volume of the diaphragm 221 that becomes neutral from the plus deformation.

  On the other hand, a valve body urging spring 281 that urges the valve body 231 in the secondary chamber 220 side, that is, in the valve closing direction is interposed between the back surface of the valve body 231 and the rear wall of the primary chamber 210. Yes. Similarly, a pressure receiving plate urging spring 282 is provided between the pressure receiving plate 272 and the spring chamber 224 of the secondary chamber 220 to urge the diaphragm main body 271 toward the outside via the pressure receiving plate 272. In this case, the valve body biasing spring 281 complements the head of the functional liquid tank 62 applied to the back surface of the valve body 231, and the hydraulic force of the functional liquid tank 62 and the spring force of the valve body biasing spring 281 The valve body 231 is pressed in the closing direction. On the other hand, the pressure receiving plate biasing spring 282 complements the positive deformation of the diaphragm 221 and acts so that the secondary chamber 220 is slightly negative with respect to the atmospheric pressure.

  As will be described in detail later, the pressure regulating valve 61 opens and closes by the valve body 231 moving forward and backward due to the atmospheric pressure and the secondary chamber 220 connected to the functional liquid droplet ejection head 71 and the pressure balance. At that time, force acts on the valve body urging spring 281 and the pressure receiving plate urging spring 282 in a distributed manner, and the valve body 231 is opened and closed very slowly by the valve seal 236 (elastic force thereof) of soft silicone rubber. For this reason, pressure fluctuation (cavitation) due to opening and closing of the valve body 231 is suppressed, and the ejection drive of the functional liquid droplet ejection head 71 is not affected. Of course, the pulsation generated on the functional liquid tank 62 side (primary chamber 210 side) is also edged by the valve body 231 and can be absorbed (damper function).

  As shown in FIGS. 6 and 7, the mounting plate 290 is made of a stainless steel plate and is fixed to the rear side surface of the secondary chamber housing 202. On both surfaces of the mounting plate 290, a linear mark 295 indicating the center position of the diaphragm 221 is engraved at the upper and lower intermediate positions. Is used as an index for installation with a certain height difference. Reference numeral 296 in the drawing is a long hole for aligning the mark 295 of the mounting plate 290 and the center position of the diaphragm 221. The mounting plate 290 is fixed to the valve housing 200 after this alignment. Is done.

  Next, the operating principle of the pressure regulating valve will be described with reference to FIG. The primary chamber 210 includes a head based on the level of the functional liquid stored in the functional liquid tank 62 (in terms of design, the central axis of the functional liquid supply port 65 (see FIG. 5) of the functional liquid pack 63 and the primary chamber 210. The pressure based on the water head and the spring force of the valve body urging spring 281 act as the valve closing force of the valve body 231.

That is, when the pressure per unit area based on the water head is P1, the area of the back surface of the valve body 231a is S1, and the spring force of the valve body biasing spring 281 is W1, the valve body 231 from the primary chamber side. The force F1 acting on
F1 = W1 + (P1 × S1)
It becomes. Note that W1 is a value that takes into account the elastic force of the valve seal 236. Here, the total of the spring force and the elastic force (biasing force) of the valve seal 236 is W1.

On the other hand, the force F2 acting on the valve body 231 from the secondary chamber 220 side is set to P2 as the internal pressure of the secondary chamber 220, S2 as the center diameter area of the diaphragm 221, and W2 as the spring force of the pressure receiving plate biasing spring 282. When
F2 = (P2 × S2) −W2
It becomes. P1 and P2 are gauge pressures. The center diameter D of the diaphragm 221 is an average diameter of the outer diameter of the diaphragm main body 271 and the outer diameter of the pressure receiving plate 272, and is represented by S2 = (D / 2) × (D / 2) × π.

  The valve body 231 performs a valve opening operation in a state of F2> F1, and performs a valve closing operation in a state of F1> F2. In this embodiment, W1 and W2 are determined experimentally, and S1 is set based on W1. Then, according to the above relationship, the center diameter D of the diaphragm 221 is further obtained so that the valve body 231 opens and closes using substantially atmospheric pressure as a reference adjustment pressure, and the outer diameter of the diaphragm main body 271 and the outer diameter of the pressure receiving plate 272 are set. It is like that.

  That is, when the functional liquid is consumed (discharged) by the functional liquid droplet ejection head 71 from the state in which the diaphragm 221 is positively deformed, the secondary chamber 220 becomes negative pressure, and the diaphragm 221 is pushed to the atmospheric pressure to be neutral. Move to negative deformation. As a result, the valve body 231 is pushed through the pressure receiving plate 272 and slowly opens. When the valve body 231 is opened, the functional liquid flows from the primary chamber 210 into the secondary chamber 220 through the communication channel 230. As a result, the pressure in the secondary chamber 220 increases, and the valve body 231 is slowly closed. Then, even after the valve body 231 is closed, the pressure receiving plate biasing spring 282 acts against the atmospheric pressure, and the diaphragm 221 is positively deformed, and the functional fluid pressure in the secondary chamber 220 is slightly negative. Let me. Then, by repeating the above operation slowly, the functional liquid is supplied while the secondary chamber 220 is maintained at a substantially constant pressure.

  Similarly, in the initial filling of the functional liquid, the above-described operation is performed by forcibly sucking the functional liquid from the functional liquid droplet ejection head 71 side by the suction unit 92, and the functional liquid is filled in the in-valve channel 61r. The pressure of the functional liquid in the secondary chamber 220 is maintained at a pressure lower than the atmospheric pressure by the pressure receiving plate urging spring 282. For this reason, by setting the height difference between the position of the functional liquid droplet ejection head 71 (nozzle surface 78) and the position of the pressure adjustment valve 61 (center of the diaphragm 221) to a constant value, the functional liquid droplet ejection head 71 is set. Liquid dripping from is prevented.

  As described above, the pressure regulating valve 61 of the present embodiment has a structure in which the valve body 231 is opened and closed using the atmospheric pressure as an adjustment reference pressure. The functional liquid can be supplied to the functional liquid droplet ejection head 71. That is, the functional liquid can be stably supplied to the functional liquid droplet ejection head 71 without being affected by the head of the functional liquid tank 62.

  The inflow port 212 connected to the tank side supply flow path 81r is connected to the upper end of the primary chamber 210, and the outflow port 227 connected to the head side supply flow path 82r is connected to the lower end of the secondary chamber 220. Therefore, the functional liquid can be gravity-supplied from the functional liquid tank 62 to the pressure adjusting valve 61 and from the pressure adjusting valve 61 to the functional liquid droplet ejection head 71 without using air pressurization or a supply pump. Even if the bubbles remaining in the in-valve channel 61r with the flow of the functional liquid accumulate on the upper part of the pressure regulating valve 61, the bubbles do not directly flow out to the functional liquid droplet ejection head 71. The ejection failure of the functional liquid droplet ejection head 71 can be prevented.

  As shown in FIG. 4, the pressing means 7 is constituted by a return air cylinder 93, and a cylinder body 94 composed of a drive chamber 94a and a cylinder chamber 94b, and a piston 95 slidably provided in the cylinder chamber 94b. And a pressing member 96 that is attached to the tip of the piston 95 and presses the diaphragm 221 of the pressure regulating valve. When the compressed air is introduced from the first air suction port 97, the pressing means 7 advances the piston 95 and presses the diaphragm 221 to deform the diaphragm 221 negatively. In addition, when compressed air flows in from the second air suction port 98, the piston 95 moves backward, and the pressing of the diaphragm 221 is released. The pressing means 7 can stop the forward or backward movement of the piston 95 by stopping the flow of compressed air into the first air suction port 97 and the second air suction port 98.

  Next, the control configuration of the droplet discharge device 1 will be described. As shown in the control block diagram of FIG. 9, the droplet discharge device 1 moves the functional droplet discharge head 71 relative to the workpiece W by the XY movement mechanism 11 including the X-axis motor 23 and the Y-axis motor 24. , Wiping comprising a drawing unit (drawing means) 3 for drawing on the workpiece W, a suction table 92 comprising a moving table 91, a cap lifting mechanism 104 and a suction pump 103, a winding unit 112 and a wiping unit 113. A head maintenance unit (head maintenance means) 4 that performs maintenance of the functional liquid droplet ejection head 71 by moving the suction unit 92 and the wiping unit 93 to the maintenance area 53 by the moving table 91; A diaphragm 22 having an air cylinder 93 and provided on the secondary chamber 220 side of the pressure regulating valve 61. A pressure adjusting valve pressing portion (pressing means) 7 that presses to deform negatively, a head driver 151, an X / Y axis movement control driver 152, a movement table control driver 153, a suction unit control driver 154, a wiping unit control driver 155, The air cylinder drive control driver 156 has a functional liquid droplet ejection head 71, an XY movement mechanism 11, a movement table 91, a suction unit 92, a wiping unit 93, and a drive unit (drive means for driving the return air cylinder 93). ) 15 and a control unit (control means) 16 that is connected to each of the above-described units and controls the entire droplet discharge device 1.

  The control unit 16 includes a CPU 161, a ROM 162, a RAM 163, and an input / output control device (hereinafter referred to as “IOC: Input Output Controller”) 164, which are connected to each other via an internal bus 165. The ROM 162 stores a control program block 162a for storing various programs to be processed by the CPU 161 such as a control program for an initial filling process of functional liquid in addition to a program for driving and controlling ejection of each nozzle 79, and a functional liquid type in the suction unit 92. And a control data block 162b for storing control data including various tables such as different suction times. The RAM 163 has a data block 163b for storing discharge pattern data of each nozzle 79 in addition to a work area block 163a used as a flag and the like, and is used as a work area for control processing.

  In the IOC 164, a logic circuit that complements the function of the CPU 161 and handles interface signals with various peripheral circuits is configured and configured by a gate array, a custom LSI, or the like. As a result, the IOC 164 captures the ejection pattern data and control data as they are or processes them into the internal bus 165, and in conjunction with the CPU 161, processes the data and control signals output from the CPU 161 to the internal bus 165 as they are. To the drive unit 15.

  Then, according to the control program in the ROM 162, the CPU 161 inputs various signals and data from each unit in the droplet discharge device 1 via the IOC 164 according to the control program in the ROM 162, and processes various data in the RAM 230. In addition, by outputting various signals and data to each part in the droplet discharge device 1 via the IOC 164, the functional liquid discharge timing from each nozzle 79 is driven and controlled, and drawing is performed on the workpiece W. The maintenance of the functional liquid droplet ejection head 71 and the initial filling process of the functional liquid are performed. Alternatively, the ejection pattern data and control data may be generated (stored) by an external device (host computer) (not shown), and the drive control of each unit may be performed by receiving the generated data. Further, a storage medium (such as a CD-ROM) storing various processing programs and processing data may be configured to be readable.

  Next, the functional liquid initial filling method to the functional liquid supply channel according to the embodiment of the present invention will be described with reference to the schematic diagram of FIG. 4 and the flowchart of FIG. As shown in FIG. 4, the functional liquid supply flow path includes a tank-side supply flow path 81 r that extends from the functional liquid tank 62 to the primary chamber 210 of the pressure adjustment valve 61, and an in-valve flow path 61 r in the pressure adjustment valve 61. The pressure regulating valve 61 is composed of a head-side supply flow path 82r connected from the secondary chamber 220 to the functional liquid droplet ejection head 71, and an in-head flow path 71r in the functional liquid droplet ejection head 71. Only the mechanism related to the functional liquid initial filling process into the functional liquid supply flow path is illustrated.

  Here, the processing flow of the functional liquid initial filling will be described based on the flowchart of FIG. When an initial filling command is issued from the control means 16, the tank side valve 85 is first closed (S11), and suction by the suction unit 92 is started (S12). When the suction by the suction unit 92 is started, the piston 95 is pressed in the direction of arrow A by the pressing means 7 (return air cylinder 93), and the diaphragm 221 is negatively deformed (see dotted line, S13).

  If the diaphragm 21 is negatively deformed by the pressing means 7 to a predetermined shape (until the inside of the secondary chamber 220 approaches the vacuum state as much as possible), the flow of compressed air into the first air suction port 97 is stopped and the tank side The valve 85 is opened (S14), and the functional liquid is filled (liquid passing) (S15). When the time required for sufficiently passing (filling) the functional liquid into the functional liquid supply channel (predetermined time obtained by experiments) elapses, the return air cylinder 93 causes the pressing means to 7 is released (S16). Even when the pressing means 7 releases the pressure, the suction operation by the suction unit 92 is continued, and the functional liquid for the drawing process is continuously filled (normal filling) (S17).

  Thus, according to the functional liquid filling method according to the embodiment of the present invention, when the functional liquid is initially filled in the functional liquid supply flow path, the functional liquid filling channel is provided on one surface of the secondary chamber 220 of the pressure regulating valve 61. The diaphragm 221 is negatively deformed to suck the functional liquid, and after passing the functional liquid through the functional liquid supply flow path, the pressure is released compared with the case where the initial filling is performed only by sucking the functional liquid. The amount of bubbles mixed in the regulating valve 61 can be reduced, and the amount of functional liquid charged into the pressure regulating valve 61 can be increased. That is, if the initial filling is performed only by sucking the functional liquid, bubbles may remain in the upper part of the secondary chamber 220. However, by adjusting the pressure of the diaphragm 221 in the negative direction as described above, the pressure is adjusted accordingly. The air in the valve 61 can be discharged, and the flow rate of the functional liquid is increased by the shape return of the diaphragm 221 based on the release of the pressure after passing the functional liquid. The remaining small bubbles can be discharged, and as a result, the amount of bubbles mixed in the pressure regulating valve 61 during the initial filling can be reduced. Further, the diaphragm 221 can be rapidly negatively deformed by the pressing means 7, and the flow rate of the functional liquid is increased by the shape recovery of the diaphragm 221, so that the time required for the initial filling can be shortened.

  Prior to the deformation of the diaphragm 221, the tank side valve 85 is closed, and after the diaphragm 221 is deformed, the tank side valve 85 is opened. The air or the functional liquid that has been moved does not flow back to the tank-side supply flow path 81 r or the functional liquid tank 62 due to the deformation of the diaphragm 221 by the pressing means 7. Therefore, it is possible to prevent the functional liquid from deteriorating or deteriorating due to the backflow of the functional liquid or the functional liquid remaining in the tank-side supply channel 81r.

  Note that the release of the return air cylinder 93 after the functional liquid filling (S16) may be gradually released along with the subsequent normal filling (S17). Further, instead of the functional liquid filling of (S15), the functional liquid may be filled first, and then the processes after (S11) to (S14) and (S16) may be performed. In addition, the closing operation (S11) and the opening operation (S14) of the tank side valve 85 can be omitted regardless of the timing of filling the functional liquid.

  Next, with reference to the schematic diagram of FIG. 11 and the flowchart of FIG. 12, a functional liquid initial filling method to the functional liquid supply channel according to the second embodiment of the present invention will be described. In the above embodiment, the diaphragm 221 is negatively deformed by the pressing means 7 (return air cylinder 93). However, in this embodiment, the diaphragm 221 is negatively deformed by the suction operation by the suction unit 92 to adjust the pressure. This is intended to reduce the amount of bubbles mixed in the valve 61. Therefore, as shown in FIG. 11, the configuration differs from the first embodiment only in that the pressing means 7 is omitted. Hereinafter, a description will be given focusing on differences from the first embodiment.

  As shown in the flowchart of FIG. 12, when an initial filling command is issued from the control means 16, the tank side valve 85 is first closed (S21). Thereafter, suction is performed by the suction unit 92, and the diaphragm is negatively deformed by bringing the in-valve channel 61r close to a vacuum state (S22). When the suction diaphragm 21 by the suction unit 92 is negatively deformed to a predetermined shape, the tank side valve 85 is opened while the suction operation continues (S23). The opening timing of the tank side valve 85 at this time is after a lapse of a predetermined time obtained in advance through experiments from the closing of the tank side valve 85 (S21). Then, after the tank side valve 85 is opened, the functional liquid for the drawing process is continuously filled (normal filling) (S24).

  As described above, according to the functional liquid filling method of the present embodiment, when the functional liquid is initially filled in the functional liquid supply flow path, the suction operation is performed via the suction cap 102 with the tank side supply flow path 81r closed. Thus, the diaphragm 221 is negatively deformed, and then the tank-side supply flow path 81r is opened to fill the functional liquid supply flow path with the functional liquid, so that a special mechanism for deforming the diaphragm 221 is not required. The amount of bubbles mixed in the pressure regulating valve 61 can be reduced with a simple configuration. That is, as the pressure adjustment valve 61 is brought close to the vacuum state by the suction operation as described above, the remaining of the bubbles can be reduced, and the flow rate of the functional liquid is increased by the shape return of the diaphragm 221. Therefore, the pressure adjustment valve Even a small amount of bubbles remaining in the corners and the like in 61 can be discharged, and as a result, the amount of bubbles mixed in the pressure regulating valve 61 during initial filling can be reduced. Further, by performing the suction operation with the tank side supply flow path 81r closed, the diaphragm 221 can be suddenly negatively deformed, and the flow rate of the functional liquid is increased by the shape recovery of the diaphragm 221. Can be shortened.

  In this embodiment, after the initial filling command is issued from the control means 16, the suction by the suction unit 92 is continued all the time. However, when the tank side valve 85 is closed and opened, suction is temporarily performed. You may stop.

  Further, instead of the functional liquid filling of (S24), the functional liquid may be filled first, and then the processes of (S21) to (S23) may be performed. Further, in this case, the tank side valve 85 is not opened after a predetermined time from the closing of the tank side valve 85 (not the time control), but after the tank side valve 85 is closed, the downstream side of the suction cap 102 (the suction pump 103). The tank side valve 85 may be opened based on a detection result of a liquid detection sensor (not shown) provided on the side). That is, when it is detected by the liquid detection sensor that the functional liquid no longer flows out, the tank side valve 85 may be opened assuming that the inside of the secondary chamber 220 is in a vacuum state. According to this configuration, the tank side valve 85 can be opened according to the functional liquid even when the suction time until the vacuum state is different due to, for example, the type of the functional liquid. The filling time can be shortened.

  Further, in the present embodiment, as described above, a special mechanism for realizing the initial filling is not required. Therefore, the functional liquid discharge head 71, the pressure adjustment valve 62, and the functional liquid tank 62 are arranged on the head plate 13. The functional liquid supply flow path can be configured to be as short as possible. However, in this case as well, positioning is performed so that the water head difference between the central axis of the functional liquid supply port 65 of the functional liquid tank 62 (functional liquid pack 63) and the central axis of the primary chamber 210 becomes a predetermined value. Is preferred.

  Next, with reference to the schematic diagram of FIG. 13 and the flowchart of FIG. 14, a functional liquid initial filling method to the functional liquid supply channel according to the third embodiment of the present invention will be described. In the above embodiment, the amount of bubbles mixed in the pressure regulating valve 61 is reduced by negatively deforming the diaphragm 221 by the pressing means 7 (return air cylinder 93). By sucking air from the secondary chamber air vent 226a connected to the upper end of the secondary chamber 220, mixing of bubbles is prevented. Therefore, as shown in FIG. 13, the configuration of the present embodiment has a secondary chamber air vent (secondary chamber auxiliary outlet) 226 a and air from the secondary chamber air vent 226 a as compared with the second embodiment. The only difference is that an auxiliary suction means 310 for sucking the functional liquid is provided. However, these configurations are executed for the purpose of preventing alteration of the functional liquid due to reaction with oxygen and moisture contained in the bubbles even when the present embodiment is not adopted as the initial filling method of the functional liquid (non- This is similar to the second embodiment in that a special mechanism for performing the initial filling method of the present embodiment is not required. Hereinafter, a description will be given focusing on differences from the above embodiment.

  As shown in FIG. 13, the auxiliary suction means 310 includes an auxiliary waste liquid tank 311 for storing the functional liquid sucked from the secondary chamber air vent 226a, and an auxiliary pump (vacuum pump) for sucking air through the auxiliary waste liquid tank 311. ) 312, an auxiliary first tube 321 that guides the functional liquid sucked from the secondary chamber air vent 226 a to the auxiliary waste liquid tank 311, and an auxiliary second tube 312 that connects the upper end of the auxiliary waste liquid tank 311 and the auxiliary pump 312. And is composed of. When the air in the auxiliary waste liquid tank 311 is sucked by the auxiliary pump 312, the auxiliary waste liquid tank 311 and the auxiliary first tube 321 are evacuated, and air and functional liquid are sucked from the secondary chamber air vent 226 a accordingly. The The functional liquid sucked at this time is trapped in the auxiliary waste liquid tank 311.

  Here, the initial filling method of the present embodiment will be described. As shown in the flowchart of FIG. 14, when an initial filling command is issued from the control means 16, the functional liquid is filled into the functional liquid supply flow path by the functional liquid suction by the suction unit 92 (S31). When the functional liquid supply channel is filled with the functional liquid, the suction by the suction unit 92 is stopped (S32), and the auxiliary pump 312 is driven in a state where the sealing state of the nozzle surface 78 by the suction cap 102 is maintained. Then, air is sucked from the secondary chamber air vent 226a (S33). When a sufficient time has passed to suck the air bubbles stored in the upper end of the secondary chamber, the auxiliary pump 312 is stopped and the functional liquid suction by the suction unit 92 for the drawing process is resumed (S34). In the present embodiment, the tank side valve 85 remains open.

  As described above, according to the initial filling method of the present embodiment, when the functional liquid is initially filled in the functional liquid supply flow path, the functional liquid is sucked and then the secondary chamber air connected to the upper end portion of the secondary chamber 220. Since air is sucked through the outlet 226a, the amount of bubbles mixed in the pressure regulating valve 61 can be reduced as compared with the case where the initial filling is performed only by sucking the functional liquid. In other words, if air is not sucked from the secondary chamber air vent 226a, bubbles may remain in the upper part of the secondary chamber. Since the air remaining in the upper part of the room is sucked, the bubbles can be efficiently discharged, and the amount of bubbles mixed in the pressure regulating valve 61 can be reduced.

  It should be noted that the bubble amount in the pressure regulating valve 61 (particularly the secondary chamber 220) may be configured to be detected, and air suction may be executed as needed when it is detected that the predetermined bubble amount has been exceeded. According to this configuration, air suction can be performed at an appropriate time, and the functional liquid can be efficiently prevented from being deteriorated. In addition, air suction may be performed not only from the secondary chamber air vent 226a but also from the primary chamber air vent 213a (see FIG. 8A).

  Next, with reference to the schematic diagram of FIG. 15 and the flowchart of FIG. 16, a functional liquid initial filling method to the functional liquid supply channel according to the fourth embodiment of the present invention will be described. In the above embodiment, the functional fluid initial filling to the pressure regulating valve 61 is performed by introducing the functional fluid from the inflow port 212 provided on the upper end side of the pressure regulating valve 61 and providing the outflow port provided on the lower end side of the pressure regulating valve 61. In this embodiment, the functional liquid is introduced from the lower end side and discharged from the upper end side by inverting the pressure regulating valve 61 up and down by the inversion mechanism 410. Is different. That is, by performing initial filling with the pressure regulating valve 61 turned upside down, bubbles remaining in the upper part of the secondary chamber can be easily removed. Hereinafter, a description will be given focusing on differences from the above embodiment.

  As shown in FIG. 15, the reversing mechanism 410 is attached to the attachment plate 415 attached to the primary chamber housing 201 of the pressure regulating valve 61, the shaft 412 fixed to the attachment plate 415, and one end of the shaft 412. A pinion 414, a rack 413 that meshes with the pinion 414, a return air cylinder 415 that moves the rack 413 forward and backward, and a bearing 416 that supports the shaft 412 are configured. When the rack 413 moves upward in the figure due to the forward movement of the return air cylinder 415, the pinion 414 rotates 180 ° clockwise, and the pressure adjustment valve 61 also rotates clockwise 180 ° via the shaft 412 and the mounting plate 415. Rotate. Further, when the rack 413 moves downward in the figure due to the backward movement of the return air cylinder 415, the pinion 414 rotates 180 ° counterclockwise, so that the pressure adjustment valve 61 also rotates 180 ° counterclockwise. Return to the position of.

  Here, the initial filling method of the present embodiment will be described. As shown in the flowchart of FIG. 16, when an initial filling command is issued from the control means 16, the pressure adjusting valve 61 is turned upside down by the turning mechanism 410 (S41). In this state, suction by the suction unit 92 is started, the functional liquid is introduced from the lower end side (inflow port 212), and discharged from the upper end side (outflow port 227) (S42). At this time, since the functional liquid is discharged from the upper end side, air that tends to remain in the upper part is easily discharged along with the discharge of the functional liquid. Then, after the elapse of a predetermined time from the start of suction, the pressure adjusting valve 61 is reversed and returned by the reversing mechanism 410 (S43), and the functional liquid suction (normal filling) for the drawing process is continued (S44). In the present embodiment, suction by the suction unit 92 is continuously performed after (S42). Further, the tank side valve 85 remains open.

  Thus, according to the functional liquid filling method of the present embodiment, when the functional liquid is initially filled in the functional liquid supply flow path, the functional liquid is sucked in a state where the pressure regulating valve 61 is turned upside down, and then the pressure is increased. Since the adjustment valve 61 is reversed and returned to the original position, the amount of bubbles mixed in the pressure adjustment valve 61 can be reduced as compared with the case where the pressure adjustment valve 61 is not turned upside down. That is, when the functional fluid is sucked (initial filling) in a normal state where the pressure regulating valve 61 is not inverted upside down (a configuration in which the functional fluid is introduced from the upper end side and discharged from the lower end side), Although air bubbles may remain, as described above, the functional liquid is introduced from the lower end side of the pressure regulating valve 61 and discharged from the upper end side, so that the functional liquid is discharged to the upper part of the secondary chamber. The remaining bubbles can be easily removed, and as a result, the amount of bubbles mixed in the pressure regulating valve 61 can be reduced. In addition, after the functional liquid is passed, the pressure regulating valve 61 is reversed and returned to the original position, and hence the ejection failure of the functional liquid droplet ejection head 71 caused by discharging the functional liquid from the upper end side where bubbles are likely to remain. Can be prevented. Further, since the tank side supply flow path 81r and the head side supply flow path 82r have flexibility, the pressure adjustment valve 61 is turned upside down while allowing both the flow paths to be connected while allowing bending when reversed / returned. Can be made.

  It should be noted that a functional liquid may be filled in the pressure regulating valve 61 before the pressure regulating valve 61 is inverted upside down, and a predetermined amount of additional filling (additional suction) may be performed after the inversion.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 17 is a flowchart showing the manufacturing process of the color filter, and FIG. 18 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S51), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S52), the bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 18B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 18C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the bank 503 serve as partition wall portions 507b for partitioning the pixel regions 507a. The colored layer (film forming portions) 508R, 508G, and 508B are formed by the droplet discharge head 71 in the subsequent colored layer forming step. The landing area of the functional droplet is defined when forming the.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. The landing position accuracy is improved.

  Next, in the colored layer forming step (S53), as shown in FIG. 18D, functional droplets are ejected by the droplet ejection head 71 and land in each pixel region 507a surrounded by the partition wall portion 507b. Let In this case, using the droplet discharge head 71, functional liquids (filter materials) of three colors R, G, and B are introduced to discharge functional droplets. Note that the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S54), and as shown in FIG. 18E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 19 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 18, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 520 is roughly composed of a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (the liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 19 are formed at a predetermined interval. A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. In addition, the above-described sealing material 529 can be printed by the droplet discharge head 71. Further, the first and second alignment films 524 and 527 can be applied by the droplet discharge head 71.

FIG. 20 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 21 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, an organic EL device manufactured using the droplet discharge device 1 of the above embodiment will be described. FIG. 22 is a cross-sectional view of a main part of a display region of an organic EL device (hereinafter simply referred to as a display device 600).

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 stacked on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 23, the display device 600 includes a bank part forming step (S61), a surface treatment step (S62), a hole injection / transport layer forming step (S63), a light emitting layer forming step (S64), It is manufactured through an electrode formation step (S65). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S61), as shown in FIG. 24, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, the organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S62), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b. )
By performing this surface treatment process, when the functional layer 617 is formed using the droplet discharge head 71, the functional droplet can be landed more reliably on the pixel region, and has landed on the pixel region. It is possible to prevent the functional droplet from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 32 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S63) and light emitting layer forming step (S64) are performed. .

  As shown in FIG. 26, in the hole injection / transport layer forming step (S63), the first composition containing the hole injection / transport layer forming material is transferred from the droplet discharge head 71 into each opening 619 that is a pixel region. To discharge. Thereafter, as shown in FIG. 27, a drying treatment and a heat treatment are performed to evaporate the polar solvent contained in the first composition, and a hole injection / transport layer 617a is formed on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S64) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform a surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 28, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 28)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 29, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the droplet discharge head 71, as shown in FIG. 30, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed to obtain other colors (red (R) and green). A light emitting layer 617b corresponding to (G)) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S65).

In the counter electrode forming step (S65), as shown in FIG. 31, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 32 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701 and a second substrate 702 that are disposed to face each other, and a discharge display portion 703 that is formed therebetween. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence. The red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 25 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the liquid droplet ejection head 71. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
In the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the droplet ejection head 71, and the corresponding color. In the discharge chamber 705.

Next, FIG. 33 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 includes a first substrate 801, a second substrate 802, and a field emission display unit 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 34A. When these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

1 is a schematic plan view of a droplet discharge device according to an embodiment of the present invention. It is a side surface schematic diagram of the droplet discharge apparatus which concerns on embodiment of this invention. It is an external appearance perspective view of a functional droplet discharge head. It is the schematic diagram which showed only the mechanism relevant to the initial stage filling process of a droplet discharge apparatus. It is an external appearance perspective view of a functional liquid pack. It is an external appearance perspective view of a pressure control valve. It is sectional drawing of a pressure regulating valve, and the top view seen from the front side. It is sectional drawing seen from the side of a pressure regulating valve, and the elements on larger scale around a valve body. It is a control block diagram which shows the control structure of a droplet discharge apparatus. It is a flowchart explaining the functional liquid initial filling method. It is a schematic diagram of the droplet discharge apparatus which concerns on 2nd Embodiment. It is a flowchart explaining the functional liquid initial filling method which concerns on 2nd Embodiment. It is a schematic diagram of the droplet discharge apparatus which concerns on 3rd Embodiment. It is a flowchart explaining the functional liquid initial filling method which concerns on 3rd Embodiment. It is a schematic diagram of the droplet discharge apparatus which concerns on 4th Embodiment. It is a flowchart explaining the functional liquid initial filling method which concerns on 4th Embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Droplet discharge device 6 Functional liquid supply mechanism 7 Pressing means 13 Head plate 16 Control means 61 Pressure adjusting valve 62 Functional liquid tank 71 Functional liquid droplet discharge head 81 Tank side tube 82 Head side tube 92 Suction unit 93 Return air cylinder 102 Suction cap 200 Valve unit 210 Primary chamber 220 Secondary chamber 221 Diaphragm 272 Pressure receiving plate

Claims (15)

The functional liquid introduced into the primary chamber from the functional liquid tank is supplied to the functional liquid droplet ejection head through the secondary chamber, and the atmospheric pressure is adjusted as a reference pressure by a diaphragm provided on one surface of the secondary chamber. A flow path in a valve of a pressure regulating valve that performs pressure adjustment of the secondary chamber by opening and closing a valve body provided in a communication flow path that communicates the primary chamber and the secondary chamber;
A tank-side supply channel that leads from the functional liquid tank to the primary chamber;
A head-side supply channel that continues from the secondary chamber to the functional liquid droplet ejection head;
A functional liquid filling method for initially filling a functional liquid into a functional liquid supply flow path comprising a flow path in the head of the functional liquid droplet ejection head,
A diaphragm deforming step of negatively deforming the diaphragm to the other surface side of the secondary chamber by a pressing means;
A functional liquid suction step of sucking the functional liquid through a cap in close contact with the nozzle surface of the functional liquid droplet ejection head;
When the functional liquid is passed through the functional liquid supply channel by the functional liquid suction, a press releasing step for releasing the pressing of the pressing means;
A functional liquid filling method comprising: The tank side supply flow path is provided with an open / close valve for opening and closing it,
Prior to the diaphragm deformation step, a flow path closing step for closing the tank side supply flow path with the on-off valve;
Between the diaphragm deformation step and the functional fluid suction step, a flow path opening step for opening the tank side supply flow path by the on-off valve;
The functional liquid filling method according to claim 1, further comprising: The functional liquid introduced into the primary chamber from the functional liquid tank is supplied to the functional liquid droplet ejection head through the secondary chamber, and the atmospheric pressure is adjusted as a reference pressure by a diaphragm provided on one surface of the secondary chamber. A flow path in a valve of a pressure regulating valve that performs pressure adjustment of the secondary chamber by opening and closing a valve body provided in a communication flow path that communicates the primary chamber and the secondary chamber;
A tank-side supply passage that is continuous from the functional liquid tank to the primary chamber and has an on-off valve;
A head-side supply channel that continues from the secondary chamber to the functional liquid droplet ejection head;
A functional liquid filling method for initially filling a functional liquid into a functional liquid supply flow path comprising a flow path in the head of the functional liquid droplet ejection head,
A channel closing step for closing the tank-side supply channel with the on-off valve;
After the flow path closing step, the diaphragm is negatively deformed to the other surface side of the secondary chamber by performing a suction operation through a cap in close contact with the nozzle surface of the functional liquid droplet ejection head. When,
After the diaphragm deformation step, a functional liquid filling step of opening the tank side supply flow path with the on-off valve and filling the functional liquid supply flow path with the functional liquid;
A functional liquid filling method comprising: The functional liquid introduced into the primary chamber from the functional liquid tank is supplied to the functional liquid droplet ejection head through the secondary chamber, and the atmospheric pressure is adjusted as a reference pressure by a diaphragm provided on one surface of the secondary chamber. A flow path in a valve of a pressure regulating valve that performs pressure adjustment of the secondary chamber by opening and closing a valve body provided in a communication flow path that communicates the primary chamber and the secondary chamber;
A tank-side supply channel that leads from the functional liquid tank to the primary chamber;
A head-side supply channel that continues from the secondary chamber to the functional liquid droplet ejection head;
A functional liquid filling method for initially filling a functional liquid into a functional liquid supply flow path comprising a flow path in the head of the functional liquid droplet ejection head,
A functional liquid suction step of sucking the functional liquid through a cap in close contact with the nozzle surface of the functional liquid droplet ejection head;
When the functional liquid is passed through the functional liquid supply channel by the functional liquid suction, the functional liquid suction stop step of stopping the functional liquid suction;
After the functional liquid suction stop step, the air in the valve passage is sucked by the air suction means through the auxiliary discharge port connected to the upper end of the secondary chamber while maintaining the sealing state of the nozzle surface. An air suction process;
A functional liquid filling method comprising: The tank-side supply channel is continuous from the functional liquid tank to the upper end of the primary chamber,
5. The functional liquid filling method according to claim 1, wherein the head-side supply channel is connected to the functional liquid droplet ejection head from a lower end portion of the secondary chamber. The functional liquid introduced from the functional liquid tank into the primary chamber is gravity-supplied through the secondary chamber to the functional liquid droplet ejection head, and the atmospheric pressure is adjusted as a reference pressure by a diaphragm provided on one surface of the secondary chamber. An in-valve flow path of a pressure regulating valve that adjusts the pressure of the secondary chamber by opening and closing a valve body provided in a communication flow path that communicates the primary chamber and the secondary chamber;
A tank-side supply flow path that is continuous with the upper end of the primary chamber from the functional liquid tank and has flexibility;
A head-side supply channel that is continuous with the functional liquid droplet ejection head from the lower end of the secondary chamber and has flexibility;
A functional liquid filling method for initially filling a functional liquid into a functional liquid supply flow path comprising a flow path in the head of the functional liquid droplet ejection head,
A reversing step of turning the pressure regulating valve upside down while allowing the tank side supply flow path and the head side supply flow path to bend by a reversing mechanism;
A functional liquid suction step of sucking the functional liquid through a cap in close contact with the nozzle surface of the functional liquid droplet ejection head;
When the functional liquid is passed through the functional liquid supply flow path by the functional liquid suction, a reversal return step of reversing the pressure adjustment valve to the original position by the reversing mechanism,
A functional liquid filling method comprising: The functional liquid introduced into the primary chamber from the functional liquid tank is supplied to the functional liquid droplet ejection head through the secondary chamber, and the atmospheric pressure is adjusted as a reference pressure by a diaphragm provided on one surface of the secondary chamber. A flow path in a valve of a pressure regulating valve that performs pressure adjustment of the secondary chamber by opening and closing a valve body provided in a communication flow path that communicates the primary chamber and the secondary chamber;
A tank-side supply channel that leads from the functional liquid tank to the primary chamber;
A head-side supply channel that continues from the secondary chamber to the functional liquid droplet ejection head;
In the liquid droplet ejection apparatus having a functional liquid supply flow path comprising a flow path in the head of the functional liquid droplet ejection head,
Pressing means for negatively deforming the diaphragm to the other surface side of the secondary chamber;
Functional liquid suction means for sucking the functional liquid through a cap in close contact with the nozzle surface of the functional liquid droplet ejection head;
Pressing release means for releasing the pressing of the pressing means,
The liquid droplet ejection apparatus according to claim 1, wherein the pressing release means releases the pressing after the functional liquid is passed through the functional liquid supply channel by the functional liquid suction means. An on-off valve that opens and closes the tank-side supply flow path;
8. The on-off valve closes the tank-side supply passage prior to deformation of the diaphragm by the pressing means, and opens the tank-side supply passage after deformation of the diaphragm. The droplet discharge device according to 1. The functional liquid introduced into the primary chamber from the functional liquid tank is supplied to the functional liquid droplet ejection head through the secondary chamber, and the atmospheric pressure is adjusted as a reference pressure by a diaphragm provided on one surface of the secondary chamber. A flow path in a valve of a pressure regulating valve that performs pressure adjustment of the secondary chamber by opening and closing a valve body provided in a communication flow path that communicates the primary chamber and the secondary chamber;
A tank-side supply channel that leads from the functional liquid tank to the primary chamber;
A head-side supply channel that continues from the secondary chamber to the functional liquid droplet ejection head;
In the liquid droplet ejection apparatus having a functional liquid supply flow path comprising a flow path in the head of the functional liquid droplet ejection head,
An on-off valve for opening and closing the tank-side supply flow path;
Diaphragm deforming means for negatively deforming the diaphragm to the other surface side of the secondary chamber by performing a suction operation through a cap in close contact with the nozzle surface of the functional liquid droplet ejection head;
Functional liquid filling means for filling the functional liquid supply channel with the functional liquid,
The diaphragm deforming means performs a suction operation after closing the tank-side supply flow path by the on-off valve,
The functional liquid filling means, after the diaphragm is deformed, opens the tank side supply channel by the on-off valve and fills the functional liquid with the functional liquid filling means. The functional liquid introduced into the primary chamber from the functional liquid tank is supplied to the functional liquid droplet ejection head through the secondary chamber, and the atmospheric pressure is adjusted as a reference pressure by a diaphragm provided on one surface of the secondary chamber. A flow path in a valve of a pressure regulating valve that performs pressure adjustment of the secondary chamber by opening and closing a valve body provided in a communication flow path that communicates the primary chamber and the secondary chamber;
A tank-side supply channel that leads from the functional liquid tank to the primary chamber;
A head-side supply channel that continues from the secondary chamber to the functional liquid droplet ejection head;
In the liquid droplet ejection apparatus having a functional liquid supply flow path comprising a flow path in the head of the functional liquid droplet ejection head,
Functional liquid suction means for sucking the functional liquid through a cap in close contact with the nozzle surface of the functional liquid droplet ejection head;
An air suction means for sucking air in the flow path in the valve by an air suction means through an auxiliary discharge port connected to the upper end of the secondary chamber while maintaining the sealing state of the nozzle surface;
The functional liquid suction means stops the functional liquid suction when the functional liquid is passed through the functional liquid supply channel,
The droplet discharge device, wherein the air suction means performs air suction after the functional liquid suction is stopped. The tank-side supply channel is continuous from the functional liquid tank to the upper end of the primary chamber,
11. The liquid droplet ejection apparatus according to claim 7, wherein the head side supply channel is connected to the functional liquid droplet ejection head from a lower end portion of the secondary chamber. The functional liquid introduced from the functional liquid tank into the primary chamber is gravity-supplied through the secondary chamber to the functional liquid droplet ejection head, and the atmospheric pressure is adjusted as a reference pressure by a diaphragm provided on one surface of the secondary chamber. An in-valve flow path of a pressure regulating valve that adjusts the pressure of the secondary chamber by opening and closing a valve body provided in a communication flow path that communicates the primary chamber and the secondary chamber;
A tank-side supply flow path that is continuous with the upper end of the primary chamber from the functional liquid tank and has flexibility;
A head-side supply channel that is continuous with the functional liquid droplet ejection head from the lower end of the secondary chamber and has flexibility;
In the liquid droplet ejection apparatus having a functional liquid supply flow path comprising a flow path in the head of the functional liquid droplet ejection head,
An inversion mechanism that vertically inverts the pressure regulating valve while allowing the tank-side supply channel and the head-side supply channel to bend;
A functional liquid suction means for sucking the functional liquid through a cap in close contact with the nozzle surface of the functional liquid droplet ejection head,
The reversing mechanism reverses the pressure regulating valve upside down prior to the passing of the functional liquid by the functional liquid suction means, and after passing the functional liquid through the functional liquid supply channel, A liquid droplet ejection apparatus, wherein the liquid droplet is reversed and returned to the position.   13. The liquid droplet ejection apparatus according to claim 7, wherein the functional liquid droplet is ejected while the functional liquid droplet ejection head is moved relative to the work, thereby causing the functional liquid droplets on the work. A method for manufacturing an electro-optical device, comprising forming a film forming unit.   13. The liquid droplet ejection apparatus according to claim 7, wherein the functional liquid is ejected on the work by ejecting the functional liquid while moving the functional liquid droplet ejection head relative to the work. An electro-optical device having a film forming portion formed thereon.   An electronic apparatus comprising the electro-optical device according to claim 14.

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