JP4457756B2 - Functional liquid supply device, carriage device including the same, and droplet discharge device - Google Patents

Description

The present invention functional fluid functional fluid supply unit and the carriage device provided therewith for supplying the functional liquid to the functional liquid droplet ejection head for ejecting, as well as about the droplet ejection equipment.

2. Description of the Related Art Conventionally, an ink supply device that sends ink to an inkjet head of a printing apparatus has a main tank with a built-in pressure pump and a pressure adjustment valve (self-sealing valve) that reduces the pressure on the print head side. ing. The pressure regulating valve opens and closes a valve body provided in an ink flow path from the primary chamber connected to the tank side to the secondary chamber connected to the print head by a diaphragm. This diaphragm automatically opens and closes due to the pressure difference between the internal pressure of the primary chamber and the internal pressure of the secondary chamber as the ink is consumed, and supplies a small amount of ink and prevents ink leakage from the print head.
In this case, the main tank mounted on the apparatus side and the pressure regulating valve on the carriage are connected by a flexible tube via a joint (for example, see Patent Document 1).
JP 2003-211701 A (FIGS. 8 and 6)

  In the conventional ink supply mechanism, since the flow path in the tube becomes long, there is a problem that the amount of ink necessary for filling the flow path from the main tank to the print head increases. Further, since the bent portion of the ink tube continuously moves with the movement of the print head, there is a problem that pulsation occurs in the tube, the pressure fluctuates, and the ejection becomes unstable. In addition, there is a problem that air bubbles remain in the joint portion and the like and ink discharge failure occurs due to the air bubbles.

The present invention functional fluid function liquid functional liquid flow path of reaching the functional liquid droplet ejection head from the tank can be minimized feed and a carriage device having the same, and to provide a droplet discharging equipment It is an issue.

Functional fluid supply device of the present invention is a functional liquid supply device for supplying the functional liquid to the functional liquid droplet discharge head for discharging the functional liquid, the functional liquid tank for storing the functional liquid, functional liquid tank portion The primary chamber connected to the secondary chamber , the secondary chamber connected to the functional liquid outlet , and the diaphragm facing the atmosphere open and close the communication channel that connects the primary chamber and the secondary chamber with atmospheric pressure as the adjustment reference pressure. pressure regulator for pressure control of the next chamber, and the pressure regulating valve mechanism having, a characterized in that formed integrally on the housings.

  According to this configuration, since the functional liquid tank portion and the pressure adjustment valve mechanism are built in the housing, the functional liquid tank portion and the pressure adjustment valve mechanism can be directly connected so as to be the shortest. Thereby, the liquid quantity of the functional liquid with which it fills in the flow path from a functional liquid tank part to a pressure control valve mechanism can be decreased. Further, by adopting a tubeless method, air bubbles do not remain in the joint, and since gas does not permeate from the tube portion and the deaeration degree of the functional liquid does not decrease, discharge can be stabilized.

  In this case, it is preferable that the functional liquid tank unit includes a wave-dissipating unit that prevents the liquid level of the stored functional liquid from flowing.

  According to this configuration, it is possible to prevent pressure fluctuations inside the tank due to the swell of the functional liquid. Therefore, the opening and closing of the pressure adjustment unit does not become unstable.

  In this case, the wave-absorbing means is preferably a float member provided so as to cover substantially the entire liquid level of the functional liquid stored in the functional liquid tank.

Similarly, wave dissipating means is in a state of communicating with the bottom of the functional liquid tank portion, to be composed of a plurality of partition walls as possible specification of the function liquid tank portion, preferably.

  According to these configurations, in the former case, the liquid surface is suppressed by the float member, thereby preventing ripples, and in the latter case, the generation of waves having a large wavelength and amplitude is prevented. be able to. That is, since the functional liquid can be prevented from swaying in the longitudinal direction in the functional liquid tank part, pressure fluctuations can also be prevented on the functional liquid tank part side. Accordingly, in combination with the pressure adjustment valve that adjusts the pressure on the functional liquid droplet ejection head side, it is possible to further stabilize the ejection of the functional liquid in the functional liquid droplet ejection head.

In this case, the connecting pipe block for connecting the function liquid outlet and the functional liquid droplet ejection head of the functional liquid intake, it having further preferable.

  According to this configuration, since the pressure regulating valve mechanism and the functional liquid droplet ejection head are directly connected by the connection pipe block, the joint and the tube can be omitted. Thereby, the flow path of the functional liquid from the functional liquid tank unit to the functional liquid droplet ejection head can be further shortened.

In this case, it is preferable that the connecting pipe block is connected to the functional liquid inlet by insertion bonding.

  According to this configuration, if the connection pipe block is previously attached to the functional liquid outlet, it can be connected to the functional liquid inlet of the functional liquid droplet ejection head with a single touch.

  The carriage device of the present invention includes a tank plate on which a plurality of functional liquid supply devices are mounted, and a head plate on which a plurality of functional liquid droplet ejection heads are mounted corresponding to the plurality of functional liquid supply devices. And a plurality of functional liquid supply devices are collectively connected to a plurality of functional liquid droplet ejection heads by mounting the tank plate on the head plate.

  According to this configuration, a plurality of functional liquid supply devices can be discharged to a plurality of functional liquid supply devices by simply positioning and mounting a tank plate equipped with a functional liquid supply device on a head plate equipped with a functional liquid droplet discharge head. It can be connected to the head at once. Therefore, each functional liquid supply device and each functional liquid droplet ejection head can be quickly attached and detached during the assembly and maintenance of the carriage device.

The droplet ejection apparatus of the present invention, the carriage unit and, moving for relatively moving in a second direction perpendicular to the workpiece to the functional liquid droplet ejection head in a first direction and the first direction mechanism It is preferable to include

  According to this configuration, since the functional liquid supply device that can reduce the usage amount of the functional liquid is used, the productivity of products manufactured using the functional liquid supply device can be improved. In addition, since the functional liquid in which bubbles are not generated is supplied to the functional liquid droplet ejection head, it is possible to prevent defective ejection of the liquid droplet ejection apparatus and improve the reliability of the product.

  Hereinafter, a droplet discharge apparatus 1 to which the present invention is applied will be described with reference to the accompanying drawings. The droplet discharge device 1 is incorporated into a so-called flat panel display production line, and each pixel of a liquid crystal display device color filter or organic EL device is formed by a droplet discharge method using a functional droplet discharge head 11. The light emitting element etc. which become are formed.

  As shown in FIG. 1, a droplet discharge device 1 includes a machine base 2, a drawing device 3 having twelve functional liquid droplet discharge heads 11 arranged in a cross shape at the upper center of the machine base 2, A maintenance device 4 comprising various devices installed in parallel with the drawing device 3 on the machine base 2 and used for maintenance of the functional liquid droplet ejection head 11, and a functional liquid supply for adjusting the pressure of the functional liquid and supplying it to the drawing device 3 The system 5 is provided with a chamber device (not shown) placed on the machine base 2 so as to cover them, and a control device (not shown) for comprehensively controlling each of the above constituent devices.

  The drawing device 3 and the maintenance device 4 are accommodated in the chamber device, and in the atmosphere of dry air or inert gas, the functional liquid droplets ejected by the functional liquid droplet ejection head 11 are applied to the workpiece W carried from the outside. Discharging, that is, drawing is performed. In addition, when the operation of the droplet discharge device 1 is started, the maintenance device 4 is caused to recover the function of the functional droplet discharge head 11.

  The drawing apparatus 3 has an XY movement mechanism 6 installed on the machine base 2. The XY movement mechanism 6 moves the workpiece W relative to the functional liquid droplet ejection head 11 in the X-axis direction and the Y-axis direction, and mounts the workpiece W and moves it in the X-axis direction. An X-axis table 7 and a Y-axis table 8 which is installed so as to cross over the X-axis table and mount each functional liquid droplet ejection head 11 and move it in the Y-axis direction are provided. Further, the drawing apparatus 3 includes a head recognition camera (not shown) for recognizing the position of each functional liquid droplet ejection head 11, a pair of work recognition cameras (not shown) for recognizing the position of the work W, and the like. Various devices are provided.

  The X-axis table 7 includes a suction table 12 for sucking and mounting the workpiece W, a set table 14 including a θ table 13 for rotatably supporting the suction table 12 around the Z axis, and the set table 14 being slidable in the X-axis direction. And an X-axis slider (not shown) for driving the X-axis slider 15. The workpiece W is sucked and placed on the suction table 12 and is reciprocated in the X-axis direction which is the main scanning direction via the X-axis slider 15.

  The Y-axis table 8 is slidable on a pair of left and right columns 16 erected on the machine base 2 with the X-axis table 7 interposed therebetween, a Y-axis frame 17 spanned between both columns 16, and the Y-axis frame 17. A Y-axis slider 18 supported by the Y-axis slider, a Y-axis motor (not shown) that drives the Y-axis slider 18, and a main carriage 21 that is supported by the Y-axis slider 18 and carries the functional liquid droplet ejection head 11. Yes. The functional liquid droplet ejection head 11 is reciprocated in the Y-axis direction, which is sub-scanning, through the Y-axis slider 18 together with the main carriage 21.

  When drawing on the workpiece W, each functional liquid droplet ejection head 11 faces the workpiece W with a predetermined workpiece gap, and main scanning (reciprocating movement of the workpiece W) by the X-axis table 7 is performed. The functional liquid droplet discharge heads 11 are driven to discharge in synchronism with each other. Further, sub-scanning (movement of the functional liquid droplet ejection head 11) is appropriately performed by the Y-axis table 8. With this series of operations, desired drawing is performed in the drawing area of the workpiece W.

  As shown in FIG. 2, the main carriage 21 includes a slide base 22 fixed to the Y-axis slider 18, a suspended frame 23 suspended from the slide base 22, and a θ-axis rotation mechanism incorporated in the lower portion of the suspended frame 23. 24 and a carriage body 25 provided at the lower end of the θ-axis rotating mechanism 24. A carriage body 25 is supported by a vertically extending frame 23 via a θ-axis rotating mechanism 24 so as to be rotatable around the θ-axis.

  The carriage body 25 includes a rectangular frame-shaped sub-carriage 26, a head plate 27 and a tank plate 28 mounted on the sub-carriage 26, and a mounting plate that faces the sub-carriage 26 and is mounted on the lower end of the θ-axis rotation mechanism 24. 29, and a plurality of connecting columns 19 that connect the sub-carriage 26 and the mounting plate 29. On the sub-carriage 26, screw fixing portions (not shown) for fixing the head plate 27 with screws from below and positioning for detachably mounting the tank plate 28 while guiding the mounting of the tank plate 28 at the four corners. Guide mechanism 31 is provided.

  On the head plate 27, twelve functional liquid droplet ejection heads 11 are mounted so that the lower part protrudes downward. That is, on the head plate 27, all the nozzles 42 rows of these twelve functional liquid droplet ejection heads 11 are arranged stepwise in plan view so as to form one drawing line (see FIG. 1). On the other hand, in the tank plate 28, twelve functional liquid supply devices 32 are arranged in the same arrangement in a stepped manner in plan view corresponding to the arrangement of the functional liquid droplet ejection heads 11. The head plate 27, the tank plate 28, the positioning guide mechanism 31 and the twelve functional liquid supply devices 32 constitute the carriage device 33 of the present invention.

  The positioning guide mechanism 31 includes a total of four support blocks 34 erected on the sub-carriage 26 corresponding to the four corners of the tank plate 28, and a total of four fixing bolts erected on each of the support blocks 34. 35 and four positioning protrusions 36 provided adjacent to each fixing bolt 35. On the other hand, four through holes 38 corresponding to the four fixing bolts 35 and four positioning holes 37 corresponding to the four positioning projections 36 are formed at the four corners of the tank plate 28 (see FIG. 4). . Each positioning protrusion 36 has a truncated cone shape, and the tank plate 28 is positioned on the sub-carriage 26 by being fitted into each positioning hole 37 of the tank plate 28. In addition, each fixing bolt 35 is loosely inserted into each through-hole 38 so that the tank plate 28 is placed on the sub-carriage 26 and the nut 41 is screwed onto the fixing bolt 35 so that a desired gap exists. A tank plate 28 is fixed to the sub-carriage 26. The positioning guide mechanism 31 may be constituted by three support blocks 34 or the like (three-point support). Alternatively, the truncated conical positioning projection 36 may be omitted, and the base of the fixing bolt 35 may be tapered to serve as both.

  The functional liquid droplet ejection head 11 has a large number (for example, 180) of nozzles 42 that eject functional liquid droplets on its nozzle surface 43, and the large number of nozzles 42 form two nozzle arrays 45. (Refer to FIG. 1, it is in one row in the figure). Specifically, the functional liquid droplet ejection head 11 includes a pair of in-head flow paths (not shown) corresponding to the nozzle rows 45, and a cavity (piezoelectric element) provided facing the in-head flow path. (Not shown) and a pair of functional liquid inlets 44 connected to the in-head flow path. In the initial filling step by nozzle suction, the functional liquid is introduced from each functional liquid introduction port 44 of the functional liquid droplet ejection head 11 to fill the flow path in the head. When the functional droplet discharge head 11 is driven to discharge, the cavity exerts a pumping action and discharges the functional liquid in the flow path in the head from the nozzle 42 (discharge of the functional droplet). As a result, the functional liquid is consumed in the functional liquid droplet ejection head 11, and a new functional liquid is supplied from the functional liquid supply system 5 to the flow path in the head accordingly. In the present embodiment, only one of the two nozzle rows 45 of the functional liquid droplet ejection head 11 is used.

  Next, the maintenance device 4 will be described with reference to FIG. The maintenance device 4 seals the nozzle 42 surface of the functional liquid droplet ejection head 11 to prevent the nozzle 42 from drying when the liquid droplet ejection device 1 is not in operation, and increases from the nozzle 42 of the functional liquid droplet ejection head 11. It has a storage / suction unit 46 for sucking and removing the viscous functional liquid, and a wiping unit 47 for wiping off dirt adhering to the nozzle surface 43 of the functional liquid droplet ejection head 11. These units 46 and 47 are mounted on a moving table 48 placed on the machine base 2 so as to extend in the X-axis direction, and are configured to be movable in the X-axis direction by the moving table 48. .

  The storage / suction unit 46 is connected to the sealing cap 51 that also functions as a flushing box that receives the discarded discharge of the functional droplet discharge head 11, a cap lifting mechanism 52 that lifts and lowers the sealing cap 51, and the sealing cap 51. A suction pump (not shown) for sucking the functional liquid droplet ejection head 11 and a waste liquid tank (not shown) for collecting the waste liquid sucked and removed by the suction pump are provided. When drawing is paused, the functional liquid droplet ejection head 11 has moved to the maintenance position 53 on the moving table 48, and the functional liquid droplet ejection head 11 is located at a position slightly away from the functional liquid droplet ejection head 11. The flashing (discarding discharge) is received. Further, when the droplet discharge device 1 is not in operation, the sealing cap 51 is completely raised and brought into close contact with the nozzle surface 43 of the functional droplet discharge head 11. Thereby, all the nozzles 42 of the functional liquid droplet ejection head 11 are sealed, and the functional liquid droplets at each nozzle 42 are prevented from drying. Further, when restarting from this close contact state, the suction pump is driven as necessary to suck the functional fluid having increased viscosity or the functional fluid for filling from the nozzle 42. This suppresses thickening of the functional liquid and prevents so-called nozzle clogging. This suction operation is also used when the functional liquid is initially filled.

  As shown in the figure, the wiping unit 47 is provided with a wiping sheet 47a that can be fed out and wound up. The wiping unit 47 is moved in the X-axis direction by feeding the fed wiping sheet 47a and moving table 48a. The nozzle surface 43 of the functional liquid droplet ejection head 11 is wiped off while being moved. For this reason, the functional liquid adhering to the surface of the nozzle 42 of the functional liquid droplet ejection head 11 is removed by the above suction operation or the like, and flight bending or the like during functional liquid droplet ejection is prevented. In addition to the units 46 and 47 described above, a discharge inspection unit (not shown) for inspecting the flight state of the functional liquid droplets ejected from the functional liquid droplet ejection head 11 may be mounted as the maintenance device 4. preferable.

  Next, the functional liquid supply system 5 of the present embodiment will be described with reference to FIG. As described above, the functional liquid supply system 5 has twelve functional liquid supply devices 32 corresponding to the twelve functional liquid droplet ejection heads 11, and the functional liquid supply device 32 is replenished with functional liquid. Functional fluid replenishment device that does not. Each functional liquid supply device 32 is formed in an elongated shape along the longitudinal direction of the functional liquid droplet ejection head 11. The functional liquid replenishing device is a so-called main tank with a built-in pressure pump that is installed adjacent to the machine base 2 and stores the functional liquid therein, and is connected to the functional liquid tank section 54 described later with a single touch. It has a supply tube (both not shown).

  As shown in FIG. 4, each functional liquid supply device 32 includes a functional liquid tank section 54 and a pressure regulating valve mechanism 55, a housing 56 in which these are built, and a connecting pipe block 57 that directly connects the functional liquid droplet ejection head 11. And have. The connecting pipe block 57 is formed in a straight tube shape having an internal flow path 58 with a functional liquid corrosion resistant material. At the upstream end of the connecting tube block 57, a screw joint 62 is provided which is screwed as a male side into a later-described functional liquid outlet 61 of the housing 56, and a functional liquid droplet is provided as a female side at the downstream end. An insertion joint 63 that receives the functional liquid inlet 44 of the ejection head 11 is provided. An end portion of the internal flow path 58 on the insertion joint 63 side is a stepped opening 58a, and a sealing O-ring 64 is attached to the stepped opening 58a.

  On the other hand, a functional liquid tank section 54 that stores the functional liquid and a pressure adjustment valve mechanism 55 that supplies the functional liquid with reduced pressure to the functional liquid droplet ejection head 11 are built in the housing 56. That is, the housing 56 includes a tank housing portion 65 in which a functional liquid tank portion 54 that is an atmospheric release tank is formed, and a valve housing portion in which a pressure adjustment valve mechanism 55 that is integrally formed on the front side of the tank housing portion 65 is formed. 66 and a lid housing part 67 for detachably closing the tank housing part 65, and the tank housing part 65 has a large storage space (functional liquid tank part 54) for storing the functional liquid. The housings 56 are each formed in a square box shape from a corrosion resistant material such as stainless steel. A functional liquid outlet 61 communicating with an outflow passage 68 described later is formed at the lower end portion of the valve housing portion 66, while communicating with the functional liquid tank portion 54 at the upper end portion of the tank housing portion 65. A functional liquid inlet 71 is formed. The functional fluid supply tube of the functional fluid supply device described above is connected to the functional fluid inlet 71 via a one-touch joint (not shown).

  The functional liquid tank unit 54 is provided with a wave-dissipating unit 72 that prevents the stored functional liquid from undulating. In the present embodiment, the wave-dissipating unit 72 is a liquid level of the functional liquid stored in the functional liquid tank unit 54. It is formed with the float member 73 provided so that the substantially whole area may be covered. The float member 73 is composed of a plate-like foam material, a hollow resin plate, etc., floats on the liquid surface of the functional liquid, suppresses the undulation (sway) of the liquid surface, and reduces the pressure of the functional liquid tank unit 54. To prevent fluctuations.

  Next, the pressure regulating valve mechanism 55 will be described with reference to FIG. 4. According to FIG. 4, the front side of the paper is “up”, the front side is “down”, the left side is “front” and the right side is “rear”. "And proceed with the explanation. The pressure regulating valve mechanism 55 includes a primary chamber 75 separated from the functional liquid tank portion 54 and the wall 74, a secondary chamber 76 connected to the functional liquid droplet ejection head 11 (connection pipe block 57), and a primary chamber 75. And a communication channel 77 that communicates with the secondary chamber 76, and one surface of the secondary chamber 76 that is flush with the front surface of the valve housing portion 66 faces the outside (atmosphere) and is circular. The diaphragm 78 is provided, and the communication channel 77 is provided with a valve body 81 (pressure adjusting portion) that is opened and closed by the diaphragm 78. That is, the functional liquid introduced into the primary chamber 75 from the functional liquid tank portion 54 is supplied to the functional liquid droplet ejection head 11 (connection pipe block 57) via the secondary chamber 76. At this time, the diaphragm 78 is supplied. Thus, the pressure of the secondary chamber 76 is adjusted by moving the valve body 81 (pressure adjusting portion) provided in the communication flow path 77 forward and backward, that is, by opening and closing, using atmospheric pressure as the adjustment reference pressure.

  The valve body 81 and the wall body 74 face each other, and a valve body biasing spring 92 is interposed between the valve body 81 and the wall body 74. The wall body 74 opposes the primary chamber 75 side portion of the valve body 81 with a predetermined gap, and the bottom portion 95 of the functional liquid tank portion 54 is approximately half the height of the functional liquid tank portion 54. It is erected from. The upper and left and right surroundings of the wall body 74 are in communication with the functional liquid tank portion 54 so that the functional liquid flows into the primary chamber 75 from the functional liquid tank portion 54.

  The secondary chamber 76 is formed in a truncated cone (substantially cylindrical) shape with the front surface opened to attach the diaphragm 78, and the secondary chamber 76 and the primary chamber 75 are communicated with each other by the communication channel 77. Yes. Each of the secondary chamber 76 and the communication channel 77 has a circular cross section concentric with the diaphragm 78. The communication channel 77 includes a circular cross-section shaft insertion portion 83 in which a shaft portion 82 of a valve body 81 (described later) is slidably received, and a cross-section cross-section channel extending from the shaft free insertion portion 83 in four radial directions. Part (not shown).

  The inner peripheral wall of the secondary chamber 76 has a tapered surface 84 that greatly expands forward so as to follow the negative deformation of the diaphragm 78, and an outflow channel 68 is formed so as to face the tapered surface 84. Yes. The outflow passage 68 is bent in an “L” shape and communicates with the functional liquid outlet 61 projecting from the lower end portion of the valve housing portion 66 as described above. In addition, the functional liquid outlet 61 is formed with a female screw portion 85 to which the screw joint portion 62 of the connection pipe block 57 is screwed. The screw joint portion 62 of the connection pipe block 57 is screwed into the female screw portion 85. As a result, the housing 56 and the functional liquid droplet ejection head 11 are connected via the connecting pipe block 57.

  The diaphragm 78 includes a diaphragm main body 86 made of a resin film, and a resin pressure receiving plate 87 attached to the inside of the diaphragm main body 86. The pressure receiving plate 87 is formed in a disk shape concentric with the diaphragm main body 86 and has a sufficiently small diameter with respect to the diaphragm main body 86, and a shaft portion 82 of a valve body 81 described later contacts the center thereof. The diaphragm main body 86 is formed by laminating heat-resistant PP (polypropylene), special PP, and PET (polyethylene terephthalate) on which silica is vapor-deposited, and is formed in a circular shape having the same diameter as the front surface of the housing 56. The pressure receiving plate 87 may be provided on the outer side of the diaphragm 78. However, since a shaft portion 82 of a valve body 81 to be described later repeats separation and contact, the pressure receiving plate 87 is provided on the inner side in the present embodiment in order to prevent the diaphragm 78 from being damaged. Yes.

  As shown in the figure, the valve body 81 includes a disc-shaped valve body main body 88, a shaft portion 82 extending in one direction so as to form a transverse “T” shape from the center of the valve body main body 88, and a valve An annular valve seal 89 provided (adhered) on the shaft portion 82 side (front surface) of the body main body 88 is configured. The valve body main body 88 and the shaft portion 82 are integrally formed of a corrosion resistant material such as stainless steel. The valve seal 89 is provided in an annular shape with, for example, soft silicon rubber. For this reason, when the valve body 81 is closed, the valve seal 89 strongly comes into contact with the opening edge 91 of the communication flow path 77 serving as a valve seat, and the communication flow path 77 is liquid-tightly closed from the primary chamber 75 side. .

  The shaft portion 82 is slidably fitted in the communication flow path 77 and comes into contact with the pressure receiving plate 87 of the diaphragm 78 whose front end (front end) is in the neutral position in the valve-closed state. That is, in the state of plus deformation in which the diaphragm 78 bulges outward, a predetermined gap is generated between the front end of the shaft portion 82 and the pressure receiving plate 87, and the diaphragm 78 is deformed to the minus side from this state. Then, when the front end of the shaft portion 82 and the pressure receiving plate 87 come into contact with each other in the neutral state, and the diaphragm 78 is further deformed negatively, the pressure receiving plate 87 pushes the valve body 88 through the shaft portion 82 to open the valve. I will let you. Therefore, of the volume of the secondary chamber 76, the functional fluid is supplied without receiving any pressure on the side of the primary chamber 75 for the volume in which the diaphragm 78 becomes neutral from the positive deformation.

  On the other hand, between the back surface of the valve body 81 and the wall body 74 of the primary chamber 75, a valve body biasing spring 92 that biases the valve body 81 toward the secondary chamber 76, that is, in the valve closing direction, is interposed. It is installed. Similarly, a pressure receiving plate urging spring 93 that urges the diaphragm main body 86 toward the outside via the pressure receiving plate 87 is interposed between the pressure receiving plate 87 and the tapered surface 84. In this case, the valve body urging spring 92 complements the water head of the functional liquid tank portion 54 applied to the back surface of the valve body 81, and the spring force of the valve head urging spring 92 and the water head of the functional liquid tank portion 54. Thus, the valve body 81 is pressed in the closing direction. On the other hand, the pressure receiving plate urging spring 93 complements the positive deformation of the diaphragm 78 and acts so that the secondary chamber 76 is slightly negative with respect to the atmospheric pressure.

  The pressure regulating valve mechanism 55 opens and closes the valve body 81 due to the atmospheric pressure and the secondary chamber 76 connected to the functional liquid droplet ejection head 11 and the pressure balance, and at that time, the valve body biasing spring 92 and the pressure receiving plate biasing are performed. The valve element 81 opens and closes very slowly by the valve seal 89 (elastic force) of the soft silicone rubber acting in a distributed manner on the spring 93. For this reason, pressure fluctuation (cavitation) due to the opening and closing of the valve body 81 is suppressed, and the ejection driving of the functional liquid droplet ejection head 11 is not affected. Of course, the pulsation and the like generated on the functional liquid tank side (primary side) are also cut off by the valve body 81 and can be absorbed (damper function).

  Next, an assembly procedure of the twelve functional liquid supply devices 32 and the twelve functional liquid droplet ejection heads 11 will be described with reference to FIG. In this assembly procedure, the tank plate 28 is mounted on the head plate 27 that is mounted and fixed on the carriage body 25 so that the twelve function liquid supply devices 32 collectively discharge twelve function liquid droplets. Connected to the head 11.

  Prior to mounting the tank plate 28 on the head plate 27, the head plate 27 on which the twelve functional liquid droplet ejection heads 11 are mounted in the above-described stepwise arrangement is fixed to the sub-carriage 26 in an aligned state. . In this case, the functional liquid introduction port 44 of each functional liquid droplet ejection head 11 slightly protrudes from the upper surface of the sub-carriage 26. On the other hand, the twelve functional liquid supply devices 32 to which the connecting pipe block 57 is attached in advance are mounted on the tank plate 28 in the above-mentioned stepwise arrangement.

  In this state, when the tank plate 28 is mounted on the sub-carriage 26, the four through holes 38 of the tank plate 28 are aligned with the four fixing bolts 35 and fixed to the respective through holes 38. The tank plate 28 is mounted from the upper side so that the bolt 35 is inserted. At this time, the positioning protrusion 36 is fitted into the positioning hole 37 of the tank plate 28, the tank plate 28 is positioned on the sub-carriage 26, and the twelve connecting joints 63 of the twelve connecting pipe blocks 57 are twelve. The functional liquid droplet ejection head 11 is collectively inserted into the functional liquid inlet 44.

  Finally, nuts 41 are fastened to the fixing bolts 35 from the upper side of the tank plate 28, and the connection work of the functional liquid supply device 32 and the functional liquid droplet ejection head 11 is completed. Since the positioning projections 36 position the tank plate 28 in the state where the tank plate 28 is placed on the instruction block in this way, the connection pipe block 57 is positioned vertically, front-rear, and left-right with respect to the corresponding functional liquid droplet ejection head 11. To be installed. In this embodiment, the tank plate 28 is mounted on the sub-carriage 26, but the tank plate 28 may be mounted directly on the head plate 27. In such a case, the positioning guide mechanism 31 is provided on the head plate 27.

  According to the present embodiment, since the functional liquid tank unit 54 and the pressure regulating valve mechanism 55 are built in the common housing 56, the functional liquid supply device 32 and the functional liquid droplet ejection head 11 can be directly connected in the shortest possible time. The connection tube can be omitted and the required amount of functional liquid for the internal volume of the connection tube can be reduced. Further, since the functional liquid droplet ejection head 11 side is depressurized by the pressure regulating valve mechanism 55, these can be laid out freely without considering the water head difference between the functional liquid tank portion 54 and the functional liquid droplet ejection head 11. . Further, the pressure fluctuation is blocked by the pressure regulating valve mechanism 55 before the functional liquid discharge head, and the pressure fluctuation is also prevented in the functional liquid tank section 54 by the wave-dissipating means 72, so that the functional liquid can be discharged more stably. Can be On the other hand, by using the connection pipe block 57, the flow path from the functional liquid tank section 54 to the functional liquid droplet ejection head 11 becomes tubeless, and fluctuations in pressure due to bending of the connection tube are prevented. Stabilize. Further, since gas does not permeate from the connecting tube portion and the degree of degassing of the functional liquid does not decrease, bubbles are not generated in the functional liquid, and discharge can be stabilized and empty discharge can be prevented.

  Next, the second embodiment of the droplet discharge device 1 will be described mainly with respect to differences from the first embodiment. In this embodiment, the wave-dissipating means 72 provided in the functional liquid tank portion 54 is different from that of the first embodiment, and the wave-dissipating means 72 is provided inside the functional liquid tank portion 54 as shown in FIG. Is composed of a plurality of partition walls 94 that divide the screen in a direction orthogonal to the longitudinal direction (front-rear direction) in plan view. Each partition wall 94 extends in the vertical direction inside the functional liquid tank portion 54 and is formed in a partition shape that communicates with the bottom portion 95 of the functional liquid tank portion 54. For this reason, the movement of the functional liquid in the longitudinal direction in the plan view is restricted inside the functional liquid tank section 54 except for the bottom section 95. In addition, it is preferable that the upper end of each partition wall 94 is located slightly above the liquid level at the time of full liquid, and the lower end is located slightly below the liquid level at the time of liquid reduction.

  According to the present embodiment, since the functional liquid tank portion 54 is partitioned in a direction orthogonal to the front-rear direction except for the bottom portion 95, the functional liquid is prevented from undulating in the front-rear direction, and the functional liquid is discharged. Can be stabilized. Further, since the functional liquid flows through the bottom portion 95, the functional fluid pool does not occur in the bottom portion 95.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and an active matrix substrate formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 6 is a flowchart showing the manufacturing process of the color filter, and FIG. 7 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of the present embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 7B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 8C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 therebelow serve as a partition wall portion 507b that partitions each pixel region 507a, and colored layers (film forming portions) 508R, 508G, and 508B are formed by the droplet discharge head 11 in the subsequent colored layer forming step. The landing area of the functional droplet is defined when forming the.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. The landing position accuracy is improved.

  Next, in the colored layer forming step (S103), as shown in FIG. 7D, the functional liquid droplets are ejected by the functional liquid droplet ejection head 11, and the pixel regions 507a surrounded by the partition wall portions 507b are disposed. Let it land. In this case, the functional liquid droplet ejection head 11 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. When the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. 7E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 8 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 7, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 520 is roughly composed of a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 8 are formed at a predetermined interval, and the color of the first electrode 523 is A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 11. Furthermore, it is also possible to apply the first and second alignment films 524 and 527 by the functional liquid droplet ejection head 11.

FIG. 9 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 10 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also.

  Next, FIG. 11 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 stacked on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. In addition, you may further form the other functional layer which has another function adjacent to this light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, the manufacturing process of said display apparatus 600 is demonstrated with reference to FIGS.
As shown in FIG. 12, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 13, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using oxygen as a processing gas, for example. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 11, the functional liquid droplets can be landed more reliably on the pixel area, and can be landed on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. This display device substrate 600A is placed on the set table 14 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 15, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is removed from the functional liquid droplet ejection head 11 to each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 16, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform a surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 17, the second composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 17) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, and the nonpolar solvent contained in the second composition is evaporated. As shown in FIG. 18, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 11, as shown in FIG. 19, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 20, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
At the top of the cathode 604, Al film as the electrode, Ag film and a protective layer of SiO _2, SiN, or the like for its antioxidant is appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 21 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701 and a second substrate 702 that are disposed to face each other, and a discharge display portion 703 that is formed therebetween. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 14 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 11. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
In the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the droplet ejection head 11, and the corresponding color. In the discharge chamber 705.

Next, FIG. 22 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 includes a first substrate 801, a second substrate 802, and a field emission display unit 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  A first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed on the upper surface of the first substrate 801 so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 23A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a plane schematic diagram of a droplet discharge device. It is a side surface schematic diagram of a droplet discharge device. It is an external appearance perspective view of a functional liquid supply apparatus and a functional droplet discharge head. It is a longitudinal cross-sectional view of a functional liquid supply apparatus and a functional droplet discharge head. It is a longitudinal cross-sectional view of the functional liquid supply apparatus and functional droplet discharge head which concern on 2nd Embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Droplet discharge device 6 XY movement mechanism 11 Function droplet discharge head 27 Head plate 28 Tank plate 32 Function liquid supply apparatus 33 Carriage apparatus 44 Function liquid inlet 54 Function liquid tank part 55 Pressure adjustment valve mechanism 56 Housing 57 Connection Pipe block 61 Functional liquid outlet 72 Wave extinguishing means 73 Float member 75 Primary chamber 76 Secondary chamber 77 Communication flow path 78 Diaphragm 94 Partition wall 95 Bottom W Workpiece

Claims (8)

A functional liquid supply apparatus for supplying the functional liquid to a functional liquid droplet ejection head that discharges the functional liquid,
A functional liquid tank for storing the functional liquid;
The primary chamber connected to the functional liquid tank section, the secondary chamber connected to the functional liquid outlet , and the communication connecting the primary chamber and the secondary chamber with the atmospheric pressure adjusted as a reference pressure by a diaphragm facing the atmosphere A pressure regulating valve mechanism having a pressure regulating section that opens and closes the flow path to regulate the pressure in the secondary chamber;
Functional liquid supply device, characterized in that formed integrally with the housings of. The functional liquid supply apparatus according to claim 1, wherein the functional liquid tank unit includes a wave-dissipating unit that prevents the liquid surface of the functional liquid to be stored from undulating. The functional liquid supply apparatus according to claim 2 , wherein the wave-dissipating means is a float member provided so as to cover substantially the entire liquid surface of the functional liquid stored in the functional liquid tank. The wave-dissipating means, in a state of communicating the bottom of the functional liquid tank portion, the functional liquid supply according to claim 2, characterized in that it is constituted by a plurality of partition walls as possible specification of the functional liquid tank portion apparatus. Functions described connection pipe block for connecting the functional liquid intake and pre Symbol Function flow outlet the functional liquid droplet ejecting heads, the more any one of claims 1 to 4, characterized in that it comprises Liquid supply device. It said connection tube block, the functional liquid supply device according to claim 5, characterized in that over the previous SL functional liquid intake are connected by bayonet joint. A tank plate on which a plurality of the functional liquid supply devices according to any one of claims 1 to 6 are mounted;
A head plate on which a plurality of the functional liquid droplet ejection heads are mounted corresponding to the plurality of functional liquid supply devices;
A carriage device, wherein a plurality of the functional liquid supply devices are collectively connected to the plurality of functional liquid droplet ejection heads by mounting the tank plate on the head plate. A carriage device according to claim 7 ;
Droplets comprising the a moving mechanism for relatively moving the follower over click in a second direction perpendicular to the first direction and the first direction with respect to the functional liquid droplet ejecting heads Discharge device.

Images