JP2005111808A - Method for cleaning liquid droplet discharging head, wiper/liquid droplet discharging device equipped with wiper, method for manufacturing electrooptical device, electrooptical device and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for cleaning the liquid droplet discharging head which can efficiently wipe the nozzle surface of the liquid droplet head by applying an appropriate amount of a cleaning liquid to a wiping sheet, the wiping device and the liquid droplet discharging device equipped with the wiping device and so forth. <P>SOLUTION: The method for cleaning the liquid droplet discharging head 41 wipes a functional fluid sticking to the nozzle surface 48 by feeding the wiping sheet 112 uniformly impregnated with the cleaning liquid in a specified direction in such a manner that the sheet 112 is pressed to the nozzle 48 of the liquid droplet discharging head 41. The wiping sheet 112 is impregnated with the cleaning liquid to such an extent that the impregnation state is beyond a surface wet level and below a saturated impregnation level. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a droplet discharge head that discharges a functional liquid onto a workpiece and performs film formation and the like, and more particularly, a droplet discharge head cleaning method, a wiping apparatus, and the like for wiping off a functional liquid adhering to a nozzle surface of the droplet discharge head And an electro-optical device manufacturing method, an electro-optical device, and an electronic apparatus.

Inkjet heads (droplet ejection heads) used in inkjet printers are capable of ejecting minute droplets with high precision to perform high-quality recording. It is known that it is used for a color filter substrate used for a liquid crystal display device and a droplet discharge device for forming a light emitting pixel of an organic EL device. In this droplet discharge device, a wiping device is mounted to appropriately manage the nozzles of the droplet discharge head. This wiping device has a pressure roller that presses the wiping sheet against the nozzle surface of the droplet discharge head, a sheet feeding means that sends the wiping sheet via the pressure roller, and a property similar to that of the solvent of the functional liquid or the solvent on the wiping sheet A cleaning liquid application means for applying a cleaning liquid having a wiping sheet with the wiping sheet pressed against the nozzle surface, moving the wiping sheet coated with the cleaning liquid in a predetermined wiping direction parallel to the nozzle surface, and wiping the nozzle surface. Like to do.
In this case, the cleaning liquid application unit has a plurality of nozzles arranged uniformly in the width direction of the wiping sheet, and a flow rate adjustment valve that adjusts the amount of cleaning liquid applied to the wiping sheet for each nozzle.
JP 2003-127405 A (pages 31-33, FIG. 17)

  In such a conventional wiping apparatus, the cleaning liquid can be uniformly applied to the wiping sheet. However, if the amount of the cleaning liquid to be applied is small, dirt such as a functional liquid remains on the nozzle surface of the droplet discharge head. In addition, when the amount of the cleaning liquid is large, there are problems such as liquid sag from the sheet, and excessive cleaning liquid infiltrates into the nozzle and mixes with the functional liquid, resulting in defective ejection during drawing.

  The present invention relates to a droplet discharge head cleaning method, a wiping device, and a droplet discharge device including the same, which can efficiently wipe the nozzle surface of the droplet discharge head by applying an appropriate amount of cleaning liquid to the wiping sheet. And an electro-optical device manufacturing method, an electro-optical device, and an electronic apparatus.

  In the method for cleaning a droplet discharge head according to the present invention, a wiping sheet is fed in a predetermined direction while a wiping sheet impregnated with a cleaning liquid is pressed against a nozzle surface of a droplet discharge head that discharges a functional liquid onto a workpiece. A method of cleaning a droplet discharge head for wiping off a functional liquid adhering to a nozzle surface, wherein the wiping sheet is impregnated with a cleaning liquid so as to be in a surface wet state or more and a saturated impregnation state or less.

  According to the above configuration, the cleaning liquid contained in the wiping sheet dissolves the functional liquid by wiping the nozzle surface of the droplet discharge head with the wiping sheet impregnated with the cleaning liquid, and the functional liquid adhered to the nozzle surface. Such dirt can be adsorbed to the wiping sheet. Also, in this case, by impregnating the wiping sheet with the cleaning liquid so that the surface is wet or less than the saturated impregnation state, functional liquid residue or excessive cleaning liquid remains on the nozzle surface due to the lack of cleaning liquid. Can be prevented. Thus, the nozzle surface can be efficiently wiped with a wiping sheet impregnated with an appropriate amount of cleaning liquid.

  According to another droplet discharge head cleaning method of the present invention, the wiping sheet is pressed in a predetermined direction while the wiping sheet impregnated with the cleaning liquid is pressed against the nozzle surface of the droplet discharge head that discharges the functional liquid onto the workpiece. Is a droplet discharge head cleaning method for wiping off the functional liquid adhering to the nozzle surface, and impregnating the wiping sheet with a cleaning liquid so that the saturated water absorption amount of the wiping sheet is 20% to 80%. It is characterized by that.

  According to this configuration, the amount of the cleaning liquid contained in the wiping sheet is 20% or more and 80% or less with respect to the saturated water absorption amount of the wiping sheet, so that the function to the nozzle surface that occurs when the amount of the cleaning liquid decreases. It is possible to prevent the remaining of dirt such as liquid, and to prevent excessive penetration of the cleaning liquid into the nozzle and liquid sag from the wiping sheet. By impregnating the wiping sheet with an appropriate amount of cleaning liquid in this way, waste of the cleaning liquid can be eliminated and the nozzle of the droplet discharge head can be kept in a stable state.

  Furthermore, in order to wipe off the nozzle surface efficiently, the amount of the cleaning liquid is preferably 30% or more and 60% or less with respect to the saturated water absorption amount of the wiping sheet.

  As the wiping sheet of the present invention, it is preferable to use either a 100% polyester sheet material or a 100% polypropylene sheet material. The sheet material preferably has a thickness of 0.4 mm to 0.6 mm.

  Since these sheet materials are excellent in corrosion resistance, solvent resistance, and durability against various materials used as functional fluids and their solvents, the sheet materials can be prevented from being torn or worn. Further, these sheet materials preferably have a thickness of 0.4 mm to 0.6 mm. According to this, dust generation due to friction with the nozzle surface or the like can be suppressed, and appropriate water absorption can be provided. Further, even when the wiping sheet is wound, it can be stored in the apparatus without being bulky.

  A wiping device according to the present invention is a wiping device that wipes, using a wiping sheet, a functional liquid adhering to a nozzle surface of a droplet discharge head that discharges the functional liquid onto a workpiece, and a sheet for feeding the wiping sheet A feeding means, a pressing means that presses the wiping sheet that is sent to the nozzle surface, and a cleaning liquid application means that is positioned before the wiping sheet in the feeding direction of the wiping sheet and applies a cleaning liquid to the wiping sheet, The cleaning liquid applying means applies the cleaning liquid to the wiping sheet so as to be in a surface wet state or more and a saturated impregnation state or less.

  According to this configuration, by applying the cleaning liquid to the wiping sheet so as to be in the surface wet state or more and in the saturated impregnation state, it is possible to efficiently wipe off the dirt such as the functional liquid adhering to the nozzle surface. Further, it is possible to reduce the ejection failure of the liquid droplet ejection head caused by the excessive or excessive amount of the cleaning liquid. And since a nozzle surface is wiped off by the wiping sheet always containing a new cleaning liquid, it can prevent that the cleaning liquid containing a functional liquid adheres to a nozzle surface again.

  Another wiping device of the present invention is a wiping device for wiping the functional liquid adhering to the nozzle surface of the droplet discharge head using a wiping sheet, the wiping sheet, a sheet feeding means for feeding the wiping sheet, A cleaning unit that includes a pressing unit that presses the wiping sheet that is sent to the nozzle surface, and a cleaning unit that is positioned in front of the pressing unit in the feeding direction of the wiping sheet and that applies a cleaning solution to the wiping sheet. Is characterized in that the cleaning liquid is applied so as to be 20% or more and 80% or less with respect to the saturated water absorption amount of the wiping sheet.

  Furthermore, in order to wipe off the nozzle surface efficiently, it is preferable that the cleaning liquid application unit applies the cleaning liquid so that the amount of the cleaning liquid is 30% to 60% with respect to the saturated water absorption amount of the wiping sheet.

  According to these configurations, since the amount of the cleaning liquid contained in the wiping sheet is managed within an appropriate range, the cleaning liquid can be eliminated and the nozzle surface can be wiped more efficiently. Then, the function recovery of the droplet discharge head can be performed reliably.

  A droplet discharge apparatus according to the present invention includes a droplet discharge head and a drawing unit that discharges a functional liquid with the droplet discharge head facing the workpiece to perform drawing. A droplet discharge device that scans and discharges a functional liquid to form a film forming portion on a work is provided with the above-described wiping device.

  According to this configuration, the nozzle surface of the droplet discharge head can be efficiently wiped (wiped) with an appropriate amount of cleaning liquid, realizing a stable discharge state of the droplet discharge head. Thus, it is possible to provide a droplet discharge apparatus that can obtain a high-quality film forming unit that is unlikely to cause defective discharge by the drawing operation on the workpiece.

  Moreover, it is preferable that the droplet discharge device of the present invention further includes a suction device that sucks the functional liquid from the droplet discharge head via a cap configured to be detachable from the nozzle surface.

  According to this configuration, a combination of capping for sucking the functional liquid with the cap in close contact with the droplet discharge head and sucking up the thickened functional liquid in the nozzle and wiping for wiping off dirt such as functional liquid remaining on the nozzle surface at that time is combined. The maintenance operation of the droplet discharge head can be performed in the same apparatus. Accordingly, it is possible to provide a droplet discharge device that can maintain a more stable discharge state.

  In this case, it is preferable that the apparatus further includes a moving table that supports the suction device and the wiping device adjacent to each other, and the moving table moves the suction device and the wiping device so as to sequentially face the droplet discharge head. .

  According to this configuration, it is possible to cause the suction device and the wiping device to face the droplet discharge head in order by this moving table while the droplet discharge head remains stationary. Therefore, a series of maintenance operations for recovering the function of the droplet discharge head, such as performing a wiping operation following the capping operation, and repeating these operations, can be performed continuously. Therefore, it is possible to provide a droplet discharge device that can maintain a more efficient and stable discharge state.

  The electro-optical device manufacturing method of the present invention is characterized by manufacturing using the above-described droplet discharge device.

  Similarly, the electro-optical device of the present invention is manufactured using the above-described droplet discharge device.

  According to these configurations, since the nozzle surface of the droplet discharge head is manufactured by using the droplet discharge device provided with the cleaning mechanism using the cleaning liquid application method capable of efficiently wiping the nozzle surface with an appropriate amount of liquid, A highly reliable electro-optical device can be manufactured. Examples of the electro-optical device include a liquid crystal display device, an organic EL (Electro-Luminescence) device, an electron emission device, a PDP (Plasma Display Panel) device, and an electrophoretic display device. The electron emission device is a concept including a so-called FED (Field Emission Display) device and SED (Surface-Conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. Further, a device for forming a transparent electrode (ITO) such as a liquid crystal display device can be considered.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described method for manufacturing the electro-optical device or the above-described electro-optical device.

  In this case, the electronic apparatus corresponds to various electric products in addition to a mobile phone and a personal computer equipped with a so-called flat display.

  According to the method for cleaning a droplet discharge head, the wiping device and the droplet discharge device including the same, the method for manufacturing the electro-optical device, the electro-optical device, and the electronic apparatus according to the present invention, an appropriate amount of the nozzle surface of the droplet discharge head is provided. Therefore, a highly reliable electro-optical device can be manufactured using a droplet discharge device that can reliably recover the function of the droplet discharge head and maintain a stable discharge state. Is possible.

  A droplet discharge device including a wiping device according to an embodiment of the present invention will be described. This droplet discharge device is used in the manufacturing process of a liquid crystal display device or an organic EL device which is a kind of flat display, uses a color filter material or a light-emitting material as a functional liquid, and moves from a droplet discharge head to a substrate (work). The functional liquid is discharged and drawn to form a desired color filter substrate, light emitting layer, or the like.

  As shown in FIG. 1 to FIG. 3, the droplet discharge device 1 is configured such that the droplet discharge head 1 and the work (substrate) W are relatively moved and scanned in the X-axis direction and the Y-axis direction. The drawing means 2 that selectively discharges the functional liquid from 41 to draw on the workpiece W, the maintenance means 3 that is attached to the drawing means 2 and restores the function of the droplet discharge head 41, and the droplet discharge head 41 And a liquid supply / recovery means 4 for supplying a liquid such as a functional liquid or a cleaning liquid to / from the maintenance means 3 and recovering unnecessary liquid, and an air supply means for supplying compressed air for driving / controlling each of these means 5 is provided. These means are associated and controlled by a host computer or the like (not shown).

  In addition, the droplet discharge device 1 includes a gantry 11 in which the angle 12 is assembled in a square shape, and a cabinet-shaped machine pedestal 13 attached to the gantry 11. A stone surface plate 71 is fixed on the gantry 11, and the drawing means 2 is disposed on the stone surface plate 71. Maintenance means 3 is disposed on the upper surface of the machine base 13 and a functional liquid supply tank 172 that supplies the functional liquid to the droplet discharge head 41 is supported. The cabinet portion of the machine base 13 includes a storage chamber 14 and a storage chamber 15, and tanks for storing functional liquid, cleaning liquid, and the like of the liquid supply / recovery means 4 are stored in the storage chamber 14. The storage chamber 15 stores air supply means 5 and is connected to a supply source of compressed air and compressed nitrogen gas outside the apparatus.

  The drawing unit 2 moves the main carriage 22 on which the droplet discharge head 41 is mounted, the Y-axis table 61 that moves the main carriage 22 in the Y-axis direction, and the suction table 54 on which the workpiece W is placed in the X-axis direction. X-axis table 51, and these are arranged on a stone surface plate 71. A head unit 21 having a plurality of (12) droplet discharge heads 41 mounted on the sub-carriage 31 is attached to the lower portion of the main carriage 22.

  The X-axis table 51 is disposed in the vicinity of the central portion on the stone surface plate 71, and the suction table 54, the θ table 53 that supports the suction table 54, and the θ table 53 are slidable in the X-axis direction. An X-axis air slider 52 to be supported, an X-axis linear motor (not shown) for moving the suction table 54 in the X-axis direction via the θ table 53, and an X-axis linear scale (not shown) provided to the X-axis air slider 52 ) And.

  The Y-axis table 61 is placed so as to straddle the X-axis table 51 on a Y-axis frame 60 with a stand erected on the four corners of the stone surface plate 71, and the bridge plate 26 that suspends the main carriage 22. A pair of Y-axis sliders 62 that both support the bridge plate 26 and are slidably supported in the Y-axis direction, a Y-axis linear scale 63 provided on the Y-axis slider 62, and a pair of Y-axis sliders 62 are used as a guide. A Y-axis ball screw 64 that moves the bridge plate 26 in the Y-axis direction, and a Y-axis motor (not shown) that rotates the Y-axis ball screw 64 forward and backward. The Y-axis motor is constituted by a servo motor. When the Y-axis motor rotates forward and backward, the bridge plate 26 screwed to the Y-axis ball screw 64 guides the pair of Y-axis sliders 62 as a guide. Move in the Y-axis direction. That is, as the bridge plate 26 moves, the main carriage 22 (head unit 21) reciprocates in the Y-axis direction.

  As shown in FIG. 4A, the droplet discharge head 41 has a so-called double nozzle array, and includes a functional liquid introduction portion 43 having a connection needle 42 and a head substrate 44 connected to the functional liquid introduction portion 43. And a head main body 45 which is connected to the functional liquid introducing portion 43 via the head substrate 44 and has an in-head flow path formed therein filled with the functional liquid. Each connection needle 42 is connected to a functional liquid supply tank 172 of the liquid supply / recovery means 4 via a pipe adapter 38 (details will be described later). The head body 45 includes a piezo (piezoelectric element) 46 and a head plate 47. The surface of the head plate 47 is a flat nozzle surface 48, and a number of discharge nozzles 49 are open on the nozzle surface 48. Then, a droplet is ejected from the ejection nozzle 49 by the action of the piezo 46.

  In this case, as shown in FIGS. 4B and 5, the head unit 21 includes a plurality (12) of droplet discharge heads 41, and the plurality of droplet discharge heads 41 are attached to the sub-carriage 31. The nozzle surfaces 48 are protruded downward in the formed openings and are arranged in two rows, and are fixed to the sub-carriage 31 by head support plates 37 applied from below.

  That is, the twelve droplet discharge heads 41 are divided into six head rows 40L and 40R each separated in the main scanning direction (X-axis direction), and have a desired drawing density for the workpiece W. In order to ensure, it is arranged at an angle. Furthermore, one head row 40L and the other head row 40R are arranged so that the nozzles 49 of the respective droplet discharge heads 41 are continuous in the sub-scanning direction (Y-axis direction) (partially overlapping drawing lines are formed). They are offset.

  The sub-carriage 31 includes a main body plate 33 in which openings for fixing the two head rows 40L and 40R are formed, and a pair of left and right reference pins 34 provided at intermediate positions in the long side direction of the main body plate 33. And a pair of left and right support members 32 that are attached to both long side portions of the main body plate 33 and are fixed to the main carriage 22. In addition, the sub-carriage 31 is provided with a pipe joint 35 that is located at one end of the sub-carriage 31 and connects each droplet discharge head 41 and the functional liquid supply tank 172 by pipes.

  The main carriage 22 is an “I” -shaped suspension member 23 fixed to the bridge plate 26, a θ table 24 attached to the suspension member 23, and a carriage body 25 suspended from the θ table 24. And is composed of. The carriage body 25 has a rectangular opening for loosely fitting the head unit 21, and the head unit 21 is positioned and fixed in this opening.

  The liquid supply / recovery means 4 includes a pressurized tank 171 in which the functional liquid is stored, a functional liquid supply tank 172 that is connected to the pressurized tank 171 through a tube and supplies the functional liquid to the droplet discharge head 41, and a cap. A reuse tank 173 for collecting functional liquid sucked from the droplet discharge head 41 via a unit 91 (described later), and a waste liquid tank 174 for recovering unnecessary functional liquid from a flushing unit 161 (described later). The cleaning liquid tank 175 feeds the cleaning liquid to the wiping unit 111 (described later). The liquid supply / recovery means 4 includes a pump and a tube associated with these tanks.

  The functional liquid supply tank 172 temporarily stores the functional liquid sent from the pressurizing tank 171 and supplies the functional liquid to the droplet discharge head 41 by using the water head difference. It is placed on the support stand.

  Here, a series of operations of the drawing means 2 will be briefly described. First, as a preparation before drawing work for discharging the functional liquid toward the work W, the position of the head unit 21 is corrected by a head recognition camera (not shown), and then the suction table is drawn by the work recognition camera (not shown). The position of the workpiece W set at 54 is corrected. Next, the workpiece W is reciprocated in the main scanning (X-axis) direction by the X-axis table 51, and a plurality of droplet discharge heads 41 are driven to selectively discharge droplets onto the workpiece W. Then, after the workpiece W is moved backward, the head unit 21 is moved in the sub-scanning (Y-axis) direction by the Y-axis table 61, and the workpiece W is reciprocated in the main scanning direction and the droplet discharge head 41 is driven again. Is done. In the present embodiment, the workpiece W is moved in the main scanning direction with respect to the head unit 21, but the head unit 21 may be moved in the main scanning direction. Alternatively, the work W may be fixed and the head unit 21 may be moved in the main scanning direction and the sub-scanning direction.

  In addition, the droplet discharge device 1 according to an embodiment of the present invention includes a pair of flushing units 161a and 161b as one of the function recovery units of the droplet discharge head 41, in addition to the units of the maintenance unit 3 described later. ing. The pair of flushing units 161a and 161b are disposed on both sides of the suction table 54 in the main scanning direction (X-axis direction) so as to be substantially the same height as the surface of the suction table 54. Just before the movement starts, the liquid droplet ejection head 41 receives the waste ejection. The functional liquid discharged to the flushing unit 161 is sucked by the above-described pump (not shown) and collected as the waste liquid in the above-described waste liquid tank 174.

  Next, the maintenance means 3 of this embodiment will be described. As shown in FIG. 6, the maintenance means 3 is in close contact with the nozzle surface 48 of the droplet discharge head 41 and sucks and removes the thickened functional liquid in the droplet discharge head 41, and the suction unit A wiping unit 111 for wiping off dirt such as functional liquid adhering to the nozzle surface 48 of the post-droplet discharge head 41, and an appropriate amount of functional liquid is discharged from the droplet discharge head 41 after the cleaning operation of the droplet discharge head 41. In order to measure whether or not the discharge is received, a discharge receiving unit 81 that receives the discharge, a dot dropout inspection unit 101 that checks dot dropout due to clogging of the nozzles 49 of the droplet discharge head 41, and these units are mounted on the common base 152. And a moving table 151 for supporting the same.

  The moving table 151 is disposed on the upper surface of the machine base 13 described above, a slider that supports a common table on which the units of the maintenance means 3 are placed, a ball screw 154 that is screwed to the slider, and a ball screw 154. , And a motor 153 that moves the moving table 151. The moving table 151 causes each unit of the maintenance means 3 to sequentially move in the X-axis direction with respect to the head unit 21 moved to the cleaning position by the Y-axis table 61.

  The cap unit 91 is provided with a plurality (12) of caps 92 that are detachably attached to the nozzle surface 48 of the droplet discharge head 41 and a plurality of caps 92 disposed at positions corresponding to the plurality of droplet discharge heads 41. A cap base 93, a lifting mechanism 94 for separating and contacting the plurality of caps 92 with respect to the droplet discharge head 41 via the cap base 93, and a pair of support legs (not shown) for supporting the cap base 93 so as to be lifted and lowered. And a suction pump for sucking the functional liquid from the droplet discharge head 41 via each cap 92. The cap unit 91 has a storage function for preventing the thickening of the functional liquid in the nozzle 49 and the functional liquid thickened from the droplet discharge head 41 by attaching the cap 92 to the nozzle surface 48 when the apparatus is not in operation. A suction function for sucking and a flushing receiving function for receiving discarded discharge from the droplet discharge head 41 when the apparatus is started up or when the workpiece W is exchanged are provided. On the other hand, the elevating mechanism elevates and lowers the cap 92 between a close contact position for storage and suction, a receiving position for receiving flushing, and a standby position.

  The discharge receiving unit 81 is disposed adjacent to the cap unit 91 in the X-axis direction. The discharge receiving unit 81 includes a plurality of (twelve) removable trays 82 that receive the functional liquid discharged from the droplet discharge head 41, and a plurality of receiving trays 82. And a mounting table 83 for mounting the receiving tray 82 at positions corresponding to the plurality of droplet discharge heads 41. When measuring the discharge amount, the functional liquid is discharged from each droplet discharge head 41 to each tray 82 a predetermined number of times, and then each tray 82 is transferred to an electronic balance (not shown) to drop the droplets in each tray 82. Measure the weight.

  The dot dropout inspection unit 101 is disposed on the drawing unit 2 side of the common base 152 adjacent to the cap unit 91 in the Y-axis direction, and is provided corresponding to the two head rows 40L and 40R of the head unit 21. It comprises a pair of optical detectors 102L and 102R. Each of the detectors 102L and 102R makes the light emitting element 103 such as a laser diode and the light receiving element 104 face each other, and determines whether or not a droplet discharged from the optical path between the elements 103 and 104 is blocked. ) Is detected. Then, droplets are ejected in order from each ejection nozzle 49 while moving the head unit 21 in the Y-axis direction so that the droplet ejection head 41 of each head row 40L, 40R passes directly above each detector 102L, 102R. And check for missing dots.

  Next, the wiping unit 111 will be described. As shown in FIG. 6, the wiping unit 111 is arranged adjacent to the cap unit 91 on the opposite side of the discharge receiving unit 81, and by the suction (cleaning) of the droplet discharge head 41 by the cap unit 91 or the like. This is a device for wiping off dirt such as functional liquid adhering to the nozzle surface 48 using the wiping sheet 112. The wiping unit 111 includes a wiping unit 141 that presses the wiping sheet 112 against the nozzle surface 48 and wipes it in a predetermined direction parallel to the nozzle surface 48, and a sheet supply unit 121 that feeds the wiping sheet 112 via the wiping unit 141. , Is composed of.

  As shown in FIG. 7, the sheet supply unit 121 includes an upper feeding reel 127 and a lower winding reel 129 that are detachably supported in a cantilevered manner on a frame 122 that is erected on one side in the Y-axis direction. A take-up motor 130 for taking up and rotating the take-up reel 129 via a timing belt 131. A sub-frame 123 is fixed to the upper portion of the frame 122, and a rotatable grip roller connected to a speed detector (encoder) 126 located at the front of the supply reel 127 is connected to the sub-frame 123. A speed detection roller 124 and a guide roller 125 are supported by both ends. Further, the supply reel 127 is provided with a torque limiter 128 that brakes rotation. Further, a sheet detector 134 is provided between the take-up reel 129 and the speed detection roller 124 at a position where the wiping sheet 112 is looked up, and the end portion of the wiping sheet 112 to be taken up is detected and fed out. The time for replacing the reel 127 and the take-up reel 129 is notified. A cleaning liquid pan 132 that receives the cleaning liquid is disposed below these components.

  As shown in FIG. 8, the wiping unit 141 includes a lifting frame 142 supported so as to be movable up and down between a pair of stands 143 and 143 erected on both sides in the Y-axis direction, a pair of cylinders 149 that lift and lower the lifting frame, A pressure roller 145 that is rotatably supported by the lifting frame 142, and a cleaning liquid discharge head 147 that is positioned immediately before the direction in which the wiping sheet 112 is fed to the pressure roller 145 and that applies a cleaning liquid in the width direction of the wiping sheet 112; And a cleaning liquid pan 144 that receives the cleaning liquid attached to the bottom of the opening of the lifting frame 142. The cleaning liquid discharge head 147 is provided with a large number of cleaning liquid nozzles (not shown), and a pipe connector 148 for connecting a cleaning liquid tube (not shown) is provided at the tail end of each cleaning liquid nozzle. Yes. An equal amount of cleaning liquid is supplied to each cleaning liquid nozzle via a cleaning liquid tube so that the cleaning liquid can be uniformly dropped in the width direction of the wiping sheet 112.

  The pressing roller 145 is configured by a freely rotating elastic roller having an elastic body such as rubber attached to the outer periphery. Then, as shown in FIG. 9B, the nozzles of the droplet discharge head 41 in which the wiping sheet 112 that circulates around the pressing roller 145 is mounted on the head unit 21 with the lifting frame 142 raised to the rising end position. It is configured to press against the surface 48.

  Further, since the wiping sheet 112 containing the cleaning liquid is in contact with the pressing roller 145, the members constituting the outer periphery of the pressing roller 145 may be deteriorated by the cleaning liquid containing the cleaning liquid or the corrosive functional liquid. Therefore, it is desirable to carry out periodic inspections and replacements, and to change the members constituting the outer periphery of the pressing roller 145 to those having better durability, depending on the cleaning liquid and functional liquid used. The pressing roller 145 includes left and right shaft portions that are rotatably supported by the lifting frame 142, and roller bodies that are detachably attached to both shaft portions. This is done by replacing the roller body.

  Furthermore, a method such as coating with a non-volatile material so that the cleaning liquid does not penetrate and get wet on the back surface of the wiping sheet 112 that is in contact with the pressing roller 145, and the wiping sheet 112 is not absorbed by the liquid absorbing layer. By adopting a multi-layer structure of layers, it is possible to reduce the deterioration of the pressure roller 145 as described above if moisture-proofing is performed in advance. Further, the range of selection of the members constituting the outer periphery of the pressing roller 145 is widened and the maintenance thereof is not only reduced, but depending on the surface state of the back surface side of the wiping sheet 112, the pressing roller 145 and the wiping sheet 112 are also reduced. It is also possible to prevent slippage.

  Here, the control of the wiping unit 111 will be described with reference to FIG. The wiping sheet 112 fed out from the feeding reel 127 is sandwiched between the speed detection rollers 124a and 124b and guided by the guide roller 125. It turns and is taken up on the take-up reel 129. The winding motor 130 is controlled at a winding speed by a speed detector (encoder) 126 connected to the speed detection roller 124 at all times. On the other hand, the torque limiter 128 attached to the feeding reel 127 controls the feeding reel 127 so as to act in a braking manner in the winding direction. Therefore, the wiping sheet 112 is always fed in a stretched state and wound up so as not to be slack. In the embodiment of the present invention, the pressing roller 145 is a driven roller, but it may be configured to feed the wiping sheet 112 more reliably using this as a driving roller. Furthermore, in the embodiment of the present invention, the sheet supply unit 121 and the wiping unit 141 are independent, but a configuration in which they are integrated into the same frame is also possible.

  Further, the wiping operation of the droplet discharge head 41 is performed according to the timing chart shown in FIG. First, the wiping unit 111 is moved forward in the X-axis direction by the moving table 151. When the wiping sheet 112 approaches the head row 40L, the feeding of the wiping sheet 112 is started at the timing t1, and the cleaning liquid is discharged and wetted. The elevating frame 142 of the wiping unit 141 rises and comes into contact with the nozzle surface by the pressing roller 145 at the timing t2. The wiping unit 111 continues to move as it is, and at the timing t3 when the nozzle surface of the head row 40L is wiped, the feeding of the wiping sheet 112 is stopped and the discharge of the cleaning liquid is also stopped. While the elevating frame 142 is lifted, the head head moves toward the next head row 40R, and when it approaches the head row 40R, the feeding of the wiping sheet 112 is started again at the timing t4 and the cleaning liquid is discharged to wipe the nozzle surface of the head row 40R. . When the wiping operation is completed at the timing t6, the lifting frame 142 is lowered and the feeding of the wiping sheet 112 and the discharge of the cleaning liquid are stopped. The forward movement of the wiping unit 111 is stopped when the timing of t6 is slightly passed, and then moved backward to return to the original position. In this case, the wiping unit 111 is moved and wiped with respect to the stopped droplet discharge head 41, but the wiping unit 111 is fixed and the droplet discharge head 41 (head unit 21) is moved. It may be configured.

  Next, the amount of cleaning liquid applied to the cleaning liquid supply system and the wiping sheet will be described with reference to FIGS. The cleaning liquid supply system includes a cleaning liquid tank 175 in which the cleaning liquid is stored, a plurality of flow rate adjustment valves 133 provided on a support plate suspended on the common base 152, and a cleaning liquid for each flow rate adjustment valve 133 and the wiping unit 141. The cleaning liquid tube is connected to the discharge head 147, and the manifold branches the cleaning liquid tube upstream of the flow rate adjustment valve 133. Each flow rate adjusting valve 133 is configured by an air operated valve with a flow rate adjusting function, and ON / OFF (open / close) the supply of the cleaning liquid to each of a large number of cleaning liquid nozzles provided in the cleaning liquid discharge head 147. The amount of cleaning liquid to be supplied can be adjusted. In the present embodiment, the amount of cleaning liquid is adjusted in advance by the flow rate adjusting valve 133, and the flow rate adjusting valve 133 is opened and closed in conjunction with the wiping operation of the wiping unit 111 as described above.

  Further, the cleaning liquid stored in the cleaning liquid tank 175 is pressurized with nitrogen gas so as not to deteriorate depending on the type of the cleaning liquid, and is supplied to each of the above-described cleaning liquid nozzles via the flow rate adjusting valve 133.

Next, the cleaning liquid will be described. In the present embodiment, a cleaning liquid (a solvent for the functional liquid or a substance having a property similar to this) is selected for the functional liquid as described below.
Functional liquid; Cleaning liquid Metal wiring material; Aliphatic unit cost hydrogen type color filter material such as n-decane, n-tetradecane, n-dodecane, etc .; Thinner type (mixture of ether alcohols and esters)
CF overcoat; thinner (mixture of ether alcohols and esters)
Organic EL light-emitting materials; Aromatic hydrocarbons such as xylene and toluene Polyethylenedioxythiophene (PEDOT); Alcohols such as pure water and ethanol, or a mixture of pure water and alcohols such as ethanol Alignment film materials; Ketones

  By the way, in this embodiment, dirt such as functional liquid adhering to the nozzle surface 48 of the droplet discharge head 41 is efficiently adsorbed to the wiping sheet 112, and the function of the droplet discharge head 41 after the wiping operation is more reliably recovered. In order to achieve this, the wiping sheet 112 is impregnated with the cleaning liquid so as to be in a surface wet state or more and a saturated impregnation state or less.

  Specifically, as an element for determining the amount of cleaning liquid, paying attention to the relationship between different cleaning liquids depending on the functional liquid used and the wiping sheet 112 to be used, the saturated water absorption amount for each different cleaning liquid with respect to the wiping sheet 112 is set as the fiber product of JISL1907. It calculated | required based on the water absorption test method. The result is shown in FIG.

  As can be seen from FIG. 12, even if the wiping sheet 112 is the same, the saturated water absorption amount is different for each type of cleaning liquid. Therefore, it can be predicted that if the cleaning liquid is applied to the wiping sheet 112 in excess of the saturated water absorption amount, the possibility that the cleaning liquid becomes excessive and remains on the nozzle surface 48 of the droplet discharge head 41 will increase. Further, it is only necessary to actually change the amount of the cleaning liquid and test the relationship with the wiping property on the nozzle surface 48 to obtain an appropriate amount range.

  Therefore, the test was performed under the following conditions, taking as an example a cleaning solution when the metal wiring material is a functional solution. As the cleaning liquid, n-decane was used, and as the wiping sheet 112, 100% polyester using a super fine yarn and having a thickness of 0.5 mm was used. This material is employed because it has low dust generation and is excellent in solvent resistance and durability. Further, this material has a thickness of 0.4 mm to 0.6 mm in order to hold an appropriate cleaning liquid on the surface of the wiping sheet 112.

  In this case, it is known that the saturated water absorption amount of the wiping sheet 112 is 0.55 ml / cubic centimeter from the result shown in FIG. Based on this, the droplet discharge head 41 was wiped while changing the coating amount (water absorption amount) of the cleaning liquid, and the test discharge was performed to evaluate its stability. The test result of FIG. 13 was obtained.

  According to the test result of FIG. 13, when the cleaning liquid amount is 10% with respect to the saturated water absorption amount of the wiping sheet 112 (0.55 ml / cubic centimeter = 100%), the functional liquid remains on the nozzle surface 48. At 80%, the functional liquid does not remain on the nozzle surface 48, but the film drawn in the subsequent test discharge becomes thin, that is, the functional liquid tends to be diluted with the cleaning liquid. It is thought that it infiltrated inside. When the amount of the cleaning liquid was further increased to 100%, it was apparent that the cleaning liquid remained on the nozzle surface 48.

  That is, the wiping sheet 112 requires at least a cleaning liquid that can dissolve the functional liquid adhering to the nozzle surface 48 of the droplet discharge head 41 and has a water absorption capacity that can absorb and hold the dissolved functional liquid and dirt. It is considered that the application amount (water absorption amount) of the cleaning liquid that makes the wiping sheet 112 absorb water so that the dirt once adsorbed and held is not transferred to the nozzle surface 48 again is sufficient.

  From these results, when the wiping sheet 112 having a polyester of 100% and a thickness of 0.5 mm is used, it is desirable that the amount of the cleaning liquid is 20% or more and 80% or less with respect to the saturated water absorption amount of the wiping sheet 112. In particular, 40% or more and 60% or less are more preferable.

  By using such a cleaning liquid amount management method, the nozzle surface 48 of the droplet discharge head 41 can be efficiently wiped with the wiping sheet 112 impregnated with an appropriate amount of cleaning liquid. Therefore, the droplet discharge head 41 can maintain a stable discharge state, and can improve the film formation quality of the functional liquid drawn by the droplet discharge head 41. It should be noted that the amount of cleaning liquid applied to the wiping sheet 112 is grasped not by the amount of cleaning liquid but by the ratio (percentage) of the saturated water absorption amount of the wiping sheet 112, so that the results are almost the same even when other cleaning liquids are used. However, preferably, the saturated water absorption amount of the cleaning liquid to be used is obtained for the wiping sheet 112 to be used, and an appropriate amount range of the cleaning liquid is grasped.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 14 is a flowchart showing the manufacturing process of the color filter, and FIG. 15 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S11), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S12), the bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 15B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 15C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition 507b partition each pixel region 507a, and in the subsequent colored layer forming process, the colored layers (film forming units) 508R, 508G, and 508B are formed by the droplet discharge head 41. The landing area of the functional droplet is defined when forming the.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material of the bank 503, a resin material whose coating film surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. The landing position accuracy is improved.

  Next, in the colored layer forming step (S13), as shown in FIG. 15D, functional droplets are ejected by the droplet ejection head 41 and land in each pixel region 507a surrounded by the partition wall portion 507b. Let In this case, using the droplet discharge head 41, functional liquids (filter materials) of three colors R, G, and B are introduced to discharge functional droplets. Note that the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. When the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S14), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 16 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 15, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 520 is roughly composed of a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 16 are formed at a predetermined interval. A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. In addition, the above-described sealing material 529 can be printed by the droplet discharge head 41. Further, the first and second alignment films 524 and 527 can be applied by the droplet discharge head 41.

FIG. 17 is a cross-sectional view of an essential part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 18 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also.

  Next, FIG. 19 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 stacked on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2 and the} like, and is laminated on the inorganic bank layer 618a. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. In addition, you may further form the other functional layer which has another function adjacent to this light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 20, the display device 600 includes a bank part forming step (S21), a surface treatment step (S22), a hole injection / transport layer forming step (S23), a light emitting layer forming step (S24), It is manufactured through an electrode formation step (S25). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S21), as shown in FIG. 21, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S22), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using oxygen as a processing gas, for example. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane. )
By performing this surface treatment process, when forming the functional layer 617 using the droplet discharge head 41, the functional droplet can be landed more reliably on the pixel region, and has landed on the pixel region. It is possible to prevent the functional droplet from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the suction table 54 of the droplet discharge device 1 shown in FIG. 3, and the following hole injection / transport layer forming step (S23) and light emitting layer forming step (S24) are performed. .

  As shown in FIG. 23, in the hole injection / transport layer forming step (S23), the first composition containing the hole injection / transport layer forming material is transferred from the droplet discharge head 41 into each opening 619 that is a pixel region. To discharge. Thereafter, as shown in FIG. 24, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S24) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform a surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 25, a pixel region (with the second composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 25)) as a functional droplet is used. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 26, a hole injection / transport layer 617a is obtained. A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the droplet discharge head 41, as shown in FIG. 27, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and green) are performed. A light emitting layer 617b corresponding to (G)) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S25).

In the counter electrode forming step (S25), as shown in FIG. 28, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as electrodes, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are provided as appropriate.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 29 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701 and a second substrate 702 that are disposed to face each other, and a discharge display portion 703 that is formed therebetween. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence. The red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the suction table 54 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the droplet discharge head 41. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
In the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the droplet ejection head 41, and the corresponding color In the discharge chamber 705.

Next, FIG. 30 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 includes a first substrate 801, a second substrate 802, and a field emission display unit 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 31A, and when these are formed, as shown in FIG. 31B. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is an external appearance perspective view of the droplet discharge device of an embodiment. It is a side view of the droplet discharge device of the embodiment viewed from the right side of FIG. It is a top view which omitted a part of droplet discharge device of an embodiment. 2A is a perspective view of a droplet discharge head according to an embodiment, and FIG. 2B is a cross-sectional view of a main part of the droplet discharge head. It is a top view of the head unit of an embodiment. It is a perspective view of the maintenance means containing the wiping unit of embodiment. It is a perspective view of the sheet supply unit of an embodiment. It is a perspective view of the wiping unit of an embodiment. (A) is a schematic diagram of the sheet supply unit and the wiping unit of the embodiment, (b) is a diagram showing the positional relationship of the pressing roller and the cleaning liquid discharge head with respect to the nozzle surface. It is a time chart which shows the wiping work by the wiping unit of embodiment. It is a schematic diagram of the supply system of the cleaning liquid in the wiping unit of the embodiment. It is the saturated water absorption amount of each cleaning liquid with respect to the wiping sheet of the embodiment. It is a wiping test result in the wiping unit of the embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Droplet discharge device 21 Head unit 41 Droplet discharge head 48 Nozzle surface 49 Nozzle 111 Wiping unit 112 Wiping sheet 121 Sheet supply unit 141 Wiping unit 145 Press roller 147 Cleaning liquid discharge head

Claims (14)

Liquid that wipes away the functional liquid adhering to the nozzle surface by feeding the wiping sheet in a predetermined direction with the wiping sheet impregnated with the cleaning liquid pressed against the nozzle surface of the droplet discharge head that discharges the functional liquid onto the workpiece. A method of cleaning a droplet discharge head,
A cleaning method for a droplet discharge head, wherein the wiping sheet is impregnated with the cleaning liquid so as to be in a surface wet state or more and a saturated impregnation state or less. Liquid that wipes away the functional liquid adhering to the nozzle surface by feeding the wiping sheet in a predetermined direction with the wiping sheet impregnated with the cleaning liquid pressed against the nozzle surface of the droplet discharge head that discharges the functional liquid onto the workpiece. A method of cleaning a droplet discharge head,
A method of cleaning a droplet discharge head, wherein the wiping sheet is impregnated with the cleaning liquid so as to be 20% or more and 80% or less with respect to a saturated water absorption amount of the wiping sheet.   3. The method of cleaning a droplet discharge head according to claim 2, wherein the wiping sheet is impregnated with the cleaning liquid so as to be 30% or more and 60% or less with respect to the saturated water absorption amount of the wiping sheet.   4. The method for cleaning a droplet discharge head according to claim 1, wherein any one of a 100% polyester sheet material and a 100% polypropylene sheet material is used as the wiping sheet.   The method of cleaning a droplet discharge head according to claim 4, wherein the sheet material has a thickness of 0.4 mm to 0.6 mm. A wiping device that wipes the functional liquid adhering to the nozzle surface of the droplet discharge head that discharges the functional liquid onto the workpiece using a wiping sheet,
The wiping sheet;
Sheet feeding means for feeding the wiping sheet;
A pressing means for pressing the wiping sheet to be sent against the nozzle surface;
A cleaning liquid application means for applying a cleaning liquid to the wiping sheet, positioned in front of the wiping sheet in the feeding direction with respect to the pressing means, and the cleaning liquid application means is saturatedly impregnated to the wiping sheet with a surface wet state or more. A wiping apparatus, wherein the cleaning liquid is applied so as to be equal to or less than a state. A wiping device that wipes the functional liquid adhering to the nozzle surface of the droplet discharge head that discharges the functional liquid onto the workpiece using a wiping sheet,
The wiping sheet;
Sheet feeding means for feeding the wiping sheet;
A pressing means for pressing the wiping sheet to be sent against the nozzle surface;
A cleaning liquid applying means for applying a cleaning liquid to the wiping sheet, positioned in front of the wiping sheet in the feeding direction with respect to the pressing means, wherein the cleaning liquid coating means is 20% or more of the saturated water absorption amount of the wiping sheet. A wiping apparatus, wherein the cleaning liquid is applied to the wiping sheet so that the amount is 80% or less.   The wiping apparatus according to claim 7, wherein the cleaning liquid coating unit applies the cleaning liquid to the wiping sheet so as to be 30% to 60% with respect to a saturated water absorption amount of the wiping sheet. A droplet discharge head; and a drawing means for performing drawing by discharging the functional liquid with the droplet discharge head facing the workpiece, and the functional liquid is discharged while relatively scanning the droplet discharge head and the workpiece. In a droplet discharge device that discharges to form a film forming portion on the workpiece,
A droplet discharge device comprising the wiping device according to claim 6.   The liquid droplet ejection apparatus according to claim 9, further comprising a suction device that sucks the functional liquid from the liquid droplet ejection head through a cap configured to be detachable from the nozzle surface. A moving table that supports the suction device and the wiping device adjacent to each other;
The droplet discharge device according to claim 10, wherein the moving table moves the suction device and the wiping device so as to face the droplet discharge head in order.   12. A method for manufacturing an electro-optical device, wherein the method is manufactured using the droplet discharge device according to claim 9.   An electro-optical device manufactured using the droplet discharge device according to claim 9. An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 12 or the electro-optical device according to claim 13.

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