JP2007130597A - Method and apparatus for inspecting landing position from liquid droplet ejection head, method of manufacturing electro-optical device, electro-optical device and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To suitably inspect a landing position of a liquid droplet from a liquid droplet ejection head into which a volatile liquid is introduced. <P>SOLUTION: A method of inspecting the landing position from the liquid droplet ejection head comprises the steps of: setting a plotting area RdA having the width corresponding to the length of a nozzle row on an inspection work Wc and also setting an inspection area RcA in the central part of the plotting area RdA; setting a plurality of plotting rows A1-A15 which correspond to the nozzle row and are displaced at predetermined plotting pitches in the main scanning direction, in the plotting area RdA; and ejecting and landing the liquid droplet on each of non-inspection plotting rows A1-A10 other than actual inspection plotting rows A11-A14 of the plurality of plotting rows in the inspection area RcA, then ejecting and landing the liquid droplet on each of actual inspection plotting rows A11-A14; and thereby image-recognizing the landing positions of the liquid droplets landed on the inspection area RcA. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a landing position inspection method for a droplet discharge head that discharges droplets by an inkjet method, a landing position inspection device for a droplet discharge head, a method for manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus. .

Conventionally, functional droplets for inspection are landed on the alignment mask (inspection workpiece) from a droplet discharge head into which a functional liquid (liquid) has been introduced, and the landing positions of the functional droplets are inspected by recognizing the landing positions. A method for inspecting the landing position of a droplet discharge head is known (for example, see Patent Document 1).
JP 2004-141758 A

  By the way, as a liquid introduced into the droplet discharge head, a volatile liquid using a volatile solvent (organic solvent) as a solvent may be used. In this case, the solvent volatilizes immediately from the droplets that have landed on the inspection work. For this reason, in the conventional landing position inspection method, it is not possible to appropriately recognize the image of the landed droplet, and it is not possible to accurately measure the landing position. In particular, when a colorless and transparent solute is used, only a colorless and transparent solute remains after the solvent is volatilized, so that it is very difficult to recognize the image.

  The present invention relates to a droplet discharge head landing position inspection method, a droplet discharge head landing position inspection device capable of appropriately inspecting a droplet landing position for a droplet discharge head introduced with a volatile liquid, An object of the present invention is to provide an electro-optical device manufacturing method, an electro-optical device, and an electronic apparatus.

  According to the droplet ejection head landing position inspection method of the present invention, a droplet ejection head having a nozzle row composed of a plurality of nozzles and introducing a volatile liquid is moved relative to an inspection work in the main scanning direction. On the other hand, in the landing position inspection method of the droplet discharge head for performing inspection drawing and inspecting the drawing result, a drawing area having an area width corresponding to the row length of the nozzle row is set on the inspection work, An area setting step for setting an inspection area at the center of the drawing area, a drawing line setting process for setting a plurality of drawing lines corresponding to the nozzle rows and arranged at a predetermined drawing pitch in the main scanning direction in the drawing area; A drawing step of discharging and landing droplets from the nozzle row of the droplet discharge head to each drawing row of the drawing region, and an image recognition step of recognizing the landing position of the droplet that has landed on the inspection region, Drawing worker In, among the plurality of drawing columns, after the ejection-landed on uninspected draw string other than the actual inspection drawing sequence included in the examination region, and performing the discharge-landed on actual inspection drawing column.

  In addition, the droplet ejection head landing position inspection apparatus of the present invention has a nozzle array composed of a plurality of nozzles and a droplet ejection head into which a volatile liquid is introduced relative to an inspection work. In a landing position inspection apparatus for a droplet discharge head that performs drawing for inspection and inspects the drawing result while moving, a moving unit that relatively moves the droplet discharge head in the main scanning direction with respect to the inspection workpiece; A drawing area having an area width corresponding to the row length of the nozzle array is set on the inspection work, and an area setting means for setting the inspection area at the center of the drawing area, and the drawing area corresponding to the nozzle array and The drawing row setting means for setting a plurality of drawing rows arranged at a predetermined drawing pitch in the main scanning direction, the droplet discharge head, and the moving means are controlled to draw each drawing region from the nozzle row of the droplet discharge head. On the other hand, a control means for discharging and landing droplets, and an image recognition means for recognizing the landing position of the droplets that have landed on the inspection area, the control means is provided in the inspection area among a plurality of drawing rows. It is characterized by discharging and landing on a non-inspection drawing row other than the actual inspection drawing row included, and then discharging and landing on the actual inspection drawing row.

  According to these configurations, since the droplets land on the non-inspection drawing row before the droplets are ejected and landed on the actual inspection drawing row, the solvent volatilizes from the droplets landed on the non-inspection drawing row. In the state where the solvent concentration in the atmosphere on the drawing region is increased, it is possible to eject and land droplets on the actual inspection drawing row. For this reason, the volatilization rate of the solvent from the droplets that have landed on the actual inspection drawing row can be slowed down, and the landing position can be appropriately recognized as an image. Therefore, it is possible to appropriately inspect the landing position of the liquid droplet ejection head into which the volatile liquid is introduced. The predetermined drawing pitch may not be equal pitch.

  Furthermore, in the case of a solution in which a colorless and transparent solute is dissolved in a volatile solvent, the present invention is particularly useful because only a colorless and transparent solute remains when the solvent volatilizes. Note that the volatile liquid is a concept including a volatile solvent itself in which a solute is not dissolved, and nothing remains when the solvent volatilizes. Therefore, the present invention is particularly useful also in this case.

  In the above landing position inspection method for the droplet discharge head, in the drawing process, when discharging and landing on the non-inspection drawing row, the discharge and landing are sequentially performed from the non-inspection drawing row on the outer side in the forward direction toward the inspection region. After performing, it is preferable to discharge and land in order from the non-inspection drawing row outside the backward movement direction toward the inspection region.

  According to this configuration, at the time of forward movement and backward movement, droplets are ejected and landed in order from the outer non-inspection drawing row (distant from the inspection region) toward the inner (near inspection region) non-inspection drawing row. . For this reason, the solvent volatilized from the droplets that landed on the relatively non-inspection drawing row on the relatively inner side is already concentrated on the inspection area without diffusing outside because the solvent atmosphere has already been formed on the outside. Will do. Therefore, the solvent concentration in the atmosphere on the inspection region can be effectively increased, and the volatilization rate of the droplets landed on the actual inspection drawing row can be further reduced.

  Another method for inspecting the landing position of a droplet discharge head according to the present invention includes a droplet discharge head having two nozzle rows each composed of a plurality of nozzles and introducing a volatile liquid to an inspection work. In a method for inspecting the landing position of a droplet discharge head that performs drawing for inspection by two nozzle rows while relatively moving in the main scanning direction and inspects the drawing result, two nozzle rows are placed on the workpiece for inspection. An area setting step for setting a drawing area having an area width corresponding to the column length and an inspection area in the center of the drawing area; and a main scanning direction for each nozzle line in the drawing area corresponding to each nozzle line A drawing row setting step for setting a plurality of drawing rows arranged at a predetermined drawing pitch, and a drawing step for discharging and landing droplets on each drawing row in the drawing region from the two nozzle rows of the droplet discharge head And inspection And an image recognition process for recognizing the landing position of the liquid droplets that have landed on the area. In the drawing process, each nozzle row is a non-real inspection drawing row other than the actual inspection drawing row included in the inspection region among the corresponding drawing rows. It is characterized in that after the ejection / landing is performed on the inspection drawing row, the ejection / landing is performed on the actual inspection drawing row.

  In addition, the droplet discharge head landing position inspection apparatus according to the present invention includes a droplet discharge head that has two nozzle rows each composed of a plurality of nozzles and introduces a volatile liquid to an inspection work. In a droplet discharge head landing position inspection apparatus that performs drawing for inspection by two nozzle rows while relatively moving in the main scanning direction and inspects the drawing result, the droplet discharge head is attached to the inspection work. An area for setting a drawing area having an area width corresponding to the row length of the two nozzle rows on the inspection work and a moving means for relatively moving in the main scanning direction, and setting an inspection area at the center of the drawing area A setting means, a drawing row setting means for setting a plurality of drawing rows corresponding to each nozzle row and arranged at a predetermined drawing pitch in the main scanning direction for each nozzle row, a droplet discharge head, and a movement; Control means for ejecting and landing droplets from the two nozzle rows of the droplet discharge head to each drawing row in the drawing region by controlling the stage, and an image of the landing position of the droplets that landed on the inspection region An image recognizing unit for recognizing, and the control unit controls each nozzle row to discharge and land on a non-inspection drawing row other than the actual inspection drawing row included in the inspection region among a plurality of corresponding drawing rows. Then, it is discharged and landed on the actual inspection drawing line.

  According to these configurations, since the droplets land on the non-inspection drawing row before the droplets are ejected and landed on the actual inspection drawing row, the solvent volatilizes from the droplets landed on the non-inspection drawing row. In the state where the solvent concentration in the atmosphere on the drawing region is increased, it is possible to eject and land droplets on the actual inspection drawing row. For this reason, the volatilization rate of the solvent from the droplets that have landed on the actual inspection drawing row can be slowed down, and the landing position can be appropriately recognized as an image. Therefore, it is possible to appropriately inspect the landing positions of droplets even for a droplet discharge head having two nozzle rows into which a volatile liquid is introduced.

  In the landing position inspection method for the droplet discharge head, the drawing pitch is set shorter than the distance between the two nozzle rows in the drawing row setting step, and the two nozzle rows straddle the inspection region in the drawing step. From one state, one nozzle row is discharged from the two nozzle rows so that one nozzle row is discharged and landed in order from the non-inspection drawing row outside in the forward direction toward the inspection region to the actual inspection drawing row in the half of the inspection region. -After landing, it is preferable to discharge and land on the actual inspection drawing row in the remaining half of the inspection region by the other nozzle row.

  According to this configuration, at the time of forward movement, droplets are ejected and landed in order from the outer non-inspection drawing row to the inner non-inspection drawing row. For this reason, the solvent volatilized from the droplets landed on the relatively non-inspection drawing row is relatively concentrated on the inspection area without diffusing outside because the solvent atmosphere has already been formed on the outside. Will do. Therefore, the solvent concentration in the atmosphere on the inspection region can be effectively increased, and the volatilization rate of the droplets landed on the actual inspection drawing row can be further reduced. In addition, since the actual inspection drawing row is ejected and landed from the two nozzle rows, both nozzle rows can be inspected simultaneously, and the inspection time can be shortened.

  In these cases, the nozzle row is located in the middle portion, and a plurality of actual ejection nozzles that eject droplets in the actual drawing process on the workpiece, and the nozzle rows are located at both ends so that the droplets are not ejected in the actual drawing process. In the inspection area setting step, the inspection area is preferably set corresponding to the plurality of actual discharge nozzles.

According to this configuration, the landing position accuracy is inspected on both outer sides in the direction orthogonal to the main scanning direction of the inspection area in synchronization with the discharge and landing of the droplets from the plurality of actual discharge nozzles on the inspection area It is possible to eject and land droplets from a plurality of non-ejection nozzles that do not need to be performed. For this reason, the volatilization rate of the droplets that have landed on the actual inspection drawing row can be further reduced.
In the actual drawing process for a workpiece, when all nozzles are used as discharge nozzles, a preliminary drawing area is set on both sides of the drawing area in the direction orthogonal to the main scanning direction, and droplets are discharged to the drawing area. -It is preferable to discharge and land droplets on the preliminary drawing area before landing.

  In these cases, it is preferable that the droplets are ejected and landed from the nozzle row in the drawing process while the droplet ejection head and the inspection work are stationary.

  According to this configuration, it is possible to prevent the landing position of the liquid droplet from being shifted, so that an accurate inspection can be performed. That is, when droplets are ejected and landed while the droplet discharge head and the inspection work are relatively moved, an air flow is generated between the nozzle surface of the droplet discharge head and the surface of the inspection work. However, according to the present invention, there is no such a problem that the landing position of the droplet may be shifted.

  In these cases, in the drawing row setting step, a plurality of actual inspection drawing rows are set for each nozzle row, and in the image recognition step, a plurality of liquid droplets corresponding to each nozzle are recognized, and a plurality of landing position data are set. Is preferably averaged for each nozzle.

  According to this configuration, by using the landing position data averaged for each nozzle, it is possible to improve the accuracy of the landing position measurement.

  In these cases, in the image recognition step, it is preferable to pick up an image of a droplet that has landed on the inspection region using an imaging means with coaxial incident illumination.

  According to this configuration, although the light irradiated to the central portion of the droplet reflects straight (toward the lens of the imaging means), the light irradiated to the peripheral portion of the droplet reflects obliquely. As an image, the peripheral part is black and the central part is reflected and appears in a white donut shape. And the area | region of the whole droplet (dot) is detectable by painting out the white part of the center part by image processing. For this reason, even when the landed droplet is colorless and transparent, it can be appropriately imaged.

  The electro-optical device manufacturing method of the present invention is characterized in that a film-forming portion made of a functional liquid is formed on a workpiece using the droplet discharge head inspected by the above-described landing position inspection method of the droplet discharge head.

  In addition, the electro-optical device according to the present invention is characterized in that a film forming portion made of a functional liquid is formed on a workpiece using the droplet discharge head inspected by the above-described landing position inspection method of the droplet discharge head.

  According to these configurations, the functional liquid droplet ejection head inspected by the liquid droplet ejection head landing position inspection method capable of appropriately inspecting the liquid droplet landing position for the liquid droplet ejection head introduced with the volatile liquid. By using this, it is possible to manufacture a highly reliable electro-optical device. As an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described method for manufacturing the electro-optical device or the above-described electro-optical device.

  In this case, examples of the electronic device include a mobile phone and a personal computer equipped with a so-called flat panel display, and various electric products.

  Hereinafter, a landing position inspection method for a functional liquid droplet ejection head according to the present invention will be described with reference to the accompanying drawings. This landing position inspection method is performed, for example, in order to inspect the assembly accuracy at the time of assembly of a head unit equipped with a plurality of functional liquid droplet ejection heads. This is performed using a droplet discharge device that discharges (draws) functional droplets onto a workpiece. That is, the liquid droplet ejection apparatus according to the present embodiment performs an actual drawing process on the substrate and also performs a landing position inspection process by performing an inspection drawing on the inspection work. Therefore, first, the droplet discharge device according to the embodiment and the actual drawing process using the droplet discharge device will be described.

  As shown in FIG. 1, a droplet discharge device 1 (landing position inspection device) includes a drawing device 2 equipped with a functional droplet discharge head 17 and a maintenance device (not shown). While performing the maintenance process (function maintenance / recovery) of the head 17, the drawing apparatus 2 performs the drawing process of discharging functional liquid droplets onto the substrate W (workpiece). In addition, the droplet discharge device 1 incorporates a controller 3 (control means, see FIG. 4) and the like for comprehensively controlling each part.

  The drawing apparatus 2 includes an XY movement mechanism 11 including an X-axis table 12 and a Y-axis table 13 orthogonal to the X-axis table 12, two carriages 14 individually attached to the Y-axis table 13, and each carriage 14 A head unit 15 (see FIG. 2) that is suspended from the carriage 14 and has a plurality (four) of functional droplet ejection heads 17 mounted thereon, and an image recognition means 16 that recognizes an image of the substrate W, the head unit 15, drawing results, and the like. And.

  A region where the movement locus of the substrate W by the X-axis table 12 and the movement locus of the carriage 14 by the Y-axis table 13 intersect is a drawing area for performing drawing processing, and the movement of the head unit 15 by the Y-axis table 13. A region outside the X-axis table 12 on the trajectory and outside (right side in the figure) is a maintenance area, and a part of the maintenance device is installed in this maintenance area. On the other hand, the area on the front side of the X-axis table 12 is a substrate carry-in / out area where the substrate W is carried into / out of the droplet discharge device 1.

  In addition to the substrate W to be drawn, the X-axis table 12 sets various works such as an inspection work Wc used in the landing position inspection process and moves them in the X-axis direction. Although not shown, the X-axis table 12 is placed directly on the floor, has a motor-driven X-axis slider that constitutes a drive system in the X-axis direction, and a suction table for sucking and setting various workpieces to the X-axis table. A set table 21 composed of a substrate θ-axis table or the like is movably mounted. When the X-axis slider is moved in the X-axis direction, various workpieces set on the set table 21 move in the X-axis direction. The X-axis table 12 is provided with an X-axis linear scale 22 (see FIG. 4) for detecting the moving position of the suction table.

  The Y-axis table 13 is supported by left and right columns (not shown) erected on the floor so as to straddle the X-axis table 12, and is a motor-driven Y-axis slider (which constitutes a drive system in the Y-axis direction). There are two sets (not shown), and the head unit 15 is movably mounted on each set of Y-axis sliders via the carriage 14. The two carriages 14 can be individually moved in the Y-axis direction, and of course, they can be moved collectively in the Y-axis direction. The Y-axis table 13 is provided with a Y-axis linear scale 24 (see FIG. 4) that detects the movement position of each carriage 14 (head unit 15).

  Each carriage 14 has a head θ axis table 26 that holds the head unit 15 and finely adjusts (rotates) the θ position of the head unit 15 by driving a motor. In this embodiment, two carriages 14 (head units 15) are provided, but the number is arbitrary.

  A common functional liquid is introduced into the two head units 15, and the number of head units 15 to be operated is increased or decreased according to the size of the substrate W. However, different functional liquids may be introduced and each head unit 15 may be used for separate drawing processes.

  As shown in FIG. 2, each head unit 15 includes four functional liquid droplet ejection heads 17, a head plate 31 that positions and mounts the functional liquid droplet ejection heads 17, and two reference pins 32 that protrude from the head plate 31. And is mounted on the carriage 14 via the head plate 31. The two reference pins 32 are for positioning each head unit 15 on the premise of image recognition. The reference numeral 33 in the figure is the center of rotation of the head unit 15 by the head θ-axis table 26.

  The four functional liquid droplet ejection heads 17 are mounted such that the row directions of nozzle rows 42 to be described later are parallel to each other. When mounted on the carriage 14, each nozzle row 42 is aligned with the Y-axis direction. It is supposed to be parallel. Hereinafter, the nth functional liquid droplet ejection head 17 counted from the left side of the drawing is referred to as an “nth head”.

  The first head 17a and the second head 17b are arranged stepwise while being shifted in the X-axis direction so that the plurality of nozzles 43 are continuous in the Y-axis direction. The third head 17c and the fourth head 17d are functional In order to avoid physical interference between the droplet discharge heads 17, the first head 17 a and the second head are rearranged in the Y-axis direction and have a gap (approximately 5 heads), and the same step shape as described above. It is arranged. That is, the first head 17a and the third head 17c are arranged in the Y-axis direction, and similarly, the second head 17b and the fourth head 17d are arranged in the Y-axis direction.

  As shown in FIG. 3, the functional liquid droplet ejection head 17 is supplied with a functional liquid from a functional liquid pack (not shown) and ejects the functional liquid by an ink jet method (for example, piezoelectric element driving). And two nozzle rows 42 (A row 42A and B row 42B) formed in parallel to each other.

  Each nozzle row 42 is configured by arranging a plurality of (for example, 180) nozzles 43 at an equal pitch (for example, 141 m). Of the 180 nozzles 43, 10 nozzles 43 located at both ends have a larger discharge amount than the nozzle 43 located in the middle due to the structure of the functional liquid droplet ejection head 17. In the actual drawing process, the non-ejection nozzles 43 that do not eject functional droplets are used. That is, the 160 nozzles 43 located in the intermediate portion are the actual ejection nozzles 43 that eject and land functional droplets in the actual drawing process.

  Both nozzle rows 42 are shifted from each other by a half pitch (70 m) in the row direction of the nozzle rows 42. That is, the nozzle pitch by the two nozzle rows 42 is 70 · m. The distance between the two nozzle rows 42 (distance between nozzle rows) is, for example, 2.2 mm. Then, a functional liquid is discharged from each nozzle 43 by applying a driving waveform from a head driver 111 described later.

  Although not shown, the maintenance device includes a suction unit that sucks the functional liquid from the nozzle 43 of the functional liquid droplet ejection head 17, a wiping unit that wipes the nozzle surface 41 of the functional liquid droplet ejection head 17, and a functional liquid droplet in the maintenance area. Equipped with a flight observation unit that observes the flight status of the aircraft. In addition, a pair of pre-drawing flushing boxes for performing flushing (disposal discharge) are disposed on both front and rear sides of the suction table.

  The image recognition means 16 is disposed so as to face both the front and rear sides of the substrate carry-in / out area, and two substrate recognition cameras 51 (see FIG. 4) for recognizing images of two substrate alignment marks (not shown) of the substrate W, respectively. And a head recognition camera 52 connected to the X-axis slider of the X-axis table 12 and recognizing images of the two reference pins 32 of each head unit 15, and coaxial incident light for recognizing functional droplets discharged onto the substrate W or the like. It has a drawing recognition camera 53 with illumination and a camera moving mechanism 54 that is arranged in parallel with the Y-axis table 13 and moves the head recognition camera 52 in the Y-axis direction by driving a motor.

  By moving the substrate W to the substrate carry-in / out area by the X-axis table 12, each substrate recognition camera 51 faces the substrate alignment mark and images it. Further, the head recognition camera 52 is moved to the drawing area by the X-axis table 12 and the head unit 15 is moved in the Y-axis direction by the Y-axis table 13, so that the head recognition camera 52 sequentially moves to the two head units 15. Come and image them. Further, the substrate W is moved on the movement locus of the head recognition camera 52 by the X-axis table 12 and the head recognition camera 52 is moved in the Y-axis direction by the camera moving mechanism 54, so that the head recognition camera 52 can be used for various workpieces. Face the landed functional droplets and image them.

  Next, with reference to FIG. 4, the control system of the droplet ejection apparatus 1 as a whole will be described. The control system of the droplet discharge apparatus 1 basically includes an input unit 101 having an operation panel 4 for inputting various data, and various cameras of the image recognition means 16 to recognize the position of the substrate W and each head unit 15. A position detection unit 102 that performs the X-axis linear scale 22 and the Y-axis linear scale 24, a movement detection unit 103 that detects the position of the suction table and each head unit 15, and a functional liquid droplet ejection head 17, A drive unit 104 having various drivers for driving the XY moving mechanism 11 and the like, and a control unit 105 (controller 3) that comprehensively controls the droplet discharge device 1 including these units are provided.

  The drive unit 104 includes a head driver 111 that controls the ejection of the functional liquid droplet ejection head 17 and a motor driver 112 that controls the respective motors of the XY moving mechanism 11. The head driver 111 generates and applies a predetermined drive waveform in accordance with an instruction from the control unit 105 to control the ejection of the functional liquid droplet ejection head 17. The motor driver 112 includes an X-axis motor driver 113, a Y-axis motor driver 114, a substrate θ-axis motor driver 115, and a head θ-axis motor driver 116, which are in accordance with instructions from the control unit 105, the X-axis table 12, The drive motors of the Y axis table 13, the substrate θ axis table, and the head θ axis table 26 are driven and controlled.

  The control unit 105 includes a CPU 121, a ROM 122, a RAM 123, and a P-CON 124, which are connected to each other via a bus 125. The ROM 122 has a control program area for storing a control program to be processed by the CPU 121, and a control data area for storing control data for performing drawing processing and image recognition.

  The RAM 123 includes various register groups, a drawing data area for performing drawing processing, a position inspection data area for performing landing position inspection processing described later, an image data area for temporarily storing image data, the substrate W, It has a correction data area for storing correction data for correcting the position of the head unit 15, and is used as various work areas for control processing.

  The P-CON 124 is configured and incorporated with a logic circuit that complements the functions of the CPU 121 and handles interface signals with peripheral circuits. For this reason, the P-CON 124 fetches image data, various commands from the input unit 101 as they are or processes them into the bus 125, and interlocks with the CPU 121 to output data and control signals output from the CPU 121 and the like to the bus 125. Is output to the drive unit 104 as it is or after being processed.

  The CPU 121 inputs various detection signals, various commands, various data, etc. via the P-CON 124 according to the control program in the ROM 122, processes various data, etc. in the RAM 123, and then drives via the P-CON 124. The entire droplet discharge device 1 is controlled by outputting various control signals to the unit 104 and the like. For example, the CPU 121 controls the functional droplet discharge head 17, the X-axis table 12 and the Y-axis table 13 to perform drawing on the substrate W under predetermined droplet discharge conditions and predetermined movement conditions.

  Here, a series of drawing operations on the substrate W by the droplet discharge device 1 will be briefly described. First, the substrate W is set on the set table 21 moved to the substrate carry-in / out area, and the substrate alignment operation is performed as preparation before discharging the functional liquid droplets. That is, the two substrate alignment marks 51 on the substrate W are image-recognized by the two substrate recognition cameras 51, and the position correction in the θ-axis direction by the substrate θ-axis table and the X-axis of the substrate W are performed based on the image recognition result. The position data in the direction and the Y-axis are corrected, and the position of the substrate W is corrected.

  Before and after this substrate alignment operation, a head alignment operation for correcting the relative positions of the two head units 15 is performed. That is, two reference pins 32 of each head unit 15 are image-recognized by the head recognition camera 52, and based on the image recognition result, position correction in the θ-axis direction by the head θ-axis table 26 and Y-axis by the Y-axis table 13 are performed. The position correction in the direction and the position data correction in the X-axis direction of the head unit 15 are performed, and the position correction of each head unit 15 is performed. However, this head alignment operation does not need to be performed every time the substrate W is drawn (every time the substrate W is replaced), and may be performed only during tooling or head replacement in order to shorten the tact time.

  Thus, after the alignment of the substrate W and the head unit 15 is performed, the functional liquid is discharged onto the substrate W. In other words, main scanning for ejecting and landing functional droplets from the plurality of functional droplet ejection heads 17 on the substrate W while moving the substrate W in the X-axis direction by the X-axis table 12, and the Y-axis table 13. The drawing process is performed on the entire area of the substrate W by repeatedly performing the sub-scanning of moving the two head units 15 in the Y-axis direction.

  With reference to FIGS. 5 to 7, the landing position inspection process using the droplet discharge device 1 according to the present embodiment will be described in detail. This landing position inspection process is performed when a volatile functional liquid is introduced into the functional liquid droplet ejection head 17 and is performed, for example, to inspect the assembly accuracy of the head unit 15 as described above. It is what is done. As the volatile functional liquid, for example, a clear coat ink in which a transparent coating agent is dissolved in butyl alcohol is used.

  The landing position inspection process is performed by setting the inspection work Wc on the set table 21 instead of the substrate W to be drawn. The surface of the inspection work Wc is subjected to water repellent treatment, and the landed functional liquid droplet has a substantially hemispherical (crown ball) shape.

  First, the control unit 105 sets two drawing areas RdA and RdB corresponding respectively to the A row 42A and the B row of the nozzle row 42 on the inspection work Wc, and at the center of the two drawing areas RdA and RdB. The inspection areas RcA and RcB are set in (S11 in FIG. 5), respectively. Each of the drawing regions RdA and RdB has a region width corresponding to the row length of each nozzle row 42, and is a region where functional droplets are ejected and landed. The inspection areas RcA and RcB are set corresponding to the 160 actual ejection nozzles 43 in each row, and serve as areas in which the landing functional droplets are recognized by the drawing recognition camera 53.

  Further, the control unit 105 sets 14 drawing columns A1 to A14 corresponding to the A column 42A in the drawing region RdA, and 14 drawing columns B1 to B14 corresponding to the B column 42B in the drawing region RdB. Is set (S12). The 14 drawing rows A1 to A14 and B1 to B14 are arranged at a predetermined drawing pitch (for example, 0.15 mm) in the X-axis direction (main scanning direction).

  Of the 14 drawing rows A1 to A14 and B1 to B14, those included in the inspection areas RcA and RcB are called actual inspection drawing rows A11 to A14 and B11 to B14, and the others are non-inspection drawing rows A1. -A10 and B1-B10.

  Next, while the inspection work Wc is moved in the X-axis direction by the X-axis table 12, functional droplets are discharged and landed on the inspection work Wc from the A row 42A to the drawing rows A1 to A14. Drawing for inspection is performed by ejecting and landing functional droplets from the B row 42B to the drawing rows B1 to B14. At this time, the A row 42A discharges and lands on the non-inspection drawing rows A1 to A10 out of the 14 drawing rows A1 to A14 (S13), and then discharges and lands on the actual inspection drawing rows A11 to A14. (S14), the B row 42B is similarly discharged and landed on the non-inspection drawing rows B1 to B10 out of the 14 drawing rows B1 to B14 (S13), and then the actual inspection drawing rows B11 to B14. Discharging and landing are performed (S14).

  That is, the A row 42A is discharged and landed in order from the non-inspection drawing row A1 to the non-inspection drawing row A5 outside the forward movement direction toward the inspection area RcA, and then in the backward direction toward the inspection area RcA. Discharge / landing are sequentially performed from the outer non-inspection drawing row A6 to the non-inspection drawing row A10, and further, ejection / landing are sequentially performed from the actual inspection drawing row A11 to the actual inspection drawing row A14. At this time, as described above, since the inspection area RcA is set corresponding to the 160 actual discharge nozzles 43 in the A row, the functional liquid is supplied from the 160 actual discharge nozzles 43 to the inspection area RcA. Drops are ejected and landed, and in synchronization with this, functional droplets are ejected and landed from the non-ejection nozzle 43 on both outer sides in the Y-axis direction of the inspection region. Similarly, the functional liquid droplets are ejected and landed in the B row 42B.

  Further, the above-described drawing for inspection is performed while moving the inspection work Wc by the X-axis table 12, but when ejecting and landing functional droplets from each nozzle row 42, the inspection work Wc is stopped. Keep it. That is, ejection and landing of functional droplets from each nozzle row 42 are performed in a state where the functional droplet ejection head 17 and the inspection work Wc are stationary. According to this, since it is possible to prevent the landing positions of the functional liquid droplets from being shifted, an accurate inspection can be performed. That is, when the droplets are ejected and landed while the functional liquid droplet ejection head 17 and the inspection work Wc are moved relative to each other, between the nozzle surface 41 of the functional liquid droplet ejection head 17 and the surface of the inspection work Wc. However, according to the present embodiment, there is no possibility that the landing position of the functional liquid droplets may be shifted.

  Next, the drawing recognition camera 53 is made to face each of the inspection areas RcA and RcB in order, and the landed functional liquid droplets are sequentially imaged in units of several dots in the Y-axis direction, and the landing positions are recognized (S15). For example, the actual inspection drawing rows A11 to A15: 4 rows × 8 dots = 32 dots are picked up by one imaging (see FIG. 7).

  At this time, before the functional droplets are ejected and landed on the actual inspection drawing rows A11 to A14 and B11 to B14, the non-inspection drawing is performed by landing the functional droplets on the non-inspection drawing rows A1 to A10 and B1 to B10. Since the solvent (butyl alcohol) is volatilized from the functional droplets that have landed on the columns A1 to A10 and B1 to B10, the actual inspection drawing columns A11 to A1 are performed in a state where the solvent concentration in the atmosphere on the drawing regions RdA and RdB is increased. Functional droplets can be discharged and landed on A14 and B11 to B14. For this reason, the volatilization rate of the solvent from the functional liquid droplets that have landed on the actual inspection drawing lines A11 to A14 and B11 to B14 can be slowed down, and the landing positions can be image-recognized appropriately.

  Further, during forward movement, liquid droplets are ejected and landed sequentially from the outer non-inspection drawing rows A1 and B1 toward the inner non-inspection drawing rows A5 and B5, and during the backward movement, outer non-inspection drawing rows A6 and B6. Functional droplets are ejected and landed in order from the inner non-inspection drawing rows A10 and B10. For this reason, the solvent volatilized from the functional droplets landed on the relatively non-inspection drawing row has a solvent atmosphere already formed on the outside thereof, so that the inspection regions RcA and RcB do not diffuse outside. Will spread intensively. Therefore, the solvent concentration in the atmosphere on each inspection region RcA, RcB can be effectively increased, and the volatilization rate of the droplets landed on the actual inspection drawing rows A11 to A14, B11 to B14 can be further reduced. .

  At this time, coaxial incident illumination is performed to image the landed functional liquid droplets. According to this, although the light irradiated to the center part of the functional droplet is reflected straight (toward the lens of the drawing recognition camera 53), the light irradiated to the peripheral edge of the functional droplet is obliquely Since the image is reflected, the peripheral portion is black as the image, and the central portion is reflected and appears in a white donut shape. And the area | region of the whole functional droplet (dot) is detectable by painting out the white part of a center part by image processing. For this reason, although the landed functional liquid droplet (clear coat ink) is colorless and transparent, this can be imaged appropriately.

  Then, the ideal landing position stored in advance and the image-recognized landing position are compared, and the landing error is recognized as a deviation amount in the X-axis direction and the Y-axis direction. Four landing errors (landing position data) corresponding to each nozzle 43 are averaged for each nozzle 43, and the amount of deviation of each nozzle 43 in the X-axis direction and the Y-axis direction is obtained. According to this, by using the landing position data averaged for each nozzle 43, it is possible to improve the accuracy of the landing position measurement.

  Further, the obtained deviation amounts of the nozzles 43 in the X-axis direction and the Y-axis direction are averaged for each functional liquid droplet ejection head 17, and the assembly error in the X-axis direction and the Y-axis direction of the functional liquid droplet ejection head 17 is determined. Can be acquired. Further, the assembly error in the θ-axis direction of the functional liquid droplet ejection head 17 can be acquired from the deviation amounts of at least two nozzles 43 in the X-axis direction and the Y-axis direction. In this embodiment, the landing positions of all the actual discharge nozzles 43 in each nozzle row 42 are measured. However, it is not necessary to perform the process for all the actual discharge nozzles 43 in order to obtain an assembly error. However, measuring the landing positions of all the actual discharge nozzles 43 is useful because the discharge characteristics of each actual discharge nozzle 43 (such as the presence or absence of a flight curve) can be grasped.

  Although the ideal landing position is not shown, each ideal (designed) landing of the functional droplet is performed using a glass mask on which a plurality of reference marks indicating the ideal landing position of the functional droplet is formed. The position coordinates are acquired and stored. However, this glass mask may be used as the inspection work Wc, and a plurality of reference marks may be image-recognized in parallel with image recognition of the landed functional liquid droplets.

  By performing such landing position inspection processing for all the functional liquid droplet ejection heads 17 of the head unit 15, the assembly accuracy of the all functional liquid droplet ejection heads 17 can be inspected. Further, by actually ejecting and landing the functional liquid droplets, the flight characteristics of the functional liquid droplets, that is, the functional liquid droplet ejection head 17 is attached in the vertical direction, and the functional liquid droplets ejected from the nozzles fly directly below. Whether or not it can be inspected.

  Next, another embodiment of the landing position inspection process will be described with reference to FIG. In the landing position inspection process of the second embodiment, the basic configuration is the same as in the above embodiment, but differs from the above embodiment in that the A row 42A and the B row 42B of the nozzle row 42 are inspected simultaneously. To do. The following description will focus on differences from the above embodiment.

  First, the control unit 105 sets a common drawing region Rd for the A rows 42A and B rows of the nozzle row 42 on the inspection work Wc, and sets the inspection region Rc at the center of the drawing region Rd (S11). ). The drawing region Rd has a region width corresponding to the row length of the two nozzle rows 42, and the inspection region Rc is set corresponding to 160 actual ejection nozzles 43 in each row.

  Further, the control unit 105 sets 15 drawing columns A1 to A15 corresponding to the A column 42A and 15 drawing columns B1 to B15 corresponding to the B column 42B in the drawing region Rd (S12). ). Each of the 15 drawing rows A1 to A15 and B1 to B15 is arranged at a predetermined drawing pitch (for example, 0.15 mm) shorter than the distance between the nozzle rows in the X-axis direction (main scanning direction). However, the interval between the drawing row A1 and the drawing row A13 is 0.10 mm, and similarly, the interval between the drawing row B1 and the drawing row B13 is 0.10 mm. Therefore, the interval between the drawing row A12 and the drawing row B15 is 0.15 mm.

  Of the 15 drawing rows A1 to A15 and B1 to B15, those included in the inspection region Rc are called actual inspection drawing rows A11 to A12 and B14 to B15, and the others are non-inspection drawing rows A1 to A10. , A13 to A15, B1 to B13.

  Next, while the inspection work Wc is moved in the X-axis direction by the X-axis table 12, functional droplets are discharged and landed on the inspection work Wc from the A row 42A to the drawing rows A1 to A15. Drawing for inspection is performed by ejecting and landing functional droplets from the B row 42B to the drawing rows B1 to B15. At this time, the A row 42A of the nozzle row 42 discharges and lands on the non-inspection drawing rows A1 to A10 of the 15 drawing rows A1 to A15 (S13), and then the actual inspection drawing rows A11 to A12. Discharge / landing is performed (S14), and after B is discharged / landed on the non-inspection drawing rows B1 to B13 among the 15 drawing rows B1 to B15 (S13), the actual inspection drawing rows B14 to B15 are performed. Discharge and landing are performed (S14).

  That is, from the state in which the A row 42A and the B row 42B straddle the inspection region Rc, the A row 42A is actually inspected from the non-inspection drawing row A1 on the outer side in the forward direction toward the inspection region Rc. After discharging and landing from the A row 42A and the B row 42B so as to sequentially discharge and land up to the drawing row A12, the B row 42B discharges to the actual inspection drawing rows B14 to B15 of the remaining half of the inspection region Rc. -Discharge and land from A row 42A and B row 42B so that it may land.

  Next, the drawing recognition camera 53 faces the inspection region Rc, and the landed functional liquid droplets are sequentially imaged in units of several dots in the Y-axis direction, and the landing positions are recognized (S15). For example, the actual inspection drawing rows A11, A12, B14, and B15: 4 rows × 8 dots = 32 dots are picked up by one imaging. In this way, by ejecting and landing the actual test drawing rows A11, A12, B14, and B15 from the two nozzle rows 42, both nozzle rows 42 can be inspected at the same time, thereby shortening the inspection time. can do.

  At this time, similarly to the above, before ejecting and landing the functional liquid droplets on the actual inspection drawing lines A11 to A12 and B14 to B15, the functional liquid droplets are landed on the non-inspection drawing lines A1 to A10 and B1 to B13. Thus, since the solvent (butyl alcohol) is volatilized from the functional droplets that have landed on the non-inspection drawing rows A1 to A10 and B1 to B13, the actual inspection drawing row is in a state where the solvent concentration in the atmosphere on the drawing region Rd is increased. Functional droplets can be discharged and landed on A11 to A12 and B14 to B15. For this reason, the volatilization rate of the solvent from the functional droplets that have landed on the actual inspection drawing lines A11 to A12 and B14 to B15 can be slowed down, and the landing positions can be image-recognized appropriately.

  Further, at the time of forward movement, droplets are ejected and landed in order from the outer non-inspection drawing row A1 toward the inner non-inspection drawing row A10. For this reason, the solvent volatilized from the functional liquid droplets landed on the relatively non-inspection drawing row is relatively concentrated on the inspection region Rc without diffusing outside because the solvent atmosphere has already been formed on the outside. Will spread. Therefore, the solvent concentration in the atmosphere on the inspection region Rc can be effectively increased, and the volatilization rate of the droplets that have landed on the actual inspection drawing rows A11 to A12 and B14 to B15 can be further reduced.

  Thereafter, in the same manner as described above, the displacement amount of each nozzle 43 in the X-axis direction and the Y-axis direction can be acquired, and the assembly error of the functional liquid droplet ejection head 17 can be acquired based on the shift amount.

  As described above, according to the droplet discharge device 1 (landing position inspection device) of the present embodiment, the landing position of the functional droplet is appropriately inspected for the functional droplet discharge head 17 into which the volatile functional liquid is introduced. can do.

  In the present embodiment, the transparent functional liquid (clear coat ink) has been described. However, if it is not transparent, the functional liquid that has landed on the inspection region Rc can be prevented from volatilizing. This is useful because the image recognition of the landing position can be performed accurately. However, as in this embodiment, a transparent functional liquid is particularly useful because it can avoid the solvent from evaporating and becoming invisible. In addition, an alignment film ink for liquid crystal is given as a functional liquid that makes it difficult to recognize an image when it volatilizes. Furthermore, the volatile solvent itself in which the solute is not dissolved may be used.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 9 is a flowchart showing the manufacturing process of the color filter, and FIG. 10 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 10B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 10C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 10 (d), functional droplets are ejected by the functional droplet ejection head 17, and each pixel region 507a is surrounded by the partition wall portion 507b. Make it land. In this case, the functional liquid droplet ejection head 17 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. 10E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 11 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 10, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 11 are formed at a predetermined interval. A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 17. Further, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 17.

FIG. 12 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 13 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 14 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 15, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), and a counter It is manufactured through an electrode forming step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 16, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by, for example, plasma treatment using oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane as a processing gas. )
By performing this surface treatment process, when forming the functional layer 617 using the functional liquid droplet ejection head 17, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 21 of the droplet discharge device 1 shown in FIG. 2, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 18, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 17 to each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 19, a drying process and a heat treatment are performed, the polar solvent contained in the first composition is evaporated, and a hole injection / transport layer 617a is formed on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 20, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 20)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 21, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 17, as shown in FIG. 22, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 23, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 24 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are disposed at the bottom of the blue discharge chamber 705B and the bottom, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following process is performed with the first substrate 701 placed on the set table 21 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 17. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode forming regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 17, and it corresponds. Land in the color discharge chamber 705.

Next, FIG. 25 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 26A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the above-described droplet discharge device 1 for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

1 is a schematic plan view of a droplet discharge device according to an embodiment of the present invention. 2 is a schematic plan view of a head unit mounted on a droplet discharge device. FIG. It is the schematic diagram which looked at the functional droplet discharge head from the nozzle surface side. It is the block diagram explaining the control system of the droplet discharge apparatus. It is a flowchart which shows the landing position test | inspection process of a droplet discharge apparatus. It is a conceptual diagram explaining the landing position inspection process of a droplet discharge device. It is a figure which shows the state which imaged the functional droplet which reached the workpiece | work for a test | inspection. It is a conceptual diagram explaining the other landing position test | inspection process of a droplet discharge apparatus. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 3 ... Controller 12 ... X-axis table 17 ... Functional droplet discharge head 42 ... Nozzle row 43 ... Nozzle 53 ... Drawing recognition camera Rc ... Inspection area Rd ... Drawing area Wc ... Work for inspection

Claims (13)

The inspection work is drawn and the drawing result is inspected while moving the droplet discharge head, which has a nozzle array consisting of a plurality of nozzles and introduces a volatile liquid, relative to the inspection work in the main scanning direction. In the method for inspecting the landing position of the liquid droplet ejection head,
On the inspection work, an area setting step of setting a drawing area having an area width corresponding to the row length of the nozzle row, and setting an inspection area at the center of the drawing area;
A drawing row setting step for setting a plurality of drawing rows corresponding to the nozzle rows and arranged at a predetermined drawing pitch in the main scanning direction in the drawing region;
A drawing step of discharging and landing droplets from the nozzle row of the droplet discharge head to each drawing row of the drawing region;
An image recognition step for recognizing the landing position of the droplet landed on the inspection region,
In the drawing step, after discharging and landing on a non-inspection drawing row other than the actual inspection drawing row included in the inspection area among the plurality of drawing rows, discharging and landing are performed on the actual inspection drawing row. A method for inspecting the landing position of a liquid droplet ejection head. In the drawing step, when discharging and landing on the non-inspection drawing row,
After discharging and landing in order from the non-inspection drawing row outside the forward direction toward the inspection region, discharging and landing in order from the non-inspection drawing row outside the reverse direction toward the inspection region The landing position inspection method for a droplet discharge head according to claim 1, wherein the landing position inspection method is performed. With respect to the inspection work, each of the two rows of nozzles has two nozzle rows each composed of a plurality of nozzles, and the droplet discharge head into which the volatile liquid is introduced is relatively moved in the main scanning direction. In the method for inspecting the landing position of a droplet discharge head that performs drawing for inspection and inspects the drawing result,
An area setting step for setting a drawing area having an area width corresponding to the row length of the two nozzle rows on the inspection work, and setting an inspection area at the center of the drawing area;
A drawing row setting step for setting a plurality of drawing rows corresponding to each nozzle row in the drawing region and arranged at a predetermined drawing pitch in the main scanning direction for each nozzle row;
A drawing step of discharging and landing droplets from the two nozzle rows of the droplet discharge head to each drawing row of the drawing region;
An image recognition step for recognizing the landing position of the droplet landed on the inspection region,
In the drawing step, each nozzle row performs ejection / landing on a non-inspection drawing row other than the actual inspection drawing row included in the inspection region among the plurality of corresponding drawing rows, and then the actual inspection drawing row. A method for inspecting the landing position of a droplet discharge head, characterized in that discharge and landing are performed on the liquid droplet. In the drawing row setting step, the drawing pitch is set shorter than the distance between the two nozzle rows,
In the drawing step, from the state in which the two nozzle rows straddle the inspection region, one of the nozzle rows from the non-inspection drawing row outside in the forward movement direction toward the inspection region is half of the inspection region. After discharging and landing from the two nozzle rows so as to sequentially discharge and land up to the actual inspection drawing row of the part, the other nozzle row causes the other half of the inspection region to be in the actual inspection drawing row. 4. A method for inspecting a landing position of a droplet discharge head according to claim 3, wherein discharge and landing are performed. The nozzle row is located at an intermediate portion, and a plurality of actual ejection nozzles that eject droplets in an actual drawing process on a work, and a plurality of nozzle rows that are located at both ends and that do not eject droplets in the actual drawing process A non-ejection nozzle, and
5. The landing position inspection method for a droplet discharge head according to claim 1, wherein in the inspection region setting step, the inspection region is set in correspondence with the plurality of actual discharge nozzles.   6. The discharge and landing of droplets from the nozzle row in the drawing step are performed in a state where the droplet discharge head and the inspection work are stationary. 6. The landing position inspection method of the described droplet discharge head. In the drawing row setting step, a plurality of the actual inspection drawing rows are set per nozzle row,
7. The liquid according to claim 1, wherein in the image recognition step, a plurality of droplets corresponding to the nozzles are image-recognized, and a plurality of landing position data are averaged for each nozzle. Method for inspecting the landing position of a droplet discharge head.   The landing of the droplet discharge head according to any one of claims 1 to 7, wherein in the image recognition step, the droplet that has landed on the inspection region is imaged by using an imaging unit with coaxial incident illumination. Position inspection method. The inspection work is drawn and the drawing result is inspected while moving the droplet discharge head, which has a nozzle array consisting of a plurality of nozzles and introduces a volatile liquid, relative to the inspection work in the main scanning direction. In the landing position inspection device for the droplet discharge head
Moving means for relatively moving the droplet discharge head in the main scanning direction with respect to the inspection work;
On the inspection work, an area setting means for setting a drawing area having an area width corresponding to the row length of the nozzle row, and setting an inspection area at the center of the drawing area;
A drawing row setting means for setting a plurality of drawing rows corresponding to the nozzle row and arranged at a predetermined drawing pitch in the main scanning direction in the drawing region;
Control means for controlling the droplet discharge head and the moving means to discharge and land droplets from the nozzle row of the droplet discharge head to each drawing row of the drawing region;
Image recognition means for recognizing an image of a landing position of a droplet landed on the inspection region,
The control means discharges and lands on a non-inspection drawing row other than the actual inspection drawing row included in the inspection region, and then causes the actual inspection drawing row to discharge and land among the plurality of drawing rows. A landing position inspection device for a droplet discharge head. With respect to the inspection work, each of the two rows of nozzles has two rows of nozzles each composed of a plurality of nozzles, and the droplet discharge head introduced with a volatile liquid is relatively moved in the main scanning direction. In the landing position inspection device of the droplet discharge head that performs drawing for inspection and inspects the drawing result,
Moving means for relatively moving the droplet discharge head in the main scanning direction with respect to the inspection work;
On the inspection work, an area setting means for setting a drawing area having an area width corresponding to the row length of the two nozzle rows, and setting an inspection area at the center of the drawing area;
Drawing row setting means for setting a plurality of drawing rows corresponding to the nozzle rows and arranged in the main scanning direction at a predetermined drawing pitch in the drawing area;
Control means for controlling the droplet discharge head and the moving means to discharge and land droplets from the two nozzle rows of the droplet discharge head to each drawing row of the drawing region;
Image recognition means for recognizing an image of a landing position of a droplet landed on the inspection region,
The control means controls each nozzle row to discharge and land on a non-inspection drawing row other than the actual inspection drawing row included in the inspection area among the plurality of corresponding drawing rows, and then An apparatus for inspecting a landing position of a droplet discharge head, wherein the droplet is ejected and landed on an inspection drawing line.   9. An electro-optical device, wherein a droplet discharge head inspected by the landing position inspection method for a droplet discharge head according to claim 1 is used to form a film-forming portion with a functional liquid on a workpiece. Manufacturing method.   9. An electro-optical device comprising: a droplet discharge head inspected by the landing position inspection method for a droplet discharge head according to claim 1; .   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 11 or the electro-optical device according to claim 12 mounted thereon.

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