JP5251796B2 - Head unit, droplet discharge device, and method of manufacturing electro-optical device - Google Patents

Description

  The present invention relates to a method for arranging a droplet discharge head in which a plurality of droplet discharge heads are arranged and fixed on a common carriage plate, a head unit and a droplet discharge device, a method for manufacturing an electro-optical device, an electro-optical device, and an electronic device. It relates to equipment.

  Conventionally, as a method of arranging this type of droplet discharge head, there is known a method in which a plurality of droplet discharge heads are arranged stepwise in the main scanning direction and arranged in two groups in the sub-scanning direction. (See Patent Document 1). In this arrangement method, a single drawing line is formed by all the nozzle rows in the plurality of droplet discharge heads, and the plurality of droplet discharge heads can be arranged in a space efficient manner.

Japanese Patent Laying-Open No. 2005-238821

  By the way, when drawing processing is performed with a head unit created by such an arrangement method, functional droplets discharged from the outermost discharge nozzles of separate droplet discharge heads may be drawn adjacently. is there. That is, the functional liquid droplets discharged and landed by the discharge nozzle disposed at the outermost end of one liquid droplet discharge head and the liquid droplets discharged and landed by the discharge nozzle disposed at the outermost end of another liquid droplet discharge head Functional droplets are drawn adjacent to each other. However, the droplet discharge heads to be arranged and fixed may cause a difference in droplet discharge amount particularly at each discharge nozzle due to a manufacturing error. For this reason, if a plurality of droplet discharge heads are simply arranged based on the above arrangement method, a difference occurs in the amount of adjacent functional droplets discharged from different droplet discharge heads. However, there is a problem that high quality drawing processing cannot be performed.

  The present invention relates to a method for arranging a droplet discharge head, a head unit, and a droplet discharge device capable of improving drawing quality by a plurality of droplet discharge heads while allowing different droplet discharge characteristics for each droplet discharge head. An object of the present invention is to provide an electro-optical device manufacturing method, an electro-optical device, and an electronic apparatus.

  The arrangement method of the droplet discharge head according to the present invention includes a plurality of functional liquid droplets that discharge a common functional liquid on the basis of individual droplet discharge amounts in a large number of discharge nozzles of a nozzle row that an inkjet droplet discharge head individually has. A droplet discharge head placement method in which a droplet discharge head is displaced in the nozzle row direction and fixed on a common carriage plate, and the droplet discharge heads adjacent in the nozzle row direction are mutually innermost. Droplet discharge amounts of the two discharge nozzles located at both outermost ends in the nozzle row direction on the carriage plate so that the difference between the droplet discharge amounts of the two discharge nozzles located at the ends falls within a predetermined tolerance range However, a plurality of droplet discharge heads are arranged and fixed so as to fall within a predetermined reference amount range.

  According to this configuration, the droplet discharge heads are arranged and fixed so that the two discharge nozzles positioned at the innermost ends of the droplet discharge heads adjacent to each other in the nozzle row direction fall within a predetermined tolerance range. Accordingly, it is possible to suppress a difference in landing amount between adjacent droplets discharged and landed from different droplet discharge heads between droplet discharge heads arranged and fixed on a common carriage plate. In addition, by disposing and fixing the respective droplet discharge heads so that the droplet discharge amount falls within a predetermined reference amount range at the two discharge nozzles located at both outermost ends of the carriage plate in the nozzle row direction, It is possible to suppress a difference in landing amount between adjacent droplets discharged and landed from different droplet discharge heads between the droplet discharge heads arranged and fixed on the carriage plate. Therefore, it is possible to improve the drawing quality by a plurality of droplet discharge heads while allowing different droplet discharge characteristics for each droplet discharge head.

  In this case, it is preferable that the plurality of droplet discharge heads arranged on the carriage plate be selected from candidate droplet discharge heads that are the number of placement candidates exceeding the number of the droplet discharge heads.

  According to this configuration, by preparing a number of candidate droplet discharge heads that exceeds the number of droplet discharge heads to be arranged, the possibility of satisfying the above conditions (tolerance range and reference amount range) is increased. In addition, the number of sets (patterns) that satisfy the condition increases. As a result, it is possible to easily and reliably place and fix the above conditions while improving the yield of the droplet discharge head.

  In this case, it is preferable that the plurality of candidate droplet ejection heads have variations in individual droplet ejection amounts in all ejection nozzles within a predetermined range.

  According to this configuration, it is possible to easily perform appropriate arrangement by excluding the candidate droplet discharge heads from which the variation in the individual droplet discharge amount in all the discharge nozzles is outside the predetermined range.

  The plurality of droplet discharge heads are divided into two head groups in the nozzle row direction and arranged on the carriage plate, and the plurality of droplet discharge heads belonging to the two head groups are positioned to face each other in the nozzle row direction. It is preferable.

  According to this configuration, a plurality of droplet discharge heads can be efficiently arranged on the carriage plate, and drawing processing can be performed efficiently.

  In this case, the functional liquid has one of R color, G color, and B color, and the predetermined tolerance range is that the discharge landing results by the two discharge nozzles are adjacent to each other. It is preferably determined based on a difference in droplet discharge amount that does not cause color unevenness.

  According to this configuration, it is possible to perform a higher quality drawing process with no color unevenness in the adjacent ejection landing results (functional droplets) ejected from the two ejection nozzles located at the innermost end. it can.

  In this case, the functional liquid has one of R, G, and B colors, and the predetermined reference amount range is a range in which the standardized droplet discharge amount in one discharge nozzle is an intermediate value. In this case, it is preferably determined based on a range of droplet discharge amounts that do not cause color unevenness in adjacent discharge landing results.

  According to this configuration, in the two discharge nozzles located at the outermost end, the predetermined reference amount range is a range in which the standardized droplet discharge amount in one discharge nozzle is an intermediate value, Since the value approximates the standardized droplet discharge amount, variations in the droplet discharge amount can be suppressed. In addition, since the predetermined reference amount range is determined based on the range of droplet discharge amounts that do not cause mutual color unevenness in adjacent discharge landing results, higher quality drawing processing without color unevenness is performed. be able to.

  In this case, when there are multiple sets of options that fall within the predetermined reference amount range, the sum of squares of the difference between the intermediate value of the reference amount range and the droplet discharge amounts of the two discharge nozzles of each set becomes the minimum value. It is preferable to select an option.

  According to this configuration, the liquid of the two discharge nozzles is selected by selecting the set that minimizes the sum of squares of the difference between the intermediate value of the reference amount range and the droplet discharge amount of the two discharge nozzles of each set. The difference in droplet discharge amount can be further suppressed, and a higher quality drawing process can be performed.

  In this case, the droplet discharge amount is a numerical value normalized with the absolute target droplet discharge amount set to 1 on the assumption that the average droplet discharge amount in each nozzle row is the absolute target droplet discharge amount. It is preferable to be compared.

  According to this configuration, it is possible to easily compare the droplet discharge amount with the absolute target.

  In this case, it is preferable that the individual droplet discharge amount at the multiple discharge nozzles of each nozzle row is obtained from an approximate characteristic diagram based on the measurement result.

  According to this configuration, it is necessary to measure all the discharge nozzles by obtaining individual droplet discharge amounts of a large number of discharge nozzles in each nozzle row from an approximate characteristic diagram based on the measurement results of several discharge nozzles. Therefore, it is possible to efficiently acquire the droplet discharge amount of all the discharge nozzles.

  The approximate characteristic diagram is preferably derived from a result obtained by measuring all of a plurality of discharge nozzles at both ends of a large number of discharge nozzles and thinning out a plurality of discharge nozzles at the remaining intermediate portion.

  According to this configuration, strict values can be acquired for a plurality of discharge nozzles at both ends of a large number of discharge nozzles. Therefore, the comparison with the reference allowable range or the allowable difference range can be performed with high accuracy.

  In this case, it is preferable that the droplet discharge amount to be compared to determine whether it falls within the tolerance range is an average value of the droplet discharge amounts at a plurality of discharge nozzles at the end of a large number of discharge nozzles.

  In this case, it is preferable that the droplet discharge amount to be compared with whether or not it falls within the reference amount range is an average value of the droplet discharge amounts at a plurality of discharge nozzles at the end of a large number of discharge nozzles.

  According to these configurations, it is possible to reduce variations in the droplet discharge amount of one discharge nozzle, and it is possible to more accurately compare whether or not it falls within the tolerance range (reference amount range).

  In this case, each droplet discharge head preferably has a plurality of invalid discharge nozzles that are not used for drawing on both outer sides of a large number of discharge nozzles in each nozzle row.

  According to this configuration, the discharge amount on the nozzle row is determined by making the plurality of discharge nozzles at both ends, which are larger in discharge amount than the discharge nozzle located in the central portion, into invalid discharge nozzles that are not used for drawing. Variation can be suppressed, and a higher quality drawing process can be performed.

  The head unit of the present invention is characterized in that a plurality of droplet ejection heads are arranged and fixed on the carriage plate by the above-described method of arranging the droplet ejection heads.

  According to this configuration, by using a droplet discharge head arrangement method capable of improving drawing quality by a plurality of droplet discharge heads while allowing different droplet discharge characteristics for each droplet discharge head, A head unit capable of high-quality drawing processing can be provided.

  A droplet discharge apparatus according to the present invention is equipped with the above-described head unit, and the head unit performs drawing by discharging a functional liquid onto a workpiece.

  According to this configuration, a high-quality drawing process can be performed on the workpiece by using the head unit.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming unit made of functional droplets is formed on a workpiece using the above-described droplet discharge device.

  An electro-optical device according to the present invention is characterized in that a film forming unit using functional droplets is formed on a workpiece using the above-described droplet discharge device.

  According to this configuration, a high-quality electro-optical device can be efficiently manufactured. In addition, as a functional material, the light emitting material (Electro-Luminescence light emitting layer / hole injection layer) of the organic EL device, the filter material (filter element) of the color filter used for the liquid crystal display device, the electron emission device (Field Emission) Display, FED) fluorescent material (phosphor), fluorescent material (phosphor) of PDP (plasma display panel) device, electrophoretic material (electrophore) of electrophoretic display device, etc. A liquid material that can be discharged by an inkjet head). Examples of the electro-optical device (Flat Panel Display, FPD) include an organic EL device, a liquid crystal display device, an electron emission device, a PDP device, and an electrophoretic display device.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described method for manufacturing the electro-optical device or the above-described electro-optical device.

  In this case, examples of the electronic device include a mobile phone and a personal computer equipped with a so-called flat panel display, and various electric products.

It is a top view of the droplet discharge device concerning an embodiment. It is a side view of a droplet discharge device. FIG. 4 is a diagram illustrating an arrangement configuration of functional droplet discharge heads mounted on a head unit. It is explanatory drawing of the color arrangement pattern of a color filter, (a) is a stripe arrangement | sequence, (b) is a mosaic arrangement | sequence, (c) has shown the delta arrangement | sequence. It is an external appearance perspective view of a functional droplet discharge head. It is the figure which showed the approximate characteristic diagram. It is explanatory drawing shown about the arrangement | positioning method of the functional droplet discharge head with respect to a carriage plate. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

  Hereinafter, a droplet discharge apparatus to which a method for arranging a droplet discharge head according to an embodiment of the present invention is applied will be described with reference to the accompanying drawings. The liquid droplet ejection apparatus according to the present embodiment is incorporated in a flat panel display production line. For example, a functional liquid droplet ejection head (liquid droplet ejection) into which a functional liquid that is a special ink or a light-emitting resin liquid is introduced. Head) is used to form a color filter of a liquid crystal display device, a light emitting element that becomes each pixel of an organic EL device, and the like.

  As shown in FIGS. 1 and 2, the droplet discharge device 1 is disposed on an X-axis support base 2 supported by a stone surface plate, and extends in the X-axis direction, which is the main scanning direction, An X-axis table 11 that moves W in the X-axis direction (main scanning direction), and a pair (two) of Y-axis support bases that span the X-axis table 11 via a plurality of support columns 4 3, the Y-axis table 12 extending in the Y-axis direction which is the sub-scanning direction, and ten carriage units 51 on which a plurality of functional liquid droplet ejection heads 17 are mounted. The carriage unit 51 is suspended from the Y-axis table 12. Then, the functional droplet ejection head 17 is driven to eject in synchronization with the driving of the X-axis table 11 and the Y-axis table 12, thereby ejecting R, G, B three-color functional droplets and predetermined drawing on the workpiece W. A pattern is drawn.

  The droplet discharge device 1 includes a maintenance device 5 including a flushing unit 14, a suction unit 15, a wiping unit 16, and a discharge performance inspection unit 18, and these units are used for maintenance of the functional droplet discharge head 17. The function of the functional liquid droplet ejection head 17 is maintained and recovered. Of the units constituting the maintenance device 5, the flushing unit 14 and the discharge performance inspection unit 18 are mounted on the X-axis table 11, the suction unit 15 and the wiping unit 16 are detached from the X-axis table 11, and Y The carriage unit 51 is disposed on a gantry 6 at a position where the carriage unit 51 can be moved by the axis table 12 (strictly speaking, the discharge performance inspection unit 18 has a stage unit 77 described later on the X-axis table 11. And the camera unit 78 is supported by the Y-axis support base 3).

  The flushing unit 14 includes a pair of pre-drawing flushing units 111 and 111 and a regular flushing unit 112, and is performed immediately before ejection of the functional liquid droplet ejection head 17 or when drawing work is suspended such as when the workpiece W is replaced. In this case, the functional liquid droplet ejection head 17 receives the waste ejection (flushing). The suction unit 15 includes a plurality of divided suction units 141 and forcibly sucks the functional liquid from the discharge nozzle 98 of each functional liquid droplet discharge head 17. The wiping unit 16 has a wiping sheet 151 and wipes the nozzle surface 97 of the functional liquid droplet ejection head 17 after suction. The ejection performance inspection unit 18 includes a stage unit 77 on which an inspection sheet 83 that receives functional droplets ejected from the functional droplet ejection head 17 is mounted, and a camera unit 78 that inspects functional droplets on the stage unit 77 by image recognition. The ejection performance (the presence or absence of ejection and the flight curve) of the functional liquid droplet ejection head 17 is inspected.

  Hereinafter, components of the droplet discharge device 1 will be described. As shown in FIG. 1 or FIG. 2, the X-axis table 11 includes a set table 21 for setting a workpiece W, an X-axis first slider 22 for slidably supporting the set table 21 in the X-axis direction, and the flushing described above. An X-axis second slider 23 that slidably supports the unit 14 and the discharge performance inspection unit 18 in the X-axis direction, and a set table 21 (work W) extending in the X-axis direction via the X-axis first slider 22 And a pair of left and right X-axis linear motors (not shown) that move the flushing unit 14 and the stage unit 77 in the X-axis direction via the X-axis second slider 23, and an X-axis linear motor. A pair of (two) X-axis common support bases 24 arranged in parallel to guide the movement of the X-axis first slider 22 and the X-axis second slider 23. To have.

  The set table 21 includes a suction table 31 for sucking and setting the work W, and a θ table 32 for supporting the suction table 31 and correcting the position of the work W set on the suction table 31 in the θ-axis direction. Yes. Further, the pre-drawing flushing unit 111 is attached to each of a pair of sides parallel to the Y-axis direction of the set table 21.

  The Y-axis table 12 includes 10 bridge plates 52 each of which has 10 carriage units 51 suspended therein, 10 sets of Y-axis sliders (not shown) that support the 10 bridge plates 52 in both ends, A pair of Y-axis linear motors (not shown) are provided on the pair of Y-axis support bases 3 and move the bridge plate 52 in the Y-axis direction via 10 sets of Y-axis sliders. Further, the Y-axis table 12 causes the functional liquid droplet ejection head 17 to face the maintenance device 5 in addition to sub-scanning the functional liquid droplet ejection head 17 at the time of drawing via each carriage unit 51.

  When the pair of Y-axis linear motors are driven (synchronously), each Y-axis slider translates in the Y-axis direction simultaneously with the pair of Y-axis support bases 3 as a guide. As a result, the bridge plate 52 moves in the Y-axis direction, and the carriage unit 51 moves in the Y-axis direction at the same time. In this case, by controlling the driving of the Y-axis linear motor, each carriage unit 51 can be moved independently and individually, or ten carriage units 51 can be moved together. It is.

  Each carriage unit 51 includes a head unit 13 having a plurality of functional liquid droplet ejection heads 17, a θ rotation mechanism 61 that supports the head unit 13 so as to be capable of θ correction (θ rotation), and a θ rotation mechanism 61. And a suspension member 62 that supports the unit 13 on the Y-axis table 12 (each bridge plate 52).

  As shown in FIG. 3, the head unit 13 includes twelve functional liquid droplet ejection heads 17 and a carriage plate 53 on which the twelve functional liquid droplet ejection heads 17 are arranged and fixed. The twelve functional liquid droplet ejection heads 17 are divided into two groups in the Y-axis direction, and six heads are arranged in a stepped manner in the X-axis direction. The six functional liquid droplet ejection heads 17 belonging to each head group 54 are arranged to oppose each other in the nozzle row 98b direction (see FIG. 7), and the plurality of functional liquid droplet ejection heads 17 are efficiently operated on the carriage plate 53. It is configured so that it can be arranged well and drawing processing can be performed efficiently. The two functional liquid droplet ejection heads 17 of each color of each head group 54 are connected in the X-axis direction to form one drawing line.

  The 12 × 10 functional liquid droplet ejection heads 17 mounted on the head unit 13 correspond to any of the R, G, and B functional liquids, and each of the four functional liquid droplet ejection heads 17 (each With the head group 54, two colors for each color), it is possible to draw a drawing pattern composed of functional liquids of three colors on the workpiece W. In the present embodiment, RGB three-color drawing lines that are continuous in the Y-axis direction are formed by two sub-scans of the full-function liquid droplet ejection heads 17 (12 × 10). The length of the drawing line corresponds to the width of the maximum size workpiece W that can be mounted on the set table 21. Note that there are three types of drawing patterns composed of functional liquids of three colors as shown in FIG. 4, and in this embodiment, drawing is performed using the drawing pattern (bit update data) shown in FIG.

  As shown in FIG. 5, the functional liquid droplet ejection head 17 is a so-called double type, a functional liquid introduction unit 91 having two connection needles 92, and a dual head substrate that is continuous with the functional liquid introduction unit 91. 93, and a head main body 94 which is connected to the lower side of the functional liquid introducing portion 91 and has an in-head flow path filled with the functional liquid therein. The connection needle 92 is connected to a functional liquid tank (not shown), and supplies the functional liquid to the functional liquid introduction unit 91. The head main body 94 includes a cavity 95 (piezoelectric piezoelectric element) and a nozzle plate 96 having a nozzle surface 97 in which a large number of discharge nozzles 98 are opened. When the functional liquid droplet ejection head 17 is ejected, a functional liquid droplet is ejected from the ejection nozzle 98 by the pump action of the cavity 95 (a voltage is applied to the piezoelectric element).

  The nozzle surface 97 is formed with a first nozzle row 99a and a second nozzle row 99b made up of a large number of discharge nozzles 98 in parallel with each other. The two nozzle rows 99a and 99b are displaced from each other by a half nozzle pitch. The two nozzle rows 99a and 99b each have 10 invalid discharge nozzles that are not used for the drawing process at both ends, thereby suppressing variations in the droplet discharge amount on the nozzle rows 99a and 99b. And a higher quality drawing process can be performed. In the present embodiment, the “nozzle row” referred to in the claims is a combination of the first nozzle row 99a and the second nozzle row 99b. Therefore, hereinafter, the first nozzle row 99a and the second nozzle row 99b are collectively referred to simply as the nozzle row 99.

  In the drawing operation of the droplet discharge device 1, first, the first drawing operation (forward movement path) is performed while moving the workpiece W in the X-axis direction (to the rear side in FIG. 1) by the X-axis table 11. Thereafter, the head unit 13 is moved in the Y-axis direction by two heads (sub-scanning), and the workpiece W is moved in the X-axis direction (toward the front side in FIG. 1), and the second drawing operation (return path) is performed. )I do. Then, the head unit 13 is again sub-scanned by two heads, and the third drawing operation (forward path) is performed while moving the workpiece W in the X-axis direction again (to the back side in FIG. 1). In this way, by moving the work W and drawing operations three times while changing the corresponding functional liquid droplet ejection head 17 with respect to the position on the work W by sub-scanning, the colors of R, G, and B are changed. The drawing process is performed efficiently.

  Next, with reference to FIG. 6 or FIG. 7, the arrangement method of the functional liquid droplet ejection head 17 on the carriage plate 53 will be described in detail. The arrangement of the functional liquid droplet ejection heads 17 is prepared in advance by preparing a plurality of functional liquid droplet ejection heads 17 (hereinafter referred to as candidate ejection nozzles) as candidate arrangements, and based on the liquid droplet ejection characteristics of the candidate ejection nozzles. An appropriate functional liquid droplet ejection head 17 is selected from the candidate ejection nozzles and arranged. Therefore, first, selection of the candidate discharge nozzle and acquisition of the droplet discharge characteristics of the candidate discharge nozzle will be described. Since the droplet discharge characteristic acquisition of the candidate discharge nozzle is performed by acquiring the droplet discharge characteristic of the pre-selection droplet discharge head performed when selecting the candidate discharge nozzle, the droplets of the pre-selection droplet discharge head are here. The discharge characteristic acquisition will be described. In the following description, the description will be made ignoring the existence of the invalid discharge nozzles irrespective of drawing or measurement.

  The manufactured pre-selection droplet discharge heads, which are a large number of pre-selection functional droplet discharge heads 17 manufactured, each acquire the discharge amount, discharge speed, discharge failure, etc. at each discharge nozzle 98 by an inspection device (not shown). . In particular, the discharge amount of each discharge nozzle 98 is measured for a plurality of discharge nozzles 98 at both ends, and the discharge nozzles 98 at both ends are measured for the remaining discharge nozzles 98 (a plurality of discharge nozzles 98 located in the middle). From the measurement results, an approximate characteristic diagram (see FIG. 6) is used. Thus, it is necessary to measure all the discharge nozzles 98 by obtaining the droplet discharge amounts of all the discharge nozzles 98 in each nozzle row 99 from the approximate characteristic diagram based on the measurement results of several discharge nozzles 98. Therefore, the droplet discharge amount of all the discharge nozzles 98 can be acquired efficiently. In addition, by creating an approximate characteristic diagram based on the discharge nozzles 98 at both ends, it is possible to obtain exact values for the discharge nozzles 98 at both ends used for fixing the arrangement of the functional liquid droplet discharge heads 17. it can. The approximate characteristic diagram is preferably a sixth-order approximate curve. Further, the discharge failure includes no discharge, flight bend, abnormal discharge and the like.

  Next, based on the obtained droplet discharge characteristics, a plurality of candidate droplet discharge heads are selected from a large number of pre-selection droplet discharge heads. That is, in one pre-selection droplet discharge head, it is determined that the variation of the individual droplet discharge amount in all the discharge nozzles 98 is within a predetermined range, and it is a non-defective product based on the determination of the discharge speed, the flight curve, and the like. If determined, the pre-selection droplet discharge head is selected as a candidate droplet discharge head. As described above, the proper arrangement can be easily performed by having the condition that the variation of the individual droplet discharge amount in all the discharge nozzles 98 is within a predetermined range as the determination condition. It should be noted that the number of selected candidate droplet discharge heads is prepared to exceed the number of functional droplet discharge heads 17 to be arranged. As a result, the possibility of satisfying the conditions used for the arrangement and fixation of the functional liquid droplet ejection heads 17 increases, and the number of sets (patterns) that satisfy the conditions increases. For this reason, it is possible to easily and reliably perform the fixed arrangement according to the conditions while improving the yield of the functional liquid droplet ejection head 17.

  As shown in FIG. 7, the arrangement and fixation of the functional liquid droplet ejection head 17 is performed so as to satisfy two conditions of the innermost end nozzle condition and the outermost end nozzle condition. These conditions are considered for each color of the functional liquid. Therefore, here, the R color will be described as an example.

  The innermost nozzle condition is that each of the four functional liquid droplet ejection heads 17 on the carriage plate 53 (because each color has four colors) is located between the functional liquid droplet ejection heads 17 adjacent to each other in the nozzle row 99 direction. The condition is that the difference between the two discharge nozzles 98 at the innermost end is within a predetermined tolerance range. This tolerance range is set based on a difference in droplet discharge amount that does not cause color unevenness when discharge landing results (landing functional droplets) are adjacent to each other. For example, in the present embodiment, the difference in droplet discharge amount is allowed to be 0.65% (0.65% of the standard value of 1.011 pl).

  The outermost nozzle condition is that, in the functional liquid droplet ejection head 17 located at both outer ends in the direction of the nozzle row 99 on the carriage plate 53, two ejection nozzles 98 arranged at both outer ends thereof, that is, at the right end. Two discharge nozzles 98 each have a predetermined reference amount range with respect to the discharge nozzle 98 at the right end of the functional droplet discharge head 17 disposed and the discharge nozzle 98 at the left end of the functional droplet discharge head 17 disposed at the left end. It is a condition that it falls within. This reference amount range is a range in which the standardized droplet discharge amount at one discharge nozzle 98 is an intermediate value, and is based on a range of droplet discharge amounts in which mutual color unevenness does not occur in adjacent discharge landing results. Is set. For example, in the present embodiment, it is 1.011 pl ± 0.45% (0.45% of the standard value 1.011 pl).

  In this manner, each functional liquid droplet ejection head 17 is arranged so that the two ejection nozzles 98 positioned at the innermost ends of the functional liquid droplet ejection heads 17 adjacent to each other in the nozzle row 99 direction fall within a predetermined tolerance range. By fixing the arrangement, it is possible to suppress the difference in the landing amount in the adjacent discharge landing results discharged and landed from different functional liquid droplet ejection heads 17 between the functional liquid droplet ejection heads 17 arranged and fixed on the common carriage plate 53. it can. In addition, the functional droplet discharge heads 17 are arranged and fixed so that the droplet discharge amount falls within a predetermined reference amount range at the two discharge nozzles positioned at both outermost ends of the carriage plate 53 in the nozzle row 99 direction. As a result, the difference in the landing amount in adjacent discharge landing results (functional droplets) discharged and landed from different functional droplet discharge heads 17 between the functional droplet discharge heads 17 arranged and fixed on another carriage plate 53 is calculated. Can be suppressed. Therefore, it is possible to improve drawing quality by the plurality of functional liquid droplet ejection heads 17 while allowing different liquid droplet ejection characteristics for each functional liquid droplet ejection head 17.

  In addition, in the innermost nozzle condition, the tolerance range is set based on the difference in the droplet discharge amount that does not cause color unevenness when the discharge landing results are adjacent to each other. In the adjacent discharge landing results discharged from the two discharge nozzles 98 located at the inner end, it is possible to perform a higher quality drawing process without color unevenness.

  Further, in the outermost nozzle condition, the reference amount range is determined in a range in which the standardized droplet discharge amount in one discharge nozzle is an intermediate value, and thus approximates the standardized droplet discharge amount. Therefore, the variation in the droplet discharge amount can be suppressed, and the reference amount range is determined based on the range of the droplet discharge amount that does not cause color unevenness in adjacent discharge landing results. As a result, it is possible to perform a higher quality drawing process without color unevenness.

When there are a plurality of options that fall within a predetermined reference amount range under the outermost nozzle condition, droplet ejection from the middle value (standard value) of each set of reference amount ranges and the two outermost discharge nozzles 98 is performed. Select the option that minimizes the sum of squared differences from the quantity. Thereby, the difference in the droplet discharge amount of the two discharge nozzles 98 can be further suppressed, and a higher quality drawing process can be performed. For example, the intermediate value is 1.011 pl, there are two options, and the droplet discharge amounts of the two discharge nozzles of one set are 1.011 + 0.5 pl and 1.011-0.1 pl, and the other set is two When the droplet discharge amount of the discharge nozzle is 1.011 + 0.3 pl and 1.011−0.2 pl, the sum of squares of the difference between the intermediate value of one set and the droplet discharge amount is (1.011− (1.011 + 0.5)) ² + (1.011− (1.011−0.1)) ² = 0.26, the sum of squares of the difference between the other set of intermediate values and the droplet discharge amount is (1.011- (1.011 + 0.3)) ² + (1.011- (1.011-0.2)) ² = 0.13. Therefore, in this case, the other set having the minimum value 0.13 is selected.

  The droplet discharge amount used for these conditions is a numerical value normalized on the assumption that the average droplet discharge amount in each nozzle row 99 is an absolute target, and the absolute target droplet discharge amount is 1. It is preferable that Thereby, it is possible to easily compare the droplet discharge amount with the absolute target.

  Further, the droplet discharge amount to be compared to determine whether it falls within the tolerance range or the reference amount range is the droplet discharge amount of a plurality (ten each) of the discharge nozzles 98 positioned at the end of the nozzle row 99. An average value is preferable. That is, this average value is set as the droplet discharge amount of each discharge nozzle 98 used for the comparison. As a result, the variation in the droplet discharge amount of one discharge nozzle 98 can be reduced, and it can be compared more accurately whether it falls within the reference amount range. Furthermore, in the selection of the options under the outermost nozzle conditions, it is preferable that the sum of squares of the difference between each of the five discharge nozzles located at both outer ends and the intermediate value is used as a comparison target.

  With the above-described configuration, each functional liquid droplet is ejected so that the two ejection nozzles 98 positioned at the innermost ends of the functional liquid droplet ejection heads 17 adjacent to each other in the nozzle row 99 direction fall within a predetermined tolerance range. By arranging and fixing the head 17, the difference in landing amount between adjacent functional liquid droplets ejected and landed from different functional liquid droplet ejection heads 17 between the functional liquid droplet ejection heads 17 disposed and fixed on the common carriage plate 53. Can be suppressed. In addition, the respective functional liquid droplet ejection heads 17 are arranged and fixed so that the liquid droplet ejection amounts fall within a predetermined reference amount range at the two ejection nozzles 98 positioned at both outermost ends of the carriage plate 53 in the nozzle row 99 direction. By doing so, it is possible to suppress a difference in landing amount between adjacent functional liquid droplets discharged and landed from different functional liquid droplet discharge heads 17 between the functional liquid droplet discharge heads 17 arranged and fixed on another carriage plate 53. . Therefore, it is possible to improve drawing quality by the plurality of functional liquid droplet ejection heads 17 while allowing different liquid droplet ejection characteristics for each functional liquid droplet ejection head 17.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 8 is a flowchart showing the manufacturing process of the color filter, and FIG. 9 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 9B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 9C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 9D, the functional liquid droplets are ejected by the functional liquid droplet ejection head 17, and each pixel region 507a is surrounded by the partition wall portion 507b. Let it land. In this case, the functional liquid droplet ejection head 17 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 10 is a cross-sectional view of a main part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 9, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 10 are formed at predetermined intervals. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 17. Further, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 17.

FIG. 11 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 12 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 13 is a cross-sectional view of a main part of a display area of an organic EL device (hereinafter simply referred to as a display device 600).

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is schematically configured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, the manufacturing process of said display apparatus 600 is demonstrated with reference to FIGS.
As shown in FIG. 14, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 15, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The region to be subjected to the lyophilic treatment is the first laminated portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b. )
By performing this surface treatment process, when forming the functional layer 617 using the functional liquid droplet ejection head 17, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 21 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 17, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 17 to each opening 619 that is a pixel region. Discharge inside. Thereafter, as shown in FIG. 18, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 19, the second composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 19) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process and the like, the second composition after discharge is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 20, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 17, as shown in FIG. 21, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 22, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 23 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 21 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 17. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 17, and it corresponds. Land in the color discharge chamber 705.

Next, FIG. 24 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 25A, and when these are formed, as shown in FIG. 25B. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

  1: droplet ejection device, 13: head unit, 17: functional droplet ejection head, 53: carriage plate, 54: head group, 98: ejection nozzle, 99: nozzle row, W: workpiece.

Claims (3)

A head unit having a plurality of droplet discharge heads in which a nozzle row composed of a plurality of discharge nozzles is formed,
For each of the two droplet ejection heads adjacent to each other in the nozzle row direction , a plurality of other droplet ejection heads are sequentially displaced in the nozzle row direction and the direction orthogonal to the nozzle row direction. Thus, one drawing line is constituted by the plurality of droplet discharge heads,
The difference between the discharge amounts of the discharge nozzles located at the innermost ends of the two droplet discharge heads adjacent to each other in the nozzle row direction is within 0.65% of the standard value;
And the discharge amount of the discharge nozzle located at both outermost ends in the nozzle row direction of the head unit falls within the range of the standard value ± 0.45%,
The head unit according to claim 1, wherein the standard value is an average droplet discharge amount in the nozzle row of the droplet discharge head. A head unit according to claim 1;
First moving means for moving a workpiece in a first direction with respect to the head unit;
A droplet discharge apparatus, wherein the functional liquid is discharged from the plurality of droplet discharge heads of the head unit to the workpiece while the workpiece is moved by the first moving unit. A film forming unit using functional droplets on the workpiece, using the droplet discharge device according to claim 2.
Forming an electro-optical device.

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