TWI481449B - Device for applying film - Google Patents

Description

Coating element

This proposal relates to a coating element, in particular a coating head for a film coating apparatus.

As the luminous efficiency and lifetime reliability of organic light-emitting diodes continue to increase, and the price is significantly reduced, the proportion of organic light-emitting diode lighting devices in the market will continue to rise.

Among them, in the manufacturing process of the machine-emitting diode panel, the influence of the film-forming technology of the ultra-thin film on the production cost of the product is very significant. Therefore, how to make the coating head of the coating device uniformly coat the photoresist with a film thickness of nanometer level is an important design goal of the engineer.

Generally, the coating head has a liquid outlet and a slit connected to the liquid outlet, and the photoresist liquid flows out through the slit through the slit. Wherein, the slit divides the coating head into upper and lower coating lips, and the displacement direction of the substrate relative to the coating head is from the upper coating lip to the lower coating lip. Since the photoresist is applied to the substrate while flowing out of the liquid outlet, the substrate is constantly displaced relative to the coating head. During the movement of the substrate, the photoresist is affected by the displacement of the substrate and the surface energy of the material itself, so that the photoresist also forms a recirculation zone at the outlet to form a Photoresist beads. If the photoresist bead moves during the coating process of the substrate, the photoresist droplet moves largely from the liquid outlet to the lower lip direction (downstream end), which may deteriorate the coating effect, for example, cause uneven film thickness. Or the problem of too thick film. Therefore, how to stabilize the photoresist beads to remain at the liquid outlet to ensure the quality during the coating process will be one of the important considerations for the design of the coating head.

The conventional coating head design can use the lower coating lip to protrude from the upper coating lip to prevent the photoresist liquid droplet from moving toward the lower lip. In this way, the quality of the coating process can be ensured, and the phenomenon that the coating is poor due to the displacement of the photoresist by the downward direction of the lip is prevented. However, the design of the conventional coating head cannot simultaneously prevent the photoresist bead from moving toward the upper lip or the lower lip, and can only limit the movement of the photoresist bead to the lower lip. Therefore, the conventional design method of the coating head can only be applied to the displacement processing of the substrate relative to the coating head in a single direction, which is inconvenient for the coating process.

In view of the above problems, the present invention proposes to provide a coating member for solving the problem that the coating head of the conventional coating apparatus can maintain only the stability of the unidirectional coating, which causes inconvenience in the coating process.

The coating element disclosed in the proposal is suitable for guiding a coating material to coat the surface of a substrate. The coating element includes a first slit segment and a second slit segment. The first slit segment has a first wall body and a second wall body, and a first slit is formed between the first wall body and the second wall body. The second slit section has a first coating lip, a second coating lip and a paint outlet, the first coating lip is connected to the first wall body, the second coating lip is connected to the second wall body, the first coating lip and the second coating layer There is a second slit between the lips. The two ends of the second slit are respectively connected to the paint outlet and the first slit, the width of the second slit is larger than the width of the first slit, and the distance from the first coating lip to a center line of the first slit is second The ratio of the distance from the lip to the centerline of the first slit is between 0.5 and 1.5.

According to the coating element disclosed in the above proposal, the width of the second slit is greater than the width of the first slit, and the distance from the first coating lip to a center line of the first slit is greater than the second coating lip to the first The distance from the centerline of the slit. Designed in such a size of the coating member, it is possible to provide the coating member with a good two-way ultra-thin film coating quality to provide convenience in the coating process.

The features, implementation and efficacy of this proposal are described in detail below with reference to the preferred embodiment of the drawings.

Please refer to "1A" to "1C" and "2A". "1A" is a structural diagram of a coating element according to an embodiment of the present proposal, and "1B" is based on A cross-sectional view showing a structure of a coating member according to an embodiment of the present invention, "1C" is a partial structural sectional view of a coating member according to FIG. 1B, and "2A" is a coating coating according to an embodiment of the present proposal. A schematic representation of the application of the cloth element to the substrate.

The coating member 10 of the present embodiment is a coating head of an ultrathin film coating apparatus having a coating outlet 230 and a coating inlet 240. The coating member 10 is used to guide a coating to coat the coating on the surface of a substrate 400 in an ultra-thin film. The coating element 10 includes a first slit segment 100 and a second slit segment 200.

The first slit segment 100 has a first wall body 110 and a second wall body 120. The first wall body 110 and the second wall body 120 have a first slit 101 therebetween. In addition, the first wall 110 has an adjacent first wall surface 111 and a first sidewall surface 112. The second wall 120 has an adjacent second wall surface 121 and a second sidewall surface 122. The first wall surface 111 of the first wall body 110 faces the second wall surface 121 of the second wall body 120, and the first slit 101 is formed between the first wall surface 111 and the second wall surface 121. Further, the first slit 101 has a width D1 which is a distance between the first wall surface 111 and the second wall surface 121. Among them, the width D1 may be 100 μm.

The second slit segment 200 has a first coating lip 210, a second coating lip 220, and the above-described paint outlet 230. The first coating lip 210 is connected to the first wall 110 having one side of the first side wall surface 112, and the second coating 220 is connected to the second wall 120 having one side of the second side wall surface 122. There is a second slit 201 between the two coating lips 220. The two ends of the second slit 201 are respectively connected to the paint outlet 230 and the first slit 101, and the second slit 201 has a width D2, and the width D2 of the second slit 201 is larger than the width D1 of the first slit 101. In addition, the first lip 210 has an adjacent first lip surface 211 and a first surface 212, and the second lip 220 has an adjacent second lip surface 221 and a second surface 222. The first lip surface 211 of the first coating lip 210 faces the second lip surface 221 of the second coating lip 220, and the second slit 201 is formed between the first lip surface 211 and the second lip surface 221 . Further, the width D2 of the second slit 201 is the distance between the first lip surface 211 and the second lip surface 221 .

In addition, the first surface 212, the second surface 222 and the paint outlet 230 are oriented in the same direction, and the first surface 212 and the second surface 222 are in a common plane. Furthermore, when the coating member 10 performs a coating process on a substrate 400, the first surface 212, the second surface 222, and the paint outlet 230 face the substrate 400 at the same time. Moreover, the distance of the first coating lip 210 facing the substrate 400 is the same as the distance of the second coating lip 220 facing the substrate 400. Additionally, a suitable distance between the first surface 212 and the second surface 222 to the substrate 400 can be between 30 [mu]m and 100 [mu]m. It should be noted that the feature that the first surface 212 and the second surface 222 are coplanar is not used to define the proposal. In another embodiment of the present proposal, the first surface 212 and the second surface 222 may not be coplanar. . Furthermore, the distance from the first surface 212 to the substrate 400 may be greater or smaller than the distance from the second surface 222 to the substrate 400.

Moreover, the first slit 101 has a center line M, the center line M of the first lip surface 211 to the first slit 101 has a first distance a, and the center line M of the second lip surface 221 to the first slit 101 has a The second distance b. Wherein, the first distance a is greater than the second distance b, and the ratio of the first distance a to the upper second distance b is between 0.5 and 1.5. Furthermore, in another embodiment, the ratio of the first distance a to the upper second distance b may be between 0.8 and 1.2.

Further, the second slit 201 has a depth H2 which is a distance from the paint outlet 230 to the first slit 101. The depth H2 may be 30 to 110 μm. Also, in another preferred embodiment, the depth H2 may be 40 to 100 μm. Alternatively, in still another preferred embodiment, the depth H2 may be 50 to 90 μm in size.

In the embodiment, the first lip surface 211 of the first lip 210 is connected to the first sidewall surface 112 of the first wall 110, and the first lip surface 211 and the first sidewall surface 112 are substantially perpendicularly angled. Moreover, the second lip surface 221 of the second lip 220 is connected to the second sidewall surface 122 of the second wall 120, and the second lip surface 221 and the second sidewall surface 122 are substantially perpendicularly angled. It should be noted that the vertical angle between the first lip surface 211 and the first sidewall surface 112 and the vertical angle between the second lip surface 221 and the second sidewall surface 122 are not limited to the present proposal. For example, in another embodiment of the present invention, an obtuse angle θ1 may be sandwiched between the first lip surface 211 and the first sidewall surface 112, and a second lip surface 221 and the second sidewall surface 122 may be sandwiched between The obtuse angle θ2 is shown in Figure 4. Alternatively, in another embodiment of the present proposal, the first lip surface 211 is connected to the first sidewall surface 112 through a first curved surface 113, and the second lip surface 221 is transparent to the second curved surface 123 and the second surface 221 The side wall faces 122 are connected as shown in Fig. 5.

Next, please refer to "Fig. 2A" and "Fig. 3" at the same time, wherein "Fig. 3" is a flow field analysis diagram of the coating material in the coating process according to an embodiment of the present proposal.

The substrate 400 in the "second A" is moved by the first coating lip 210 toward the second coating lip 220 with respect to the paint outlet 230. At this time, the gas-liquid interface 520, 530 between the coating material 500 between the paint outlet 230 and the substrate 400 and the outside air present a concave curved surface toward the paint outlet 230. This phenomenon represents a phenomenon in which no paint 500 is accumulated at the paint outlet 230, which ensures that the coating member 10 can apply the coating material 500 to the substrate 400 in an ultrathin film form, and can have a stable and good performance. The processing quality is applied without causing the problem that the thickness of the film is too thick or uneven due to the accumulation.

Referring to FIG. 3, in the process of coating the coating material 10 on the substrate 400, the coating material 500 is formed by a clockwise rotation at the paint outlet 230 due to the movement of the substrate 400. The recirculation zone 510 forms a coating bead. With the structural design of the coating member 10 of the present embodiment, the coating liquid droplet formed by the coating material 500 can be restricted between the first lip surface 211 and the second lip surface 221, thereby ensuring the coating process. The stability is such that the thickness of the film formed by the coating material 500 on the substrate 400 is not uniform, and the film thickness specification is out of the preset film thickness range.

In the above embodiment, the substrate 400 is moved from the first coating lip 210 toward the second coating lip 220 with respect to the paint outlet 230, however, this feature is not intended to limit the present proposal. Furthermore, the coated component 10 of the present invention has a stable two-way ultra-thin film coating effect.

Referring to "2B", in the "2B", the substrate 400 is moved toward the first coating lip 210 by the second coating lip 220 with respect to the paint outlet 230. The gas-liquid interface 520, 530 between the paint 500 and the outside air between the paint outlet 230 and the substrate 400 all exhibit a concave surface that is concave toward the paint outlet 230. This phenomenon represents the occurrence of the absence of paint 500 on the first lip 210 or the second lip 220 at the paint outlet 230, thus ensuring that the coating member 10 is in the process of applying the coating 500 to the substrate 400. , can have stable and good processing quality. Therefore, the shape of the gas-liquid interface 520, 530 between the coating material 500 of "Fig. 2A" and "Fig. 2B" and the outside air can prove that the coating member 10 of the present invention can have a stable two-way ultrathin film. Coating efficacy. The coating member 10 of the present embodiment has better processing utility as compared with the coating head of the conventional coating apparatus which can maintain only the coating quality of the substrate 400 in a single direction. Moreover, the structure of the coating member 10 according to the present embodiment is designed during the actual coating process, regardless of whether the substrate 400 is moved from the second coating lip 220 toward the first coating lip 210 with respect to the coating outlet 230, or by the first coating. The lip 210 moves toward the second coating lip 220, and the liquid mold thickness of the coating material 500 applied to the substrate 400 can reach a uniform film thickness of 10 μm or less. Further, when the liquid mold thickness on the substrate 400 is dried to a solid mold thickness, the solid mold thickness can reach a nano-scale film thickness of 1 μm or less.

The coating member according to the above embodiment, wherein the width of the second slit is greater than the width of the first slit, and the distance from the first coating lip to a center line of the first slit is greater than the second coating lip to the first slit The distance between the center lines of the seams. The coating element is designed to effectively stabilize the coating bead formed by the recirculation zone between the first coating lip and the second coating lip. Therefore, the coating member of the present embodiment has the effect of good two-way ultra-thin film coating quality to provide convenience in the coating process.

While the present invention has been disclosed in the foregoing preferred embodiments, it is not intended to limit the present invention. Any skilled person skilled in the art can make some changes and refinements without departing from the spirit and scope of the present proposal. The scope of patent protection of the proposal shall be subject to the definition of the scope of the patent application attached to this specification.

10. . . Coating element

100. . . First slit segment

101. . . First slit

110. . . First wall

111‧‧‧First wall

112‧‧‧First side wall

113‧‧‧First curved surface

120‧‧‧Second wall

121‧‧‧ second wall

122‧‧‧Second side wall

123‧‧‧second curved surface

200‧‧‧Second slit section

201‧‧‧Second slit

210‧‧‧First lip

211‧‧‧ first lip

212‧‧‧ first surface

220‧‧‧second lip

221‧‧‧second lip

222‧‧‧ second surface

230‧‧‧ Paint exports

240‧‧‧ paint entrance

400‧‧‧Substrate

500‧‧‧ paint

510‧‧‧Recirculation zone

520‧‧‧ gas-liquid interface

530‧‧‧ gas-liquid interface

Fig. 1A is a structural view of a coating member according to an embodiment of the present proposal.

Fig. 1B is a cross-sectional view showing the structure of a coating member according to an embodiment of the present proposal.

Fig. 1C is a cross-sectional view showing a partial structure of the coating member according to Fig. 1B.

Fig. 2A is a schematic view showing a coating material applied to a substrate by a coating member according to an embodiment of the present proposal.

2B is another schematic view of the coating material applied to the substrate by the coating member according to an embodiment of the present proposal.

Fig. 3 is a flow field analysis diagram of a coating material in a coating process according to an embodiment of the present proposal.

Figure 4 is a cross-sectional view showing the structure of a coating member according to another embodiment of the present proposal.

Figure 5 is a cross-sectional view showing the structure of a coating member according to still another embodiment of the present proposal.

10. . . Coating element

100. . . First slit segment

101. . . First slit

110. . . First wall

111. . . First wall

112. . . First side wall surface

120. . . Second wall

121. . . Second wall

122. . . Second side wall

200. . . Second slit segment

201. . . Second slit

210. . . First lip

211. . . First lip

212. . . First surface

220. . . Second lip

221. . . Second lip

222. . . Second surface

230. . . Paint export

400. . . Substrate

Claims (7)

A coating member adapted to guide a coating material and coating the coating material on a surface of a substrate, comprising: a first slit segment having a first wall body and a second wall body, the first wall Between the body and the second wall, a first slit; and a second slit segment having a first lip, a second lip and a paint outlet, the first lip connecting the first a second coating body is connected to the second wall body, and a second slit is disposed between the first coating lip and the second coating lip, and the two ends of the second slit are respectively connected to the paint outlet and the a first slit, the width of the second slit is greater than a width of the first slit, and a distance from the first coating lip to a center line of the first slit is greater than the second coating lip to the first slit The ratio of the distance of the center line of the slit is between 0.8 and 1.2. The coating member of claim 1, wherein the first coating lip has a first surface, the second coating lip has a second surface, the first surface, the second surface and the paint outlet The same direction, and the first surface is coplanar with the second surface. The coating member of claim 1, wherein the second slit has a second slit depth, and the second slit has a depth ranging from 30 to 110 μm. The coating member according to claim 3, wherein the second slit has a preferred range of 40 to 100 μm. The coating member of claim 4, wherein the second slit has a preferred range of 50 to 90 μm. The coating member of claim 1, wherein the first wall body has a first a second side wall having a second side wall surface, the first coating lip connecting the first side wall surface, the second coating lip connecting the second side wall surface, and the first side wall surface and the first coating surface An obtuse angle is formed between the lips or between the second side wall surface and the second coating lip. The coating member of claim 1, wherein the first wall body has a first side wall surface, the second wall body has a second side wall surface, and the first coating lip is connected to the first side wall surface, The second coating lip is connected to the second side wall surface, and the first side wall surface and the first coating lip are connected between the second side surface and the second coating lip through a curved surface.