201238668 六、發明說明： 【發明所屬之技術領域】 本提案係關於一種塗佈元件，特別是一種用於薄膜塗佈裝置 的塗頭。 【先前技術】 隨著有機發光二極體的發光效率及壽命可靠度不斷提升，加 上價格顯著降低，有機發光二極體照明設備在市場的比重將不斷 的上升。 其中，在機發光二極體面板的製造過程中，超薄薄膜的塗膜 技術之優劣對於產品的生產成本之影響是非常的顯著。因此，如 何使塗膜裝置的塗頭將絲液以奈米級的膜厚均勻地塗佈上一基 材，將是工程人員重要的設計目標。 /-般_係具有-出液Π以及輕出紗的―狹縫，光阻液 係經由狹縫而由出液口流出。其巾，狹縫將_分為上、下兩塗 唇，而基材相對於塗頭的位移方向係由上塗唇至下塗唇之方向^ 由於光阻液在Μ紗流“塗佈於基材的過財，雜係稍 地相對_轉。在基材的運動過財，光隨由於受到基材位 移牽引的影_及㈣材表面能(Surfaee Energy)的仙，因此 ，同時以成光阻液在歧σ處形成—迴流區而構成—光阻液珠。 =阻液珠在基材塗佈的過程中，光_珠大量地由出液口朝下 ς 下游端)而移動’將使得塗佈的效果變差，例如造成膜厚 量因素 口卢:^厚過厚的問題。因此，如何穩定光阻液珠保持於出液 处以確保塗佈過程中的品質，將是塗頭設計的重要考 201238668 — Ο 習知的塗職計，射_其下塗絲上塗唇凸出， 光阻液珠朝下塗辰方向移動‘ “方⑽動如此一來，即可確保塗佈過程的品 質’避免光阻液珠朝下塗唇方位移而造成塗佈不良的現象發生。 然而’習知_的設計並無法_避免光阻液珠朝上塗唇或下塗 唇方向移動’僅能單單_光崎珠不朝下塗唇的方向移動。因 此，目前習知魏的設計手段健適胁基材姉塗頭朝單一方 向位移加工，如此對於塗佈加卫過程將是—種不便。 【發明内容】 馨於以上關題’本提案在於提供—缝佈元件，藉以解決 習知塗佈設制_僅能轉單向塗佈的穩定性，造成塗佈加工 過程之不便的問題。 本提案所揭露之塗佈元件，適於導引—塗料*將塗料塗佈於 一基材表面。塗佈元件包含一第一狹縫段及一第二狹縫段。第一 狹縫段具有-第-壁體及—第二壁體，第—壁體與第二壁體之間 具有一第一狹縫。第二狹縫段具有一第一塗唇、一第二塗唇及一 塗料出口，第一塗唇連接第一壁體，第二塗唇連接第二壁體，第 -塗I與第―塗唇間具有—第二狹縫。第二狹縫之兩端分別連接 塗料出口及第一狹縫，第二狹縫的寬度大於第一狹縫的寬度，第 一塗唇至第一狹縫的一中線的距離比上第二塗唇至第一狹縫的中 線的距離之比例介於0.5至1.5之間。 根據上述本提案所揭露之塗佈元件，第二狹縫的寬度係大於 第一狹縫的寬度，且第一塗唇至第一狹縫的一中線之距離大於第 201238668 二塗唇至第-狹_ t線之距離。是以這樣的塗佈元件之尺寸設 計’可提供塗佈元件具有良好地雙向超_膜塗佈品質之功效， 以提供塗佈加工過程中的便利性。 ，有關本提案的特徵、實作與功效，賊合圖式作最佳實施例 洋細說明如下。 【實施方式】 請參照「第1A圖」至「第1C圖」並搭配「第2A圖」，「第 1A圖」係為根據本提案一實施例之塗佈元件的結構圖，「第汨圖」 係為根據本提案-實施例之塗佈树的結構剖視圖，「第⑴圖」 係為根據第1B圖之塗佈元件的局部結構剖視圖，「第2A圖」係 為根據本提案-實施例之塗料由塗佈元件塗佈於基材的示咅、圖。 本實施例之塗航件1G，其係為—超薄薄膜的塗佈設備之塗 頭，塗佈元件ίο具有相對的-塗料出口 23〇及一塗料入口 24〇。 塗佈元件則以導引-塗料而將塗料以超薄薄膜的型態塗佈於一 基材40◦絲。塗佈元件1()包含—第—狹縫段刚及一第二狹縫 段 200。 其中，第一狹缝段 旲有相對的一第一壁體110及一第 壁體m，第-壁體no與第二壁體12〇之間具有—第一狹縫則 此外，第-壁體no具有相鄰的—第—壁面⑴及一第一側聲 m’第二壁體12〇具有相鄰的—第二壁面i2i及一第二側壁 122。第-壁體到第-壁面m面對第二壁體⑽的第二壁 121，第一狹缝101即形成於第-壁面in與第二㈣121之間 並且，第-狹縫101具有-寬度m，寬度D1即為第一壁面i 201238668 與第二壁面121之間的距離。其中，寬度D1可以為1〇〇μιη。 第一狹縫段200具有一第一塗唇21〇、一第二塗唇220及上述 的塗料出口 230。第一塗唇210連接於第一壁體11〇具有第一側壁 面112之一側，第二塗唇220連接第二壁體12〇具有第二側壁面 122之一側，第一塗唇21〇與第二塗唇22〇之間具有一第二狹縫 201。第二狹縫201之兩端分別連接塗料出口 23〇及第一狹縫丨〇丄， 且第二狹縫201具有一寬度D2，第二狹縫2〇1的寬度〇2大於第 一狹縫101的寬度D1 〇此外，第一塗唇210具有相鄰的一第一唇 面211及一第一表面212，第二塗唇22〇具有相鄰的一第二唇面 221及一第二表面222。第一塗唇21〇的第一唇面211面對第二塗 唇220的第二唇面22卜第二狹縫201即形成於第一唇面211與第 二唇面221之間。並且，第二狹縫2〇1的寬度D2即為第一唇面 211與第二唇面221之間的距離。 此外’第一表面212、第二表φ 222與塗料出口 230係朝向同 一方向’且第-表面212與第二表面222共-平面。更進一步來 說’當塗佈元件10對一基材4〇〇進行塗部加工時，第一表面^2、 第-表面222與塗料出σ 230係同時面向基材40Q。並且，第一塗 唇210面對基材400的距離與第二塗唇22〇面對基材·的距離 係相同。此外，第一表面212與第二表面迎至基材的適當 距離可為30μιη到觸师之間。需注意的是，上述之第一表面犯 ，第二表面222共平面的特徵非用以限定本提案，在本提案另一 實施例當中’第-表面212與第二表面迎也可以不共平面。更 進一步來說，第-表面犯至基材的距離可以大於或是小於 201238668 第二表面222至基材400的距離。 並且，第一狹縫101具有一中線M，第一#面2ιι至第—狹 縫的中線Μ有-第一距離a，第二唇面221至第一狹縫· 的中線Μ有-第二距離b。其中，第一距離&係大於第二距離^ 且第-距離a比上第二距離b之比例係介於G 5至i 5之間。此外， 在另-實施例當中，第-距離a比上第二距離b之比值更可介於 0.8至1.2之間。 ' 此外，第二狹縫201具有一深度H2，深度H2係由塗料出口 230至第一狹缝101之間的距離。深度H2的尺寸可以是3〇〜h叫 m。並且’在另一較佳實施例當中，深度H2的尺寸可以是4〇〜ι〇(^ m。或者’在又一更佳實施例當中，深度H2的尺寸可以是 m ° 在本實施例中，第一塗唇210的第一唇面211係連接第一辟 體110的第一側壁面112，且第一唇面211與第一側壁面112之間 概略呈現垂直夾角。並且，第二塗唇220的第二唇面221係連接 第二壁體120的第二侧壁面122，第二唇面221與第二側壁面122 之間概略呈現垂直夾角。需注意的事，上述第一唇面211與第一 側壁面Π2之間概略呈現垂直夾角以及第二唇面221與第二側壁 面122之間概略呈現垂直夾角之特徵非用以限定本提案。舉例來 說，在本提案另一實施例當中，第一唇面211與第一側壁面U2 之間也可夾一鈍角Θ1，第二唇面221與第二側壁面122之間也可 夾一鈍角Θ2，如「第4圖」所示。或者’在本提案又一實施例當 中’第一唇面211可透過一第一弧面113而與第一側壁面η〕相 201238668 連，第二唇面221可透過一第二弧面123而與第二側壁面122相 連，如「第5圖」所示。 接著請同時參照「第2A圖」及「第3圖」，其中「第3圖」 係為根據本提案一實施例之塗料於塗佈過程中的流場分析圖。 其中，「第2A圖」中的基材400係相對塗料出口 23〇而由第 塗唇210朝向第二塗唇220移動。此時，位於塗料出口 23〇與 基材400間的塗料500與外界空氣之間的氣液交界面52〇、53〇了 係皆呈現出朝塗料出π 23G _的弧面。這觀象代表著塗料出 口 230處並無塗料500積料的現象發生，如此可確保塗佈元件忉 將塗料500以超薄薄膜型態塗佈於基材4〇〇的過程中，能夠具有 穩定良好的塗佈加工品質’而不會因積料所造成_膜厚過厚或 不均的問題發生。 請接著參照「第3圖」，在塗佈树ω於塗佈塗料於基 材400的過程中，塗料5〇〇會因受基材4〇〇的移動影響，而於^ 料出口 230處形成-順時針旋轉的迴流區51〇而構成一塗料液 珠。藉由本實施例之塗佈元件10的結構設計，可使塗料^所形 成的塗料液珠被侷限於第一唇面211與第二唇面221之間，如此 -來也可確健佈加:定度，避免基材上之塗料· 所形成之膜厚的厚度不均’進而使膜厚的規格超出預設的膜厚範 圍。 上述實施例中，基材_係相對塗料出口 23〇而由第一塗唇 210朝向第二塗唇220移動’然而此特徵非用以限定本提案。更進 -步來說，本提案之塗佈树1G係具有穩定的雙向超薄薄膜塗佈 201238668 功效。 -月參照「第2B圖」，在「第2B圖」中，基材4〇〇係相對塗 料出口 230而由第二塗唇22〇朝向第一塗唇21〇移動。其中位於 塗料出口 230與基材4〇〇間的塗料5〇〇與外界空氣之間的氣液交 界面520、530 ’係皆呈現出朝塗料出口 23〇内凹的弧面。這種現 象代表著塗料出〇 23〇處並無塗料積料於第一塗唇2ι〇或第 -塗唇220的現象發生’如此可確保塗佈元件1〇於塗佈塗料_ 録材的過程中，能夠具有穩定良好的加工品質。因此，由 第2A圖」與「第2B圖」之塗料5〇〇與外界空氣之間的氣液交 界面520、530之形狀’可證明本提案之塗佈元件1〇可具有穩定 的雙向超薄薄膜塗佈功效。相較於習用塗佈設備的塗頭僅能維持 基材400單-向之加工方向的塗佈品質，本實施例之塗佈元件⑺ 具有更佳的加工實用性。並且，根據本實施例之塗佈元件⑺的結 構設計於實際塗佈過程當中，無論基材4〇〇相對塗料出口 2孙是 由第二塗| 220朝向第一塗唇21〇移動，或是由第一塗唇加朝 向第二塗唇220移動，塗料5〇〇塗佈於基材上的液態模厚均 可達到ΙΟμιη以下的均勻膜厚。並且’當基材彻上的液態模厚 乾燥為固態模厚時，固態模厚更可達到_以下的奈米等級膜厚。 根據上述實施例之塗佈元件，其中第二狹縫的寬度係大於第 • 一狹缝的寬度，^第―塗唇至第-狹縫的-中線之距離大於第二 塗唇至第-狹縫的中線之距離。是以這樣的塗佈元件之尺寸設 計，可有效地將迴流區所構成之塗料液珠穩定地侷限於第一塗唇 與第一塗唇之間。因此，本實施例之塗佈元件具有良好地雙向超 201238668 薄薄臈塗佈品質之功效，以提供塗佈加卫過程中的便利性。 雖然本提案以前述之較佳實施例揭露如上，然 ^本^案，任何《相像技藝者，在不脫離本提k = 内二當可作些許之更動與潤飾，因此本提案之專利保護範圍: 本5兄明書所附之申請專利範圍所界定者為準。 、 【圖式簡單說明】 第1A圖係為根據本提案—實補之塗佈元件的結構圖。 第1B圖係為根據本提案—實施例之塗佈元件的結構剖視圖。 第1C圖係為根據第1B圖之塗佈元件的局部結構剖視圖。 第2A圖係為根據本提案一實施例之塗料由塗佈元件塗佈於基 材的示意圖。 、.土 第2B圖係為根據本提案一實施例之塗料由塗佈元件塗佈於基 材的另一示意圖。 f 3 _為根據本提案—實施例之塗料於塗佈過程中的流場 分析圖。 第4圖係為根據本提案另-實施例之塗佈元件的結構剖視圖。 第5圖係為根據本提案再一實施例之塗佈元件的結構剖視圖。 【主要元件符號說明】 10 塗佈元件 100 第一狹縫段 101 第一狹縫 110 第一壁體 201238668 111 第一壁面 112 第一側壁面 113 第一弧面 120 第二壁體 121 第二壁面 122 第二側壁面 123 第二弧面 200 第二狹缝段 201 第二狹缝 210 第一塗唇 211 第一唇面 212 第一表面 220 第二塗唇 221 第二唇面 222 第二表面 230 塗料出口 240 塗料入口 400 基材 500 塗料 510 迴流區 520 氣液交界面 530 氣液交界面201238668 VI. Description of the Invention: [Technical Field to Which the Invention Is Ascribed] This proposal relates to a coating member, particularly a coating head for a film coating apparatus. [Prior Art] As the luminous efficiency and lifetime reliability of organic light-emitting diodes continue to increase, and the price is significantly reduced, the proportion of organic light-emitting diode lighting devices in the market will continue to rise. Among them, in the manufacturing process of the machine-emitting diode panel, the influence of the film-forming technology of the ultra-thin film on the production cost of the product is very significant. Therefore, it is an important design goal of the engineer to make the coating head of the coating device uniformly apply the silk liquid to the substrate at a nanometer thickness. / - The _ is a slit that has a liquid discharge and a light discharge, and the photoresist liquid flows out through the slit through the slit. The towel, the slit is divided into upper and lower lips, and the direction of displacement of the substrate relative to the coating head is from the upper lip to the lower lip ^ because the photoresist is applied to the substrate in the crepe flow The wealth of the miscellaneous, the miscellaneous slightly relative to the _ turn. In the movement of the substrate, the light is affected by the displacement of the substrate and the surface energy (Surfaee Energy), therefore, at the same time as a photoresist The liquid forms at the difference σ—the recirculation zone constitutes a photoresist bead. = The liquid-resistant bead moves during the coating of the substrate, and the light-beads move largely from the liquid outlet to the downstream end of the lower jaw. The effect of the coating is deteriorated, for example, the thickness of the film is caused by the problem: the thickness is too thick. Therefore, how to stabilize the photoresist bead is kept at the liquid discharge to ensure the quality during the coating process, which will be the design of the coating head. Important test 201238668 — Ο The appropriation of the applicator, the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The photoresist is displaced downward by the lip, causing poor coating. However, the design of 'Knowledge' cannot prevent the photoresist from moving up in the direction of the upper lip or the lower lip. It can only move in the direction of the lower lip. Therefore, at present, the design method of the well-known Wei is suitable for the processing of the base material in a single direction, so that it is inconvenient for the coating and curing process. SUMMARY OF THE INVENTION The present invention is to provide a sewing element for solving the problem that the conventional coating method can only transfer the stability of the one-way coating, which causes inconvenience in the coating process. The coating element disclosed in this proposal is suitable for guiding-coating* to apply the coating to a substrate surface. The coating element includes a first slit segment and a second slit segment. The first slit section has a -th wall body and a second wall body, and a first slit is formed between the first wall body and the second wall body. The second slit section has a first coating lip, a second coating lip and a paint outlet, the first coating lip is connected to the first wall body, the second coating lip is connected to the second wall body, the first coating layer I and the first coating layer There is a second slit between the lips. The two ends of the second slit are respectively connected to the paint outlet and the first slit, the width of the second slit is larger than the width of the first slit, and the distance from the first coating lip to a center line of the first slit is second The ratio of the distance from the lip to the centerline of the first slit is between 0.5 and 1.5. According to the coating element disclosed in the above proposal, the width of the second slit is greater than the width of the first slit, and the distance from the first coating lip to a center line of the first slit is greater than that of the second coating lip of the 201238668 - The distance of the narrow _ t line. Designing such a size of the coating member can provide the coating member with a good two-way super-film coating quality to provide convenience in the coating process. Regarding the characteristics, implementation and efficacy of this proposal, the best example of the thief's drawing is as follows. [Embodiment] Please refer to "1A" to "1C" and "2A". "1A" is a structural diagram of a coating element according to an embodiment of the present proposal. A cross-sectional view of a coating tree according to the present invention and an embodiment, wherein the "(1) drawing" is a partial structural sectional view of the coating member according to the first drawing, and the "second drawing" is based on the present proposal - the embodiment The paint is applied to the substrate by a coating element. The coating member 1G of the present embodiment is a coating head of a coating apparatus for an ultrathin film, and the coating member ίο has a relative - paint outlet 23A and a coating inlet 24". The coating element coats the coating in a form of an ultra-thin film on a substrate 40 filament with a guide-coating. The coating member 1() includes a first slit section and a second slit section 200. Wherein, the first slit segment has an opposite first wall body 110 and a first wall body m, and between the first wall body no and the second wall body 12〇, the first slit is further provided, the first wall The body no has an adjacent first wall surface (1) and a first side sound m' second wall body 12 has an adjacent second wall surface i2i and a second side wall 122. The first wall-to-wall surface m faces the second wall 121 of the second wall body (10), the first slit 101 is formed between the first wall surface in and the second (four) 121, and the first slit 101 has a width m, the width D1 is the distance between the first wall surface i 201238668 and the second wall surface 121. Wherein, the width D1 may be 1 〇〇 μιη. The first slit section 200 has a first coating lip 21, a second coating lip 220 and the above-described paint outlet 230. The first coating lip 210 is connected to one side of the first wall surface 112 and has a first side wall surface 112. The second coating lip 220 is connected to the second wall 12 and has one side of the second side wall surface 122. The first coating lip 21 There is a second slit 201 between the crucible and the second coating lip 22〇. The two ends of the second slit 201 are respectively connected to the paint outlet 23 〇 and the first slit 丨〇丄, and the second slit 201 has a width D2, and the width 〇 2 of the second slit 2 〇 1 is larger than the first slit The width of the first coating lip 210 has an adjacent first lip surface 211 and a first surface 212, and the second coating lip 22 has an adjacent second lip surface 221 and a second surface. 222. The first lip surface 211 of the first lip 21 面对 faces the second lip surface 22 of the second coating lip 220. The second slit 201 is formed between the first lip surface 211 and the second lip surface 221. Further, the width D2 of the second slit 2〇1 is the distance between the first lip surface 211 and the second lip surface 221 . Further, the 'first surface 212, the second surface φ 222 and the paint outlet 230 are oriented in the same direction' and the first surface 212 is coplanar with the second surface 222. Further, when the coating member 10 performs a coating process on a substrate 4, the first surface ^2, the first surface 222 and the coating material σ 230 are simultaneously faced to the substrate 40Q. Further, the distance of the first lip 210 facing the substrate 400 is the same as the distance of the second lip 22 facing the substrate. In addition, the appropriate distance between the first surface 212 and the second surface to the substrate may be between 30 μm and the touch. It should be noted that the first surface constituting that the second surface 222 is coplanar is not used to define the proposal. In another embodiment of the present proposal, the first surface 212 and the second surface may not be coplanar. . Further, the distance from the first surface to the substrate may be greater or less than the distance from the second surface 222 to the substrate 400 of 201238668. Moreover, the first slit 101 has a center line M, and the center line 第一 of the first #面2 to the first slit has a first distance a, and the center line of the second lip surface 221 to the first slit has - a second distance b. Wherein, the first distance & is greater than the second distance ^ and the ratio of the first distance a to the second distance b is between G 5 and i 5 . Further, in another embodiment, the ratio of the first distance a to the upper second distance b may be between 0.8 and 1.2. Further, the second slit 201 has a depth H2 which is a distance from the paint outlet 230 to the first slit 101. The size of the depth H2 may be 3 〇 ~ h called m. And 'in another preferred embodiment, the size of the depth H2 may be 4 〇 to ι (^ m. or 'in still another preferred embodiment, the size of the depth H2 may be m ° in this embodiment The first lip surface 211 of the first lip 210 is connected to the first side wall surface 112 of the first body 110, and the first lip surface 211 and the first side wall surface 112 are substantially perpendicularly formed. The second lip surface 221 of the lip 220 is connected to the second side wall surface 122 of the second wall 120, and the second lip surface 221 and the second side wall surface 122 are substantially perpendicularly angled. It is noted that the first lip surface is The fact that the vertical angle between the 211 and the first side wall surface 2 and the vertical angle between the second lip surface 221 and the second side wall surface 122 are not used to limit the proposal. For example, another implementation of the proposal For example, an obtuse angle Θ1 may be sandwiched between the first lip surface 211 and the first side wall surface U2, and an obtuse angle Θ2 may be sandwiched between the second lip surface 221 and the second side wall surface 122, as shown in FIG. Or 'in another embodiment of the proposal', the first lip surface 211 can pass through a first curved surface 113 The first side wall surface η] is connected to the 201238668, and the second lip surface 221 is connected to the second side wall surface 122 through a second curved surface 123, as shown in Fig. 5. Then, please refer to "2A" And "Fig. 3", wherein "Fig. 3" is a flow field analysis diagram of the coating material in the coating process according to an embodiment of the present proposal. The substrate 400 in the "Fig. 2A" is a relative paint outlet. 23〇 is moved by the first coating lip 210 toward the second coating lip 220. At this time, the gas-liquid interface 52〇, 53 between the coating material 500 between the paint outlet 23 and the substrate 400 and the outside air is 〇 Presenting a curved surface that is π 23G _ toward the coating. This image represents the occurrence of no coating 500 build-up at the paint outlet 230, thus ensuring that the coating element 涂布 coats the coating 500 in an ultra-thin film pattern. In the process of the substrate 4 ,, it is possible to have a stable coating processing quality without causing a problem that the film thickness is too thick or uneven due to the deposition. Please refer to "Fig. 3" and apply it. In the process of coating the coating on the substrate 400, the coating 5 〇〇 is affected by the substrate 4 The coating effect is formed, and a reflowing region 51 of the clockwise rotation is formed at the material outlet 230 to form a coating liquid bead. By the structural design of the coating member 10 of the embodiment, the coating liquid droplet formed by the coating material can be formed. It is confined between the first lip surface 211 and the second lip surface 221, so that the thickness can be ensured: the thickness of the film formed on the substrate is prevented from being uneven. The thick gauge is outside the preset film thickness range. In the above embodiment, the substrate_ is moved relative to the paint exit 23〇 from the first lip 210 toward the second lip 220. However, this feature is not intended to limit the present proposal. Further, the coated tree 1G of this proposal has a stable two-way ultra-thin film coating 201238668. - "Review 2B", in the "2B", the substrate 4 is moved relative to the coating outlet 230 by the second coating lip 22 toward the first coating lip 21〇. The gas-liquid interface 520, 530' between the coating 5 and the outside air between the paint outlet 230 and the substrate 4 exhibits a concave surface which is concave toward the paint outlet 23 . This phenomenon represents the phenomenon that there is no paint buildup on the first lip 2 〇 or the first lip 220 at the 〇 23 涂料 of the paint. This ensures the coating element 1 is applied to the coating _ recording material. Among them, it is possible to have stable and good processing quality. Therefore, the shape of the gas-liquid interface 520, 530 between the coating 5 of FIG. 2A and FIG. 2B and the outside air can prove that the coated component 1 of the present proposal can have a stable two-way super Thin film coating efficacy. The coating member (7) of the present embodiment has better processing utility as compared with the coating head of the conventional coating apparatus which can maintain only the coating quality of the substrate 400 in the single-direction processing direction. Moreover, the structure of the coating member (7) according to the present embodiment is designed during the actual coating process, regardless of whether the substrate 4 is moved from the second coating 220 toward the first coating lip 21 relative to the coating outlet 2, or The first coating lip is moved toward the second coating lip 220, and the liquid thickness of the coating 5 〇〇 applied to the substrate can reach a uniform film thickness of less than ΙΟμη. And when the liquid mold thickness of the substrate is dried to a solid mold thickness, the solid mold thickness can reach a nano-scale film thickness of _ or less. The coating member according to the above embodiment, wherein the width of the second slit is greater than the width of the first slit, and the distance from the first to the center of the first to the first slit is greater than the second lip to the first The distance from the centerline of the slit. The coating element is sized to effectively stabilize the coating bead formed by the recirculation zone between the first lip and the first lip. Therefore, the coating member of the present embodiment has a good two-way effect of the thin coating quality of 201238668 to provide convenience in the process of coating and curing. Although this proposal is disclosed above in the preferred embodiment of the foregoing, in the case of "^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ : The definition of the scope of the patent application attached to the 5th brother's book is subject to change. [Simplified description of the drawings] Fig. 1A is a structural diagram of a coating element according to the present proposal. Fig. 1B is a cross-sectional view showing the structure of a coating member according to the present proposal-embodiment. Fig. 1C is a cross-sectional view showing a partial structure of the coating member according to Fig. 1B. Fig. 2A is a schematic view showing a coating material applied to a substrate by a coating member according to an embodiment of the present proposal. Fig. 2B is another schematic view of the coating material applied to the substrate by the coating member according to an embodiment of the present proposal. f 3 _ is a flow field analysis diagram of the coating according to the present proposal-embodiment in the coating process. Figure 4 is a cross-sectional view showing the structure of a coating member according to another embodiment of the present proposal. Figure 5 is a cross-sectional view showing the structure of a coating member according to still another embodiment of the present proposal. [Main component symbol description] 10 Coating member 100 First slit segment 101 First slit 110 First wall body 201238668 111 First wall surface 112 First side wall surface 113 First curved surface 120 Second wall body 121 Second wall surface 122 second side wall surface 123 second curved surface 200 second slit section 201 second slit 210 first coating lip 211 first lip surface 212 first surface 220 second coating lip 221 second lip surface 222 second surface 230 Paint outlet 240 paint inlet 400 substrate 500 coating 510 recirculation zone 520 gas-liquid interface 530 gas-liquid interface