TW200515112A - Method and system of diagnosing a processing system using adaptive multivariate analysis - Google Patents

Method and system of diagnosing a processing system using adaptive multivariate analysis

Info

Publication number
TW200515112A
TW200515112A TW093127260A TW93127260A TW200515112A TW 200515112 A TW200515112 A TW 200515112A TW 093127260 A TW093127260 A TW 093127260A TW 93127260 A TW93127260 A TW 93127260A TW 200515112 A TW200515112 A TW 200515112A
Authority
TW
Taiwan
Prior art keywords
data
processing system
diagnosing
additional
pca
Prior art date
Application number
TW093127260A
Other languages
English (en)
Other versions
TWI261738B (en
Inventor
Kevin A Chamness
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200515112A publication Critical patent/TW200515112A/zh
Application granted granted Critical
Publication of TWI261738B publication Critical patent/TWI261738B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/024—Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/10—Complex mathematical operations
TW093127260A 2003-09-12 2004-09-09 Method and system of monitoring a substrate processing system and principal components analysis model used therein TWI261738B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/660,697 US7328126B2 (en) 2003-09-12 2003-09-12 Method and system of diagnosing a processing system using adaptive multivariate analysis

Publications (2)

Publication Number Publication Date
TW200515112A true TW200515112A (en) 2005-05-01
TWI261738B TWI261738B (en) 2006-09-11

Family

ID=34273706

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093127260A TWI261738B (en) 2003-09-12 2004-09-09 Method and system of monitoring a substrate processing system and principal components analysis model used therein

Country Status (7)

Country Link
US (1) US7328126B2 (zh)
EP (1) EP1665076A4 (zh)
JP (1) JP4699367B2 (zh)
KR (1) KR101047971B1 (zh)
CN (1) CN100476798C (zh)
TW (1) TWI261738B (zh)
WO (1) WO2005036314A2 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
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TWI742693B (zh) * 2020-05-26 2021-10-11 國立中正大學 感測器安裝最佳化裝置及其方法
TWI832037B (zh) * 2020-03-04 2024-02-11 日商佳能股份有限公司 用來監視監視對象的監視裝置、監視方法、電腦程式及物品製造方法

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Also Published As

Publication number Publication date
JP4699367B2 (ja) 2011-06-08
WO2005036314A3 (en) 2005-11-10
US20050060103A1 (en) 2005-03-17
CN1849599A (zh) 2006-10-18
WO2005036314A2 (en) 2005-04-21
EP1665076A4 (en) 2007-06-20
US7328126B2 (en) 2008-02-05
EP1665076A2 (en) 2006-06-07
CN100476798C (zh) 2009-04-08
TWI261738B (en) 2006-09-11
KR101047971B1 (ko) 2011-07-13
KR20060123098A (ko) 2006-12-01
JP2007505494A (ja) 2007-03-08

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