TW200514642A - Method and apparatus for flip chip attachment by post-collapse re-melt and re-solidification of bumps - Google Patents
Method and apparatus for flip chip attachment by post-collapse re-melt and re-solidification of bumpsInfo
- Publication number
- TW200514642A TW200514642A TW093119939A TW93119939A TW200514642A TW 200514642 A TW200514642 A TW 200514642A TW 093119939 A TW093119939 A TW 093119939A TW 93119939 A TW93119939 A TW 93119939A TW 200514642 A TW200514642 A TW 200514642A
- Authority
- TW
- Taiwan
- Prior art keywords
- temperature
- solidification
- melt
- assembly
- eutectic
- Prior art date
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/13111—Tin [Sn] as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/818—Bonding techniques
- H01L2224/81801—Soldering or alloying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/81986—Specific sequence of steps, e.g. repetition of manufacturing steps, time sequence
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01043—Technetium [Tc]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0105—Tin [Sn]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01075—Rhenium [Re]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/14—Related to the order of processing steps
- H05K2203/1476—Same or similar kind of process performed in phases, e.g. coarse patterning followed by fine patterning
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3494—Heating methods for reflowing of solder
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US48404703P | 2003-07-01 | 2003-07-01 | |
US10/882,078 US7367489B2 (en) | 2003-07-01 | 2004-06-30 | Method and apparatus for flip chip attachment by post collapse re-melt and re-solidification of bumps |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200514642A true TW200514642A (en) | 2005-05-01 |
TWI317669B TWI317669B (en) | 2009-12-01 |
Family
ID=34062017
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093119939A TWI317669B (en) | 2003-07-01 | 2004-07-01 | Method and apparatus for flip chip attachment by post-collapse re-melt and re-solidification of bumps |
Country Status (3)
Country | Link |
---|---|
US (1) | US7367489B2 (zh) |
TW (1) | TWI317669B (zh) |
WO (1) | WO2005005088A2 (zh) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101210006B1 (ko) * | 2005-06-13 | 2012-12-07 | 파나소닉 주식회사 | 반도체 소자 접합 장치 및 이를 이용한 반도체 소자 접합방법 |
US7681776B2 (en) * | 2006-08-01 | 2010-03-23 | Raytheon Company | Methods and apparatus for efficiently generating profiles for circuit board work/rework |
FR2913145B1 (fr) * | 2007-02-22 | 2009-05-15 | Stmicroelectronics Crolles Sas | Assemblage de deux parties de circuit electronique integre |
US7670939B2 (en) * | 2008-05-12 | 2010-03-02 | Ati Technologies Ulc | Semiconductor chip bump connection apparatus and method |
EP2239079A1 (de) * | 2008-06-23 | 2010-10-13 | Siemens Aktiengesellschaft | Verfahren zum Löten mit mehrstufigem Temperaturprofil |
US20100015762A1 (en) * | 2008-07-15 | 2010-01-21 | Mohammad Khan | Solder Interconnect |
JP4901933B2 (ja) * | 2009-09-29 | 2012-03-21 | 株式会社東芝 | 半導体装置の製造方法 |
JP5534155B2 (ja) * | 2009-11-13 | 2014-06-25 | 日本電気株式会社 | デバイス、及びデバイス製造方法 |
JP2012119637A (ja) | 2010-12-03 | 2012-06-21 | Sumitomo Electric Device Innovations Inc | 光半導体装置の製造方法 |
US9649711B2 (en) | 2011-02-02 | 2017-05-16 | Pac Tech-Packaging Technologies Gmbh | Method and device for electrically contacting terminal faces of two substrates by laser soldering using a gaseous flux medium |
US8673761B2 (en) * | 2011-02-19 | 2014-03-18 | International Business Machines Corporation | Reflow method for lead-free solder |
JP5899517B2 (ja) * | 2012-08-10 | 2016-04-06 | パナソニックIpマネジメント株式会社 | 部品実装基板の製造方法及び製造システム |
JP6028593B2 (ja) * | 2013-01-28 | 2016-11-16 | 富士通株式会社 | 半導体装置の製造方法 |
US10431533B2 (en) | 2014-10-31 | 2019-10-01 | Ati Technologies Ulc | Circuit board with constrained solder interconnect pads |
JP6691998B1 (ja) * | 2019-12-24 | 2020-05-13 | 株式会社鈴木 | 半導体装置の製造方法及び半導体装置の製造装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5232145A (en) * | 1991-03-29 | 1993-08-03 | Watkins-Johnson Company | Method of soldering in a controlled-convection surface-mount reflow furnace |
US5203075A (en) * | 1991-08-12 | 1993-04-20 | Inernational Business Machines | Method of bonding flexible circuit to cicuitized substrate to provide electrical connection therebetween using different solders |
US5269453A (en) * | 1992-04-02 | 1993-12-14 | Motorola, Inc. | Low temperature method for forming solder bump interconnections to a plated circuit trace |
US5551627A (en) * | 1994-09-29 | 1996-09-03 | Motorola, Inc. | Alloy solder connect assembly and method of connection |
US5477933A (en) * | 1994-10-24 | 1995-12-26 | At&T Corp. | Electronic device interconnection techniques |
JP3296130B2 (ja) * | 1995-04-13 | 2002-06-24 | 松下電器産業株式会社 | 電子部品の半田付け方法 |
US5796591A (en) * | 1995-06-07 | 1998-08-18 | International Business Machines Corporation | Direct chip attach circuit card |
US5775569A (en) * | 1996-10-31 | 1998-07-07 | Ibm Corporation | Method for building interconnect structures by injection molded solder and structures built |
US5971249A (en) * | 1997-02-24 | 1999-10-26 | Quad Systems Corporation | Method and apparatus for controlling a time/temperature profile inside of a reflow oven |
US6324754B1 (en) * | 1998-03-25 | 2001-12-04 | Tessera, Inc. | Method for fabricating microelectronic assemblies |
WO2001014811A1 (en) * | 1999-08-23 | 2001-03-01 | Radiant Technology Corporation | Continuous-conduction wafer bump reflow system |
US6281106B1 (en) * | 1999-11-25 | 2001-08-28 | Delphi Technologies, Inc. | Method of solder bumping a circuit component |
US6893799B2 (en) * | 2003-03-06 | 2005-05-17 | International Business Machines Corporation | Dual-solder flip-chip solder bump |
-
2004
- 2004-06-30 WO PCT/US2004/021152 patent/WO2005005088A2/en active Application Filing
- 2004-06-30 US US10/882,078 patent/US7367489B2/en active Active
- 2004-07-01 TW TW093119939A patent/TWI317669B/zh active
Also Published As
Publication number | Publication date |
---|---|
WO2005005088A3 (en) | 2005-07-07 |
WO2005005088A2 (en) | 2005-01-20 |
TWI317669B (en) | 2009-12-01 |
US7367489B2 (en) | 2008-05-06 |
US20050023327A1 (en) | 2005-02-03 |
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