TW200512547A - Exposure mask, exposure equipment, and method for manufacturing display panel - Google Patents
Exposure mask, exposure equipment, and method for manufacturing display panelInfo
- Publication number
- TW200512547A TW200512547A TW093126036A TW93126036A TW200512547A TW 200512547 A TW200512547 A TW 200512547A TW 093126036 A TW093126036 A TW 093126036A TW 93126036 A TW93126036 A TW 93126036A TW 200512547 A TW200512547 A TW 200512547A
- Authority
- TW
- Taiwan
- Prior art keywords
- exposure
- taper portion
- exposure mask
- area proximate
- display panel
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70475—Stitching, i.e. connecting image fields to produce a device field, the field occupied by a device such as a memory chip, processor chip, CCD, flat panel display
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/13625—Patterning using multi-mask exposure
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Liquid Crystal (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030060707A KR101006435B1 (ko) | 2003-09-01 | 2003-09-01 | 노광 마스크, 이를 포함하는 노광 장치 및 이를 이용한표시 장치용 표시판의 제조 방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200512547A true TW200512547A (en) | 2005-04-01 |
Family
ID=34101866
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093126036A TW200512547A (en) | 2003-09-01 | 2004-08-30 | Exposure mask, exposure equipment, and method for manufacturing display panel |
Country Status (4)
Country | Link |
---|---|
US (1) | US7388653B2 (zh) |
JP (1) | JP2005107504A (zh) |
KR (1) | KR101006435B1 (zh) |
TW (1) | TW200512547A (zh) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7588869B2 (en) * | 2003-12-30 | 2009-09-15 | Lg Display Co., Ltd. | Divided exposure method for making a liquid crystal display |
JP3890333B2 (ja) * | 2004-02-06 | 2007-03-07 | キヤノン株式会社 | 固体撮像装置 |
KR100925984B1 (ko) * | 2004-10-26 | 2009-11-10 | 엘지디스플레이 주식회사 | 액정표시장치 제조방법 |
JP5079448B2 (ja) * | 2007-10-24 | 2012-11-21 | 株式会社ジャパンディスプレイウェスト | 液晶装置及びそれを備えた電子機器 |
KR101030030B1 (ko) | 2009-12-11 | 2011-04-20 | 삼성모바일디스플레이주식회사 | 마스크 조립체 |
KR101309864B1 (ko) * | 2010-02-02 | 2013-09-16 | 엘지디스플레이 주식회사 | 마스크 어셈블리 |
KR101232181B1 (ko) * | 2010-02-03 | 2013-02-12 | 엘지디스플레이 주식회사 | 마스크 어셈블리 |
JP5879575B2 (ja) * | 2011-09-02 | 2016-03-08 | 株式会社Joled | 表示パネルの製造方法 |
JP2013238670A (ja) * | 2012-05-11 | 2013-11-28 | Canon Inc | 露光装置、露光方法、デバイスの製造方法及び開口板 |
CN102749801A (zh) * | 2012-06-29 | 2012-10-24 | 北京京东方光电科技有限公司 | 一种掩模板 |
JP6243616B2 (ja) * | 2013-03-26 | 2017-12-06 | キヤノン株式会社 | 露光装置および物品の製造方法 |
KR102290753B1 (ko) * | 2014-09-19 | 2021-08-19 | 삼성디스플레이 주식회사 | 패턴 형성 방법 및 이를 이용한 표시 패널의 제조 방법 |
KR102343411B1 (ko) * | 2015-05-15 | 2021-12-24 | 삼성디스플레이 주식회사 | 표시 장치 |
DE102017105402A1 (de) * | 2017-03-14 | 2018-09-20 | Infineon Technologies Ag | Retikel und belichtungsverfahren, das eine projektion eines retikelmusters in benachbarte belichtungsfelder einschliesst |
KR102150881B1 (ko) | 2019-03-21 | 2020-09-02 | 동우 화인켐 주식회사 | 터치센서 및 이를 형성하는 노광 마스크 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02180013A (ja) * | 1989-01-05 | 1990-07-12 | Nippon Telegr & Teleph Corp <Ntt> | X線投影露光装置 |
US5729331A (en) * | 1993-06-30 | 1998-03-17 | Nikon Corporation | Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus |
JP3451721B2 (ja) * | 1994-06-06 | 2003-09-29 | 株式会社ニコン | 投影光学装置及びそれを備えた露光装置並びにその調整方法 |
JPH088169A (ja) * | 1994-06-23 | 1996-01-12 | Nikon Corp | 露光装置 |
KR950034472A (ko) * | 1994-04-06 | 1995-12-28 | 가나이 쓰토무 | 패턴형성방법 및 그것에 사용되는 투영노광장치 |
JP3087209B2 (ja) * | 1994-11-19 | 2000-09-11 | 東京エレクトロン株式会社 | 露光装置 |
JPH09129550A (ja) * | 1995-08-30 | 1997-05-16 | Canon Inc | 露光装置及びそれを用いたデバイスの製造方法 |
JPH1062809A (ja) * | 1996-08-13 | 1998-03-06 | Nikon Corp | 投影露光方法 |
US6027865A (en) * | 1997-02-10 | 2000-02-22 | Texas Instruments Incorporated | Method for accurate patterning of photoresist during lithography process |
JP3159163B2 (ja) * | 1998-04-06 | 2001-04-23 | 日本電気株式会社 | 走査露光方法及び走査露光装置 |
JP2000267257A (ja) * | 1999-03-12 | 2000-09-29 | Canon Inc | マスク及びそれを用いた露光方法 |
JP2000321784A (ja) * | 1999-05-07 | 2000-11-24 | Nikon Corp | 露光方法および露光装置 |
US6445439B1 (en) * | 1999-12-27 | 2002-09-03 | Svg Lithography Systems, Inc. | EUV reticle thermal management |
US6476905B1 (en) * | 2000-01-20 | 2002-11-05 | Taiwan Semiconductor Manufacturing Co., Ltd. | Step and scan exposure system equipped with a plurality of attenuator blades for exposure control |
TW495836B (en) * | 2000-02-02 | 2002-07-21 | Nikon Corp | Scanning exposure method and device |
US6573975B2 (en) * | 2001-04-04 | 2003-06-03 | Pradeep K. Govil | DUV scanner linewidth control by mask error factor compensation |
US6960415B2 (en) * | 2001-10-01 | 2005-11-01 | Canon Kabushiki Kaisha | Aberration measuring method and projection exposure apparatus |
JP4362999B2 (ja) * | 2001-11-12 | 2009-11-11 | 株式会社ニコン | 露光装置及び露光方法、並びにデバイス製造方法 |
US6774983B2 (en) * | 2002-08-12 | 2004-08-10 | Anvik Corporation | Distributed projection system |
JP2004341365A (ja) * | 2003-05-16 | 2004-12-02 | Tadahiro Omi | マスク描画方法、及びマスク描画装置 |
-
2003
- 2003-09-01 KR KR1020030060707A patent/KR101006435B1/ko not_active IP Right Cessation
-
2004
- 2004-08-26 US US10/928,288 patent/US7388653B2/en not_active Expired - Fee Related
- 2004-08-30 TW TW093126036A patent/TW200512547A/zh unknown
- 2004-09-01 JP JP2004253735A patent/JP2005107504A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US20050024622A1 (en) | 2005-02-03 |
JP2005107504A (ja) | 2005-04-21 |
US7388653B2 (en) | 2008-06-17 |
KR101006435B1 (ko) | 2011-01-06 |
KR20050024642A (ko) | 2005-03-11 |
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