TW200420746A - Methods for making metallocene compounds - Google Patents
Methods for making metallocene compoundsInfo
- Publication number
- TW200420746A TW200420746A TW092130102A TW92130102A TW200420746A TW 200420746 A TW200420746 A TW 200420746A TW 092130102 A TW092130102 A TW 092130102A TW 92130102 A TW92130102 A TW 92130102A TW 200420746 A TW200420746 A TW 200420746A
- Authority
- TW
- Taiwan
- Prior art keywords
- compound
- cyclopentadienide
- substituted
- metallocene
- reacting
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/406—Oxides of iron group metals
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F17/00—Metallocenes
- C07F17/02—Metallocenes of metals of Groups 8, 9 or 10 of the Periodic System
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
Applications Claiming Priority (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US42294602P | 2002-10-31 | 2002-10-31 | |
US42294702P | 2002-10-31 | 2002-10-31 | |
US42628402P | 2002-11-14 | 2002-11-14 | |
US42746102P | 2002-11-18 | 2002-11-18 | |
US44632003P | 2003-02-07 | 2003-02-07 | |
US45371703P | 2003-04-18 | 2003-04-18 | |
US45371803P | 2003-04-18 | 2003-04-18 | |
US45371903P | 2003-04-18 | 2003-04-18 | |
US10/685,777 US6884901B2 (en) | 2002-10-31 | 2003-10-16 | Methods for making metallocene compounds |
US10/686,254 US6919468B2 (en) | 2002-10-31 | 2003-10-16 | Asymmetric group 8 (VIII) metallocene compounds |
US10/685,785 US7927658B2 (en) | 2002-10-31 | 2003-10-16 | Deposition processes using group 8 (VIII) metallocene precursors |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200420746A true TW200420746A (en) | 2004-10-16 |
TWI274082B TWI274082B (en) | 2007-02-21 |
Family
ID=32315054
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW092130102A TWI274082B (en) | 2002-10-31 | 2003-10-29 | Methods for making metallocene compounds |
Country Status (6)
Country | Link |
---|---|
EP (3) | EP1556395B1 (zh) |
JP (3) | JP4560484B2 (zh) |
KR (3) | KR100997838B1 (zh) |
AU (3) | AU2003301884A1 (zh) |
TW (1) | TWI274082B (zh) |
WO (3) | WO2004041832A2 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7048968B2 (en) | 2003-08-22 | 2006-05-23 | Micron Technology, Inc. | Methods of depositing materials over substrates, and methods of forming layers over substrates |
US6987063B2 (en) | 2004-06-10 | 2006-01-17 | Freescale Semiconductor, Inc. | Method to reduce impurity elements during semiconductor film deposition |
US7816550B2 (en) * | 2005-02-10 | 2010-10-19 | Praxair Technology, Inc. | Processes for the production of organometallic compounds |
US7485338B2 (en) * | 2005-03-31 | 2009-02-03 | Tokyo Electron Limited | Method for precursor delivery |
JP2009007270A (ja) * | 2007-06-27 | 2009-01-15 | Tosoh Corp | ルテニウム化合物の製造方法および薄膜の製造方法 |
KR101598485B1 (ko) * | 2014-06-20 | 2016-02-29 | 주식회사 유진테크 머티리얼즈 | 성막용 전구체 조성물 및 이를 이용한 박막 형성 방법 |
KR101636491B1 (ko) | 2014-07-09 | 2016-07-05 | 한국화학연구원 | 루테늄 화합물, 이의 제조 방법 및 이를 이용하여 박막을 형성하는 방법 |
KR102486128B1 (ko) | 2020-12-30 | 2023-01-06 | 에스케이트리켐 주식회사 | 유기금속 할로겐화물을 함유하는 금속막 형성용 전구체, 이를 이용한 금속막 형성 방법 및 상기 금속막을 포함하는 반도체 소자. |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3294685A (en) * | 1952-04-21 | 1966-12-27 | Gulf Research Development Co | Organic compositions containing a metallo cyclopentadienyl |
US3035978A (en) * | 1957-08-12 | 1962-05-22 | Ici Ltd | Ferrocene hematinic compositions and therapy |
GB864198A (en) * | 1959-01-07 | 1961-03-29 | Ici Ltd | A process for the manufacture of ferrocene derivatives |
BE623679A (zh) * | 1961-10-18 | |||
US3535356A (en) * | 1968-06-11 | 1970-10-20 | Gulf Research Development Co | Process for producing dicyclopentadienyliron compounds |
US4066569A (en) * | 1975-12-30 | 1978-01-03 | Hughes Aircraft Company | Dopants for dynamic scattering liquid crystals |
PL124360B1 (en) * | 1980-02-27 | 1983-01-31 | Politechnika Gdanska | Process for preparing ruthenocene |
JPH02250892A (ja) * | 1989-03-24 | 1990-10-08 | Idemitsu Kosan Co Ltd | 新規フェロセン誘導体,それを含有する界面活性剤及び有機薄膜の製造方法 |
JPH1125589A (ja) * | 1997-07-04 | 1999-01-29 | Matsushita Electric Ind Co Ltd | 磁気記録再生装置 |
JP3371328B2 (ja) * | 1997-07-17 | 2003-01-27 | 株式会社高純度化学研究所 | ビス(アルキルシクロペンタジエニル)ルテニウム錯 体の製造方法およびそれを用いたルテニウム含有薄膜 の製造方法 |
JP2000281694A (ja) * | 1999-03-29 | 2000-10-10 | Tanaka Kikinzoku Kogyo Kk | 有機金属気相エピタキシー用の有機金属化合物 |
JP2001122887A (ja) * | 1999-10-25 | 2001-05-08 | Tanaka Kikinzoku Kogyo Kk | 化学気相蒸着用の有機金属化合物及びその有機金属化合物の製造方法並びにその有機金属化合物を用いた薄膜の製造方法 |
JP4162366B2 (ja) * | 2000-03-31 | 2008-10-08 | 田中貴金属工業株式会社 | Cvd薄膜形成プロセス及びcvd薄膜製造装置 |
TW508658B (en) * | 2000-05-15 | 2002-11-01 | Asm Microchemistry Oy | Process for producing integrated circuits |
JP4512248B2 (ja) * | 2000-09-26 | 2010-07-28 | 田中貴金属工業株式会社 | ビス(アルキルシクロペンタジエニル)ルテニウムの製造方法及びその方法により製造されるビス(アルキルシクロペンタジエニル)ルテニウム並びにルテニウム薄膜又はルテニウム化合物薄膜の化学気相蒸着方法 |
JP4759126B2 (ja) * | 2000-10-11 | 2011-08-31 | 田中貴金属工業株式会社 | 化学気相蒸着用の有機金属化合物及び化学気相蒸着用の有機金属化合物の製造方法並びに貴金属薄膜及び貴金属化合物薄膜の化学気相蒸着方法 |
JP3598055B2 (ja) * | 2000-11-08 | 2004-12-08 | 田中貴金属工業株式会社 | ビス(アルキルシクロペンタジエニル)ルテニウムの製造方法及びその製造方法により製造されるビス(アルキルシクロペンタジエニル)ルテニウム並びにルテニウム薄膜又はルテニウム化合物薄膜の製造方法 |
US20020161253A1 (en) * | 2001-04-30 | 2002-10-31 | Boulder Scientific Company | Synthesis of bis (cyclopentadienyl) and bis (indenyl) ruthenium complexes |
US6521772B1 (en) * | 2001-09-27 | 2003-02-18 | Praxair Technology, Inc. | Synthesis of substituted ruthenocene complexes |
US6653236B2 (en) * | 2002-03-29 | 2003-11-25 | Micron Technology, Inc. | Methods of forming metal-containing films over surfaces of semiconductor substrates; and semiconductor constructions |
-
2003
- 2003-10-29 TW TW092130102A patent/TWI274082B/zh not_active IP Right Cessation
- 2003-10-30 EP EP03810820.5A patent/EP1556395B1/en not_active Expired - Fee Related
- 2003-10-30 AU AU2003301884A patent/AU2003301884A1/en not_active Abandoned
- 2003-10-30 JP JP2005502217A patent/JP4560484B2/ja not_active Expired - Fee Related
- 2003-10-30 KR KR1020057007504A patent/KR100997838B1/ko active IP Right Grant
- 2003-10-30 WO PCT/US2003/034497 patent/WO2004041832A2/en active Application Filing
- 2003-10-30 EP EP03810819A patent/EP1556394A4/en not_active Withdrawn
- 2003-10-30 WO PCT/US2003/034498 patent/WO2004042354A2/en active Application Filing
- 2003-10-30 KR KR1020057007554A patent/KR100995223B1/ko active IP Right Grant
- 2003-10-30 KR KR1020057007501A patent/KR101150551B1/ko active IP Right Grant
- 2003-10-30 JP JP2005502216A patent/JP4538407B2/ja not_active Expired - Fee Related
- 2003-10-30 AU AU2003301874A patent/AU2003301874A1/en not_active Abandoned
- 2003-10-30 WO PCT/US2003/034494 patent/WO2004041753A2/en active Application Filing
- 2003-10-30 EP EP03810818A patent/EP1556527B1/en not_active Expired - Fee Related
- 2003-10-30 JP JP2005502215A patent/JP4542506B2/ja not_active Expired - Fee Related
- 2003-10-30 AU AU2003301873A patent/AU2003301873A1/en not_active Abandoned
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |