TW200405307A - High-density readable only optical disk - Google Patents

High-density readable only optical disk Download PDF

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Publication number
TW200405307A
TW200405307A TW092126301A TW92126301A TW200405307A TW 200405307 A TW200405307 A TW 200405307A TW 092126301 A TW092126301 A TW 092126301A TW 92126301 A TW92126301 A TW 92126301A TW 200405307 A TW200405307 A TW 200405307A
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Taiwan
Prior art keywords
read
layer
density
optical disc
disc
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TW092126301A
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English (en)
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TWI246683B (en
Inventor
In-Oh Hwang
In-Sik Park
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Samsung Electronics Co Ltd
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Publication of TW200405307A publication Critical patent/TW200405307A/zh
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
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    • G11B7/2578Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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    • G11B2007/25713Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing nitrogen
    • GPHYSICS
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    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25715Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing oxygen
    • GPHYSICS
    • G11INFORMATION STORAGE
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    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25716Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing sulfur
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    • G11B7/258Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • G11B7/259Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on silver
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00Radiation imagery chemistry: process, composition, or product thereof
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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Optical Recording Or Reproduction (AREA)

Description

200405307
本申請案主張韓國專利申請號20 0 2-59 1 39之優先權, ,案已於2 0 0 2年4月23日以及20 02年9月28日向韓國專利局 提出申請,該案之所有揭露内容於此併入參考。 【發明所屬之技術領域】 本發明係有關於一種光碟,且特別是有關於一種具有 超解析近場結構(super resolution near field structure)的高密度可唯讀光碟,其可讀取尺寸小於雷射 光束解析度之標記(marks)。 田 【先前技術】 相較於目前之磁記錄媒體,由於光碟在每個記錄單元 中的記錄區域較小,故光碟已被廣泛使用於高密度記錄 體中。根據其特性,光碟可區分為唯讀記憶型態(R〇M 、 type)、一次寫入多次讀取型態(w〇RM type),以及可抹除 型態(erasable type)。唯讀記憶體型態的光碟僅能讀取、 預先記錄的資#,-次寫入多次讀取型態的光碟僅允許使 用者寫入貧料一次,而可抹除型態的光碟則允許使用者
除並重新記錄資料於其上。 I 可記錄光碟(CD-R)即為„ 一個例子。在可記錄光碟中, 被聚焦於記錄層上,而此記錄 肱花青(phthalocyanine)等有 的鍵結會被打斷。此時,基材 學性地改變。 次寫入多次讀取型態的光碟 當波常為780nm之雷射光束 層係由花青(c y a n i n e )以及 機染料時,這些有機染料中 與反射層的結構便產生了光 在此過程中 貧料便被記錄於可記錄光碟中。這些被 ^00405307 五、發明說明(2) = = ; = =下之低功率雷射光束讀 型態之資料己::6 0ΜΒ,因此其已被廣泛使用於各種 然而,讀取’如聲音以及影像資料。 可記錄光碟(CD : : J m要78〇nm之記錄波長的 容量的光學綱。因此,這些具有較小储存 用。以錄媒體在今日複雜的多媒體環境下並不實 波長的數位影士 = ·-種需要630- 680nm之較短雷射
運而生。數::i:(Dlgltal VerSatlleDlsk,DVD)s (單面數音光碟(DVD)的儲存容量為2τ至4?GB ^ 般而言,數位影音光碟(DVD)可區分為唯讀 =?光碟⑽—_)、_ 覆寫數位機存取記憶數位影音光碟(DVD —RAM),以及可 位衫曰光碟(DVD_RW)。可記錄數位影音光碟 上的記錄動作係透過記錄雷射光束的曝光,使得 記錄層中有機染料的鍵結被打斷而完成。以隨機存取 數位影音光碟(DVD-RAM)以及可覆寫數位影音光碟 〜 (DVD — RW)為例,記錄層的相(Phase)變化將使得光碟的光 學特性改變,也因此,資料可以記錄在光碟上或是/由光碟 上抹除。值得注意的是,可記錄數位影音光碟(DVDD中” 所使用的有機染料與唯讀記憶數位影音光碟(DVD —相 ^ ’成本有效,且與其他記錄媒體相較具有較大的儲存容 i。基於此理由,目前業界以投入很多心力於可記錄數位
12291pif.ptd 200405307 五、發明說明(3) 影音光碟(DVD-R)上 如上所述’目前許多光學媒體的最重 ΐ容以,已進行了許多的嘗試:增家二Ξ 里以及用以正確項取訊坑的雷射光 ^了丄ί 衍射(diffraction)的緣故,儘管伸 用了先予讀取頭中的物鏡,由雷射二極吏 ί會分散成具有-定寬度的光束型態。此先运 衍射極限』。如上所述,一般光;^ 右Μ ± 為 可以下# . Ί / / 叙先碟具有的讀取解析極限
了以下式表不· λ/4ΝΑ,其中又為光源的波長 I 鏡的數值孔徑。然』’目前仍存在雷射 為^ 短波長的雷射以及大數值孔麵的物鏡較為*昂此 此外,當物鏡的數值孔徑增加時,光學讀取頭與光 的距離(工作距離)將明顯地縮短,也因此,^風接: 可能會與光碟相撞。因此,可能導致光碟表 $ 使得資料遺失。 相辰進而 為了克服讀取解析極限的問題,具有超解析近場处 (super-RENS)的光碟片已被提出。在具有超解析近場^ (sUper-RENS)的光碟片中,主要係使用銀的氧化物所製成 的遮罩層。第1圖繪示具有為銀氧化物遮罩層之光碟片示 意圖。在第1圖中的光碟片結構中,銀氧化物係分為銀津立 子與氧,以記錄資料。另一方面,在資料讀取時,銀粒子 表面會形成離體子(plasmons)。這些離體子便誘發近場讀 取(near fleld reading,NFR) 〇因此,能夠讀取超、越每衍貝 12291pif.ptd 第8頁 200405307 五、發明說明(4) 射極限的極小標記。 以金屬氧化物製成的遮罩層,如銀氧化物可被使用於 一次寫入多次讀取型態(WORM type)的光記錄媒體,其銀 氧化物係分為銀粒子與氧,以記錄資料。意即,在記錄過 程中’金屬粒子會促使超解析效應產生。基於上述理由, 1艮氧化物所製成的遮罩層並無法於唯讀記憶光碟(CD-ROM) 中使用’原因在於其係以訊坑的形式將資料『儲存 (store)』於基材上,而不是『記錄(rec〇rd)』於基材 上。 【發明内容] 本發明係提供一種具有高儲存容量的高密度可唯讀光 碟。此光碟可在不降低雷射二極體的波長或是不增加物鏡 的數值孔徑的情況下使用。 本發明的目的就是在提供一種高密度可唯讀光碟,包 括· 一具有訊坑之基材;以及一層或多層具有超解析近場 結構之遮罩層,此遮罩層係以介電材料與金屬粒子之混合 物所製成。 .本發明中’介電材料例如為括金屬氧化物(me t a i oxide)、金屬氮化物(metal nitride)、金屬硫化物 (々metal sul f ide)、金屬氟化物(metal f lu〇ride)以及該 等材料之混合物。在本發明之較佳實施例中,介電材料例 如為ZnS-Si02。
200405307
鉑粒子。 本發明之高密度可唯讀光碟更包括一 層 4固或多數個反射 介電層,配 黑占能更明顯 式,作詳細 本發明之高密度可唯讀光碟更包括多數層 置於遮罩層之上表面以及下表面上。 為讓本發明之上述和其他目的、特徵和優 易懂,下文特舉一較佳實施例,並配合所附^ 說明如下。 【實施方式】 本發明將搭配圖示進行詳細之說明 以下 第2圖繞示為依照本發明一較佳實施例光碟 意圖。第2圖中的光碟包括一具有訊坑丨7的透明基^ 1 〇 丁 以及一形成於基材1 0上之遮罩層丨丨。對於記錄雷射的波^ 而言,基材10是十分透光的。基材10係藉由傳統基材製七 方法所形成’例如係使用具有良好耐撞性、耐熱性與信南 性之材料以射出成型的方式製造。基材丨〇的材質例^ ^ ^ 聚碳酸酯(polycarbonate)、 聚甲斟丙烯酸甲醋 (polymethylmethacrylate)、環氧;f封月旨(ep〇xy )、聚酉旨 (polyester),以及非晶聚烯烴樹脂(amorphous polyolefin) 〇 本發明的遮罩層11係將微細的金屬粒子1 6分散於介電 材料中,而不是使用傳統的銀氧化物(s i 1 v e r ο X i d e )。微 細金屬粒子的尺寸係小於雷射光束。遮罩層係用以作為因 自我聚焦效應(self-focusing effect)所產生之近場光線
12291pif.ptd 第10頁 200405307 五、發明說明(6) 的孔徑(aperture) 利用波長680nm的1 屬粒子係用以作為 適用可唯讀光碟。 遮罩層1 1中所 屬氮化物、金屬硫 合物。舉例而言, SiN、ZnS 或是MgF2 罩層11中的金屬粒 屬。在此情況下, 生相互間的化學反 狀。然而,並不傾 因在於,銀粒子會 罩層11的特性惡化 同時,遮罩層 濺鍍製程中所使用 的混合物。因此, 微細金屬粒子分散 雖然未繪示於 層或多層反射層。 用以確保其高反射 具有高熱傳導特性 質。反射層例如係 Zn、Mg,及其合金 。因此’尺寸小於100ηιη的細微標記可 t射I買取。根據本發明,由於細微的金 表面離體子(plasmon)的來源,因此其 使用的介電材料例如為金屬氧化物、金 化物、金屬氟化物,或是這些材料的混 本發明可使用Si02、AI 2 0 3、Si3N4、 ^ 等。在本發明較佳實施例中,分散於遮 子例如係由金、鉑、铑以及鈀等貴金 由於介電材料與金屬粒子之間並不會產 ,,故可以維持細微金屬顆粒原有的妒 =用銀粒子(sUver㈣加“)。原 :’丨電材料中的硫反應,因此會造成遮 11例如係以濺鍍製 的靶材例如A八+積形成。 可藉由濺鍍材料與微細金屬粒子 於介電材:;Γ將尺寸小於雷射光束之 弟2圖中,+ 當資料在:二明之光碟例如更包括- 性。就這_ % 2項取時’這些反射層係 以及高反射,& έ ,本發明較佳係使用 Ο射cf生之金屬作為反射層之材 所組成之族严· Cr Ag、Ti、pd、Ni、 200405307
射層形成的厚度約為5 0 nm至1 5 0 nm之間,复开彡士 + 〜成方式例如 為真空沈積(vacuum deposition)、電子束(e〜beam) 積’以及錢鑛等。本發明較佳實施例中,反射声的曰匕 如係限制在6 0 n m至1 2 0 n m之間,以確保足夠的反射性旱、度例 信賴性。 以及 本發明的光碟例如更包括一介電層,此介電層例如係 配置於遮罩層與基材之間、遮罩層與反射層之間7或^ = 罩層的上表面與下表面上。配置於遮罩層與基材之間 電層係用以避免基材受熱損壞。另一方面,配置於遮罩芦 與反射層之間的介電層係用以作為一擴散阻障層 θ (diffusion prevention layer) 〇 本發明的光碟例如更包括一保護層。此保護層係用以 保護其他膜層,且特別是保護反射層。保護層例如係利用 旋轉塗佈等傳統方式而形成。更詳細地說,將一種以環氧 樹脂或丙燒酸脂為基礎成分之紫外線固化樹脂,即一種呈 現出高耐撞強度且以紫外線進行固化的透明材料塗佈於反 射層上’之後再藉由紫外線固化的方式以形成此保護層。 以下,本發明將以實施例的方式進行更詳細之說明, 但並非用以限制本發明。 實施例1 首先,提供一厚度為〇· 6mm的聚碳酸酯 (polycarbonate,PC)基材。此基材上具有訊坑且其軌跡 間距與數位影音光碟(DVD)同為〇 · 7 4微米。接著,分別藉 由功率為4 0 0W以及160W的濺鍍方式將ZnS-Si02靶材以及鉑
12291pif.ptd 第12頁 200405307 五、發明說明(8) (Pt)耙材共沈積(co —deposit)於基材上,以形成混合薄 膜。此時,氬氣(A r g a s )係以2 0 s c c m的流量提供,沈積 時的壓力為1· 5 mTorr,且此薄膜中ZnS-Si02與鉑(Pt)的 體積比為8〇 : 20。 實施例2 首先,提供一厚度為0 · 6 mm的聚碳酸酯 (polycarbonate,PC)基材。此基材上具有訊坑且其執跡 間距為0· 74微米。接著,藉由濺鍍的方式沈積一ZnS —si〇2 介電層以及一 ZnS-Si02 + Pt遮罩層於基材上。之後,藉由 錢艘的方式沈積一厚度約為1 〇 〇 ηιη之銀反射層。然後,旋 轉塗佈一保護層於反射層上,此保護層之材質係以光線固 化樹脂材料為主。接著,將此組合結構放置於真空爐中以 4 0 °C烘烤1 2小時,以製備成光碟。在此情況下,
ZnS-Si02 + Pt遮罩層係分別藉由功率為4〇〇w以及16〇w的濺 鑛方式將Z n S - S i 0 2 $巴材以及翻(p ^ )革巴材共錢鍍 (⑶—Sputterjng)於基材上,以形成厚度為5〇L之混合薄 ,。此牯’氬氣(Ar gas)係以2〇 sccm的流量提供,沈積 呀的壓力為1.5 mTorr,且此薄膜中ZnS —Si〇2與鉑(?1:)的 體積比為80 :20。 實施例3 除了於遮罩層與反射層之間形成一ZnS —Si〇2層之外, 本實施例中可唯讀光碟皆與實施例2的製備方式相同。
12291pif.ptd 第13頁
200405307 五、發明說明(9) 比較例1 首先’知:供一厚度為0,6mm的聚碳酸酉旨 (polycarbonate,PC)基材。此基材上具有訊坑以及預記 錄溝執(pre-grooves),且其軌跡間距為〇· 74微米。接 著’籍由錢鍍的方式沈積一銀反射層。然後,旋轉塗佈一 保護層於反射層上,此保護層之材質係以光線固化樹脂材 料為主。因此,本比較例係形成一種不具有遮罩層之可唯 讀光碟。 θ 實驗例1 實施例1-3以及比較例!中,光碟的效能係以具有光束 波長為635nm且光學讀取頭之數值孔徑為〇. 6〇的評估設備 來進行評估。载波對雜訊比值(carrier nQise ratjo,C/N)係以6公尺/秒之線性速度以及4 # w的讀取功 率1測而得,其結果繪示於第3圖中。如第3圖所繪示,讀 取解析極限(A/4NA)& 265nm,而數位影音光碟的最小訊、 坑長度為40 Onm。在比較例1的光碟中,當訊坑長产為 25 = 200nm之間,即其長度小於讀取解析胃極限% =二…時, :會有載波對雜訊比值(C/N)。然而,在實施例】的光碟 1值二:f'度-為?〇1"時,會出現約40 dB的載波對雜訊 斤:廡 貫驗結果證明了本發明之光碟可產生超解 祈效應(super resolution effect)。 =上述明I員T知,纟發明能夠提供—種具有相 存…高密度可唯讀光碟。此光碟可在不降低雷射二極
200405307 五、發明說明(ίο) 體的波長或是不增加物鏡之數值孔徑的情況下使用。 雖然本發明已以較佳實施例揭露如上,然其並非用以 限定本發明,任何熟習此技藝者,在不脫離本發明之精神 和範圍内,當可作些許之更動與潤飾,因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。
12291pi f.ptd 第15頁 200405307 圖式簡單說明 第1圖繪示為傳統光碟之結構示意圖; 第2圖繪示為依照本發明實施例1中光碟之結構示意 圖;以及 第3圖繪示為實施例;1 - 3以及比較例1所製備出之光碟 的效能評估表。 【圖式標示說明】 10 基材 11 遮罩層 16 金屬粒子 17 訊坑
12291pif.ptd 第16頁

Claims (1)

  1. 六、申請專利範II] 1 ·—種高 一具有訊 一層或多 "从以—介 如申請 介電材 屬氣化 如申請 介電材 如申請 金屬粒 2. 其中該 物、金3. 其中該4. 其中該 合物。5· 其中該 6· 更包括7. 更包括 面上。 如申請 金屬粒 如申 吕月 一個或 如申請 多數層 密度可唯讀光碟,包括: 坑之基材;以及 數層具有一超解* 電材料盥一=Γ析近場結構之遮軍居,兮, 專利範圍第i項所、物所製成。 料包括金屬氧化’L问在X可唯讀光碑, …混::氮化物、金屬:化 =以2所述之高密度可唯讀光碟, 專利範圍第1 Jg 1 子包括金、知員所述之高密度可唯讀光碟, 白、鍺、鈀,以及該等材料的混 專利範圍第1 子包括銷粒子所述之高密度可唯讀光碟, 專利範圍第; 多數伽Γ項所述之高密度可唯讀光碟, 7双1固反射層。 專利範圍Μ 1 s 介乐1員所述之高密度可唯讀光碟, …9 ’配置於該遮罩層之上表面以及下表
    12291pif.ptd 第17頁
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CN1258180C (zh) 2006-05-31
KR100922870B1 (ko) 2009-10-20
EP1403860A1 (en) 2004-03-31
US7348124B2 (en) 2008-03-25
DE60300474T2 (de) 2005-09-22
US20040161575A1 (en) 2004-08-19
KR20040028488A (ko) 2004-04-03
JP2004119007A (ja) 2004-04-15
TWI246683B (en) 2006-01-01
JP3995644B2 (ja) 2007-10-24
DE60300474D1 (de) 2005-05-12
EP1403860B1 (en) 2005-04-06

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