KR100922870B1 - 고밀도 재생전용 광디스크 - Google Patents

고밀도 재생전용 광디스크 Download PDF

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KR100922870B1
KR100922870B1 KR1020030049132A KR20030049132A KR100922870B1 KR 100922870 B1 KR100922870 B1 KR 100922870B1 KR 1020030049132 A KR1020030049132 A KR 1020030049132A KR 20030049132 A KR20030049132 A KR 20030049132A KR 100922870 B1 KR100922870 B1 KR 100922870B1
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optical disc
layer
recording
high density
mask layer
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KR1020030049132A
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KR20040028488A (ko
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황인오
윤두섭
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삼성전자주식회사
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Priority to TW092126301A priority Critical patent/TWI246683B/zh
Priority to EP03256028A priority patent/EP1403860B1/en
Priority to DE60300474T priority patent/DE60300474T2/de
Priority to JP2003336174A priority patent/JP3995644B2/ja
Priority to CNB031650236A priority patent/CN1258180C/zh
Priority to US10/671,865 priority patent/US7348124B2/en
Publication of KR20040028488A publication Critical patent/KR20040028488A/ko
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Abstract

고밀도 광디스크가 개시된다.
본 발명은 피트가 형성된 기판; 유전체 재료와 금속 입자의 혼합물로 구성되어 초해상 구조를 갖는 하나 이상의 마스크 층을 포함하는 고밀도 재생전용 광디스크를 제공하며, 본 발명에 따르면 레이저 다이오드의 단파장화나 대물렌즈의 개구율을 높이지 않고도 대용량 및 고밀도화를 달성할 수 있다.
초해상 구조

Description

고밀도 재생전용 광디스크{High density optical disc}
도 1은 종래기술에 따른 디스크 구조의 개략도이다.
도 2는 본 발명의 실시예 1에 따른 디스크 구조의 개략도이다.
도 3은 본 발명의 실시예 1∼3 및 비교예 1에서 얻어진 디스크의 성능 평가에 대한 그래프이다.
< 도면의 주요부분에 대한 부호의 설명 >
10: 기판 11: 마스크층
12: 기록층 13: 반사층
14: 유전체층 15: 기록마크
16: 금속입자 17: 피트
본 발명은 광디스크에 관한 것으로서, 보다 상세하게는 디스크 내부에 초해상 구조(Super-Resolution Structure)를 도입함으로써 레이저 빔의 분해능 이하 크기의 마크를 재생할 수 있는 고밀도 재생전용 광디스크에 관한 것이다.
광디스크는 기존의 자기 기록 매체에 비해 기록 단위당 필요한 기록 면적이 매우 작기 때문에 고밀도 기록매체로서 많이 사용되고 있다. 이러한 광디스크는 그 기능에 따라, 기록되어진 정보를 재생만 하는 재생 전용형(Read Only Memory; ROM)과 1회에 한하여 기록이 가능한 추기형(Write Once Read Many: WORM) 및 기록 후 소거 및 재기록이 가능한 소거가능형(Erasable)으로 구분된다.
추기형 광디스크의 일례로서, CD-R(Compact Disc Recordable)이 있다. CD-R은 780nm의 기록 레이저를 시아닌, 프탈로시아닌 등의 유기색소로 이루어진 기록층에 조사하여 색소층의 분해, 기판 및 반사막의 변형 등을 유발시키고, 1mW 이하의 낮은 파워로 기록된 신호를 읽어내는 광기록 매체로서 650MB 정도의 기록 용량으로 데이터, 음악, 화상 등 다양한 형태의 데이터를 기록 재생하는 용도로 널리 사용되고 있다.
그러나, CD-R 또는 CD-RW(Compact Disc Rewritable)과 같이 780nm의 기록파장을 이용하는 광기록 매체는 그 용량이 동화상을 저장하기에는 부족할 뿐만 아니라 날로 복잡해지는 멀티미디어 환경에서 사용하기에는 부족한 점이 많다.
이와 같은 문제점을 극복하고자 개발된 것이 630-680nm의 단파장 레이저를 사용하여 단면 2.7 내지 4.7GB의 용량을 실현한 것이 DVD(Digital Versatile Disc) 이며, DVD 역시 재생전용(DVD), 추기형(DVD-R) 및 소거가능형(DVD-RAM, DVD+RW, DVD-RW)으로 분류될 수 있다. DVD-R은 기록 레이저를 기록층에 조사함으로써 기록층의 변형 및 분해를 유발하여, DVD-RAM, DVD-RW 등은 상변화에 의한 광학적 특성의 변화를 유발하여 데이터를 기록한다. 특히, 유기색소를 사용한 DVD-R은 DVD-ROM과의 호환성, 가격 및 용량면에서 다른 매체에 비해 상대적으로 유리한 위치에 있 기 때문에 관심이 집중되고 있다.
이처럼 최근 등장하고 있는 다수의 미디어에 있어서 가장 큰 이슈는 용량이며, 이 용량의 증대를 위한 여러 가지 방법이 시도되고 있다. 광디스크의 용량은 정해진 면적내에 정확히 재생가능한 작은 형태의 피트를 얼마나 많이 집어넣고, 또 이러한 피트를 정확히 재생할수 있는 레이저빔의 특성에 우선적으로 의존한다. 레이저 다이오드로 부터 발생되는 빛은 픽업의 대물렌즈를 통하여 집속해도 회절영향 때문에 무한히 작은 한점으로는 모아지지 않고 유한 폭을 가진 빔으로 형성되며, 이를 회절한계(diffraction limit)라 한다. 일반적인 광디스크의 경우에는 광원의 파장이 λ이고, 대물렌즈의 개구수가 NA (Numerical Aperture) 일 때, λ/4NA가 재생 분해능의 한계가 된다. 따라서, 광원의 파장이 짧아지거나 대물렌즈의 개구수가 커질수록 기록용량이 증대하게 된다. 그러나, 현재의 레이저 기술로는 파장이 짧은 레이저를 제공하는데 한계가 있고, 개구수가 큰 대물렌즈를 제조하기 위해서는 제조비용이 고가라는 한계점이 있으며, 또한 대물렌즈의 개구수가 커질 수록 픽업과 디스크 사이의 거리(working distance)가 매우 짧아지기 때문에 픽업과 디스크의 충돌에 의해 디스크 표면이 손상됨으로써 데이터가 손실될 우려가 커지게 된다.
최근 이러한 재생 분해능의 한계를 극복하기 위하여 초해상 근접장 구조(Super-Resolution Structure:super-RENS)의 광디스크가 연구되고 있는데, 이러한 구조의 광디스크에는 산화은 마스크층이 주로 사용된다. 도 1에는 이처럼 산화은 마스크층을 구비한 광디스크를 개략적으로 나타내었다. 이러한 구조에서의 기 록 및 재생과정을 살펴보면, 기록시에 산화은이 미소 은 입자와 산소로 분해되고, 재생시에 상기 미소 은 입자의 표면에 플라즈몬이 형성되며, 이러한 표면 플라즈몬에 의해 근접장 재생(Near Field Reading:NFR)이 가능해지며 상기 회절한계를 극복하여 매우 작은 기록 마크를 재생해 낼 수 있게 된다.
그러나 산화은 등의 산화금속 마스크층을 사용하는 광기록매체는 WORM 타입에서는 사용할 수 있지만, 기록과정에 의해 산화은이 미소 은 입자와 산소로 분해되며, 이는 초해상 효과를 발생시키는 금속 입자가 기록과정에서 발생된다는 것을 의미하므로, 이러한 기록과정이 없이 피트의 형태로 기판 상에 정보가 기입되어 있는 재생전용 광디스크(ROM)에는 산화은 마스크층을 적용할 수 없다는 문제점이 있다.
따라서, 본 발명이 이루고자 하는 기술적 과제는 레이저 다이오드의 단파장화나 대물렌즈의 개구율을 높이지 않고도 대용량 및 고밀도화를 달성할수 있으며, 재생전용 광디스크에 적용할 수 있는 고밀도 광디스크를 제공하는 것이다.
상기 목적을 달성하기 위하여 본 발명은,
피트가 형성된 기판;
유전체 재료와 금속 입자의 혼합물로 구성되어 초해상 근접장 구조를 갖는 하나 이상의 마스크 층을 포함하는 고밀도 광디스크를 제공한다.
본 발명의 일 실시예에 의하면, 상기 유전체 재료는 금속의 산화물, 질화물, 황화물, 불화물 또는 이들의 혼합물인 것이 바람직하다.
또한, 상기 유전체 재료는 ZnS-SiO2인 것이 바람직하다.
본 발명의 다른 실시예에 의하면, 상기 금속 입자는 금, 백금, 로듐, 팔라듐 또는 이들의 혼합물인 것이 바람직하다.
본 발명의 또 다른 실시예에 의하면, 상기 금속 입자는 백금인 것이 바람직하다.
또한, 본 발명에 따른 광 디스크는 하나 이상의 반사층을 더 포함하는 것이 바람직하다.
본 발명의 바람직한 실시예에 의하면, 상기 마스크층의 상하측의 적어도 일면에 유전체층을 더 포함하는 것일 수 있다.
이하, 첨부된 도면을 참조하면서 본 발명을 더욱 상세하게 설명한다.
피트(17)가 형성되어 있는 투명 기판(10) 위에 마스크층(11)이 형성되어 있는 본 발명의 일 실시예에 의한 광디스크를 도 2에 나타내었다.
상기 기판(10)은 기록 레이저의 파장에서 높은 투명도를 가지며, 우수한 내충격성, 내열성, 내환경성 등을 갖는 재료로서 사출성형과 같은 통상의 기판 제조방법에 의해 성형이 가능한 재료중에서 선택된다. 구체적으로 예를 들면, 폴리카보네이트, 폴리메틸메타아크릴레이트, 에폭시, 폴리에스테르, 비정질 폴리올레핀 (amorphous polyolefin) 등이 있다.
본 발명에서는 기존의 산화은막 대신에 유전체 재료에 미소 금속 입자를 분 산시킨 형태의 마스크 층(11)이 제공되며, 상기 미소 금속 입자의 크기는 레이저 빔의 크기보다 작다. 이처럼 본 발명에서는 표면 플라즈몬의 원천이 미소 금속 입자의 형태로 존재하기 때문에 재생전용 디스크에 사용할 수 있다.
상기 마스크층에 사용되는 유전체는 금속의 산화물, 질화물, 황화물, 불화물 또는 그들의 혼합물이며, 예를 들면, SiO2, Al2O3, Si3N 4, SiN, ZnS, MgF2 등이 사용될 수 있다. 마스크층에 분산되는 금속 재료로는 금, 백금, 로듐, 팔라듐 등의 귀금속 재료를 사용하는 것이 바람직하다. 이 때, 유전체 재료와 금속 재료는 서로 화학적으로 반응하지 않아 미소 금속 입자가 그 형태를 유지할 수 있어야 하는데, 은 입자를 사용하는 때에는 유전체 재료 중 설퍼와 반응하여, 시간이 경과함에 따라 특성이 저하될 우려가 있기 때문에 바람직하지 않다.
한편, 상기 마스크층은 스퍼터링에 의해 성막될 수 있는데, 스퍼터링 타겟 자체가 상기 유전체 재료와 미소크기의 금속입자의 혼합물이기 때문에 스퍼터링법에 의해 레이저 빔 크기 이하의 미소 금속입자를 분산시킬 수 있다.
도 2 에는 도시되지 않았지만 본 발명에 따른 광디스크는 반사층을 더 포함할 수 있으며, 반사층은 기록 또는 재생시 고반사율을 얻기 위한 것으로 변형이 용이하게 일어나지 않도록 열전도율이 크고 반사율이 큰 금속으로 형성하는 것이 바람직하다. 따라서, Au, Al, Cu, Cr, Ag, Ti, Pd, Ni, Zn, Mg 및 이들의 합금으로 구성된 군으로부터 선택된 금속으로 형성되며, 일반적으로 진공증착, 전자빔 또는 스퍼터링 등의 일반적인 방법에 의해 50 내지 150nm 두께로 형성된다. 충분한 반사 율과 신뢰성을 확보하기 위해서는 60 내지 120nm가 바람직하다.
본 발명에 따른 광디스크에는 마스크층과 기판 사이, 마스크층과 반사층 사이 또는 양면 모두에 유전체층을 더 포함할 수도 있다. 마스크층과 기판사이의 유전체층은 열에 의한 기판의 손상을 방지하는 역할을 하고 마스크층과 반사층 사이의 유전체층은 확산 방지층으로서의 기능을 수행한다.
또한, 본 발명에 따른 광디스크는 보호층을 더 포함할 수 있으며, 이러한 보호층은 광디스크의 다른 구성층들을 보호하는 작용을 한다. 이러한 보호층은 통상의 방법에 따라 형성될 수 있는데, 예를 들면, 충격강도가 크고 투명하며 자외선에 의해 경화 가능한 물질로서 에폭시계 또는 아크릴레이트계 자외선 경화성 수지를 반사층 위에 스핀 코팅한 다음, 자외선으로 경화시키는 방법을 이용하여 형성한다.
이하에서는 본 발명의 바람직한 실시예를 통하여 본 발명을 보다 구체적으로 설명하나 이에 의해 본발명이 제한되는 것은 아니다.
실시예 1
DVD와 동일한 0.74㎛의 트랙피치를 가지며, 피트가 형성되어 있는 0.6mm 두께의 폴리카보네이트(PC)기판 상에, ZnS-SiO2 타겟을 400W로, Pt 타겟을 160W로 코스퍼터링하여 50nm 두께의 혼합 박막을 형성하였다. 이 때 Ar은 20sccm으로 공급하였고, 증착 압력은 1.5mTorr이었으며, 상기 박막 내의 ZnS-SiO2와 Pt의 부피비는 80:20이었다.
실시예 2
0.74㎛의 트랙피치를 가지며, 피트가 형성되어 있는 0.6mm 두께의 폴리카보네이트(PC)기판 상에 유전체층으로서 ZnS-SiO2, 마스크층으로서 ZnS-SiO2 + Pt를 스퍼터링으로 성막한 후, Ag를 100nm 두께로 스퍼터링하여 반사막을 제조하였다. 다음으로 광경화성 수지 보호층을 스핀코팅법으로 형성하여 광디스크를 완성하였다. 이 때 마스크층으로서 ZnS-SiO2와 Pt의 혼합층은 ZnS-SiO2 타겟을 400W로, Pt 타겟을 160W로 코스퍼터링하여 50nm 두께의 혼합 박막을 형성하였는데, Ar은 20sccm으로 공급하였고, 증착 압력은 1.5mTorr이었으며, 상기 박막 내의 ZnS-SiO2와 Pt의 부피비는 80:20이었다
실시예 3
마스크층과 반사막 사이에 ZnS-SiO2를 추가로 더 성막한 것을 제외하고는 상기 실시예 2와 동일한 방법으로 재생전용 디스크를 제조하였다.
비교예 1
트랙 피치 0.74㎛의 프리그루브를 갖고 피트가 형성되어 있는 0.6㎜ 두께의 폴리카보네이트(PC) 기판에 반사막으로서 Ag를 스퍼터링법으로 성막하고, 광경화 수지 보호층을 스핀코팅법으로 형성하여 마스크층이 없는 재생전용 광디스크를 제조하였다.
시험예 1
상기 실시예 1∼3 및 비교예 1에서 얻어진 디스크의 성능을 635nm, NA 0.60의 픽업을 갖는 DVD 평가용 설비로 평가하였다. 선속도는 6m/s, 재생파워는 4mW로 하여 그 결과를 도 3에 나타내었다. 도 3에서 알 수 있듯이, 이 경우의 재생 분해능(λ /4NA)은 265nm에 해당이 되며, DVD에서 최소 피트의 길이는 400nm인데, 비교예 1에 의해 제조된 광디스크에서는 분해능 265nm보다 작은 250nm 및 200nm의 피트에서는 C/N이 전혀 얻어지지 않았지만, 실시예 1 내지 3에 의해 제조된 광디스크에서는 250nm의 피트에 대해서도 실용화 가능한 수준인 약 40dB 이상의 C/N이 얻어졌으며, 이를 통해 초해상 효과가 얻어짐을 확인할 수 있다.
이상에서 살펴본 바와 같이, 본 발명에 따른 고밀도 재생전용 광디스크는 레이저 다이오드의 단파장화나 대물렌즈의 개구율을 높이지 않고도 대용량 및 고밀도화를 달성할 수 있다.

Claims (7)

  1. 피트가 형성되어 있는 기판; 및
    유전체 재료와 금속 입자의 혼합물로 구성되어 초해상 근접장 구조를 갖는 하나 이상의 마스크 층을 포함하고,
    상기 유전체 재료는 금속의 산화물, 질화물, 황화물, 불화물 또는 이들의 혼합물인 고밀도 재생전용 광디스크.
  2. 삭제
  3. 제 1항에 있어서, 상기 유전체 재료는 ZnS-SiO2인 것을 특징으로 하는 고밀도 재생전용 광디스크.
  4. 제 1항에 있어서, 상기 금속 입자는 금, 백금, 로듐, 팔라듐 또는 이들의 혼합물인 것을 특징으로 하는 고밀도 재생전용 광디스크.
  5. 삭제
  6. 제 1항에 있어서, 하나 이상의 반사층을 더 포함하는 것을 특징으로 하는 고밀도 재생전용 광디스크.
  7. 제 1항에 있어서, 상기 마스크층의 적어도 일면에 유전체층을 더 포함하는 것을 특징으로 하는 고밀도 재생전용 광디스크.
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TW092126301A TWI246683B (en) 2002-09-28 2003-09-24 High-density readable only optical disk
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DE60300474T DE60300474T2 (de) 2002-09-28 2003-09-25 Optische Platte vom Nur-Lesen-Typ mit hoher Dichte
JP2003336174A JP3995644B2 (ja) 2002-09-28 2003-09-26 高密度再生専用光ディスク
CNB031650236A CN1258180C (zh) 2002-09-28 2003-09-28 高密度只读光盘
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US7348124B2 (en) 2008-03-25
TWI246683B (en) 2006-01-01
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CN1523594A (zh) 2004-08-25
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