TR26149A - KAPLAMA KALINLIGI ÖLCüSü - Google Patents
KAPLAMA KALINLIGI ÖLCüSüInfo
- Publication number
- TR26149A TR26149A TR89/0974A TR97489A TR26149A TR 26149 A TR26149 A TR 26149A TR 89/0974 A TR89/0974 A TR 89/0974A TR 97489 A TR97489 A TR 97489A TR 26149 A TR26149 A TR 26149A
- Authority
- TR
- Turkey
- Prior art keywords
- coating
- thickness
- beams
- polarized light
- ellipticity
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
- G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Magnetic Heads (AREA)
- Insulated Conductors (AREA)
- Organic Insulating Materials (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8802920A NL8802920A (nl) | 1988-11-28 | 1988-11-28 | Laagdiktemeter. |
Publications (1)
Publication Number | Publication Date |
---|---|
TR26149A true TR26149A (tr) | 1994-01-14 |
Family
ID=19853294
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TR89/0974A TR26149A (tr) | 1988-11-28 | 1989-11-28 | KAPLAMA KALINLIGI ÖLCüSü |
Country Status (11)
Country | Link |
---|---|
US (1) | US5170049A (tr) |
EP (1) | EP0371550B1 (tr) |
JP (1) | JPH0678892B2 (tr) |
AT (1) | ATE99046T1 (tr) |
AU (1) | AU629265B2 (tr) |
CA (1) | CA2003983C (tr) |
DE (1) | DE68911659T2 (tr) |
ES (1) | ES2047108T3 (tr) |
MX (1) | MX172398B (tr) |
NL (1) | NL8802920A (tr) |
TR (1) | TR26149A (tr) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5243185A (en) * | 1992-07-31 | 1993-09-07 | Loral Aerospace Corp. | Apparatus and method for ice detection |
ES2076083B1 (es) * | 1993-06-04 | 1996-06-01 | Fuesca Sl | Aparato y metodo de medida y control de la densidad de reticulacion de los tratamientos en caliente y frio del vidrio aligerado. |
US5650610A (en) * | 1995-03-15 | 1997-07-22 | National Research Council Of Canada | Apparatus and method for remote detection of ice or other birefringent material on a surface |
US5557399A (en) * | 1995-03-22 | 1996-09-17 | Zygo Corporation | Optical gap measuring apparatus and method |
CN1131741A (zh) * | 1995-03-22 | 1996-09-25 | 载歌公司 | 光学间隙测量装置和方法 |
US5953125A (en) * | 1995-09-01 | 1999-09-14 | Zygo Corporation | Optical gap measuring apparatus and method |
US6483580B1 (en) | 1998-03-06 | 2002-11-19 | Kla-Tencor Technologies Corporation | Spectroscopic scatterometer system |
JP3893868B2 (ja) * | 2000-10-11 | 2007-03-14 | 東京エレクトロン株式会社 | 電界効果トランジスタの製造方法、並びに、半導体デバイスの製造方法及びその装置 |
US6908774B2 (en) * | 2002-08-12 | 2005-06-21 | S.O. I. Tec Silicon On Insulator Technologies S.A. | Method and apparatus for adjusting the thickness of a thin layer of semiconductor material |
EP1619465A1 (en) * | 2004-07-19 | 2006-01-25 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Optical monitoring apparatus and method of monitoring optical coatings |
US7515253B2 (en) * | 2005-01-12 | 2009-04-07 | Kla-Tencor Technologies Corporation | System for measuring a sample with a layer containing a periodic diffracting structure |
US7370525B1 (en) | 2006-10-31 | 2008-05-13 | Swan International Sensors Pty. Ltd. | Inflight ice detection system |
AT504136B1 (de) * | 2006-12-29 | 2008-03-15 | Univ Linz | Verfahren zur bestimmung der dicke einer metallisierungsschicht auf einer polymerfolie |
CN100470193C (zh) * | 2007-06-08 | 2009-03-18 | 中国科学院上海光学精密机械研究所 | 石英波片厚度的测量装置和测量方法 |
US20090002686A1 (en) * | 2007-06-29 | 2009-01-01 | The Material Works, Ltd. | Sheet Metal Oxide Detector |
DE102008021199A1 (de) * | 2008-04-28 | 2009-10-29 | Focke & Co.(Gmbh & Co. Kg) | Verfahren und Vorrichtung zum Prüfen von mit Folie umwickelten Zigarettenpackungen |
JP2012032239A (ja) * | 2010-07-29 | 2012-02-16 | Horiba Ltd | 試料検査装置及び試料検査方法 |
CA2908964C (en) * | 2013-03-15 | 2018-11-20 | Sensory Analytics | Method and system for real-time in-process measurement of coating thickness |
JP6355066B2 (ja) * | 2013-08-29 | 2018-07-11 | 株式会社リコー | センサ装置及び画像形成装置 |
EP3714231B1 (en) * | 2017-11-24 | 2024-07-03 | ABB Schweiz AG | System and method for characterizing a coating such as a paint film by radiation, and painting facility with such a system |
CN113155040B (zh) * | 2021-03-04 | 2023-02-28 | 上海精测半导体技术有限公司 | 一种探测反射光束角度变化的装置、方法及膜厚测量装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3426201A (en) * | 1965-10-12 | 1969-02-04 | Texas Instruments Inc | Method and apparatus for measuring the thickness of films by means of elliptical polarization of reflected infrared radiation |
US3906844A (en) * | 1974-05-28 | 1975-09-23 | Int Envelope Limited | Method and apparatus for producing envelopes having a closure flap |
US3908508A (en) * | 1974-09-23 | 1975-09-30 | Modulus Corp | Strain indicator |
JPS51129279A (en) * | 1975-05-02 | 1976-11-10 | Nippon Kogaku Kk <Nikon> | Polarizing analyzer |
US4585348A (en) * | 1981-09-28 | 1986-04-29 | International Business Machines Corporation | Ultra-fast photometric instrument |
EP0075689A1 (en) * | 1981-09-28 | 1983-04-06 | International Business Machines Corporation | Optical instruments for viewing a sample surface |
US4850711A (en) * | 1986-06-13 | 1989-07-25 | Nippon Kokan Kabushiki Kaisha | Film thickness-measuring apparatus using linearly polarized light |
-
1988
- 1988-11-28 NL NL8802920A patent/NL8802920A/nl not_active Application Discontinuation
-
1989
- 1989-11-23 DE DE89202969T patent/DE68911659T2/de not_active Expired - Fee Related
- 1989-11-23 EP EP89202969A patent/EP0371550B1/en not_active Expired - Lifetime
- 1989-11-23 AT AT89202969T patent/ATE99046T1/de not_active IP Right Cessation
- 1989-11-23 ES ES89202969T patent/ES2047108T3/es not_active Expired - Lifetime
- 1989-11-27 MX MX018502A patent/MX172398B/es unknown
- 1989-11-27 CA CA002003983A patent/CA2003983C/en not_active Expired - Fee Related
- 1989-11-27 US US07/441,641 patent/US5170049A/en not_active Expired - Fee Related
- 1989-11-28 AU AU45636/89A patent/AU629265B2/en not_active Ceased
- 1989-11-28 TR TR89/0974A patent/TR26149A/tr unknown
- 1989-11-28 JP JP1306757A patent/JPH0678892B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ATE99046T1 (de) | 1994-01-15 |
DE68911659D1 (de) | 1994-02-03 |
US5170049A (en) | 1992-12-08 |
AU629265B2 (en) | 1992-10-01 |
NL8802920A (nl) | 1990-06-18 |
EP0371550A1 (en) | 1990-06-06 |
CA2003983A1 (en) | 1990-05-28 |
AU4563689A (en) | 1990-05-31 |
ES2047108T3 (es) | 1994-02-16 |
JPH02263105A (ja) | 1990-10-25 |
EP0371550B1 (en) | 1993-12-22 |
JPH0678892B2 (ja) | 1994-10-05 |
CA2003983C (en) | 1993-12-14 |
DE68911659T2 (de) | 1994-05-05 |
MX172398B (es) | 1993-12-15 |
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