ES2047108T3 - Metodo para medir el espesor de peliculas delgadas. - Google Patents

Metodo para medir el espesor de peliculas delgadas.

Info

Publication number
ES2047108T3
ES2047108T3 ES89202969T ES89202969T ES2047108T3 ES 2047108 T3 ES2047108 T3 ES 2047108T3 ES 89202969 T ES89202969 T ES 89202969T ES 89202969 T ES89202969 T ES 89202969T ES 2047108 T3 ES2047108 T3 ES 2047108T3
Authority
ES
Spain
Prior art keywords
thickness
coating
beams
measuring
polarized light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES89202969T
Other languages
English (en)
Inventor
Jonge Marinus Willem Cornel De
Tamis Lambertus Maria Ir Leek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tata Steel Ijmuiden BV
Original Assignee
Hoogovens Groep BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoogovens Groep BV filed Critical Hoogovens Groep BV
Application granted granted Critical
Publication of ES2047108T3 publication Critical patent/ES2047108T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Magnetic Heads (AREA)
  • Insulated Conductors (AREA)
  • Organic Insulating Materials (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

CALIBRE DE ESPESOR DE REVESTIMIENTO QUE MIDE EL ESPESOR DE UN REVESTIMIENTO DE OXIDO DE CROMO EN UNA CAPA DE CROMO SOBRE UN SUSTRATO QUE TIENE UNA FUENTE DE ILUMINACION (17) QUE GENERA LUZ POLARIZADA LINEALMENTE, UN DISPOSITIVO (19) PARA DIVIDIR ELIPTICAMENTE LA LUZ POLARIZADA REFLEJADA POR EL REVESTIMIENTO DE OXIDO DE CROMO EN UN CIERTO NUMERO DE RAYOS (20, 21), DETECTORES (22, 23) QUE MIDEN LA INTENSIDAD DE LOS RAYOS, Y DISPOSITIVOS (24) QUE CALCULAN EL ESPESOR DEL REVESTIMIENTOS DE OXIDO DE CROMO A PARTIR DE LAS INTESIDADES DE LUZ MEDIDAS. PARA SIMPLIFICAR EL DISPOSITIVO Y EL CALCULO EL DISPOSITIVO DIVISOR ESTA DISPUESTO PARA DIVIDIR LA LUZ POLARIZADA REFLEJADA EN DOS RAYOS PARCIALES (20, 21), POLARIZADOS A UN CIERTO ANGULO CONOCIDO ENTRE SI Y EL DISPOSITIVO DE CALCULO QUE CALCULA LA ELIPTICIDAD A PARTIR DE LA INTENSIDAD MEDIDA DE LOS DOS RAYOS PARCIALES, Y EL ESPESOR A PARTIR DE LA ELIPTICIDAD.
ES89202969T 1988-11-28 1989-11-23 Metodo para medir el espesor de peliculas delgadas. Expired - Lifetime ES2047108T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8802920A NL8802920A (nl) 1988-11-28 1988-11-28 Laagdiktemeter.

Publications (1)

Publication Number Publication Date
ES2047108T3 true ES2047108T3 (es) 1994-02-16

Family

ID=19853294

Family Applications (1)

Application Number Title Priority Date Filing Date
ES89202969T Expired - Lifetime ES2047108T3 (es) 1988-11-28 1989-11-23 Metodo para medir el espesor de peliculas delgadas.

Country Status (11)

Country Link
US (1) US5170049A (es)
EP (1) EP0371550B1 (es)
JP (1) JPH0678892B2 (es)
AT (1) ATE99046T1 (es)
AU (1) AU629265B2 (es)
CA (1) CA2003983C (es)
DE (1) DE68911659T2 (es)
ES (1) ES2047108T3 (es)
MX (1) MX172398B (es)
NL (1) NL8802920A (es)
TR (1) TR26149A (es)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5243185A (en) * 1992-07-31 1993-09-07 Loral Aerospace Corp. Apparatus and method for ice detection
ES2076083B1 (es) * 1993-06-04 1996-06-01 Fuesca Sl Aparato y metodo de medida y control de la densidad de reticulacion de los tratamientos en caliente y frio del vidrio aligerado.
US5650610A (en) * 1995-03-15 1997-07-22 National Research Council Of Canada Apparatus and method for remote detection of ice or other birefringent material on a surface
CN1131741A (zh) * 1995-03-22 1996-09-25 载歌公司 光学间隙测量装置和方法
US5557399A (en) * 1995-03-22 1996-09-17 Zygo Corporation Optical gap measuring apparatus and method
US5953125A (en) * 1995-09-01 1999-09-14 Zygo Corporation Optical gap measuring apparatus and method
US6483580B1 (en) 1998-03-06 2002-11-19 Kla-Tencor Technologies Corporation Spectroscopic scatterometer system
JP3893868B2 (ja) * 2000-10-11 2007-03-14 東京エレクトロン株式会社 電界効果トランジスタの製造方法、並びに、半導体デバイスの製造方法及びその装置
US6908774B2 (en) * 2002-08-12 2005-06-21 S.O. I. Tec Silicon On Insulator Technologies S.A. Method and apparatus for adjusting the thickness of a thin layer of semiconductor material
EP1619465A1 (en) * 2004-07-19 2006-01-25 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Optical monitoring apparatus and method of monitoring optical coatings
US7515253B2 (en) * 2005-01-12 2009-04-07 Kla-Tencor Technologies Corporation System for measuring a sample with a layer containing a periodic diffracting structure
US7370525B1 (en) 2006-10-31 2008-05-13 Swan International Sensors Pty. Ltd. Inflight ice detection system
AT504136B1 (de) * 2006-12-29 2008-03-15 Univ Linz Verfahren zur bestimmung der dicke einer metallisierungsschicht auf einer polymerfolie
CN100470193C (zh) * 2007-06-08 2009-03-18 中国科学院上海光学精密机械研究所 石英波片厚度的测量装置和测量方法
US20090002686A1 (en) * 2007-06-29 2009-01-01 The Material Works, Ltd. Sheet Metal Oxide Detector
DE102008021199A1 (de) * 2008-04-28 2009-10-29 Focke & Co.(Gmbh & Co. Kg) Verfahren und Vorrichtung zum Prüfen von mit Folie umwickelten Zigarettenpackungen
JP2012032239A (ja) * 2010-07-29 2012-02-16 Horiba Ltd 試料検査装置及び試料検査方法
ES2808550T3 (es) * 2013-03-15 2021-03-01 Sensory Analytics Método y sistema para la medición en tiempo real durante el proceso del espesor de recubrimiento
JP6355066B2 (ja) * 2013-08-29 2018-07-11 株式会社リコー センサ装置及び画像形成装置
WO2019101803A1 (en) * 2017-11-24 2019-05-31 Abb Schweiz Ag System and method for characterizing a coating such as a paint film by radiation, and painting facility with such a system
CN113155040B (zh) * 2021-03-04 2023-02-28 上海精测半导体技术有限公司 一种探测反射光束角度变化的装置、方法及膜厚测量装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3426201A (en) * 1965-10-12 1969-02-04 Texas Instruments Inc Method and apparatus for measuring the thickness of films by means of elliptical polarization of reflected infrared radiation
US3906844A (en) * 1974-05-28 1975-09-23 Int Envelope Limited Method and apparatus for producing envelopes having a closure flap
US3908508A (en) * 1974-09-23 1975-09-30 Modulus Corp Strain indicator
JPS51129279A (en) * 1975-05-02 1976-11-10 Nippon Kogaku Kk <Nikon> Polarizing analyzer
US4585348A (en) * 1981-09-28 1986-04-29 International Business Machines Corporation Ultra-fast photometric instrument
EP0075689A1 (en) * 1981-09-28 1983-04-06 International Business Machines Corporation Optical instruments for viewing a sample surface
US4850711A (en) * 1986-06-13 1989-07-25 Nippon Kokan Kabushiki Kaisha Film thickness-measuring apparatus using linearly polarized light

Also Published As

Publication number Publication date
AU4563689A (en) 1990-05-31
ATE99046T1 (de) 1994-01-15
JPH0678892B2 (ja) 1994-10-05
TR26149A (tr) 1994-01-14
US5170049A (en) 1992-12-08
EP0371550A1 (en) 1990-06-06
NL8802920A (nl) 1990-06-18
EP0371550B1 (en) 1993-12-22
CA2003983C (en) 1993-12-14
DE68911659D1 (de) 1994-02-03
AU629265B2 (en) 1992-10-01
DE68911659T2 (de) 1994-05-05
MX172398B (es) 1993-12-15
CA2003983A1 (en) 1990-05-28
JPH02263105A (ja) 1990-10-25

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