JPS5587004A - Surface-property measuring method - Google Patents
Surface-property measuring methodInfo
- Publication number
- JPS5587004A JPS5587004A JP16363678A JP16363678A JPS5587004A JP S5587004 A JPS5587004 A JP S5587004A JP 16363678 A JP16363678 A JP 16363678A JP 16363678 A JP16363678 A JP 16363678A JP S5587004 A JPS5587004 A JP S5587004A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- reflected
- light
- bcc
- measured surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To measure surface roughness and surface cracks by a simple constitution, by providing a laser light source irradiating a measured surface with spot light and a screen which detects light diffracted after being reflected by measured surface.
CONSTITUTION: From a proper direction within plane ABB'A' crossing measured surface BCC'B' at right angles, spot light emitted by a laser light source and this light is reflected by measured surface BCC'B' and dispersed on plane ABB'A'. Since streaks formed on measured surface BCC'B' during work operate as a diffraction grating, the direction of reflected light dispersing by diffracting crosses that of work streaks K at right angles. By using the pattern of the reflected light, surface properties such as the surface roughness, surface cracks, surface curvature, flatness, etc., of the measured surface can be measured.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16363678A JPS5587004A (en) | 1978-12-25 | 1978-12-25 | Surface-property measuring method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16363678A JPS5587004A (en) | 1978-12-25 | 1978-12-25 | Surface-property measuring method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5587004A true JPS5587004A (en) | 1980-07-01 |
Family
ID=15777692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16363678A Pending JPS5587004A (en) | 1978-12-25 | 1978-12-25 | Surface-property measuring method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5587004A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6058536A (en) * | 1983-09-12 | 1985-04-04 | Kawasaki Steel Corp | Method and apparatus for checking property of cut and machined surface |
CN104897078A (en) * | 2015-05-19 | 2015-09-09 | 哈尔滨工业大学 | Measuring method based on visible light reflection spectrum characteristics for ultra-precise lathe machining surface three-dimensional microstructure |
CN105004286A (en) * | 2015-05-19 | 2015-10-28 | 哈尔滨工业大学 | Ultraprecise turning processing surface three-dimensional microscopic morphology measurement method based on laser beam diffraction spot characteristic |
CN105180825A (en) * | 2015-05-19 | 2015-12-23 | 哈尔滨工业大学 | 3D microscopic appearance measuring device of ultra-precise turning surface based on characteristic of visible-light reflection spectrum |
JP2016175147A (en) * | 2015-03-20 | 2016-10-06 | シチズンホールディングス株式会社 | Surface processing device |
JP2017220480A (en) * | 2016-06-03 | 2017-12-14 | 株式会社ディスコ | Inspection method of workpiece, inspection apparatus, laser processing apparatus, and expansion device |
-
1978
- 1978-12-25 JP JP16363678A patent/JPS5587004A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6058536A (en) * | 1983-09-12 | 1985-04-04 | Kawasaki Steel Corp | Method and apparatus for checking property of cut and machined surface |
JP2016175147A (en) * | 2015-03-20 | 2016-10-06 | シチズンホールディングス株式会社 | Surface processing device |
CN104897078A (en) * | 2015-05-19 | 2015-09-09 | 哈尔滨工业大学 | Measuring method based on visible light reflection spectrum characteristics for ultra-precise lathe machining surface three-dimensional microstructure |
CN105004286A (en) * | 2015-05-19 | 2015-10-28 | 哈尔滨工业大学 | Ultraprecise turning processing surface three-dimensional microscopic morphology measurement method based on laser beam diffraction spot characteristic |
CN105180825A (en) * | 2015-05-19 | 2015-12-23 | 哈尔滨工业大学 | 3D microscopic appearance measuring device of ultra-precise turning surface based on characteristic of visible-light reflection spectrum |
JP2017220480A (en) * | 2016-06-03 | 2017-12-14 | 株式会社ディスコ | Inspection method of workpiece, inspection apparatus, laser processing apparatus, and expansion device |
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