JPS5587004A - Surface-property measuring method - Google Patents

Surface-property measuring method

Info

Publication number
JPS5587004A
JPS5587004A JP16363678A JP16363678A JPS5587004A JP S5587004 A JPS5587004 A JP S5587004A JP 16363678 A JP16363678 A JP 16363678A JP 16363678 A JP16363678 A JP 16363678A JP S5587004 A JPS5587004 A JP S5587004A
Authority
JP
Japan
Prior art keywords
measured
reflected
light
bcc
measured surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16363678A
Other languages
Japanese (ja)
Inventor
Mamoru Kawahara
Hisao Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Zosen Corp
Original Assignee
Hitachi Zosen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Zosen Corp filed Critical Hitachi Zosen Corp
Priority to JP16363678A priority Critical patent/JPS5587004A/en
Publication of JPS5587004A publication Critical patent/JPS5587004A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To measure surface roughness and surface cracks by a simple constitution, by providing a laser light source irradiating a measured surface with spot light and a screen which detects light diffracted after being reflected by measured surface.
CONSTITUTION: From a proper direction within plane ABB'A' crossing measured surface BCC'B' at right angles, spot light emitted by a laser light source and this light is reflected by measured surface BCC'B' and dispersed on plane ABB'A'. Since streaks formed on measured surface BCC'B' during work operate as a diffraction grating, the direction of reflected light dispersing by diffracting crosses that of work streaks K at right angles. By using the pattern of the reflected light, surface properties such as the surface roughness, surface cracks, surface curvature, flatness, etc., of the measured surface can be measured.
COPYRIGHT: (C)1980,JPO&Japio
JP16363678A 1978-12-25 1978-12-25 Surface-property measuring method Pending JPS5587004A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16363678A JPS5587004A (en) 1978-12-25 1978-12-25 Surface-property measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16363678A JPS5587004A (en) 1978-12-25 1978-12-25 Surface-property measuring method

Publications (1)

Publication Number Publication Date
JPS5587004A true JPS5587004A (en) 1980-07-01

Family

ID=15777692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16363678A Pending JPS5587004A (en) 1978-12-25 1978-12-25 Surface-property measuring method

Country Status (1)

Country Link
JP (1) JPS5587004A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6058536A (en) * 1983-09-12 1985-04-04 Kawasaki Steel Corp Method and apparatus for checking property of cut and machined surface
CN104897078A (en) * 2015-05-19 2015-09-09 哈尔滨工业大学 Measuring method based on visible light reflection spectrum characteristics for ultra-precise lathe machining surface three-dimensional microstructure
CN105004286A (en) * 2015-05-19 2015-10-28 哈尔滨工业大学 Ultraprecise turning processing surface three-dimensional microscopic morphology measurement method based on laser beam diffraction spot characteristic
CN105180825A (en) * 2015-05-19 2015-12-23 哈尔滨工业大学 3D microscopic appearance measuring device of ultra-precise turning surface based on characteristic of visible-light reflection spectrum
JP2016175147A (en) * 2015-03-20 2016-10-06 シチズンホールディングス株式会社 Surface processing device
JP2017220480A (en) * 2016-06-03 2017-12-14 株式会社ディスコ Inspection method of workpiece, inspection apparatus, laser processing apparatus, and expansion device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6058536A (en) * 1983-09-12 1985-04-04 Kawasaki Steel Corp Method and apparatus for checking property of cut and machined surface
JP2016175147A (en) * 2015-03-20 2016-10-06 シチズンホールディングス株式会社 Surface processing device
CN104897078A (en) * 2015-05-19 2015-09-09 哈尔滨工业大学 Measuring method based on visible light reflection spectrum characteristics for ultra-precise lathe machining surface three-dimensional microstructure
CN105004286A (en) * 2015-05-19 2015-10-28 哈尔滨工业大学 Ultraprecise turning processing surface three-dimensional microscopic morphology measurement method based on laser beam diffraction spot characteristic
CN105180825A (en) * 2015-05-19 2015-12-23 哈尔滨工业大学 3D microscopic appearance measuring device of ultra-precise turning surface based on characteristic of visible-light reflection spectrum
JP2017220480A (en) * 2016-06-03 2017-12-14 株式会社ディスコ Inspection method of workpiece, inspection apparatus, laser processing apparatus, and expansion device

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