JPS5414789A - Surface inspecting apparatus - Google Patents

Surface inspecting apparatus

Info

Publication number
JPS5414789A
JPS5414789A JP8063477A JP8063477A JPS5414789A JP S5414789 A JPS5414789 A JP S5414789A JP 8063477 A JP8063477 A JP 8063477A JP 8063477 A JP8063477 A JP 8063477A JP S5414789 A JPS5414789 A JP S5414789A
Authority
JP
Japan
Prior art keywords
inspecting apparatus
surface inspecting
light
judging
comparing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8063477A
Other languages
Japanese (ja)
Inventor
Mitsuhito Kamei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8063477A priority Critical patent/JPS5414789A/en
Publication of JPS5414789A publication Critical patent/JPS5414789A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/002—Recording, reproducing or erasing systems characterised by the shape or form of the carrier
    • G11B7/0037—Recording, reproducing or erasing systems characterised by the shape or form of the carrier with discs
    • G11B7/00375—Recording, reproducing or erasing systems characterised by the shape or form of the carrier with discs arrangements for detection of physical defects, e.g. of recording layer

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

PURPOSE:To make possible detecting defects on surface by radiating coherent light such as gas laser light to the groove face on a record disc surface and comparing and judging the shape of the diffraction patterns obtained as reflected light.
JP8063477A 1977-07-05 1977-07-05 Surface inspecting apparatus Pending JPS5414789A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8063477A JPS5414789A (en) 1977-07-05 1977-07-05 Surface inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8063477A JPS5414789A (en) 1977-07-05 1977-07-05 Surface inspecting apparatus

Publications (1)

Publication Number Publication Date
JPS5414789A true JPS5414789A (en) 1979-02-03

Family

ID=13723786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8063477A Pending JPS5414789A (en) 1977-07-05 1977-07-05 Surface inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS5414789A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5794903A (en) * 1980-12-05 1982-06-12 Hitachi Ltd Defect detector for disk surface
JPS5872039A (en) * 1981-10-27 1983-04-28 Mitsubishi Rayon Co Ltd Measuring decive for deterioration of covering material for wire rod
JPS59157544A (en) * 1983-02-28 1984-09-06 Nok Corp Surface defect inspecting method
JPS6089735A (en) * 1983-04-22 1985-05-20 エルヴイ−ン　ズイツク　ゲ−エムベ−ハ−　オブテツク−エレクトロニ−ク Detector for defect of flat article
JPS60166809A (en) * 1984-02-10 1985-08-30 Toshiba Corp Defect inspecting device
JPH02184708A (en) * 1989-01-12 1990-07-19 Toshiba Corp Inspection device for circular surface
JP2002148207A (en) * 2000-11-14 2002-05-22 Fuji Electric Co Ltd Apparatus for inspecting surface defect of magnetic storage medium of discrete track system

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5794903A (en) * 1980-12-05 1982-06-12 Hitachi Ltd Defect detector for disk surface
JPH0120483B2 (en) * 1980-12-05 1989-04-17 Hitachi Ltd
JPS5872039A (en) * 1981-10-27 1983-04-28 Mitsubishi Rayon Co Ltd Measuring decive for deterioration of covering material for wire rod
JPS59157544A (en) * 1983-02-28 1984-09-06 Nok Corp Surface defect inspecting method
JPS6089735A (en) * 1983-04-22 1985-05-20 エルヴイ−ン　ズイツク　ゲ−エムベ−ハ−　オブテツク−エレクトロニ−ク Detector for defect of flat article
JPH064655U (en) * 1983-04-22 1994-01-21 エルヴィーン ズイック ゲーエムベーハー オプテック−エレクトロニーク Defect detection device for flat articles
JPS60166809A (en) * 1984-02-10 1985-08-30 Toshiba Corp Defect inspecting device
JPH047808B2 (en) * 1984-02-10 1992-02-13 Tokyo Shibaura Electric Co
JPH02184708A (en) * 1989-01-12 1990-07-19 Toshiba Corp Inspection device for circular surface
JP2002148207A (en) * 2000-11-14 2002-05-22 Fuji Electric Co Ltd Apparatus for inspecting surface defect of magnetic storage medium of discrete track system

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