SU1168800A1 - ДВУХСТУПЕНЧАТЫЙ ИНТЕРФЕРОМЕТР, предназначенный, в частности - Google Patents

ДВУХСТУПЕНЧАТЫЙ ИНТЕРФЕРОМЕТР, предназначенный, в частности Download PDF

Info

Publication number
SU1168800A1
SU1168800A1 SU817771750A SU7771750A SU1168800A1 SU 1168800 A1 SU1168800 A1 SU 1168800A1 SU 817771750 A SU817771750 A SU 817771750A SU 7771750 A SU7771750 A SU 7771750A SU 1168800 A1 SU1168800 A1 SU 1168800A1
Authority
SU
USSR - Soviet Union
Prior art keywords
interference
plane
light beam
measuring
faces
Prior art date
Application number
SU817771750A
Other languages
English (en)
Russian (ru)
Inventor
Bekhshtejn Karl-Khejnts
Original Assignee
Zeiss Jena Veb Carl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Jena Veb Carl filed Critical Zeiss Jena Veb Carl
Application granted granted Critical
Publication of SU1168800A1 publication Critical patent/SU1168800A1/ru

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
SU817771750A 1980-06-30 1981-04-14 ДВУХСТУПЕНЧАТЫЙ ИНТЕРФЕРОМЕТР, предназначенный, в частности SU1168800A1 (ru)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD80222233A DD158187A3 (de) 1980-06-30 1980-06-30 Zweistufeninterferometer

Publications (1)

Publication Number Publication Date
SU1168800A1 true SU1168800A1 (ru) 1985-07-23

Family

ID=5525028

Family Applications (1)

Application Number Title Priority Date Filing Date
SU817771750A SU1168800A1 (ru) 1980-06-30 1981-04-14 ДВУХСТУПЕНЧАТЫЙ ИНТЕРФЕРОМЕТР, предназначенный, в частности

Country Status (6)

Country Link
JP (1) JPS5714703A (de)
DD (1) DD158187A3 (de)
DE (1) DE3112633A1 (de)
FR (1) FR2485718A1 (de)
GB (1) GB2079000B (de)
SU (1) SU1168800A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD209263A1 (de) * 1982-09-01 1984-04-25 Univ Ernst Moritz Arndt Interferometrische anordnung zur optoelektrischen distanzmessung
EP0611438B1 (de) * 1991-11-08 1996-07-03 British Technology Group Ltd Optische Messgeräte
FR2712691B1 (fr) * 1993-11-19 1995-12-22 Bernard Fondeur Dispositif de mesure par interférométrie laser.
DE19613303C3 (de) * 1996-04-03 2002-07-04 Zeiss Carl Jena Gmbh Verfahren und Einrichtung zur absoluten Distanzmessung
JP4910838B2 (ja) * 2007-03-30 2012-04-04 サクサ株式会社 筺体の開閉検知構造

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD111993A1 (de) * 1974-05-13 1975-03-12

Also Published As

Publication number Publication date
FR2485718B1 (de) 1985-03-29
FR2485718A1 (fr) 1981-12-31
GB2079000B (en) 1984-03-07
DD158187A3 (de) 1983-01-05
JPS5714703A (en) 1982-01-26
GB2079000A (en) 1982-01-13
DE3112633A1 (de) 1982-04-15

Similar Documents

Publication Publication Date Title
US6806960B2 (en) Compact beam re-tracing optics to eliminate beam walk-off in an interferometer
US5715057A (en) Reference interferometer with variable wavelength and folded measurement beam path
US4436424A (en) Interferometer using transverse deviation of test beam
JP2000249513A (ja) ビームスプリッタ構造群及びビームスプリッタ構造群を備えた干渉計
US7212290B2 (en) Differential interferometers creating desired beam patterns
SU1168800A1 (ru) ДВУХСТУПЕНЧАТЫЙ ИНТЕРФЕРОМЕТР, предназначенный, в частности
JP2001507117A (ja) 複数の平行ビームを生じるレーザビームスプリッタ
SU1152533A3 (ru) Сканирующий интерферометр (его варианты)
US20080225262A1 (en) Displacement Measurement System
EP0333783B1 (de) Interferometersystem für geradheitsmessung
RU2554599C1 (ru) Углоизмерительный прибор
CA1210608A (en) Interferometer spectrophotometer
JPH0463305A (ja) 偏光ビームスプリッタ及びレーザ干渉測長計
JP3004631B1 (ja) レーザー干渉計
SU1099097A1 (ru) Сканирующий интерферометр
JPS59136604A (ja) 多重光路レ−ザ−干渉計
SU1518663A1 (ru) Интерферометр дл измерени поперечных перемещений
US7009708B1 (en) Symmetric periscope for concentric beam configuration in an ultra-high precision laser interferometric beam launcher
SU1587327A1 (ru) Интерферометр
US4023906A (en) Compact three-beam interferometer
SU1288498A1 (ru) Интерферометр
RU2662504C1 (ru) Устройство коллинеарного переноса осей оптического излучения
SU921305A1 (ru) Интерферометр дл измерени рассто ний
SU1026106A1 (ru) Оптическое разделительно-смесительное устройство
SU1132147A1 (ru) Лазерный интерферометр перемещений