SU1163765A1 - METHOD OF MANUFACTURING OMIC CONTACTS - Google Patents
METHOD OF MANUFACTURING OMIC CONTACTSInfo
- Publication number
- SU1163765A1 SU1163765A1 SU3687766/25A SU3687766A SU1163765A1 SU 1163765 A1 SU1163765 A1 SU 1163765A1 SU 3687766/25 A SU3687766/25 A SU 3687766/25A SU 3687766 A SU3687766 A SU 3687766A SU 1163765 A1 SU1163765 A1 SU 1163765A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- contacts
- omic
- manufacturing
- applying
- barrier layer
- Prior art date
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
Способ изготовления омических контактов, включающий легирование кремниевой подложки для создания мелкозалегающего p-n-перехода, нанесение барьерного слоя переходного металла, облучение его потоком ионов, нанесение токопроводящего слоя, термообработку в вакууме при температуре 673-1073 K, отличающийся тем, что, с целью расширения технологических возможностей, легирование кремния проводят до получения поверхностной концентрации 8·10- 8·10м, а в качестве барьерного слоя используют пленку тантала или вольфрама.A method of making ohmic contacts, including doping a silicon substrate to create a shallow pn junction, applying a transition metal barrier layer, irradiating it with an ion flow, applying a conductive layer, heat treatment in vacuum at 673-1073 K, characterized in that possibilities, the doping of silicon is carried out to obtain a surface concentration of 8 · 10-8 · 10m, and a film of tantalum or tungsten is used as a barrier layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU3687766/25A SU1163765A1 (en) | 1984-01-05 | 1984-01-05 | METHOD OF MANUFACTURING OMIC CONTACTS |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU3687766/25A SU1163765A1 (en) | 1984-01-05 | 1984-01-05 | METHOD OF MANUFACTURING OMIC CONTACTS |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU1163765A1 true SU1163765A1 (en) | 2012-06-20 |
Family
ID=60540410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU3687766/25A SU1163765A1 (en) | 1984-01-05 | 1984-01-05 | METHOD OF MANUFACTURING OMIC CONTACTS |
Country Status (1)
| Country | Link |
|---|---|
| SU (1) | SU1163765A1 (en) |
-
1984
- 1984-01-05 SU SU3687766/25A patent/SU1163765A1/en active
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