SG74719A1 - Separation of cf4 and c2f6 from a perfluorocompound mixture - Google Patents
Separation of cf4 and c2f6 from a perfluorocompound mixtureInfo
- Publication number
- SG74719A1 SG74719A1 SG1999001828A SG1999001828A SG74719A1 SG 74719 A1 SG74719 A1 SG 74719A1 SG 1999001828 A SG1999001828 A SG 1999001828A SG 1999001828 A SG1999001828 A SG 1999001828A SG 74719 A1 SG74719 A1 SG 74719A1
- Authority
- SG
- Singapore
- Prior art keywords
- perfluorocompound
- separation
- mixture
- perfluorocompound mixture
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
- B01D53/229—Integrated processes (Diffusion and at least one other process, e.g. adsorption, absorption)
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C17/00—Preparation of halogenated hydrocarbons
- C07C17/38—Separation; Purification; Stabilisation; Use of additives
- C07C17/389—Separation; Purification; Stabilisation; Use of additives by adsorption on solids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
- B01D2257/2066—Fluorine
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/151—Reduction of greenhouse gas [GHG] emissions, e.g. CO2
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/151—Reduction of greenhouse gas [GHG] emissions, e.g. CO2
- Y02P20/155—Perfluorocarbons [PFC]; Hydrofluorocarbons [HFC]; Hydrochlorofluorocarbons [HCFC]; Chlorofluorocarbons [CFC]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Separation Of Gases By Adsorption (AREA)
- Drying Of Semiconductors (AREA)
- Treating Waste Gases (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/061,977 US6187077B1 (en) | 1998-04-17 | 1998-04-17 | Separation of CF4 and C2F6 from a perfluorocompound mixture |
Publications (1)
Publication Number | Publication Date |
---|---|
SG74719A1 true SG74719A1 (en) | 2000-08-22 |
Family
ID=22039437
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG1999001828A SG74719A1 (en) | 1998-04-17 | 1999-04-09 | Separation of cf4 and c2f6 from a perfluorocompound mixture |
Country Status (7)
Country | Link |
---|---|
US (1) | US6187077B1 (ja) |
EP (1) | EP0950430A1 (ja) |
JP (1) | JPH11319465A (ja) |
KR (1) | KR19990083235A (ja) |
CN (1) | CN1235147A (ja) |
SG (1) | SG74719A1 (ja) |
TW (1) | TW409066B (ja) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6458249B2 (en) * | 1997-11-10 | 2002-10-01 | E. I. Du Pont De Nemours And Company | Process for purifying perfluorinated products |
DE19923155A1 (de) * | 1999-05-20 | 2000-11-23 | Solvay Fluor & Derivate | SF¶6¶-Abtrennung aus Isoliergasen aus gasisolierten Leitungen |
JP2002035527A (ja) * | 2000-07-26 | 2002-02-05 | Japan Atom Energy Res Inst | ガス分離装置 |
JP2002035528A (ja) * | 2000-07-26 | 2002-02-05 | Japan Atom Energy Res Inst | ガス分離装置 |
JP2002147948A (ja) * | 2000-11-10 | 2002-05-22 | Japan Organo Co Ltd | ガス分離装置及びガス分離方法 |
KR100516683B1 (ko) * | 2001-01-15 | 2005-09-22 | 쇼와 덴코 가부시키가이샤 | 옥타플루오로프로판의 정제방법, 그 제조방법, 및 그것의 용도 |
US6544319B1 (en) * | 2002-01-16 | 2003-04-08 | Air Products And Chemicals, Inc. | Purification of hexafluoro-1,3-butadiene |
DE10233898A1 (de) * | 2002-07-25 | 2004-02-12 | Solvay Fluor Und Derivate Gmbh | Verfahren zur Auftrennung von Gasgemischen |
US6669760B1 (en) | 2003-04-08 | 2003-12-30 | Air Products And Chemicals, Inc. | Separation of C2F6 from CF4 by adsorption on activated carbon |
JP2005046746A (ja) * | 2003-07-29 | 2005-02-24 | Japan Organo Co Ltd | ガス分離装置 |
US20050096490A1 (en) * | 2003-10-29 | 2005-05-05 | Henderson Philip B. | Purification of perfluoromethane |
KR100577952B1 (ko) * | 2004-07-08 | 2006-05-10 | 주식회사 효성 | 알칼리 토금속으로 이온교환 및 함침된 제올라이트 4a를 이용한 삼불화질소 가스의 정제방법 |
ES2392981T3 (es) | 2004-07-08 | 2012-12-17 | Hyosung Corporation | Procedimiento para refinar gas de trifluoruro de nitrógeno usando zeolita intercambiada iónicamente con un metal alcalinotérreo |
US7637986B2 (en) * | 2004-07-08 | 2009-12-29 | Hyosung Corporation | Process for refining nitrogen trifluoride gas using alkali earth metal exchanged and impregnated zeolite |
KR100577962B1 (ko) * | 2004-07-08 | 2006-05-10 | 주식회사 효성 | 알칼리 토금속으로 이온교환 및/또는 함침된 제올라이트a의 혼합물을 이용한 삼불화질소 가스의 정제방법 |
EP1894611B1 (en) * | 2005-06-24 | 2017-05-03 | Taiyo Nippon Sanso Corporation | Method for gas purification |
KR100719371B1 (ko) * | 2005-08-03 | 2007-05-17 | 삼성전자주식회사 | 퍼플루오르화 화합물을 재생하는 흡착 설비 및 방법 |
RU2505345C2 (ru) * | 2008-07-04 | 2014-01-27 | Дзе Саут Эфрикен Нюклеа Энерджи Корпорейшн Лимитед | Способ выделения газообразного компонента из смеси газообразных соединений |
US9216364B2 (en) * | 2013-03-15 | 2015-12-22 | Air Products And Chemicals, Inc. | Onsite ultra high purity chemicals or gas purification |
CN105327676A (zh) * | 2014-08-11 | 2016-02-17 | 浙江蓝天环保高科技股份有限公司 | 一种改性的吸附剂及其在超高纯六氟乙烷制备中的应用 |
CN105363407B (zh) * | 2014-08-11 | 2018-02-02 | 浙江蓝天环保高科技股份有限公司 | 一种改性的吸附剂及其在超高纯一氟甲烷制备中的应用 |
CN104150449B (zh) * | 2014-08-18 | 2016-03-30 | 国家电网公司 | 混合绝缘气体中sf6和cf4的净化处理方法 |
KR101676099B1 (ko) * | 2014-09-24 | 2016-11-15 | 오씨아이 주식회사 | Nf3 가스 분리농축 방법, 장치 및 시스템 |
KR20170079234A (ko) * | 2015-12-30 | 2017-07-10 | 상명대학교산학협력단 | 질산염을 포함하는 sf6 분리용 고분자 전해질 분리막 |
CN110526834B (zh) * | 2019-09-20 | 2022-05-20 | 泉州宇极新材料科技有限公司 | 一种制备高纯度全氟异丁腈的方法 |
CN114288812A (zh) * | 2021-11-30 | 2022-04-08 | 浙江大学 | 一种分离含氟电子特气的方法 |
Family Cites Families (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2947687A (en) | 1954-10-29 | 1960-08-02 | American Oil Co | Separation of hydrocarbons by permeation membrane |
US2953502A (en) | 1955-05-24 | 1960-09-20 | American Oil Co | Separation of azeotropic mixtures |
US2960462A (en) | 1957-09-30 | 1960-11-15 | American Oil Co | Dual film combinations for membrane permeation |
US2970106A (en) | 1958-01-31 | 1961-01-31 | American Oil Co | Aromatic separation process |
US3508994A (en) | 1966-07-07 | 1970-04-28 | Dorr Oliver Inc | Method for producing membrane separation devices |
US3648845A (en) | 1969-09-02 | 1972-03-14 | Us Interior | Thin film separation membranes and processes for making same |
US3675392A (en) * | 1970-01-30 | 1972-07-11 | Ite Imperial Corp | Adsorption-desorption method for purifying sf{11 |
US3616607A (en) | 1970-04-06 | 1971-11-02 | Northern Natural Gas Co | Separation of nitrogen and methane containing gas mixtures |
DE2248818C2 (de) | 1972-10-05 | 1981-10-15 | Bayer Ag, 5090 Leverkusen | Dünne porenfreie Polycarbonatfolien und -filme |
US4113628A (en) | 1974-06-05 | 1978-09-12 | E. I. Du Pont De Nemours And Company | Asymmetric polyimide membranes |
US4192824A (en) | 1976-09-23 | 1980-03-11 | Coal Industry (Patents) Limited | Aromatic hydrocarbon resins |
US4132824A (en) | 1977-07-21 | 1979-01-02 | General Electric Company | Method for casting ultrathin methylpentene polymer membranes |
US4156597A (en) | 1977-09-23 | 1979-05-29 | General Electric Company | Ultrathin polyetherimide membrane and gas separation process |
US4155793A (en) | 1977-11-21 | 1979-05-22 | General Electric Company | Continuous preparation of ultrathin polymeric membrane laminates |
DE3062739D1 (en) | 1979-07-26 | 1983-05-19 | Ube Industries | Process for preparing aromatic polyimide semipermeable membranes |
JPS57167414A (en) | 1981-04-03 | 1982-10-15 | Ube Ind Ltd | Production of polyimide hollow fiber |
JPS57170936A (en) | 1981-04-14 | 1982-10-21 | Ube Ind Ltd | Preparation of porous polyimide film |
GB2101137B (en) | 1981-04-14 | 1984-09-26 | Ube Industries | Producing porous aromatic imide polymer membranes |
JPS57209607A (en) | 1981-06-22 | 1982-12-23 | Ube Ind Ltd | Preparation of polyimide separation film |
JPS5895541A (ja) | 1981-11-30 | 1983-06-07 | Mitsubishi Chem Ind Ltd | 気体分離膜 |
JPS59160506A (ja) | 1983-02-28 | 1984-09-11 | Kuraray Co Ltd | 複合中空糸分離膜およびその製造法 |
JPS6135803A (ja) | 1984-07-26 | 1986-02-20 | Shin Etsu Chem Co Ltd | 複合中空糸 |
US4602922A (en) | 1984-11-09 | 1986-07-29 | Research Foundation Of State University Of New York | Method of making membranes for gas separation and the composite membranes |
US4741829A (en) | 1985-06-27 | 1988-05-03 | Mitsubishi Rayon Co., Ltd. | Composite hollow fibers and method of making same |
JPS621404A (ja) | 1985-06-27 | 1987-01-07 | Mitsubishi Rayon Co Ltd | 多層複合中空繊維状膜及びその製造法 |
US4717394A (en) | 1986-10-27 | 1988-01-05 | E. I. Du Pont De Nemours And Company | Polyimide gas separation membranes |
US4701187A (en) | 1986-11-03 | 1987-10-20 | Air Products And Chemicals, Inc. | Process for separating components of a gas stream |
US4756932A (en) | 1987-06-11 | 1988-07-12 | Air Products And Chemicals, Inc. | Process for making highly permeable coated composite hollow fiber membranes |
US4826599A (en) | 1987-07-10 | 1989-05-02 | Union Carbide Corporation | Composite membranes and their manufacture and use |
JP2745768B2 (ja) | 1990-03-31 | 1998-04-28 | 宇部興産株式会社 | 非対称性分離膜及び浸透気化分離法 |
US5085676A (en) | 1990-12-04 | 1992-02-04 | E. I. Du Pont De Nemours And Company | Novel multicomponent fluid separation membranes |
JP2874741B2 (ja) | 1993-03-02 | 1999-03-24 | 宇部興産株式会社 | 非対称性中空糸ポリイミド気体分離膜 |
US5332424A (en) * | 1993-07-28 | 1994-07-26 | Air Products And Chemicals, Inc. | Hydrocarbon fractionation by adsorbent membranes |
US5417742A (en) * | 1993-12-03 | 1995-05-23 | The Boc Group, Inc. | Removal of perfluorocarbons from gas streams |
US5785741A (en) * | 1995-07-17 | 1998-07-28 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude | Process and system for separation and recovery of perfluorocompound gases |
US5858065A (en) * | 1995-07-17 | 1999-01-12 | American Air Liquide | Process and system for separation and recovery of perfluorocompound gases |
US5759237A (en) * | 1996-06-14 | 1998-06-02 | L'air Liquide Societe Anonyme Pour L'etude Et, L'exploitation Des Procedes Georges Claude | Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases |
US5730779A (en) | 1996-10-31 | 1998-03-24 | Air Products And Chemicals, Inc. | Fluorochemical recovery and recycle using membranes |
US5720797A (en) * | 1996-12-18 | 1998-02-24 | Alliedsignal Inc. | Process for recovering sulfur hexafluoride |
US5814127A (en) * | 1996-12-23 | 1998-09-29 | American Air Liquide Inc. | Process for recovering CF4 and C2 F6 from a gas |
US5779763A (en) * | 1997-03-07 | 1998-07-14 | Membrane Technology And Research, Inc. | Process for recovering semiconductor industry cleaning compounds |
US5855647A (en) * | 1997-05-15 | 1999-01-05 | American Air Liquide, Inc. | Process for recovering SF6 from a gas |
US5843208A (en) * | 1997-07-24 | 1998-12-01 | Alliedsignal Inc. | Process for recovering sulfur hexafluoride |
-
1998
- 1998-04-17 US US09/061,977 patent/US6187077B1/en not_active Expired - Fee Related
-
1999
- 1999-03-23 EP EP99400707A patent/EP0950430A1/en not_active Withdrawn
- 1999-04-09 SG SG1999001828A patent/SG74719A1/en unknown
- 1999-04-13 TW TW088105839A patent/TW409066B/zh not_active IP Right Cessation
- 1999-04-16 CN CN99107570A patent/CN1235147A/zh active Pending
- 1999-04-16 JP JP11109169A patent/JPH11319465A/ja active Pending
- 1999-04-16 KR KR1019990013442A patent/KR19990083235A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP0950430A1 (en) | 1999-10-20 |
CN1235147A (zh) | 1999-11-17 |
JPH11319465A (ja) | 1999-11-24 |
KR19990083235A (ko) | 1999-11-25 |
US6187077B1 (en) | 2001-02-13 |
TW409066B (en) | 2000-10-21 |
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