SG183780A1 - Copper cmp composition containing ionic polyelectrolyte and method - Google Patents

Copper cmp composition containing ionic polyelectrolyte and method Download PDF

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Publication number
SG183780A1
SG183780A1 SG2012063707A SG2012063707A SG183780A1 SG 183780 A1 SG183780 A1 SG 183780A1 SG 2012063707 A SG2012063707 A SG 2012063707A SG 2012063707 A SG2012063707 A SG 2012063707A SG 183780 A1 SG183780 A1 SG 183780A1
Authority
SG
Singapore
Prior art keywords
polyelectrolyte
copper
composition
weight
complexing agent
Prior art date
Application number
SG2012063707A
Other languages
English (en)
Inventor
Daniela White
Jason Keleher
John Parker
Original Assignee
Cabot Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Microelectronics Corp filed Critical Cabot Microelectronics Corp
Publication of SG183780A1 publication Critical patent/SG183780A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H10P52/40—Chemomechanical polishing [CMP]
    • H10P52/403—Chemomechanical polishing [CMP] of conductive or resistive materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
SG2012063707A 2007-08-28 2008-08-19 Copper cmp composition containing ionic polyelectrolyte and method SG183780A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/895,896 US20090056231A1 (en) 2007-08-28 2007-08-28 Copper CMP composition containing ionic polyelectrolyte and method

Publications (1)

Publication Number Publication Date
SG183780A1 true SG183780A1 (en) 2012-09-27

Family

ID=40405295

Family Applications (1)

Application Number Title Priority Date Filing Date
SG2012063707A SG183780A1 (en) 2007-08-28 2008-08-19 Copper cmp composition containing ionic polyelectrolyte and method

Country Status (8)

Country Link
US (1) US20090056231A1 (enExample)
EP (1) EP2190947A4 (enExample)
JP (1) JP5960386B2 (enExample)
KR (1) KR101305840B1 (enExample)
CN (1) CN101796160B (enExample)
SG (1) SG183780A1 (enExample)
TW (1) TWI434918B (enExample)
WO (1) WO2009032065A1 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101665661A (zh) * 2008-09-05 2010-03-10 安集微电子科技(上海)有限公司 胺类化合物的应用以及一种化学机械抛光液
US8366959B2 (en) * 2008-09-26 2013-02-05 Rhodia Operations Abrasive compositions for chemical mechanical polishing and methods for using same
US20120186572A1 (en) * 2009-07-28 2012-07-26 Helmuth Treichel Silicon wafer sawing fluid and process for use thereof
JP5774283B2 (ja) * 2010-04-08 2015-09-09 株式会社フジミインコーポレーテッド 研磨用組成物及び研磨方法
CN104093810B (zh) 2012-02-01 2016-01-20 日立化成株式会社 金属用研磨液及研磨方法
US8778212B2 (en) 2012-05-22 2014-07-15 Cabot Microelectronics Corporation CMP composition containing zirconia particles and method of use
US8778211B2 (en) * 2012-07-17 2014-07-15 Cabot Microelectronics Corporation GST CMP slurries
JP2014041978A (ja) * 2012-08-23 2014-03-06 Fujimi Inc 研磨用組成物、研磨用組成物の製造方法、及び研磨用組成物原液の製造方法
US10287457B2 (en) * 2012-11-02 2019-05-14 Lawrence Livermore National Security, Llc Polishing slurry preventing agglomeration of charged colloids without loss of surface activity
CN103865402A (zh) * 2012-12-17 2014-06-18 安集微电子（上海）有限公司 一种化学机械抛光液
US9303187B2 (en) 2013-07-22 2016-04-05 Cabot Microelectronics Corporation Compositions and methods for CMP of silicon oxide, silicon nitride, and polysilicon materials
JP6400897B2 (ja) * 2013-11-06 2018-10-03 ニッタ・ハース株式会社 研磨組成物
US10406652B2 (en) * 2014-03-28 2019-09-10 Fujimi Incorporated Polishing composition and polishing method using the same
US9914852B2 (en) * 2014-08-19 2018-03-13 Fujifilm Planar Solutions, LLC Reduction in large particle counts in polishing slurries
JP6495230B2 (ja) 2016-12-22 2019-04-03 花王株式会社 シリコンウェーハ用リンス剤組成物
KR101874996B1 (ko) * 2016-12-27 2018-07-05 한남대학교 산학협력단 연마효율이 우수한 화학-기계적 연마 슬러리
US10170335B1 (en) * 2017-09-21 2019-01-01 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing method for cobalt
JP7330668B2 (ja) * 2018-03-08 2023-08-22 株式会社フジミインコーポレーテッド 表面処理組成物、表面処理組成物の製造方法、表面処理方法および半導体基板の製造方法
CN108930058B (zh) * 2018-07-06 2020-07-21 鹤山市精工制版有限公司 一种电化学处理液及其应用
JP7041714B2 (ja) * 2019-06-26 2022-03-24 花王株式会社 酸化珪素膜用研磨液組成物
US12234382B2 (en) * 2020-07-28 2025-02-25 Cmc Materials Llc CMP composition including anionic and cationic inhibitors
EP4189026A4 (en) * 2020-07-29 2024-07-31 Versum Materials US, LLC BUFFER-IN-BOTTLE (PIB) TECHNOLOGY FOR CHEMICAL-MECHANICAL PLANARIZATION (CMP) OF COPPER AND THROUGH-SILICON VIA (TSV)

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0852615B1 (en) * 1996-07-25 2005-12-14 DuPont Air Products NanoMaterials L.L.C. Chemical mechanical polishing composition and process
US5958288A (en) * 1996-11-26 1999-09-28 Cabot Corporation Composition and slurry useful for metal CMP
JP2002517593A (ja) * 1998-06-10 2002-06-18 ロデール ホールディングス インコーポレイテッド 金属ｃｍｐにおける研磨用組成物および研磨方法
US6217416B1 (en) * 1998-06-26 2001-04-17 Cabot Microelectronics Corporation Chemical mechanical polishing slurry useful for copper/tantalum substrates
US6348076B1 (en) * 1999-10-08 2002-02-19 International Business Machines Corporation Slurry for mechanical polishing (CMP) of metals and use thereof
US6503418B2 (en) * 1999-11-04 2003-01-07 Advanced Micro Devices, Inc. Ta barrier slurry containing an organic additive
JP4213858B2 (ja) * 2000-02-03 2009-01-21 花王株式会社 研磨液組成物
TW586157B (en) * 2000-04-13 2004-05-01 Showa Denko Kk Slurry composition for polishing semiconductor device, and method for manufacturing semiconductor device using the same
US6733553B2 (en) * 2000-04-13 2004-05-11 Showa Denko Kabushiki Kaisha Abrasive composition for polishing semiconductor device and method for producing semiconductor device using the same
US6964923B1 (en) * 2000-05-24 2005-11-15 International Business Machines Corporation Selective polishing with slurries containing polyelectrolytes
US6568997B2 (en) * 2001-04-05 2003-05-27 Rodel Holdings, Inc. CMP polishing composition for semiconductor devices containing organic polymer particles
US6821897B2 (en) * 2001-12-05 2004-11-23 Cabot Microelectronics Corporation Method for copper CMP using polymeric complexing agents
US6776810B1 (en) * 2002-02-11 2004-08-17 Cabot Microelectronics Corporation Anionic abrasive particles treated with positively charged polyelectrolytes for CMP
JP4076012B2 (ja) * 2002-04-10 2008-04-16 株式会社日本触媒 化学機械研磨用水系分散体
US20040077295A1 (en) * 2002-08-05 2004-04-22 Hellring Stuart D. Process for reducing dishing and erosion during chemical mechanical planarization
US6918820B2 (en) * 2003-04-11 2005-07-19 Eastman Kodak Company Polishing compositions comprising polymeric cores having inorganic surface particles and method of use
US7736405B2 (en) * 2003-05-12 2010-06-15 Advanced Technology Materials, Inc. Chemical mechanical polishing compositions for copper and associated materials and method of using same
JP2006093580A (ja) * 2004-09-27 2006-04-06 Fuji Photo Film Co Ltd 化学的機械的研磨方法
US20060138087A1 (en) * 2004-12-29 2006-06-29 Simka Harsono S Copper containing abrasive particles to modify reactivity and performance of copper CMP slurries
JP4776269B2 (ja) * 2005-04-28 2011-09-21 株式会社東芝 金属膜ｃｍｐ用スラリー、および半導体装置の製造方法
KR100641348B1 (ko) * 2005-06-03 2006-11-03 주식회사 케이씨텍 Ｃｍｐ용 슬러리와 이의 제조 방법 및 기판의 연마 방법
JP2007088424A (ja) * 2005-08-24 2007-04-05 Jsr Corp 化学機械研磨用水系分散体、該水系分散体を調製するためのキット、化学機械研磨方法、および半導体装置の製造方法
WO2007077886A1 (ja) * 2005-12-27 2007-07-12 Hitachi Chemical Co., Ltd. 金属用研磨液及び被研磨膜の研磨方法

Also Published As

Publication number Publication date
EP2190947A4 (en) 2013-04-24
EP2190947A1 (en) 2010-06-02
TWI434918B (zh) 2014-04-21
KR101305840B1 (ko) 2013-09-23
US20090056231A1 (en) 2009-03-05
JP5960386B2 (ja) 2016-08-02
JP2010538457A (ja) 2010-12-09
WO2009032065A1 (en) 2009-03-12
KR20100065341A (ko) 2010-06-16
CN101796160B (zh) 2013-07-31
TW200927897A (en) 2009-07-01
CN101796160A (zh) 2010-08-04

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